JP2003035524A - ３次元測定装置 - Google Patents

３次元測定装置

Info

Publication number
JP2003035524A
JP2003035524A JP2001221801A JP2001221801A JP2003035524A JP 2003035524 A JP2003035524 A JP 2003035524A JP 2001221801 A JP2001221801 A JP 2001221801A JP 2001221801 A JP2001221801 A JP 2001221801A JP 2003035524 A JP2003035524 A JP 2003035524A
Authority
JP
Japan
Prior art keywords
information
sample
reflected light
objective lens
dimensional measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001221801A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003035524A5 (enExample
Inventor
Akihiro Kitahara
章広 北原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP2001221801A priority Critical patent/JP2003035524A/ja
Publication of JP2003035524A publication Critical patent/JP2003035524A/ja
Publication of JP2003035524A5 publication Critical patent/JP2003035524A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Image Input (AREA)
JP2001221801A 2001-07-23 2001-07-23 ３次元測定装置 Pending JP2003035524A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001221801A JP2003035524A (ja) 2001-07-23 2001-07-23 ３次元測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001221801A JP2003035524A (ja) 2001-07-23 2001-07-23 ３次元測定装置

Publications (2)

Publication Number Publication Date
JP2003035524A true JP2003035524A (ja) 2003-02-07
JP2003035524A5 JP2003035524A5 (enExample) 2005-09-22

Family

ID=19055416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001221801A Pending JP2003035524A (ja) 2001-07-23 2001-07-23 ３次元測定装置

Country Status (1)

Country Link
JP (1) JP2003035524A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004358662A (ja) * 2003-05-30 2004-12-24 Tatsuta Kagaku Kk 凹凸模様及び押型の作成方法並びに押型
JP2007526457A (ja) * 2004-03-01 2007-09-13 イアティア イメージング プロプライアタリー リミティド 深度情報を含む画像の生成方法と装置
JP2009204425A (ja) * 2008-02-27 2009-09-10 Pulstec Industrial Co Ltd ３次元形状測定装置および３次元形状測定方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004358662A (ja) * 2003-05-30 2004-12-24 Tatsuta Kagaku Kk 凹凸模様及び押型の作成方法並びに押型
JP2007526457A (ja) * 2004-03-01 2007-09-13 イアティア イメージング プロプライアタリー リミティド 深度情報を含む画像の生成方法と装置
JP2009204425A (ja) * 2008-02-27 2009-09-10 Pulstec Industrial Co Ltd ３次元形状測定装置および３次元形状測定方法

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