JP3363457B2 - Torsional crystal oscillator - Google Patents
Torsional crystal oscillatorInfo
- Publication number
- JP3363457B2 JP3363457B2 JP12148991A JP12148991A JP3363457B2 JP 3363457 B2 JP3363457 B2 JP 3363457B2 JP 12148991 A JP12148991 A JP 12148991A JP 12148991 A JP12148991 A JP 12148991A JP 3363457 B2 JP3363457 B2 JP 3363457B2
- Authority
- JP
- Japan
- Prior art keywords
- torsional
- quartz
- axis
- present
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】
【０００１】
【産業上の利用分野】本発明は捩り水晶振動子のカット
角と辺比Ｒzx（厚み／幅）に関する。特に、小型化、高
精度化、耐衝撃性、低廉化の要求の強い腕時計、ポケッ
トベル、ＩＣカードや移動無線等の基準信号源として最
適な新カットと辺比の捩り水晶振動子に関する。
【０００２】
【従来の技術】周波数が２00ｋＨｚ〜６00ｋＨｚの水晶
振動子は、音叉形状した屈曲水晶振動子と縦水晶振動子
が用いられてきた。
【０００３】
【発明が解決しようとする課題】しかしながら、従来か
ら使用されている音叉型屈曲水晶振動子は高調波モード
を使用するため、電極形成が複雑で、リード線等の支持
による振動エネルギー損失が多く、その結果、等価直列
抵抗Ｒ1 が上昇するなどの課題が残されていた。一方、
縦水晶振動子は、周波数が振動腕の長さに反比例するた
め、６00ｋＨｚ以下の振動子を実現しようとすると、お
のずから、サイズが大きくなり、小型化できないという
課題が残されていた。このようなことから、周波数が２
00ｋＨｚ〜６00ｋＨｚで、しかも、超小型で、零温度係
数を有し、化学的エッチング加工が容易な新カットの水
晶振動子が所望されていた。
【０００４】
【課題を解決するための手段】本発明は以下の方法で従
来の課題を解決するものである。すなわち、捩り振動モ
ードで振動する水晶振動子で、大略Ｚ板の水晶板から前
記捩り振動子を形成し、振動子の厚みｚ0 と幅ｘ0 の比
Ｒzx（ｚ0 ／ｘ0 ）を大略1.10に、かつ、長さｙ0 はｘ
軸（電気軸）方向に大略一致するように設けることによ
って課題を解決している。
【０００５】
【作用】このように、本発明は捩り水晶振動子で、しか
も、大略Ｚ板の水晶板より、辺比Ｒzxが大略Ｒzx＝1.１
０を有する振動子をエッチング法によって形成すること
により、零温度係数を持った捩り水晶振動子が得られ
る。
【０００６】
【実施例】次に、本発明を実施例に基づいて具体的に述
べる。図１は、本発明の捩り水晶振動子１とその座標系
を示す。座標系は原点０、電気軸ｘ、機械軸ｙ、光軸ｚ
からなり、０−ｘｙｚを構成している。厚みｚ0 、幅ｘ
0 、長さｙ0 から成る捩り水晶振動子１は大略Ｚ板の水
晶板から形成される。ここの大略Ｚ板とは、ｚ軸に垂直
な板を基に、ｘ軸（φ度）、あるいはｚ軸（θ度）の回
りに約10゜以下の角度を有する水晶板を指す。この大略
Ｚ板は化学的エッチング加工が極めて容易であるため
に、選択される。次に、大略Ｚ板での１次温度係数αが
零となる辺比Ｒzx＝（ｚ0 ／ｘ0 ）について説明する。
【０００７】図２は、本発明の捩り水晶振動子の辺比Ｒ
zxをパラメータにしたときのカット角φと１次温度係数
αとの関係である。φ＝０がＺ板を示すが、辺比Ｒzx＝
1.10のとき、α＝０となる。φの若干の変化に対してα
も変化するが、Ｒzxを変化させることにより、α＝０に
することができる。例えば、φ＝−10゜では Ｒzx＝0.
905 で、一方、φ＝10゜ではＲzx＝1.18であればよい。
【０００８】図３は、本発明の捩り水晶振動子の辺比Ｒ
zxをパラメータにしたときのカット角θと１次温度係数
αとの関係である。θ＝０がＺ板を示すが、Ｒzx＝1.10
のとき、α＝０となる。θの変化に対してαも変化する
が、φと同様にＲzxを変化させることにより、α＝０を
得ることができる。例えば、θ＝−10゜では Ｒzx＝1.
13で、一方、θ＝10゜ではＲzx＝1.16であればよい。こ
のように、大略Ｚ板の水晶板から捩り水晶振動子を形成
したときには、振動子の辺比Ｒzxとの関係を十分によく
把握することにより、α＝０となる振動子を得ることが
できる。
【０００９】なお、ここで辺比Ｒzxが大略1.10というこ
とは、図２、図３で示したように、Ｒzxは約0.905 〜1.
18の値をもつことを意味している。図４は、本発明のＺ
板水晶板から形成された捩り水晶振動子の周波数温度特
性の一実施例を示す。常温でα＝０となり、そのときの
２次温度係数βは約−3.２×10-8／℃2 と屈曲水晶振動
子と同程度の周波数温度特性が得られた。
【００１０】図５は、本発明の大略Ｚ板（φ＝6.５、θ
＝０゜) の水晶板から形成された捩り水晶振動子の周波
数温度特性の他の実施例を示す。図４と同様に優れた周
波数温度特性が得られる。次に、本発明の捩り水晶振動
子を効率よく励振する電極構成について述べる。図６
は、本発明の捩り水晶振動子の電極構成で、音叉形状
（ａ）とその断面図（ｂ）を示す。音叉型捩り水晶振動
子２の一方の表面には電極３、４が異極になるように配
置されている。また、他方の裏面には電極５、６が配置
され、同じように異極となるように配置されている。そ
して、表裏面の電極は電極３、６が同極となり端子Ａ1
に、電極４、５が同極となり端子Ｂ1 に接続されてい
る。端子Ａ1 とＢ1 の間に交番電圧を印加することによ
り容易に捩り振動を引き起こすことができる。
【００１１】図７は、本発明の捩り水晶振動子の電極構
成で、棒形状（ａ）とその断面図（ｂ）を示す。棒状捩
り水晶振動子７の一方の表面には電極８、９が、他方の
裏面には電極10、11が配置され、電極８、11と電極９、
10は異極となるように配置され、それぞれ電極端子
Ａ2 、Ｂ2 に接続されている。励振原理は図６と全く同
じである。
【００１２】次に、振動子を小型化にできる理由につい
て説明する。本発明の捩り水晶振動子は大略Ｚ板の水晶
板から形成されるので、そのときの周波数定数（ｆ・ｙ
0)はα＝０となる音叉形状の場合約83ｋＨｚ・ｃｍ、棒
形状の場合、約17０ｋＨｚ・ｃｍの値なる。この数値は
音叉型屈曲水晶振動子の7.９ｋＨｚ・ｃｍより大きく、
縦水晶振動子の27０ｋＨｚ・ｃｍより小さく、屈曲振動
と縦振動の間にあり、本発明の捩り水晶振動子は周波数
が20０ｋＨｚ〜60０ｋＨｚ位の範囲で特に効力を発揮す
ることになる。
【００１３】
【発明の効果】以上述べたように、本発明の捩り水晶振
動子は次の著しい効果を有する。
（１）大略Ｚ板の水晶板から形成される本捩り水晶振動
子は、辺比Ｒzxが大略1.10との組み合わせにより、１次
温度係数αが零となるので、優れた周波数温度特性を示
す。
（２）大略Ｚ板の水晶板は、化学的エッチング法によっ
て容易に形成できるので、小型化、薄型化ができる。同
時に、耐衝撃性に優れた振動子が得られる。
（３）１枚の水晶ウェハ上に多数個の振動子を一度にバ
ッチ処理できるので、低廉化が可能である。
（４）周波数定数が基本波の音叉型屈曲水晶振動子と縦
水晶振動子の間にあるので、周波数が20０ｋＨｚ〜60０
ｋＨｚで特に効力を発揮する。同時に、超小型化が可能
である。
（５）振動子の表裏面に励振電極を配置することによ
り、等価直列抵抗Ｒ1の小さい、Ｑ値の高い捩り水晶振
動子が得られる。
（６）音叉形状と棒状形状では周波数定数が異なるため
に、20０ｋＨｚ位の低周波数には音叉形状を、また60０
ｋＨｚ位のより高い周波数には棒状形状を選択すること
により、小型化と同時にＲ1 の小さい振動子が得られ
る。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cut angle and a side ratio R zx (thickness / width) of a torsional quartz crystal resonator. In particular, the present invention relates to a new cut and side ratio torsional crystal resonator which is optimal as a reference signal source for a wristwatch, a pager, an IC card, a mobile radio, and the like, which are required to be miniaturized, highly accurate, shock resistant, and inexpensive. 2. Description of the Related Art As a quartz oscillator having a frequency of 200 kHz to 600 kHz, a bent quartz oscillator having a tuning fork shape and a vertical quartz oscillator have been used. [0003] However, the tuning fork-type bent quartz crystal resonator conventionally used uses a harmonic mode, so that the formation of electrodes is complicated and vibration energy loss due to the support of a lead wire or the like. many, as a result, problems such equivalent series resistance R 1 increases had been left. on the other hand,
Since the frequency of the vertical crystal resonator is inversely proportional to the length of the vibrating arm, there has been a problem that the size of the vertical crystal resonator is naturally increased to realize a resonator of 600 kHz or less and the size cannot be reduced. Because of this, the frequency is 2
There has been a demand for a new-cut quartz resonator having a frequency of 00 kHz to 600 kHz, a very small size, a zero temperature coefficient, and easy chemical etching. The present invention solves the conventional problems by the following method. That is, the torsional vibrator is formed from a substantially Z-plate quartz crystal vibrating in a torsional vibration mode, and the ratio R zx (z 0 / x 0 ) between the thickness z 0 and the width x 0 of the vibrator is determined. Approximately 1.10 and length y 0 is x
The problem is solved by providing the shaft so as to substantially coincide with the axis (electric axis) direction. As described above, the present invention is a torsional quartz oscillator, and the side ratio R zx is approximately R zx = 1.1 more than the Z plate.
By forming a vibrator having zero by an etching method, a torsional crystal vibrator having a zero temperature coefficient can be obtained. Next, the present invention will be specifically described based on examples. FIG. 1 shows a torsional crystal resonator 1 of the present invention and its coordinate system. Coordinate system is origin 0, electric axis x, mechanical axis y, optical axis z
To form 0-xyz. Thickness z 0 , width x
The torsional quartz oscillator 1 having a length of 0 and a length of y 0 is generally formed of a Z-plate quartz plate. Here, the substantially Z plate refers to a quartz plate having an angle of about 10 ° or less around the x axis (φ degrees) or the z axis (θ degrees) based on a plate perpendicular to the z axis. This Z plate is generally selected because it is very easy to perform chemical etching. Next, a description will be given of the side ratio R zx = (z 0 / x 0 ) at which the first-order temperature coefficient α in the Z plate becomes substantially zero. FIG. 2 shows a side ratio R of the torsional quartz resonator according to the present invention.
This is the relationship between the cut angle φ and the primary temperature coefficient α when zx is used as a parameter. φ = 0 indicates the Z plate, and the side ratio R zx =
In the case of 1.10, α = 0. α for a small change in φ
Α = 0 by changing R zx . For example, when φ = −10 °, R zx = 0.
905 On the other hand, when φ = 10 °, R zx = 1.18 is sufficient. FIG. 3 shows a side ratio R of the torsional quartz resonator according to the present invention.
This is the relationship between the cut angle θ and the primary temperature coefficient α when zx is used as a parameter. θ = 0 indicates the Z plate, but R zx = 1.10
At this time, α = 0. Although α changes with the change of θ, α = 0 can be obtained by changing R zx similarly to φ. For example, when θ = −10 °, R zx = 1.
On the other hand, when θ = 10 °, R zx = 1.16 may be used. As described above, when a torsional crystal resonator is formed from a substantially Z-plate crystal plate, it is possible to obtain a resonator having α = 0 by sufficiently understanding the relationship between the resonator and the side ratio R zx. it can. Here, the fact that the side ratio R zx is approximately 1.10 means that R zx is approximately 0.905 to 1.10 as shown in FIGS.
It has a value of 18. FIG. 4 shows the Z of the present invention.
An example of the frequency-temperature characteristics of a torsional quartz oscillator formed from a sheet quartz plate will be described. Α = 0 at room temperature, and the secondary temperature coefficient β at that time was about −3.2 × 10 −8 / ° C. 2 , which was the same frequency-temperature characteristic as that of the bent quartz resonator. FIG. 5 shows a schematic Z plate (φ = 6.5, θ) of the present invention.
= 0.degree.) Shows another embodiment of the frequency-temperature characteristics of the torsional quartz resonator formed from the quartz plate (= 0.degree.). Excellent frequency temperature characteristics can be obtained as in FIG. Next, an electrode configuration for efficiently exciting the torsional crystal resonator of the present invention will be described. FIG.
Fig. 2 shows an electrode configuration of the torsional quartz crystal resonator according to the present invention, and shows a tuning fork shape (a) and a sectional view (b) thereof. The electrodes 3 and 4 are arranged on one surface of the tuning fork type torsional quartz crystal resonator 2 so as to have different polarities. Further, electrodes 5 and 6 are arranged on the other back surface, and are similarly arranged to have different polarities. In the electrodes on the front and back surfaces, the electrodes 3 and 6 have the same polarity and the terminal A 1
, The electrodes 4 and 5 are connected to the terminal B 1 becomes the same polarity. Can cause easily torsional vibration by applying an alternating voltage between the terminals A 1 and B 1. FIG. 7 shows a rod shape (a) and a sectional view (b) of the electrode configuration of the torsional crystal resonator of the present invention. Electrodes 8 and 9 are arranged on one surface of the rod-shaped torsional quartz oscillator 7 and electrodes 10 and 11 are arranged on the other back surface.
Reference numerals 10 are arranged so as to have different polarities, and are connected to the electrode terminals A 2 and B 2 , respectively. The excitation principle is exactly the same as in FIG. Next, the reason why the size of the vibrator can be reduced will be described. Since the torsional quartz resonator according to the present invention is generally formed of a Z-plate quartz plate, the frequency constant (fy
0 ) is about 83 kHz · cm in the case of a tuning fork where α = 0, and about 170 kHz · cm in the case of a rod shape. This value is larger than 7.9 kHz · cm of the tuning fork type bent quartz oscillator,
It is smaller than 270 kHz · cm of the vertical crystal oscillator, and lies between the bending vibration and the vertical vibration. The torsional crystal oscillator of the present invention is particularly effective when the frequency is in the range of about 200 kHz to 600 kHz. As described above, the torsional quartz resonator according to the present invention has the following remarkable effects. (1) The torsional quartz resonator formed substantially from a Z-plate quartz plate exhibits excellent frequency-temperature characteristics because the primary temperature coefficient α becomes zero when the side ratio R zx is approximately 1.10. . (2) Since the quartz plate, which is roughly a Z plate, can be easily formed by a chemical etching method, the size and thickness can be reduced. At the same time, a vibrator having excellent impact resistance can be obtained. (3) Since a large number of vibrators can be batch-processed on one crystal wafer at a time, the cost can be reduced. (4) Since the frequency constant is between the tuning-fork type bent crystal resonator of the fundamental wave and the vertical crystal resonator, the frequency is from 200 kHz to 600 kHz.
Especially effective at kHz. At the same time, miniaturization is possible. (5) by placing the excitation electrode on the front and back surfaces of the transducer, a small equivalent series resistance R 1, high torsional quartz crystal resonator Q value is obtained. (6) Since the frequency constant is different between the tuning fork shape and the rod-like shape, the tuning fork shape is used at a low frequency of about 200 kHz,
By the higher frequency kHz position selecting a rod shape, a small vibrator of R 1 can be obtained simultaneously with the miniaturization.
【図面の簡単な説明】
【図１】本発明の捩り水晶振動子とその座標系を示す。
【図２】本発明の捩り水晶振動子の辺比Ｒzxをパラメー
タにしたときのカット角φと１次温度係数αとの関係で
ある。
【図３】本発明の捩り水晶振動子の辺比Ｒzxをパラメー
タにしたときのカット角θと１次温度係数αとの関係で
ある。
【図４】本発明の捩り水晶振動子の周波数温度特性の一
実施例を示す。
【図５】本発明の捩り水晶振動子の周波数温度特性の他
の実施例を示す。
【図６】本発明の捩り水晶振動子の電極構成で、音叉形
状（ａ）とその断面図（ｂ）を示す。
【図７】本発明の捩り水晶振動子の電極構成で、棒形状
（ａ）とその断面図（ｂ）を示す。
【符号の説明】
１ 捩り水晶振動子
２ 音叉型捩り水晶振動子
３〜６ 励振電極
７ 棒状捩り水晶振動子
８〜11 励振電極
Ａ1,Ｂ1 電極端子
Ａ2,Ｂ2 電極端子
ｘ0 振動部の幅
ｙ0 振動部の長さ
ｚ0 振動子の厚み
φ，θ カット角
ｘ 電気軸
ｙ 機械軸
ｚ 光軸BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 shows a torsional crystal resonator of the present invention and its coordinate system. FIG. 2 shows the relationship between the cut angle φ and the primary temperature coefficient α when the side ratio R zx of the torsional quartz crystal resonator of the present invention is used as a parameter. FIG. 3 shows the relationship between the cut angle θ and the primary temperature coefficient α when the side ratio R zx of the torsional crystal resonator of the present invention is used as a parameter. FIG. 4 shows an embodiment of the frequency-temperature characteristic of the torsional crystal resonator of the present invention. FIG. 5 shows another embodiment of the frequency-temperature characteristics of the torsional crystal resonator of the present invention. FIG. 6 shows a tuning fork shape (a) and a cross-sectional view (b) of the electrode configuration of the torsional crystal resonator of the present invention. FIG. 7 shows a rod shape (a) and a cross-sectional view (b) of the electrode configuration of the torsional crystal resonator of the present invention. [EXPLANATION OF SYMBOLS] 1 torsional quartz resonator 2 tuning fork type torsional quartz crystal resonator 3-6 excitation electrodes 7 bar-shaped torsional quartz crystal resonator 8-11 excitation electrodes A 1, B 1 electrode terminals A 2, B 2 electrode terminals x 0 vibrations Part width y 0 vibrating part length z 0 vibrator thickness φ, θ cut angle x electric axis y mechanical axis z optical axis
Claims (1)
あって、 光軸であるｚ軸に垂直な板を基に、電気軸であるｘ軸
（φ度）、または、前記光軸であるｚ軸（θ度）の回り
に、実質的に０°である大略Ｚ板の水晶板からなり、前記水晶 振動子の厚みｚ0と幅ｘ0の比Ｒzx（ｚ0／ｘ0）
は、実質的に１．１０であり、 前記水晶振動子の長さ方向ｙ0は、電気軸であるｘ軸方
向に大略一致するように設けたことを特徴とする捩り水
晶振動子。(57) [Claims 1] A quartz crystal vibrating in a torsional vibration mode
Then , based on a plate perpendicular to the z-axis as the optical axis, substantially 0 ° around the x-axis (φ degrees) as the electric axis or the z-axis (θ degrees) as the optical axis . And a ratio Rzx (z0 / x0) between the thickness z0 and the width x0 of the quartz oscillator.
Is substantially 1.10, and a length direction y0 of the crystal resonator is provided so as to substantially coincide with an x-axis direction which is an electric axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12148991A JP3363457B2 (en) | 1991-05-27 | 1991-05-27 | Torsional crystal oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12148991A JP3363457B2 (en) | 1991-05-27 | 1991-05-27 | Torsional crystal oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04348606A JPH04348606A (en) | 1992-12-03 |
| JP3363457B2 true JP3363457B2 (en) | 2003-01-08 |
Family
ID=14812433
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12148991A Expired - Lifetime JP3363457B2 (en) | 1991-05-27 | 1991-05-27 | Torsional crystal oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3363457B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011193399A (en) | 2010-03-16 | 2011-09-29 | Seiko Epson Corp | Resonator element, resonator and piezoelectric device |
| JP2015080013A (en) | 2013-10-15 | 2015-04-23 | セイコーエプソン株式会社 | Vibrator, oscillator, electronic apparatus and movable body |
-
1991
- 1991-05-27 JP JP12148991A patent/JP3363457B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04348606A (en) | 1992-12-03 |
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