JP4601136B2 - Corrosion resistant material - Google Patents

Description

【００５１】
表１から明らかなように、アルミナ質焼結体から成るセラミック基材と、ＹＡＧ（イットリウム・アルミニウム・ガーネット）、イットリアおよびスピネルのいずれか１種を主成分とする焼結体から成る耐食材と、セラミック基材と耐食材との間に配置されるセラミック基材成分と耐食材成分とを含有する焼結体から成る複数の中間層とを、セラミック基材成形体上に複数の中間層成形体および耐食材成形体を順次成形して形成した複合成形体を焼成することによって接合して成り、セラミック基材とセラミック基材に接する中間層との間、耐食材と耐食材に接する中間層との間およびそれぞれが接する中間層間の熱膨張係数差が０．９ｐｐｍ／℃以下である本発明の実施例（試料Ｎｏ．４〜１２）の場合、セラミック基材と中間層、耐食材と中間層およびそれぞれが接する中間層間の接合が強いこと、セラミック基材とセラミック基材に接する中間層との間、耐食材と耐食材に接する中間層との間およびそれぞれが接する中間層間の熱膨張係数差が非常に小さいことから、セラミック基材と耐食材とは極めて強固に接合されており、熱サイクルが繰り返し印加されたとしても耐食材がセラミック基材より剥離することはなく、長期間の使用に供することができる。
【００５２】
また、本発明の実施例の試料は、耐食材の相対密度が９８％以上で、且つエッチングレートが０．４８（Å／ｍｉｎ）以下であり、極めて耐食性に優れていることから、耐食材の消耗が少なく長期間の使用に供することができる。
【００５３】
これに対し、セラミック基材に耐食材を溶射やＣＶＤで被着させた従来例（試料Ｎｏ．１３、１４）は、セラミック基材と耐食材の接合が弱く、且つ熱膨張係数差が大きいことから、熱サイクルの印加が３０回未満で耐食材がセラミック基材より剥離してしまい、長期間の使用に供することができないことがわかる。
【００５４】
また、従来品（試料Ｎｏ．１３、１４）は、エッチングレートが０．８７（Å／ｍｉｎ）以上で耐食性に劣り、短期間に消耗してしまうことがわかった。
【００５５】
【発明の効果】
本発明の耐食性部材によれば、アルミナ質焼結体から成るセラミック基材と、ＹＡＧ（イットリウム・アルミニウム・ガーネット），イットリアおよびスピネルのいずれか１種を主成分とする焼結体から成る耐食材と、セラミック基材と耐食材との間に配置されるセラミック基材成分と耐食材成分とを含有する焼結体から成る複数の中間層とを、セラミック基材成形体上に複数の中間層成形体および耐食材成形体を順次成形して形成した複合成形体を焼成することによって接合して成り、セラミック基材とセラミック基材に接する中間層との間、耐食材と耐食材に接する中間層との間およびそれぞれが接する中間層間の熱膨張係数差が０．９ｐｐｍ／℃以下であることから、セラミック基材と耐食材とが中間層を介して強固に接合されているとともに、熱膨張係数差に起因する熱応力の発生が抑制されているので、これによって耐食性部材に使用時の熱が印加されたとしても耐食材がセラミック基材より剥離することはなく、耐食性部材を常に安定して使用することができる。
【００５６】
また、本発明の耐食性部材によれば、耐食材の相対密度が９８％以上であるときには、開気孔の存在がほとんどなくなって、耐食性が極めて優れたものとなる。
【００５７】
さらに、本発明の耐食性部材によれば、耐食材の厚みが２００μｍ以上であるときには、耐食材の消耗に時間を要することから、長期間の使用に供することが可能となる。
【図面の簡単な説明】
【図１】 本発明の耐食性部材の実施の形態の一例を示す斜視図である。
【図２】 本発明の耐食性部材を備えたエッチング装置内部の概略図である。
【符号の説明】
１：耐食性部材
２：セラミック基材
３：耐食材
４：中間層
５：チャンバー
６：フォーカスリング
７：下部電極
８：ウエハー
９：誘導コイル[0001]
BACKGROUND OF THE INVENTION
The present invention, fluorine-based, high corrosion resistance is required to corrosive gas or its plasma chlorine-based or the like, for example, a plasma processing apparatus for use in manufacturing semiconductor devices, the inner wall material in the film-forming apparatus, The present invention relates to a corrosion-resistant member suitable for a jig such as a support member that supports a Si substrate.
[0002]
[Prior art]
In recent years, the use of plasma, such as dry etching processes and plasma coating in semiconductor manufacturing, has been progressing rapidly. For example, in semiconductor manufacturing processes, halogen-based corrosive gases such as fluorine and chlorine are frequently used in plasma processes, particularly for deposition , etching, and cleaning because of their high reactivity.
[0003]
Further, in a portion in contact with the halogen-based corrosive gas and its plasma of the inner wall or the like in the apparatus, in order to prevent corrosion caused by halogen-based corrosive gas or plasma thereof, consisting of conventional or Raa Rumi na sintered body periodic table group 2a or group 3a corrosion member from element compound is bonded to formed Ru corrosion resistant material is used on the surface of the ceramic substrate.
[0004]
Such a corrosion-resistant member is generally applied to the Group 2a or Group 3a element compound thermal spraying, CVD method by 20~100μm thickness on the surface of the ceramic substrate consisting of A Rumi Na sintered body It is formed by letting.
[0005]
[Problems to be solved by the invention]
However, corrosion-resistant member being for slave alkoxy may be a corrosion-resistant material made of A Rumi the Group 2a of the periodic table by thermal spraying or CVD on the surface of the ceramic substrate consisting of Na sintered body or an element of the group 3a compound In the case of being formed, the relative density of the corrosion resistant material is about 90%, and the maximum is about 95%, and it has a problem that the corrosion resistance is insufficient because it has many open pores.
[0006]
Further, the corrosion-resistant material deposited on the ceramic substrate surface by a method such as thermal spraying or CVD is consumed in a short time because its thickness is as thin as about 20 to 100 μm, and as a result , it can be used for a long time. It also had the problem of not.
[0007]
In addition, if the corrosion-resistant material was deposited by the method of thermal spraying, CVD or the like on the ceramic substrate surface, it is low adhesion between the ceramic substrate and the corrosion resistant material, the thermal expansion between the ceramic substrate and the corrosion resistant material since such that there is difference in the coefficient, the heat is applied to the ceramic substrate and the corrosion resistant material in use, the thermal stress is generated due to the thermal expansion coefficient difference therebetween between the ceramic substrate and the corrosion resistant material , a problem that in the corrosion-resistant material is accidentally easily peeled off from the ceramic substrate surface resulting in loss of function as a corrosion resistant member is also had by this thermal stress.
[0008]
The present invention has been devised in view of the above-mentioned problems, and its purpose is to strongly bond a thick corrosion-resistant material having a high relative density to the surface of the ceramic base material and to provide it for a long time use. It is in providing the corrosion-resistant member which can be performed.
[0009]
[Means for Solving the Problems]
Corrosion resistant member of the present invention, a ceramic substrate made of alumina sintered body, YAG (yttrium aluminum garnet), and corrosion-resistant material made of a sintered body mainly composed of any one of yttria and spinel, and a plurality of intermediate layers made of a sintered body containing a ceramic base material component and corrosion-resistant material component is disposed between the ceramic substrate and the corrosion-resistant material, a plurality of intermediate layers on the ceramic substrate molded body on become joined by firing compacts and corrosion-resistant material formed body sequentially molded to form composite compacts, between the intermediate layer in contact with said ceramic substrate and said ceramic substrate, said corrosion resistant material and said in which the thermal expansion coefficient difference between the intermediate layers respectively between and is in contact with the intermediate layer in contact with the corrosion resistant material is equal to or less than 0.9 ppm / ° C..
[0010]
Further, corrosion-resistant member of the present invention are preferably those that relative density of the corrosion-resistant material is characterized in that 98% or more.
[0011]
In addition, corrosion resistant member of the present invention are preferably those wherein the thickness of the corrosion resistant material is 200μm or more.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail.
[0013]
Figure 1 is a Ru perspective view showing an example of implementation in the form of a corrosion-resistant member of the present invention. The corrosion-resistant member 1 includes a ceramic substrate 2 made of an alumina sintered body, a corrosion-resistant material 3 made of a sintered body mainly composed of any one of YAG (yttrium, aluminum, garnet), yttria, and spinel. , three intermediate layers 4a comprising a sintered body containing a ceramic base material component and corrosion-resistant material component is disposed between the ceramic substrate 2 and the corrosion resistant member 3, 4b, and 4c, the ceramic substrate molded forming Ru and joined by baking a plurality of intermediate layers compacts and composite compacts formed by sequentially forming a corrosion-resistant material formed body on the body.
[0014]
Ceramic substrate 2 is made of A Rumi Na sintered body or the like, which is a base material for Taseru lifting strength and toughness and corrosion resistance member 1, chipping at the time of installation at or cleaning of the semiconductor manufacturing apparatus Prevents cracking.
[0015]
Ceramic substrate 2, the three-point bending strength is more than 150 MPa, the fracture toughness keep shall be 2 MPa · √m or higher, the mechanical strength of the corrosion resistant member 1 is better, to a semiconductor manufacturing device or the like mounting only chipping or cracking or the like when it is possible to effectively prevent occurrence. Therefore, ceramic substrate 2, the three-point bending strength 150MPa or more, fracture toughness it is preferable to a 2 MPa · √m or higher.
[0016]
Furthermore, ceramic substrate 2 and keep the purity of the alumina and 95 mass% or more, when used in a semiconductor manufacturing device or the like as a corrosion resistant member 1, affect the properties of the semiconductor element impurities are mixed into the semiconductor element It can effectively prevent giving. Therefore, the ceramic substrate 2 made of A Rumi Na sintered body is preferably a purity alumina keep the 95 mass% or more.
[0017]
Resistant ingredients 3, Y AG (yttrium aluminum garnet), Ru yttria, from sintered material mainly composed of any one of spinel formed.
[0018]
Y AG, yttria, corrosion resistant material 3 made of a sintered body mainly composed of any one of spinel Le _{is, SF 6, CF 4, CHF} 3, ClF 3, NF 3, C4F 8, fluorine-based, such as HF Against halogen-based corrosive gases such as gases, chlorine-based gases such as Cl ₂ , HCl , BCl ₃ and CCl ₄ , or bromine-based gases such as Br ₂ , HBr and BBr ₃ , and plasmas of these halogen-based corrosive gases By having excellent corrosion resistance and being used in a semiconductor manufacturing apparatus or the like, it is possible to effectively prevent the wall material or the like of the semiconductor manufacturing apparatus from being corroded.
[0019]
Resistant ingredients 3 YAG (yttrium aluminum garnet), because it is formed of a sintered body mainly composed of any one of yttria and spinel, the relative density of the corrosion resistant material 3 and 98% it can, if the relative density of the resistance foodstuffs 3 98%, and that the presence of open pores corrosion resistance was extremely excellent almost gone. Therefore, the relative density of resistant ingredients 3 it is preferable to 98% or more.
[0020]
Also, resistant ingredients 3, YAG (yttrium aluminum garnet), any one of yttria and spinel because it is formed of a sintered body composed mainly, and more 200μm thickness of corrosion-resistant material 3 If the thickness of the corrosion-resistant material 3 is 200 μm or more , it takes time for the corrosion-resistant material 3 to be consumed, so that it can be used for a long time.
[0021]
Multiple intermediate layer 4a, 4b, 4c are both each are formed of a sintered body containing a ceramic base material 2 component and corrosion resistant material 3 component, the ceramic substrate 2 and the corrosion resistant member 3 bondability rather good, and each intermediate layer 4a respect, 4b, also from good Ikoto bondability between 4c, a corrosion resistant material 3 intermediate layer 4a, 4b, very tightly to the ceramic substrate 2 through 4c It becomes possible to join.
[0022]
Moreover, middle-layer 4a is ceramic substrate 2 and the contact, the thermal expansion coefficient difference between the ceramic substrate 2 is not more than 0.9 ppm / ° C., the intermediate layer 4c is in contact with corrosion resistant material 3, the corrosion resistant material 3 difference of thermal expansion coefficient of not more than 0.9 ppm / ° C., while layer 4a in one且, inter 4b, the intermediate layer 4b, the thermal expansion coefficient difference between 4c also below 0.9 ppm / ° C.. Therefore, the ceramic substrate 2 heat is applied to the corrosion-resistant member 1 during use, corrosion resistant material 3 and the intermediate layers 4a, 4b, in each of 4c as heat is applied, between the middle and the ceramic substrate 2 layers between 4a, between the middle-layer 4c and the corrosion resistant member 3, an intermediate layer 4a, inter 4b, not the intermediate layer 4b, a large thermal stress between 4c occurs, the result, corrosion resistant material 3 ceramic group Peeling from the material 2 is effectively prevented, and the corrosion-resistant member 1 can be used more stably.
[0023]
Incidentally, the difference in thermal expansion coefficient between the ceramic substrate 2 and the intermediate layer 4a is that exceed 0.9 ppm / ° C., and the ceramic substrate 2 and the intermediate layer 4a when heat is applied to the corrosion-resistant member 1 Peeling occurs between the two. Thus, Se difference in thermal expansion coefficient between the ceramic substrate 2 and the intermediate layer 4a is Ru important not more than 0.9 ppm / ° C..
[0024]
Also, when it comes to that the difference in thermal expansion coefficient between the resistance ingredients 3 and the intermediate layer 4c exceeds 0.9 ppm / ° C., when the corrosion resistance member 1 heat is applied between the corrosion resistant material 3 and the intermediate layer 4c Peeling will occur. Thus, the thermal expansion coefficient difference between the resistance ingredients 3 and the intermediate layer 4c is Ru important not more than 0.9 ppm / ° C..
[0025]
In addition, middle-layer 4a, 4b, when 4c is assumed that the thermal expansion coefficient difference between adjacent intermediate layers exceeds 0.9 ppm / ° C., peeling the adjacent intermediate layers occurs. Therefore, middle-layer 4a, 4b, 4c is Ru important that the thermal expansion coefficient difference of the intermediate layers is less than 0.9 ppm / ° C. As the adjacent.
[0026]
Next, a specific manufacturing how the anti-corrosion member 1.
[0027]
Also not a ceramic substrate 2, the corrosion resistant material 3 and the intermediate layer 4a, 4b, to, prepare raw material powder becomes 4c.
[0028]
(Manufactured by adjusting the raw material for the ceramic substrate)
Silicon oxide as a sintering aid to aluminum oxide as a main component, magnesium oxide, paraffin wax oxide calcium, and the like to the raw material powder which contains 0.1 to 10 mass%, wax emulsion (wax + emulsifier), PVA ( polyvinyl alcohol), after mixing by adding a desired organic binder such PEG (polyethylene glycol), it is made by adjusting the raw material was granulated by spray drying.
[0029]
(Produced by tone of raw materials for corrosion-resistant material)
After mixing aluminum oxide powder and yttria powder in the ratio of the following formula and calcining at 1000-1600 ° C., they are pulverized to have an average particle size of 0.6-1.2 μm and a BET specific surface area of 2-5 m. ² / g YAG powder is prepared .
[0030]
A + B = 1
0.365 ≦ A ≦ 0.385
0.615 ≦ B ≦ 0.635
A: molar amount of yttria B: molar amount of aluminum oxide Next, a desired organic binder such as paraffin wax , PVA (polyvinyl alcohol) , wax emulsion (wax + emulsifier) , PEG (polyethylene glycol), etc. is added to this YAG powder. after mixing and, to, prepare raw material was granulated by spray drying.
[0031]
(Produced by tone of raw materials for the intermediate layer)
The above-mentioned ceramic substrate material for a corrosion-resistant material for a raw material by mixing the desired One not a volume percent added to adjust the raw material for the intermediate layer.
[0032]
Next, it shape | molds to a predetermined shape by metal mold | die molding using each above-mentioned raw material. The molding using a die press, first pressed with a constant pressure after filling the raw material for ceramic substrates in the mold press forming machine to form a ceramic substrate molded body. Next , the intermediate layer raw materials for forming the intermediate layers 4a , 4b , and 4c are sequentially filled on the ceramic base material molded body, and each of the raw materials is pressed with a certain pressure, and a plurality of the raw materials are formed on the ceramic base material molded body . forming a middle-layer molded article, which was a corrosion-resistant material shaped body formed in the intermediate layer formed body on the pressing at a predetermined pressure to fill the raw material for corrosion-resistant material middle tier moldings on further, whereby ceramic substrate molded body to obtain a composite molded article composed of the intermediate layer formed body and the corrosion-resistant molded article.
[0033]
Then , the composite molded body is degreased at 300 to 600 ° C. as necessary, and then fired at about 1500 to 1750 ° C. in an air atmosphere to obtain a ceramic base 2 made of an alumina sintered body , YAG ( yttrium aluminum garnet), and corrosion resistant material 3 comprising any one of yttria and a spinel sintered body composed mainly found intermediate layer 4a, 4b, the corrosion resistance member 1 which is bonded via the 4c Complete.
[0034]
In this case, the thickness of the resistant ingredients 3, the thickness by adjusting the filling amount of the raw material for the corrosion-resistant material can be the 200 [mu] m or more, the thickness of the resistance ingredients 3 When more than 200 [mu] m, the consumption of the corrosion resistant material 3 Since it takes time, it can be used for a long time.
[0035]
Incidentally, the resistance ingredients 3 has a thickness less than 200 [mu] m, a uniform thickness of the corrosion resistant material 3 on the intermediate layer 4c, and it is difficult to form a surface of the intermediate layer 4c to fully cover, the anti-corrosion member 1 There is a risk that the corrosion resistance will deteriorate. When the thickness of the corrosion-resistant material 3 exceeds 30 mm, the organic binder contained in the corrosion-resistant material is completely degreased when the corrosion-resistant material is baked to form the sintered corrosion-resistant material 3. it becomes difficult, there is a danger that weaken the mechanical strength of the corrosion-resistant material 3. Thus, resistant food 3 is preferably to keep the thickness thereof or 200 [mu] m, more preferably not good to leave the range of 200Myuemu～30mm.
[0036]
Such a corrosion-resistant member 1 can be suitably used for an inner wall material (chamber), a microwave introduction window , a focus ring and the like of a semiconductor manufacturing apparatus or the like . For example, Oite the etching apparatus shown in FIG. 2, by injecting a halogen-based corrosive gas into the chamber 5, to mark pressurized RF power gas into plasma in the induction coil 9 is wound around to generate a bias applied RF power as well to the lower electrode 7, the desired etching plasma in the focus ring 6 c d Ha 8 collected in the vicinity are rope lines. Plasma generated in the present apparatus, for contacting the chamber 5 and full Okasuringu 6, these components are particularly susceptible to corrosion. So equipped with excellent corrosion resistance by forming a chamber 5 and the focus ring 6 in corrosion-resistant member of the present invention, that the attachment only time or chipping during cleaning or fractures may occur can be prevented.
[0037]
It should be noted that the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the gist of the present invention. For example, in the above-described embodiments, the intermediate layer has three layers. one of was formed in the layer, but even in two layers, but it may also be a four or more layers.
[0038]
【Example】
Next, examples of the present invention will be described.
Example 1
( Raw material for ceramic substrate )
Average particle diameter of 1~15μm as a main component, the purity of 95 to 99 mass% of aluminum oxide, silicon oxide as a sintering aid _(SiO 2), magnesium oxide (MgO) and calcium oxide (CaO) containing, polyvinyl alcohol (PVA) as an organic binder, was added and mixed, respectively polyethylene glycol (PEG) and wax emulsion were, prepare granulated with material by a spray drying.
[0039]
( Raw material for corrosion resistant materials )
One of YAG (yttrium, aluminum, garnet) , yttria (Y ₂ O ₃ ) and spinel (MgOAl ₂ O ₃ ) as a main component is added with cerium oxide (CeO) as a sintering aid, and PVA , PEG as organic binders and after adding and mixing a wax emulsion were, prepare granulated with the material in spray drying.
[0040]
( Raw material for intermediate layer )
The raw material and the raw material for the corrosion-resistant material for a ceramic substrate was added and mixed in proportions shown in Table 1, and the raw material for the intermediate layer was made of tone.
[0041]
Next, a ceramic substrate at a die press forming raw material, and successively molded using an intermediate layer material and material for corrosion-resistant material, each of a diameter of 30 mm, Thickness is 2mm ceramic substrate molded body, to obtain a composite molded article composed of the intermediate layer formed body and the corrosion-resistant molded article.
[0042]
Then, degreased 2 hours double synthetic form at 350 ° C., the ceramic substrate was fired for 5 hours at 1500-1750 ° C., each corrosion-resistant member sample intermediate layer and the corrosion-resistant material consists of components shown in Table 1 Produced.
[0043]
Further, the conventional example and to the ceramic substrate (diameter 30mm, is 5mm Thickness) consisting of A Rumi Na sintered body on the corrosion-resistant material consisting mainly of YAG, and 1mm are Thickness in 30mm diameter It becomes so were fabricated spraying or sample formed by CVD (sample No.13,14).
[0044]
In addition, the relative density of the corrosion resistant material of each sample was calculated | required by following Formula.
[0045]
(Sintering density / theoretical density) × 100 = relative density (%)
In addition, the ceramic base material of each sample, the thermal expansion coefficient of the intermediate layer and the corrosion-resistant material, was measured in accordance with JIS R 1618 (measuring range, room temperature to 1500 ° C.).
[0046]
And in order to evaluate the joining state of each sample , the thermal cycle (room temperature-1400 degreeC) was repeatedly applied to each sample, and what applied the heat cycle to less than 20 times and the corrosion-resistant material peeled from the ceramic base material is XX. What peeled less than 20-30 times was set to x, what peeled less than 90 times was set to (circle), and what was not peeled even 100 times was set to (double-circle).
[0047]
Next, in order to evaluate the corrosion resistance of each sample, the corrosion resistant material of each sample was made into a mirror surface by lapping and set in a RIE (Reactive Ion Etching) apparatus, and exposed to plasma in a Cl ₂ gas atmosphere for 3 hours. It was calculated etching rate per minute from the decrease of the quality of corrosion resistant material.
[0048]
The numbers in this etching rate, and the reference sample purity 99.9 mass% of sintered aluminum oxide, shows the relative comparison value upon the etching rate and 1.
[0049]
The evaluation results are shown in Table 1.
[0050]
[Table 1]

[0051]
As is apparent from Table 1, a ceramic base material made of an alumina sintered body , and a corrosion-resistant material made of a sintered body mainly containing any one of YAG (yttrium, aluminum, garnet), yttria and spinel, and a plurality of intermediate layers made of a sintered body containing a ceramic base material component and corrosion-resistant material component is disposed between the ceramic substrate and the corrosion resistant material, a plurality of intermediate layers formed on the ceramic substrate molded body on become bonded by baking the body and corrosion-resistant material formed body sequentially molded to form composite compacts, between the intermediate layer in contact with the ceramic substrate and the ceramic substrate, an intermediate in contact with the corrosion-resistant material and resistant ingredients the embodiment of the present invention that the thermal expansion coefficient difference of the intermediate layers each beauty contact between Oyo the layer is less than 0.9 ppm / ° C. (sample Nanba4～12), ceramic substrate and the intermediate layer, resistance Foodstuff And that the bonding of the intermediate layers each intermediate layer and is in contact is strong, between the intermediate layer in contact with the ceramic substrate and the ceramic substrate, respectively between and the intermediate layer in contact with the corrosion-resistant material and resistant ingredients Because the thermal expansion coefficient difference between the contacting interlayers is very small, the ceramic substrate and the corrosion-resistant material are extremely firmly bonded , and the corrosion-resistant material is peeled off from the ceramic substrate even when repeated thermal cycles are applied. It can be used for a long time.
[0052]
Also, samples of Examples of the present invention is the relative density of the corrosion-resistant material is 98% or more, and the etching rate is at 0.48 (Å / min) or less, since it is very excellent in corrosion resistance, the corrosion-resistant material There is little consumption and it can be used for a long time.
[0053]
On the other hand, in the conventional examples (sample Nos. 13 and 14) in which the corrosion-resistant material is deposited on the ceramic substrate by thermal spraying or CVD, the ceramic substrate and the corrosion-resistant material are weakly bonded and the difference in thermal expansion coefficient is large. Thus, it can be seen that when the heat cycle is applied less than 30 times, the corrosion-resistant material peels off from the ceramic base material and cannot be used for a long time.
[0054]
Further, conventional (Sample Nanba13,14), the etching rate is inferior in corrosion resistance at 0.87 (Å / min) or more, it was found that would exhausted in a short period of time.
[0055]
【The invention's effect】
According to corrosion resistant member of the present invention, a ceramic substrate made of alumina sintered body, YAG (yttrium aluminum garnet), Ru formed of a sintered body mainly composed of any one of yttria and spinel resistant ingredients and, a plurality of intermediate layers Ru formed of a sintered body containing a ceramic base material component and corrosion-resistant material component is disposed between the ceramic substrate and the corrosion resistant material, the plurality of ceramic substrates formed body on become joined by firing the intermediate layer formed body and the corrosion-resistant material formed body sequentially molded to form composite compacts, between the intermediate layer in contact with the ceramic substrate and the ceramic substrate, corrosion materials and anti ingredients during Oyo thermal expansion coefficient difference of the intermediate layers each beauty is in contact is less than 0.9 ppm / ° C. this Toka et the intermediate layer, and the ceramic substrate and the corrosion resistant material is firmly bonded through the intermediate layer in contact with the Ru Tei In addition , since the occurrence of thermal stress due to the difference in thermal expansion coefficient is suppressed, even when heat during use is applied to the corrosion-resistant member, the corrosion-resistant material does not peel from the ceramic substrate, and the corrosion-resistant member Can always be used stably.
[0056]
Further, according to the corrosion resistance member of the present invention, when the relative density of the corrosion-resistant material is 98% or more, the presence of open pores is almost gone and corrosion extremely excellent.
[0057]
Furthermore, according to the corrosion resistance member of the present invention, when the thickness of the corrosion resistant material is 200μm or more, it takes time to exhaustion of the corrosion-resistant material, it is possible to provide a long-term use.
[Brief description of the drawings]
1 is a perspective view showing an example of implementation in the form of a corrosion-resistant member of the present invention.
FIG. 2 is a schematic view of the inside of an etching apparatus provided with the corrosion-resistant member of the present invention.
[Explanation of symbols]
1: Corrosion-resistant member 2: Ceramic substrate 3: Corrosion-resistant material 4: Intermediate layer 5: Chamber 6: Focus ring 7: Lower electrode 8: Wafer 9: Induction coil

Claims (3)

Wherein a ceramic substrate made of alumina sintered body, YAG (yttrium aluminum garnet), and corrosion-resistant material made of any one of yttria and a spinel sintered body mainly composed, and the ceramic base material resistant and a plurality of intermediate layers made of a sintered body containing a ceramic base material component and corrosion-resistant material component is disposed between the food, a plurality of intermediate layers compacts and corrosion-resistant material molded body into a ceramic substrate formed body on become joined by firing sequentially molded to form a composite molded article, between the intermediate layer in contact with said ceramic substrate and said ceramic substrate, said intermediate layer in contact with the corrosion-resistant material and resistant ingredients corrosion-resistant member characterized by difference in thermal expansion coefficient between and respectively contact the intermediate layers is not more than 0.9 ppm / ° C. with. The corrosion-resistant member according to claim 1, wherein the corrosion-resistant material has a relative density of 98% or more. The corrosion-resistant member according to claim 1 or 2, wherein the corrosion-resistant material has a thickness of 200 µm or more.

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