JP2003273703A5 - - Google Patents

Description

That is, according to a first aspect of the quartz resonator of the present invention, a tuning fork-shaped curved quartz resonator comprising a tuning fork arm vibrating in a bending mode and a tuning fork base, the tuning fork arm having upper and lower surfaces and a side surface And a groove is provided on the tuning fork arm in the shape of the tuning fork, an electrode is disposed on the side surface of the groove and the tuning fork arm, an electrode on the side surface of the groove and an electrode on the side of the tuning fork arm facing the electrode Are crystal oscillators whose poles are different from each other.
A second aspect of the crystal oscillator of the present invention, the tuning fork equivalent series resistance R ₂ of the second harmonic mode oscillation in the flexural crystal oscillator shape larger than the equivalent series resistance R ₁ of the fundamental mode oscillation, and, The crystal unit according to the first aspect, wherein the figure of merit M ₁ of the fundamental mode vibration is larger than the figure of merit M ₂ of the second harmonic mode vibration.
A third aspect of the quartz oscillator according to the present invention is the quartz oscillator according to the second aspect, wherein a notch is provided in a tuning fork base of the bent quartz oscillator having the tuning fork shape.

A first aspect of a method of manufacturing a quartz oscillator according to the present invention is a method of manufacturing a tuning fork-shaped curved quartz oscillator including a tuning fork arm vibrating in a bending mode and a tuning fork base, The step of providing a groove on the lower surface, and the electrode on the side surface of the groove, the electrode on the side surface of the groove and the electrode on the side surface of the tuning fork arm facing the electrode Forming an electrode so as to be different from each other, adjusting an oscillation frequency of the bending quartz oscillator, and housing the bending quartz oscillator in a surface mount type or cylindrical unit. It is a manufacturing method of the crystal oscillator which it has.
A second aspect of the method for manufacturing a quartz oscillator of the present invention, each one provided on the upper and lower surfaces of the tuning fork arms groove thickness t ₁ of the groove is first is a through-hole is t _{1 =} 0 It is a manufacturing method of a crystal oscillator given in an mode.
According to a third aspect of the method for manufacturing a quartz oscillator of the present invention, a tuning fork-shaped bent quartz oscillator including a tuning fork arm and a tuning fork base is formed on a quartz wafer, and the tuning fork arm of the bent quartz oscillator The method for manufacturing the quartz crystal resonator according to the first aspect, wherein the groove is provided in the first step, the tuning fork arm and the groove are formed in separate steps, and the tuning fork arm is formed before the groove is formed. It is.

Claims (6)

A tuning-fork-shaped bending quartz oscillator comprising a tuning-fork arm vibrating in a bending mode and a tuning-fork base, wherein the tuning-fork arm has an upper surface, a lower surface and a side, and the tuning-fork shaped tuning fork arm is provided with grooves An electrode is disposed on the side surface of the groove and the tuning fork arm, and the electrode on the side surface of the groove and the electrode on the side surface of the tuning fork arm opposing the electrode have different polarities. The tuning fork equivalent series resistance R ₂ of the second harmonic mode oscillation in the flexural crystal oscillator shape larger than the equivalent series resistance R ₁ of the fundamental mode oscillation, and full Iga of merit M ₁ of the fundamental wave mode vibrations 2 The quartz oscillator according to claim 1, characterized in that it is larger than the figure of merit M2 of _second harmonic mode vibration. The quartz vibrator according to claim 2, wherein a notch is provided in a tuning fork base of the tuning fork-shaped bent quartz oscillator. A manufacturing method of a tuning fork-shaped bending quartz oscillator comprising a tuning fork arm oscillating in a bending mode and a tuning fork base,
Providing a groove on each of the upper and lower surfaces of the tuning fork arm;
Forming an electrode such that an electrode is disposed on each side of the groove and the side surface of the tuning fork arm, and an electrode on the side surface of the groove and an electrode on the side surface of the tuning fork arm opposing the electrode have different polarities. When,
Adjusting the oscillation frequency of the bent quartz oscillator;
And d) storing the bent quartz oscillator in a surface mount type or cylindrical unit. Method for manufacturing a quartz oscillator according to claim 4, wherein each one of the grooves provided on the upper and lower surfaces of the tuning fork arms are through holes thickness t ₁ of the groove is t _{1 =} 0. A tuning fork-shaped bent quartz oscillator comprising a tuning fork arm and a tuning fork base is formed on a quartz wafer, and a groove is provided on the tuning fork arm of the bent quartz oscillator, and the tuning fork arm and the groove are separate steps 5. The method according to claim 4, wherein the tuning fork arm is formed before the groove is formed.