JPH06112760A - Tortion crystal vibrator - Google Patents

Tortion crystal vibrator

Info

Publication number
JPH06112760A
JPH06112760A JP25645092A JP25645092A JPH06112760A JP H06112760 A JPH06112760 A JP H06112760A JP 25645092 A JP25645092 A JP 25645092A JP 25645092 A JP25645092 A JP 25645092A JP H06112760 A JPH06112760 A JP H06112760A
Authority
JP
Japan
Prior art keywords
grooves
groove
tuning fork
crystal vibrator
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25645092A
Other languages
Japanese (ja)
Inventor
Hirofumi Kawashima
宏文 川島
Original Assignee
Seiko Electronic Components Ltd
セイコー電子部品株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Electronic Components Ltd, セイコー電子部品株式会社 filed Critical Seiko Electronic Components Ltd
Priority to JP25645092A priority Critical patent/JPH06112760A/en
Publication of JPH06112760A publication Critical patent/JPH06112760A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03BASIC ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezo-electric or electrostrictive resonators or networks
    • H03H3/04Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezo-electric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H03H2003/0414Resonance frequency
    • H03H2003/0492Resonance frequency during the manufacture of a tuning-fork

Abstract

PURPOSE:To provide a micro-crystal vibrator of a tuning fork type which has a zero temperature coefficient and the small equivalent series resistance and can easily undergo a chemical etching treatment by forming the grooves in the lengthwise direction to the tuning forks of the crystal vibrator which vibrates in a tortion vibration mode. CONSTITUTION:The grooves 4-7 are formed to the tuning forks 2 and 3 by an etching treatment, and the grooves are also formed on the opposite side at the symmetrical positions to the thickness in the same way. The exciting electrodes 9 and 8 are provided in the different polarities to the grooves 4 and 5 of the fork 2. These electrodes 8 and 9 are connected to the exciting electrodes of the grooves 6 and 7 via a tuning fork base part 10 in the different polarities to the thickness. In such a constitution, the voltage is applied between both electrode 8 and 9. Thus the electric fields are generated between the surface of the electrode 9 of the groove 4 at a position closer to the groove 5 and the surface of the electrode 8 of the groove at a position closer to the groove 4. As a result, the electromechanical conversion efficiency is improved. Thus it is possible to obtain a compact tortion crystal vibrator that has the small equivalent series resistance and the high Q value and furthermore can operate in a low frequency range of 200-600kHz.

Description

【発明の詳細な説明】Detailed Description of the Invention
【0001】[0001]
【産業上の利用分野】本発明は、捩り水晶振動子の形状
と励振電極構成に関する。特に、小型化、耐衝撃性、低
廉化の要求の強い腕時計、ポケットベル、ICカードや
移動体無線等の基準信号源として最適な捩り水晶振動子
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the shape of a twisted quartz crystal unit and the structure of excitation electrodes. In particular, the present invention relates to a twisted crystal oscillator most suitable as a reference signal source for wristwatches, pagers, IC cards, mobile radios, etc., which are strongly required to be compact, shock resistant, and inexpensive.
【0002】[0002]
【従来の技術】周波数が200kHz〜600kHzの
水晶振動子は、音叉形状した屈曲水晶振動子と縦水晶振
動子が用いられてきた。
2. Description of the Related Art A tuning fork-shaped bent crystal oscillator and a vertical crystal oscillator have been used as a crystal oscillator having a frequency of 200 kHz to 600 kHz.
【0003】[0003]
【発明が解決しようとする課題】しかしながら、従来か
ら使用されている音叉型屈曲水晶振動子は高調波モード
を使用するため、電極形成が複雑で、リード線等の支持
による振動エネルギー損失が多く、その結果、等価直列
抵抗R1 が上昇するなどの課題が成されていた。一方、
縦水晶振動子は、周波数が振動腕の長さに反比例するた
めに、600kHz以下の振動子を実現しようとする
と、自ずからサイズが大きくなり、小型化できないとい
う課題が残されていた。このようなことから、周波数が
200kHz〜600kHzで、しかも、超小型で零温
度係数を有し、等価直列抵抗R1 の小さい、化学的エッ
チング加工が容易な水晶振動子が所望されていた。
However, since the tuning fork type bent crystal resonator used in the related art uses the harmonic mode, the electrode formation is complicated and the vibration energy loss due to the support of the lead wire is large. As a result, there have been problems such as an increase in the equivalent series resistance R 1 . on the other hand,
Since the frequency of the vertical quartz crystal resonator is inversely proportional to the length of the vibrating arm, the size of the crystallized crystal naturally becomes large and it cannot be miniaturized when attempting to realize the crystal resonator having a frequency of 600 kHz or less. For this reason, there has been a demand for a crystal resonator having a frequency of 200 kHz to 600 kHz, a microminiature, a zero temperature coefficient, a small equivalent series resistance R 1 and easy chemical etching.
【0004】[0004]
【課題を解決するための手段】本発明は、以下の方法で
従来の課題を解決するものである。すなわち、捩り振動
モードで振動する音叉形状水晶振動子で、音叉腕の長手
方向に溝を設けることにより課題を解決している。
The present invention solves the conventional problems by the following methods. That is, the problem is solved by providing a groove in the longitudinal direction of the tuning fork arm with a tuning fork crystal oscillator that vibrates in a torsional vibration mode.
【0005】[0005]
【作用】このように、本発明は捩り水晶振動子で、しか
も、音叉腕の長手方向に溝を設けることにより、幅方向
に負荷質量を有するので、低周波数で、R1 の小さい超
小型捩り水晶振動子が化学的エッチング法によって得ら
れる。
As described above, the present invention is a torsional quartz crystal resonator, and since the load mass is provided in the width direction by providing the groove in the longitudinal direction of the tuning fork arm, the microminiature torsional vibrator with a low frequency and a small R 1 is provided. A crystal oscillator is obtained by a chemical etching method.
【0006】[0006]
【実施例】次に、本発明を実施例に基づいて具体的に述
べる。図1は、本発明の音叉型捩り水晶振動子の形状と
励振電極構成を示す。図2は、本発明の音叉型捩り水晶
振動子の音叉上部から見た断面図である。音叉型捩り水
晶振動子1は音叉腕2、3と音叉基部10から構成され
ている。そして、音叉腕2にはエッチング法によって溝
4と溝5が形成されている。図2に示すように、対向の
裏面にも厚みに対して対称の位置に溝が設けられてい
る。一方、音叉腕3にも音叉腕2と同様に溝6と7が設
けられている。又、音叉腕2の溝4と5には励振電極9
と8が異極となるように配置され、音叉基部10を介し
てそれぞれ溝6と7に配置された励振電極に接続されて
いる。図2に示すように、厚みに対して対称となる裏面
の溝にも励振電極が配置されている。このとき、厚みに
対して異極となるように励振電極は配置される。この振
動子はy”軸(機械軸であるy軸の座標回転後の結晶
軸)方向に電界を有し、y軸方向に電界成分を持つカッ
ト角(φ、θ)で形成される。
EXAMPLES Next, the present invention will be specifically described based on Examples. FIG. 1 shows the shape of a tuning fork type twisted crystal oscillator of the present invention and the structure of excitation electrodes. FIG. 2 is a cross-sectional view of the tuning fork type twisted crystal oscillator of the present invention seen from above the tuning fork. The tuning fork type twisted crystal oscillator 1 is composed of tuning fork arms 2 and 3 and a tuning fork base 10. Grooves 4 and 5 are formed in the tuning fork arm 2 by the etching method. As shown in FIG. 2, grooves are also provided on the opposite back surfaces at symmetrical positions with respect to the thickness. On the other hand, the tuning fork arm 3 is also provided with grooves 6 and 7 similarly to the tuning fork arm 2. Further, the excitation electrode 9 is provided in the grooves 4 and 5 of the tuning fork arm 2.
And 8 are arranged so as to have different polarities, and are connected via the tuning fork base portion 10 to the excitation electrodes arranged in the grooves 6 and 7, respectively. As shown in FIG. 2, the excitation electrode is also arranged in the groove on the back surface which is symmetrical with respect to the thickness. At this time, the excitation electrodes are arranged so as to have different polarities with respect to the thickness. This oscillator has an electric field in the y "axis (the crystal axis after the coordinate rotation of the y axis which is the mechanical axis) direction, and is formed with a cut angle (φ, θ) having an electric field component in the y axis direction.
【0007】このような溝を有する音叉型捩り水晶振動
子を形成することにより、励振電極8、9間に電圧を加
えると、溝4に設けた励振電極9のうち溝5に近い面9
aと、溝5に設けた励振電極8のうち溝4に近い面8a
との間に電界ができ、従来の同一平面に設けた2個の励
振電極に比べ、電気機械変換効率が良くなるので、等価
直列抵抗R1 の小さい、Q値の高い、しかも200kH
z〜600kHzと低周波数で、小型の捩り水晶振動子
が得られる。
When a voltage is applied between the excitation electrodes 8 and 9 by forming the tuning fork type twisted crystal oscillator having such a groove, a surface 9 of the excitation electrode 9 provided in the groove 4 close to the groove 5 is formed.
a and a surface 8a of the excitation electrode 8 provided in the groove 5 close to the groove 4
Since an electric field is generated between the two electrodes, and the electromechanical conversion efficiency is improved as compared with the conventional two excitation electrodes provided on the same plane, the equivalent series resistance R 1 is small, the Q value is high, and 200 kH.
At a low frequency of z to 600 kHz, a small twisted crystal oscillator can be obtained.
【0008】[0008]
【発明の効果】以上述べたように、本発明の音叉型捩り
水晶振動子は次の著しい効果を有する。 (1)音叉腕の長さ方向に溝を設け、この溝の中に励振
電極を配置することにより、等価直列抵抗R1 の小さ
い、Q値の高い音叉型捩り水晶振動子が得られる。 (2)化学的エッチング法によって容易に形成できるの
で、小型化、薄型化ができる。同時に、1枚のウエハ上
に多数個の振動子を一度にバッチ処理できるので、低廉
化が可能である。 (3)音叉腕に溝を設け、音叉腕の幅端部に負荷質量効
果を持たせることにより、200kHz〜600kHz
の低周波数の捩り水晶振動子を小型サイズで実現でき
る。 (4)音叉形状に加工されるので、リード線等の外部支
持による振動エネルギー損失が小さくなり、耐衝撃性に
優れた捩り水晶振動子か得られる。
As described above, the tuning fork type twisted crystal oscillator of the present invention has the following remarkable effects. (1) By providing a groove in the length direction of the tuning fork arm and arranging the excitation electrode in this groove, a tuning fork type twisted crystal oscillator having a small equivalent series resistance R 1 and a high Q value can be obtained. (2) Since it can be easily formed by a chemical etching method, it can be made smaller and thinner. At the same time, a large number of vibrators can be batch-processed on one wafer at a time, so that the cost can be reduced. (3) By providing a groove on the tuning fork arm and providing a load mass effect on the width end of the tuning fork arm, 200 kHz to 600 kHz
It is possible to realize a low-frequency twisted quartz crystal unit with a small size. (4) Since it is processed into a tuning fork shape, vibration energy loss due to external support of lead wires and the like is reduced, and a twisted quartz crystal resonator having excellent impact resistance can be obtained.
【図面の簡単な説明】[Brief description of drawings]
【図1】本発明の音叉型捩り水晶振動子の形状と励振電
極構成を示す。
FIG. 1 shows a shape and an excitation electrode configuration of a tuning fork type twisted crystal oscillator of the present invention.
【図2】本発明の音叉型捩り水晶振動子の音叉上部から
見た断面図である。
FIG. 2 is a cross-sectional view of the tuning fork type twisted crystal oscillator of the present invention seen from above the tuning fork.
【符号の説明】[Explanation of symbols]
1 音叉型捩り水晶振動子 2、3 音叉腕 4、5、6、7 溝 8、8a、9、9a 励振電極 10 音叉基部 x’ 座標回転後の電気軸 y” 座標回転後の機械軸 z’ 座標回転後の光軸 1 tuning fork type twisted crystal oscillator 2, 3 tuning fork arm 4, 5, 6, 7 groove 8, 8a, 9, 9a excitation electrode 10 tuning fork base x'electric axis after coordinate rotation y "mechanical axis after coordinate rotation z ' Optical axis after coordinate rotation

Claims (1)

    【特許請求の範囲】[Claims]
  1. 【請求項1】 捩り振動モードで振動する音叉形状水晶
    振動子で、各音叉腕の長手方向に一対の溝を設け、前記
    溝の面のうち少なくとも一対の溝が対向する面に励振電
    極を設けたことを特徴とする捩り水晶振動子。
    1. A tuning-fork-shaped crystal oscillator that vibrates in a torsional vibration mode, wherein a pair of grooves is provided in a longitudinal direction of each tuning fork arm, and an excitation electrode is provided on a surface of at least one pair of grooves facing each other. Twisted crystal oscillator characterized by
JP25645092A 1992-09-25 1992-09-25 Tortion crystal vibrator Pending JPH06112760A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25645092A JPH06112760A (en) 1992-09-25 1992-09-25 Tortion crystal vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25645092A JPH06112760A (en) 1992-09-25 1992-09-25 Tortion crystal vibrator

Publications (1)

Publication Number Publication Date
JPH06112760A true JPH06112760A (en) 1994-04-22

Family

ID=17292822

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25645092A Pending JPH06112760A (en) 1992-09-25 1992-09-25 Tortion crystal vibrator

Country Status (1)

Country Link
JP (1) JPH06112760A (en)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1202453A2 (en) * 2000-10-31 2002-05-02 Piedek Technical Laboratory Flexural mode quartz crystal resonator
EP1223674A3 (en) * 2000-12-25 2003-04-02 Seiko Epson Corporation Vibrating piece, vibrator, oscillator, and electronic equipment
JP2006060727A (en) * 2004-08-24 2006-03-02 River Eletec Kk Tuning-fork crystal oscillator and method for manufacturing same
US7168319B2 (en) * 2004-12-20 2007-01-30 Eta Sa Manufacture Horlogere Suisse Angular speed measuring transducer
JP2008060952A (en) * 2006-08-31 2008-03-13 Kyocera Kinseki Corp Tuning fork crystal oscillation board and method of manufacturing the same
JP2009105927A (en) * 2008-12-11 2009-05-14 Seiko Epson Corp Crystal oscillator piece, method of manufacturing the same, crystal device using crystal oscillator piece, mobile telephone system and electronic apparatus using crystal device
JP2009105926A (en) * 2008-12-11 2009-05-14 Seiko Epson Corp Crystal oscillator piece and method of manufacturing the same, crystal device using crystal oscillator piece, mobile telephone system and electronic apparatus using crystal device
JP2009165164A (en) * 1999-01-20 2009-07-23 Seiko Epson Corp Vibrator and electronic device with the same
WO2010047115A1 (en) * 2008-10-24 2010-04-29 セイコーエプソン株式会社 Bending vibration piece, bending vibrator, and piezoelectric device
JP2010193444A (en) * 2010-01-29 2010-09-02 Epson Toyocom Corp Bending vibration piece and method of manufacturing bending vibration piece
JP2010193133A (en) * 2009-02-18 2010-09-02 Epson Toyocom Corp Bending vibrator piece and bending vibrator
JP2010263317A (en) * 2009-04-30 2010-11-18 Epson Toyocom Corp Flexural vibration piece
JP2011015100A (en) * 2009-06-30 2011-01-20 Kyocera Kinseki Corp Flexural-mode tuning-fork type crystal vibrator
JP2011082945A (en) * 2009-09-08 2011-04-21 Seiko Epson Corp Flexural vibration piece, flexural vibrator, and electronic device
KR101148661B1 (en) * 2009-10-01 2012-05-23 세이코 엡슨 가부시키가이샤 Vibrating reed, vibrator, oscillator, and electronic apparatus
EP3783800A1 (en) * 2019-08-22 2021-02-24 Statek Corporation Torsional mode quartz crystal device

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012039667A (en) * 1999-01-20 2012-02-23 Seiko Epson Corp Tuning-fork type piezoelectric vibrator, oscillator, and electronic equipment
JP2009165164A (en) * 1999-01-20 2009-07-23 Seiko Epson Corp Vibrator and electronic device with the same
EP1202453A2 (en) * 2000-10-31 2002-05-02 Piedek Technical Laboratory Flexural mode quartz crystal resonator
EP1202453A3 (en) * 2000-10-31 2006-06-07 Piedek Technical Laboratory Flexural mode quartz crystal resonator
EP1223674A3 (en) * 2000-12-25 2003-04-02 Seiko Epson Corporation Vibrating piece, vibrator, oscillator, and electronic equipment
EP1788702A2 (en) * 2000-12-25 2007-05-23 Seiko Epson Corporation Vibrating piece, vibrator, oscillator, and electronic equipment
EP1788702A3 (en) * 2000-12-25 2008-01-16 Seiko Epson Corporation Vibrating piece, vibrator, oscillator, and electronic equipment
JP2006060727A (en) * 2004-08-24 2006-03-02 River Eletec Kk Tuning-fork crystal oscillator and method for manufacturing same
JP4593203B2 (en) * 2004-08-24 2010-12-08 リバーエレテック株式会社 Tuning fork crystal unit and method for manufacturing the same
US7168319B2 (en) * 2004-12-20 2007-01-30 Eta Sa Manufacture Horlogere Suisse Angular speed measuring transducer
JP2008060952A (en) * 2006-08-31 2008-03-13 Kyocera Kinseki Corp Tuning fork crystal oscillation board and method of manufacturing the same
WO2010047115A1 (en) * 2008-10-24 2010-04-29 セイコーエプソン株式会社 Bending vibration piece, bending vibrator, and piezoelectric device
US8766515B2 (en) 2008-10-24 2014-07-01 Seiko Epson Corporation Flexural vibrating reed, flexural vibrator, and piezoelectric device
JP5067486B2 (en) * 2008-10-24 2012-11-07 セイコーエプソン株式会社 Bending vibrator, bending vibrator, and piezoelectric device
JP2009105927A (en) * 2008-12-11 2009-05-14 Seiko Epson Corp Crystal oscillator piece, method of manufacturing the same, crystal device using crystal oscillator piece, mobile telephone system and electronic apparatus using crystal device
JP2009105926A (en) * 2008-12-11 2009-05-14 Seiko Epson Corp Crystal oscillator piece and method of manufacturing the same, crystal device using crystal oscillator piece, mobile telephone system and electronic apparatus using crystal device
JP2010193133A (en) * 2009-02-18 2010-09-02 Epson Toyocom Corp Bending vibrator piece and bending vibrator
JP2010263317A (en) * 2009-04-30 2010-11-18 Epson Toyocom Corp Flexural vibration piece
US7932664B2 (en) * 2009-04-30 2011-04-26 Epson Toyocom Corporation Flexural vibration piece
JP2011015100A (en) * 2009-06-30 2011-01-20 Kyocera Kinseki Corp Flexural-mode tuning-fork type crystal vibrator
JP2011082945A (en) * 2009-09-08 2011-04-21 Seiko Epson Corp Flexural vibration piece, flexural vibrator, and electronic device
KR101148661B1 (en) * 2009-10-01 2012-05-23 세이코 엡슨 가부시키가이샤 Vibrating reed, vibrator, oscillator, and electronic apparatus
JP2010193444A (en) * 2010-01-29 2010-09-02 Epson Toyocom Corp Bending vibration piece and method of manufacturing bending vibration piece
EP3783800A1 (en) * 2019-08-22 2021-02-24 Statek Corporation Torsional mode quartz crystal device

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