JP2007209039A5 - - Google Patents

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JP2007209039A5
JP2007209039A5 JP2007131043A JP2007131043A JP2007209039A5 JP 2007209039 A5 JP2007209039 A5 JP 2007209039A5 JP 2007131043 A JP2007131043 A JP 2007131043A JP 2007131043 A JP2007131043 A JP 2007131043A JP 2007209039 A5 JP2007209039 A5 JP 2007209039A5
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Japan
Prior art keywords
tuning fork
quartz
crystal
case
fork arms
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JP2007131043A
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Japanese (ja)
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JP2007209039A (en
JP5103632B2 (en
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Priority to JP2007131043A priority Critical patent/JP5103632B2/en
Priority claimed from JP2007131043A external-priority patent/JP5103632B2/en
Publication of JP2007209039A publication Critical patent/JP2007209039A/en
Publication of JP2007209039A5 publication Critical patent/JP2007209039A5/ja
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Claims (6)

水晶音叉基部とその水晶音叉基部に接続され、対抗する主面を有する水晶音叉腕とを備えて構成され、屈曲モードで振動する音叉型屈曲水晶振動子と、その音叉型屈曲水晶振動子を収納するケースと、そのケースをカバーする蓋とを備えて構成される水晶ユニットの製造方法で、
前記水晶音叉腕は少なくとも第1水晶音叉腕と第2水晶音叉腕を備えて構成され、前記第1水晶音叉腕と前記第2水晶音叉腕の各々の一端部は前記水晶音叉基部に接続され、他端部は自由であって、前記第1水晶音叉腕と前記第2水晶音叉腕の各々は、第1主面とその第1主面に対抗する第2主面と第1側面とその第1側面に対抗する第2側面とを有する音叉型屈曲水晶振動子を備えた水晶ユニットの製造方法であって、
前記水晶音叉基部と、前記第1水晶音叉腕と前記第2水晶音叉腕とを備えた音叉形状を形成する第1工程と、
前記第1水晶音叉腕と前記第2水晶音叉腕の各々の第1主面と第2主面の各々に溝を形成する第2工程と、
前記第1水晶音叉腕の第1主面と第2主面の各々の溝に配置された電極と、前記第2水晶音叉腕の第1側面と第2側面の各々に配置された電極とが電気的に接続され、前記第2水晶音叉腕の第1主面と第2主面の各々の溝に配置された電極と、前記第1水晶音叉腕の第1側面と第2側面の各々に配置された電極とが電気的に接続され、かつ、前記第1水晶音叉腕の第1主面と第2主面の各々の溝に配置された電極の電気的極性と、前記第2水晶音叉腕の第1主面と第2主面の各々の溝に配置された電極の電気的極性とが異なるように、前記電極を配置する第3工程と、
前記電極を備えた音叉型屈曲水晶振動子をケース内に収納する第4工程と
前記ケースに接続する第5工程と、
前記音叉型屈曲水晶振動子の周波数を調整する第6工程と、を含み、かつ、前記音叉型屈曲水晶振動子は基本波モード振動と2次高調波モード振動を備え、前記基本波モード振動の等価直列抵抗R が、前記2次高調波モード振動の等価直列抵抗R より小さくなるように、前記溝の長さ寸法と前記音叉型屈曲水晶振動子の全長の寸法を決定する工程を備えていることを特徴とする水晶ユニットの製造方法。
A quartz tuning fork base and a quartz tuning fork arm connected to the quartz tuning fork base and having a facing main surface, and configured to accommodate a tuning fork type bending quartz crystal that vibrates in a bending mode and a tuning fork type bending quartz crystal in case a, a lid configured crystal unit of the manufacturing method covers the case that,
The quartz tuning fork arms are configured with at least a first quartz tuning fork arms and the second crystal tuning fork arms, one end of each of the second quartz tuning fork arms and the first crystal tuning fork arms are connected to the quartz tuning fork base, the other end is a free, each of the second quartz tuning fork arms and the first crystal tuning fork arms, the first and second major surface and the first side face against a first main surface and a first major surface the quartz crystal unit manufacturing method which includes a tuning-fork type flexural quartz crystal resonator and a second side opposing the first side,
A first step of forming said crystal tuning fork base, a sound or shape with said second quartz tuning fork arms and the first quartz tuning fork arms,
A second step of forming a groove in each of the first major surface and a second major surface of each of the second quartz tuning fork arms and the first quartz tuning fork arms,
An electrode disposed on the first major surface and each of the grooves of the second main surface of the first crystal tuning fork arms, and a first side surface and the electrode disposed in each of the second side surface of the second quartz tuning fork arms is electrically connected to a first main surface and the electrode disposed in each of the grooves of the second main surface of the second quartz tuning fork arms, each of the first side and the second side surface of the first crystal tuning fork arms and arranged electrodes are electrically connected, and the electrical polarity of the first crystal tuning fork arms of the first main surface and the electrode disposed in each of the grooves of the second major surface, the second quartz tuning fork A third step of disposing the electrodes so that the electrical polarities of the electrodes disposed in the grooves of the first main surface and the second main surface of the arm are different from each other;
A fourth step of storing the tuning-fork type flexural quartz crystal resonator having the electrodes in to case,
A fifth step of connecting the cover to the case,
Anda sixth step of adjusting the frequency of the tuning fork type flexural quartz crystal resonator, and the tuning-fork flexural quartz crystal resonator includes the fundamental mode vibration and second harmonic mode vibration of the fundamental mode oscillation equivalent series resistance R 1 is, the second harmonic mode to be less than the equivalent series resistance R 2 of the vibration includes the step of determining the size of the overall length of the length between the tuning-fork flexural crystal oscillator of the groove A method for manufacturing a crystal unit , comprising:
請求項1において、前記第1工程から前記第6工程はその工程の順になされていて、前記ケースは貫通穴を備え、前記第5工程の後に、かつ、前記第6工程の前に、前記ケースの貫通穴を金属を用いて真空中で封止する工程を備えていることを特徴とする水晶ユニットの製造方法。In Claim 1, The said 6th process is made | formed in the order of the said 1st process, The said case is provided with the through-hole, The said case after the said 5th process and before the said 6th process A method of manufacturing a crystal unit , comprising: sealing a through hole of the metal in a vacuum using a metal . 請求項1において、前記第1工程から前記第5工程はその工程の順になされていて、前記第6工程は前記第4工程の後に、かつ、前記第5工程の前になされることを特徴とする水晶ユニットの製造方法。2. The method according to claim 1, wherein the first step to the fifth step are performed in the order of the steps, and the sixth step is performed after the fourth step and before the fifth step. A method of manufacturing a crystal unit. 請求項1において、前記第1工程から前記第5工程はその工程の順になされていて、前記第4工程の後に、かつ、前記第5工程の前に前記第6工程はなされ、前記ケースは貫通穴を備え、蓋を前記ケースに接続する第5工程の後に、前記ケースの貫通穴を金属を用いて真空中で封止する工程を備えることを特徴とする水晶ユニットの製造方法。In Claim 1, the said 1st process to the said 5th process are made | formed in the order of the process, the said 6th process is made | formed after the said 4th process and before the said 5th process, and the said case penetrates A method of manufacturing a crystal unit comprising a step of sealing a through hole of the case in a vacuum using a metal after the fifth step of providing a hole and connecting a lid to the case. 請求項1または請求項3において、前記ケースは貫通穴を備え、前記ケースの貫通穴を金属を用いて真空中で封止する工程と、前記第5工程の後に、かつ、前記ケースの貫通穴を金属を用いて真空中で封止する工程の前に、前記音叉型屈曲水晶振動子の周波数を真空中で調整する工程とを備えていることを特徴とする水晶ユニットの製造方法。4. The case according to claim 1, wherein the case includes a through hole, the step of sealing the through hole of the case in a vacuum using a metal, the step 5 after the fifth step, and And a step of adjusting the frequency of the tuning-fork type bent quartz crystal resonator in a vacuum before the step of sealing the metal in a vacuum using a metal. 請求項1から請求項5のいずれかにおいて、前記第1水晶音叉腕と前記第2水晶音叉腕の各々の第1主面と第2主面の各々に溝を形成する前記第2工程は、前記溝の形状が上面図で四角形と異なる多角形の形状であるように前記溝を形成する工程を含むことを特徴とする水晶ユニットの製造方法。The second step of forming a groove in each of the first main surface and the second main surface of each of the first crystal tuning fork arm and the second crystal tuning fork arm according to claim 1, A method of manufacturing a crystal unit, comprising the step of forming the groove so that the shape of the groove is a polygonal shape different from a quadrangle in a top view.
JP2007131043A 2001-10-31 2007-04-16 Manufacturing method of crystal unit Expired - Lifetime JP5103632B2 (en)

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JP2001334978 2001-10-31
JP2001334978 2001-10-31
JP2007131043A JP5103632B2 (en) 2001-10-31 2007-04-16 Manufacturing method of crystal unit

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JP2007209039A JP2007209039A (en) 2007-08-16
JP2007209039A5 true JP2007209039A5 (en) 2010-04-08
JP5103632B2 JP5103632B2 (en) 2012-12-19

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* Cited by examiner, † Cited by third party
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JP2013251672A (en) * 2012-05-31 2013-12-12 Seiko Epson Corp Vibration piece, electronic device, electronic apparatus and manufacturing method for vibration piece

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JPS5252597A (en) * 1975-10-27 1977-04-27 Citizen Watch Co Ltd Bend type piezoelectric vibrator
JPS5320845A (en) * 1976-08-11 1978-02-25 Seiko Instr & Electronics Ltd Quartz crystal watch
JPS5335462A (en) * 1976-09-14 1978-04-01 Seiko Instr & Electronics Ltd Crystal watch
JPS5393792A (en) * 1977-01-26 1978-08-17 Seiko Instr & Electronics Ltd Crystal vibrator
JPS5416996A (en) * 1977-07-07 1979-02-07 Kinsekisha Lab Ltd Tuning fork piezooelectric vibrator
FR2467487A1 (en) * 1979-10-15 1981-04-17 Ebauches Sa PIEZOELECTRIC RESONATOR
JPS577614A (en) * 1980-06-17 1982-01-14 Nippon Dempa Kogyo Co Ltd Tuning-fork quartz oscillator
JPS577613A (en) * 1980-06-17 1982-01-14 Nippon Dempa Kogyo Co Ltd Tuning-fork type quartz oscillator
JPS61187411A (en) * 1985-02-14 1986-08-21 Seiko Instr & Electronics Ltd Tuning fork type crystal resonator
JP3322153B2 (en) * 1997-03-07 2002-09-09 セイコーエプソン株式会社 Tuning fork type crystal vibrating piece
JP3926000B2 (en) * 1997-09-26 2007-06-06 シチズン電子株式会社 Piezoelectric vibrator and manufacturing method thereof
JP4852195B2 (en) * 1999-01-20 2012-01-11 セイコーエプソン株式会社 Tuning fork crystal unit
JP2000278066A (en) * 1999-03-24 2000-10-06 Daishinku Corp Method for adjusting characteristic of bend vibrator
JP2000307368A (en) * 1999-04-26 2000-11-02 Seiko Epson Corp Manufacture of piezoelectric vibrator
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