JP6131445B2 - Piezoelectric vibrator and piezoelectric unit - Google Patents

Description

  The present invention includes a tuning fork type piezoelectric vibrator (tuning fork type piezoelectric vibrator), a piezoelectric unit including the tuning fork type piezoelectric vibrator, a case, and a lid, and a piezoelectric oscillation circuit including the piezoelectric unit. The present invention relates to a piezoelectric oscillator, an electronic apparatus including the piezoelectric oscillator, and a manufacturing method thereof.

As an example, paragraph 0035 of Patent Document 1 shows a plan view of a tuning fork-shaped bent quartz crystal vibrator 145 that vibrates in a bending mode, and has a shape in which the arm width of the tip portion of the tuning fork arm (vibration portion) is widened. Thus, the tuning fork arm has a mass effect. Therefore, the arm length can be shortened even at the same frequency, and the size can be reduced. Actually, the length of the tuning fork arm that widens the arm width is the length of the arm from the tip that is the free end of the tuning fork arm. It is widely formed up to about half of the position. That is, a wide width is provided at an arbitrary position within the range. It is described. That is, the first width W _f is located at about half of the tip from the base side, and the second width W _s wider than the first width is about half the length of the arm from the tip where the tuning fork arm is the free end. Formed in position. In this configuration, the oscillation frequency of the fundamental mode oscillation, for example about 32.768kHz, suppressing an increase in equivalent series resistance R _m at that frequency, and a degree of size reduction (e.g., quartz unit full-length 2 mm) However, in order to realize a more compact crystal unit having a total length of less than 2 mm, W _sf = W _s / W _f of the tuning-fork-shaped bent crystal resonator is considerably large, and W _f is It needs to be quite small. However, if W _sf = W _s / W _f is made considerably large and W _f is made quite small, the equivalent series resistance R _m becomes an extremely large equivalent series resistance that is more than twice the equivalent series resistance of the crystal unit having a total length of 2 mm. , the variation becomes large, it achieved a shorter micro tuning fork flexural crystal oscillator of the tuning fork arms which can suppress an increase in equivalent series resistance R _m is extremely difficult.
JP 2003-436310 A

For this reason, in order to realize a shorter micro tuning fork type piezoelectric vibrator of the tuning fork arms which can suppress an increase in equivalent series resistance R _m of the fundamental mode vibration is a new shape, and the new electrode arrangement A tuning fork type piezoelectric vibrator comprising: a piezoelectric unit comprising the tuning fork type piezoelectric vibrator, a lid and a case; a piezoelectric oscillator comprising the piezoelectric unit, an amplifier, a capacitor, and a resistor; There has been a demand for an electronic device including the piezoelectric oscillator and a method for manufacturing the electronic device.

  The present invention comprises an ultra-compact tuning fork type piezoelectric vibrator that vibrates in a reverse-phase bending mode that advantageously solves the conventional problems by the following method, the tuning fork type piezoelectric vibrator, a lid, and a case. It is an object of the present invention to provide a piezoelectric unit, a piezoelectric oscillator including the piezoelectric unit, an amplifier, a capacitor, and a resistor, an electronic device including the piezoelectric oscillator, and a manufacturing method thereof. is there.

That is, the first aspect of the piezoelectric vibrator of the present invention includes a base portion, a first tuning fork arm and a second tuning fork arm connected to the base portion, and includes an upper surface and a lower surface of each tuning fork arm. A tuning fork-type piezoelectric vibrator having grooves formed in each of them. The frames of the first frame and the second frame are connected to the base portion, and the first frame and the second frame are outside the first tuning fork arm and the second tuning fork arm. The first tuning fork arm and the second tuning fork arm extend in the same direction, and each of the first tuning fork arm and the second tuning fork arm has a first vibrating portion having at least a first width, and a first width. At least a second vibrating part having at least a large second width and at least a third vibrating part having at least a third width greater than the second width, wherein the second vibrating part is a first vibrating part and a third vibrating part. is formed between the first vibrating part is on the side of the base portion than the second vibrating portion, the first vibrating portion through a connecting portion Te is connected to the second vibrating unit, the connecting portion is a piezoelectric vibrator on the side of the distal end portion of the longer fork arm than the first length portion of each fork arm of the first fork arm and the second tuning fork arms.
A second aspect of the piezoelectric vibrator according to the present invention includes a base portion, a first tuning fork arm and a second tuning fork arm connected to the base portion, and each of the tuning fork arms has an upper surface and a lower surface. A tuning fork type piezoelectric vibrator having a groove formed therein, wherein the first frame and the second frame are connected to the base portion, and the first frame and the second frame are arranged outside the first tuning fork arm and the second tuning fork arm. The first tuning fork arm and the second tuning fork arm extend in the same direction, and each of the first tuning fork arm and the second tuning fork arm has a first vibrating portion having at least a first width, and a first tuning fork arm larger than the first width. At least a second vibration part having at least two widths and a third vibration part having at least a third width larger than the second width, and the second vibration part is between the first vibration part and the third vibration part. to be formed, the first vibrating part is on the side of the base portion than the second vibrating portion, the first vibrating portion second vibration via a connecting portion And one end of the first vibration part is connected at one end of the connection part, this connection part is denoted by S1, and one end of the second vibration part is connected at the other end of the connection part, When this connecting portion is denoted by S2, the position of S1 is equal to the first length portion of the tuning fork arm, or the position of S2 is equal to the first length portion of the tuning fork arm, or a tuning fork between S1 and S2. A piezoelectric vibrator having a first length portion of an arm.

A first aspect of the piezoelectric unit of the present invention is a piezoelectric unit including the piezoelectric vibrator, case, and lid described in the first aspect or the second aspect , and the case includes a first mount portion and a second mount portion. The first frame is fixed to the first mount portion of the case, the second frame is fixed to the second mount portion of the case, and the upper surface of one tuning fork arm of the first tuning fork arm and the second tuning fork arm An electrode disposed on the surface of each groove on the lower surface is connected to an electrode disposed on the surface of the first mount portion, and the upper surface of the other tuning fork arm of the first tuning fork arm and the second tuning fork arm The electrode disposed on the surface of each groove on the lower surface is a piezoelectric unit connected to the electrode disposed on the surface of the second mount portion.
According to a second aspect of the piezoelectric unit of the present invention, the piezoelectric unit includes a base portion, a first tuning fork arm and a second tuning fork arm connected to the base portion, and grooves are formed on the upper surface and the lower surface of each tuning fork arm. A piezoelectric fork unit including a case having a tuning fork type piezoelectric vibrator, a first mount portion and a second mount portion, and a lid, each frame of the first frame and the second frame at the base portion And the first frame and the second frame extend outside the first tuning fork arm and the second tuning fork arm in the same direction as the first tuning fork arm and the second tuning fork arm, and the first frame is the first of the case. The first tuning fork arm and the second tuning fork arm each having at least a first width, and a first width fixed to the mount portion, the second frame being fixed to the second mount portion of the case A second vibrating portion having at least a second width greater than the second width, and a third vibration portion greater than the second width. A second vibration part formed between the first vibration part and the third vibration part, and the first vibration part is closer to the base part than the second vibration part. , side surface and the side surface of the third vibration of the second vibrating portion are connected via the side surface of the connecting portion, the connecting portion is longer than the first length portion of each fork arm of the first fork arm and the second tuning fork arms This is a piezoelectric unit on the tip end side of the tuning fork arm.

This configuration can be realized equivalent series resistance R _m micro tuning fork type piezoelectric vibrator suppressing an increase in. As a result, an ultra-small crystal unit having a crystal unit with a tuning fork type piezoelectric vibrator having a length dimension smaller than 1.8 mm can be realized with high quality. This dimension is brought about for the first time by the present invention, and its effect is extremely large.

In addition, suppressing the increase in the equivalent series resistance R _m, and micro piezoelectric units, amplifiers and, since the piezoelectric oscillator provided with a capacitor resistor and is configured, the current consumption yet piezoelectric oscillator miniature ( to approximately proportional to R _m) is brought operational effects excellent that a not inferior conventional. Furthermore, the electronic device configured with the piezoelectric oscillator has an effect that the degree of freedom increases in the design of the electronic device, and an electronic device with more information can be realized.

  Hereinafter, a piezoelectric vibrator, a piezoelectric unit, a piezoelectric oscillator, an electronic device, and a manufacturing method thereof according to an embodiment of the present invention will be specifically described with reference to the drawings.

Tuning fork type piezoelectric vibrator according to the first embodiment

  FIG. 1 is a plan view of a tuning-fork type piezoelectric vibrator 100 that vibrates in a reverse-phase bending mode according to the first embodiment of the present invention. In FIG. 1, the electrode disposed on the tuning fork arm, the electrode disposed on the base portion, and the electrode disposed on the frame are omitted. The tuning fork type piezoelectric vibrator 100 includes a base portion 30, a tuning fork arm 10 and a tuning fork arm 20 connected to the base portion 30, two connection portions 31 and a connection portion 32 connected to the base portion 30, and a connection portion. A frame 33 connected to 31 and a frame 34 connected to the connecting portion 32 are provided. One end of each of the tuning fork arm 10 and the tuning fork arm 20 is connected to the base portion 30.

The tuning fork arm 10 includes at least a first vibrating part 11, a second vibrating part 12, and a third vibrating part 13. The first vibrating portion 11 comprises at least a first width _{W 1,} the second vibrating portion 12 at least includes, the third oscillation section 13 is larger than the second width _{W 2} of the first width _{W 1} greater than the second width _{W 2} the third width W ₃ comprise at least a first vibrating portion 11 and the second vibrating portion 12 are connected via a connecting portion 14, and the second vibrating portion 12 and the third vibration unit 13 via a connecting portion connecting Has been. In addition, a groove 15 is formed on the upper surface of the first vibrating portion 11, a groove 55 (see FIG. 2) is formed on the lower surface, a groove 16 is formed on the upper surface of the second vibrating portion 12, and a groove 56 (see FIG. 3) is formed on the lower surface. Is formed. Similarly, the tuning fork arm 20 includes at least a first vibrating part 21, a second vibrating part 22, and a third vibrating part 23. The first vibrating section 21 comprises at least a first width _{W 1,} the second vibrating portion 22 at least includes, the third oscillation section 23 is larger than the second width _{W 2} of the first width _{W 1} greater than the second width _{W 2} the third width W ₃ comprise at least a first vibrating portion 21 and the second vibrating portion 22 are connected via a connecting portion 24, and the second vibrating portion 22 and the third vibrating part 23 through a connecting portion connected Has been. In addition, a groove 25 is formed on the upper surface of the first vibrating portion 21, a groove 65 (see FIG. 2) is formed on the lower surface, a groove 26 is formed on the upper surface of the second vibrating portion 22, and a groove 66 (see FIG. 3) is formed on the lower surface. Is formed.

More specifically, the frame 33 is connected to the base portion 30 via one connection portion 31, and the frame 34 is connected to the base portion 30 via the other connection portion 32. Furthermore, the tuning fork type piezoelectric vibrator 100 according to the first embodiment is fixed to a fixing portion of a container in which the frame 33 and the fixed frame 34 are accommodated by a conductive adhesive or solder. In addition, one end portions of the first vibrating portion 11 of the tuning fork arm 10 and the first vibrating portion 21 of the tuning fork arm 20 are connected to the base portion 30. Then, the width of the one end portion connected to the base portion 30 is formed larger than the width W _1. That is, each of the first vibrating portion 11 of the tuning fork arm 10 and the first vibrating portion 21 of the tuning fork arm 20 has two or more different widths.

  More specifically, the tuning fork type piezoelectric vibrator 100 includes a base portion 30, a first tuning fork arm 10 and a second tuning fork arm 20 connected to the base portion 30, and a first portion connected to the base portion 30. The connecting portion 31 and the second connecting portion 32 are configured to include a first frame 33 connected to the first connecting portion 31 and a second frame 34 connected to the second connecting portion 32. Furthermore, each of the first tuning fork arm 10 and the second tuning fork arm 20 is a tuning fork type piezoelectric vibrator having one end connected to the base portion 30 and the other end free. Each of the first connection portion 31 and the second connection portion 32 includes a first end portion and a second end portion, and the first end portion of each of the first connection portion 31 and the second connection portion 32 is a base portion. Connected to the portion 30, the second end of the first connection portion 31 is connected to the side surface of the first frame 33, and the second end of the second connection portion 32 is connected to the side surface of the second frame 34. Has been. Further, the first frame 33 and the second frame 34 are formed on the outside of the tuning fork different from the tuning fork fork side and extend in the same direction as the first tuning fork arm 10 and the second tuning fork arm 20. The second frames 34 are in opposite positions relative to the base portion 30. Further, the first tuning fork arm 10 and the second tuning fork arm 20 have a length dimension L. In the present invention, the position of L / 2 is called the first length portion, and the connection portions 14 and 24 are on the side of the base portion 30 that is shorter than the first length portion.

Further, there is a relationship of W ₁ <W ₂ and W ₂ <W ₃ between the first width W ₁ , the second width W _2, and the third width W _{3 of} the first tuning fork arm 10 and the second tuning fork arm 20. There is. In addition, the first groove width of _{W 1 W 1 m,} the length _{L 1 m} of the groove, when the groove width _{W 2m} of the second width _{W 2,} the length of the groove and _{L 2m, W} 1m _{<W 2m} And there is a first relationship of L _1m > L _2m , or a second relationship of W _1m = W _2m and L _1m > L _2m . In both the first and second relationships, as described in the following paragraphs 0027, equivalent series resistance R _m is those without as the conventional favorably obtained. In addition, _{f m} the series resonance frequency in the electrical equivalent circuit of the tuning fork type piezoelectric vibrator, the quality factor _{Q m,} when the _{Q mf = Q m / f m} , in both the first and second relationships, Q _mf becomes smaller. Therefore, start-up characteristic of a piezoelectric oscillation circuit, i.e., the rise time t _r when you turn is proportional to the Q _mf, which achieves the effect that can shorten the rise time t _r.

More specifically, in the present invention, the absolute value | −RL _m | of the negative resistance of the fundamental mode vibration of the tuning fork type piezoelectric vibrator, the quality factor Q _m of the fundamental mode vibration, and the equivalent series resistance R _m The rise time is defined as the time when the output signal of the piezoelectric oscillation circuit reaches 80% when the piezoelectric oscillation circuit configured to include at least the tuning fork type piezoelectric vibrator including the power is turned on. It is defined as t _r. Based on this definition, as a first example, in order to obtain the relationship of t _r <0.8 seconds, the relationship of 4π + 5Q _mf <4π | −RL _m | / R _m can be achieved. Furthermore, as a second example, in order to obtain a relationship of t _r <0.5 seconds, it can be achieved by a relationship of 2π + 4Q _mf <2π | −RL _m | / R _m . In addition, as a third example, in order to obtain a relationship of t _r <0.2 seconds, the relationship of 2π + 10Q _mf <2π | −RL _m | / R _m can be achieved.

Further, in addition to the above-described effects, in particular, in the relationship of W _1m = W _2m and L _1m > L _2m , the electrode disposed on the side surface of the groove of the first vibrating part and the electrode The intensity of the electric field between the arranged electrodes is different from the intensity of the electric field between the electrode arranged on the side surface of the groove of the second vibrating part and the electrode arranged against the electrode. Therefore, the charge amount for driving the tuning fork type piezoelectric vibrator can be controlled by the position of the tuning fork arm. For example, by making the charge amount to suppress the second harmonic mode vibration, the fundamental mode vibration can be easily excited. The effect which can be performed is show | played.

The third base portion base portion 30 having a first base portion having a width W _5, and a second base portion having a width W ₅ is smaller than the width W _6, a larger width W ₅ Width W ₆ It is configured with. That is, one end of each of the first tuning fork arm 10 and the second tuning fork arm 20 is connected to the first base portion. Further, the second base portion is between the first base portion and the third base portion, the first frame 33 is connected to the third base portion via the connection portion 31, and the second frame 34 is connected via the connection portion 32. Connected to the third base portion. In addition, connecting portions 31, 32 has a length L _1, L ₁ (here, refers to the leakage of vibration energy of the fixed portion due to vibration) leakage of vibration to significantly impact. Therefore, in the first embodiment, in order to reduce vibration leakage, L ₁ is smaller than 0.18 mm, preferably larger than 0.01 mm and smaller than 0.075 mm, and more preferably smaller than 0.015 mm. Larger than 0.04 mm. In the first embodiment, the relationship of W ₅ > W ₆ is provided. However, the present invention is not limited to this and includes the relationship of W ₅ W ₆ . Next, the arrangement of the electrodes arranged on the tuning fork arm for driving the tuning fork type piezoelectric vibration of FIG. 1, the electrodes arranged on the base portion, and the electrodes arranged on the frame will be described in detail.

FIG. 2 is a cross-sectional view taken along line AA of the tuning fork arm 10 and the first vibrating portions 11 and 21 of the tuning fork arm 20 of the tuning fork type piezoelectric vibrator 100 of FIG. In FIG. 2, the arrangement of the electrodes of the first vibrating sections 11 and 21 will be described in detail. A groove 15 is formed on the upper surface of the first vibrating part 11 of the tuning fork arm 10, a groove 55 is formed on the lower surface, a groove 25 is formed on the upper surface of the first vibrating part 21 of the tuning fork arm 20, and a groove 65 is formed on the lower surface. Has been. Further, the electrode 3 is disposed in the groove 15, and the electrode 4 having the same polarity as the electrode 3 is disposed and connected to the groove 55. Further, the electrode 7 is disposed in the groove 25, and the electrode 8 having the same polarity as the electrode 7 is disposed and connected to the groove 65. In addition, the electrode 2 is disposed on the inner side surface of the first vibrating portion 11 of the tuning fork arm 10, and the electrode 1 having the same polarity as the electrode 2 is disposed and connected to the outer side surface opposed to the inner side surface. ing. Similarly, the electrode 6 is disposed on the inner side surface of the first vibrating portion 21 of the tuning fork arm 20, and the electrode 5 having the same polarity as the electrode 6 is disposed on and connected to the outer side surface opposed to the inner side surface. ing. In addition, the electrodes 1, 2, 7, and 8 form one electrode terminal having the same polarity, and the electrodes 3, 4, 5, and 6 form another one electrode terminal having the same polarity. That is, the two-electrode terminals E ₁ -E ₂ are formed. The electrode terminal E ₁ and the electrode terminal E ₂ have different electrical polarities, so-called opposite electrical polarities.

Further, as an example, the electrode of the electrode terminal E ₁ is connected to the electrode disposed on the surface of the first frame 33 through the electrode disposed on the surface of the base portion 30 and the surface of the connection portion 31. It is, and, of the electrode the electrode terminals E ₂ is connected to the electrodes disposed on the surface of the second frame 34 through the electrodes disposed on the upper face of the connecting portion 32 of the surface of the base portion 30 The

Furthermore, as another example, the electrode of the electrode terminal E _{1 is} an electrode disposed on the surface of the second frame 34 via electrodes disposed on the surface of the base portion 30 and the surface of the connection portion 32. is connected to, and, of the electrode the electrode terminals E ₂ are electrodes disposed on the surface of the first frame 33 via the electrodes disposed on the surface of the connecting portion 31 and the upper surface of the base portion 30 Connected.

3 shows a cross-sectional view of the tuning fork arm 10 of the tuning fork-type piezoelectric vibrator 100 of FIG. In FIG. 3, the arrangement of the electrodes of the second vibrating portions 12 and 22 will be described in detail. A groove 16 is formed on the upper surface of the second vibrating portion 12 of the tuning fork arm 10, a groove 56 is formed on the lower surface, a groove 26 is formed on the upper surface of the second vibrating portion 22 of the tuning fork arm 20, and a groove 66 is formed on the lower surface. Has been. Further, the electrode 43 is disposed in the groove 16, and the electrode 44 having the same polarity as the electrode 43 is disposed and connected to the groove 56. An electrode 47 is disposed in the groove 26, and an electrode 48 having the same polarity as the electrode 47 is disposed and connected to the groove 66. In addition, an electrode 42 is disposed on the inner side surface of the second vibrating portion 12 of the tuning fork arm 10, and an electrode 41 having the same polarity as the electrode 42 is disposed on and connected to the outer side surface opposed to the inner side surface. ing. Similarly, an electrode 46 is disposed on the inner side surface of the second vibrating portion 22 of the tuning fork arm 20, and an electrode 45 having the same polarity as the electrode 46 is disposed on and connected to the outer side surface opposite to the inner side surface. ing. That is, the two-electrode terminals E ₃ -E ₄ are formed. In addition, the electrode terminals E ₁ and the electrode terminals E ₃ is the same polarity, the electrode terminal E ₂ and the electrode terminals E ₄ are connected such that the same poles are formed.

  In detail, the electrode 1 on the outer side surface of the first vibrating portion 11 of the tuning fork arm 10 is connected to the second vibrating portion via the electrode disposed on the surface of the connecting portion 14 (for example, the side surface and / or the upper and lower surfaces). It is connected to the electrode 41 on the outer side surface. Furthermore, the electrode 2 on the inner side surface of the first vibrating portion 11 of the tuning fork arm 10 is connected to the second vibrating portion via an electrode disposed on the surface (for example, the side surface and / or the upper and lower surfaces) of the connection portion 14 (see FIG. 4). Are connected to the electrode 45 on the side surface. Further, the electrode 3 of the groove of the first vibrating part 11 of the tuning fork arm 10 is connected to the electrode of the groove of the second vibrating part via an electrode disposed on the surface of the connecting portion 14 (for example, the side surface and / or the upper and lower surfaces of the groove). 43. Similarly, the electrode 5 on the outer side surface of the first vibrating portion 21 of the tuning fork arm 20 is disposed on the outer side surface of the second vibrating portion via an electrode disposed on the surface of the connection portion 24 (for example, the side surface and / or the upper and lower surfaces). It is connected to the electrode 45. Further, the electrode 6 on the inner side surface of the first vibrating portion 21 of the tuning fork arm 20 is connected to the electrode 46 on the side surface of the second vibrating portion via an electrode disposed on the surface of the connection portion 24 (for example, the side surface and / or the upper and lower surfaces). It is connected to the. In addition, the groove electrode 7 of the first vibrating portion 21 of the tuning fork arm 20 is connected to the electrode of the groove of the second vibrating portion via an electrode disposed on the surface of the connecting portion 24 (for example, the side surface and / or the upper and lower surfaces of the groove). 47.

Next, the relationship between the first vibration part, the second vibration part, and the connection part will be described in detail. FIG. 4 shows an enlarged plan view of the first vibrating portion 11 having the groove 15 of the tuning fork arm 10, the second vibrating portion 12 having the groove 16, and the connecting portion 14. The connection part 14 and the second vibration part 12 have an angle θ ₁ between the left connection part 14 and the second vibration part 12 and an angle θ ₂ between the right connection part 14 and the second vibration part 12. Is formed. In the embodiment according to the first embodiment, the angle θ ₁ and the angle θ ₂ have arbitrary values that can be chemically etched, but preferably the angle θ ₁ and the angle θ ₂ have a relationship of θ ₁ , θ ₂ ≦ 90 °. It is formed to satisfy. Further, on the angle θ ₁ side, the connecting portion causes a first strain in the same direction as the first vibrating portion and the second vibrating portion due to the piezoelectric effect, and on the angle θ ₂ side, the connecting portion causes the first vibration due to the piezoelectric effect. When the second strain in the same direction as the first and second vibrating portions is caused and the directions of the first strain and the second strain are opposite, a relationship of θ ₁ , θ ₂ <30 ° is preferable, but more preferably θ ₁ , Θ ₂ ≦ 20 °. Incidentally, the point at which one end one end of the (first end portion) and the connecting portion 14 of the first vibrating portion 11 (first end portion) is connected shown at S _1, one end of the second vibrating portion 12 (the first the point at which the other end portion of the end portion) and the connecting portion 14 (second end) is connected indicated by S _2. Similarly, for the tuning fork arm 20, the tuning fork arm 10 is the tuning fork arm 20, the groove widths 15 and 16 are the groove widths 25 and 26, the first vibration part 11 is the first vibration part 21, and the second vibration part 12 is By replacing the connecting portion 14 with the connecting portion 24 in the second vibrating portion 22, the relationship of the tuning fork arm 20 is obtained. Further, the angle θ ₁ and the angle θ ₂ have the same relationship as the tuning fork arm 10.

In the present embodiment 1 of the embodiment, the angle theta ₁ and the angle theta ₂ is provided, the present invention is not limited thereto, the angle theta ₁ and either one of the tuning fork arms of the angle theta ₂ May be provided. In addition, although the groove 15 and the groove 16 are connected to each other, the groove 15 and the groove 16 may be divided. In this case, the electrode 3 arranged in the divided groove 15 is connected to the electrode 43 arranged in the divided groove 16 via the electrode arranged on the surface to be divided. This divided groove-to-groove electrode relationship can also be applied to the groove-to-groove relationship described below. Similarly, the groove 25 and the groove 26 are connected to each other, but the groove 25 and the groove 26 may be divided. The same applies to the grooves 55 and 56, and the same applies to the grooves 65 and 66.

  Moreover, although the cross-sectional shape of the groove | channel shown in FIG. 2 and FIG. 3 is a rectangle, it cannot be overemphasized that this rectangular cross-sectional shape becomes a shape which changes with processing methods. That is, the present invention is not limited to this rectangular cross-sectional shape, and the present invention includes cross-sectional shapes that differ depending on the processing method. For example, a tuning-fork-type bending crystal resonator in which a tuning-fork type piezoelectric resonator is made of quartz (formed so that the tuning fork arm width direction is substantially coincident with the crystal electrical axis direction and the length direction is substantially coincident with the mechanical axis direction). When the groove is formed by chemical etching with hydrofluoric acid or the like, the etching rate is different between the + x plane and the −x plane perpendicular to the electric axis of the crystal, and therefore the −x plane is linear in the depth direction of the groove. However, the + x plane is formed with an inclination in the depth direction of the groove, and the center line (neutral line in the thickness direction of the cross section of the groove) drawn in the thickness direction at half the width of the groove The cross-sectional shape is asymmetric with respect to. Further, the tuning fork arm 10 and the tuning fork arm 20 are formed substantially symmetrically with respect to a line drawn from the tuning fork fork in the length direction of the tuning fork arm, that is, a so-called center line. Preferably, perfect symmetry is preferable, but it is substantially symmetrical due to variations caused by vibrator processing.

As described above, the tuning fork type piezoelectric vibrator 100 according to the first embodiment includes the base portion 30, the first tuning fork arm 10 and the second tuning fork arm 20 connected to the base portion 30, Each of the first tuning fork arm 10 and the second tuning fork arm 20 is a tuning fork type piezoelectric vibrator in which one end is connected to the base portion 30 and the other end is free. The first tuning fork arm 10 has a first width W ₁ . Each of the first vibrating portion 11 and the second vibrating portion 12 is provided with at least a first vibrating portion 11 and a second vibrating portion 12 having a second width W ₂ larger than the first width W ₁ . Grooves are formed in each of the upper surface and the lower surface of the first vibration portion 11, the side surface of the first vibration portion 11 and the side surface of the second vibration portion 12 are connected via the side surface of the connection portion 14, and the connection portion 14 is the first tuning fork arm. 10 on the side of the base portion 30 shorter than the first length portion (half length (L / 2)) and the second sound Arm 20 is provided with at least a second vibrating portion 22 which includes a first vibrating portion 21 and the first width W ₁ greater than the second width W ₂ having a first width W _1, the first vibrating portion 21 A groove is formed on each of the upper surface and the lower surface of each vibration part of the second vibration part 22, and the side surface of the first vibration part 21 and the side surface of the second vibration part 22 are connected via the side surface of the connection portion 24. The connecting portion 24 is configured to be on the side of the base portion 30 that is shorter than the first length portion (half length (L / 2)) of the second tuning fork arm 20. With this configuration, even more compact, will be described that the tuning fork type piezoelectric vibrator suppressing an increase in the equivalent series resistance R _m is obtained.

First, a relational expression for determining the equivalent series resistance R _m. Next, the relationship between the vibrator size and the equivalent series resistance of the tuning fork type piezoelectric vibrator according to the first embodiment will be described in comparison with the conventional one. This will be sequentially described below. A proportionality coefficient between the equivalent inductance of the electrical equivalent circuit of the tuning fork type piezoelectric vibrator and L _m, the maximum amplitude D and the maximum amplitude voltage V ₀ which tuning fork arms and k _a, the equivalent series resistance R _m is R _m = is given by ^{_{(L m / k b) 1/2}} / k a. However, k _b is when the constant thickness of the tuning fork arms, proportional to the area of the tuning fork arms S (= length of the width Wx tuning fork arms of the tuning fork arm). It can be determined equivalent series resistance R _m by this relationship. Further, a tuning fork type piezoelectric vibrator having a weight effect described in paragraph 0002 described in paragraph 0002 and housed in a piezoelectric unit having a length of 2 mm is used as the vibrator 1, and the first embodiment is also concerned. tuning fork type piezoelectric resonator length of the tuning fork arms normalized by the length of the equivalent series resistance tuning fork arms of R _n and the vibrator 1 normalized by the equivalent series resistance of the vibrator 1 when the transducer 2 forms the relationship between L _n shown in FIG. That is, the relation between R _n and L _n of the vibrator 2 with respect to R _n = 1 and L _n = 1 of the vibrator 1. Therefore, when (R _n , L _n ) of the vibrator 1 is (1.0, 1.0) (point P ₁ ), (R _n , L _n ) of the vibrator 2 with respect to the vibrator 1 is (1. 23, 0.82) (point Q ₁ ). In other words, comparing the equivalent series resistance of the vibrator 1 and the length of the tuning fork arm, the equivalent series resistance of the vibrator 2 is slightly increased to 23%, but the length of the tuning fork arm is further increased to 18%. And can be significantly shortened. Thus, the vibrator 2 of the present invention has an equivalent series resistance comparable to that of the conventional vibrator 1 and the length of the piezoelectric unit can be shortened, so that an ultra-small piezoelectric unit smaller than 1.8 mm is realized. The effect that it is possible is produced.

The tuning fork type piezoelectric vibrator according to the first embodiment has a relationship of W ₂ <W ₃ , but the present invention is not limited to this, and includes a relationship of W ₂ = W _3. To do. Moreover, although the connection part 14 and the connection part 24 are formed so that it may be in the base part 30 side shorter than the 1st length part of a tuning fork arm, this invention is not limited to this, In FIG. As will be described in detail, the same effect can be obtained even if the connecting portions are formed on the side of the tip portion longer than the first length portion of the tuning fork arm or so as to be equal to the first length portion.

Tuning fork type piezoelectric vibrator according to the second embodiment

FIG. 5 is a plan view of a tuning-fork type piezoelectric vibrator 120 that vibrates in a reverse-phase bending mode according to the second embodiment of the present invention. In FIG. 5, the electrodes disposed on the tuning fork arm, the electrodes disposed on the base portion, and the electrodes disposed on the frame are omitted. The tuning fork type piezoelectric vibrator 120 includes a base portion 90, a tuning fork arm 70 and a tuning fork arm 80 connected to the base portion 90, two connection portions 91 and a connection portion 92 connected to the base portion 90, and a connection portion. A frame 93 connected to 91 and a frame 94 connected to the connection portion 92 are provided. One end of each of the tuning fork arm 70 and the tuning fork arm 80 is connected to the base portion 90. The tuning fork arm 70 includes at least a first vibrating portion 71, a second vibrating portion 72, a third vibrating portion 73, a fourth vibrating portion 74, and a fifth vibrating portion 75. The first vibrating portion 71 comprises at least a first width _{W 11,} the second vibrating portion 72 comprises at least a second width _{W 22,} the third oscillating unit 73 comprises at least a third width _{W 33,} fourth vibrating portion 74 _Includes at least a fourth width W ₄₄ , the fifth vibrating portion 75 includes at least a fifth width W ₅₅ , and the first vibrating portion 71 and the second vibrating portion 72 are connected via a connecting portion as in FIG. It is connected. In addition, the connection between the second vibrating portion 72 and the third vibrating portion 73 and the connection between the third vibrating portion 73 and the fourth vibrating portion 74 are also connected via the connecting portion as in FIG. In addition, a groove 76 is formed on the upper surface of the first vibrating portion 71, a groove 77 is formed on the upper surface of the second vibrating portion 72, a groove 78 is formed on the upper surface of the third vibrating portion 73, and a groove 79 is formed on the upper surface of the fourth vibrating portion 74. Is formed.

In the same way as the tuning fork arms 70, the first vibrating portion 81 the tuning fork arm 80 is provided with at least a first width _{W 11,} and the second vibrating portion 82 having at least a second width _{W 22,} the third width _{W 33} It includes at least a third vibration part 83 provided with at least a fourth vibration part 84 provided with at least a fourth width W ₄₄ and a fifth vibration part 85 provided with at least a fifth width W ₅₅ . The 1st vibration part 81 and the 2nd vibration part 82 are connected via the connection part similarly to FIG. Further, the connection between the second vibrating portion 82 and the third vibrating portion 83 and the connection between the third vibrating portion 83 and the fourth vibrating portion 84 are also connected via the connecting portion as in FIG. In addition, a groove 86 is formed on the upper surface of the first vibrating portion 81, a groove 87 is formed on the upper surface of the second vibrating portion 82, a groove 88 is formed on the upper surface of the third vibrating portion 83, and a groove 89 is formed on the upper surface of the fourth vibrating portion 84. Is formed. Further, although not shown, a groove is also formed on the lower surface of the tuning fork arm against the groove formed on the upper surfaces of the tuning fork arm 70 and the tuning fork arm 80. Each arm width has a relationship of W ₁₁ <W ₂₂ <W ₃₃ <W ₄₄ <W ₅₅ . In the present invention, the width of each vibration part means the smallest width of each vibration part.

As described above, in the tuning fork type piezoelectric vibrator according to the second embodiment, the three vibrating parts having different widths are on the side of the base part shorter than the first length part. The number of vibrating parts is not limited to a single vibrating part, and more than three vibrating parts having different widths may be formed on the side of the base part shorter than the first length part. Preferably, the width of the vibration part connected to the base portion 90 is formed to be smaller than the widths of the other vibration parts. In addition, although the three vibration parts having different widths are on the side of the tip part longer than the first length part, the present invention is not limited to the three vibration parts, and the widths are different from each other. You may form more than three vibration parts provided with in the side of the front-end | tip part longer than a 1st length part. That is, a plurality of vibration parts having different widths are formed on the side of the tip part longer than the first length part, and grooves are formed on the upper and lower surfaces of at least one vibration part among the plurality of vibration parts. Is formed. Preferably, the width of the vibration portion (referred to as vibration portion A) at the tip portion is formed larger than the width W ₁₁ connected to the base portion 90 or the vibration portion (connected to the vibration portion A at the tip portion) The width of the vibrating part B) is formed larger than the width W ₁₁ connected to the base part 90.

As described above, the tuning fork type piezoelectric vibrator 120 according to the second embodiment is configured to include the base portion 90, the first tuning fork arm 70 and the second tuning fork arm 80 connected to the base portion 90, and a first fork arm 70 one end of each of the second tuning fork arms 80 is connected to the base portion 90, in the tuning fork type piezoelectric vibrator other end is free, the first fork arm 70 the first width W ₁₁ a first vibrating portion 71 having a third oscillation section having a second vibrating portion 72 having a first width _{W 11} larger than the second width _{W 22,} the second width _{W 22} larger than the third width _{W 33} and 73, a fourth vibration unit 74 having a fourth width _{W 44} larger than the third width _{W 33,} fifth equipped at least with a vibration unit 75 having a fourth width _{W 44} is larger than the fifth width _{W 55} The upper and lower surfaces of the first vibrating portion 71, the second vibrating portion 72, the third vibrating portion 73, and the fourth vibrating portion 74 Together with the groove is formed in each side surface and the side surface of the second vibrating portion 72 of the first vibrating portion 71 is connected through the side of the connection portion (that the connection portion S _12), the second vibrating portion 72 side surface and the side surface of the third vibrating unit 73 is connected through a side of the connection portion (that the connection portion S _23), side surfaces and a fourth vibration portion 74 of the third vibrating portion 73 connecting portion (connecting portion S ₃₄ It is connected via the side surfaces of) of the side surface and the side surface of the fifth vibration portion 75 of the fourth oscillating unit 74 is connected via the side of the connection portion (that the connection portions S _45), the connecting portion S ₁₂ The connecting portion S ₂₃ is on the side of the base portion 90 that is shorter than the first length portion of the first tuning fork arm 70. In addition, the connection portion S ₃₄ and the connection portion S ₄₅ are on the side of the tip portion longer than the first length portion.

In the same manner as the first fork arm 70, the second vibrating portion and the second tuning fork arms 80 with the first vibrating portion 81 having a first width _{W 11,} the first width _{W 11} larger than the second width _{W 22} and 82, a third vibration unit 83 having a second width _{W 22} larger than the third width _{W 33,} the fourth vibration unit 84 having a fourth width _{W 44} larger than the third width _{W 33,} the fourth width Each of the vibrations of the first vibration part 81, the second vibration part 82, the third vibration part 83, and the fourth vibration part 84 is provided with at least a fifth vibration part 85 having a fifth width W ₅₅ larger than W ₄₄ . with upper and lower surfaces of the respective groove parts are formed, side surfaces of the second vibrating portion 82 of the first vibrating portion 81 is connected through the side of the connection portion (that the connection portion S _12), the side surface and the side surface of the third vibrating part 83 of the second vibrating portion 82 are connected through the side of the connection portion (that the connection portion S _23), 3 side and the side surface of the fourth vibration portion 84 of the vibrating portion 83 is connected through the side of the connection portion (referred to as connection portions S _34), the side surface and the side surface of the fifth vibration portion 85 of the fourth vibrating portion 84 connecting portion be connected via the side surface of the (called connection portions S _45), the connection portion S ₁₂ and the connecting portion S ₂₃ is on the side of the base portion 90 shorter than the first length of the second tuning fork arms 80. In addition, the connection portion S ₃₄ and the connection portion S ₄₅ are on the side of the tip portion longer than the first length portion. That is, at least two vibration parts having different widths are on the side of the base part 90 shorter than the first length part, and at least two vibration parts having different widths are longer than the first length part. On the side of the tip.

Tuning fork type piezoelectric vibrator according to the third embodiment

FIG. 6 is a plan view of a tuning-fork type piezoelectric vibrator 140 that vibrates in an antiphase bending mode according to the third embodiment of the present invention. In FIG. 6, the electrodes disposed on the tuning fork arm, the electrodes disposed on the base portion, and the electrodes disposed on the frame are omitted. The tuning fork type piezoelectric vibrator 140 includes a base portion 170, a tuning fork arm 150 and a tuning fork arm 160 connected to the base portion 170, two connection portions 171 and 172 connected to the base portion 170, and a connection portion. The frame 173 is connected to the connection portion 172 and the frame 174 is connected to the connection portion 172. One end of each of the tuning fork arm 150 and the tuning fork arm 160 is connected to the base portion 170. The tuning fork arm 150 includes at least a first vibrating portion 151, a second vibrating portion 152, and a third vibrating portion 153. The first vibrating part 151 includes at least a first width _{W 10,} the second vibrating portion 152 includes at least a second width _{W 20,} the third vibrating part 153 comprise at least a third width _{W 30,} the first vibrating The part 151 and the second vibrating part 152 are connected via a connection part in the same manner as in FIG. In addition, the connection between the second vibrating portion 152 and the third vibrating portion 153 is also connected through the connecting portion. In addition, a groove 154 is formed on the upper surface of the first vibrating portion 151, and a groove 155 is formed on the upper surface of the second vibrating portion 152. Further, although not shown, grooves are also formed on the lower surface of the first vibrating portion 151 and the lower surface of the second vibrating portion 152.

Similar to the tuning fork arm 150, the tuning fork arm 160 includes at least a first vibrating portion 161, a second vibrating portion 162, and a third vibrating portion 163. The first vibrating part 161 includes at least a first width _{W 10,} the second vibrating portion 162 includes at least a second width _{W 20,} the third vibrating part 163 comprise at least a third width _{W 30,} the first vibrating The part 161 and the second vibrating part 162 are connected via a connection portion in the same manner as in FIG. In addition, the connection between the second vibrating portion 162 and the third vibrating portion 163 is also connected through the connecting portion. In addition, a groove 164 is formed on the upper surface of the first vibrating portion 161, and a groove 165 is formed on the upper surface of the second vibrating portion 162.

Further, although not shown, grooves are also formed on the lower surface of the first vibrating portion 161 and the lower surface of the second vibrating portion 162. Each arm width has a relationship of W ₁₀ <W ₂₀ <W ₃₀ . Further, assuming that the length of the second vibrating portions 152 and 162 is L ₂₀ and the length of the groove formed in the second vibrating portions 152 and 162 is L _2g , L _2g <L ₂₀ or L _2g = L ₂₀ There is a relationship. In addition, when the length of the third oscillating unit 153 and 163 and _{L 30, L 2g <L 30} , or _L 20 _{<L 30,} or a relationship of _L 20 _{= L 30.} Further, the groove width of the first vibrating portion _{W 10 m,} when the groove width of the second vibrating portion and _{W 20 m,} a relationship of W 10 m _{<W 20 m} or _W 10 m _{= W 20 m} or _{W 10m> W 20m.} Further, when W _h12 is defined as W _h12 = W ₂₀ / W ₁₀ and W _h23 is defined as W _h23 = W ₃₀ / W ₂₀ , each of W _h12 and W _h23 is greater than 1.06, preferably 1.08 to 3.0, more preferably 1.2 to 2.7. As a result, the effects as of the weight of the third vibrating portion of the first vibrating portion grooves of the second vibrating part, the equivalent series resistance R _m micro tuning fork type piezoelectric vibrator suppressing the increase of the resultant.

  As described above, in the tuning fork type piezoelectric vibrator according to the third embodiment, the three vibrating parts having different widths are on the side of the tip part longer than the first length part. The number of vibrating portions is not limited to the number of vibrating portions, and more than three vibrating portions having different widths may be formed on the side of the tip portion longer than the first length portion. Preferably, grooves are formed on the upper and lower surfaces of at least two vibration parts having different widths. Furthermore, electrodes similar to those shown in FIG. 1 are arranged on the first vibrating portions 151 and 161 and the second vibrating portions 152 and 162. That is, a two-electrode terminal is formed.

  In addition, a metal weight for frequency adjustment is formed on at least one of the upper and lower surfaces of the third vibrating portions 153 and 163. The thickness of the weight is greater than 0.2 μm, preferably in the range of 0.5 μm to 3.2 μm, more preferably in the range of 0.75 μm to 2.6 μm. Further, as shown in FIG. 6, each of the first vibrating parts 151, 161, the second vibrating parts 152, 162, and the third vibrating parts 153, 163 is configured to have at least a certain width in the length direction. Yes. However, the present invention is not limited to this, and in the present invention, each of the first vibrating portion, the second vibrating portion, and the third vibrating portion, or at least one vibrating portion is gradually moved toward the tuning fork tip. It also includes shapes that widen or narrow.

As described above, the tuning fork type piezoelectric vibrator 140 according to the third embodiment includes the base portion 170, the first tuning fork arm 150 and the second tuning fork arm 160 connected to the base portion 170, and a first fork arm 150 one end of each of the second tuning fork arms 160 are connected to the base portion 170, at the other end is free tuning fork type piezoelectric vibrator, the first fork arm 150 the first width W ₁₀ a first vibrating portion 151 which includes a second vibrating portion 152 having a first width _{W 10} larger than the second width _{W 20,} equipped at least with a second width _{W 20} larger than the third width _{W 30} and, A groove is formed in each of the upper surface and the lower surface of each vibration part of the first vibration part 151 and the second vibration part 152, and the side surface of the first vibration part 151 and the side surface of the second vibration part 152 are connected portions (connections). are connected via the side surface of that portion _{S 12),} the second vibrating portion 15 First length of the side surface and the side surface of the third vibrating portion 153 connecting portions (connecting portions referred S ₂₃₎ have been side connected via the connection portion S ₁₂ and the connecting portion S ₂₃ the first tuning fork arms 150 It is on the side of the tip part longer than the part.

In the same manner as the first tuning fork arm 150, the second vibrating portion second tuning fork arms 160 are provided with a first vibrating portion 161 having a first width _{W 10,} the first width _{W 10} larger than the second width _{W 20} 162 and at least a third width W ₃₀ larger than the second width W _20, and grooves are formed on the upper surface and the lower surface of each vibration portion of the first vibration portion 161 and the second vibration portion 162. together, side surfaces of the second vibrating portion 162 of the first vibrating unit 161 are connected through the side of the connection portion (that the connection portion S _12), the side surface and the side surface of the third vibrating portion 163 of the second vibrating portion 162 is connected via the side of the connection portion (that the connection portions S _23), the connection portion S ₁₂ and the connecting portion S ₂₃ is on the side of the longer tip portion than the first length of the second tuning fork arms 160.

  For example, the tuning fork type piezoelectric vibrator 140 includes a second length portion (position 3L / 5), a third length portion (5L / 7), and a fourth length portion (position 3L / 4). Each of the second vibrating portions 152 and 162 of the tuning fork type piezoelectric vibrator 140 is between the second length portion and the fourth length portion. Preferably, it is between the second length portion and the third length portion.

Next, the relationship between the vibrator size and the equivalent series resistance of the tuning fork type piezoelectric vibrator according to the third embodiment will be described in comparison with the conventional one. A tuning-fork type piezoelectric vibrator having a weight effect described in paragraph 0002 and having a weight effect of 2 mm and housed in a piezoelectric unit having a length of 2 mm is used as the vibrator 1, and the embodiment according to the third embodiment is used. When the tuning fork type piezoelectric vibrator is the vibrator 3, the equivalent series resistance R _n normalized by the equivalent series resistance of the vibrator 1 and the tuning fork arm length L _n normalized by the length of the tuning fork arm of the vibrator 1 FIG. 8 shows the relationship. That is, the relation between R _n and L _n of the vibrator 3 with respect to R _n = 1 and L _n = 1 of the vibrator 1. Therefore, when (R _n , L _n ) of the vibrator 1 is (1.0, 1.0) (point P ₂ ), (R _n , L _n ) of the vibrator 3 with respect to the vibrator 1 is (1. 29, 0.77) (point Q ₂ ).

  In other words, compared with the equivalent series resistance of the vibrator 1 and the length of the tuning fork arm, the equivalent series resistance of the vibrator 3 is increased by 29%, but the length of the tuning fork arm is shortened by 23%. As described above, the equivalent series resistance of the vibrator 3 is slightly increased as compared with the equivalent series resistance of the vibrator 1, but in addition to this, an extremely excellent effect is achieved that the length of the tuning fork arm can be shortened by 23%. As a result, an ultra-small piezoelectric unit of 1.8 mm or less (for example, 1.6 mm) can be realized. At the same time, there is an effect that a piezoelectric oscillator including the piezoelectric unit can be realized. It should also be noted that the piezoelectric oscillator amplifier can be used without modification.

In the tuning fork type piezoelectric vibrator 140 according to the third embodiment, the width of one end of the first vibrating portions 151 and 161 of the tuning fork arms 150 and 160 connected to the base portion 170 is the width W of the first vibrating portion. It is formed larger than ₁₀ . This relationship also applies to other tuning fork type piezoelectric vibrators of the present invention.

Furthermore, those in the tuning fork type piezoelectric vibrator 140 according to the present embodiment 3 of the embodiment, the connection portions S ₁₂ is the side of the longer tip portion than the first length portion of each tuning fork arms, the present invention is not limited to this rather, the connection portion S ₁₂ of the present invention may be in a position equal to the first length portion. If More specifically, as described in FIG. 4, for example, when the angle theta ₁ and the angle theta ₂ is formed to satisfy θ _1, θ _{2 =} 90 ° relationship, the S ₁ of the connecting portion S ₂ is in the position of the same length as the first length portion. When θ ₁ and θ ₂ <90 °, the first length portion is between S ₁ and S ₂ of the connection portion, or S ₁ of the connection portion is the same length as the first length portion. it is in position, or the S ₂ of the connecting portion is in the position of the same length as the first length portion. In addition, when θ ₁ and θ ₂ > 90 °, the connection portion S ₁ is at the same length as the first length portion, and the present invention encompasses all the above relationships.

Further, in the tuning fork type piezoelectric vibrator 140 according to the third embodiment, each arm width has a relationship of W ₁₀ <W ₂₀ <W ₃₀ , but the present invention is not limited to this, and W ₁₀ The relationship <W ₂₀ = W ₃₀ is also included in the present invention. In addition, when W ₁₀ <W ₂₀ = W ₃₀ , there are a portion in which the groove is formed (groove length L _2g ) and a portion without the groove (L _ng ) in the second vibrating portion. Therefore, the present invention includes the relationship of L _2g <L _ng , or L _2g = L _ng , or L _2g > L _ng , but particularly when the weight effect is required, the relationship of L _2g <L _ng is preferable, In particular, when it is necessary to reduce the equivalent series resistance R _m , the relationship of L _2g > L _ng is preferable.

Piezoelectric unit according to the first embodiment

  FIG. 9 is a plan view of the piezoelectric unit 300 according to the first embodiment of the present invention. The surface mount type case 310 is provided with a fixing portion 305 and a fixing portion 306. The piezoelectric unit 300 includes the tuning fork type piezoelectric vibrator 100 according to the first embodiment, the case 310, and a lid (not shown). More specifically, the frame 33 and the frame 34 of the tuning fork type piezoelectric vibrator 100 are fixed to a fixing portion 305 and a fixing portion 306 provided on the case 310 by a conductive adhesive 315, a conductive adhesive 316, and solder, respectively. Is done. The case 310 and the lid are joined via a joining member such as metal or glass. In other words, the piezoelectric unit includes the tuning fork type piezoelectric vibrator 100, a case that houses the tuning fork type piezoelectric vibrator, and a lid that covers the opening of the case. Moreover, you may provide a fixing | fixed part in a lid | cover. The lid is made of glass or metal or glass and metal.

  More specifically, the case 310 includes a first fixing portion 305 and a second fixing portion 306, and the first fixing portion 305 and the second fixing portion 306 include the first tuning fork arm 10 (see FIG. 1) and the second fixing portion 306. The first frame 33 of the tuning fork type piezoelectric vibrator 100 is fixed to the first fixing portion 305 at the positions opposite to each other with respect to the tuning fork arm 20 (see FIG. 1), and the second frame 34 is the second frame 34. An electrode (not shown) fixed to the fixing portion 306 and disposed on the surface of the first frame 33 is connected to an electrode (not illustrated) disposed on the surface of the first fixing portion 305. In addition, an electrode (not shown) disposed on the surface of the second frame 34 is connected to an electrode (not illustrated) disposed on the surface of the second fixing portion 306. In addition, the electrodes disposed on the surface of the first frame 33 and the electrodes disposed on the surface of the second frame 34 have different electrical polarities.

  In the first embodiment, the first frame 33 is fixed to the first fixing portion 305 by the conductive adhesive 315, and the electrode disposed on the surface of the first frame 33 is made of the conductive adhesive 315. To the electrode disposed on the surface of the first fixed portion. That is, the first frame 33 is fixed by the conductive adhesive 315 and the electrodes of the first frame 33 and the electrodes of the first fixing portion are simultaneously connected. Similarly, the second frame 34 is fixed to the second fixing portion 306 by the conductive adhesive 316, and the electrode disposed on the surface of the second frame 34 is connected to the second frame 34 via the conductive adhesive 316. It is connected to an electrode arranged on the surface of the fixed part. That is, the second frame 34 is fixed by the conductive adhesive 316 and the electrodes of the second frame 34 and the electrodes of the second fixing portion are simultaneously connected.

Piezoelectric oscillator according to the first embodiment

  FIG. 10 is an example of a piezoelectric oscillation circuit diagram constituting the piezoelectric oscillator according to the first embodiment of the present invention. The piezoelectric oscillation circuit 201 includes an amplifier 202 (CMOS inverter), a feedback resistor 204, a drain resistor 207, capacitors 205 and 206, and a piezoelectric vibrator 203. That is, the piezoelectric oscillation circuit 201 includes an amplifier circuit 208 including an amplifier 202 and a feedback resistor 204, a drain resistor 207, a capacitor 205, a capacitor 206, and a piezoelectric vibrator 203 fixed to a case. And a feedback circuit 209. Specifically, the piezoelectric oscillation circuit of the present invention is configured to include an amplifier circuit and a feedback circuit, the amplifier circuit is configured from at least an amplifier, and the feedback circuit is configured from at least a piezoelectric vibrator and a capacitor. . The piezoelectric vibrator used in the piezoelectric oscillation circuit of the piezoelectric oscillator of the present invention is the tuning fork type piezoelectric vibrator according to the first to third embodiments, and the tuning fork type piezoelectric vibrator is housed in a container (unit). ing. A so-called piezoelectric unit is used for the piezoelectric oscillation circuit. And the output signal of the piezoelectric oscillator of this invention is used as a signal for displaying time information on the display part of an electronic device.

  Next, a manufacturing method of each of the tuning fork type piezoelectric vibrator, the piezoelectric unit, the piezoelectric oscillator, and the electronic device will be described in detail. In the process of manufacturing the tuning fork type piezoelectric vibrator according to the first embodiment, first, the tuning fork arms 10 and 20, the base portion 30, the first connection portion 31, the second connection portion 32, and the first frame shown in FIG. A tuning fork shape including the second frame 34 and the second frame 34 is integrally formed by etching. That is, the tuning fork shape is formed by the first etching process. Next, grooves are formed in each of the upper and lower surfaces of the tuning fork arms 10 and 20 by etching. That is, a groove is formed by the second etching process. Thereafter, the electrodes shown in FIGS. 2 and 3 are formed in the side surface and groove of the tuning fork arm. At the same time, electrodes are formed on the surface of the base portion and on the surfaces of the first connection portion, the second connection portion, the first frame, and the second frame. That is, a tuning fork type piezoelectric vibrator having two electrode terminals is formed. This manufacturing process can be applied to the tuning-fork type piezoelectric vibrator according to each of the second and third embodiments.

  Next, in the process of manufacturing the piezoelectric unit, the first frame and the second frame of the tuning fork type piezoelectric vibrator are fixed to the fixing portion of the case. Thereafter, the lid is connected to the opening of the case. That is, the piezoelectric unit shown in FIG. 9 is formed. Further, in the process of manufacturing the piezoelectric oscillator, the two electrode terminals of the tuning fork type piezoelectric vibrator constituting the piezoelectric unit are electrically connected to the amplifier, the capacitor, and the resistor. That is, the piezoelectric oscillation circuit shown in FIG. 10 is formed, and a piezoelectric oscillator including the piezoelectric oscillation circuit is formed. Next, in the step of manufacturing the electronic device, the piezoelectric oscillator is connected so that the output signal of the piezoelectric oscillator becomes the operation signal of the electronic device.

  In the process of manufacturing the tuning fork type piezoelectric vibrator according to the first embodiment, after the tuning fork arm is formed, the groove is formed in the tuning fork arm, but the present invention is not limited to this. The tuning fork arm and the groove may be formed simultaneously. Alternatively, the tuning fork arm may be formed after the groove is formed.

  Since the tuning fork type piezoelectric vibrator, the piezoelectric unit and the piezoelectric oscillator of the present invention have equivalent series resistances that are comparable to the conventional ones even if they are miniaturized, the tuning fork type piezoelectric vibrator and the piezoelectric unit that are more miniaturized are particularly suitable. Applicable to electronic devices including portable devices such as mobile phones and consumer devices that need them.

  1 is a plan view of a tuning fork type piezoelectric vibrator that vibrates in an antiphase bending mode according to the first embodiment of the present invention. FIG.   2 is a cross-sectional view taken along line AA of the tuning fork arm of the tuning fork type piezoelectric vibrator of FIG.   FIG. 2 is a cross-sectional view taken along line BB of a tuning fork arm of the tuning fork type piezoelectric vibrator of FIG. 1.   The enlarged view of the top view of the 1st vibration part of the tuning fork arm, the 2nd vibration part, and a connection part is shown.   The top view of the tuning fork type piezoelectric vibrator which vibrates in the bending mode of the reverse phase concerning Embodiment 2 of this invention is shown.   The top view of the tuning fork type piezoelectric vibrator which vibrates in the bending mode of a reverse phase concerning Embodiment 3 of this invention is shown. The normalized equivalent series resistance R _n and normalized tuning fork arms of the tuning fork type piezoelectric vibrator according to the exemplary first embodiment of the present invention is a relationship between the length L _n. The normalized equivalent series resistance R _n and normalized tuning fork arms of the tuning fork type piezoelectric vibrator according to the exemplary third embodiment of the present invention is a relationship between the length L _n.   It is a top view of the piezoelectric unit concerning Embodiment 1 of the present invention.   It is an example of the piezoelectric oscillation circuit diagram which comprises the piezoelectric oscillator concerning Embodiment 1 of this invention.

L length of tuning fork arm L ₁ length of connecting portion,
L / 2 first length portion 3L / 5 second length portion 5L / 7 3 lengths 3L / 4 fourth length portion _{W 1} width of the first vibrating portion _{W 2} second vibrating portion width _{W 3} of Widths 14 and 24 of the third vibration part Connection portion 33 connecting the first vibration part and the second vibration part 33 First frame,
34 Second frame

Claims (4)

A tuning fork type piezoelectric vibrator comprising a base portion, a first tuning fork arm and a second tuning fork arm connected to the base portion, and grooves formed on the upper surface and the lower surface of each tuning fork arm;
The first frame and the second frame are connected to the base portion, and the first frame and the second frame are in the same direction as the first tuning fork arm and the second tuning fork arm outside the first tuning fork arm and the second tuning fork arm. Extend to
Each of the first tuning fork arm and the second tuning fork arm has a first vibrating part having at least a first width, a second vibrating part having at least a second width greater than the first width, and a third larger than the second width. A third vibrating part having at least a width, and at least
The second vibration part is formed between the first vibration part and the third vibration part, the first vibration part is closer to the base part than the second vibration part, and the first vibration part is connected to the second vibration part via the connection part. The piezoelectric vibrator is characterized in that the connecting portion is on the side of the tip portion of the tuning fork arm longer than the first length portion of each tuning fork arm of the first tuning fork arm and the second tuning fork arm . A tuning fork type piezoelectric vibrator comprising a base portion, a first tuning fork arm and a second tuning fork arm connected to the base portion, and grooves formed on the upper surface and the lower surface of each tuning fork arm;
The first frame and the second frame are connected to the base portion, and the first frame and the second frame are in the same direction as the first tuning fork arm and the second tuning fork arm outside the first tuning fork arm and the second tuning fork arm. Extend to
Each of the first tuning fork arm and the second tuning fork arm has a first vibrating part having at least a first width, a second vibrating part having at least a second width greater than the first width, and a third larger than the second width. A third vibrating part having at least a width, and at least
The second vibration part is formed between the first vibration part and the third vibration part, the first vibration part is closer to the base part than the second vibration part, and the first vibration part is connected to the second vibration part via the connection part. And one end of the first vibration part is connected at one end of the connection part, this connection part is denoted by S1, and one end of the second vibration part is connected at the other end of the connection part, When this connecting portion is denoted by S2, the position of S1 is equal to the first length portion of the tuning fork arm, or the position of S2 is equal to the first length portion of the tuning fork arm, or a tuning fork between S1 and S2. A piezoelectric vibrator having a first length portion of an arm. A piezoelectric unit comprising the piezoelectric vibrator according to claim 1 or claim 2 , a case, and a lid,
The case includes a first mount portion and a second mount portion, the first frame is fixed to the first mount portion of the case, and the second frame is fixed to the second mount portion of the case,
An electrode disposed on the groove surface of each of the upper and lower surfaces of one tuning fork arm of the first tuning fork arm and the second tuning fork arm is connected to an electrode disposed on the surface of the first mount portion, The electrode disposed on the groove surface of each of the upper and lower surfaces of the other tuning fork arm of the first tuning fork arm and the second tuning fork arm is connected to the electrode disposed on the surface of the second mount portion. A piezoelectric unit characterized by A tuning fork type piezoelectric vibrator having a base portion, a first tuning fork arm and a second tuning fork arm connected to the base portion, and grooves formed on the upper surface and the lower surface of each tuning fork arm, A piezoelectric unit comprising a case having a mount portion and a second mount portion and a lid, wherein each frame of the first frame and the second frame is connected to the base portion, and the first frame and the second frame are The first tuning fork arm and the second tuning fork arm extend in the same direction as the first tuning fork arm and the second tuning fork arm, the first frame is fixed to the first mount portion of the case, and the second frame is fixed to the case. A first tuning fork arm and a second tuning fork arm, each of which is fixed to the second mount portion, each has a first vibration portion having at least a first width, and a second vibration having at least a second width greater than the first width. And a third vibrating part having at least a third width greater than the second width. Provided even without, the second vibrating part is formed between the third vibrating part and the first vibrating portion, the first vibrating part is on the side of the base portion than the second vibrating portion, and the side surface of the second vibrating portion 3 The side surface of the vibration part is connected via the side surface of the connection part, and the connection part is on the side of the tip part of the tuning fork arm that is longer than the first length part of each tuning fork arm of the first tuning fork arm and the second tuning fork arm. A piezoelectric unit characterized by

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