JP2003048783A - Alumina ceramics joined body and method for manufacturing the same - Google Patents
Alumina ceramics joined body and method for manufacturing the sameInfo
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- JP2003048783A JP2003048783A JP2001235178A JP2001235178A JP2003048783A JP 2003048783 A JP2003048783 A JP 2003048783A JP 2001235178 A JP2001235178 A JP 2001235178A JP 2001235178 A JP2001235178 A JP 2001235178A JP 2003048783 A JP2003048783 A JP 2003048783A
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- alumina
- yag
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、アルミナセラミッ
クス接合体及びその製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an alumina ceramics bonded body and a method for manufacturing the same.
【０００２】[0002]
【従来の技術】アルミナセラミックスは、耐熱性、絶縁
性、耐磨耗性に優れ、各種の構造用部材の材料に使用さ
れている。アルミナセラミックスを構造用部材として使
用する場合、形状によっては分割した形状の焼結体を接
合したアルミナセラミックス接合体とすることが必要と
なる。2. Description of the Related Art Alumina ceramics are excellent in heat resistance, insulation and abrasion resistance and are used as materials for various structural members. When using alumina ceramics as a structural member, it is necessary to form an alumina ceramics joined body by joining sintered bodies of divided shapes depending on the shape.
【０００３】従来、アルミナセラミックス接合体として
は、酸化ホウ素（Ｂ2Ｏ3）成分を含むホウケイ酸ガラ
ス、あるいはアルミナ（Ａｌ2Ｏ3）とシリカ（Ｓｉ
Ｏ2）の混合物を接合材として用い、アルミナセラミッ
クス同士を接合したものが知られている。上記アルミナ
セラミックス接合体は、酸化ホウ素成分を含むホウケイ
酸ガラスの粉末、あるいはアルミナとシリカの混合粉
末、又はそれらのスラリーをアルミナセラミックスの接
合部に介装又は塗布してアルミナセラミックス同士を合
わせ、空気や真空中で加熱して製造されている。Conventionally, as an alumina ceramics bonded body, borosilicate glass containing a boron oxide (B 2 O 3 ) component, or alumina (Al 2 O 3 ) and silica (Si).
It is known that alumina ceramics are bonded together by using a mixture of O 2 ) as a bonding material. The alumina-ceramics bonded body is a powder of borosilicate glass containing a boron oxide component, or a mixed powder of alumina and silica, or a slurry thereof is interposed or applied to the bonded portion of the alumina ceramics to combine the alumina ceramics with each other, and It is manufactured by heating in a vacuum.
【０００４】[0004]
【発明が解決しようとする課題】しかし、従来のアルミ
ナセラミックス接合体では、接合材として酸化ホウ素成
分を含むホウケイ酸ガラスを用いた場合、接合部に気孔
及びクラック等の接合欠陥が生じ易く、接合強度やシー
ル性が劣る等の不具合がある。又、接合材としてアルミ
ナとシリカの混合物を用いた場合、接合部に気孔が少な
く均質であるため、接合強度やシール性は向上するもの
の、高温で使用する場合に、接合部が軟化してしまい、
十分な強度が得られない不具合がある。However, in the conventional alumina ceramics bonded body, when borosilicate glass containing a boron oxide component is used as the bonding material, bonding defects such as pores and cracks are likely to occur in the bonding portion, and the bonding is difficult. There are problems such as poor strength and sealability. Further, when a mixture of alumina and silica is used as the bonding material, since the bonding portion has few pores and is homogeneous, the bonding strength and sealing property are improved, but the bonding portion is softened when used at high temperature. ,
There is a problem that sufficient strength cannot be obtained.
【０００５】そこで、本発明は、高温での接合強度を高
める得るアルミナセラミックス接合体及びその製造方法
を提供することを目的とする。Therefore, it is an object of the present invention to provide an alumina ceramics bonded body which can increase the bonding strength at high temperature and a method for manufacturing the same.
【０００６】[0006]
【課題を解決するための手段】前記課題を解決するた
め、本発明のアルミナセラミックス接合体は、ＹＡＧ組
成を含み、内部から表面に向ってＹＡＧ組成比の増大す
るアルミナ・ＹＡＧ傾斜層を有するアルミナセラミック
ス同士がＹＡＧ層を介して接合されていることを特徴と
する。前記ＹＡＧ層の厚みが５〜５０μｍ、アルミナ・
ＹＡＧ傾斜層の厚みが３０〜２００μｍであることが好
ましい。又、前記アルミナセラミックスの表面全体が２
μｍ以上のＹＡＧ層で覆われていることが好ましい。In order to solve the above-mentioned problems, the alumina-ceramic bonding body of the present invention comprises a YAG composition, and an alumina having an alumina / YAG gradient layer in which the YAG composition ratio increases from the inside toward the surface. The ceramics are bonded to each other via a YAG layer. The YAG layer has a thickness of 5 to 50 μm and is made of alumina.
The thickness of the YAG gradient layer is preferably 30 to 200 μm. In addition, the entire surface of the alumina ceramic is 2
It is preferably covered with a YAG layer having a thickness of at least μm.
【０００７】一方、アルミナセラミックス接合体の製造
方法は、アルミナと所要量のイットリウム化合物からな
る造粒粉末を成形して成形体とし、成形体又はその８０
０〜１３００℃の温度での仮焼体の接合部同士を合わ
せ、空気、還元雰囲気又は真空中において１６００〜１
８５０℃の温度で焼成することを特徴とする。On the other hand, the method for producing an alumina ceramics bonded body is a method of molding a granulated powder comprising alumina and a required amount of yttrium compound into a molded body, and then molding the molded body or its 80
The joint portions of the calcined body at a temperature of 0 to 1300 ° C. are combined with each other, and 1600 to 1 in air, a reducing atmosphere or a vacuum.
It is characterized by firing at a temperature of 850 ° C.
【０００８】[0008]
【作用】上記アルミナセラミックス接合体においては、
ＹＡＧ組成を含むアルミナセラミックス同士が、アルミ
ナと物性値が比較的類似しているＹＡＧ（イットリウム
・アルミニウム・ガーネット：Ｙ3Ａｌ5Ｏ12）からなる
接合層としてのＹＡＧ層、及びＹＡＧ層と両アルミナセ
ラミックスとの物性の差異を連続的に緩和するアルミナ
・ＹＡＧ傾斜層によって接合される。[Function] In the above-mentioned alumina ceramics bonded body,
Alumina ceramics containing a YAG composition are YAG layers (yttrium-aluminum-garnet: Y 3 Al 5 O 12 ) having similar physical properties to each other as alumina. It is joined by an alumina / YAG gradient layer that continuously relaxes the difference in physical properties from ceramics.
【０００９】ＹＡＧ層の厚みが、５μｍ未満であると、
接合層であるＹＡＧ層にアルミナ粒子や気孔が介在し易
く均質なＹＡＧ層が得られ難い。一方、５０μｍを超え
るとアルミナセラミックス接合体の強度がＹＡＧの強度
に影響されてしまい、アルミナ並みの強度が得られな
い。ＹＡＧ層の厚みは、１０〜３０μｍがより好まし
い。アルミナセラミックス中のアルミナ・ＹＡＧ傾斜層
の厚みが、３０μｍ未満であると、ＹＡＧ層とアルミナ
セラミックスの物性の異差を緩和する効果が少ない。一
方、２００μｍを超えると、アルミナセラミックス中に
ＹＡＧが多く存在し、アルミナの特性を劣化させてしま
う。傾斜層の厚みは、５０〜１００μｍがより好まし
い。When the thickness of the YAG layer is less than 5 μm,
Alumina particles and pores are likely to be present in the YAG layer, which is the bonding layer, and it is difficult to obtain a uniform YAG layer. On the other hand, if it exceeds 50 μm, the strength of the alumina-ceramic bonded body is affected by the strength of YAG, and the strength comparable to that of alumina cannot be obtained. The thickness of the YAG layer is more preferably 10 to 30 μm. When the thickness of the alumina / YAG gradient layer in the alumina ceramics is less than 30 μm, the effect of alleviating the difference in physical properties between the YAG layer and the alumina ceramics is small. On the other hand, when it exceeds 200 μm, a large amount of YAG is present in the alumina ceramics, which deteriorates the characteristics of alumina. The thickness of the gradient layer is more preferably 50-100 μm.
【００１０】又、前記ＹＡＧ層及びアルミナ・ＹＡＧ傾
斜層の存在によって接合されたアルミナセラミックス接
合体の表面が２μｍ以上の厚みのＹＡＧ層で覆われてい
ることによって、複雑形状であっても十分な機械的強度
を有し、かつ、塩化ホウ素等の塩素系ガス、フッ化炭素
等のフッ素系ガス等の腐食性ガス雰囲気下での優れた耐
プラズマ性を有するアルミナセラミックス接合体とする
ことができる。つまり、当該接合体は、例えば、半導体
製造用の耐プラズマ部材として、有効に活用することが
できる。Further, since the surface of the alumina ceramics joined body joined by the existence of the YAG layer and the alumina / YAG gradient layer is covered with the YAG layer having a thickness of 2 μm or more, the complex shape is sufficient. It is possible to obtain an alumina ceramics joined body having mechanical strength and excellent plasma resistance in a corrosive gas atmosphere such as chlorine-based gas such as boron chloride and fluorine-based gas such as fluorocarbon. . That is, the bonded body can be effectively used, for example, as a plasma resistant member for semiconductor manufacturing.
【００１１】一方、アルミナセラミックス接合体の製造
方法においては、添加したイットリウム化合物が、焼成
過程でアルミナと反応してＹＡＧを生成し、更に焼成が
進むと、アルミナの焼成収縮により、ＹＡＧがアルミナ
の粒界を通って成形体又は仮焼体の内部から成形体又は
仮焼体の合わせ面及び表面へ押し出されて、移動距離の
違いからＹＡＧ濃度が高くなるアルミナ・ＹＡＧ傾斜層
及びＹＡＧ層が形成される。On the other hand, in the method for producing an alumina ceramics joined body, the added yttrium compound reacts with alumina in the firing process to produce YAG, and when firing is further advanced, YAG is converted to alumina by firing shrinkage of alumina. Alumina / YAG gradient layer and YAG layer are formed which are extruded from the inside of the molded body or calcined body through the grain boundaries to the mating surface and surface of the molded body or calcined body, and the YAG concentration becomes high due to the difference in movement distance. To be done.
【００１２】イットリウム化合物としては、酸化イット
リウム（Ｙ2Ｏ3）、塩化イットリウム（ＹＣｌ3）、酢
酸イットリウム（Ｙ（ＣＨ3ＣＯＯ）3）、硝酸イットリ
ウム（Ｙ（ＨＮＯ3））あるいはこれらの水和物の１種
若しくは２種以上を純水、アルコール類等に溶解したも
のが好ましい。アルミナ粉末と所要量のイットリウム化
合物からなる造粒粉末は、アルミナ粉末に所要量のイッ
トリウム化合物を添加して水に混合してスラリーとし、
これに成形助剤を加えてスプレードライヤー等で造粒す
ることによって製造される。造粒粉末からの成形体の成
形は、加圧成形や鋳込み成形、押出成形、射出成形等に
よって行われる。成形体の仮焼温度が、８００℃未満で
あると、仮焼体の強度が十分に得られず、次工程の焼成
までの間に破損し易くなり、歩留り低下につながる。一
方、１３００℃を超えると、焼結が進みすぎ、内部に閉
気孔が残留し易くなり、次工程の焼成においてこの気孔
を完全に無くし緻密な焼成体を得ることが困難になる、
成形体の仮焼温度は、９００〜１２００℃がより好まし
い。接合部同士を合わせた成形体又は仮焼体の焼成温度
が、１６００℃未満であるアルミナセラミックス基材中
において、ＹＡＧが表面に移動し難く、十分なＹＡＧ層
及びアルミナ・ＹＡＧ傾斜層が得られない。一方、１８
５０℃を超えると、ＹＡＧの蒸発やアルミナの異常粒成
長が生じ、均一なＹＡＧ層が得られない。焼成温度は、
１７００〜１８００℃がより好ましい。なお、アルミナ
セラミックス接合体を構成する各アルミナセラミックス
の内部には、少量のＹＡＧ組成が含まれていてもかまわ
ない。又、イットリウム化合物は、アルミナ粉末に対
し、酸化イットリウム（Ｙ2Ｏ3）換算で１〜５ｗｔ％添
加することが好ましい。この割合とすることによって、
上述したように、より適切なＹＡＧ層及びアルミナ・Ｙ
ＡＧ傾斜層を形成することができる。Examples of the yttrium compound include yttrium oxide (Y 2 O 3 ), yttrium chloride (YCl 3 ), yttrium acetate (Y (CH 3 COO) 3 ), yttrium nitrate (Y (HNO 3 )) or hydration thereof. It is preferable to dissolve one or more substances in pure water or alcohols. Granulated powder consisting of alumina powder and a required amount of yttrium compound is a slurry by adding a required amount of yttrium compound to alumina powder and mixed with water.
It is manufactured by adding a molding aid to this and granulating with a spray dryer or the like. Molding of the molded body from the granulated powder is performed by pressure molding, cast molding, extrusion molding, injection molding or the like. If the calcination temperature of the molded body is less than 800 ° C., the strength of the calcinated body cannot be sufficiently obtained, and the molded body is easily damaged before firing in the next step, leading to a reduction in yield. On the other hand, if the temperature exceeds 1300 ° C., the sintering proceeds excessively and closed pores are likely to remain inside, and it becomes difficult to completely eliminate these pores in the firing in the next step to obtain a dense fired body.
The calcining temperature of the molded body is more preferably 900 to 1200 ° C. In the alumina ceramic substrate whose firing temperature of the molded body or the calcined body in which the joined parts are combined is less than 1600 ° C., YAG hardly moves to the surface, and a sufficient YAG layer and alumina / YAG gradient layer can be obtained. Absent. On the other hand, 18
If the temperature exceeds 50 ° C., YAG is evaporated and abnormal grain growth of alumina occurs, and a uniform YAG layer cannot be obtained. The firing temperature is
1700-1800 degreeC is more preferable. In addition, a small amount of YAG composition may be contained in each of the alumina ceramics forming the alumina ceramics bonded body. Further, the yttrium compound is preferably added to the alumina powder in an amount of 1 to 5 wt% in terms of yttrium oxide (Y 2 O 3 ). By setting this ratio,
As mentioned above, a more suitable YAG layer and alumina.Y
An AG graded layer can be formed.
【００１３】[0013]
【発明の実施の形態】以下、本発明の実施の形態につい
て具体的な実施例及び比較例を参照して説明する。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to specific examples and comparative examples.
【００１４】〔実施例１〜３、比較例１，２〕先ず、Ａ
ｌ2Ｏ3粉末に、イットリウム化合物であるＹ（ＣＨ3Ｃ
ＯＯ）3・４Ｈ 2Ｏ（酢酸イットリウム・四水和物）をＹ
2Ｏ3換算で表１に示す割合となるように所要量ずつ添加
し水に混合して各種のスラリーを調製した後、各スラリ
ーに成形用バインダーを加えてスプレードライヤーにて
造粒し、各種の造粒粉末を得た。次に、各造粒粉末をそ
れぞれ９８．１ＭＰａ（１０００ｋｇｆ／ｃｍ2）の圧
力で加圧成形し、直方体状（１５×１５×３０ｍｍ）の
成形体とした後、１１００℃の温度で仮焼して各２本ず
つの仮焼体を得た。次いで、各２本の仮焼体の一端面を
平面研削し（Ｒａ５μｍ）、各２本の仮焼体同士の研削
面を合わせ、空気中において１７５０℃の温度で焼成
し、ＹＡＧ組成を含み、中心部から表面に向ってＹＡＧ
組成比の増大するアルミナ・ＹＡＧ傾斜層を有するアル
ミナセラミックス同士がＹＡＧ層を介して接合されてい
る各種のアルミナセラミックス接合体を得た。得られた
各アルミナセラミックス接合体から直方体状（４×３×
４０ｍｍ）の曲げ試験片を切り出し、室温、及び８００
℃の温度での４点曲げ強度測定を行ったところ、曲げ強
度は、それぞれ表１に示すようになった。又、各アルミ
ナセラミックス接合体のＹＡＧ層と傾斜層の厚みは、そ
れぞれ表１に示すようになった。[Examples 1 to 3, Comparative Examples 1 and 2] First, A
l2O3The powder contains Y (CH) which is an yttrium compound.3C
OO)3・ 4H 2O (yttrium acetate tetrahydrate) to Y
2O3Add the required amount so that the ratio shown in Table 1 is calculated.
After mixing with water and preparing various slurries,
With a spray dryer by adding a molding binder to the
Granulation was performed to obtain various types of granulated powder. Next, remove each granulated powder.
98.1 MPa (1000 kgf / cm each)2) Pressure
Pressure-molded by force, and in the shape of a rectangular parallelepiped (15 x 15 x 30 mm)
After forming into a molded body, calcining at a temperature of 1100 ° C removes each two
I got four calcined bodies. Then, put one end face of each of the two calcined bodies
Surface grinding (Ra 5 μm), grinding of 2 calcined bodies each
Face to face and fire in air at a temperature of 1750 ° C
However, YAG composition is included, and YAG goes from the center to the surface.
Al with an alumina / YAG graded layer of increasing composition ratio
Mina-ceramics are joined together via a YAG layer
Various alumina ceramics bonded bodies were obtained. Got
A rectangular parallelepiped shape (4 × 3 ×)
Bending test piece of 40 mm) is cut out, at room temperature and 800
When the 4-point bending strength was measured at a temperature of ℃,
The degrees are as shown in Table 1. Also, each aluminum
The thickness of the YAG layer and the graded layer of the ceramics bonded body is
The results are shown in Table 1.
【００１５】[0015]
【表１】 s[Table 1] s
【００１６】〔比較例３〕先ず、実施例と同様のＡｌ2
Ｏ3粉末を水に混合してスラリーを調製した後、スラリ
ー成形用バインダーを加えてスプレードライヤーにて造
粒し、造粒粉末を得た。次に、造粒粉末を９８．１ＭＰ
ａ（１０００ｋｇｆ／ｃｍ2）の圧力で加圧成形し、直
方体状（１５×１５×３０ｍｍ）の成形体とした後、空
気中において１７００℃の温度で焼成してから研削加工
し、直方体状（１０×１０×２０ｍｍ）のアルミナセラ
ミックス焼結体（被接合体）を得た。次いで、市販のホ
ウケイ酸ガラス粉末と水を１：１の割合で混合し、これ
にバインダーを添加して接合材ペーストを調製し、この
接合材ペーストを上述した２本のアルミナセラミックス
焼結体の端面（１０×１０ｍｍ）に塗布した後、ペース
ト塗布面を合わせ、１５００℃の温度で熱処理してアル
ミナセラミックス接合体を得た。得られたアルミナセラ
ミックス接合体から直方体状（４×３×４０ｍｍ）の曲
げ試験片を切り出し、室温、及び８００℃の温度での４
点曲げ強度測定を行ったところ、曲げ強度は、表１に示
すようになった。Comparative Example 3 First, Al 2 similar to that of the example
O 3 powder was mixed with water to prepare a slurry, a slurry forming binder was added, and the mixture was granulated with a spray dryer to obtain a granulated powder. Next, 98.1MP of granulated powder
After pressure molding at a pressure of a (1000 kgf / cm 2 ) to form a rectangular parallelepiped (15 × 15 × 30 mm) molded body, it is fired in air at a temperature of 1700 ° C. and then ground to form a rectangular parallelepiped ( An alumina ceramics sintered body (body to be bonded) having a size of 10 × 10 × 20 mm was obtained. Next, a commercially available borosilicate glass powder and water were mixed at a ratio of 1: 1 and a binder was added to the mixture to prepare a bonding material paste, and the bonding material paste was mixed with the above-mentioned two alumina ceramics sintered bodies. After coating the end faces (10 × 10 mm), the paste-coated faces were combined and heat-treated at a temperature of 1500 ° C. to obtain an alumina ceramics joined body. A rectangular parallelepiped-shaped (4 × 3 × 40 mm) bending test piece was cut out from the obtained alumina-ceramic bonded body, and was cut at room temperature and a temperature of 800 ° C. for 4 minutes.
When the point bending strength was measured, the bending strength was as shown in Table 1.
【００１７】〔比較例４〕先ず、比較例３と同様にして
直方体状（１０×１０×２０ｍｍ）のアルミナセラミッ
クス焼結体（被接合体）を得た。次に、ホウケイ酸ガラ
ス粉末７０ｗｔ％、Ａｌ2Ｏ3粉末２０ｗｔ％、及びＳｉ
Ｏ2粉末１０ｗｔ％の混合粉末を接合材とし、この混合
粉末を上述した２本のアルミナセラミックス焼結体の端
面（１０×１０ｍｍ）間に介装し、１５００℃の温度で
熱処理してアルミナセラミックス接合体を得た。得られ
たアルミナセラミックス接合体から直方体状（４×３×
４０ｍｍ）の曲げ試験片を切り出し、室温、及び８００
℃の温度での４点曲げ強度測定を行ったところ、曲げ強
度は、表１に示すようになった。Comparative Example 4 First, in the same manner as in Comparative Example 3, a rectangular parallelepiped (10 × 10 × 20 mm) alumina ceramics sintered body (bonded body) was obtained. Next, 70 wt% of borosilicate glass powder, 20 wt% of Al 2 O 3 powder, and Si
A mixed powder of 10 wt% of O 2 powder was used as a bonding material, and this mixed powder was interposed between the end faces (10 × 10 mm) of the above-mentioned two alumina ceramics sintered bodies and heat-treated at a temperature of 1500 ° C. to obtain the alumina ceramics. A joined body was obtained. A rectangular parallelepiped shape (4 x 3 x
Bending test piece of 40 mm) is cut out, at room temperature and 800
When the 4-point bending strength measurement was performed at a temperature of ° C, the bending strength was as shown in Table 1.
【００１８】表１から分かるように、本発明に係るアル
ミナセラミックス接合体は、高温でも高い接合強度を示
している。As can be seen from Table 1, the alumina ceramics bonded body according to the present invention exhibits high bonding strength even at high temperatures.
【００１９】[0019]
【発明の効果】以上説明したように、本発明のアルミナ
セラミックス接合体によれば、内部から表面に向ってＹ
ＡＧ組成比の増大するアルミナ・ＹＡＧ傾斜層を有する
アルミナセラミックス同士がＹＡＧ層を介して接合され
るので、アルミナセラミックスの有効な特性を有しつ
つ、かつ、従来に比べて特に高温での接合強度を高める
ことができる。一方、アルミナセラミックス接合体の製
造方法によれば、添加したイットリウム化合物が、焼成
過程でアルミナと反応してＹＡＧを生成し、更に焼成が
進むと、アルミナの焼成収縮により、ＹＡＧがアルミナ
の粒界を通って成形体又は仮焼体の内部から成形体又は
仮焼体の合わせ面及び表面へ押し出されて、移動距離の
違いからＹＡＧ濃度が高くなるアルミナ・ＹＡＧ傾斜層
及びＹＡＧ層が形成されるので、従来のように接合材の
調製や接合面への塗布等が不要となり、製造を容易に行
うことができる。As described above, according to the alumina-ceramics joined body of the present invention, Y from the inside toward the surface.
Since the alumina ceramics having the alumina / YAG gradient layer with an increased AG composition ratio are bonded to each other through the YAG layer, the alumina ceramics have the effective characteristics, and the bonding strength is especially high temperature as compared with the conventional one. Can be increased. On the other hand, according to the method for producing an alumina-ceramic bonded body, the added yttrium compound reacts with alumina in the firing process to generate YAG, and when firing is further advanced, the firing shrinkage of alumina causes YAG to become a grain boundary of alumina. Through the inside of the molded body or the calcined body to the mating surface and surface of the molded body or the calcined body, and an alumina / YAG gradient layer and a YAG layer having a high YAG concentration due to the difference in the moving distance are formed. Therefore, it is not necessary to prepare the bonding material and apply it to the bonding surface as in the conventional case, and the manufacturing can be easily performed.
Claims (4)
てＹＡＧ組成比の増大するアルミナ・ＹＡＧ傾斜層を有
するアルミナセラミックス同士がＹＡＧ層を介して接合
されていることを特徴とするアルミナセラミックス接合
体。1. Alumina-ceramic bonding, characterized in that alumina ceramics containing a YAG composition and having an alumina / YAG gradient layer whose YAG composition ratio increases from the inside toward the surface are joined together via the YAG layer. body.
ルミナ・ＹＡＧ傾斜層の厚みが３０〜２００μｍである
ことを特徴とする請求項１記載のアルミナセラミックス
接合体。2. The alumina ceramics bonded body according to claim 1, wherein the YAG layer has a thickness of 5 to 50 μm, and the alumina / YAG gradient layer has a thickness of 30 to 200 μm.
２μｍ以上の厚みのＹＡＧ層で覆われていることを特徴
とする請求項１又は２記載のアルミナセラミックス接合
体。3. The alumina ceramics bonded body according to claim 1, wherein the entire surface of the alumina ceramics is covered with a YAG layer having a thickness of 2 μm or more.
合物からなる造粒粉末を成形して成形体とし、成形体又
はその８００〜１３００℃の温度での仮焼体の接合部同
士を合わせ、空気、還元雰囲気又は真空中において１６
００〜１８５０℃の温度で焼成することを特徴とするア
ルミナセラミックス接合体の製造方法。4. A granulated powder comprising alumina powder and a required amount of yttrium compound is molded into a molded body, and the molded body or the joints of the calcined body at a temperature of 800 to 1300 ° C. are joined together, and air, 16 in reducing atmosphere or vacuum
A method for manufacturing an alumina ceramics joined body, which comprises firing at a temperature of 00 to 1850 ° C.
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|---|---|---|---|
| JP2001235178A JP2003048783A (en) | 2001-08-02 | 2001-08-02 | Alumina ceramics joined body and method for manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001235178A JP2003048783A (en) | 2001-08-02 | 2001-08-02 | Alumina ceramics joined body and method for manufacturing the same |
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| Publication Number | Publication Date |
|---|---|
| JP2003048783A true JP2003048783A (en) | 2003-02-21 |
Family
ID=19066668
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|---|---|---|---|
| JP2001235178A Withdrawn JP2003048783A (en) | 2001-08-02 | 2001-08-02 | Alumina ceramics joined body and method for manufacturing the same |
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| Country | Link |
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| JP (1) | JP2003048783A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006017191A3 (en) * | 2004-07-12 | 2006-09-08 | Gen Electric Compagny | Ceramic bonding composition, method of making, and article of manufacture incorporating the same |
| US7215898B2 (en) | 2003-10-01 | 2007-05-08 | Brother Kogyo Kabushiki Kaisha | Apparatus for forming multi-color image with control of unintended reverse-transfer of developer image onto photoconductor |
| US7943241B2 (en) | 2004-11-29 | 2011-05-17 | Kyocera Corporation | Composite ceramic body |
| CN104326501A (en) * | 2014-10-21 | 2015-02-04 | 李金平 | Method for synthesizing yttrium aluminum garnet nano powder |
| JP2015150574A (en) * | 2014-02-13 | 2015-08-24 | 日立金属株式会社 | Ceramic sintered body manufacturing method and ceramic sintered body |
| US10040116B2 (en) | 2014-02-13 | 2018-08-07 | Hitachi Metals, Ltd. | Method of manufacturing ceramic sintered body and ceramic sintered body |
| WO2020173151A1 (en) * | 2019-02-26 | 2020-09-03 | 中国科学院上海硅酸盐研究所 | Method for preparing amorphous oxide ceramic composite coating simultaneously having toughness, thermal conductivity and high-temperature structural stability |
-
2001
- 2001-08-02 JP JP2001235178A patent/JP2003048783A/en not_active Withdrawn
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7215898B2 (en) | 2003-10-01 | 2007-05-08 | Brother Kogyo Kabushiki Kaisha | Apparatus for forming multi-color image with control of unintended reverse-transfer of developer image onto photoconductor |
| US8005387B2 (en) | 2003-10-01 | 2011-08-23 | Brother Kogyo Kabushiki Kaisha | Apparatus for forming multi-color image with control of unintended reverse-transfer of developer image onto photoconductor |
| WO2006017191A3 (en) * | 2004-07-12 | 2006-09-08 | Gen Electric Compagny | Ceramic bonding composition, method of making, and article of manufacture incorporating the same |
| US7943241B2 (en) | 2004-11-29 | 2011-05-17 | Kyocera Corporation | Composite ceramic body |
| JP2015150574A (en) * | 2014-02-13 | 2015-08-24 | 日立金属株式会社 | Ceramic sintered body manufacturing method and ceramic sintered body |
| US10040116B2 (en) | 2014-02-13 | 2018-08-07 | Hitachi Metals, Ltd. | Method of manufacturing ceramic sintered body and ceramic sintered body |
| CN104326501A (en) * | 2014-10-21 | 2015-02-04 | 李金平 | Method for synthesizing yttrium aluminum garnet nano powder |
| WO2020173151A1 (en) * | 2019-02-26 | 2020-09-03 | 中国科学院上海硅酸盐研究所 | Method for preparing amorphous oxide ceramic composite coating simultaneously having toughness, thermal conductivity and high-temperature structural stability |
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