JP2004350325A - Crystal vibrator, crystal unit, crystal oscillator, and manufacturing method of mobile apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a tuning fork flexural mode crystal vibrator with a small equivalent series resistance R<SB>1</SB>, a subminiature crystal unit and a crystal oscillator mounted therewith, a mobile apparatus, and manufacturing method of them. <P>SOLUTION: A groove is provided to upper and lower faces of a middle part of each of tuning fork arm with a center line portion of each of the tuning fork arm inbetween and an electrode is provided to the groove and the side face, which realizes the subminiature tuning fork flexural mode crystal vibrator with a high electromechanical transformation efficiency, the small equivalent series resistance R<SB>1</SB>, and a high quality factor Q. As a result, the subminiature crystal unit provided with the crystal vibrator, and also the crystal oscillator provided with the subminiature crystal unit with high accuracy can be realized. Consequently, the mobile apparatus that is normally in operation can be realized. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a tuning-fork type bent crystal resonator, a crystal unit containing the same, a crystal oscillator, a portable device equipped with the crystal oscillator, and a method of manufacturing the same. In particular, crystal resonators, crystal units, crystal oscillators, and portable devices with new electrodes and new shapes that are optimal as reference signal sources for portable devices that require strong demands for miniaturization, high precision, impact resistance, and low cost And their manufacturing methods.

  For example, FIGS. 28 (a) and (b) are a front view of a crystal unit 101 containing a conventional tuning-fork type bent crystal resonator 100 without a lid, and a side view with a lid. . The tuning fork type bent crystal resonator 100 includes tuning fork arms 102 and 103 and a tuning fork base 104. The tuning fork base 104 is fixed to the fixing part 106 of the case 105 with adhesives 107, 108 and the like. Further, electrodes 109 and 110 are arranged on the fixed portion 106 to form a two-electrode terminal. Further, the case 105 and the lid 111 are joined via a metal 112. The conventional crystal unit is configured as described above. However, if the crystal unit is reduced in size, the crystal unit must also be reduced in size.

In order to obtain a small crystal resonator, for example, JP-A-56-65517 and JP-A-2000-223992 (P2000-223992A) disclose a method for forming a groove in a tuning-fork arm of a tuning-fork type bent crystal resonator, and regarding an electrode configuration. It has been disclosed. Furthermore, Japanese Patent Application Laid-Open No. 56-65517 describes that a vibrator shape and a groove are formed simultaneously, and Japanese Patent Application Laid-Open No. 2000-223992 (P2000-223992A) describes that a groove portion of a vibrating reed is formed in a separate step. I have.
JP-A-56-65517 International Publication No. 00/44092 2000-223992 2001-221638 JP-A-52-52597 JP-A-55-138916

The tuning-fork type flexural quartz crystal resonator, the more the equivalent series resistance R ₁ becomes smaller is greater electric field component E _x, the quality factor Q value increases. However, as shown in FIG. 30, the tuning fork-type bent quartz crystal resonator conventionally used has electrodes arranged on the four front and back side surfaces of each tuning fork arm. Therefore the electric field does not act linearly on, when the miniaturized such tuning fork type flexural quartz crystal resonator, the electric field component E _x becomes small, increases the equivalent series resistance R ₁ of the fundamental mode oscillation, the quality factor Q Issues such as a decrease in the value remained. At the same time, the equivalent series resistance R ₂ is less problem that oscillates at the second harmonic mode were also present.

For example, in the above-mentioned conventional Japanese Patent Application Laid-Open No. 56-65517 and International Publication No. 00/44092, a groove is provided in the tuning fork arm, and the structure of the groove and the electrode structure are disclosed. Further, in the patent document of 2001-221638, the direction of the electric field is indicated. However, it does not disclose the configuration of the groove, the relationship between the vibration mode, the equivalent series resistance R ₁ and R _2, and the relationship between the two-electrode terminal and the electrode arrangement of the groove of the tuning-fork type bent quartz crystal resonator of the present invention. Furthermore, there is no disclosure of the crystal unit, the crystal oscillator, the portable device and the method of manufacturing the same according to the present invention. Therefore, to realize a small crystal unit, a crystal oscillator, and a portable device, it is ultra-small, has a small equivalent series resistance R ₁ , and has a new shape with a high quality factor Q value. There has been a demand for a tuning-fork type bent crystal resonator having a good electrode arrangement and its configuration, a crystal unit having the same, a crystal oscillator having the same, a portable device having the crystal oscillator mounted thereon, and a method of manufacturing them.

  An object of the present invention is to provide a crystal resonator, a crystal oscillator, a portable device, and a method for manufacturing the same, which advantageously solve the conventional problems by the following methods.

  A first aspect of the method for manufacturing a crystal resonator according to the present invention is a method for manufacturing a tuning fork-type bent crystal resonator configured to include a tuning fork base and a tuning fork arm connected thereto and vibrating in a bending mode, A step of forming the first tuning fork arm, the second tuning fork arm, and the tuning fork base, wherein the tuning fork arm includes a first tuning fork arm and a second tuning fork arm, each tuning fork arm having an upper surface, a lower surface, and a side surface; Forming one groove on each of the upper and lower surfaces of the first tuning fork arm and the second tuning fork arm; and forming the first electrode and both sides of each tuning fork arm in the grooves formed on the first tuning fork arm and the second tuning fork arm. Arranging a second electrode on the surface.

  A second aspect of the method for manufacturing a crystal resonator according to the present invention is a method for manufacturing a tuning-fork type bent crystal resonator configured to include a tuning fork base and a tuning fork arm connected thereto and vibrating in a bending mode, A step of forming the first tuning fork arm, the second tuning fork arm, and the tuning fork base, wherein the tuning fork arm includes a first tuning fork arm and a second tuning fork arm, each tuning fork arm having an upper surface, a lower surface, and a side surface; Forming a groove on each of the upper and lower surfaces of the first tuning fork arm and the second tuning fork arm, wherein the tuning fork arm and the groove formed on the tuning fork arm are formed by the same process. This is a method of manufacturing a child.

  A first aspect of a method for manufacturing a crystal unit according to the present invention is a method for manufacturing a crystal unit including a case, a lid, and a crystal unit, wherein the crystal unit has a width, a thickness, and a length. A tuning fork arm having a tuning fork arm and a tuning fork base, and vibrating in a bending mode, wherein the tuning fork arm of the tuning fork bending quartz resonator includes a first tuning fork arm and a second tuning fork arm. A method for manufacturing a crystal unit, wherein one groove is provided on each of the upper and lower surfaces of the first tuning fork arm and the second tuning fork arm, and the grooves and electrodes having different polarities are arranged to oppose the grooves.

  A first aspect of the method for manufacturing a crystal oscillator according to the present invention is a method for manufacturing a crystal oscillator including a crystal unit including a case, a lid, and a crystal oscillator, an amplifier, a capacitor, and a resistor. The quartz resonator is configured to include a tuning fork arm having a width, a thickness, and a length, and a tuning fork base, and is a tuning fork-type bent crystal resonator that vibrates in a bending mode. One groove is provided on each of the upper and lower surfaces of the first tuning fork arm and the second tuning fork arm. One groove is provided on each of the upper and lower surfaces of the first tuning fork arm and the second tuning fork arm. It is a manufacturing method of the arranged crystal oscillator.

  A first aspect of a method for manufacturing a portable device according to the present invention is a method for manufacturing a portable device equipped with a crystal unit including a case, a lid, and a crystal unit, wherein the crystal constituting the crystal unit is provided. The vibrator includes a tuning fork arm having a width, a thickness and a length, and a tuning fork base. The vibrator is a tuning fork-type bent crystal vibrator that vibrates in a bending mode. A step of forming the first tuning fork arm, the second tuning fork arm, and the tuning fork base; and a step of forming the first tuning fork arm, the second tuning fork arm, and the upper and lower surfaces of the first tuning fork arm and the second tuning fork arm. A step of forming one groove each, a step of arranging the grooves and electrodes having different polarities against the grooves, a step of adjusting the oscillation frequency of the tuning-fork type bent quartz crystal resonator, Fixing the case to the fixing part of the case to store the A step of connecting the cover to over a manufacturing method of a portable device having a.

  As described above, the present invention relates to a crystal resonator, a crystal unit, a crystal oscillator, a portable device, and a method of manufacturing the same. By adopting a type bending quartz resonator, that is, for example, a tuning fork type bending quartz resonator in which a groove is provided in the center portion of a tuning fork arm across a neutral line and an electrode is arranged in the groove, electric characteristics can be improved. An excellent ultra-small crystal unit, a crystal oscillator having the crystal unit, and a portable device equipped with the crystal oscillator can be provided.

Additionally, each one of the grooves is provided on the upper and lower surfaces of the tuning fork arms, of the upper and lower surfaces each one of the grooves provided in the respective tuning fork arms, the length l ₀ of the at least one groove, the tuning fork arms Is within the range of 0.4 to 0.7 with respect to the length of the tuning fork type bent crystal resonator mounted on the crystal unit of the present invention, the equivalent series resistance R ₁ is small, and the quality factor Q It is possible to obtain an ultra-small tuning-fork type bent quartz resonator having a high value.

Furthermore, for example, there thickness t ₁ of the groove to the thickness t of the tuning fork arms from 0.05 in the range of 0.79, an electrode placed in the groove, is disposed polarities different electrodes against to the electrode since it has, at the same time as the miniaturization of the oscillator can be performed very easily, a small equivalent series resistance R _1, high quality factor Q micro tuning fork flexural crystal oscillator can be obtained. As a result, a very small crystal unit and crystal oscillator can be obtained.

Further, with the tuning-fork bent equivalent series resistance R ₁ of the fundamental mode oscillation of the crystal oscillator is a second harmonic mode equivalent series resistance R ₂ smaller tuning-fork type flexural quartz crystal resonator of the vibration having a groove in tuning fork arms Since the crystal oscillator includes the crystal unit, a highly reliable crystal oscillator that vibrates in the fundamental mode in which the second harmonic mode vibration is suppressed can be realized. As a result, a highly reliable portable device can be realized.

  Further, by providing a method of manufacturing a tuning-fork type bent crystal resonator having a new shape and a new electrode configuration, a crystal oscillator, and a portable device used in the present invention, an ultra-small, high-quality, inexpensive crystal resonator is provided. And a crystal oscillator and a portable device including the same.

  Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings based on examples.

  1A and 1B are a front view of a first embodiment of a crystal unit according to the present invention with a cover omitted and a side view with a cover. The crystal unit 1 of this embodiment includes a case 2, a tuning-fork type bent crystal resonator 3, and a lid 19. The tuning fork type bent crystal resonator 3 includes tuning fork arms 4 and 5 and a tuning fork base 6, and the tuning fork base 6 is attached to a fixing portion 7 provided in the case 2 by a conductive adhesive 8, 9 or It is fixed by solder. Further, grooves 10 and 11 are provided in the tuning fork arms 4 and 5, and in this embodiment, the grooves provided in the tuning fork arms extend to the tuning fork base 6. The details of the tuning-fork type bent crystal resonator housed in the case of the crystal units of this embodiment and other embodiments will be described in detail with reference to FIGS. 2 to 7 and FIGS.

  Further, electrodes 12 and 13 are arranged on the fixed portion 7, and are connected to electrodes having different polarities arranged on the tuning fork base 6, respectively. That is, a two-electrode terminal is formed. Further, the electrode 12 of the fixed portion 7 is arranged so as to extend to one end of the back surface of the case 2 and is configured to have the same polarity as the electrode 14. On the other hand, the electrode 13 of the fixed portion 7 is arranged so as to extend to the other end of the back surface of the case 2 and is configured to have the same polarity as the electrode 15. The case 2 and the lid 19 are joined via a joining member 16.

  In the present embodiment, the electrode 14 and the electrode 15 are provided at opposite ends of the case 2, but the electrodes 14 and 15 may be provided at arbitrary positions on the back surface of the case. The electrode configuration on the back surface of the case 2 is also applied to the case of the embodiment described below.

  Further, in this embodiment, the case 2 is provided with a hole 17 for sealing in a vacuum, and the case 2 is sealed with a sealing member 18. In this embodiment, the case is made of ceramics or glass, the lid is made of glass or metal, and the joining member for joining the case and the lid is made of low-melting glass or metal containing solder. Similarly, low-melting glass or metal containing solder is used as a sealing member for sealing the hole.

  In this embodiment, the case 2 is provided with the hole 17 for sealing in a vacuum. However, the case 2 is not provided with the hole 17 for vacuum sealing, and the case and the lid are joined together. And may be directly sealed in a vacuum through the above. The configuration of the case and the lid of this embodiment is also applied to the case and the lid of the other embodiments described below.

  FIG. 2 shows an external view of a tuning-fork type bent crystal resonator 21 which is housed in a case 2 and constitutes a crystal unit of this embodiment together with the case and a lid 3 for sealing the case, and a coordinate system thereof. . The coordinate system O, the electric axis x, the mechanical axis y, and the optical axis z constitute O-xyz. The tuning fork type bent crystal resonator 21 of this embodiment includes a tuning fork arm 22, a tuning fork arm 23, and a tuning fork base 24. The tuning fork arm 22 and the tuning fork arm 23 are connected to the tuning fork base 24. Further, a groove 25 is provided on the upper surface of the tuning fork arm 22 with a neutral line interposed therebetween, and a groove 31 is provided on the upper surface of the tuning fork arm 23 similarly to the tuning fork arm 22. In FIG. 2, the electrodes arranged on the tuning-fork type bent crystal resonator 21 are not shown, and the angle θ is a rotation angle around the x-axis, and is usually selected in a range of 0 to 10 °.

  FIG. 3 is a cross-sectional view of the tuning-fork type bent crystal resonator 21 of FIG. 2, and FIG. 4 is a top view of the tuning-fork type bent crystal resonator 21 of FIG. Here, the AA 'sectional view of the tuning fork arm 22 in FIG. 2 is shown on the right side of the drawing in FIG. 3, and the BB' sectional view of the tuning fork arm 23 in FIG. 2 is shown in FIG. Shown on the left side of the paper. Grooves 25 and 26 are provided on the upper and lower surfaces of the tuning fork arm 22 with a neutral line 37 (see FIG. 4) interposed therebetween. Further, an electrode 27 is disposed in the groove 25, an electrode 28 is disposed in the groove 26, and electrodes 29 and 30 are disposed on side surfaces thereof, so that the electrodes 27 and 28 and the electrodes 29 and 30 are different electrodes. Is configured. More specifically, two step portions are provided along the length direction of the tuning fork arm in the width direction of the upper and lower surfaces of each tuning fork arm, and the two step portions have the same polarities. Are arranged, and the electrodes arranged on the side surface opposite to the electrodes are configured to have different polarities. At the same time, the grooves 25, 26, the electrodes 27, 28 and the side electrodes 29, 30 of the tuning fork arm 22 are provided to extend to the tuning fork base 24.

Similarly to the tuning fork arm 22, grooves 31 and 32 are provided on the upper and lower surfaces of the tuning fork arm 23 with a neutral line 38 (see FIG. 4) interposed therebetween. An electrode 33 is arranged in the groove 31 and an electrode 34 is arranged in the groove 32. Further, electrodes 35 and 36 are arranged on the side surfaces, and the electrodes 33 and 34 and the electrodes 35 and 36 are configured to be different electrodes from each other. At the same time, the grooves 31 and 32 of the tuning fork arm 23, the electrodes 33 and 34, and the electrodes 35 and 36 on the side surfaces are provided to extend to the tuning fork base 24. The electrodes of the tuning fork arms 22 and 23 are connected as shown in FIG. 3 to form a two-electrode terminal structure CC '. Now, when a DC voltage is applied between the electrode terminal C-C ', to the tuning fork arm 22 and the tuning fork arm 23 is an electric field E _x acts in each direction of the arrow. Since this electric field E _x is perpendicular to the electrodes in the tuning fork arms, i.e. linear works, electric field E _x is increased, occurrence of distortion is increased. As a result, smaller loss equivalent series resistance R ₁ even when the size of the tuning fork type flexural quartz crystal resonator 21, a high tuning-fork flexural crystal oscillator quality factor Q value is obtained.

4, the arrangement and dimensions of the grooves 25 and 31 will be described in detail. That is, the groove 25 is provided on the tuning-fork type bent crystal resonator 21 of this embodiment so as to sandwich the neutral line 37 of the tuning fork arm 22, and the groove 31 is also provided on the other tuning-fork arm 23 across the neutral line 38. I have. Then, the width W ₂ of their grooves 25 and grooves 31 is preferably the sandwiched dimensions and neutral line 38 and neutral line 37. The reason is that when the bending mode is caused, the vibration of the tuning fork arms 22 and 23 can be facilitated. Thus, it is possible to reduce the equivalent series resistance R _1, can achieve high oscillator quality factor Q value.

に、具体的に述べると、溝幅Ｗ_２と音叉腕幅Ｗとの比（Ｗ_２／Ｗ）が０．３５〜０．８５となるように形成される。このように形成することにより、音叉腕の中立線３７と中立線３８を基点とする慣性モーメントが大きくなる。即ち、電気機械変換効率が良くなるので、等価直列抵抗Ｒ_１の小さい、Ｑ値の高い、しかも容量比の小さい音叉型屈曲水晶振動子を得ることができる。Further, the total width W of the tuning fork arms 22 and 23 is given by W = W ₁ + W ₂ + W ₃ , and usually W ₁ = W ₃

To, specifically by the ratio of the groove width _{W 2} and the tuning fork arm width W _(W 2 / W) is formed so as to be from .35 to .85. By forming in this manner, the moment of inertia with respect to the neutral line 37 and the neutral line 38 of the tuning fork arm is increased. That is, since the electro-mechanical conversion efficiency is improved, a small equivalent series resistance R _1, a high Q value, it is possible to obtain a small tuning-fork type flexural quartz crystal resonator capacity ratio.

In contrast, for the length _{l 1} of the groove 25 and the groove 31, the grooves 25, 31 is, extends to the fork base 24 of length _{l 2} from the tuning fork arms 22 and 23, extending to the fork base 24 the length of the groove to be standing is dimensioned such that l _3. Therefore, the length of the groove provided in the tuning fork arms 22 and 23 is given by l ₀ = (l ₁ −l ₃ ), and in order to obtain a resonator having a small equivalent series resistance R ₁ , 0.4 to It has a value in the range of 0.7. Further, in order to increase the amount of distortion of the tuning fork base, reduce R ₁ , and obtain a vibrator free of energy leakage due to support and fixing, the length l ₃ of the groove of the tuning fork base and the length l of the tuning fork base 1 _The grooves 25 and 31 are configured such that the ratio to ₂ is a value within the range of 0.04 to 0.78. In this embodiment, although the electrode to all sides of length l ₃ of the grooves are arranged, when the side surface of the electrode is arranged shorter than the length l ₃ of the groove, l ₃ is the length of the electrode The same length. The total length 1 of the tuning-fork type bent crystal resonator 21 is determined based on a required frequency, a size of a storage container, and the like. At the same time, in order to obtain a good tuning-fork type bent quartz crystal vibrating in the fundamental wave mode, there is a close relationship between the groove length l ₁ and the total length l, as described below. .

That is, the ratio (l ₁ / l) of the length l _{1 of the} groove provided in the tuning fork arms 22, 23 or the tuning fork arms 22, 23 and the tuning fork base 24 to the total length ₁ of the tuning fork type bent crystal resonator 21 is 0. The length of the groove is set to a value within the range of 0.2 to 0.68. The reason for this formation is that it is possible to suppress the second harmonic vibration (frequency which is about 6.3 times the fundamental frequency) which is unnecessary vibration. Therefore, a good tuning-fork type bent quartz crystal vibrating easily in the fundamental mode can be realized. If More specifically, the equivalent series resistance R ₁ of the tuning-fork type flexural quartz crystal resonator vibrating at the fundamental mode is smaller than the equivalent series resistance R ₂ at the second harmonic vibration. That is, R ₁ <R ₂ , and in a crystal oscillator including an amplifier (CMOS inverter), a capacitor, a resistor, the crystal unit of the present embodiment, and the like, a good crystal oscillator in which the vibrator easily vibrates in the fundamental mode can be realized. .

Furthermore, although not shown, the tuning fork type flexural quartz crystal resonator 21 of the present embodiment is a vibrator in the thickness t, and has a thickness t ₁ of the groove. In this embodiment, the groove is formed such that the ratio (t ₁ / t) of the thickness t _{1 of} the groove to the thickness t of the tuning fork arm or the tuning fork arm and the base of the tuning fork is in the range of 0.05 to 0.79. Is formed. By thus forming, the electric field E _x between the side electrodes and the side surface of the electrode against its groove in the fork arm or fork arms and fork base increases. That is, good electromechanical conversion efficiency, small vibrator equivalent series resistance R ₁ can be obtained.

Further, in this embodiment, the tuning fork base portion 24 in FIG. 4, is a whole lower portion of the length l ₂ of the oscillator 21, also tuning fork arms 22 and tuning fork arms 23, in FIG. 4, transducer 21 there is a whole upper portion from the portion of the length l ₂ of the. In this embodiment, the fork of the tuning fork has a rectangular shape, but the present invention is not limited to the above shape, and the fork of the tuning fork may have a U-shape. Also in this case, as in the case of the rectangular shape, the dimensional relationship between the tuning fork arm and the tuning fork base is the same as that described above. Further, in the present embodiment, the electrodes are arranged on the groove and the side surface of the tuning fork base. However, the present invention is not limited to this, and the electrode (side surface electrode) arranged on the side surface of the groove of the tuning fork base. On the other hand, at least one electrode having a different polarity from the side electrode of the groove, which is adjacent in the x-axis direction (width direction), may be arranged on the surface of the tuning fork base. For example, two electrodes (for example, electrodes 25a and 31a shown by phantom lines in FIG. 4) having different polarities from the side electrodes of the adjacent grooves are provided on the surface between the grooves of the tuning fork base. May be arranged on the upper and lower surfaces. In this case, the counter electrodes in the thickness direction are configured to have the same polarity. With this configuration, since the strain amount of the tuning fork base portion is increased, it is possible to obtain a small tuning-fork flexural crystal oscillator equivalent series resistance R _1.

  FIG. 5 shows a tuning-fork type bent crystal oscillator 69 housed in the case 2 shown in FIG. 1 and constituting the crystal unit of the second embodiment of the present invention together with the case and the lid 3 shown in FIG. FIG. 1 shows an external view and a coordinate system thereof. In the tuning fork-type bent quartz-crystal vibrator 69 of this embodiment, similarly to the tuning fork-type bent quartz-crystal vibrator 21 of the first embodiment, the grooves 71 and 77 are formed in the tuning fork arm 70 and the tuning fork arm 76, respectively. A groove 82 and a groove 86 are provided between the groove 71 and the groove 77 in the tuning fork base 90, respectively.

  FIG. 6 is a cross-sectional view of the tuning-fork base 90 of the tuning-fork type bent crystal resonator 69 shown in FIG. 6, the cross-sectional shape and electrode arrangement of the tuning fork base 90 of the crystal unit shown in FIG. 5 will be described in detail. Grooves 71 and 72 are provided in the tuning fork base 90 connected to the tuning fork arm 70. Similarly, grooves 77 and 78 are provided in the tuning fork base 90 connected to the tuning fork arm 76. Further, a groove 82 and a groove 86 are provided between the groove 71 and the groove 77. A groove 83 and a groove 87 are provided between the groove 72 and the groove 78. The grooves 73 and 72 have electrodes 73 and 74, the grooves 82 and 83 have electrodes 84 and 85, the grooves 86 and 87 have electrodes 88 and 89, and the grooves 77 and 78 have electrodes 84 and 85. , Electrodes 79 and 80 are arranged, and electrodes 75 and 81 are arranged on both side surfaces of the tuning fork base 90.

Further, the electrodes 75, 79, 80, 84, 85 are arranged so as to have the same polarity on one side, and the electrodes 73, 74, 81, 88, 89 are arranged so as to have the same polarity on the other side. '. That is, the electrodes of the grooves opposed in the z-axis direction have the same polarity, and the electrodes adjacent in the x-axis direction have different polarities. Although not shown, electrodes are arranged on the tuning fork arms 70 and 76 in the same manner as the tuning fork type bent crystal resonator 21 (see FIG. 3) of the first embodiment. When a DC voltage is applied to the two-electrode terminal EE '(positive to the E terminal and negative to the E' terminal), the electric field Ex acts as shown by the arrow in FIG. Since the electric field Ex is drawn out perpendicularly to the electrodes by the electrodes arranged on the side surfaces of the crystal unit and the side surfaces in the groove, that is, linearly, the electric field Ex increases, and as a result, the amount of generated strain also increases. Become. Therefore, even when is downsized tuning-fork flexural crystal oscillator, a small equivalent series resistance R _1, a high tuning-fork flexural crystal oscillator quality factor Q value is obtained.

FIG. 7 shows a top view of the tuning-fork type bent crystal resonator 69 of FIG. FIG. 7 specifically describes the arrangement of the grooves 71 and 77. A groove 71 is provided so as to sandwich the neutral line 91 of the tuning fork arm 70. The other tuning fork arm 76 is also provided with a groove 77 so as to sandwich the neutral line 92. Further, in the tuning-fork type bent quartz crystal vibrator 69 of the present embodiment, the groove 82 and the groove 86 are also provided in the portion of the tuning-fork base 90 sandwiched between the groove 71 and the groove 77. By providing the grooves 71 and 77 and the grooves 82 and 86, the electric field Ex acts on the quartz oscillator 69 as described above as shown by the arrow in FIG. Are drawn perpendicularly to the electrodes, that is, linearly, by the electrodes arranged on the side surfaces of the groove and the side surfaces in the groove, so that the electric field Ex increases and, as a result, the amount of generated distortion also increases. Thus, the shape and the electrode configuration of the tuning fork type quartz resonator 69 of the present embodiment, excellent electrical characteristics even when the size of the tuning fork crystal, i.e., a small equivalent series resistance R ₁ Thus, a crystal resonator having a high quality factor Q value can be realized. The width dimension W = W ₁ + W ₂ + W ₃ , the length dimensions l ₁ , l ₂ , l ₃ and the thickness dimensions t, t ₁ are the same as those in the first embodiment described above. It is desirable that these dimensional conditions have already been described in detail in the description of FIG.

  FIG. 11 shows a tuning fork type bent crystal resonator 300 housed in the case 2 shown in FIG. 1 and constituting the crystal unit of the third embodiment of the present invention together with the case and the lid 3 shown in FIG. FIG. 1 shows an external view and a coordinate system thereof. FIG. 12 is a top view of the vibrator 300 of FIG. 11, and FIG. 13 is a cross-sectional view showing the shape of the tuning fork-type bent quartz-crystal vibrator 300 of FIG. As shown in FIG. 11, the coordinate system of the vibrator 300 is rotated by a rotation angle θ degrees around an x-axis (electric axis) which is a crystal axis of quartz. The new axes after rotation of the y-axis (mechanical axis) and the z-axis (optical axis), which are the crystal axes of quartz, are the y'-axis or the z'-axis, respectively. The angle is set within the range of °. The tuning-fork type bent crystal resonator 300 includes a tuning fork arm 301, a tuning fork arm 302, and a tuning fork base 303 and has a thickness t. Further, a step is provided on the tuning fork arm 301, and a step portion (the inner side surface of the upper surface portion 301 a) 304 is formed between the upper surface portion 301 a and the middle surface portion 301 b, and the middle surface portion 301 b and the step portion 304 are formed with a tuning fork base portion. It extends to 303. Also, on the upper surface of the tuning fork arm 302, similarly to the tuning fork arm 301, a middle portion 302b and a step portion 305 are formed as shown in FIGS. The tuning fork base 303 also has an upper surface 303a, a middle surface 303b, and a step 306.

That is, as shown in FIG. 12, a step 304 is provided at an arbitrary position in the width direction of the tuning fork arm 301 of the vibrator 300, while a step 305 is provided at an arbitrary position in the width direction of the tuning fork arm 302. Each of the steps 304 and 305 is provided so as to extend to the tuning fork base 303, and is connected to the step 306 of the tuning fork base 303. The dimension between the side surface of the tuning fork arm and the stepped portion is preferably not more than half of the tuning fork arm width W. By configuring the dimensions in this manner, the electric field Ex can be increased. As a result, a small equivalent series resistance R _1, it is possible to obtain a high tuning-fork flexural crystal oscillator quality factor Q value.

  Further, as shown in FIG. 13, a step is provided on the lower surface of the tuning fork arm 301 similarly to the upper surface, and a step 307 is formed between the lower surface 301c and the middle surface 301d, and the step 307 is formed by the tuning fork. It extends to the base 303. Here, the step portion 304 on the upper surface faces the inside of the tuning fork arm 301, and the step portion 307 on the lower surface faces the outside of the tuning fork arm 301. An electrode 308 is arranged on the step 304, and an electrode 309 connected to the electrode 308 is arranged on the middle surface 301b. On the other hand, the electrode 310 is disposed on the step portion 307, and the electrode 311 connected to the electrode 310 is disposed on the middle portion 301d. An electrode 312 is arranged on a side surface (outside surface of the upper surface portion 301 a of the tuning fork arm 301) of the tuning fork arm 301 opposite to the electrode 308 arranged on the step portion 304. An electrode 313 is disposed on the opposite side surface (the inner side surface of the lower surface portion 301c of the tuning fork arm 301).

  By arranging the electrodes in this manner, the electric field Ex acts between the electrodes 308 and 312 and between the electrodes 310 and 313 perpendicularly to the electrodes. Similarly, on the tuning fork arm 302, a step is provided symmetrically with respect to the tuning fork arm 301, and the respective electrodes are arranged. That is, step portions 305 and 314, an upper surface portion 302a and a middle surface portion 302b are provided on the upper surface and the lower surface of the tuning fork arm 302, and an electrode 315 is provided on the step portion 305 and an electrode connected to the electrode 315 is provided on the middle surface portion 302b. 316 are arranged. An electrode 317 is arranged on the step portion 314, and an electrode 318 connected to the electrode 317 is arranged on the middle portion 302d. Further, an electrode 319 is provided on a side surface of the tuning fork arm 302 facing the electrode 315 (an outer surface of the upper surface 302a of the tuning fork arm 302), and on a side surface facing the electrode 317 (an inner surface of the middle surface 302b of the tuning fork arm 302). Is provided with an electrode 320. Further, the electrode configuration will be described in detail. The electrodes 308, 309, 310, 311, 319, and 320 have the same polarity and the electrodes 312, 313, 315, 316, 317, and 318 have the other polarity and have two electrodes. It constitutes a terminal KK '.

Now, when an alternating voltage is applied to the electrode terminals KK ', the electric field Ex acts vertically and alternately between the electrodes as indicated by the solid and dotted arrows in FIG. 13 to easily cause bending vibration. As a result, smaller loss equivalent series resistance R _1, a high tuning-fork flexural crystal oscillator quality factor Q value is obtained.

  In this embodiment, the step portion is provided extending from the tuning fork arm to the tuning fork base. However, the step portion may be provided only on the tuning fork arm or may be provided only on the tuning fork base. Further, a groove may be provided between the step portion 307 on the lower surface extending to the tuning fork base 303 and the step portion 314 so that the electrode on the side surface of the groove and the opposing electrode have different polarities. Similar effects can be obtained.

  FIG. 14 shows a tuning fork type bent crystal resonator 321 which is housed in the case 2 shown in FIG. 1 and forms a crystal unit of the fourth embodiment of the present invention together with the case and the lid 3 shown in FIG. FIG. 1 shows an external view and a coordinate system thereof. FIG. 15 is a top view of the vibrator 321 of FIG. 14, and FIG. 16 is a cross-sectional view showing the shape of the tuning-fork type bent crystal vibrator 321 of FIG. Note that the coordinate system of this embodiment is the same as the coordinate system shown in FIG. The tuning-fork type bent crystal resonator 321 here includes a tuning fork arm 322, a tuning fork arm 323, and a tuning fork base 324, and has a thickness t.

  Further, a step is provided on the tuning fork arm 322, and as shown in FIGS. 14 and 16, an upper surface portion 322a, a middle surface portion 322b, a middle surface portion 322d, and a lower surface portion 322c are formed, and a step portion (upper surface portion 322a) is formed. The inner surface 325 is formed, and the middle surface 322 b and the step 325 extend to the tuning fork base 324. Also, on the upper surface of the tuning fork arm 323, as in the case of the tuning fork arm 322, a middle surface portion 323b and a step portion 326 are formed as shown in FIGS. The tuning fork base 324 also has an upper surface 324a, a middle surface 324b, a lower surface 324c (not shown), and a step 327.

  That is, as shown in FIGS. 15 and 16, the tuning fork arm 322 and the tuning fork arm 323 are provided with a step 325 and a step 326, and the steps 325 and 326 extend to the tuning fork base 324, and Unit 327. Further, a step 325 is provided on the upper surface of the tuning fork arm 322 and a step 328 is provided on the lower surface, and a step 326 is provided on the upper surface of the tuning fork arm 323 and a step 329 is provided on the lower surface.

  Here, the upper step 325 and the lower step 328 face the inside of the tuning fork arm 322, and the upper step 326 and the lower step 329 face the inside of the tuning fork arm 323. An electrode 330 is arranged on the step portion 325, an electrode 331 connected to the electrode 330 is arranged on the middle surface portion 322b, an electrode 332 is arranged on the step portion 328, and an electrode 333 connected to the electrode 332 is arranged on the middle surface portion 322d. Is done. Further, an electrode 334 is arranged on the inner side surface of the tuning fork arm 322, and an electrode 335 is arranged on the outer side surface of the tuning fork arm 322. As a result, the electrode 335 having a different polarity is arranged so as to oppose the electrode 330 and the electrode 332.

  Similarly to the tuning fork arm 322, the tuning fork arm 323 is provided with a step symmetrically with the tuning fork arm 322 and the respective electrodes are arranged. That is, the tuning fork arm 323 is provided with step portions 326 and 329, an upper surface portion 323a, a middle surface portion 323b, a middle surface portion 323d, and a lower surface portion 323c. The electrode 337 is arranged on the step portion 329, and the electrode 339 is arranged on the middle surface portion 323d. Further, since the electrode 340 is disposed on the inner side surface of the tuning fork arm 323 and the electrode 341 is disposed on the outer side surface of the tuning fork arm 323, the electrode 341 having a different polarity is disposed so as to oppose the electrode 336 and the electrode 338. Configuration. Further, as shown in FIG. 16, the electrodes 330, 331, 332, 333, 340, 341 have the same polarity, and the electrodes 334, 335, 336, 337, 338, 339 have the other polarity. The terminal LL ′ is formed.

When an alternating voltage is applied to the two-electrode terminal LL ', the electric field Ex acts perpendicularly and alternately between the electrodes as indicated by the solid and dotted arrows in FIG. 16 to easily cause bending vibration. . As a result, smaller loss equivalent series resistance R _1, a high tuning-fork flexural crystal oscillator quality factor Q value is obtained. In the present embodiment, the middle portions 322b, 322d, 323b, 323d are provided inside the tuning fork arms 322, 323. However, the same effect can be obtained by providing the middle portions outside the tuning fork arms 322, 323.

  Further, in this embodiment, the electrodes 334 and the electrodes 340 are arranged on both inner side surfaces of the tuning fork arm having the middle surface portion. However, these electrodes may not be arranged, or the electrodes of each middle surface portion may be disposed. They may be arranged so as to have the same polarity, and have the same effects as those described above.

  FIG. 17 shows a tuning-fork type bent crystal resonator 351 housed in the case 2 shown in FIG. 1 and constituting the crystal unit of the fifth embodiment of the present invention together with the case and the lid 3 shown in FIG. FIG. On the upper and lower surfaces of the tuning fork arm 352 and the tuning fork arm 353, one step is provided at an arbitrary position in the width direction (a step on the lower surface is not shown). In FIG. 17, a step 355 and a step 356 on the upper surface are provided. Further, in the present embodiment, middle portions 355b and 356b are provided outside the tuning fork arms 352 and 353. Although not shown, the middle surface portions 355d and 356d are also provided on the back surface, and the step portion 355 and the step portion 356 are provided to extend to the tuning fork base portion 354. The electrode arrangement of the tuning fork arm is arranged in the same manner as in FIG.

  FIG. 18 shows a tuning-fork type bent crystal resonator 351a which is housed in the case 2 shown in FIG. 1 and forms a crystal unit of the sixth embodiment of the present invention together with the case and the lid 3 shown in FIG. FIG. On the upper and lower surfaces of the tuning fork arm 352a and the tuning fork arm 353a, a step is provided at an arbitrary position in the width direction so as to extend in the length direction of the tuning fork arm (the step on the lower surface is not shown). . In FIG. 18, a step portion 355a and a step portion 356a on the upper surface are provided. It is provided as follows. More specifically, on the upper and lower surfaces of the tuning fork arm, one step is provided at an arbitrary position in the width direction, and the step is provided by extending one in the length direction of the tuning fork arm. The step has one step in the length direction of the tuning fork arm. Here, "one step portion at an arbitrary position in the width direction" includes a shape having a so-called stepped portion having a different thickness in the width direction. Note that at least one of the upper and lower surfaces of the tuning fork arm of the tuning fork type bent crystal resonator is provided with one step at an arbitrary position in the width direction, and the step has at least one step in the length direction of the tuning fork arm. As long as the configuration extends, not only the configuration of the present embodiment but also effects similar to the effects of the present embodiment described later can be obtained.

  Furthermore, in the present embodiment, middle surfaces 355b and 356b are provided outside the tuning fork arms 352a and 353a. Although not shown, the middle surface portions 355d and 356d are also provided on the back surface, and in this embodiment, the step portion 355a and the step portion 356a are provided to extend to the tuning fork base portion 354a. May be provided only for The electrode arrangement of the tuning fork arm is arranged in the same manner as in FIG.

  In the present embodiment, one step is provided in the length direction of the tuning fork arm, but two or more steps may be provided. The step may be divided in the length direction of the tuning fork arm. Further, the configuration of the step portion and the step portion of the present embodiment can be applied to the tuning fork type bent quartz crystal resonators of the third to fifth embodiments.

  Next, an embodiment of a method for manufacturing a crystal unit according to the present invention will be described in accordance with the steps shown in the drawings. FIG. 27 is a process chart of an embodiment of the manufacturing method of the present invention for manufacturing the crystal unit of the above embodiment. Symbols S-1 to S-12 indicate the step numbers. First, in S-1, a crystal wafer 40 (shown in a sectional view) is prepared. Next, in S-2, a metal film (for example, gold) 41 is formed on the upper and lower surfaces of the quartz wafer 40 by vapor deposition or sputtering. Further, in S-3, a resist 42 is applied on the metal film 41. Then, after the metal film 41 and the resist 42 are removed while retaining the tuning fork shape by a photolithography process, the tuning fork shape including the tuning fork arms 43 and 44 and the tuning fork base 45 indicated by S-4 is formed by etching. Is formed. Although FIG. 27 shows the formation of one tuning fork shape, a large number of tuning fork shapes are similarly formed on one quartz crystal wafer.

  Next, the same metal film and resist as those shown in the steps S-2 and S-3 are applied in the tuning fork shape of S-4, and the tuning fork arm 43 and S-5 shown in S-5 are applied by a photolithography step and etching. Grooves 46, 47, 48, 49 are formed in the tuning fork arm 44. Further, a metal film and a resist are applied to S-5, and electrodes having different polarities are formed by a photolithography process as shown by S-6.

  That is, the electrodes 50 and 53 disposed on the side surface of the tuning fork arm 43 and the electrodes 55 and 56 disposed in the grooves 48 and 49 of the tuning fork arm 44 are connected and formed to have the same polarity. Similarly, the electrodes 51 and 52 disposed in the grooves 46 and 47 of the tuning fork arm 43 and the electrodes 54 and 57 disposed on the side surface of the tuning fork arm 44 are connected and formed to have the same polarity. More specifically, since the electrodes having different polarities are arranged on the side surface of the tuning fork arm opposing the side surface (step portion) of the groove, the tuning fork arm performs bending vibration in the opposite phase.

  In this embodiment, the shape of the tuning fork is formed from the step of S-3, and then the groove is formed in the tuning fork arm. However, the present invention is not limited to the above-described embodiment, and the process of S-3 is not limited. The groove may be formed first, and then the tuning fork shape may be formed. Alternatively, the tuning fork shape and the groove may be formed simultaneously. Further, grooves may be formed in the tuning fork arm and the tuning fork base in steps S-4 to S-5. Further, although the groove is formed in the present embodiment, a step portion and an intermediate surface portion may be formed instead of the groove.

  In the next step, there are two methods A and B indicated by arrows. A is the case where there is no hole in the case, and B is the case where there is a hole. First, in the step A, the tuning fork base 45 of the formed tuning fork-type bent quartz-crystal vibrator 60 is fixed to the fixing portion 59 of the case 58 with a conductive adhesive 61 or solder as shown by S-7. Next, in S-8, the frequency of the crystal unit 60 is adjusted to a required value by the laser 62 or vapor deposition. Finally, as shown in S-9, the case 58 and the lid 63 are connected to the low melting glass 64 or It is joined via a metal such as solder. In this case, since the case 58 has no hole for vacuum sealing, the joining is performed in a vacuum. Although not shown, the frequency may be adjusted with a laser after S-9 to further reduce the frequency deviation.

  Next, in step B, the tuning fork base 45 of the tuning-fork type bent quartz-crystal vibrator 60 is fixed to the fixing portion 59 of the case 65 with a conductive adhesive 61 or solder in S-10. Next, frequency adjustment is performed in the same manner as in S-8. Further, in S-11, the case 65 and the lid 63 are joined in the same manner as in S-9. Further, the frequency is adjusted in a vacuum, and finally, in S-12, the hole 67 provided in the case 65 is sealed in a vacuum with a metal 66 such as low-melting glass or solder. Thus, in the present embodiment, the frequency adjustment is performed after the step S-10 and after the step S-11, but the frequency adjustment may be performed after at least one of the steps. Similarly to the process A, the frequency may be adjusted with a laser after S-12 in order to reduce the frequency deviation.

  In the present embodiment, a method of manufacturing a crystal unit including one tuning-fork type bent crystal resonator has been described. However, a crystal unit including two or more (plural) resonators is manufactured in the same process. You. That is, two or more (a plurality of) tuning fork shapes connected at the tuning fork base through the connecting portion from the step of S-3 are formed (S-4), and further, in S-5, grooves or grooves are formed in both tuning fork arms. Grooves are formed in both tuning fork arms and both tuning fork bases. In S-6, each tuning fork-type bent quartz crystal vibrates in the opposite phase. They are arranged so as to be electrically parallel to each other, and are formed in step A (S-7 to S-9) or step B (S-10 to S-12). Furthermore, in order to reduce the frequency deviation, the frequency of both oscillators may be adjusted with a laser after S-9 or S-12.

  The crystal unit of the present invention manufactured by the above method can realize an ultra-small, high-quality, low-cost crystal unit. At the same time, a crystal oscillator having the crystal unit and a portable device having the crystal unit can be realized with high quality.

  As described above, the present invention has been described based on the illustrated example. However, the present invention is not limited to the above-described example. For example, in the tuning fork type bent crystal resonator in the crystal unit of the second embodiment, the groove provided in the tuning fork arm is provided. The groove is formed so as to extend to the tuning fork base, and a groove is further provided between the grooves provided on the tuning fork base. The electrode configuration of the groove having such a configuration is described. Electrodes are also arranged on the groove of the continuous tuning fork arm and on the side surface of the tuning fork arm, similarly to the tuning fork type bent crystal resonator in the crystal unit of the first embodiment.

  Further, in the third to sixth embodiments of the present invention, one step portion is provided at an arbitrary position in the width direction of the upper and lower surfaces of the tuning fork arm so as to be linear in the length direction of the tuning fork arm. An electrode is disposed opposite to the side of the tuning fork arm and the tuning fork arm is shown. The counter electrode shows a tuning fork type bent quartz crystal resonator having polarities different from each other. It may be provided so as to be curved in the vertical direction. At the same time, the electrodes are configured such that the tuning fork arms vibrate in opposite phases. Further, in the above embodiment of the present invention, the groove is provided in the tuning fork arm or the tuning fork arm and the tuning fork base, but a hole may be provided instead of the groove.

  In the first and second embodiments, two opposing steps (four steps) as grooves are connected to the tuning-fork type bent quartz crystal vibrator at the ends thereof. Although a square is shown in the top view), the shape of the groove applicable to the present invention is not limited to this. That is, the shape of the groove applicable to the present invention includes a shape having at least two steps, and has a step extending in the longitudinal direction of the tuning fork arm or the tuning fork base, for example, a triangle. The above-mentioned shapes including polygons and shapes including arcs are also included. At the same time, the groove also includes a shape in which one end of the step portion facing in the length direction is connected via the step portion.

  Furthermore, in the above embodiment, the tuning fork base and the fixing part are fixed by a conductive adhesive or solder, but the present invention is not limited to this, and the tuning fork base and the fixing part of the case are arranged. Alternatively, a method of fixing metals by interatomic bonding may be used.

  Further, the tuning fork type bent crystal resonator of the above embodiment is composed of two tuning fork arms, but the present invention is not limited to this, and three or more tuning fork arms may be used. The quartz oscillator of the above embodiment is formed by using a chemical etching method.

As described above, according to the crystal resonator, the crystal unit, the crystal oscillator, the portable device, and the manufacturing method thereof, the following remarkable effects can be obtained.
(1) An electric field works vertically by providing a groove across the neutral line of the tuning fork arm. As a result, the electromechanical conversion efficiency is improved, a small equivalent series resistance R _1, and a high tuning fork type flexural quartz crystal resonator and a crystal unit and a crystal oscillator that houses it the quality factor Q value portable devices with it can get.
(2) Since the smaller miniature tuning fork flexural crystal oscillator equivalent series resistance R ₁ is mounted, micro crystal unit can be achieved with high quality.
(3) by indicating the relationship between the fork size and the groove of the tuning-fork type flexural quartz crystal resonator oscillates at the fundamental mode with reduced second harmonic vibration, moreover, small micro tuning fork equivalent series resistance R ₁ Since it is possible to obtain a type-bent crystal resonator, a very small crystal unit and a crystal oscillator can be obtained with high quality, and since the crystal oscillator is mounted on a portable device, a highly reliable portable device can be realized.

  Since the crystal unit, crystal unit, and crystal oscillator of the present invention are ultra-small and have high frequency stability, they are particularly applied to electronic devices such as portable devices and consumer devices that are ultra-small and require high frequency stability. it can.

(A) and (b) are a front view of the first embodiment of the crystal unit of the present invention with the lid omitted, and a side view with the lid attached. FIG. 3 is an external view of a tuning-fork type bent crystal resonator constituting the crystal unit of the first embodiment and a coordinate system thereof. FIG. 3 is a sectional view taken along the line AA ′ and a line BB ′ of the tuning fork arm of FIG. 2. FIG. 3 is a top view of the tuning-fork type bent quartz crystal resonator shown in FIG. 2. FIG. 4 is a schematic view of a tuning fork-type bent crystal resonator constituting a crystal unit according to a second embodiment of the present invention and a coordinate system thereof. It is DD 'sectional drawing of the tuning fork base part of the tuning fork type | mold bending quartz-crystal resonator of FIG. FIG. 6 is a top view of the tuning-fork type bent crystal resonator of FIG. 5. FIG. 9 is a schematic view of a tuning-fork type bent crystal resonator constituting a crystal unit according to a third embodiment of the present invention and a coordinate system thereof. FIG. 12 is a top view of the tuning-fork type bent crystal resonator illustrated in FIG. 11. FIG. 13 is a cross-sectional view showing the shape of the II ′ cross section of the tuning fork arm of FIG. 12. FIG. 9 is an external view of a tuning-fork type bent crystal resonator constituting a crystal unit according to a fourth embodiment of the present invention and a coordinate system thereof. FIG. 15 is a top view of the tuning-fork type bent quartz crystal resonator shown in FIG. 14. It is sectional drawing which shows the shape of the JJ 'cross section of the tuning fork arm of FIG. FIG. 13 is a top view of a tuning-fork type bent crystal resonator constituting a crystal unit according to a fifth embodiment of the present invention. FIG. 16 is a top view of a tuning-fork type bent crystal resonator constituting a crystal unit according to a sixth embodiment of the present invention. It is a flowchart of one Example of a manufacturing method of a crystal unit of the present invention. (A) and (b) are a front view of a conventional crystal unit without a cover, and a side view with a cover.

Explanation of reference numerals

4, 5, 22, 23, 43, 44 Tuning fork arm 6, 24, 45, 90, 104, 116, 148, 156 Tuning fork base 7, 59, 106 Fixed part W ₂ groove width W Total width of tuning fork arm W ₁ , W ₃ Partial width of tuning fork arm l Length of ₁ groove l ₂ Length of tuning fork base t Thickness of vibrator t Thickness of ₁ groove

Claims (5)

  A method for manufacturing a tuning fork-type bent crystal vibrator comprising a tuning fork base and a tuning fork arm connected to the tuning fork arm, wherein the tuning fork arm includes a first tuning fork arm and a second tuning fork arm. A first tuning fork arm, a second tuning fork arm, and a tuning fork base; and a first tuning fork arm and a second tuning fork arm. Forming one groove; and arranging the first electrode in the groove formed in the first tuning fork arm and the second tuning fork arm and the second electrode on both side surfaces of each tuning fork arm. Manufacturing method of a quartz oscillator.   A method for manufacturing a tuning fork-type bent crystal vibrator comprising a tuning fork base and a tuning fork arm connected to the tuning fork arm, wherein the tuning fork arm includes a first tuning fork arm and a second tuning fork arm. A first tuning fork arm, a second tuning fork arm, and a tuning fork base; and a first tuning fork arm and a second tuning fork arm. Forming a single groove, wherein the tuning fork arm and the groove formed in the tuning fork arm are formed in the same step.   A method for manufacturing a crystal unit including a case, a lid, and a crystal resonator, wherein the crystal resonator includes a tuning fork arm having a width, a thickness, and a length, and a tuning fork base, and a bending mode. The tuning fork arm of the tuning fork type bent quartz crystal resonator includes a first tuning fork arm and a second tuning fork arm, and is provided on upper and lower surfaces of the first tuning fork arm and the second tuning fork arm. A method for manufacturing a crystal unit, wherein one groove is provided for each of the grooves, and the grooves and electrodes having different polarities are arranged to oppose the grooves.   A method of manufacturing a crystal oscillator including a crystal unit including a case, a lid, and a crystal resonator, an amplifier, a capacitor, and a resistor, wherein the crystal resonator has a width, a thickness, and a length. And a tuning fork base vibrating in a bending mode, wherein the tuning fork arm of the tuning fork bending quartz crystal resonator includes a first tuning fork arm and a second tuning fork arm. A method for manufacturing a crystal oscillator, wherein one groove is provided on each of the upper and lower surfaces of a first tuning fork arm and a second tuning fork arm, and electrodes having different polarities are arranged opposite to the grooves. A method of manufacturing a portable device equipped with a crystal unit including a case, a lid, and a crystal resonator, wherein the crystal resonator constituting the crystal unit includes a tuning fork arm having a width, a thickness, and a length. A tuning fork base vibrator configured to include a tuning fork base and vibrating in a bending mode, wherein a tuning fork arm of the tuning fork type bending quartz resonator includes a first tuning fork arm and a second tuning fork arm; Forming a first tuning fork arm, the second tuning fork arm, and the tuning fork base;
Forming one groove on each of the upper and lower surfaces of the first tuning fork arm and the second tuning fork arm;
A step of arranging electrodes having different polarities against the groove and the groove,
A step of adjusting the oscillation frequency of the tuning-fork type bent quartz resonator;
A step of fixing the tuning fork-type bent quartz crystal unit to a fixed portion of a case for storing the same;
Connecting a lid that covers the case.

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