JP2005094726A - Crystal unit, manufacturing method thereof and crystal oscillator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a crystal unit provided with a microminiature contour crystal vibrator which has small equivalent series resistance R<SB>n</SB>, a high Q value and an excellent frequency temperature characteristic, a manufacturing method thereof, and a crystal oscillator provided with this crystal unit. <P>SOLUTION: The contour crystal vibrator composed of a vibration section, a connection section and a supporting section is formed of a crystal plate having proper electrooptic conversion efficiency, and has a zero temperature coefficient at an arbitrary temperature. Thus, the crystal unit provided with the microminiature contour crystal vibrator having a small change in frequency over a wide temperature range and a small equivalent series resistance R<SB>n</SB>is obtained. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention has a high electromechanical conversion efficiency, and a contour crystal resonator that vibrates in a single vibration mode in which the main vibration is not coupled with the secondary vibration (for example, a width vertical crystal resonator, a lame crystal resonator, a length The present invention relates to a crystal unit including a vertical crystal resonator), a case, and a lid, a manufacturing method thereof, and a crystal oscillator. In particular, the present invention relates to a cut angle, an electrode configuration, and a vibrator shape of a width-longitudinal crystal resonator that is one of the contour crystal resonators constituting the crystal unit of the present invention. In detail, a new vertical and vertical crystal oscillation with a new cut that is optimal as a reference signal source for portable devices, measuring instruments, and consumer devices, which are highly demanded for miniaturization, high accuracy, impact resistance, and low cost. The present invention relates to a crystal unit including a child, a manufacturing method thereof, and a crystal oscillator.

For example, as a conventional technique, an NS-GT cut width / length longitudinally coupled crystal resonator in which width longitudinal mode vibration and length longitudinal mode vibration using a crystal are coupled is well known. FIG. 15 shows a plan view of this conventional example. In FIG. 15, the crystal resonator 200 includes a vibration part 201, connection parts 203 and 206, and support parts 204 and 207. The support portions 204 and 207 include mount portions 205 and 208, respectively. As shown in FIGS. 15 and 16, electrodes 202 and 211 are arranged on the upper and lower surfaces of the vibration unit 201, and the electrode 202 of the vibration unit extends to the mount unit 205 via the connection unit 203. Yes. On the other hand, the electrode 211 of the vibration part similarly extends to the mount part 208 via the connection part 206. The electrode 202 and the electrode 211 are configured to have different polarities, and form a two-electrode terminal. Although not shown, the vibrator is fixed to the pedestal with mounts 205 and 208 with an adhesive or the like, and the pedestal is further fixed to the lead wire. That is, it is stored in a cylindrical metal container that is widely used in wristwatches. Now, when an alternating voltage is applied between the electrodes 202 and 211, as indicated by a solid line and a dotted line in FIG. 16, the electric field E _t work alternately in the thickness T direction. As a result, the width longitudinal vibration mode in which the frequency is approximately inversely proportional to the width W and the length longitudinal vibration mode in which the frequency is approximately inversely proportional to the length L are simultaneously excited, and the NS-GT cut width in which both vibration modes are combined. -A longitudinally coupled crystal unit can be obtained. However, there has been a problem that R ₁ increases as the size is reduced (higher frequency).
Kosaku Itsusaku's "Piezoelectric and High Frequency", Ohmsha Showa 13 “Short-side vibration of rectangular crystal resonator and its frequency temperature coefficient”, The Institute of Electrical Engineers of Japan, Vol. 56, No. 579, October 1946 “Crystal resonator and its application device” IEICE Transactions CI Vol. J82-CI No. 12pp. 667-682 December 1999 “Analysis of Biaxial Rotating Ramé Mode Piezoelectric Vibrator by Energy Method”, IEICE Transactions A Vol. J79-A, no. 6pp. 1157-1164 June 1996 JP 2001-31537 A JP 2002-111434 A JP 2002-158559 A

The NS-GT cut width and length longitudinally coupled crystal oscillator, the larger the area of the vibration part (low frequency) equivalent series resistance R ₁ becomes smaller, the quality factor Q value increases. However, the NS-GT cut width / length longitudinally coupled crystal resonator in which two vibration modes are coupled has their frequencies inversely proportional to the width W and the length L, respectively, and the frequency temperature characteristic is the width W and the length. L is determined by the ratio of L, the so-called side ratio W / L, and the side ratio W / L≈0.95 at which the frequency temperature characteristic is good. The area becomes smaller. Therefore, the electromechanical conversion efficiency is reduced, resulting in increased equivalent series resistance R _1, the quality factor Q value is left a problem such as decreased. For this reason, ultra-small, low equivalent series resistance R _1, the new cut as the quality factor Q value is high, the crystal housing a quartz oscillator comprising an electrode structure electromechanical conversion efficiency is increased There has been a demand for a unit, a method for manufacturing the crystal unit, and a crystal oscillator including the crystal unit.

  The present invention provides a contoured quartz crystal unit that advantageously solves the conventional problems in the following manner, for example, a quartz crystal unit including a width vertical crystal unit, a lame crystal unit, or a length vertical crystal unit, and its manufacture. The object is to provide a method and a crystal oscillator comprising the crystal unit.

That is, the first aspect of the crystal unit of the present invention is configured to include a crystal resonator, a case, and a lid, and the crystal resonator includes a vibrating portion, a connection portion, and a support portion, The vibration unit is a crystal unit including a contour crystal resonator having a width dimension smaller than a length dimension and larger than a thickness dimension, wherein the thickness direction of the contour crystal oscillator is a width in the electric axis x-axis direction. The direction is the same as the machine axis y-axis direction, the length direction is the same as the optical axis z-axis direction, the contour crystal unit is first rotated by an angle θ _x with the axis in the thickness direction as the rotation axis, and then the width direction or the axis is the angle theta _y as a rotation axis, or the contour crystal resonator first angle theta is _y rotating the shaft in the width direction as a rotation axis, then the angle a in the thickness direction axis as a rotation axis theta _the angle θ _x and the angle θ _y are respectively θ _x = − The vibration part of the contour crystal resonator which is in the range of 25 ° to + 25 ° and θ _y = −30 ° to + 30 ° and includes the vibration part, the connection part, and the support part is at least a first connection. The connecting portion is provided in the length direction of the vibrating portion, and the width dimension of the vibrating portion is smaller than the length dimension and larger than the thickness dimension. In addition, the contoured crystal resonator including the vibrating portion, the connecting portion, and the support portion is integrally formed by a particle method, and at least a pair of different polarities are formed on the upper and lower surfaces of the vibrating portion. A lateral effect type contour crystal resonator in which electrodes are arranged so that the vibration order of fundamental wave mode vibration or overton mode vibration does not depend on the piezoelectric constant is provided. It is a crystal unit that is configured.
A second aspect of the crystal unit of the present invention, the contour crystal oscillators width longitudinal quartz crystal resonator which vibrates in the width longitudinal mode, the absolute value of piezoelectric constant e ₁₂ of the width longitudinal quartz oscillator 0.095 to 0 .19 C / m ² , and the relationship between the angle θ _x of the width-longitudinal crystal resonator, the dimensional ratio (W ₀ / L ₀ ), and the number of electrode pairs n (odd number) is [20 {W ₀ / ( nL ₀ )} − 25] ° <θ _x <[20 {W ₀ / (nL ₀ )} − 5] °, the crystal unit according to the first aspect.
A third aspect of the crystal unit of the present invention is the thickness T ₀ of the width longitudinal quartz crystal resonator which is one of the contour crystal oscillator within the 0.01Mm～0.18Mm, further, the width of the vibrating part When having n pairs (odd number pairs) of electrodes divided in the direction, the width W _{0 of the} vibration part is in the range of (0.01 to 0.96) nmm in the first mode or the second mode. It is a crystal unit of description.
According to a fourth aspect of the crystal unit of the present invention, the crystal unit includes a crystal resonator, a case, and a lid, and the crystal resonator includes a vibrating portion, a connection portion, and a support portion. A crystal unit comprising a vibrator, wherein the vibration part of the contour crystal vibrator comprising a vibration part, a connection part, and a support part is provided via at least a first connection part and a second connection part. The contour quartz crystal resonator that is connected to the support portion and includes the vibration portion, the connection portion, and the support portion is integrally formed by a particle method and / or a chemical etching method. At least a pair of electrodes having different polarities are arranged on the upper and lower surfaces, and a lateral effect type contour crystal in which electrodes are disposed on the vibrating portion so that the vibration order of the contour crystal resonator does not depend on the piezoelectric constant. A main vibration of the contour quartz crystal When the frequency stability factor and vibration _{S n} and _{S f,} respectively, _{S n} and _{S f} is given by ^{_{S n = r n / 2Q n}} 2 and ^{_{S f = r f / 2Q f}} 2, S n <S f This is a crystal unit having the following relationship.

According to a first aspect of the crystal unit manufacturing method of the present invention, in the crystal unit manufacturing method including a crystal resonator, a case, and a lid, the crystal resonator constituting the crystal unit is in a longitudinal mode. The width-longitudinal crystal resonator oscillates in the direction of thickness, the thickness direction of the width-longitudinal crystal resonator coincides with the electric axis x-axis direction, the width direction coincides with the mechanical axis y-axis direction, and the length direction coincides with the optical axis z-axis direction. the width longitudinal quartz crystal resonator first be angle theta _x rotated in the thickness direction axis as a rotation axis, then, either by the angle theta _y rotating the shaft in the width direction as a rotation axis, or the width longitudinal quartz crystal resonator First, the angle θ _y is rotated with the width direction axis as the rotation axis, and then the angle θ _{x is} rotated with the thickness direction axis as the rotation axis. The angle θ _x and the angle θ _y are respectively θ _x = −25 In the range of ° to + 25 °, θ _y = −30 ° to + 30 °, and The width longitudinal crystal resonator includes a vibrating portion, a connecting portion, and a supporting portion, and the connecting portion has at least a first connecting portion and a second connecting portion, and the width dimension of the vibrating portion is long. A step of integrally forming a longitudinal quartz crystal resonator having a width smaller than that of the thickness and larger than a thickness by a particle method, a step of opposingly arranging at least a pair of electrodes having different polarities on the upper and lower surfaces of the vibrating portion, and the width Manufacturing a crystal unit comprising: a step of fixing a vertical crystal resonator to the case or the lid; a step of adjusting an oscillation frequency; and a step of joining the case and the lid via a joining member. Is the method.

A first aspect of the crystal oscillator according to the present invention is a crystal oscillator including a crystal resonator, an amplifier, a capacitor, and a resistor, and the crystal resonator includes a vibrating portion, a connection portion, and a support portion. In addition, at least a pair of electrodes having different polarities are arranged on the upper and lower surfaces of the vibrating portion, and the crystal resonator is a contour crystal resonator that vibrates in a contour mode. The quartz crystal resonator is integrally formed by a particle method and / or a chemical etching method, and the equivalent series resistance R _n of the main vibration of the contour crystal resonator is more than the equivalent series resistance R _{f of the} sub vibration. The crystal oscillator is configured to include a small contour crystal resonator, and the absolute value of the negative resistance of the main vibration of the amplifier circuit of the crystal oscillator configured to include an amplifier circuit and a feedback circuit | −RL _n | Equivalent series resistance R of main vibration _The crystal oscillator is configured such that the ratio to n is larger than the ratio of the absolute value | -RL _f | of the negative resistance of the secondary vibration of the amplifier circuit to the equivalent series resistance R _f of the secondary vibration, and the contour crystal A crystal oscillator in which an output signal of the crystal oscillator having a vibrator is an oscillation frequency of a main vibration, and the main vibration is a fundamental mode vibration or a harmonic mode vibration of a contour crystal vibrator.
In the second aspect of the crystal oscillator of the present invention, the vibration part of the contour crystal resonator is connected to the support part via the connection part, and the connection part has at least a first connection part and a second connection part, when said contour of the main vibration and secondary vibration of the crystal oscillator frequency stability factor respectively _{S n} and _{S f, S n} and _{S f} is ^{_{S n = r n / 2Q n}} 2 and _{S f =} r f / 2Q f The crystal oscillator according to the first aspect, which is given by ² and has a relationship of S _n <S _f .
According to a third aspect of the crystal oscillator of the present invention, the contour crystal resonator includes a vibrating portion, a connecting portion, and a supporting portion, and the width of the vibrating portion is smaller than the length and larger than the thickness. A width-longitudinal crystal resonator that vibrates in a longitudinal mode. The crystal oscillator includes the width-longitudinal crystal resonator, and the thickness direction of the width-longitudinal crystal resonator is the electric axis x-axis direction and the width direction is the mechanical axis y. In the axial direction, the length direction coincides with the two optical axis directions, and the width-longitudinal crystal unit is first rotated by an angle θ _x with the thickness direction axis as the rotation axis, and then the width direction axis is rotated. or to angularly theta _y rotation as an axis, or first angle theta is _y rotating the shaft in the width direction as a rotation axis the width longitudinal quartz crystal resonator, then, is the angle theta _x rotated in the thickness direction axis as a rotation axis the angle theta _x and the angle theta _y respectively _{θ x = -25 ° ~ + 25} °, θ y = The width longitudinal crystal resonator is in a range of 30 ° to + 30 °, and the resonance frequency of the main vibration is a lateral effect type crystal resonator that does not depend on the piezoelectric constant, and the crystal oscillator is at least a CMOS inverter as an amplifier, The crystal oscillator according to the first aspect or the second aspect, comprising a feedback resistor as a resistor, a capacitor on the gate side, a capacitor on the drain side as a capacitor, and the width-longitudinal crystal resonator.
According to a fourth aspect of the crystal oscillator of the present invention, the contour crystal resonator is a width vertical crystal resonator, a lame crystal resonator, or a length vertical crystal resonator, and the capacitance ratio r _n of the main vibration of the crystal resonator. Is a crystal oscillator according to any one of the first to third aspects, wherein the oscillation frequency is approximately in the range of 60 to 490, and the Fibr of Merit _Mf of the secondary vibration is smaller than 32.

  As described above, the present invention is a crystal unit including a contoured crystal resonator, and further, by forming a resonator having high electromechanical conversion efficiency and arranging electrodes, electrical characteristics and frequency temperature characteristics. This makes it possible to realize a crystal unit having an ultra-small and wide vertical crystal unit, and to establish a method for manufacturing the crystal unit. Furthermore, it is possible to realize an ultra-compact crystal oscillator configured with a high-quality contoured crystal resonator having excellent frequency stability. In addition, since an ultra-compact width vertical crystal resonator can be obtained at a high frequency, a VCXO having a width vertical crystal resonator, a varactor diode, and a variable voltage, and a VCTCXO crystal oscillator having a temperature compensation circuit can be used. It is small and can be realized with high quality.

  Embodiments of the present invention will be specifically described below with reference to the drawings.

FIG. 1 shows the relationship between the cut angle of a crystal plate 1 used to form a width-longitudinal crystal resonator, which is one of the contour crystal resonators of the present invention, and its coordinate system. The coordinate system includes an origin O, an electric axis x, a mechanical axis y, and an optical axis z, and constitutes O-xyz. First, consider a quartz plate perpendicular to the x-axis, so-called X-plate quartz. At this time, the width W ₀ , the length L ₀ , and the thickness T ₀ as the dimensions of the X plate crystal coincide with the y-axis, z-axis, and x-axis directions, respectively. Next, this X-plate crystal is rotated around the x-axis by an angle θ _x = −25 ° to + 25 °, and further rotated around a new y-axis y′-axis by an angle θ _y = −30 ° to + 30 °. Is done. At this time, since the new x axis is rotated to the x 'axis and the z axis is rotated about the two axes, it becomes the new axis z ". The width vertical crystal resonator of the present invention is the above-described rotating quartz plate. In this embodiment, the X-plate crystal is first rotated around the x axis by an angle θ _x = −25 ° to + 25 °, and then around the y ′ axis by an angle θ _y = −30. It is rotated by ~ 30 °, but first, the angle θ _y = −30 ° ~ + 30 ° around the mechanical axis _y axis, and then the angle around the new axis x ′ axis of the electric axis x axis θ _{x =} -25 ° may rotate ~ + 25 °. Further, in the present embodiment has been described cut angle of the quartz plate width longitudinal quartz crystal resonator is formed, the cut angle of the transducer of the present invention The present invention is not limited to this, and the formed width-longitudinal crystal resonator may be a resonator having the above-mentioned angle, and the present invention includes those resonators. The in it. For example, without the in-plane rotation of the quartz plate, and performs in-plane rotation with a mask or the like used for the oscillator formed.

More specifically, the thickness direction of the width-longitudinal crystal resonator is matched with the electric axis x-axis direction, the width direction is matched with the mechanical axis y-axis direction, and the length direction is matched with the z-axis direction. First, the angle θ _x is rotated using the axis in the thickness direction (x axis) as the rotation axis, and then the angle θ _{y is} rotated using the axis in the width direction (new axis y ′ axis after rotation of the mechanical axis y axis) as the rotation axis. Or the width longitudinal crystal resonator is first rotated by an angle θ _y with the axis in the width direction (y axis) as the rotation axis, and then the axis in the thickness direction (the new axis after rotation of the electric axis x axis) x ′ axis) as an axis of rotation, the angle θ _{x is} rotated, and the angle θ _x and the angle θ _y have the longitudinal width so that θ _x = −25 ° to + 25 ° and θ _y = −30 ° to + 30 °, respectively. A quartz crystal is formed.

Crystal unit of Example 1

  FIGS. 2A and 2B are a top view and a side view, respectively, of the width-longitudinal crystal resonator housed in the crystal unit according to the first embodiment of the present invention. The width-longitudinal crystal resonator 2 is configured to include support portions 7 and 10 including a vibration portion 3, connection portions 6 and 9, and mount portions 8 and 11, respectively. Furthermore, the support part 7 and the support part 10 are provided with a hole 7a and a hole 10a, respectively. More specifically, the first connecting portion 6 and the second connecting portion 9 are provided at the end portions of the vibrating portion 3 that are located opposite to each other in the length direction. That is, one first support portion 7 is connected to the vibration portion 3 via the first connection portion 6, and the other second support portion 10 is connected to the vibration portion 3 via the second connection portion 9. Yes. Moreover, the electrode 4 and the electrode 5 are arrange | positioned facing the upper surface and lower surface of the vibration part 3, and these electrodes are comprised so that it may become a different polarity. That is, a pair of electrodes are arranged. Further, the electrode 4 is disposed so as to extend to the second mount portion 11 through one second connection portion 9. The electrode 5 extends to the first mount portion 8 via the other first connection portion 6. In the present embodiment, the electrode 4 and the electrode 5 arranged in the vibration part 3 extend in different directions and are arranged up to the mount part, but even if arranged in the same direction, the same as the vibrator Characteristics are obtained. The vibrator of this embodiment is fixed to the fixing part such as a case or a lid of the unit in which the mount unit stores the vibrator by an adhesive or solder.

Furthermore, the dimensions of the vibrating portion 3, that is, the width W ₀ , the length L ₀ , and the thickness T ₀ coincide with the y′-axis, z ″ -axis, and x′-axis directions. An electrode 4 and an electrode 5 are disposed on the upper and lower surfaces of the vibration part 3 that is a vertical surface, and the electrode 5 that opposes the electrode 4 is configured to have a different polarity. The length L ₀ is greater than the width W ₀ and the thickness T ₀ is less than the width W _0. That is, the coupling between the width longitudinal mode vibration and the length longitudinal mode vibration is negligibly small, and, by increasing the electrode area of the vibration part, in order to obtain a small width longitudinal crystal oscillator equivalent series resistance R _1, the ratio W _{0 /} L ₀ width W ₀ and the length L ₀ is from 0.8 small, preferably in the range of from 0.02 to 0.45, and, by increasing the electric field _{E x,} small equivalent series resistance _{R 1} To obtain had Habatate crystal oscillator, the ratio T _{0 /} W ₀ of the thickness T ₀ and width W ₀ is required to be smaller than 0.85. The actual determination of these dimensions are width vertical The thickness T ₀ is usually designed to be 0.23 mm or less, and preferably in the range of 0.01 mm to 0.18 mm. , The width W ₀ is larger than 0.01 mm, preferably in the range of 0.01 mm to 0.96 mm, and n pairs (n = 1, 3, 5,...) Divided in the width direction. In an (odd) electrode configuration, the width W ₀ is greater than 0.01 nm, preferably in the range of (0.01-0.96) nmm, and in order to reduce the coupling with the sliding mode, the angle the theta _x is in the range of -160 ° ~-20 °.

Specifically, the resonance frequency of the width-longitudinal crystal resonator is inversely proportional to the width dimension W ₀ and hardly depends on other dimensions (length, thickness, connection portion and support portion). Therefore, by reducing the width W ₀ , the size can be reduced and the frequency can be increased. In addition, a width-longitudinal crystal resonator that vibrates in a single vibration mode without unnecessary vibration can be obtained from the above-described dimensional relationship. At the same time, by arranging the electrodes in the vibration part so that an electric field is applied in the thickness direction, the vibration orders of the fundamental wave mode and the overton mode of the width-longitudinal crystal resonator do not depend on the piezoelectric constant. That is, the electrodes are arranged such that the vibration order does not depend on the piezoelectric constant in the vibrating portion of the vibrator. Therefore, since the oscillation or resonance frequency of the width-longitudinal crystal resonator of the present invention does not depend on the piezoelectric constant, it has a remarkable effect that the design of the resonator becomes very easy.

Next, the value of the piezoelectric constant e ₁₂ (= e ′ ₁₂ ) necessary for driving the width-longitudinal crystal resonator of this embodiment will be described. As the value of the piezoelectric constant e ₁₂ is large, the electromechanical conversion efficiency is high. Now, when the x axis and the y ′ axis are rotated, e ₁₂ (= e ′ ₁₂ ) = a ₁₁ a ₂₂ (−e ₁₁ a ₂₂ + 2e ₁₄ a ₂₃ ) is given. However, e ₁₁ (= 0.171 C / m ² ) and e ₁₄ (= −0.0406 C / m ² ) are piezoelectric constants of quartz, and a ₁₁ , a ₂₂ , and a ₂₃ are functions of angles θ _x and θ _y . Given in. The absolute value of piezoelectric constant _{e 12} of the present invention is greater than 0.095C / ^{m 2,} is usually in the range of 0.095~0.19C / ^{m 2.} In order to obtain a zero temperature coefficient near room temperature, it is preferably in the range of 0.095 to 0.166 C / m ² . That is, since the width longitudinal quartz crystal resonator of this embodiment has a high electromechanical conversion efficiency, low equivalent series resistance R _n of the main vibration, high Q value, the width longitudinal quartz crystal micro obtained. In the case of long vertical quartz oscillator, the absolute value of piezoelectric constant _{e 12} is in the range of 0.095~0.19C / ^{m 2.} In the description of the width-longitudinal crystal resonator, the length-longitudinal crystal resonator can be obtained by replacing “width” with “length”.

Now, when an alternating voltage is applied between the electrodes 4 and 5 in FIG. 2, the electric field E _x is acting alternately in the thickness direction as shown by the solid line and dotted arrows in the side view of FIG. 2 (b). As a result, the vibration part 3 vibrates to expand and contract in the width direction. That is, it is possible to obtain a so-called lateral effect type width longitudinal crystal resonator that vibrates in a direction perpendicular to the electric field direction. The resonance frequency of the width-longitudinal mode vibration is a vibrator that does not depend on the piezoelectric constant. Further, the width-longitudinal crystal resonator of the present invention is a resonator different from the KT-cut width crystal resonator that vibrates in parallel with the electric field direction. At the same time, the KT cut quartz crystal resonator is a so-called longitudinal effect type resonator whose vibration order depends on the piezoelectric constant. That is, the resonator whose resonance frequency depends on the piezoelectric constant.

Crystal unit of Example 2

  FIG. 3A is a top view and FIG. 3B is a bottom view of the width-longitudinal crystal resonator 12 housed in the crystal unit according to the second embodiment of the present invention. The width-longitudinal crystal resonator 12 includes a vibrating portion 13, connecting portions 14, 21, a mounting portion 16 and a supporting portion 15 including a supporting frame 17, 18, 19 connected thereto, a mounting portion 23, and a mounting portion 20 connected thereto. The support part 22 including is comprised. Further, both end portions of the support frame 17 are connected to one end portions of the support frames 18 and 19, and the other end portions of the support frames 18 and 19 are connected to the mount portion 20. The support part 15 is provided with a hole 15a, and the support part 22 is provided with a hole 22a. More specifically, the first connection portion 14 and the second connection portion 21 are provided at positions opposite to each other at the end portion of the vibration portion 13. The vibrating portion 13 is connected to the first support frame 17 via the first connection portion 14 and the first mount portion 16 of the first support portion 15. Further, both end portions of the first support frame 17 are connected to end portions of the second support frame 18 and the third support frame 19, respectively. Similarly, the vibration part 13 is connected to the third mount part 20 via the second connection part 21 and the second mount part 23 of the second support part 22. The end portions of the second support frame 18 and the third support frame 19 are connected to the third mount portion 20, respectively.

In addition, electrodes 24 and 26 that are opposed to each other with different polarities are disposed on the upper surface and the lower surface of the vibration unit 13. Further, the electrode 24 is disposed so as to extend to the mount portion 20 via one connection portion 21, and an electrode 25 serving as one electrode terminal is formed on the mount portion 20. The electrode 26 is arranged to extend to the mount portion 20 via the other connection portion 14 and the support frames 17 and 19, and an electrode 27 serving as the other electrode terminal is formed on the mount portion 20. That is, a two-electrode terminal is formed. In the present embodiment, only the electrodes of the vibration part are arranged to oppose each other. However, electrodes in other parts may be arranged to oppose each other, and the influence on the equivalent series resistance R _n is so small as to be negligible. Further, the vibration part 13 has dimensions of a width W ₀ , a length L ₀ and a thickness T ₀ (not shown), and the width W ₀ , the length L ₀ and the thickness T ₀ are respectively y′-axis and z ″. That is, the electrode 24 and the electrode 26 are disposed on the upper and lower surfaces of the vibrating portion 13 that are perpendicular to the x′-axis. Further, the length L ₀ of the vibrating portion 13 is designed to be larger than the width W ₀ and the thickness T ₀ is smaller than the width W _0. Regarding the specific relationship, As described in the first embodiment.

By forming the width-longitudinal crystal resonator as described above, the strength of the resonator can be further increased. As a result, since one end portion of the vibrator can be fixed to the case, the fixing portion of the lid, or the lead wire by an adhesive or solder, the workability in mass production is excellent, and the number of man-hours can be reduced. That is, an inexpensive width vertical crystal resonator can be obtained. At the same time, it is possible to realize a width vertical crystal resonator that is strong against impact. Furthermore, since the hole is provided in the support portion, the width-longitudinal mode can be easily caused piezoelectrically. Therefore, a small equivalent series resistance R _n of the main vibration, high Q micro width longitudinal quartz crystal resonator is obtained. Further, the contoured crystal resonator of the present invention is accommodated in a surface-mount type or cylindrical container (unit). In this embodiment, the electrodes having different polarities are arranged such that the electrode 25 is arranged on the upper surface of the mount portion 20 and the electrode 27 is arranged on the lower surface, but electrodes having different polarities are arranged on the same plane of the mount portion 20. Similarly, an inexpensive vibrator can be obtained. In this method, one electrode is connected to an electrode having the same polarity on the same plane via the side surface of the support frame or the side surface of the mount portion. Further, in the present embodiment, two support frames are provided in parallel with the vibrating portion, but even one has sufficient mechanical strength, so one may be sufficient and sufficient characteristics can be obtained.

Crystal unit of Example 3

  FIG. 4 is a top view (a) and a bottom view (b) of the width-longitudinal crystal resonator 28 housed in the crystal unit according to the third embodiment of the present invention. The width-longitudinal crystal resonator 28 includes a vibrating portion 29, connection portions 30 and 35, and a support portion 41 including support frames 31, 32, and 33, a support frame 36, and a support portion 42 including a mount portion 34. Yes. Further, the vibration part 29 is connected to the support frame 31 through one connection part 30, and both end parts of the support frame are connected to the support frames 32 and 33. Furthermore, the vibration part 29 is connected to the support frame 36 via the other connection part 35, and both ends thereof are connected to the support frames 32 and 33. The mount portion 34 is provided with a hole 43. By providing the hole 43, it is possible to easily cause the width-longitudinal vibration without being suppressed. Furthermore, the electrode 37 and the electrode 39 which oppose with a different polarity are arrange | positioned at the upper surface and lower surface of the vibration part 29. FIG. The electrode 37 is disposed so as to extend to the mount portion 34 via one connection portion 35, and an electrode 38 serving as one electrode terminal is formed on the mount portion 34. Further, the electrode 39 is arranged to extend to the mount portion 34 via the other connection portion 30 and the support frames 31 and 33, and an electrode 40 serving as the other electrode terminal is formed on the mount portion 34. Electrode terminals are formed. As an electrode arrangement method other than the present embodiment, the method described in the second embodiment is also included in this embodiment. At the same time, the support frame is also included.

Furthermore, the vibration part 29 has dimensions of width W ₀ , length L ₀ and thickness T ₀ (not shown), and the relationship between these dimensions and the x ′ axis, y ′ axis and z ″ axis is implemented. This is as described in Example 1. Further, the length L ₀ of the vibrating portion 29 is designed to be larger than the width W ₀ and the thickness T ₀ is smaller than the width W _{0. The} specific relationship is as in Example 1. In addition, the vibration part, the connection part and the support part of the width-longitudinal crystal resonator of the above-described embodiment are integrally formed, and thus the formation of the width-longitudinal crystal resonator has already been implemented. A low-priced vertical crystal unit with excellent mass productivity can be obtained as described in Example 2. At the same time, it is possible to realize a width-type vertical crystal unit that is resistant to impacts. , And can be easily induced piezoelectrically without suppressing the vibration in the width-longitudinal mode. Small series resistance R _n, high Q value, the width longitudinal quartz crystal micro obtained.

FIG. 5 is a diagram showing an example of frequency-temperature characteristics of the width-longitudinal crystal resonators of the first to third embodiments. By selecting the angle θ _x and the angle θ _y described above, the primary temperature coefficient α becomes zero at an arbitrary temperature, and can be expressed by a quadratic curve. For example, as shown by the curve 44, the peak temperature T _p can be set to about room temperature. The curve 45 is a case of setting the peak temperature T _p in the vicinity of 0 ° C.. Furthermore, the vertex temperature T _p can be set arbitrarily, and the curve 46 is obtained when the vertex temperature T _p is set to the negative side. In the width longitudinal crystal resonator having the angle θ _x and the angle θ _y of the above embodiment, the vertex temperature T _p can be set in a very wide temperature range from about −200 ° C. to about + 60 ° C. The apex temperature T _p is determined by the equipment used. Thus, the width longitudinal crystal resonator of the present invention can arbitrarily set the vertex temperature in a very wide temperature range, and the frequency temperature characteristic can be approximated by a quadratic curve. It is understood that it is a vibrator.

Crystal unit of Example 4

  FIG. 6A is a top view and FIG. 6B is a bottom view of a widthwise vertical crystal unit housed in a crystal unit according to a fourth embodiment of the present invention. The width-longitudinal crystal resonator 50 includes support portions 53 and 56 including a vibration portion 51, connection portions 52 and 55, and mount portions 54 and 57, respectively. Furthermore, the support part 53 and the support part 56 are provided with a hole 53a and a hole 56a, respectively. A plurality of electrodes are arranged on the upper surface and the lower surface of the vibration part 51. Moreover, the electrode adjacent to the width direction of an upper surface and a lower surface is comprised so that it may become a different pole. And the counter electrode arrange | positioned at an upper surface and a lower surface is comprised so that it may become a different pole. In this embodiment, electrodes 58, 59 and 60 and electrodes 61, 62 and 63 are arranged. In the electrode arrangement of the present embodiment, a third longitudinal overtone (third harmonic mode vibration) width longitudinal crystal resonator can be obtained. More specifically, the electrode 58 and the electrode 59 adjacent thereto are configured to have different polarities, and the electrode 58 and the electrode 63 opposed thereto are configured to have different polarities. The electrode 58 and the electrode 63 having a different polarity from the electrode 58 constitute a pair of electrodes. In exactly the same manner, the electrode 59 and the electrodes 58 and 60 adjacent thereto are configured to have different polarities, and the electrode 59 and the electrode 62 opposed thereto are configured to have different polarities. The electrode 59 and the electrode 62 having a different polarity form a pair of electrodes. Further, the electrode 60 and the electrode 59 adjacent to the electrode 60 are configured to have different polarities, and the electrode 60 and the electrode 61 opposed thereto are configured to have different polarities. The electrode 60 and the electrode 61 having a different polarity from the electrode 60 constitute a pair of electrodes. The upper electrode 58 and the electrode 60 are connected via a connection electrode 58a. Furthermore, the electrode 61 and the electrode 63 on the lower surface are connected via a connection electrode 61a.

  Furthermore, the electrodes 58 and 60 having the same polarity on the upper surface are disposed so as to extend to the mount portion 54 via one connection portion 52. Further, the electrode 59 is arranged to extend to the mount portion 57 via the other connection portion 55. Furthermore, the electrode 62 on the lower surface is disposed so as to extend to the mount portion 54 via one connection portion 52. Further, the electrodes 61 and 63 having the same polarity on the lower surface are arranged to extend to the mount portion 57 via the other connection portion 55. As is apparent from FIG. 6, electrodes having the same polarity are disposed on the upper and lower surfaces of one connection portion and the support portion so as to extend from the vibration portion, and the same polarity is provided on the upper and lower surfaces of the other connection portion and the support portion. The electrode which becomes becomes extended from the vibration part. Therefore, one electrode 58, 60, 62 is disposed so as to have the same polarity, and the other electrode 59, 61, 63 is disposed so as to have the same polarity, which forms a two-electrode terminal structure having different polarities. . In this embodiment, three pairs of electrodes are configured. The electrode configuration of the present invention is not limited to the n pairs (n = 1, 3) in the above-described embodiment, and when using the symmetric mode, n pairs (n = 5, 7, 9,...) It also includes an odd pair of electrode configurations.

Next, the relationship between the width W ₀ , length L ₀ , thickness T _{0 of} the vibrating part and the electrode will be described. In this embodiment, three pairs of electrodes are configured. Therefore, excellent frequency temperature characteristic described in FIG. 5, and the electric field E _x is increased, in order to obtain a smaller width longitudinal crystal oscillator equivalent series resistance R _n of the main vibration is the thickness T ₀ and width W ₀ The relationship of 3T ₀ / W ₀ needs to be smaller than 0.85. In addition, in order to obtain a width-longitudinal crystal resonator having a small and negligible series resistance R ₃ , the coupling between the width-longitudinal vibration mode and the length-longitudinal vibration mode is negligibly small, the electrode area is increased, and the width W ₀ is obtained. And the length L ₀ requires that W ₀ / 3L ₀ be smaller than 0.8. In this embodiment, the case of three pairs of electrodes has been described. However, in the case of n pairs (n = 1, 3, 5,...) And odd pairs, n-order overtone (n-order harmonic mode vibration) is used. ) Width longitudinal crystal resonator. In this case, in order to obtain a crystal resonator having the above-described excellent characteristics, the relationship between the thickness T ₀ and the width W ₀ is that nT ₀ / W ₀ is smaller than 0.85, and the width W ₀ and the length L _As for the relationship with _0, W ₀ / nL ₀ needs to be smaller than 0.8.

More specifically, in the case of an odd pair of electrodes, vibration is generated in an odd-order width longitudinal mode, which becomes the main vibration. For example, in the pair of electrode configurations, the fundamental mode vibration (first harmonic mode vibration) is the main vibration. In the three-pair electrode configuration, the third harmonic (third overtone) mode vibration is the main vibration. In the present invention, a vibration other than the main vibration that vibrates in the width-longitudinal mode is called a secondary vibration. The equivalent series resistance of the main vibration is called R _n , and the equivalent series resistance of the sub vibration is called R _f . That is, when n = 1, R ₁ is fundamental mode vibration, when n = 3, R ₃ is third harmonic mode vibration, when n = 5, R ₅ is fifth harmonic mode vibration, n = When n, R _n is an equivalent series resistance of _n- th harmonic mode vibration. Further, in order to set the apex temperature of the quadratic curve of the frequency temperature characteristic to be near room temperature, the angle θ _x of the width-longitudinal crystal resonator of this embodiment, the size ratio (W ₀ / L ₀ ), and the number of electrode pairs n ( = 1, 3, 5,...: Odd) is [20 {W ₀ / (nL ₀ )} − 25] ° <θ _x <[20 {W ₀ / (nL ₀ )} − 5. ] Given in degrees.

Thus, the width longitudinal quartz crystal resonator of the present invention, in particular, by devising the way of arrangement of the electrodes of the vibrating section, a small equivalent series resistance R _n, tiny higher over with excellent frequency temperature characteristic A tone width vertical crystal unit can be realized. Further, since the frequency of the width vertical crystal resonator is proportional to the overtone order, it is possible to increase the frequency. The electrode configuration described in detail in the present embodiment can also be applied to the vibrator shapes shown in FIGS. Further, the vibrator shape and the configuration of the shape of the present embodiment are the same as those of the vibrator of FIG.

Crystal unit of Example 5

FIG. 7 is a top view of a width-longitudinal crystal resonator housed in the crystal unit according to the fifth embodiment of the present invention. The width-longitudinal crystal resonator 64 includes a vibrating portion 65, connecting portions 66, 67, 68, 71, 72, 73 and support portions 69, 74 including mount portions 70, 75, respectively. The support 69 has a hole 69a, and the support 74 has a hole 74a. In the present embodiment, a plurality of first, third, and fifth connection portions 66, 67, and 68 and second, fourth, and sixth connection portions 71, 72, and 73 are provided on both sides of the vibration portion 65 in the length direction. And are provided. And the 1st connection part and the 2nd connection part, the 3rd connection part and the 4th connection part, the 5th connection part and the 6th connection part are provided in opposition to the end of the length direction of a vibration part, respectively. . Furthermore, one connection part 66, 67, 68 is connected to the support part 69, and the other connection part 71, 72, 73 is connected to the support part 74. The vibration part, the connection part and the support part of the vibrator are integrally formed. In addition, the vibrating portion of the width-longitudinal crystal resonator has a width W ₀ , a length L ₀ , and a thickness T ₀ (not shown), and electrodes arranged on the vibrator are not shown. The arrangement and configuration of the electrodes described in Examples 1 to 4 are also applied to this vibrator. In this embodiment, three connection portions are provided on both sides of the vibration portion, but more connection portions may be provided. In practice, the same number as the number of overtone orders can be provided. In practice, it is preferable to provide fewer connections. As described above, the width-longitudinal crystal resonator of the present invention is provided with a plurality of connection portions at both ends in the longitudinal direction of the vibration portion, so that even a high-frequency thin resonator is strong in impact resistance. , small equivalent series resistance R _n, high width longitudinal quartz crystal resonator quality factor Q value is obtained.

Crystal unit of Example 6

  FIG. 8 is a cross-sectional view of a crystal unit according to Embodiment 6 of the present invention. The crystal unit 110 includes a surface mount type case 112, a lid 114, and a contour crystal resonator 113. Fixed portions are provided on both sides of the case 112. For example, in the present embodiment, the width-longitudinal crystal resonator described in the crystal resonators of the first embodiment, the fourth embodiment, and the fifth embodiment is housed. The mounting portion is fixed to the fixing portion by an adhesive or the like. Further, although not shown, at least two divided electrodes are provided on the lower surface of the case 112 and are connected to the electrodes of the vibrator 113. That is, a two-electrode terminal structure is formed.

Crystal unit of Example 7

  FIG. 9 is a cross-sectional view of the crystal unit according to the seventh embodiment of the present invention. The crystal unit 120 includes a surface mount type case 122, a lid 124, and a contour crystal resonator 123. A fixing portion is provided on one side of the case 122. In the present embodiment, for example, the width-long vertical crystal resonator described in the crystal resonators of the second and third embodiments is accommodated, and the mount portion of the resonator is It is fixed at the fixing part with an adhesive or the like. Furthermore, although not shown, at least two divided electrodes are provided on the lower surface of the case 122 and are connected to the respective electrodes of the vibrator 123. That is, a two-electrode terminal structure is formed. The vibrator is sealed in a vacuum. Further, in the crystal units of the sixth and seventh embodiments, the width-longitudinal crystal resonator is housed, but instead of the width-vertical crystal resonator, another contour crystal resonator, for example, a length-longitudinal crystal resonator, Alternatively, a lame crystal resonator may be accommodated.

  Furthermore, the width-longitudinal crystal resonator of each of the above embodiments has a complicated shape so as to include a vibrating portion, a connecting portion, and a supporting portion. Further, in the case of the width longitudinal crystal resonator having the cut angle according to the present invention, since the binding energy between the molecules of the crystal is very large, the etching rate is extremely slow in the chemical etching method. It is difficult to process a vibrator having a shape well. Therefore, the processing of the width-longitudinal crystal resonator of the present invention is performed using a physical or mechanical method, and the resonator is integrally formed. That is, particles having mass are made to collide with the quartz plate by a physical or mechanical method, whereby atoms and molecules of the quartz plate are scattered to process the shape of the vibrator. Here, this method is called a particle method. This method is different from the chemical etching method, and at the same time has a very high processing speed. Since the processing time of the outer shape is greatly shortened, an inexpensive vibrator can be provided. However, this method is used because, for example, a lame crystal resonator, which is one of contour quartz resonators, can be easily formed by a chemical etching method. That is, the contour quartz crystal resonator of the present invention is formed by a particle method and / or chemical etching.

Next, the manufacturing method of the crystal unit of the present invention will be described. First, as described with reference to FIG. 1 of the first embodiment, the thickness direction of the width-long quartz crystal unit coincides with the electric axis x-axis direction, the width direction coincides with the mechanical axis y-axis direction, and the length direction coincides with the z-axis direction. is allowed, the angle theta is _x rotated width longitudinal quartz crystal resonator initially in the thickness direction axis as a rotation axis, then, either by the angle theta _y rotating the shaft in the width direction as a rotation axis, or the width longitudinal quartz crystal resonator The child is first rotated by the angle θ _y with the width direction axis as the rotation axis, and then rotated by the angle θ _x with the thickness direction axis as the rotation axis, so that the angle θ _x and the angle θ _y are θ _x = −, respectively. While having 25 ° to + 25 ° and θ _y = −30 ° to + 30 °, the width-longitudinal crystal resonator includes a vibrating portion, a connecting portion, and a supporting portion, and the connecting portion is at least a first connection. And the second connecting portion, the width dimension of the vibrating part is smaller than the length dimension and the thickness dimension. A larger vertical crystal unit is formed by a particle method from a crystal plate.

  Next, at least a pair of electrodes having different polarities are arranged on the upper and lower surfaces of the vibration part so as to face each other. (See FIGS. 2, 3, 4 and 6). More specifically, n pairs of electrodes (n: odd number) are arranged in the symmetric mode of the width-longitudinal mode, and m pairs of electrodes (m: even number) are arranged in the asymmetric mode. In the processing by this particle method, a large number of vibrators are formed in the quartz wafer at a time. Therefore, the first frequency adjustment is performed in the state of the wafer, the frequency is adjusted to be within a range of −9000 ppm to +5000 ppm with respect to the reference frequency, and / or a good resonator or a defect is detected in the state of the wafer. An inspection of the vibrator is performed. If a defective transducer is present, the defective transducer is marked, removed from the wafer, or stored on a computer. Further, the width-longitudinal crystal resonator is fixed to the fixing portion with an adhesive or solder on the case or the lid. Thereafter, the second frequency adjustment is performed by an ion etching method (sputtering method), a vapor deposition method, or a laser method, which is the same method as the first frequency adjustment. In this step, the oscillation frequency is adjusted so that the frequency deviation of the output oscillation is within the range of −100 ppm to +100 ppm with respect to the reference frequency.

  Finally, the case made of glass or ceramic and the lid made of glass or metal are bonded together in a vacuum or nitrogen atmosphere via a bonding member (metal or glass). In this embodiment, the frequency adjustment is performed in the state of the wafer, but this frequency adjustment may be omitted, and the frequency adjustment is performed after fixing the width-long vertical crystal unit to the case or the lid with an adhesive or solder. You may do it. The oscillation frequency is adjusted so that the frequency deviation at that time is usually within +/− 100 ppm with respect to the reference frequency of the vibrator. Moreover, after providing a hole in the case or the lid and joining the case and the lid via the joining member, the frequency is adjusted (within a range of −950 ppm to +950 ppm with respect to the reference frequency), After that, the hole is sealed with a laser or infrared ray using metal or glass in vacuum, and the frequency is set so that the oscillation frequency is within a range of −50 ppm to +50 ppm with respect to the reference frequency after sealing. You may adjust with a laser.

Example 1 Crystal Oscillator

  FIG. 10 is an example of a crystal oscillation circuit diagram constituting the crystal oscillator according to the first embodiment of the present invention. In this embodiment, the crystal oscillation circuit 181 includes an amplifier (CMOS inverter) 182, a feedback resistor 184, a drain resistor 187, capacitors 185 and 186, and a contour crystal resonator 183. That is, the crystal oscillation circuit 181 includes an amplifier circuit 188 including an amplifier 182 and a feedback resistor 184, a drain resistor 187, capacitors 185 and 186, and a feedback circuit 189 including a contour crystal resonator 183. More specifically, the crystal oscillator of this embodiment includes an amplifier circuit 188 and a feedback circuit 189, the amplifier circuit includes at least an amplifier, and the feedback circuit includes at least a contour crystal resonator and a capacitor. The contour crystal resonator used in the crystal oscillator according to the present embodiment has already been described in detail in the description of the crystal units according to the first to seventh embodiments.

FIG. 11 shows the feedback circuit diagram of FIG. Now, the angular frequency ω _i of the contour crystal resonator, the resistance of the drain resistor 187 is R _d , the capacitances of the capacitors 185 and 186 are C _g and C _d , the crystal impedance of the crystal is R _ei , and the input voltage on the drain side of the feedback circuit Is V ₁ and the output voltage on the gate side is V ₂ , the feedback rate β _i is defined by β _i = | V ₂ | _i / | V ₁ | _i . However, i represents the vibration order of the contour mode vibration. For example, when i = 1, fundamental mode vibration (first harmonic mode vibration), when i = 2, second harmonic mode vibration, and when i = 3, third harmonic mode vibration. That is, when i = n, it is n-order harmonic mode vibration. Here, it is simply referred to as n-order mode vibration. In addition, contour mode vibration (for example, width longitudinal mode vibration, lame mode vibration, or length longitudinal mode vibration) that vibrates in an n-th mode with an n-pair electrode configuration is called a main vibration, and in the same mode as the main vibration. A contour mode vibration other than the main vibration is called a secondary vibration. The main vibration is a single mode vibrator that is not coupled with other vibration modes. Further, the load capacity C _L is given by C _L = C _g C _d / (C _g + C _d ). When C _g = C _d = C _gd and R _d >> R _ei , the feedback rate β _i is β _i = 1 / (1 + kC _L ² ). However, k is expressed by a function of ω _i , R _d , and R _ei . R _ei is approximately equal to the equivalent series resistance R _i . Thus, from the relationship between the feedback rate β _i and the load capacitance C _L , when the load capacitance C _L decreases, the feedback rate of the resonance frequency of the n-th mode vibration increases.

An object of the crystal oscillator of the present invention is to provide a crystal oscillator that has low current consumption and high frequency stability (high time accuracy). Therefore, in order to reduce current consumption, in the present embodiment, the load capacitance C _L is used below 30 pF. In order to further reduce the current consumption, since the current consumption is proportional to the load capacity, C _L = 20 pF or less is preferable. In addition, in order to suppress the frequency of the secondary vibration and to obtain the oscillation frequency of the main vibration from the output signal of the oscillator in which the main vibration vibrates in the n-th mode with the n-pair electrode configuration, α _n / α _f > β _f / β _n And α _n β _n > 1 are configured in the crystal oscillation circuit of this embodiment. Preferably, it is configured to satisfy α _n / α _f > 1.12. Here, α _n and α _f are the amplification factors of the main vibration and sub vibration amplifying circuits, and β _n and β _f are the feedback factors of the main vibration and sub vibration feedback circuits. In other words, the ratio between the amplification factor α _n of the main vibration of the amplifier circuit and the amplification factor α _f of the secondary vibration is larger than the ratio of the feedback factor β _f of the secondary vibration of the feedback circuit and the feedback factor β _n of the main vibration. In addition, the product of the amplification factor α _n of the main vibration and the feedback factor β _n of the main vibration is configured to be greater than 1. That is, it is possible to realize a crystal oscillator that consumes less current and whose output signal is the oscillation frequency of the main vibration. The output signal is output via a buffer circuit.

Further, the amplifying part of the amplifying circuit constituting the crystal oscillation circuit of the present embodiment can exhibit the characteristic by a negative resistance -RL _i . When i = 1, it is a negative resistance of fundamental mode vibration (first-order mode vibration), and when i = n, it is a negative resistance of n-order mode vibration. That is, when n = 2, 3, 4, 5,..., The value of the negative resistance of the second, third, fourth, fifth,. In the crystal oscillator according to the present embodiment, the ratio of the absolute value | -RL _n | of the main vibration negative resistance of the amplifier circuit to the equivalent series resistance R _n of the main vibration is the absolute value of the negative resistance of the secondary vibration of the amplifier circuit. The oscillation circuit is configured to be larger than the ratio of | −RL _f | and the equivalent series resistance R _f of the secondary vibration. That is, the circuit is configured to satisfy | −RL _n | / R _n > | −RL _f | / R _f . Preferably, it is configured to satisfy | −RL _n | / R _n > 1.12 and | −RL _f | / R _f <1. By configuring the crystal oscillation circuit in this manner, the oscillation activation of the secondary vibration is suppressed, and as a result, the oscillation activation of the main vibration can be obtained, so that the oscillation frequency of the main vibration is obtained as the output signal. At the same time, a crystal oscillator with low current consumption can be realized.

In addition, the fibre-of-merit M _i representing the inductivity, electromechanical conversion efficiency, and quality factor of the contour crystal resonator is defined by the ratio (Q _i / r _i ) between the quality factor Q _i value and the capacitance ratio r _i ( fundamental mode vibration when i = 1, 2-order mode vibration when i = 2, 3 order mode vibration when i = 3), parallel with the mechanical series resonance frequency f _s that is independent of the parallel capacitance of the contour crystal oscillator the frequency difference Δf of the series resonance frequency f _r which depends on the capacitance is inversely proportional to the off Iga of merit M _i, the value M _i larger Δf becomes smaller. Therefore, as M _i is large, the resonance frequency of the contour crystal oscillator is not affected by the parallel capacitance, the frequency stability of the contour crystal oscillator is improved. That is, a contour crystal resonator with high time accuracy can be obtained.

Specifically, according to the configuration of the contour shape of the contour crystal resonator, the electrode, and the size of the resonator, the finger of merit M of the contour crystal resonator in which the main vibration vibrates in the n-order mode by the n-pair electrode configuration. _n becomes larger than the fibber of merit _Mf of the secondary vibration. That is, M _n > M _f . In the contoured crystal resonator of the present invention, the electrodes of the vibrating part are usually configured and arranged so that _Mn is greater than 45 and _Mf is 32 or less. However, M _n is the fibre of merit of the main vibration. As a result, the frequency stability of the main vibration becomes better than the frequency stability of the secondary vibration, and the secondary vibration can be suppressed. Therefore, the crystal oscillator composed of the contoured crystal resonator of the above embodiment can obtain the oscillation frequency of the main vibration as an output signal and has high frequency stability (excellent time accuracy). For the contour crystal resonator of the present invention, a width vertical crystal resonator, a length vertical crystal resonator, or a lame crystal resonator is used. Also, the equivalent series resistance R _n of the main vibration of the contour crystal oscillator that oscillates at the same vibration mode is less than the secondary vibration of the equivalent series resistance R _f.

Example 2 Crystal Oscillator

  FIG. 12 is a block diagram showing a crystal oscillator according to a second embodiment of the present invention. The oscillator includes an amplifier (CMOS inverter) 150, a feedback resistor 151, a drain resistor 152, a gate-side capacitor 153, drain-side capacitors 154 and 158, a contour crystal resonator 155, a varactor diode 156, a resistor 159, and a variable voltage 157. Configured. As the contour crystal resonator 155, a width vertical crystal resonator, a length vertical crystal resonator, or a lame crystal resonator housed in the crystal units of the first to seventh embodiments is used. The crystal oscillator according to the present embodiment is a so-called voltage controlled crystal oscillator (VCXO) that can change the frequency by changing the capacitance of the varactor diode 156 by the variable voltage 157. In this embodiment, the crystal oscillator includes the contour crystal resonator 155, but the contour crystal resonator is housed in the crystal unit. Alternatively, all or part of the constituent elements may be accommodated in the crystal unit.

Example 3 Crystal Oscillator

  FIG. 13 is a block diagram showing a crystal oscillator according to a third embodiment of the present invention. The crystal oscillator according to this embodiment includes a crystal oscillation circuit 162 including a contour crystal resonator 160 and a temperature compensation circuit 161. Usually, the temperature compensation circuit includes a diode, a capacitor, a resistance element, and the like. FIG. 14 shows the frequency temperature characteristic 163 of the crystal oscillator of FIG. 12 and the frequency temperature characteristic 164 corrected by the temperature compensation circuit 161. As is apparent from FIG. 14, it can be seen that the frequency temperature characteristic can be improved. Further, by configuring the circuit including the varactor diode of FIG. 12 and the variable voltage and the temperature compensation circuit together, a voltage control, temperature compensation type crystal oscillator, so-called VCTCXO (Voltage Controlled Temperature Compensated Crystal Oscillator) can be configured.

Furthermore, a width vertical crystal resonator, a length vertical crystal resonator, or a lame crystal resonator is used as the contour crystal resonator of the present invention. In particular, the lame crystal resonator includes a vibration part, a connection part, and a support part. One connection part is connected to each of two corners of the vibration part opposite to each other. The vibration part and the support part are connected. Further, the ratio of the width and the length of the connecting portion is in the range of 0.05 to 1.5, preferably in the range of 0.05 to 1.0. In addition, one side of the vibration part and the connection part have an angle of approximately 135 °. Further, the shape of the support portion is the same as the shape of the support portion of the width-longitudinal crystal resonator described in the crystal unit of the first embodiment. More specifically, two support portions are provided on one diagonal line of the vibration portion, and the lame crystal resonator has a mount portion (fixing portion) of each support portion as an adhesive on the case or the lid, Or it mounts with solder. In addition, a pair of electrodes having different polarities are arranged on the upper and lower surfaces of the vibration part, the upper electrode extends to the mounting part of one supporting part, and the lower electrode is mounted on the other supporting part. It extends to the part. That is, a two-electrode terminal is configured. Further, the absolute values of the piezoelectric constants e ′ ₂₁ and e ′ ₂₃ for driving the lame crystal resonator are in the range of 0.41 to 1.2 C / m ² . At the same time, e ′ ₂₁ and e ′ ₂₃ are opposite in sign and have almost the same absolute value.

  As mentioned above, although demonstrated based on the example of illustration, this invention is not limited to the above-mentioned Example, For example, the shape of the support part of the outline quartz crystal resonator of this invention was described in Example 1-5 The shape of the support portion of the present invention is not limited to the shape, and includes any shape that is connected to the vibration portion via the connection portion. Furthermore, the crystal unit of the present invention only needs to accommodate at least one contour crystal resonator, for example, a width vertical crystal resonator, a length vertical crystal resonator, or a lame crystal resonator. A vertical crystal unit and a tuning-fork type bent crystal unit may be housed together in a crystal unit. In addition, the crystal oscillators of the first, second, and third embodiments may be configured to include at least a CMOS inverter as an amplifier, a feedback resistor as a resistor, a gate side capacitor, a drain side capacitor, and a contour crystal resonator as capacitors. good.

  Since the crystal unit and the crystal oscillator of the present invention are ultra-compact and have high frequency stability, they are particularly applicable to portable devices and consumer devices that are ultra-compact and require high frequency stability.

It is the relationship between the cut angle of a crystal plate used for forming a width-longitudinal crystal resonator that is one of the contour crystal resonators of the present invention and its coordinate system. It is the upper side figure (a) and side view (b) of the width-longitudinal crystal oscillator accommodated in the crystal unit of Example 1 of this invention. It is the upper side figure (a) and bottom view (b) of the width-longitudinal crystal oscillator accommodated in the crystal unit of Example 2 of this invention. It is the upper side figure (a) and bottom view (b) of the width-longitudinal crystal oscillator accommodated in the crystal unit of Example 3 of this invention. It is a diagram which shows an example of the frequency temperature characteristic of the width longitudinal crystal oscillator of the said Example 1- Example 3. FIG. It is the upper side figure (a) and bottom view (b) of the width-longitudinal crystal oscillator accommodated in the crystal unit of Example 4 of this invention. It is a top view of the width-longitudinal crystal resonator housed in the crystal unit according to the fifth embodiment of the present invention. It is sectional drawing of the crystal unit of Example 6 of this invention. It is sectional drawing of the crystal unit of Example 7 of this invention. 1 shows a crystal oscillator according to a first embodiment of the present invention. FIG. 11 is a feedback circuit diagram of FIG. 10. 4 shows a crystal oscillator according to a second embodiment of the present invention. 4 shows a crystal oscillator according to a third embodiment of the present invention. An example of the frequency temperature characteristic of the crystal oscillator of FIG. 12 and an example of the frequency temperature characteristic corrected by the temperature compensation circuit of FIG. 13 are shown. FIG. 6 is a top view of an NS-GT cut width / length longitudinally coupled crystal resonator. FIG. 3 is a side view of a NS-GT cut width / length longitudinally coupled crystal resonator.

Explanation of symbols

x, y, z Crystal electrical axis, mechanical axis, optical axis W ₀ width of vibration part L ₀ length of vibration part T ₀ thickness of vibration part θ _x , θ _y angle

Claims (9)

The crystal unit is configured to include a case, a lid, and the crystal unit includes a vibration unit, a connection unit, and a support unit, and the width dimension of the vibration unit is smaller than the length dimension and the thickness. A quartz unit comprising a contoured crystal unit larger than the dimensions,
The thickness direction of the contour crystal resonator is aligned with the electric axis x-axis direction, the width direction is aligned with the mechanical axis y-axis direction, and the length direction is aligned with the optical axis z-axis direction. Then, the angle θ _{x is} rotated with the axis of the rotation axis as the rotation axis, and then the angle θ _{y is} rotated with the axis in the width direction as the rotation axis, or the angle θ by _y rotation, then the thickness direction axis angle theta is _x as a rotation axis, the angle theta _x and the angle theta _y respectively _{θ x = -25 ° ~ + 25} °, θ y = -30 ° ~ + 30 Within the range of °
The vibration part of the contour crystal resonator configured to include a vibration part, a connection part, and a support part is connected to the support part via at least a first connection part and a second connection part, and the connection part is a vibration part. Furthermore, the width dimension of the vibration part is smaller than the length dimension and larger than the thickness dimension, and includes the vibration part, the connection part, and the support part. Contour quartz crystal unit is formed by particle method,
At least a pair of electrodes having different polarities are arranged opposite to each other on the upper and lower surfaces of the vibration part, and electrodes are provided on the vibration part so that the vibration order of fundamental wave mode vibration or overton mode vibration does not depend on the piezoelectric constant. A crystal unit comprising a lateral effect type contoured crystal resonator arranged. Contour crystal oscillators width longitudinal quartz crystal resonator which vibrates in the width longitudinal mode, the absolute value of piezoelectric constant _{e 12} of the width longitudinal crystal oscillator is in the range of 0.095~0.19C / ^{m 2,} wherein The relationship between the angle θ _x of the width-longitudinal crystal resonator, the dimension ratio (W ₀ / L ₀ ), and the number of electrode pairs n (odd number) is [20 {W ₀ / (nL ₀ )} − 25] ° <θ _x < The crystal unit according to claim 1, wherein the crystal unit is given by [20 {W ₀ / (nL ₀ )} − 5] °. The thickness T ₀ of the width vertical crystal unit which is one of the contour crystal units is in the range of 0.01 mm to 0.18 mm, and n pairs (odd number pairs) divided in the width direction of the vibration part. 3. The crystal unit according to claim 1, wherein when the electrode is provided, the width W _{0 of the} vibration part is in a range of (0.01 to 0.96) nmm. The crystal unit includes a crystal unit, a case, and a lid, and the crystal unit is a crystal unit configured to include a contour crystal unit including a vibration unit, a connection unit, and a support unit.
The vibration part of the contour crystal resonator configured to include a vibration part, a connection part, and a support part is connected to the support part through at least the first connection part and the second connection part, and is connected to the vibration part. The contour quartz crystal resonator comprising a portion and a support portion is integrally formed by a particle method and / or a chemical etching method,
A lateral effect in which at least a pair of electrodes having different polarities are arranged opposite to each other on the upper and lower surfaces of the vibrating part, and the electrodes are arranged on the vibrating part so that the vibration order of the contour crystal resonator does not depend on the piezoelectric constant. in the form of contour crystal oscillator, when the said contour of the main vibration and secondary vibration of the crystal oscillator frequency stability factor respectively _{S n} and _{S f, S n} and _{S f} is the ^{_{S n = r n / 2Q n}} 2 A crystal unit given by S _f = r _f / 2Q _f ² and having a relationship of S _n <S _f . In the manufacturing method of a crystal unit comprising a crystal resonator, a case and a lid,
The crystal unit constituting the crystal unit is a width-vertical crystal unit that vibrates in a width-longitudinal mode. The thickness direction of the width-vertical crystal unit is the electric axis x-axis direction, and the width direction is the mechanical axis y-axis direction. , the angle the length directions to match the optical axis z-axis direction, first to the angle theta _x rotated in the thickness direction axis as a rotation axis the width longitudinal quartz crystal resonator, then, as a rotation axis the axis of the width direction θ _{y is} rotated, or the width vertical crystal resonator is first rotated by an angle θ _y with the axis in the width direction as a rotation axis, and then rotated by an angle θ _x with the axis in the thickness direction as a rotation axis. θ _x and the angle θ _y are in the range of θ _x = −25 ° to + 25 ° and θ _y = −30 ° to + 30 °, respectively, and the width-longitudinal crystal resonator supports the vibrating portion, the connecting portion, and the support portion And the connecting part has at least a first connecting part and a second connecting part, The width dimension of the vibration portion is smaller than the length dimension, and the step of integrally forming the width vertical crystal resonator larger than the thickness dimension by the particle method,
A step of opposingly arranging at least a pair of electrodes having different polarities on the upper and lower surfaces of the vibration part;
Fixing the width-longitudinal crystal resonator to the case or the lid;
Adjusting the oscillation frequency;
Joining the case and the lid via a joining member;
A method for manufacturing a crystal unit, comprising: A crystal oscillator composed of a crystal resonator, amplifier, capacitor, and resistor.
The crystal unit includes a vibration unit, a connection unit, and a support unit, and at least a pair of electrodes having different polarities are arranged opposite to each other on the upper and lower surfaces of the vibration unit. Contour quartz crystal that vibrates in mode
The crystal unit comprising a vibrating part, a connecting part and a support part is integrally formed by a particle method and / or a chemical etching method,
The crystal oscillator is configured to include a contour crystal resonator in which the equivalent series resistance R _n of the main vibration of the contour crystal resonator is smaller than the equivalent series resistance R _f of the sub vibration,
The ratio of the absolute value | −RL _n | of the negative resistance of the main vibration of the amplification circuit of the crystal oscillator including the amplification circuit and the feedback circuit is equal to the equivalent series resistance R _n of the main vibration. The crystal oscillator is configured to be larger than the ratio of the absolute value | -RL _f | of the negative resistance of the secondary vibration to the equivalent series resistance R _f of the secondary vibration,
The output signal of the crystal oscillator configured to include the contour crystal resonator is an oscillation frequency of the main vibration, and the main vibration is a fundamental mode vibration or a harmonic mode vibration of the contour crystal resonator. A crystal oscillator. The vibrating portion of the contour crystal resonator is connected to the support portion via a connection portion, and the connection portion has at least a first connection portion and a second connection portion, and the main and sub vibrations of the contour crystal resonator are when the frequency stability factor respectively _{S n} and _{S f, S n} and _{S f} is given by ^{_{S n = r n / 2Q n}} 2 and ^{_{S f = r f / 2Q f}} 2, the relationship of S n _{<S f} The crystal oscillator according to claim 6, comprising: The contour crystal resonator includes a vibration portion, a connection portion, and a support portion, and the width dimension of the vibration portion is smaller than the length dimension and is a width longitudinal crystal vibrator that vibrates in a width longitudinal mode larger than the thickness dimension. The crystal oscillator includes the width-longitudinal crystal resonator. The thickness direction of the width-longitudinal crystal resonator is the electric axis x-axis direction, the width direction is the mechanical axis y-axis direction, and the length direction is the optical axis z-axis. The width longitudinal crystal unit is first rotated by an angle θ _x with the axis in the thickness direction as the rotation axis and then rotated by the angle θ _y with the axis in the width direction as the rotation axis, or The width longitudinal crystal unit is first rotated by an angle θ _y with the axis in the width direction as the rotation axis, and then rotated by the angle θ _x with the axis in the thickness direction as the rotation axis. The angle θ _x and the angle θ _y are respectively θ _x = −25 ° to + 25 °, θ _y = −30 ° to + 30 ° The vertical width crystal resonator is a lateral effect type crystal resonator whose resonance frequency of the main vibration does not depend on the piezoelectric constant. The crystal oscillator is at least a CMOS inverter as an amplifier, a feedback resistor as a resistor, and a gate side capacitor as a capacitor. The crystal oscillator according to claim 6, further comprising: a drain side capacitor; and the width-longitudinal crystal resonator. Contour crystal oscillators width longitudinal quartz crystal resonator, or a Lame crystal oscillator, or a length of the longitudinal crystal oscillator, the capacitance ratio r _n of the main vibration of the crystal oscillator is in the range of approximately 60 to 490, and 9. The crystal oscillator according to claim 6, wherein a sub-vibration finger of merit M _f is smaller than 32.

Images