JP2008278489A5

JP2008278489A5 -

Info

Publication number: JP2008278489A5
Application number: JP2008116257A
Authority: JP
Filing date: 2008-03-31
Publication date: 2010-10-28
Anticipated expiration: 2022-03-06

Claims

A tuning fork-type quartz crystal vibrator comprising at least a tuning fork base and at least a first tuning fork arm and a second tuning fork arm connected to the tuning fork base, and vibrating in a bending mode.
Each of the first tuning fork arm and the second tuning fork arm has an upper surface, a lower surface opposed to the upper surface, a first side surface, and a second side surface opposed to the first side surface,

Determining a length dimension of a groove formed in each of the fork arm and the second tuning fork arm and a total length dimension of the tuning fork-type bending crystal resonator;
Forming a first metal film on each of an upper surface of a prepared quartz wafer and a lower surface facing the upper surface by vapor deposition or sputtering ;
Applying a first resist on the first metal film ;
After the first metal film and the first resist is removed leaving a tuning fork shape, forming a tuning fork shape with said tuning fork base portion and said second tuning fork arms and the first tuning fork arms by chemical etching And a process of
A step of forming the grooves in each of said upper surface and said lower surface of each of the second tuning fork arms and the first tuning fork arms by chemical etching,
Forming a second metal film on the surface of the tuning fork consisting of the second tuning fork arms and the first tuning fork arm provided with the tuning fork base portion and said groove,
Applying a second resist on the second metal film ;
An electrode disposed on said upper surface and the surface of the groove formed in each of the lower surface of the first side surface with each arranged in the electrode of the second side second fork arm of the first tuning fork arms There connected formed such that the same poles and the said top surface and said first side surface of the second tuning fork arms and the lower surface of each being disposed on a surface of the groove formed in the electrode of the first tuning fork arms And a step of connecting and forming the electrodes disposed on each of the second side surfaces so as to have the same polarity, and the method is performed in the order of the steps .

The step of forming the groove is such that the shape of the groove formed on each of the upper surface and the lower surface of each of the first tuning fork arm and the second tuning fork arm is a polygonal shape different from a quadrangle. 2. The crystal resonator according to claim 1, further comprising a step of forming the groove in each of the upper surface and the lower surface of each of the first tuning fork arm and the second tuning fork arm by chemical etching. Manufacturing method.

The method of manufacturing the crystal oscillator according to claim 1 or claim 2, a step of preparing a casing and a lid, in the manufacturing method of the quartz crystal unit and a step of connecting the cover to the case, the electrode after the step of connecting formation, and fixing the tuning-fork flexural crystal unit to the fixing portion of the case, after the step of the fixing, to include, and connecting to step to the casing of said lid A manufacturing method of a crystal unit, which is characterized.

After the step of fixing the tuning fork type bending crystal resonator to the fixing portion of the case and before the step of connecting the lid to the case, the oscillation frequency of the tuning fork type bending crystal resonator

4. The method for manufacturing a crystal unit according to claim 3, wherein an electrode is disposed on a surface of the groove having the length dimension formed in each of the forearms .

A crystal oscillator comprising a crystal unit, a crystal unit including a case and lid for housing the crystal unit, an amplifier, a capacitor, and a resistance element, wherein the crystal unit includes a tuning fork base, A tuning fork-type bent quartz crystal vibrator comprising at least a first tuning fork arm and a second tuning fork arm connected to the tuning fork base, and one end of the first tuning fork arm and the second tuning fork arm. Is a tuning fork-type bent quartz crystal resonator that is connected to the tuning fork base and the other end is free. Each of the first tuning fork arm and the second tuning fork arm includes an upper surface, a lower surface that opposes the upper surface, And the upper side of each of the first tuning fork arm and the second tuning fork arm are formed on the same surface of the crystal surface, and the inner side surface of the first tuning fork arm is It faces the inner side surface of the second tuning fork arm, and the first sound A groove having at least two step portions is formed on each of the upper surface and the lower surface of each of the arm and the second tuning fork arm, and the groove is formed on the upper surface of each of the first tuning fork arm and the second tuning fork arm. The at least two step portions have a second step portion that faces the first step portion in the length direction of the first step portion and the tuning fork arm, and an end portion of the first step portion is an end of the third step portion. The second stepped portion is connected to the end of the fourth stepped portion, the third stepped portion is connected to the fourth stepped portion through the fifth stepped portion, and the first tuning fork Each of the third step portion and the fourth step portion of the groove formed on the upper surface of the arm is formed to oppose the inner side surface of the first tuning fork arm and formed on the upper surface of the second tuning fork arm. Each of the third stepped portion and the fourth stepped portion of the groove is formed to oppose the inner side surface of the second tuning fork arm, and the tuning fork-type bent quartz resonator has a second harmonic. Etc. of over-de-vibration

A crystal oscillator.

A portable device comprising the crystal oscillator according to claim 5, wherein the crystal oscillator is used as a reference signal source for the portable device.