JP2003078187A - 磁界センサ - Google Patents
磁界センサInfo
- Publication number
- JP2003078187A JP2003078187A JP2001316084A JP2001316084A JP2003078187A JP 2003078187 A JP2003078187 A JP 2003078187A JP 2001316084 A JP2001316084 A JP 2001316084A JP 2001316084 A JP2001316084 A JP 2001316084A JP 2003078187 A JP2003078187 A JP 2003078187A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- thin film
- magnetic
- field sensor
- sensor element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 251
- 239000010409 thin film Substances 0.000 claims abstract description 135
- 239000004020 conductor Substances 0.000 claims description 14
- 230000005290 antiferromagnetic effect Effects 0.000 claims description 13
- 239000010408 film Substances 0.000 claims description 8
- 239000002885 antiferromagnetic material Substances 0.000 claims description 5
- 239000000696 magnetic material Substances 0.000 claims description 5
- 230000035945 sensitivity Effects 0.000 abstract description 3
- 238000001514 detection method Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 description 14
- 230000000694 effects Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000004907 flux Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000011800 void material Substances 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 101000777456 Mus musculus Disintegrin and metalloproteinase domain-containing protein 15 Proteins 0.000 description 1
- 229910001260 Pt alloy Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Measuring Magnetic Variables (AREA)
- Hall/Mr Elements (AREA)
Priority Applications (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001316084A JP2003078187A (ja) | 2001-09-05 | 2001-09-05 | 磁界センサ |
| AT01978911T ATE434192T1 (de) | 2000-10-26 | 2001-10-25 | Dünnfilm-magnetfeldsensor |
| DE60139017T DE60139017D1 (de) | 2000-10-26 | 2001-10-25 | Dünnfilm-magnetfeldsensor |
| KR1020027008326A KR100687513B1 (ko) | 2000-10-26 | 2001-10-25 | 박막자계센서 |
| CNB018032648A CN100403048C (zh) | 2000-10-26 | 2001-10-25 | 薄膜磁传感器 |
| TW090126413A TW550394B (en) | 2000-10-26 | 2001-10-25 | Thin-film magnetic field sensor |
| PCT/JP2001/009385 WO2002037131A1 (en) | 2000-10-26 | 2001-10-25 | Thin-film magnetic field sensor |
| EP01978911A EP1329735B1 (en) | 2000-10-26 | 2001-10-25 | Thin-film magnetic field sensor |
| US10/225,794 US6642714B2 (en) | 2000-10-26 | 2002-08-22 | Thin-film magnetic field sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001316084A JP2003078187A (ja) | 2001-09-05 | 2001-09-05 | 磁界センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003078187A true JP2003078187A (ja) | 2003-03-14 |
| JP2003078187A5 JP2003078187A5 (enExample) | 2005-03-17 |
Family
ID=19134150
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001316084A Pending JP2003078187A (ja) | 2000-10-26 | 2001-09-05 | 磁界センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003078187A (enExample) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006066821A (ja) * | 2004-08-30 | 2006-03-09 | Yamaha Corp | 磁気抵抗効果素子を備えた磁気センサ |
| WO2008108387A1 (ja) * | 2007-03-06 | 2008-09-12 | Alps Electric Co., Ltd. | 多感度軸を持つ磁気センサ装置 |
| JP2011027418A (ja) * | 2009-07-21 | 2011-02-10 | Asahi Kasei Electronics Co Ltd | ホール素子 |
| DE102011008704A1 (de) | 2010-01-21 | 2011-09-01 | Daido Tokushuko Kabushiki Kaisha | Dünnfilm-Magnetsensor und Verfahren zu seiner Herstellung |
| DE102011087342A1 (de) * | 2011-11-29 | 2013-05-29 | Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. | Verwendung von flexiblen magnetischen dünnschichtsensorelementen |
| DE102017122123A1 (de) | 2016-09-29 | 2018-03-29 | Daido Steel Co., Ltd. | Dünnfilm-Magnetsensor |
| JP2018179776A (ja) * | 2017-04-13 | 2018-11-15 | 大同特殊鋼株式会社 | 薄膜磁気センサ |
| CN111370570A (zh) * | 2020-03-11 | 2020-07-03 | 武汉科技大学 | 一种垂直电流驱动双层纳米带内横向畴壁振荡的振荡器 |
| WO2025126787A1 (ja) * | 2023-12-14 | 2025-06-19 | アルプスアルパイン株式会社 | 磁気センサ |
-
2001
- 2001-09-05 JP JP2001316084A patent/JP2003078187A/ja active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006066821A (ja) * | 2004-08-30 | 2006-03-09 | Yamaha Corp | 磁気抵抗効果素子を備えた磁気センサ |
| WO2008108387A1 (ja) * | 2007-03-06 | 2008-09-12 | Alps Electric Co., Ltd. | 多感度軸を持つ磁気センサ装置 |
| JP2011027418A (ja) * | 2009-07-21 | 2011-02-10 | Asahi Kasei Electronics Co Ltd | ホール素子 |
| DE102011008704A1 (de) | 2010-01-21 | 2011-09-01 | Daido Tokushuko Kabushiki Kaisha | Dünnfilm-Magnetsensor und Verfahren zu seiner Herstellung |
| US9304176B2 (en) | 2010-01-21 | 2016-04-05 | Daido Tokushuko Kabushiki Kaisha | Thin-film magnetic sensor including a GMR film and method for manufacturing the same |
| DE102011087342A1 (de) * | 2011-11-29 | 2013-05-29 | Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. | Verwendung von flexiblen magnetischen dünnschichtsensorelementen |
| DE102017122123A1 (de) | 2016-09-29 | 2018-03-29 | Daido Steel Co., Ltd. | Dünnfilm-Magnetsensor |
| JP2018179776A (ja) * | 2017-04-13 | 2018-11-15 | 大同特殊鋼株式会社 | 薄膜磁気センサ |
| CN111370570A (zh) * | 2020-03-11 | 2020-07-03 | 武汉科技大学 | 一种垂直电流驱动双层纳米带内横向畴壁振荡的振荡器 |
| WO2025126787A1 (ja) * | 2023-12-14 | 2025-06-19 | アルプスアルパイン株式会社 | 磁気センサ |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
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| A521 | Request for written amendment filed |
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| A131 | Notification of reasons for refusal |
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| A521 | Request for written amendment filed |
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