JP2003037136A - Method of manufacturing tab tape and laminated film for tab tape - Google Patents

Method of manufacturing tab tape and laminated film for tab tape

Info

Publication number
JP2003037136A
JP2003037136A JP2001221868A JP2001221868A JP2003037136A JP 2003037136 A JP2003037136 A JP 2003037136A JP 2001221868 A JP2001221868 A JP 2001221868A JP 2001221868 A JP2001221868 A JP 2001221868A JP 2003037136 A JP2003037136 A JP 2003037136A
Authority
JP
Japan
Prior art keywords
adhesive layer
tab tape
film
metal foil
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001221868A
Other languages
Japanese (ja)
Other versions
JP3854479B2 (en
Inventor
Hideaki Okumura
秀明 奥村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tomoegawa Co Ltd
Original Assignee
Tomoegawa Paper Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tomoegawa Paper Co Ltd filed Critical Tomoegawa Paper Co Ltd
Priority to JP2001221868A priority Critical patent/JP3854479B2/en
Priority to KR10-2002-0042719A priority patent/KR100485270B1/en
Priority to TW091116220A priority patent/TWI226652B/en
Publication of JP2003037136A publication Critical patent/JP2003037136A/en
Application granted granted Critical
Publication of JP3854479B2 publication Critical patent/JP3854479B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/50Tape automated bonding [TAB] connectors, i.e. film carriers; Manufacturing methods related thereto
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/12Interconnection of layers using interposed adhesives or interposed materials with bonding properties
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2203/00Applications of adhesives in processes or use of adhesives in the form of films or foils
    • C09J2203/326Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a method of manufacturing a TAB tape, which has a simple manufacturing process, high-productivity, small consumption of protective film for adhesive agent, and can achieve low cost. SOLUTION: The method of manufacturing the TAB tape has peeling process where the protective film 14 is peeled off from a laminated film 11 having metal foil 12 and an adhesive agent layer 13 formed on the metal foil 12, to which the protective film 14 for protecting the adhesive agent layer is adhered, laminating process where the adhesive agent layer 13 of the laminated film 11 attached with the protective film and an insulating film 15 wider than the adhesive agent layer 13 are adhered with each other such that both end portions 20 of the insulating film 15 do not overlap the adhesive agent layer 13, sprocket hole forming process where sprocket holes 16 are formed on the both end portions 20 of the insulating film 15, and wiring pattern forming process where the metal foil 12 is etched to form a wiring pattern.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、半導体パッケージ
を実装する際に使用されるTABテープの製造方法およ
びTABテープ用積層フィルムに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a TAB tape used for mounting a semiconductor package and a laminated film for a TAB tape.

【0002】[0002]

【従来の技術】半導体パッケージを実装する際、テープ
オートメーテッドボンディング方式(TAB方式)で行
うことがあり、このTAB方式では、絶縁層と接着剤層
と配線層とを有して構成されるTABテープが使用され
る。このようなTABテープの製造方法としては、例え
ば、特開平9−162245号公報、特開平9−186
202号公報などに記載されている。
2. Description of the Related Art When a semiconductor package is mounted, a tape automated bonding method (TAB method) is sometimes used. In this TAB method, a TAB having an insulating layer, an adhesive layer and a wiring layer is formed. Tape is used. As a method of manufacturing such a TAB tape, for example, JP-A-9-162245 and JP-A-9-186 are known.
No. 202, etc.

【0003】特開平9−162245号公報記載のTA
Bテープについて、図3を参照しながら説明する。な
お、図3は、TABテープを長手方向に切断したときの
断面図である。このTABテープは、基材となる絶縁テ
ープ21と接着剤層22とが同じ幅で積層されており、
この絶縁テープ21と接着剤層22とを穿孔して、スプ
ロケット孔23を設け、接着剤層22の上に、めっき2
4が施された配線25を有している。ところが、このよ
うなTABテープは、スプロケット孔23が基材21だ
けでなく、接着剤層22にまで形成されているので、T
ABテープを搬送する際に、スプロケットロールのピン
をスプロケット孔23に挿入すると、接着剤層22にピ
ンが接触し、ピンと接着剤層22とが接着することがあ
った。ピンと接着剤層22とが接着すると、抵抗とな
り、TABテープの搬送が不良となることがあった。
TA described in Japanese Patent Application Laid-Open No. 9-162245
The B tape will be described with reference to FIG. Note that FIG. 3 is a cross-sectional view of the TAB tape cut in the longitudinal direction. In this TAB tape, an insulating tape 21 as a base material and an adhesive layer 22 are laminated with the same width,
The insulating tape 21 and the adhesive layer 22 are perforated to form sprocket holes 23, and the plating layer 2 is formed on the adhesive layer 22.
4 has a wiring 25. However, in such a TAB tape, since the sprocket hole 23 is formed not only in the base material 21 but also in the adhesive layer 22, T
When the pin of the sprocket roll was inserted into the sprocket hole 23 when the AB tape was conveyed, the pin could come into contact with the adhesive layer 22 and the pin and the adhesive layer 22 might adhere to each other. When the pin and the adhesive layer 22 were adhered to each other, resistance was caused and the TAB tape could not be conveyed properly.

【0004】一方、特開平9−186202号公報記載
の製造方法について、図4を参照しながら説明する。な
お、図4は、TABテープを長手方向に切断したときの
断面図である。この製造方法では、図4(a)に示すよ
うな、接着剤層32を保護フィルム31a,31bで挟
み込んだ接着フィルムを用い、まず、第1剥離工程にお
いて、図4(b)に示すように、接着剤層32の一方の
面の保護フィルム31aを剥離する。次いで、絶縁フィ
ルムラミネート工程において、図4(c)に示すよう
に、接着フィルムの接着剤層32と、接着剤層32より
幅広の絶縁フィルム33とを、絶縁フィルム33の両縁
部41が接着剤層32と重ならないように貼り合わせ
る。次いで、スプロケット孔形成工程において、図4
(d)に示すように、絶縁フィルム33の両縁部41に
スプロケット孔34を形成させる。次いで、第2剥離工
程において、図4(e)に示すように、接着剤層32の
他方の面の保護フィルム31bを剥離し、次いで、銅箔
ラミネート工程において、図4(f)に示すように、接
着剤層32上に銅箔35を貼り合わせる。次いで、配線
パターン形成工程において、図4(f)に示すように、
銅箔35をエッチングして配線パターンを形成して最終
的なTABテープを得る。
On the other hand, the manufacturing method described in Japanese Patent Laid-Open No. 9-186202 will be described with reference to FIG. Note that FIG. 4 is a cross-sectional view of the TAB tape cut in the longitudinal direction. In this manufacturing method, as shown in FIG. 4A, an adhesive film in which the adhesive layer 32 is sandwiched by protective films 31a and 31b is used. First, in the first peeling step, as shown in FIG. The protective film 31a on one surface of the adhesive layer 32 is peeled off. Next, in the insulating film laminating step, as shown in FIG. 4C, the adhesive layer 32 of the adhesive film and the insulating film 33 wider than the adhesive layer 32 are bonded to both edge portions 41 of the insulating film 33. It is attached so as not to overlap the agent layer 32. Next, in the sprocket hole forming step, as shown in FIG.
As shown in (d), sprocket holes 34 are formed in both edge portions 41 of the insulating film 33. Next, in the second peeling step, as shown in FIG. 4 (e), the protective film 31b on the other surface of the adhesive layer 32 is peeled off, and then in the copper foil laminating step, as shown in FIG. 4 (f). Then, a copper foil 35 is attached onto the adhesive layer 32. Next, in the wiring pattern forming step, as shown in FIG.
The copper foil 35 is etched to form a wiring pattern to obtain a final TAB tape.

【0005】このような製造方法により製造されたTA
Bテープは、接着剤層32が積層していない絶縁フィル
ム33の両縁部41にスプロケット孔34を設けてい
る。そのため、特開平9−162245号公報記載の発
明のように、スプロケットロールのピンが接着剤層32
に接触することがなく、TABテープの搬送に不良が生
じることがなかった。しかしながら、製造工程におい
て、保護フィルム31a,31bをそれぞれ剥離する剥
離工程を2回有し、さらに銅箔ラミネート工程を有する
ため、工程が複雑であり、TABテープ製造の生産性が
低い上に、PETフィルムの消費量が多いので、コスト
も高かった。また、図4(f)に示す工程では、銅箔3
5を接着剤槽2に貼り合わせるために、あらかじめ銅箔
35を銅箔の巻取りロール(図示せず)からTABテー
プの所望とする幅に切断する必要があり、このことも工
程を複雑する原因となっており、TABテープの生産性
を低下させていた。また、離型処理を施した、高価なP
ETフィルムを使用する場合は、上述した製造方法にお
けるPETフィルムの消費量が多いため、さらにコスト
が高くなっていた。
TA manufactured by such a manufacturing method
The B tape has sprocket holes 34 at both edges 41 of the insulating film 33 on which the adhesive layer 32 is not laminated. Therefore, as in the invention described in JP-A-9-162245, the pin of the sprocket roll has the adhesive layer 32.
There was no contact with the TAB tape, and there was no defect in the transport of the TAB tape. However, in the manufacturing process, the protective film 31a and the protective film 31b are each peeled twice, and since the copper foil laminating process is further included, the process is complicated, and the productivity of the TAB tape is low. Since the film consumption is high, the cost was high. In addition, in the step shown in FIG.
In order to attach 5 to the adhesive tank 2, it is necessary to previously cut the copper foil 35 from a copper foil winding roll (not shown) to a desired width of the TAB tape, which also complicates the process. This is a cause and reduces the productivity of the TAB tape. Also, an expensive P that has been subjected to mold release treatment
When the ET film is used, the cost is further increased due to the large consumption of the PET film in the manufacturing method described above.

【0006】[0006]

【発明が解決しようとする課題】本発明は、TABテー
プの製造工程が簡素であり、生産性が高い上に、接着剤
層の保護フィルムの消費量が少なく、コストを低くでき
るTABテープの製造方法およびTABテープ用積層フ
ィルムを提供することを目的とする。
DISCLOSURE OF THE INVENTION The present invention provides a TAB tape which has a simple TAB tape manufacturing process, high productivity, low consumption of a protective film for an adhesive layer, and low cost. It is an object to provide a method and a laminated film for a TAB tape.

【0007】[0007]

【課題を解決するための手段】本発明のTABテープの
製造方法は、金属箔と、該金属箔上に形成された接着剤
層とを有し、前記接着剤層を保護する保護フィルムが貼
り合わされた積層フィルムから、保護フィルムを剥離す
る剥離工程と、前記接着剤層と、前記接着剤層より幅広
の絶縁フィルムとを、該絶縁フィルムの両縁部が接着剤
層と重ならないように貼り合わせるラミネート工程と、
前記絶縁フィルムの両縁部にスプロケット孔を形成させ
るスプロケット孔形成工程と、前記金属箔をエッチング
して配線パターンを形成する配線パターン形成工程とを
有することを特徴とする。その際、前記金属箔は、銅箔
であることが好ましい。また、本発明のTABテープ用
積層フィルムは、金属箔と、該金属箔上に形成された接
着剤層とを有し、前記接着剤層を保護する保護フィルム
が貼り合わされたものである。
A method of manufacturing a TAB tape according to the present invention comprises a metal foil and an adhesive layer formed on the metal foil, and a protective film for protecting the adhesive layer is applied. A peeling step of peeling the protective film from the combined laminated film, the adhesive layer, and an insulating film wider than the adhesive layer are attached so that both edges of the insulating film do not overlap with the adhesive layer. A laminating process to match
The method is characterized by including a sprocket hole forming step of forming sprocket holes on both edges of the insulating film, and a wiring pattern forming step of etching the metal foil to form a wiring pattern. At that time, the metal foil is preferably a copper foil. Further, the laminated film for TAB tape of the present invention has a metal foil and an adhesive layer formed on the metal foil, and a protective film for protecting the adhesive layer is laminated.

【0008】[0008]

【発明の実施の形態】以下、本発明を詳細に説明する。
はじめに、本発明のTABテープ用積層フィルム(以
下、積層フィルムと略す)の一例について図1を参照し
ながら説明する。図1に示す積層フィルム11は、金属
箔12と、金属箔12上に形成された接着剤層13とを
有し、接着剤層13を保護する保護フィルム14が貼り
合わされたものである。
BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described in detail below.
First, an example of the laminated film for TAB tape of the present invention (hereinafter, abbreviated as laminated film) will be described with reference to FIG. The laminated film 11 shown in FIG. 1 has a metal foil 12 and an adhesive layer 13 formed on the metal foil 12, and a protective film 14 that protects the adhesive layer 13 is attached thereto.

【0009】金属箔12としては、導電性を有する箔状
のものであれば制限されず、例えば、銅箔、銅合金箔、
鉄−ニッケル合金箔が挙げられるが、中でも銅箔が好ま
しい。銅箔は安価であるので、最終的に得られるTAB
テープのコストが安くなる上に、取扱性に優れるので、
製造時の効率が向上する。
The metal foil 12 is not limited as long as it has a conductive foil shape. For example, copper foil, copper alloy foil,
Examples of the iron-nickel alloy foil include copper foil. Since the copper foil is cheap, the TAB finally obtained
Since the cost of the tape is low and it is easy to handle,
Manufacturing efficiency is improved.

【0010】接着剤層13を形成する接着剤としては、
エポキシ樹脂、フェノール樹脂、マレイミド樹脂、ポリ
アミド、SBR、NBR、ポリエステル、ポリイミド、
ポリウレタン、ポリビニルアセタール、ポリスチレン、
アクリル樹脂が挙げられ、これらを単独または併用して
用いることができる。これらの接着剤は溶剤に分散させ
て使用することができる。接着剤を分散させる溶剤とし
ては、例えば、トルエン、キシレンなどの芳香族炭化水
素類、メタノール、エタノール、イソプロパノール、ブ
タノールなどのアルコール類、アセトン、メチルエチル
ケトン、メチルイソブチルケトンなどのケトン類などが
挙げられる。接着剤層13の厚さは、3〜50μmであ
り、好ましくは6〜20μmである。接着剤層13の厚
さが3μm未満であると、絶縁フィルム15を接着でき
ないことがあり、50μmを超えると、必要以上に厚く
なるので、コストが高くなる。
As an adhesive for forming the adhesive layer 13,
Epoxy resin, phenol resin, maleimide resin, polyamide, SBR, NBR, polyester, polyimide,
Polyurethane, polyvinyl acetal, polystyrene,
Acrylic resins are mentioned, and these can be used alone or in combination. These adhesives can be used by dispersing them in a solvent. Examples of the solvent in which the adhesive is dispersed include aromatic hydrocarbons such as toluene and xylene, alcohols such as methanol, ethanol, isopropanol and butanol, and ketones such as acetone, methyl ethyl ketone and methyl isobutyl ketone. The thickness of the adhesive layer 13 is 3 to 50 μm, preferably 6 to 20 μm. If the thickness of the adhesive layer 13 is less than 3 μm, the insulating film 15 may not be bonded, and if it exceeds 50 μm, the thickness becomes unnecessarily large, resulting in high cost.

【0011】保護フィルム14としては、接着剤層13
を保護するとともに、離型性を有していれば特に制限さ
れず、例えば、ポリエチレン、ポリプロピレン、ポリエ
チレンテレフタレートなどのポリエステル、ポリエチレ
ンナフタレートなどのフィルム、表面に離型処理が施さ
れたフィルムが挙げられる。保護フィルム14の厚さ
は、3〜125μmであり、好ましくは8〜75μmで
ある。保護フィルム14の厚さが3μm未満であると、
接着剤層13を保護できない恐れがあり、125μmを
超えると、接着剤層13の保護には過剰な厚さであり、
最終的に得られるTABテープのコストが高くなる上
に、取扱性が悪くなる。
As the protective film 14, the adhesive layer 13 is used.
It is not particularly limited as long as it has releasability as well as protecting, and examples thereof include polyesters such as polyethylene, polypropylene and polyethylene terephthalate, films such as polyethylene naphthalate, and films having a surface subjected to a release treatment. To be The protective film 14 has a thickness of 3 to 125 μm, preferably 8 to 75 μm. When the thickness of the protective film 14 is less than 3 μm,
There is a possibility that the adhesive layer 13 cannot be protected. If it exceeds 125 μm, the adhesive layer 13 has an excessive thickness for protection,
The cost of the finally obtained TAB tape is high and the handleability is poor.

【0012】このような積層フィルム11は、巻回した
ロール状で輸送したり保管したりする。また、必要に応
じて、巻回したロールは所定の幅に切断してもよい。
Such a laminated film 11 is transported or stored in a wound roll form. Further, if necessary, the wound roll may be cut into a predetermined width.

【0013】上述した積層フィルム11にあっては、金
属箔12と、金属箔12上に形成された接着剤層13と
を有し、接着剤層13を保護する保護フィルム14が貼
り合わされており、保護フィルム14を剥離して接着剤
層13を露出させ、この接着剤層13とTABテープの
絶縁フィルムとを貼り合わすことにより、接着剤層13
を介して絶縁フィルム上に金属箔12が形成されたTA
Bテープを容易に作製できる。
The above-mentioned laminated film 11 has a metal foil 12 and an adhesive layer 13 formed on the metal foil 12, and a protective film 14 for protecting the adhesive layer 13 is laminated. The protective film 14 is peeled off to expose the adhesive layer 13, and the adhesive layer 13 and the insulating film of the TAB tape are attached to each other to form the adhesive layer 13.
TA in which the metal foil 12 is formed on the insulating film via
The B tape can be easily manufactured.

【0014】次に、本発明のTABテープの製造方法の
一例について図2を参照しながら説明する。本発明の製
造方法は、上述した積層フィルム11を用いることを特
徴としている。なお、図2は、TABテープの長手方向
と垂直方向に切断したときの断面図であり、本発明のT
ABテープの製造工程を示す。
Next, an example of the method of manufacturing the TAB tape of the present invention will be described with reference to FIG. The manufacturing method of the present invention is characterized by using the above-mentioned laminated film 11. Note that FIG. 2 is a cross-sectional view of the TAB tape taken in a direction perpendicular to the longitudinal direction, which shows the T of the present invention.
The manufacturing process of an AB tape is shown.

【0015】この製造方法では、まず、剥離工程におい
て、図2(a)に示すように、積層フィルム11の保護
フィルム14を剥離する。そして、図2(b)に示すよ
うに、保護フィルム14を剥離して露出した積層フィル
ム11の接着剤層13と、接着剤層13よりも幅広の絶
縁フィルム15とを貼り合わせる。この貼り合わせの
際、両縁部20において、接着剤層13と絶縁フィルム
15とが重ならないように貼り合わせる。すなわち、貼
り合わせ後、両縁部20では、接着剤層13と絶縁フィ
ルム15とは積層していない。なお、ここで、両縁部2
0とは、絶縁フィルム15を長手方向に対し垂直に切断
し、その断面を見たときの左右の縁部のことをいう。
In this manufacturing method, first, in the peeling step, the protective film 14 of the laminated film 11 is peeled off as shown in FIG. Then, as shown in FIG. 2B, the adhesive layer 13 of the laminated film 11 exposed by peeling off the protective film 14 and the insulating film 15 wider than the adhesive layer 13 are bonded together. At the time of this attachment, the adhesive layer 13 and the insulating film 15 are attached so as not to overlap each other at both edge portions 20. That is, after the bonding, the adhesive layer 13 and the insulating film 15 are not laminated on the both edge portions 20. In addition, here, both edges 2
0 means the left and right edges when the insulating film 15 is cut perpendicularly to the longitudinal direction and its cross section is viewed.

【0016】次いで、図2(c)に示すように、絶縁フ
ィルム15の両縁部20を垂直に穿孔して、スプロケッ
ト孔16を形成する。次いで、図2(d)に示すよう
に、金属箔12に、フォトレジスト17を塗布し、乾燥
させる。そして、図2(e)に示すように、硬化したフ
ォトレジスト17を、パターンが形成されているフォト
マスク18でマスクし、紫外線を照射して露光する。次
いで、水酸化カリウム水溶液で現像した後、図2(f)
に示すように、金属箔12をエッチング液によってエッ
チングして配線パターンを形成させる。次いで、図2
(g)に示すように、水酸化ナトリウム水溶液によって
フォトレジスト残留物を剥離した後、配線パターンの上
に、ソルダーレジストインクを塗布し、硬化させる。次
いで、図2(h)に示すように、配線パターン上に保護
層となる金属めっき19を形成させて、最終的なTAB
テープを得る。なお、本発明においては、前記スプロケ
ット孔形成工程とラミネート工程との順序が入れ替わっ
てもよい。すなわち、あらかじめ両縁部にスプロケット
孔を形成した絶縁フィルムを用意し、この絶縁フィルム
に積層フィルムの接着剤層を貼り合わせ、図2(c)に
示すような、絶縁フィルム15の両縁部20にスプロケ
ット孔16が形成された積層体を得てもよい。
Next, as shown in FIG. 2C, both edges 20 of the insulating film 15 are vertically perforated to form sprocket holes 16. Next, as shown in FIG. 2D, a photoresist 17 is applied to the metal foil 12 and dried. Then, as shown in FIG. 2E, the hardened photoresist 17 is masked by a photomask 18 having a pattern formed thereon, and ultraviolet rays are irradiated to expose the photoresist. Then, after developing with an aqueous solution of potassium hydroxide, FIG.
As shown in, the metal foil 12 is etched with an etching solution to form a wiring pattern. Then, FIG.
As shown in (g), after removing the photoresist residue with an aqueous sodium hydroxide solution, a solder resist ink is applied on the wiring pattern and cured. Then, as shown in FIG. 2 (h), a metal plating 19 to be a protective layer is formed on the wiring pattern, and the final TAB is formed.
Get the tape. In the present invention, the order of the sprocket hole forming step and the laminating step may be exchanged. That is, an insulating film having sprocket holes formed at both edges is prepared in advance, and an adhesive layer of a laminated film is attached to this insulating film, and both edges 20 of the insulating film 15 as shown in FIG. You may obtain the laminated body in which the sprocket hole 16 was formed in.

【0017】接着剤層13に絶縁フィルム15を貼り合
わせる方法としては特に制限されず、ロールラミネート
法などの従来公知のラミネート方法を適用できる。ま
た、積層フィルム11の接着剤層12を貼り合わせる絶
縁フィルム15としては、耐熱性が高く、絶縁性を有し
ていれば特に制限されないが、例えば、ポリイミド、ポ
リエーテルイミド、ポリフェニレンサルファイド、ポリ
エーテルエーテルケトン、ポリエステル、芳香族ポリア
ミド、エポキシ樹脂−ガラスクロス、エポキシ樹脂−ポ
リイミド−ガラスクロスなどのフィルムが挙げられる。
絶縁フィルム15の厚さは、25〜188μmであり、
好ましくは50〜125μmである。絶縁フィルム15
の厚さが25μm未満であると、絶縁性が不十分となる
恐れがある上に、絶縁フィルム15の取扱性が悪い場合
がある。また、188μmを超えても、絶縁フィルム1
5の取扱性が悪い場合がある。また、絶縁フィルム15
の幅は従来のTABテープと同様に、35mm,48m
m,70mmである。
The method for attaching the insulating film 15 to the adhesive layer 13 is not particularly limited, and a conventionally known laminating method such as a roll laminating method can be applied. The insulating film 15 to which the adhesive layer 12 of the laminated film 11 is attached is not particularly limited as long as it has high heat resistance and insulating properties, and examples thereof include polyimide, polyetherimide, polyphenylene sulfide, and polyether. Examples of the film include ether ketone, polyester, aromatic polyamide, epoxy resin-glass cloth, and epoxy resin-polyimide-glass cloth.
The thickness of the insulating film 15 is 25 to 188 μm,
It is preferably 50 to 125 μm. Insulating film 15
If the thickness is less than 25 μm, the insulating property may be insufficient and the handleability of the insulating film 15 may be poor. Moreover, even if it exceeds 188 μm, the insulating film 1
The handling property of 5 may be poor. In addition, the insulating film 15
Width is 35mm, 48m, same as conventional TAB tape
m, 70 mm.

【0018】また、スプロケット孔16の形成方法とし
ては特に制限されず、例えば、金型によるパンチングに
よって形成する方法などが挙げられる。また、金属めっ
き19を形成させる方法としては、無電解めっき、電解
めっきのいずれであってもよい。また、めっきの種類と
しては、例えば、スズ、はんだ、金などが挙げられる。
The method of forming the sprocket holes 16 is not particularly limited, and examples thereof include a method of forming the sprocket holes 16 by punching with a die. The method of forming the metal plating 19 may be either electroless plating or electrolytic plating. Moreover, examples of the type of plating include tin, solder, and gold.

【0019】上述したTABテープの製造方法にあって
は、金属箔12と、金属箔12上に形成された接着剤層
13とを有し、接着剤層13を保護する保護フィルム1
4が貼り合わされた積層フィルム11から、保護フィル
ム14を剥離する剥離工程と、積層フィルム11の接着
剤層13と、接着剤層13より幅広の絶縁フィルム15
とを、絶縁フィルム15の両縁部20が接着剤層13と
重ならないように貼り合わせるラミネート工程と、絶縁
フィルム15の両縁部20にスプロケット孔16を形成
させるスプロケット孔形成工程と、金属箔12をエッチ
ングして配線パターンを形成する配線パターン形成工程
とを有する。すなわち、このTABテープの製造方法で
は、金属箔12と、金属箔12上に形成された接着剤層
13とを有し、接着剤層13を保護する保護フィルム1
4が貼り合わされた積層フィルム11を用いているの
で、保護フィルム14の剥離工程は1回でよく、かつ金
属箔を接着剤層にラミネートする金属箔ラミネート工程
を有さなくてもよく、さらに、あらかじめ銅箔の巻取り
ロールからTABテープの所望とする幅に銅箔を切断す
る必要がないため、TABテープを容易に作製できる。
そのため、TABテープの製造工程が簡素化されて、生
産性が向上する上に、保護フィルム14の使用量を少な
くできるので、TABテープのコストを低くできる。ま
た、金属箔12は、銅箔であると、最終的に得られるT
ABテープのコストが安くなる上に、かつ取扱性に優れ
るので、製造時の効率が向上する。
In the above-mentioned TAB tape manufacturing method, the protective film 1 has the metal foil 12 and the adhesive layer 13 formed on the metal foil 12, and protects the adhesive layer 13.
Peeling step of peeling the protective film 14 from the laminated film 11 having the four laminated thereon, the adhesive layer 13 of the laminated film 11, and the insulating film 15 wider than the adhesive layer 13.
And laminating step so that both edges 20 of the insulating film 15 do not overlap the adhesive layer 13, a sprocket hole forming step of forming sprocket holes 16 in both edges 20 of the insulating film 15, and a metal foil. 12 is etched to form a wiring pattern. That is, in this TAB tape manufacturing method, the protective film 1 having the metal foil 12 and the adhesive layer 13 formed on the metal foil 12 and protecting the adhesive layer 13 is provided.
Since the laminated film 11 in which 4 is bonded is used, the peeling step of the protective film 14 may be performed once, and the metal foil laminating step of laminating the metal foil on the adhesive layer may not be included. Since it is not necessary to previously cut the copper foil from the copper foil winding roll to the desired width of the TAB tape, the TAB tape can be easily manufactured.
Therefore, the manufacturing process of the TAB tape is simplified, the productivity is improved, and the amount of the protective film 14 used can be reduced, so that the cost of the TAB tape can be reduced. Further, when the metal foil 12 is a copper foil, the T finally obtained
Since the cost of the AB tape is low and the AB tape is easy to handle, the efficiency in manufacturing is improved.

【0020】[0020]

【発明の効果】本発明のTABテープの製造方法によれ
ば、TABテープの製造工程が簡素化されて、生産性が
向上する上に、保護フィルムの使用量を少なくできるの
で、TABテープのコストを低くできる。また、本発明
のTABテープ用積層フィルムによれば、積層フィルム
の接着剤層とTABテープの絶縁フィルムとを貼り合わ
すことにより、接着剤層を介して絶縁フィルム上に金属
箔が形成されたTABテープを容易に作製できる。
According to the method of manufacturing a TAB tape of the present invention, the manufacturing process of the TAB tape is simplified, the productivity is improved, and the amount of the protective film used can be reduced. Can be lowered. Further, according to the laminated film for a TAB tape of the present invention, by bonding the adhesive layer of the laminated film and the insulating film of the TAB tape to each other, the TAB in which the metal foil is formed on the insulating film via the adhesive layer The tape can be easily manufactured.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明のTABテープ用積層フィルムの一例
を示す断面図である。
FIG. 1 is a cross-sectional view showing an example of a laminated film for TAB tape of the present invention.

【図2】 本発明のTABテープの製造方法における製
造工程の一例を示す断面図である。
FIG. 2 is a cross-sectional view showing an example of a manufacturing process in a method for manufacturing a TAB tape according to the present invention.

【図3】 従来のTABテープの一例を示す断面図であ
る。
FIG. 3 is a cross-sectional view showing an example of a conventional TAB tape.

【図4】 従来のTABテープの製造方法における製造
工程の一例を示す断面図である。
FIG. 4 is a cross-sectional view showing an example of a manufacturing process in a conventional TAB tape manufacturing method.

【符号の説明】[Explanation of symbols]

11…積層フィルム、12…金属箔、13…接着剤層、
14…保護フィルム、15…絶縁フィルム、16…スプ
ロケット孔、20…両縁部
11 ... Laminated film, 12 ... Metal foil, 13 ... Adhesive layer,
14 ... Protective film, 15 ... Insulating film, 16 ... Sprocket hole, 20 ... Both edges

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 金属箔と、該金属箔上に形成された接着
剤層とを有し、前記接着剤層を保護する保護フィルムが
貼り合わされた積層フィルムから、保護フィルムを剥離
する剥離工程と、 前記積層フィルムの接着剤層と、前記接着剤層より幅広
の絶縁フィルムとを、該絶縁フィルムの両縁部が接着剤
層と重ならないように貼り合わせるラミネート工程と、 前記絶縁フィルムの両縁部にスプロケット孔を形成させ
るスプロケット孔形成工程と、 前記金属箔をエッチングして配線パターンを形成する配
線パターン形成工程とを有することを特徴とするTAB
テープの製造方法。
1. A peeling step of peeling a protective film from a laminated film having a metal foil and an adhesive layer formed on the metal foil and having a protective film for protecting the adhesive layer attached thereto. A laminating step of adhering the adhesive layer of the laminated film and an insulating film wider than the adhesive layer so that both edges of the insulating film do not overlap the adhesive layer, both edges of the insulating film And a sprocket hole forming step of forming a sprocket hole in the portion, and a wiring pattern forming step of etching the metal foil to form a wiring pattern.
Tape manufacturing method.
【請求項2】 前記金属箔は、銅箔であることを特徴と
する請求項1に記載のTABテープの製造方法。
2. The method of manufacturing a TAB tape according to claim 1, wherein the metal foil is a copper foil.
【請求項3】 金属箔と、該金属箔上に形成された接着
剤層とを有し、前記接着剤層を保護する保護フィルムが
貼り合わされたことを特徴とするTABテープ用積層フ
ィルム。
3. A laminated film for a TAB tape, which comprises a metal foil and an adhesive layer formed on the metal foil, and a protective film for protecting the adhesive layer is attached thereto.
JP2001221868A 2001-07-23 2001-07-23 TAB tape manufacturing method and laminated film for TAB tape Expired - Fee Related JP3854479B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2001221868A JP3854479B2 (en) 2001-07-23 2001-07-23 TAB tape manufacturing method and laminated film for TAB tape
KR10-2002-0042719A KR100485270B1 (en) 2001-07-23 2002-07-20 Manufacturing method for TAB tape and layered film for the same
TW091116220A TWI226652B (en) 2001-07-23 2002-07-22 Manufacturing method for TAB tape and layered film for the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001221868A JP3854479B2 (en) 2001-07-23 2001-07-23 TAB tape manufacturing method and laminated film for TAB tape

Publications (2)

Publication Number Publication Date
JP2003037136A true JP2003037136A (en) 2003-02-07
JP3854479B2 JP3854479B2 (en) 2006-12-06

Family

ID=19055465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001221868A Expired - Fee Related JP3854479B2 (en) 2001-07-23 2001-07-23 TAB tape manufacturing method and laminated film for TAB tape

Country Status (3)

Country Link
JP (1) JP3854479B2 (en)
KR (1) KR100485270B1 (en)
TW (1) TWI226652B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100815274B1 (en) 2007-07-12 2008-03-20 김영준 Color metal sticker, manufacturing method thereof and potable electronic equipment using the same

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4138824B2 (en) * 2006-07-06 2008-08-27 河村産業株式会社 Method for producing plastic film-conductor metal foil laminate
KR100797675B1 (en) * 2007-01-02 2008-01-23 삼성전기주식회사 Adhesive tape of transporting jig for substrate
KR100967053B1 (en) * 2007-12-27 2010-06-29 주식회사 포스코 Laser processing apparatus
CN110690124A (en) * 2019-11-14 2020-01-14 江苏上达电子有限公司 Manufacturing method of packaging substrate for improving residual copper in edge curling

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0529097B1 (en) * 1991-03-12 2003-01-15 Sumitomo Bakelite Company Limited Method of manufacturing two-layer tab tape

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100815274B1 (en) 2007-07-12 2008-03-20 김영준 Color metal sticker, manufacturing method thereof and potable electronic equipment using the same

Also Published As

Publication number Publication date
KR100485270B1 (en) 2005-04-25
KR20030011562A (en) 2003-02-11
TWI226652B (en) 2005-01-11
JP3854479B2 (en) 2006-12-06

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