JP2003060396A - Apparatus and method for mounting electronic component - Google Patents
Apparatus and method for mounting electronic componentInfo
- Publication number
- JP2003060396A JP2003060396A JP2001240820A JP2001240820A JP2003060396A JP 2003060396 A JP2003060396 A JP 2003060396A JP 2001240820 A JP2001240820 A JP 2001240820A JP 2001240820 A JP2001240820 A JP 2001240820A JP 2003060396 A JP2003060396 A JP 2003060396A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- electronic component
- board
- mounting
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Supply And Installment Of Electrical Components (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、フリップチップな
どの電子部品を基板に実装する電子部品実装装置および
電子部品実装方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic component mounting apparatus and an electronic component mounting method for mounting an electronic component such as a flip chip on a substrate.
【0002】[0002]
【従来の技術】半導体チップを基板に実装する方式とし
て、フリップチップなど電子部品の下面に設けられた突
出電極であるバンプを介して電子部品を基板に導通させ
る方式が広く用いられるようになっている。この方式に
おいては、移載ヘッドによって電子部品を基板に搭載す
る際に基板の電極と電子部品のバンプとを高精度で位置
合わせする必要があることから、一般に基板と電子部品
のバンプとをカメラで撮像することにより基板とバンプ
を認識して位置ずれを検出し、搭載動作時にこの位置ず
れを補正した上でバンプを電極上に搭載する。2. Description of the Related Art As a method of mounting a semiconductor chip on a substrate, a method of electrically connecting the electronic component to the substrate via bumps which are protruding electrodes provided on the lower surface of the electronic component such as a flip chip has been widely used. There is. In this method, since it is necessary to align the electrodes of the substrate and the bumps of the electronic component with high accuracy when the electronic component is mounted on the substrate by the transfer head, the substrate and the bump of the electronic component are generally aligned with each other in the camera. The positional deviation is detected by recognizing the substrate and the bump by picking up the image in step (3), and the positional deviation is corrected during the mounting operation, and then the bump is mounted on the electrode.
【0003】[0003]
【発明が解決しようとする課題】しかしながら、上記従
来の実装装置では、基板上でのカメラによる撮像動作と
移載ヘッドによる実装動作とを同一サイクル内で行うこ
とからタクトタイムが遅延する傾向にあり、特に1枚の
基板内に多数の単位基板が作り込まれた多数枚取り基板
では、単位基板毎に位置検出を行う必要があることから
撮像や認識処理に要する時間が長く、実装効率の向上を
図る上で大きな障害となっていた。However, in the conventional mounting apparatus described above, the takt time tends to be delayed because the imaging operation by the camera on the substrate and the mounting operation by the transfer head are performed in the same cycle. Especially, in the case of a multi-piece board in which a large number of unit boards are built in one board, it is necessary to perform position detection for each unit board, and therefore, it takes a long time to perform image pickup and recognition processing, thus improving mounting efficiency. It was a big obstacle in trying.
【0004】そこで本発明は、電子部品を効率よく基板
に実装することができる電子部品実装装置および電子部
品実装方法を提供することを目的とする。Therefore, an object of the present invention is to provide an electronic component mounting apparatus and an electronic component mounting method capable of efficiently mounting electronic components on a substrate.
【0005】[0005]
【課題を解決するための手段】請求項1記載の電子部品
実装装置は、電子部品を移載ヘッドによって基板に移送
搭載する電子部品実装装置であって、前記電子部品を供
給する部品供給部と、前記基板を位置決めする基板位置
決め部と、前記電子部品を吸着して保持する吸着ノズル
を複数備えた前記移載ヘッドを前記部品供給部と基板位
置決め部との間で移動させるとともに部品供給部におけ
る電子部品の取り出し時および基板位置決め部における
電子部品の搭載時に移載ヘッドの位置合わせ動作を行う
ヘッド移動手段と、基板位置決め部に対して進退可能に
配設され基板位置決め部の基板上に進出した時に前記基
板を撮像する撮像手段と、この撮像により得られた画像
データに基づいて前記基板の位置を検出する位置検出手
段と、この位置検出結果に基づいて前記ヘッド移動手段
を制御する制御部とを備えた。An electronic component mounting apparatus according to claim 1 is an electronic component mounting apparatus for transferring and mounting electronic components on a substrate by a transfer head, and a component supply unit for supplying the electronic components. In the component supply unit, the transfer head including a substrate positioning unit that positions the substrate and a plurality of suction nozzles that suction and hold the electronic component is moved between the component supply unit and the substrate positioning unit. Head moving means for aligning the transfer head at the time of picking up the electronic component and mounting the electronic component on the board positioning portion, and the board moving portion is arranged so as to be able to move forward and backward to advance onto the board of the board positioning portion. Sometimes an image pickup means for picking up the board, a position detecting means for detecting the position of the board based on the image data obtained by the picking up, and a position detecting means for detecting the position. Results and a control section for controlling the head moving means on the basis of.
【0006】請求項2記載の電子部品実装方法は、ヘッ
ド移動手段により移動する移載ヘッドによって電子部品
を部品供給部から取り出し、基板位置決め部に位置決め
された基板に移送搭載する電子部品実装方法であって、
前記基板位置決め部に対して進退可能に配設された撮像
手段を基板位置決め部の基板上に進出させて前記基板を
撮像する撮像工程と、この撮像により得られた画像デー
タに基づいて基板の位置を検出する位置検出工程と、前
記移載ヘッドによって部品供給部から電子部品を取り出
す部品取り出し工程と、前記位置検出結果に基づいて前
記ヘッド移動手段を制御することにより移載ヘッドを基
板位置決め部に位置決めされた基板上に移動させて電子
部品を基板に搭載する部品搭載工程とを含み、基板位置
決め部における前記撮像工程と部品供給部における前記
部品取り出し工程とを同時並行的に行う。An electronic component mounting method according to a second aspect is an electronic component mounting method in which an electronic component is taken out from a component supply section by a transfer head that is moved by a head moving means, and is transferred and mounted on a substrate positioned by a substrate positioning section. There
An image pickup step in which an image pickup means arranged so as to be able to move forward and backward with respect to the board positioning section is advanced on the board of the board positioning section to pick up the board, and the position of the board based on the image data obtained by this picking up. Position detection step of detecting the electronic component from the component supply section by the transfer head, and the head moving means based on the position detection result to control the transfer head to the substrate positioning section. And a component mounting step of mounting the electronic component on the substrate by moving the electronic component onto the positioned substrate, and the imaging step in the substrate positioning section and the component extracting step in the component supply section are simultaneously performed in parallel.
【0007】請求項3記載の電子部品実装方法は、請求
項2記載の電子部品実装方法であって、前記基板は複数
の単位基板が作り込まれた多数枚取り基板であり、前記
撮像工程において単位基板ごとに撮像する。An electronic component mounting method according to a third aspect is the electronic component mounting method according to the second aspect, wherein the substrate is a multi-cavity substrate in which a plurality of unit substrates are formed, and in the imaging step. An image is taken for each unit board.
【0008】請求項4記載の電子部品実装方法は、請求
項2記載の電子部品実装方法であって、電子部品搭載後
の基板を前記基板認識カメラによって撮像することによ
り、実装状態検査を行う。An electronic component mounting method according to a fourth aspect is the electronic component mounting method according to the second aspect, wherein the mounting state inspection is performed by imaging the substrate after mounting the electronic component by the substrate recognition camera.
【0009】本発明によれば、基板位置決め部における
基板位置検出のための撮像動作と、部品供給部における
移載ヘッドによる電子部品の取り出し動作とを同時並行
的に行うことによりタクトタイムを短縮することがで
き、電子部品を効率よく基板に実装することができる。According to the present invention, the tact time is shortened by simultaneously performing the imaging operation for detecting the board position in the board positioning section and the picking up operation of the electronic component by the transfer head in the component supply section. Therefore, electronic components can be efficiently mounted on the substrate.
【0010】[0010]
【発明の実施の形態】次に本発明の実施の形態を図面を
参照して説明する。図1は本発明の一実施の形態の電子
部品実装装置の平面図、図2(a)は本発明の一実施の
形態の電子部品実装装置の実装対象となる基板の平面
図、図2(b)は本発明の一実施の形態の電子部品実装
装置の実装対象となる単位基板の平面図、図3は本発明
の一実施の形態の電子部品実装装置の制御系の構成を示
すブロック図、図4は本発明の一実施の形態の電子部品
実装方法における実装動作のフロー図、図5、図6は本
発明の一実施の形態の電子部品実装方法の工程説明図で
ある。DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described with reference to the drawings. 1 is a plan view of an electronic component mounting apparatus according to an embodiment of the present invention, and FIG. 2A is a plan view of a substrate to be mounted by the electronic component mounting apparatus according to an embodiment of the present invention. FIG. 3B is a plan view of a unit substrate to be mounted by the electronic component mounting apparatus according to the embodiment of the present invention, and FIG. 3 is a block diagram showing a configuration of a control system of the electronic component mounting apparatus according to the embodiment of the present invention. FIG. 4 is a flow chart of a mounting operation in the electronic component mounting method according to the embodiment of the present invention, and FIGS. 5 and 6 are process explanatory diagrams of the electronic component mounting method according to the embodiment of the present invention.
【0011】まず図1を参照して電子部品実装装置の全
体構造について説明する。図1において、X方向に配設
された搬送路1には、電子部品の実装対象となる基板2
が載置されている。搬送路1は上流側から搬入される基
板2を受け取り、電子部品実装位置に位置決めする。し
たがって搬送路1は基板2を位置決めする基板位置決め
部となっている。First, the overall structure of the electronic component mounting apparatus will be described with reference to FIG. In FIG. 1, a substrate 2 on which electronic components are mounted is mounted on a transport path 1 arranged in the X direction.
Is placed. The transport path 1 receives the substrate 2 loaded from the upstream side and positions it at the electronic component mounting position. Therefore, the transport path 1 serves as a board positioning portion for positioning the board 2.
【0012】搬送路1の手前側には電子部品を供給する
部品供給部3が配設されている。部品供給部3には、ト
レイフィーダ4及びテープフィーダ6が併設されてお
り、トレイフィーダ4は下面にバンプが形成されたフリ
ップチップなどのバンプ付きの電子部品5を収容し、ま
たテープフィーダ6は各種のチップ型の電子部品(図示
せず)をテープに保持された状態で収容する。A component supply unit 3 for supplying electronic components is arranged on the front side of the transport path 1. The component feeder 3 is provided with a tray feeder 4 and a tape feeder 6. The tray feeder 4 accommodates electronic components 5 with bumps such as flip chips having bumps formed on the lower surface, and the tape feeder 6 is Various chip-type electronic components (not shown) are accommodated while being held by the tape.
【0013】搬送路1の上方には、搬送路1と直交する
Y方向に2つのY軸テーブル7A,7Bが基板位置決め
部を挟んで配設されており、Y軸テーブル7A,7Bに
は、第1のX軸テーブル8及び第2のX軸テーブル14
が架設されている。第1のX軸テーブル8には複数の吸
着ノズル10を備えた移載ヘッド9が装着されており、
第2のX軸テーブル14には基板認識カメラ15が装着
されている。Two Y-axis tables 7A and 7B are disposed above the transport path 1 in the Y direction orthogonal to the transport path 1 with the substrate positioning portion sandwiched therebetween. The Y-axis tables 7A and 7B include: First X-axis table 8 and second X-axis table 14
Has been erected. A transfer head 9 having a plurality of suction nozzles 10 is mounted on the first X-axis table 8,
A board recognition camera 15 is attached to the second X-axis table 14.
【0014】Y軸テーブル7A、第1のX軸テーブル8
を駆動することにより、移載ヘッド9は部品供給部3と
基板位置決め部(搬送路1)上の基板2との間を往復移
動する。そして部品供給部3のトレイフィーダ4からバ
ンプ付きの電子部品5を、またテープフィーダ6からは
各種のチップ型の電子部品をピックアップし、基板2に
移送し、位置合わせを行った後基板2上の実装点に搭載
する。したがってY軸テーブル7A、第1のX軸テーブ
ル8は、ヘッド移動手段となっている。Y-axis table 7A and first X-axis table 8
By driving the transfer head 9, the transfer head 9 reciprocates between the component supply unit 3 and the substrate 2 on the substrate positioning unit (conveyance path 1). Then, electronic components 5 with bumps are picked up from the tray feeder 4 of the component supply unit 3 and various chip-type electronic components are picked up from the tape feeder 6, transferred to the substrate 2, and aligned on the substrate 2. Mount at the mounting point of. Therefore, the Y-axis table 7A and the first X-axis table 8 are head moving means.
【0015】Y軸テーブル7B、第2のX軸テーブル1
4を駆動することにより、基板認識カメラ15はXY方
向に水平移動し、搬送路1に位置決めされた基板2に対
して進退する。そして基板認識カメラ15が基板2の上
方の任意位置に進出した状態において、下方の基板2の
任意位置を撮像する。なお移載ヘッド9には移載ヘッド
と一体的に移動するヘッド付属カメラ11が装着されて
おり、ヘッド付属カメラ11と基板認識カメラ15によ
って同一対象を撮像することにより、移載ヘッド9から
独立して移動する基板認識カメラ15の座標系と、移載
ヘッド9の駆動座標系とのキャリブレーションを行える
ようになっている。Y-axis table 7B, second X-axis table 1
By driving 4, the board recognition camera 15 horizontally moves in the XY directions and moves back and forth with respect to the board 2 positioned in the transport path 1. Then, in a state where the board recognition camera 15 has advanced to an arbitrary position above the board 2, an image is taken of the arbitrary position of the board 2 below. The transfer head 9 is equipped with a head-attached camera 11 that moves integrally with the transfer head. By capturing the same object with the head-attached camera 11 and the board recognition camera 15, the transfer head 9 is independent of the transfer head 9. The coordinate system of the substrate recognizing camera 15 that moves in a moving manner and the drive coordinate system of the transfer head 9 can be calibrated.
【0016】部品供給部3と搬送路1との間の移載ヘッ
ド9の移動経路には、部品認識カメラ13及びフラック
ス転写部12が設けられている。部品供給部3にてフリ
ップチップなどの電子部品5を取り出した移載ヘッド9
が部品認識カメラ13上を通過する際に、部品認識カメ
ラ13は吸着ノズル10に保持された状態のこれらの電
子部品5を下方から撮像する。これにより、電子部品5
が認識され電子部品5の識別や位置の検出が行われる。
そしてこの後移載ヘッド9がフラックス転写部12に移
動し、ここで保持した電子部品5をフラックス転写部1
2の塗布面に対して昇降させることにより、電子部品5
のバンプやチップ型部品の接合用端子には半田接合用の
フラックスが塗布される。A component recognition camera 13 and a flux transfer unit 12 are provided in the movement path of the transfer head 9 between the component supply unit 3 and the transport path 1. Transfer head 9 from which electronic component 5 such as a flip chip is taken out by component supply unit 3
When the component passes the component recognition camera 13, the component recognition camera 13 images the electronic components 5 held by the suction nozzle 10 from below. As a result, the electronic component 5
Is recognized, and the electronic component 5 is identified and the position is detected.
After that, the transfer head 9 moves to the flux transfer section 12, and the electronic component 5 held here is transferred to the flux transfer section 1.
The electronic component 5 is moved up and down with respect to the coating surface of 2.
The solder bonding flux is applied to the bumps and the bonding terminals of the chip type component.
【0017】次に図2を参照して、実装対象の基板2に
ついて説明する。図2(a)に示すように、基板2は単
位基板2aが同一基板に複数個作り込まれた多数枚取り
基板で有る。基板2の対角位置には、基板2全体の位置
認識用の認識マークA,Bが形成されており、基板認識
カメラ15によって認識マークA,Bを撮像し、位置認
識することにより基板2の位置が検出される。Next, the substrate 2 to be mounted will be described with reference to FIG. As shown in FIG. 2A, the substrate 2 is a multi-piece substrate in which a plurality of unit substrates 2a are formed on the same substrate. Recognition marks A and B for position recognition of the entire substrate 2 are formed at diagonal positions of the substrate 2, and the recognition marks A and B are imaged by the substrate recognition camera 15 and the positions are recognized by recognizing the positions. The position is detected.
【0018】図2(b)は、単位基板2aを示してい
る。各単位基板2aには、電子部品5のバンプが接合さ
れる電極16aやチップ部品が接合される電極16bな
どの各種の接合用電極が形成されている。また単位基板
2aの隅部には、当該単位基板2aが使用不能の不良品
であるか否かを示すNGマーク(図中ではX印で示す)
のマーク印加位置17が設定されている。前工程での検
査において、単位基板2aに何らかの不良が検出された
場合には、マーク印加位置17にNGマークが印加され
る。そして電子部品実装装置において、基板認識時にN
Gマークが検出された単位基板2aはNG基板と判断さ
れて、実装対象から除外される。FIG. 2B shows a unit substrate 2a. Various bonding electrodes such as an electrode 16a to which a bump of the electronic component 5 is bonded and an electrode 16b to which a chip component is bonded are formed on each unit substrate 2a. In addition, at the corner of the unit board 2a, an NG mark (indicated by an X mark in the figure) indicating whether or not the unit board 2a is a defective product that cannot be used.
The mark application position 17 is set. In the inspection in the previous step, if any defect is detected in the unit substrate 2a, the NG mark is applied to the mark application position 17. Then, in the electronic component mounting apparatus, when the board is recognized, N
The unit board 2a in which the G mark is detected is determined to be an NG board and is excluded from the mounting targets.
【0019】次に図3を参照して、制御系の構成につい
て説明する。図3において、CPU20は全体制御部で
あり、以下に説明する各部を統括して制御する。プログ
ラム記憶部21は、移載ヘッド9による実装動作を実行
するための動作プログラムやや基板認識・部品認識など
の認識処理のための処理プログラムなど各種のプログラ
ムを記憶する。データ記憶部22は、実装データなどの
各種データを記憶する。Next, the configuration of the control system will be described with reference to FIG. In FIG. 3, a CPU 20 is an overall control unit, and controls each unit described below in an integrated manner. The program storage unit 21 stores various programs such as an operation program for executing a mounting operation by the transfer head 9 and a processing program for recognition processing such as board recognition and component recognition. The data storage unit 22 stores various data such as mounting data.
【0020】画像認識部23は、ヘッド付属カメラ1
1、部品認識カメラ13や基板認識カメラ15の撮像に
よって得られた画像データを認識処理する。これによ
り、基板認識カメラ15と移載ヘッド9の座標系相互の
キャリブレーションや、移載ヘッド9に保持された状態
の電子部品の位置検出、搬送路1上の基板2の位置検出
などの各種認識処理が行われる。したがって画像認識部
23は、基板2の位置を検出する位置検出手段となって
いる。The image recognition unit 23 is provided with the head-attached camera 1
1. The image data obtained by the image pickup by the component recognition camera 13 and the board recognition camera 15 is recognized. As a result, various calibrations such as mutual calibration of the coordinate system between the substrate recognition camera 15 and the transfer head 9, position detection of electronic components held by the transfer head 9, position detection of the substrate 2 on the transport path 1, and the like are performed. Recognition processing is performed. Therefore, the image recognition unit 23 serves as a position detection unit that detects the position of the substrate 2.
【0021】機構駆動部24は、CPU20によって制
御され以下の各機構を駆動する。基板搬送機構25は、
搬送路1における基板2の搬送機構である。ヘッド移動
機構26(ヘッド移動手段)は、Y軸テーブル7A及び
第1のX軸テーブル8によって移載ヘッド9を移動させ
る。カメラ移動機構27は、Y軸テーブル7B及び第2
のX軸テーブル14によって基板認識カメラ15を移動
させる。CPU20がヘッド移動手段26を制御する際
には、画像認識部23の位置検出結果に基づいて、移載
ヘッド9を基板2に対して位置合わせする。The mechanism drive section 24 is controlled by the CPU 20 and drives the following mechanisms. The substrate transfer mechanism 25
This is a transport mechanism for the substrate 2 in the transport path 1. The head moving mechanism 26 (head moving means) moves the transfer head 9 by the Y-axis table 7A and the first X-axis table 8. The camera moving mechanism 27 includes a Y-axis table 7B and a second
The board recognition camera 15 is moved by the X-axis table 14. When the CPU 20 controls the head moving unit 26, the transfer head 9 is aligned with the substrate 2 based on the position detection result of the image recognition unit 23.
【0022】この電子部品実装装置は上記のように構成
されており、以下電子部品実装動作について、図4のフ
ロー図に沿って図5、図6を参照しながら説明する。図
4のフローでは、実装動作のうち、基板2上において行
われる動作について示している。先ず実装対象の基板2
が搬送路1上を上流側から搬送され、基板位置決め部に
位置決めされる(ST1)。次いで、カメラ移動機構2
7によって基板認識カメラ15を移動させ、図5(a)
に示すように基板2の認識マークAを撮像して位置を認
識し、次いで図5(b)に示すように認識マークBを撮
像して位置を認識する(ST2)。これにより、基板2
の全体位置が検出される。The electronic component mounting apparatus is configured as described above, and the electronic component mounting operation will be described below with reference to FIGS. 5 and 6 along the flow chart of FIG. The flow of FIG. 4 shows the operation performed on the substrate 2 among the mounting operations. First, the board 2 to be mounted
Are transported from the upstream side on the transport path 1 and positioned on the substrate positioning portion (ST1). Then, the camera moving mechanism 2
5, the board recognition camera 15 is moved, and FIG.
As shown in FIG. 5, the recognition mark A of the substrate 2 is imaged to recognize the position, and then the recognition mark B is imaged to recognize the position as shown in FIG. 5B (ST2). As a result, the substrate 2
Is detected.
【0023】この後、各単位基板2aを対象とした処理
が行われる。すなわち、基板2の各単位基板2aを撮像
し、先ずマーク印加位置17(図2(a)参照)内のN
Gマークの有無を認識することにより、前工程で不良と
判定されたNG単位基板を検出する(ST3)。ここで
検出されたNG単位基板は電子部品実装対象から除外さ
れ、以下のステップは、NG単位基板以外の良品基板の
みが対象となる。良品であると判断された単位基板2a
は、基板認識カメラ15によって撮像され、単位基板2
a内の実装点認識が行われる(ST4)。これにより、
図2(b)に示す電極16a,16bの位置が認識され
る。After that, the processing for each unit substrate 2a is performed. That is, each unit substrate 2a of the substrate 2 is imaged, and first, N in the mark application position 17 (see FIG. 2A)
By recognizing the presence or absence of the G mark, the NG unit substrate determined to be defective in the previous process is detected (ST3). The NG unit substrate detected here is excluded from the electronic component mounting target, and the following steps are only for non-defective substrate other than the NG unit substrate. Unit board 2a judged to be non-defective
Is picked up by the board recognition camera 15 and the unit board 2
The mounting point in a is recognized (ST4). This allows
The positions of the electrodes 16a and 16b shown in FIG. 2B are recognized.
【0024】また上記(ST2)、(ST3)、(ST
4)の動作と並行して、図5(a)、(b)に示すよう
に、移載ヘッド9はトレイフィーダ4から電子部品5
を、またテープフィーダ6からチップ型の電子部品を吸
着ノズル10によって取り出し、次いで移載ヘッド9は
部品認識カメラ13上へ移動する。そしてここで吸着ノ
ズル10によって保持された状態の電子部品5が下方か
ら撮像され、電子部品の識別や位置検出が行われる。こ
の後、図6(a)に示すように移載ヘッド9はフラック
ス転写部12上に移動し、ここで電子部品5のバンプや
チップ型部品の接合用端子へのフラックス塗布が行われ
る。The above (ST2), (ST3), (ST
In parallel with the operation of 4), as shown in FIGS. 5A and 5B, the transfer head 9 moves from the tray feeder 4 to the electronic components 5.
And the chip type electronic component is taken out from the tape feeder 6 by the suction nozzle 10, and then the transfer head 9 is moved onto the component recognition camera 13. Then, the electronic component 5 held by the suction nozzle 10 is imaged from below to identify the electronic component and detect the position of the electronic component. Thereafter, as shown in FIG. 6A, the transfer head 9 is moved onto the flux transfer section 12, where the flux is applied to the bumps of the electronic component 5 and the joining terminals of the chip type component.
【0025】この後、電子部品実装が行われる(ST
5)。すなわち、移載ヘッド9は基板2上に移動し、こ
こで保持した電子部品5を実装対象の単位基板2aの実
装点に搭載する。この搭載動作において、(ST4)の
実装点認識によって求められた電極16a,16bの位
置ずれと、部品認識カメラ13による部品認識によって
求められた位置ずれが補正され、高い実装位置精度が確
保される。After this, electronic component mounting is performed (ST
5). That is, the transfer head 9 moves onto the substrate 2, and the electronic component 5 held here is mounted on the mounting point of the unit substrate 2a to be mounted. In this mounting operation, the positional deviations of the electrodes 16a and 16b obtained by the mounting point recognition in (ST4) and the positional deviations obtained by the component recognition by the component recognition camera 13 are corrected, and high mounting position accuracy is secured. .
【0026】この後、未実装の単位基板2aが存在する
か否かを判断し(ST6)、未実装の単位基板がある場
合には、(ST3)に戻って次の単位基板2aを対象と
したNG単位基板検出(ST3)、実装点認識(ST
4)及び電子部品実装(ST5)を実行する。そして
(ST6)にて未実装の単位基板2aが存在しないなら
ば、実装動作を終了する。Thereafter, it is judged whether or not there is an unmounted unit board 2a (ST6). If there is an unmounted unit board 2a, the process returns to (ST3) to target the next unit board 2a. NG unit board detection (ST3), mounting point recognition (ST
4) and electronic component mounting (ST5) are executed. Then, if there is no unmounted unit board 2a in (ST6), the mounting operation is ended.
【0027】上記実施の形態に示す電子部品実装方法
は、搬送路1に対して進退可能に配設された基板認識カ
メラ15を基板2上に進出させて基板2を撮像する撮像
工程と、この撮像により得られた画像データに基づいて
基板2の認識マークA,Bや単位基板2aの各実装点の
位置を検出する位置検出工程と、移載ヘッド9によって
部品供給部3から電子部品5を取り出す部品取り出し工
程と、この移載ヘッド9を基板2上に移動させ、位置検
出結果に基づいて電子部品5を基板2に搭載する部品搭
載工程とを含んだものとなっている。In the electronic component mounting method shown in the above-mentioned embodiment, an image pickup step of advancing the board recognition camera 15 arranged so as to be able to move forward and backward with respect to the conveyance path 1 onto the board 2 and picking up an image of the board 2, A position detection step of detecting the positions of the recognition marks A and B of the board 2 and the mounting points of the unit board 2a based on the image data obtained by the image pickup, and the transfer head 9 to move the electronic parts 5 from the part supply unit 3 to the electronic parts 5. It includes a component taking-out process of taking out and a component placing process of moving the transfer head 9 onto the substrate 2 and placing the electronic component 5 on the substrate 2 based on the position detection result.
【0028】そして、上記各工程を実行する際に、基板
認識カメラ15による撮像工程と移載ヘッド9による部
品取り出し工程とを同時並行的に行い、撮像結果に基づ
いて位置検出直ち部品搭載工程に移行できるようになっ
ている。また上記実施の形態においては、撮像工程にお
いて単位基板ごとに撮像が行われ、実装直前の状態で単
位基板2aが撮像されることから、キャリアテープのよ
うな変形しやすい基板を対象とする場合にあっても、位
置精度に優れた実装品質を確保することができる。When performing each of the above steps, the image pickup step by the board recognition camera 15 and the component take-out step by the transfer head 9 are simultaneously performed in parallel, and the component mounting step immediately after position detection is performed based on the image pickup result. You can move to. Further, in the above-described embodiment, since the unit substrate 2a is imaged in the state immediately before mounting in the image capturing process, the unit substrate 2a is imaged. Therefore, when a substrate such as a carrier tape which is easily deformed is targeted. Even if there is, it is possible to ensure the mounting quality with excellent positional accuracy.
【0029】なおここでは基板認識カメラ15の撮像に
よって基板2の位置検出のみを行う例を示したが、各単
位基板を順次撮像する過程において、既に電子部品が搭
載された実装後の単位基板を併せて撮像し、この撮像結
果に基づいて電子部品5の有無や位置ずれを検出し実装
状態検査を行うようにしてもよい。このように、基板認
識カメラ15を移載ヘッド9と独立して設けることによ
り、目的の異なる用途に基板認識用カメラ15を使用す
ることができ、よりフレキシブルな実装方法を実現する
ことが可能となっている。Although the example in which only the position of the substrate 2 is detected by the image pickup of the substrate recognition camera 15 is shown here, in the process of sequentially picking up the image of each unit board, the mounted unit boards on which the electronic parts are already mounted are mounted. It is also possible to take an image together and detect the presence or absence of the electronic component 5 and the positional deviation based on the result of the image pickup to perform the mounting state inspection. In this way, by providing the board recognition camera 15 independently of the transfer head 9, the board recognition camera 15 can be used for different purposes and a more flexible mounting method can be realized. Has become.
【0030】[0030]
【発明の効果】本発明によれば、基板位置決め部におけ
る基板位置認識のための撮像動作と、部品供給部におけ
る移載ヘッドによる電子部品の取り出し動作とを同時並
行的に行うようにしたので、タクトタイムを短縮して電
子部品を効率よく基板に実装することができる。According to the present invention, the image pickup operation for recognizing the board position in the board positioning section and the pick-up operation of the electronic component by the transfer head in the component supply section are simultaneously performed. The tact time can be shortened and electronic components can be efficiently mounted on the substrate.
【図1】本発明の一実施の形態の電子部品実装装置の平
面図FIG. 1 is a plan view of an electronic component mounting apparatus according to an embodiment of the present invention.
【図2】(a)本発明の一実施の形態の電子部品実装装
置の実装対象となる基板の平面図
(b)本発明の一実施の形態の電子部品実装装置の実装
対象となる単位基板の平面図FIG. 2A is a plan view of a board which is a mounting target of the electronic component mounting apparatus according to the embodiment of the present invention. FIG. 2B is a unit board which is a mounting target of the electronic component mounting apparatus according to the embodiment of the present invention. Top view of
【図3】本発明の一実施の形態の電子部品実装装置の制
御系の構成を示すブロック図FIG. 3 is a block diagram showing a configuration of a control system of the electronic component mounting apparatus according to the embodiment of the present invention.
【図4】本発明の一実施の形態の電子部品実装方法にお
ける実装動作のフロー図FIG. 4 is a flowchart of a mounting operation in the electronic component mounting method according to the embodiment of the present invention.
【図5】本発明の一実施の形態の電子部品実装方法の工
程説明図FIG. 5 is a process explanatory diagram of an electronic component mounting method according to an embodiment of the present invention.
【図6】本発明の一実施の形態の電子部品実装方法の工
程説明図FIG. 6 is a process explanatory diagram of an electronic component mounting method according to an embodiment of the present invention.
1 搬送路 2 基板 2a 単位基板 3 部品供給部 9 移載ヘッド 10 吸着ノズル 13 部品認識カメラ 15 基板認識カメラ 20 CPU 23 画像認識部 26 ヘッド移動機構 27 カメラ移動機構 1 transport path 2 substrates 2a unit substrate 3 parts supply department 9 Transfer head 10 Suction nozzle 13 Parts recognition camera 15 Board recognition camera 20 CPU 23 Image recognition unit 26 Head moving mechanism 27 Camera movement mechanism
フロントページの続き (72)発明者 土師 宏 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 Fターム(参考) 5E313 AA01 AA11 CC04 EE02 EE03 EE24 EE25 FF11 FF24 FF28Continued front page (72) Inventor Hiroshi Haji 1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric Sangyo Co., Ltd. F-term (reference) 5E313 AA01 AA11 CC04 EE02 EE03 EE24 EE25 FF11 FF24 FF28
Claims (4)
搭載する電子部品実装装置であって、前記電子部品を供
給する部品供給部と、前記基板を位置決めする基板位置
決め部と、前記電子部品を吸着して保持する吸着ノズル
を複数備えた前記移載ヘッドを前記部品供給部と基板位
置決め部との間で移動させるとともに部品供給部におけ
る電子部品の取り出し時および基板位置決め部における
電子部品の搭載時に移載ヘッドの位置合わせ動作を行う
ヘッド移動手段と、基板位置決め部に対して進退可能に
配設され基板位置決め部の基板上に進出した時に前記基
板を撮像する撮像手段と、この撮像により得られた画像
データに基づいて前記基板の位置を検出する位置検出手
段と、この位置検出結果に基づいて前記ヘッド移動手段
を制御する制御部とを備えたことを特徴とする電子部品
実装装置。1. An electronic component mounting apparatus for transferring and mounting an electronic component on a substrate by a transfer head, comprising: a component supply unit for supplying the electronic component; a substrate positioning unit for positioning the substrate; and the electronic component. The transfer head having a plurality of suction nozzles for sucking and holding is moved between the component supply unit and the board positioning unit, and at the time of taking out electronic components from the component supply unit and mounting electronic components on the board positioning unit. Head moving means for performing a positioning operation of the transfer head, imaging means for movably advancing and retreating with respect to the substrate positioning portion and for imaging the substrate when the substrate positioning portion has advanced onto the substrate, and the imaging means Position detecting means for detecting the position of the substrate based on the image data, and a control section for controlling the head moving means based on the position detection result. An electronic component mounting apparatus characterized by comprising a.
によって電子部品を部品供給部から取り出し、基板位置
決め部に位置決めされた基板に移送搭載する電子部品実
装方法であって、前記基板位置決め部に対して進退可能
に配設された撮像手段を基板位置決め部の基板上に進出
させて前記基板を撮像する撮像工程と、この撮像により
得られた画像データに基づいて基板の位置を検出する位
置検出工程と、前記移載ヘッドによって部品供給部から
電子部品を取り出す部品取り出し工程と、前記位置検出
結果に基づいて前記ヘッド移動手段を制御することによ
り移載ヘッドを基板位置決め部に位置決めされた基板上
に移動させて電子部品を基板に搭載する部品搭載工程と
を含み、基板位置決め部における前記撮像工程と部品供
給部における前記部品取り出し工程とを同時並行的に行
うことを特徴とする電子部品実装方法。2. An electronic component mounting method for picking up an electronic component from a component supply unit by a transfer head that is moved by a head moving unit, and transferring and mounting the electronic component on a substrate positioned by a substrate positioning unit, wherein And image pickup means for advancing and retracting the image pickup means arranged on the board of the board positioning portion to pick up the board, and a position detecting step for detecting the position of the board based on the image data obtained by this picking up And a component taking-out step of taking out an electronic component from the component supplying section by the transfer head, and controlling the head moving means based on the position detection result to place the transfer head on the substrate positioned by the substrate positioning section. A component mounting step of moving and mounting an electronic component on the substrate, wherein the imaging step in the board positioning section and the component supply section Electronic component mounting method and performing a goods take-out process concurrently.
多数枚取り基板であり、前記撮像工程において単位基板
ごとに撮像することを特徴とする請求項2記載の電子部
品実装方法。3. The electronic component mounting method according to claim 2, wherein the board is a multi-piece board in which a plurality of unit boards are formed, and the unit board is imaged in the imaging step.
ラによって撮像することにより、実装状態検査を行うこ
とを特徴とする請求項2記載の電子部品実装方法。4. The electronic component mounting method according to claim 2, wherein the mounting state inspection is performed by imaging the substrate after mounting the electronic component with the substrate recognition camera.
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001240820A JP3899867B2 (en) | 2001-08-08 | 2001-08-08 | Electronic component mounting apparatus and electronic component mounting method |
KR1020037016872A KR100881908B1 (en) | 2001-08-08 | 2002-08-07 | Apparatus and method for mounting electronic parts |
DE10296993T DE10296993T5 (en) | 2001-08-08 | 2002-08-07 | Device and method for assembling electronic components |
CNB028123042A CN1229010C (en) | 2001-08-08 | 2002-08-07 | Apparatus and method for mounting electronic parts |
PCT/JP2002/008077 WO2003015491A1 (en) | 2001-08-08 | 2002-08-07 | Apparatus and method for mounting electronic parts |
US10/216,126 US6839960B2 (en) | 2001-08-08 | 2002-08-08 | Method for mounting electronic parts on a board |
US10/998,470 US7059043B2 (en) | 2001-08-08 | 2004-11-29 | Method for mounting an electronic part by solder position detection |
Applications Claiming Priority (1)
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JP2001240820A JP3899867B2 (en) | 2001-08-08 | 2001-08-08 | Electronic component mounting apparatus and electronic component mounting method |
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JP2003060396A true JP2003060396A (en) | 2003-02-28 |
JP3899867B2 JP3899867B2 (en) | 2007-03-28 |
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JP2009004754A (en) * | 2007-05-24 | 2009-01-08 | Panasonic Corp | Method for mounting component, component mounting machine, method and device for determining mounting condition, and program |
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WO2008142864A1 (en) * | 2007-05-24 | 2008-11-27 | Panasonic Corporation | Component mounting method, component mounting apparatus, method for determining mounting conditions, and apparatus and program for determining mounting conditions |
JP2009004754A (en) * | 2007-05-24 | 2009-01-08 | Panasonic Corp | Method for mounting component, component mounting machine, method and device for determining mounting condition, and program |
KR101123464B1 (en) * | 2007-05-24 | 2012-03-27 | 파나소닉 주식회사 | Component mounting method, component mounting apparatus, method for determining mounting conditions, and apparatus and program for determining mounting conditions |
US8527082B2 (en) | 2007-05-24 | 2013-09-03 | Panasonic Corporation | Component mounting method, component mounting apparatus, method for determining mounting conditions, and apparatus and program for determining mounting conditions |
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KR20160147415A (en) * | 2015-06-15 | 2016-12-23 | 한화테크윈 주식회사 | Method for revision of bump realization in flip chip |
KR102022475B1 (en) | 2015-06-15 | 2019-09-18 | 한화정밀기계 주식회사 | Method for revision of bump realization in flip chip |
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