JP2003060482A - Tuning fork crystal oscillating piece - Google Patents
Tuning fork crystal oscillating pieceInfo
- Publication number
- JP2003060482A JP2003060482A JP2001244186A JP2001244186A JP2003060482A JP 2003060482 A JP2003060482 A JP 2003060482A JP 2001244186 A JP2001244186 A JP 2001244186A JP 2001244186 A JP2001244186 A JP 2001244186A JP 2003060482 A JP2003060482 A JP 2003060482A
- Authority
- JP
- Japan
- Prior art keywords
- vibrating piece
- holes
- crystal vibrating
- arm
- tuning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、水晶振動子を構成
する小型の音叉型水晶振動片に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a small tuning-fork type crystal vibrating piece that constitutes a crystal unit.
【０００２】[0002]
【従来の技術】水晶振動子には多種の振動モードがあ
り、使用目的や用途に応じて使い分けられているが、小
型化が容易な厚みすべり振動モード及び音叉屈曲振動モ
ードの２種類が大半を占めている。このうち、音叉屈曲
振動モードとして用いられる水晶振動子に実装されてい
る水晶振動片１は、図８及び図９（ａ）に示すように、
１枚の薄い水晶板で形成され、図示しないケーシングの
電極端子に支持される四角形状の基部２と、この基部２
から平行に延びる２本の腕部３ａ，３ｂとで略Ｕ字状に
形成され、全体がいわゆる音叉に似た形状をなしてい
る。このような音叉型の水晶振動片１を備えた水晶振動
子は振動周波数が低く、また、発振器に組み込んだ際の
消費電流も低く抑えられるので、腕時計用の時間基準と
して多用されている。2. Description of the Related Art Crystal oscillators have various vibration modes, and they are used properly according to the purpose and purpose of use, but most of them are the thickness-shear vibration mode and the tuning-fork bending vibration mode, which are easy to miniaturize. is occupying. Among them, the crystal vibrating reed 1 mounted on the crystal resonator used as the tuning fork bending vibration mode is, as shown in FIG. 8 and FIG.
A rectangular base portion 2 formed of one thin crystal plate and supported by an electrode terminal of a casing (not shown), and the base portion 2
And two arms 3a and 3b extending in parallel with each other are formed in a substantially U shape, and the whole has a shape similar to a so-called tuning fork. A crystal resonator including such a tuning-fork type crystal vibrating piece 1 has a low vibration frequency and can also suppress current consumption when incorporated in an oscillator, and is therefore widely used as a time reference for wrist watches.
【０００３】前記水晶振動片１は、水晶原石のＺ板から
１°Ｘ軸回転させた角度でカットして形成されたもので
ある。この水晶振動片１は、例えば、３２．７６８ＫＨ
ｚを基準の振動周波数として使用する場合は、腕部３
ａ，３ｂの長さＬ１＝２．３ｍｍに対して、各腕部３
ａ，３ｂの幅Ｗ１＝０．２２ｍｍに設定される。また、
前記各腕部３ａ，３ｂの基端部４から各腕部３ａ，３ｂ
の長手方向の沿ってそれぞれ極性の異なる励振電極５
ａ，５ｂが形成され、それぞれが基部２の両隅に設けら
れた電極端部６ａ，６ｂに導通接続されている。The quartz crystal vibrating piece 1 is formed by cutting from a Z plate of a raw quartz stone at an angle of 1 ° X-axis rotation. This crystal vibrating piece 1 is, for example, 32.768 KH.
When using z as the reference vibration frequency, the arm 3
a, 3b length L1 = 2.3 mm, each arm 3
The width W1 of a and 3b is set to 0.22 mm. Also,
From the base end 4 of each arm 3a, 3b to each arm 3a, 3b
Excitation electrodes 5 having different polarities along the longitudinal direction of the
a and 5b are formed, and are respectively electrically connected to the electrode end portions 6a and 6b provided at both corners of the base portion 2.
【０００４】このような水晶振動片１にあっては、前記
腕部３ａ，３ｂが振動するときの共振運動を励振電極５
ａ，５ｂによって電気信号に変換し、これを固有の振動
周波数としている。In the crystal vibrating piece 1 as described above, a resonance motion when the arms 3a and 3b vibrate causes the exciting electrode 5 to move.
It is converted into an electric signal by a and 5b, and this is used as a natural vibration frequency.
【０００５】上述したように、前記音叉型の水晶振動片
１は、腕部３ａ，３ｂの長さ及び幅のサイズによって固
有の振動周波数が設定され、以下の関係式（数式１）が
成り立つ。As described above, in the tuning fork type crystal vibrating piece 1, a unique vibration frequency is set according to the length and width of the arms 3a and 3b, and the following relational expression (Equation 1) is established.
【０００６】[0006]
【数１】 ここで、Ｆ：振動周波数（Ｈｚ） Ｌ：腕部の長さ（ｍ） Ｗ：腕部の幅 （ｍ） Ｃ´22：弾性スチフネス定数（Ｎ／ｍ２） ρ：水晶の密度（ｋｇ／ｍ３） である。[Equation 1] Here, F: oscillation frequency (Hz) L: length of the arm portion (m) W: the arm portion in the width (m) C'22: elastic stiffness constant (N / m 2) ρ: crystal density (kg / m 3 ).
【０００７】従って、前記図９（ａ）の水晶振動片１を
要求仕様に基づいて設計変更等する場合は前記（数式
１）の下で各パラメータが決定される。それ故、図９
（ｂ）に示したように、前記水晶振動片１の振動周波数
３２．７６８ＫＨｚは固定のままにして水晶振動片１１
のように小型化した場合には、例えば腕部１３ａ，１３
ｂの長さＬ２を１．９ｍｍ程度に短縮すると、腕部１３
ａ，１３ｂの幅Ｗ２は０.１５ｍｍと極めて幅狭いもの
となる。Therefore, when the design of the crystal vibrating reed 1 shown in FIG. 9 (a) is changed based on the required specifications, each parameter is determined under the above (Formula 1). Therefore, FIG.
As shown in (b), the vibration frequency 32.768 KHz of the crystal vibrating piece 1 remains fixed and the crystal vibrating piece 11 is kept.
When the size is reduced as shown in FIG.
When the length L2 of b is shortened to about 1.9 mm, the arm 13
The width W2 of a and 13b is 0.15 mm, which is extremely narrow.
【０００８】図１０は、前記図９（ａ）の水晶振動片１
をＥ−Ｅ線に沿って切断したときの断面形状を示したも
のである。図に示したように、腕部３ａ，３ｂの表面に
形成した励振電極５ａ，５ｂの電界の向きとＸ軸方向に
向かう水晶結晶の分極方向が略直交して作用している。FIG. 10 shows the crystal vibrating piece 1 of FIG. 9 (a).
2 shows a cross-sectional shape when the is cut along the line EE. As shown in the figure, the directions of the electric fields of the excitation electrodes 5a and 5b formed on the surfaces of the arms 3a and 3b and the polarization direction of the quartz crystal acting in the X-axis direction act substantially orthogonally.
【０００９】[0009]
【発明が解決しようとする課題】上述したように、上記
水晶振動片１と水晶振動片１１との関係の如く、振動周
波数はそのままで、サイズのみ小型化するためには、上
記（数式１）からも明らかなように、腕部３ａ，３ｂの
長さＬ１の縮小比に対して幅Ｗ１を２乗で縮小しなけれ
ばならないことになる。例えば、Ｌ１＝３ｍｍからＬ２
＝２ｍｍに縮小する場合は、Ｗ１＝２５０μｍからＷ２
＝１１１μｍにしなければならない。しかしながら、こ
の腕部の幅Ｗは、水晶振動子としての品質を保つために
は最低でも２００μｍ以上が必要とされており、２００
μｍ以下になってしまうと、励振電極５ａ，５ｂの形成
幅も一緒に狭くなることから電界効率が低下してしま
い、それによって等価抵抗（Ｒ１）が高くなって、最終
製品となる水晶振動子の品質を悪化させる要因ともなっ
ていた。加えて、腕部１３ａ，１３ｂの幅Ｗ２を狭く形
成するための加工精度の維持や加工された腕部の十分な
強度を確保するのが困難であることから、結果的に水晶
振動片を小型化することに限界があった。As described above, in order to downsize only the size while keeping the vibration frequency as in the relationship between the crystal vibrating piece 1 and the crystal vibrating piece 11, the above (Formula 1) is used. As is clear from the above, the width W1 must be reduced by the square of the reduction ratio of the length L1 of the arms 3a and 3b. For example, L1 = 3 mm to L2
= 2 mm, W1 = 250 μm to W2
= 111 μm. However, the width W of the arm is required to be 200 μm or more at least in order to maintain the quality as a crystal unit.
When the thickness is less than μm, the formation widths of the excitation electrodes 5a and 5b are also narrowed, so that the electric field efficiency is lowered, and the equivalent resistance (R1) is increased by that, and the crystal oscillator as the final product is obtained. Was also a factor that deteriorates the quality of. In addition, since it is difficult to maintain the processing accuracy for forming the width W2 of the arm portions 13a and 13b narrow and to secure sufficient strength of the processed arm portion, as a result, the crystal vibrating piece is downsized. There was a limit to the change.
【００１０】そこで、本発明の目的は、腕部の幅を狭く
することなく小型化を達成することのできる音叉型水晶
振動片を提供することにある。Therefore, an object of the present invention is to provide a tuning-fork type crystal vibrating piece which can be miniaturized without narrowing the width of the arm portion.
【００１１】[0011]
【課題を解決するための手段】上記課題を解決するため
に、本発明の請求項１に係る音叉型水晶振動片は、基部
と、この基部から延びる一対の腕部とを備えた音叉型水
晶振動片において、前記各腕部に貫通孔が設けられてい
ることを特徴とする。In order to solve the above-mentioned problems, a tuning-fork type crystal vibrating piece according to claim 1 of the present invention comprises a tuning-fork type quartz crystal having a base and a pair of arms extending from the base. In the vibrating piece, a through hole is provided in each of the arm portions.
【００１２】この発明によれば、励振電極が形成された
各腕部に貫通孔を設けたことによって、腕部のバネ定数
を小さくすることができる。そのために、水晶振動片の
腕部の幅を狭くすること無く腕部の長さを縮小するだけ
で所定の振動周波数が得られることになり、水晶振動片
全体の小型化が達成される。また、腕部の幅を狭くしな
くても良いので、励振電極の形成面が広くなり等価抵抗
（Ｒ１）を低く抑えることができると共に、腕部の加工
精度の維持や強度を確保することができる。According to the present invention, the spring constant of the arm portion can be reduced by providing the through hole in each arm portion on which the excitation electrode is formed. Therefore, a predetermined vibration frequency can be obtained only by reducing the length of the arm portion of the crystal vibrating piece without narrowing the width of the arm portion of the crystal vibrating piece, and the crystal vibrating piece as a whole can be miniaturized. Further, since it is not necessary to reduce the width of the arm portion, the surface on which the excitation electrode is formed can be widened, the equivalent resistance (R1) can be suppressed low, and the processing accuracy and strength of the arm portion can be maintained. it can.
【００１３】本発明の請求項２に係る音叉型水晶振動片
は、基部と、この基部から延びる一対の腕部とを備えた
音叉型水晶振動片において、前記各腕部に貫通孔を設け
ると共に、該貫通孔の内側面に励振電極を形成したこと
を特徴とする。A tuning fork type crystal vibrating piece according to a second aspect of the present invention is a tuning fork type crystal vibrating piece having a base portion and a pair of arm portions extending from the base portion, and a through hole is provided in each of the arm portions. An excitation electrode is formed on the inner surface of the through hole.
【００１４】この発明によれば、貫通孔の内側面に励振
電極を形成したことによって、水晶結晶の分極方向（Ｘ
軸方向）と平行に電界が作用するので、電界効率が上が
り、等価抵抗（Ｒ１）が低く抑えられる。また、振動に
よる歪みが集中する貫通孔に励振電極が形成されている
ので、Ｒ１をさらに低減させることができる。According to the present invention, since the excitation electrode is formed on the inner surface of the through hole, the polarization direction (X
Since the electric field acts parallel to the (axial direction), the electric field efficiency is increased and the equivalent resistance (R1) is suppressed low. Further, since the excitation electrode is formed in the through hole where the strain due to vibration is concentrated, R1 can be further reduced.
【００１５】本発明の請求項３に係る発明は、請求項１
又は２記載の音叉型水晶振動片において、前記貫通孔
が、各腕部の基端部近傍に形成されたことを特徴とす
る。The invention according to claim 3 of the present invention is claim 1
Alternatively, in the tuning-fork type crystal vibrating piece described in 2, the through hole is formed in the vicinity of the base end portion of each arm portion.
【００１６】この発明によれば、振動時の歪みが最大と
なる腕部の基端部に貫通孔を設けたことによって、振動
周波数を最も効果的に低下させることができる。このた
め、少ない貫通孔で水晶振動片の小型化を図ることがで
きる。According to the present invention, the vibration frequency can be reduced most effectively by providing the through hole at the base end of the arm that maximizes the strain during vibration. Therefore, the crystal vibrating piece can be downsized with a small number of through holes.
【００１７】本発明の請求項４に係る発明は、請求項１
又は２記載の音叉型水晶振動片において、前記貫通孔
が、腕部の基端部から各腕部の長手方向に沿って複数形
成されたことを特徴とする。The invention according to claim 4 of the present invention is claim 1
Alternatively, in the tuning-fork type crystal vibrating piece described in 2, a plurality of the through holes are formed from the base end portion of the arm portion along the longitudinal direction of each arm portion.
【００１８】この発明によれば、腕部の基端部から長手
方向に沿って複数の貫通孔を設けたことで、バネ定数を
より小さくすることができる。According to the present invention, the spring constant can be further reduced by providing the plurality of through holes along the longitudinal direction from the base end portion of the arm portion.
【００１９】本発明の請求項５に係る発明は、請求項１
乃至３のいずれかに記載の音叉型水晶振動片において、
前記貫通孔が、円形状又は多角形状であることを特徴と
する。The invention according to claim 5 of the present invention is claim 1
In the tuning fork type quartz vibrating piece according to any one of 1 to 3,
The through hole has a circular shape or a polygonal shape.
【００２０】この発明によれば、前記貫通孔の形状を円
形に設定する場合は、比較的容易に孔あけ加工を行うこ
とができ、四角形等の角形状にした場合は、内部に設け
る励振電極を形成する向きを水晶結晶の分極方向に合わ
せることができるので、電界効率を有効に高めることが
できる。According to the present invention, when the shape of the through hole is set to be circular, the boring process can be performed relatively easily, and when the shape of the through hole is set to be rectangular such as a square, the excitation electrode provided inside is formed. Since the direction of forming the crystal can be matched with the polarization direction of the quartz crystal, the electric field efficiency can be effectively increased.
【００２１】[0021]
【発明の実施の形態】以下、添付図面に基づいて本発明
に係る音叉型水晶振動片の実施形態を詳細に説明する。
図１は本発明の第１実施形態における水晶振動片の斜視
図、図２（ａ）は前記水晶振動片のＺ軸平面図、図２
（ｂ）は前記水晶振動片をＡ−Ａ線に沿って切断した断
面図である。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a tuning fork type crystal vibrating piece according to the present invention will be described below in detail with reference to the accompanying drawings.
1 is a perspective view of a crystal vibrating piece according to the first embodiment of the present invention, FIG. 2A is a Z-axis plan view of the crystal vibrating piece, and FIG.
(B) is sectional drawing which cut | disconnected the said quartz-crystal vibrating piece along the AA line.
【００２２】図１及び図２に示したように、第１実施形
態に係る水晶振動片２１は、電気軸をＸ軸、機械軸をＹ
軸、光軸をＺ軸とした水晶原石の直交座標系において、
Ｚ軸平面から１°Ｘ軸方向に回転させたカット角で板状
に切り出され、音叉形に加工された水晶板である。この
水晶振動片２１は、基本的には従来例と同様、図示しな
いケーシング内の電極端子に支持される四角形状の基部
２２と、この基部２２から平行に延びる一対の腕部２３
ａ，２３ｂとで略Ｕ字状に形成され、全体が音叉形状を
なしている。前記基部２２は、一対の電極端部２６ａ，
２６ｂを備え、この電極端部２６ａ，２６ｂがケース
（図示せず）の電極端子に接続されると共に、この基部
２２で水晶振動片２１を片持支持する構造である。As shown in FIGS. 1 and 2, in the crystal vibrating piece 21 according to the first embodiment, the electric axis is the X axis and the mechanical axis is the Y axis.
In the orthogonal coordinate system of the rough crystal with the axis and the optical axis as the Z axis,
It is a crystal plate that is cut into a plate shape at a cut angle rotated by 1 ° from the Z-axis plane in the X-axis direction and processed into a tuning fork shape. This quartz crystal vibrating piece 21 is basically similar to the conventional example, and a rectangular base portion 22 supported by an electrode terminal in a casing (not shown) and a pair of arm portions 23 extending in parallel from the base portion 22.
a and 23b are formed in a substantially U-shape, and the entire shape is a tuning fork. The base portion 22 includes a pair of electrode end portions 26a,
26b, the electrode ends 26a and 26b are connected to the electrode terminals of the case (not shown), and the base 22 supports the crystal vibrating piece 21 in a cantilever manner.
【００２３】前記腕部２３ａ，２３ｂは、基部２２から
一定の隙間を空けて平行に延び、各腕部２３ａ，２３ｂ
の表面及び裏面には極性の異なる励振電極２５ａ，２５
ｂが形成されている。この励振電極２５ａ，２５ｂは、
腕部２３ａ，２３ｂの基端部２４から長手方向に沿って
中央部付近まで形成されるが、この励振電極２５ａ，２
５ｂを貫通するようにして、略正方形の貫通孔２７ａ，
２７ｂが４つずつ並設されている。これらの貫通孔２７
ａ，２７ｂは、腕部２３ａ，２３ｂが振動するときのバ
ネ定数を小さくする目的で形成されるもので、歪み率が
最大となる基端部２４付近から前記各腕部２３ａ，２３
ｂの長手方向に沿って等間隔に形成され、長手方向に４
つが均等配置される。各貫通孔２７ａ，２７ｂの大きさ
はいずれも同一であり、また左右の貫通孔２７ａ，２７
ｂの開設位置も同じである。本実施形態では、一定の動
作仕様を満たすために、後述する設計条件を元にシミュ
レーションによって各部のサイズを求めた。The arm portions 23a, 23b extend in parallel from the base portion 22 with a certain gap therebetween, and each arm portion 23a, 23b is extended.
The excitation electrodes 25a, 25 having different polarities on the front and back surfaces of the
b is formed. The excitation electrodes 25a and 25b are
The excitation electrodes 25a, 2 are formed from the base end portions 24 of the arm portions 23a, 23b to the vicinity of the central portion along the longitudinal direction.
5b so as to penetrate the through hole 27a having a substantially square shape,
Four 27b are arranged side by side. These through holes 27
The a and 27b are formed for the purpose of reducing the spring constant when the arm portions 23a and 23b vibrate, and the arm portions 23a and 23b are provided from the vicinity of the base end portion 24 where the strain rate is maximum.
formed at equal intervals along the longitudinal direction of b, and
One is evenly distributed. The through holes 27a and 27b have the same size, and the left and right through holes 27a and 27b are the same.
The opening position of b is also the same. In the present embodiment, in order to satisfy a certain operation specification, the size of each part was obtained by simulation based on design conditions described later.
【００２４】以下、振動周波数＝３２．７６８ＫＨｚと
したときの設計例による各パラメータの値を示す。
腕部（２３ａ，２３ｂ）の長さ Ｌ３＝１．９ｍｍ、
幅 Ｗ３＝０．２２ｍｍ、
貫通孔（２７ａ，２７ｂ）の個数 各４個
口径 ＝１６０μｍ、
間隔 ＝３０μｍ
なお、水晶振動片２１の厚みは振動周波数に関係しない
ので、５０〜２００μｍ程度の範囲に設定される。The value of each parameter according to the design example when the vibration frequency = 32.768 KHz is shown below. Length of arm portions (23a, 23b) L3 = 1.9 mm, width W3 = 0.22 mm, number of through holes (27a, 27b) 4 each Diameter = 160 μm, Interval = 30 μm Thickness of crystal vibrating piece 21 Is not related to the vibration frequency, so is set in the range of about 50 to 200 μm.
【００２５】この結果、図９（ａ）に示した従来の水晶
振動片１では腕部３ａ，３ｂの長さがＬ１＝２．３ｍｍ
であったものが、図１及び図２に示した本発明の水晶振
動片２１ではＬ３＝１．９ｍｍになり、腕部２３ａ，２
３ｂの長さを約０．４ｍｍ短縮することができた。な
お、腕部２３ａ，２３ｂの幅Ｗ３は、従来の水晶振動片
１の腕部３ａ，３ｂの幅Ｗ１と変わらずに０．２２ｍｍ
のままであり、その他の振動周波数等の特性値にも変更
はない。また、腕部２３ａ，２３ｂの幅Ｗ３を十分に広
く確保できたことで、等価抵抗（Ｒ１）の増加も抑えら
れることになる。As a result, in the conventional crystal vibrating piece 1 shown in FIG. 9A, the lengths of the arms 3a and 3b are L1 = 2.3 mm.
In the crystal vibrating piece 21 of the present invention shown in FIGS. 1 and 2, L3 = 1.9 mm, and the arm portions 23a, 2
It was possible to reduce the length of 3b by about 0.4 mm. The width W3 of the arms 23a and 23b is 0.22 mm, which is the same as the width W1 of the arms 3a and 3b of the conventional crystal vibrating piece 1.
No change is made to other characteristic values such as the vibration frequency. In addition, since the width W3 of the arms 23a and 23b can be sufficiently widened, the increase in the equivalent resistance (R1) can be suppressed.
【００２６】図３は水晶振動片２１に設ける貫通孔２７
ａ，２７ｂの個数と振動周波数との関係を有限要素法の
シミュレータ（ＡＮＳＹＳ ＥＤ ５．６）を用いて計
算したグラフである。グラフの横軸に示した孔の数は、
それぞれの腕部２３ａ，２３ｂの基端部２４の近傍から
腕部２３ａ，２３ｂの長手方向に一列に順に増加させた
ものである。また、貫通孔２７ａ，２７ｂの口径は全て
一辺が１６０μｍの正方形状とし、均等な間隔で形成す
るものとした。このシミュレーション結果で見ると、孔
の数が増えるのにしたがって振動周波数が減少し、４，
５個の所で３２．７６８ＫＨｚに近づくことが確認でき
る。ただし、６個以上設けた場合は、逆に振動周波数が
なだらかに上昇している。これは、腕部２３ａ，２３ｂ
の先端付近は重りとなって振動周波数を下げる効果があ
るが、この近辺にまで貫通孔２７ａ，２７ｂを設ける
と、重りとして効果が薄れ、バネ定数が逆に大きくなる
ためである。したがって、水晶振動片２１の振動周波数
は、腕部２３ａ，２３ｂの基端部２４から長手方向の略
中間にかけて４，５個の貫通孔２７ａ，２７ｂを形成し
たときが最も低くなる。FIG. 3 shows a through hole 27 provided in the crystal vibrating piece 21.
It is the graph which calculated the relationship between the number of a and 27b and the vibration frequency using the simulator (ANSYS ED 5.6) of the finite element method. The number of holes shown on the horizontal axis of the graph is
The number of arms 23a and 23b is increased in the order from the vicinity of the base end 24 to the lengthwise direction of the arms 23a and 23b. In addition, the diameters of the through holes 27a and 27b are all square shapes with one side of 160 μm, and are formed at equal intervals. According to this simulation result, the vibration frequency decreases as the number of holes increases.
It can be confirmed that it approaches 32.768 KHz at 5 points. However, when six or more are provided, on the contrary, the vibration frequency gently increases. This is the arm 23a, 23b
This is because the vicinity of the tip becomes a weight and has the effect of lowering the vibration frequency, but if the through holes 27a and 27b are provided even in the vicinity of this, the effect as a weight becomes weaker and the spring constant increases conversely. Therefore, the vibration frequency of the crystal vibrating piece 21 is lowest when the four or five through holes 27a and 27b are formed from the base end portion 24 of the arm portions 23a and 23b to approximately the middle in the longitudinal direction.
【００２７】図４（ａ）は本発明の第２実施形態の水晶
振動片３１のＺ軸平面図、同じく図４（ｂ）は前記水晶
振動片３１をＢ−Ｂ線に沿って切断した断面図である。
本例の水晶振動片３１は、前記水晶振動片２１と同様
に、四角形状の基部３２と、この基部３２から平行に延
びる一対の腕部３３ａ，３３ｂとで略Ｕ字状に形成さ
れ、この腕部３３ａ，３３ｂの表裏面に形成された励振
電極３５ａ，３５ｂを貫通するようにして、複数の貫通
孔３７ａ，３７ｂが形成されるが、これらの貫通孔３７
ａ，３７ｂの形状は円形のものである。この円形の貫通
孔３７ａ，３７ｂも前記実施形態と同様、歪み率が最大
となる基端部３４付近から前記各腕部３３ａ，３３ｂの
長手方向に沿って等間隔に形成され、長手方向に４つが
均等配置される。各貫通孔３７ａ，３７ｂの大きさはい
ずれも同一であり、また左右の貫通孔３７ａ，３７ｂの
開設位置も同じである。FIG. 4A is a Z-axis plan view of the crystal vibrating piece 31 of the second embodiment of the present invention, and FIG. 4B is a sectional view of the crystal vibrating piece 31 taken along the line BB. It is a figure.
Like the crystal vibrating piece 21, the crystal vibrating piece 31 of the present example is formed in a substantially U-shape with a square base 32 and a pair of arms 33a and 33b extending in parallel from the base 32. A plurality of through holes 37a and 37b are formed so as to penetrate the excitation electrodes 35a and 35b formed on the front and back surfaces of the arm portions 33a and 33b.
The shapes of a and 37b are circular. The circular through-holes 37a and 37b are also formed at equal intervals along the longitudinal direction of the arm portions 33a and 33b from the vicinity of the base end portion 34 where the strain rate is maximum, as in the above-described embodiment, and the circular through holes 37a and 37b are 4 One is evenly distributed. The through holes 37a and 37b have the same size, and the left and right through holes 37a and 37b have the same opening position.
【００２８】この実施形態における水晶振動片３１につ
いて、前記第１実施形態の水晶振動片２１と等価な特性
を得るために、前記貫通孔３７ａ，３７ｂの個数及び大
きさをシミュレーションによって求めた。その結果、貫
通孔３７ａ，３７ｂの直径は１８０μｍ、基端部３４か
ら各腕部３３ａ，３３ｂの長手方向に沿って約２０μｍ
間隔で４つを等間隔に設けることによって前記水晶振動
片２１と等価な特性が得られることが確認できた。な
お、貫通孔３７ａ，３７ｂ以外の腕部３３ａ，３３ｂの
長さＬ４及び幅Ｗ４の形状及び大きさは前記第１実施形
態の水晶振動片２１と同じである。With respect to the crystal vibrating piece 31 in this embodiment, the number and size of the through holes 37a and 37b were obtained by simulation in order to obtain characteristics equivalent to those of the crystal vibrating piece 21 in the first embodiment. As a result, the diameters of the through holes 37a and 37b are 180 μm, and about 20 μm from the base end portion 34 along the longitudinal direction of the arm portions 33a and 33b.
It has been confirmed that by equipping four at equal intervals, characteristics equivalent to those of the crystal vibrating piece 21 can be obtained. The shape and size of the length L4 and the width W4 of the arm portions 33a and 33b other than the through holes 37a and 37b are the same as those of the quartz crystal vibrating piece 21 of the first embodiment.
【００２９】上記第１実施形態及び第２実施形態におけ
る貫通孔２７ａ，２７ｂ及び３７ａ，３７ｂの大きさに
よる周波数変化のシミュレーションの結果を図５に示
す。正方形の貫通孔２７ａ，２７ｂ及び円形の貫通孔３
７ａ，３７ｂは、内径寸法が１００μｍ近辺では両者と
も振動周波数が約４６ＫＨｚで変わらない。また、内径
寸法が大きくなるにしたがって両者とも徐々に振動周波
数が下降し始めるが、正方形の貫通孔２７ａ，２７ｂの
方が急勾配で下がる一方、円形の貫通孔３７ａ，３７ｂ
の方は下降曲線がなだらかである。小型化を優先する場
合には振動周波数が下がりやすい四角形の貫通孔２７
ａ，２７ｂの方が適しているが，微細加工の容易さでは
円形の貫通孔３７ａ，３７ｂが適している。このため、
貫通孔の形状は設計時点で必要とされる水晶振動片のサ
イズと周波数精度に応じて適宜に選択される。FIG. 5 shows the result of the simulation of the frequency change depending on the size of the through holes 27a, 27b and 37a, 37b in the first and second embodiments. Square through holes 27a and 27b and circular through hole 3
The vibration frequencies of 7a and 37b are about 46 KHz and do not change when the inner diameter is around 100 μm. Further, as the inner diameter increases, the vibration frequencies of both of them gradually start to drop, but the square through holes 27a and 27b drop steeperly, while the circular through holes 37a and 37b.
The descending curve is gentler for. When the miniaturization is prioritized, the rectangular through hole 27 where the vibration frequency is likely to decrease
Although a and 27b are more suitable, circular through holes 37a and 37b are more suitable in terms of ease of fine processing. For this reason,
The shape of the through hole is appropriately selected according to the size and frequency accuracy of the quartz crystal resonator element required at the time of designing.
【００３０】図６（ａ）は本発明の第３実施形態の水晶
振動片４１のＺ軸平面図、同じく図６（ｂ）は前記水晶
振動片４１をＣ−Ｃ線に沿って切断した断面図である。
この実施形態に係る水晶振動片４１は、前記第１実施形
態の水晶振動片２１と同様に、基端部４４の近傍から各
腕部４３ａ，４３ｂの長手方向に沿って、それぞれ４つ
ずつの正方形の貫通孔４７ａ，４７ｂが設けられている
が、これら貫通孔４７ａ，４７ｂの内側面にも励振電極
４８ａ，４８ｂが形成された構成となっている。これら
孔内の励振電極４８ａ，４８ｂは、各腕部４３ａ，４３
ｂの表面側に形成されている励振電極４５ａ，４５ｂか
らそれぞれ連続して延びており、且つ電極端部４６ａ，
４６ｂとも導通している。このように、貫通孔４７ａ，
４７ｂの内側面にまで励振電極４８ａ，４８ｂを形成し
たことによって、図７に示すようなＸ軸方向に沿った真
直ぐな電界（矢線で示す）が発生することになる。即
ち、図７に示したように、水晶振動片４１の貫通孔４７
ａ，４７ｂを断面形状で見た場合、貫通孔４７ａ，４７
ｂ内の励振電極４８ａ，４８ｂによって発生した電界の
向き（矢線で示す）と、水晶結晶の分極方向であるＸ軸
とが平行になっている。これに対して、前記図８及び図
９で示したように、貫通孔を設けずに腕部３ａ，３ｂの
表面にのみ励振電極５ａ，５ｂを形成した従来の水晶振
動片１では、励振電極５ａ，５ｂの電界の向きとＸ軸方
向に向かう水晶結晶の分極方向が直交している。このこ
とから、貫通孔４７ａ，４７ｂの内側面に励振電極４８
ａ，４８ｂを形成した水晶振動片４１の方が電界効率の
点で良好な特性が得られる。また、振動時においては、
歪みが貫通孔４７ａ，４７ｂの周辺に集中するため、さ
らに電界効率が高くなって等価抵抗（Ｒ１）の低減化が
図られる。なお、前記第２実施形態で示したような、円
形の貫通孔３７ａ，３７ｂの内部に励振電極を設けても
同様な効果が得られるものである。FIG. 6A is a Z-axis plan view of a crystal vibrating piece 41 according to a third embodiment of the present invention, and FIG. 6B is a sectional view of the crystal vibrating piece 41 taken along line CC. It is a figure.
The crystal vibrating piece 41 according to this embodiment includes four crystal vibrating pieces 41 in the same manner as the crystal vibrating piece 21 of the first embodiment, from the vicinity of the base end portion 44 along the longitudinal direction of the arm portions 43a and 43b. Although the square through holes 47a and 47b are provided, the excitation electrodes 48a and 48b are also formed on the inner side surfaces of the through holes 47a and 47b. The excitation electrodes 48a and 48b in these holes are provided in the respective arm portions 43a and 43b.
the excitation electrodes 45a and 45b formed on the front surface side of b, respectively, and continuously extending from the excitation electrodes 45a and 45b.
It is also conductive with 46b. In this way, the through holes 47a,
By forming the excitation electrodes 48a and 48b even on the inner surface of 47b, a straight electric field (indicated by an arrow) along the X-axis direction as shown in FIG. 7 is generated. That is, as shown in FIG. 7, the through hole 47 of the crystal vibrating piece 41 is used.
When a and 47b are viewed in cross section, the through holes 47a and 47b
The direction of the electric field (indicated by the arrow) generated by the excitation electrodes 48a and 48b in b is parallel to the X axis that is the polarization direction of the quartz crystal. On the other hand, as shown in FIGS. 8 and 9, in the conventional quartz resonator blank 1 in which the excitation electrodes 5a and 5b are formed only on the surfaces of the arms 3a and 3b without providing the through holes, The directions of the electric fields of 5a and 5b and the polarization direction of the crystal in the X-axis direction are orthogonal to each other. From this, the excitation electrode 48 is formed on the inner surface of the through holes 47a and 47b.
The crystal vibrating piece 41 formed with a and 48b has better characteristics in terms of electric field efficiency. Also, during vibration,
Since the strain is concentrated around the through holes 47a and 47b, the electric field efficiency is further increased and the equivalent resistance (R1) is reduced. The same effect can be obtained by providing the excitation electrodes inside the circular through holes 37a and 37b as shown in the second embodiment.
【００３１】上記第１乃至第３実施形態における水晶振
動片２１，３１，４１は、水晶原石から切り出された水
晶板を音叉型に打抜き加工する際に、腕部の貫通孔も同
時に形成することができる。特に隣接する貫通孔の間隔
を狭めて開設したり、貫通孔の大きさを揃えて形成する
必要があることから、パウダービーム加工やエッチング
による抜き加工等の微細加工技術を利用するのが望まし
い。また、第３実施形態のように、腕部４３ａ，４３ｂ
に形成された貫通孔４７ａ，４７ｂの内側面に励振電極
４８ａ，４８ｂを形成するには加熱蒸着法やスパッタ法
等によって金属電極膜を形成することができる。In the crystal vibrating pieces 21, 31, 41 of the first to third embodiments, the through hole of the arm is also formed at the same time when the crystal plate cut out from the crystal rough is punched into a tuning fork shape. You can In particular, it is desirable to use a fine processing technique such as powder beam processing or punching processing by etching, since it is necessary to open the adjacent through holes with a narrow interval or to form the through holes with the same size. In addition, as in the third embodiment, the arm portions 43a and 43b
In order to form the excitation electrodes 48a and 48b on the inner surfaces of the through holes 47a and 47b formed in, the metal electrode film can be formed by a heating vapor deposition method, a sputtering method, or the like.
【００３２】なお、上述した実施形態では水晶振動片２
１，４１に正方形の貫通孔２７ａ，２７ｂ及び４７ａ，
４７ｂを形成した場合について説明したが、設計上規定
される面積比であれば、正方形以外にも長方形や六角
形、八角形のような様々な形状の多角形の貫通孔を形成
することができる。同様に、円形の貫通孔３７ａ，３７
ｂの場合にも真円形以外に様々な形状の楕円形の貫通孔
を形成することができる。ただし、音叉型の水晶振動子
にあっては、双方の腕部２３ａ，２３ｂあるいは３３
ａ，３３ｂの共振現象によって安定した振動を行わせて
いるので、双方のバランスを考慮しなければならない。
このため、腕部２３ａ，２３ｂあるいは３３ａ，３３ｂ
に形成する貫通孔は左右均等に配設するのが好ましい。In the above embodiment, the crystal vibrating piece 2 is used.
1, 41 have square through holes 27a, 27b and 47a,
Although the case where 47b is formed has been described, polygonal through-holes of various shapes such as rectangle, hexagon, octagon, etc. other than square can be formed as long as the area ratio is designed. . Similarly, the circular through holes 37a, 37
Also in the case of b, elliptical through holes of various shapes other than the perfect circle can be formed. However, in the tuning fork type crystal unit, both arm portions 23a, 23b or 33
Since the stable vibration is generated by the resonance phenomenon of a and 33b, it is necessary to consider the balance between the two.
Therefore, the arms 23a, 23b or 33a, 33b
It is preferable that the through-holes formed in 2 are evenly arranged on the left and right.
【００３３】[0033]
【発明の効果】以上説明したように、本発明の音叉型水
晶振動片によれば、励振電極が形成された各腕部に貫通
孔を設けたので、腕部のバネ定数を小さくすることがで
きた。そのために、水晶振動片の腕部の幅を狭くするこ
と無く腕部の長さを縮小するだけで所定の振動周波数が
得られることになり、水晶振動片全体の小型化が達成さ
れた。また、腕部の幅を狭くしなくても良いので、励振
電極の面積が広くなり等価抵抗（Ｒ１）を低く抑えるこ
とができると共に、腕部の加工精度の維持や強度を確保
することができた。As described above, according to the tuning-fork type crystal vibrating piece of the present invention, since the through-holes are provided in each arm portion where the excitation electrode is formed, the spring constant of the arm portion can be reduced. did it. Therefore, a predetermined vibration frequency can be obtained only by reducing the length of the arm portion of the crystal vibrating piece without narrowing the width of the arm portion of the crystal vibrating piece, and the miniaturization of the entire crystal vibrating piece is achieved. Further, since it is not necessary to narrow the width of the arm portion, the area of the excitation electrode is widened, the equivalent resistance (R1) can be suppressed low, and the machining accuracy of the arm portion can be maintained and the strength can be secured. It was
【００３４】また、貫通孔の内側面に励振電極を形成し
た場合には、水晶結晶の分極方向（Ｘ軸方向）と平行に
電界が掛かるので、電界効率が上がり、等価抵抗（Ｒ
１）が低く抑えられる。また、振動による歪みが集中す
る貫通孔に励振電極が形成されているので、Ｒ１をさら
に低減することができる。Further, when the excitation electrode is formed on the inner surface of the through hole, an electric field is applied in parallel with the polarization direction (X-axis direction) of the quartz crystal, so that the electric field efficiency is increased and the equivalent resistance (R
1) can be kept low. Further, since the excitation electrode is formed in the through hole where the strain due to vibration is concentrated, R1 can be further reduced.
【００３５】さらに、振動時の歪みが最大となる腕部の
基端部に貫通孔を設けたことによって、振動周波数を最
も効果的に低下させることができる。このため、少ない
貫通孔で水晶振動片の小型化を図ることができる。ま
た、腕部の基端部から長手方向に沿って複数の貫通孔を
一定間隔ごとに設けたので、バネ定数をより小さくする
ことができた。Furthermore, the vibration frequency can be most effectively reduced by providing the through hole at the base end portion of the arm portion that maximizes the strain during vibration. Therefore, the crystal vibrating piece can be downsized with a small number of through holes. Further, since the plurality of through holes are provided at regular intervals along the longitudinal direction from the base end portion of the arm portion, the spring constant can be further reduced.
【図１】本発明に係る音叉型水晶振動片の第１実施形態
を示す斜視図である。FIG. 1 is a perspective view showing a first embodiment of a tuning-fork type crystal vibrating piece according to the present invention.
【図２】上記音叉型水晶振動片の平面図及び断面図であ
る。FIG. 2 is a plan view and a cross-sectional view of the tuning fork type crystal vibrating piece.
【図３】上記音叉型水晶振動片に設ける貫通孔の個数と
振動周波数との関係を示すグラフである。FIG. 3 is a graph showing the relationship between the number of through holes provided in the tuning fork type quartz vibrating piece and the vibration frequency.
【図４】本発明に係る音叉型水晶振動片の第２実施形態
を示す平面図及び断面図である。FIG. 4 is a plan view and a cross-sectional view showing a second embodiment of a tuning fork type crystal vibrating piece according to the present invention.
【図５】貫通孔の形状及び内径寸法と振動周波数との関
係を示すグラフである。FIG. 5 is a graph showing the relationship between the shape and inner diameter of the through hole and the vibration frequency.
【図６】本発明に係る音叉型水晶振動片の第３実施形態
を示す平面図及び断面図である。6A and 6B are a plan view and a cross-sectional view showing a third embodiment of a tuning-fork type crystal vibrating piece according to the invention.
【図７】上記図６の音叉型水晶振動片のＤ−Ｄ線に沿っ
た断面図である。7 is a cross-sectional view of the tuning-fork type crystal vibrating piece of FIG. 6 taken along the line D-D.
【図８】従来の音叉型水晶振動片の一例を示す斜視図で
ある。FIG. 8 is a perspective view showing an example of a conventional tuning-fork type crystal vibrating piece.
【図９】上記音叉型水晶振動片とこれを縮小した音叉型
振動片の平面図である。FIG. 9 is a plan view of the tuning fork type quartz vibrating piece and a reduced version of the tuning fork type vibrating piece.
【図１０】上記図９の音叉型水晶振動片をＥ−Ｅ線に沿
って切断した断面図である。10 is a cross-sectional view of the tuning-fork type crystal vibrating piece of FIG. 9 taken along line EE.
２１，３１，４１ 水晶振動片 ２２，３２，４２ 基部 ２３ａ，２３ｂ 腕部 ３３ａ，３３ｂ 腕部 ４３ａ，４３ｂ 腕部 ２４，３４，４４ 基端部 ２５ａ，２５ｂ 励振電極 ３５ａ，３５ｂ 励振電極 ４５ａ，４５ｂ 励振電極 ２７ａ，２７ｂ 貫通孔 ３７ａ，３７ｂ 貫通孔 ４７ａ，４７ｂ 貫通孔 ４８ａ，４８ｂ 孔内の励振電極 21, 31, 41 Crystal resonator element 22, 32, 42 base 23a, 23b arm 33a, 33b arms 43a, 43b arms 24, 34, 44 Base end 25a, 25b excitation electrodes 35a, 35b excitation electrodes 45a, 45b Excitation electrodes 27a, 27b Through hole 37a, 37b through hole 47a, 47b through holes Excitation electrodes in holes 48a, 48b
Claims (5)
とを備えた音叉型水晶振動片において、 前記各腕部に貫通孔が設けられていることを特徴とする
音叉型水晶振動片。1. A tuning fork type quartz vibrating piece comprising a base portion and a pair of arm portions extending from the base portion, wherein each arm portion is provided with a through hole.
とを備えた音叉型水晶振動片において、 前記各腕部に貫通孔を設けると共に、該貫通孔の内側面
に励振電極を形成したことを特徴とする音叉型水晶振動
片。2. A tuning-fork type crystal vibrating piece comprising a base portion and a pair of arm portions extending from the base portion, wherein each of the arm portions is provided with a through hole, and an excitation electrode is formed on an inner surface of the through hole. A tuning-fork type crystal vibrating piece that is characterized.
成されたことを特徴とする請求項１又は２記載の音叉型
水晶振動片。3. The tuning-fork type crystal vibrating piece according to claim 1, wherein the through hole is formed in the vicinity of the base end of each arm.
の長手方向に沿って複数形成されたことを特徴とする請
求項１又は２記載の音叉型水晶振動片。4. The tuning-fork type quartz vibrating piece according to claim 1, wherein a plurality of the through holes are formed from a base end portion of the arm portion along a longitudinal direction of each arm portion.
ることを特徴とする請求項１乃至４のいずれかに記載の
音叉型水晶振動片。5. The tuning-fork type quartz vibrating piece according to claim 1, wherein the through hole has a circular shape or a polygonal shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001244186A JP2003060482A (en) | 2001-08-10 | 2001-08-10 | Tuning fork crystal oscillating piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001244186A JP2003060482A (en) | 2001-08-10 | 2001-08-10 | Tuning fork crystal oscillating piece |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003060482A true JP2003060482A (en) | 2003-02-28 |
Family
ID=19074162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001244186A Pending JP2003060482A (en) | 2001-08-10 | 2001-08-10 | Tuning fork crystal oscillating piece |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003060482A (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006270335A (en) * | 2005-03-23 | 2006-10-05 | River Eletec Kk | Tuning fork type flexural vibrator |
| JP2010103805A (en) * | 2008-10-24 | 2010-05-06 | Seiko Epson Corp | Bending vibration piece, bending vibrator, and piezoelectric device |
| JP2012070451A (en) * | 2011-12-26 | 2012-04-05 | Seiko Epson Corp | Vibration piece and device |
| WO2014002892A1 (en) * | 2012-06-27 | 2014-01-03 | 株式会社村田製作所 | Tuning-fork-type crystal oscillator |
| JP2014003711A (en) * | 2008-12-27 | 2014-01-09 | Seiko Epson Corp | Vibration piece, vibrator, sensor and electronic component |
| JP2014027480A (en) * | 2012-07-26 | 2014-02-06 | Sii Crystal Technology Inc | Piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic apparatus, and radio-controlled timepiece |
| WO2014119106A1 (en) * | 2013-01-29 | 2014-08-07 | 株式会社村田製作所 | Tuning-fork-type quartz vibrator |
| WO2014122837A1 (en) * | 2013-02-08 | 2014-08-14 | 株式会社村田製作所 | Tuning-fork-type crystal oscillator |
| JP2014150422A (en) * | 2013-02-01 | 2014-08-21 | Murata Mfg Co Ltd | Tuning-fork type crystal vibrator and manufacturing method thereof |
| JP2015179933A (en) * | 2014-03-19 | 2015-10-08 | セイコーエプソン株式会社 | Vibration element, gyro sensor element, electronic device, electronic apparatus and moving body |
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| JPS55138916A (en) * | 1979-04-18 | 1980-10-30 | Seiko Instr & Electronics Ltd | Composite crystal resonator |
| WO2000044092A1 (en) * | 1999-01-20 | 2000-07-27 | Seiko Epson Corporation | Vibrator and electronic device with vibrator |
| JP2002261576A (en) * | 2001-03-02 | 2002-09-13 | Seiko Epson Corp | Vibrating reed, vibrator, oscillator and portable telephone |
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| JPS5252597A (en) * | 1975-10-27 | 1977-04-27 | Citizen Watch Co Ltd | Bend type piezoelectric vibrator |
| JPS55138916A (en) * | 1979-04-18 | 1980-10-30 | Seiko Instr & Electronics Ltd | Composite crystal resonator |
| WO2000044092A1 (en) * | 1999-01-20 | 2000-07-27 | Seiko Epson Corporation | Vibrator and electronic device with vibrator |
| JP2002261576A (en) * | 2001-03-02 | 2002-09-13 | Seiko Epson Corp | Vibrating reed, vibrator, oscillator and portable telephone |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4638263B2 (en) * | 2005-03-23 | 2011-02-23 | リバーエレテック株式会社 | Tuning fork type bending vibrator |
| JP2006270335A (en) * | 2005-03-23 | 2006-10-05 | River Eletec Kk | Tuning fork type flexural vibrator |
| JP2010103805A (en) * | 2008-10-24 | 2010-05-06 | Seiko Epson Corp | Bending vibration piece, bending vibrator, and piezoelectric device |
| JP2014003711A (en) * | 2008-12-27 | 2014-01-09 | Seiko Epson Corp | Vibration piece, vibrator, sensor and electronic component |
| JP2012070451A (en) * | 2011-12-26 | 2012-04-05 | Seiko Epson Corp | Vibration piece and device |
| JPWO2014002892A1 (en) * | 2012-06-27 | 2016-05-30 | 株式会社村田製作所 | Tuning fork crystal unit |
| WO2014002892A1 (en) * | 2012-06-27 | 2014-01-03 | 株式会社村田製作所 | Tuning-fork-type crystal oscillator |
| JP2014027480A (en) * | 2012-07-26 | 2014-02-06 | Sii Crystal Technology Inc | Piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic apparatus, and radio-controlled timepiece |
| US20150326201A1 (en) * | 2013-01-29 | 2015-11-12 | Murata Manufacturing Co., Ltd. | Tuning-Fork Type Quartz Vibrator |
| WO2014119106A1 (en) * | 2013-01-29 | 2014-08-07 | 株式会社村田製作所 | Tuning-fork-type quartz vibrator |
| US9819328B2 (en) | 2013-01-29 | 2017-11-14 | Murata Manufacturing Co., Ltd. | Tuning-fork type quartz vibrator |
| JP2014150422A (en) * | 2013-02-01 | 2014-08-21 | Murata Mfg Co Ltd | Tuning-fork type crystal vibrator and manufacturing method thereof |
| WO2014122837A1 (en) * | 2013-02-08 | 2014-08-14 | 株式会社村田製作所 | Tuning-fork-type crystal oscillator |
| JP2015179933A (en) * | 2014-03-19 | 2015-10-08 | セイコーエプソン株式会社 | Vibration element, gyro sensor element, electronic device, electronic apparatus and moving body |
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