JP2002525435A - 金属構造部材の真空被覆法 - Google Patents

金属構造部材の真空被覆法

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Publication number
JP2002525435A
JP2002525435A JP2000572422A JP2000572422A JP2002525435A JP 2002525435 A JP2002525435 A JP 2002525435A JP 2000572422 A JP2000572422 A JP 2000572422A JP 2000572422 A JP2000572422 A JP 2000572422A JP 2002525435 A JP2002525435 A JP 2002525435A
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JP
Japan
Prior art keywords
metal structural
structural member
vacuum coating
oxide layer
coating method
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2000572422A
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English (en)
Inventor
ヴォルカース、ルッツ
ドイス、カルステン
ゼンフ、ヨアヒム
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
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Siemens AG
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Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of JP2002525435A publication Critical patent/JP2002525435A/ja
Withdrawn legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • C23C28/3215—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer at least one MCrAlX layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/10—Oxidising

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Physical Vapour Deposition (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

(57)【要約】 金属構造部材上に均質な酸化物層を形成するために、金属構造部材の全ての部位を、真空室内で均等に予熱し、所定の温度に達した後、所定の時間、所定の圧力で全ての部位に酸素を含む気体を吹き付ける。

Description

【発明の詳細な説明】
【０００１】 本発明は、真空室内の金属構造部材の全部位を、電子線照射により一様に約８
００℃の温度に予熱する、金属構造部材の真空被覆法に関する。
【０００２】 このような方法の１つは、ドイツ特許出願公開第１９７０３３３８号明細書か
ら公知である。この公知方法は、真空室内で電子線照射を使用して各部品もしく
は金属構造部材を、引続き真空中で被覆するために一様に予熱することのできる
、それぞれ個々の部品を真空被覆する際の予熱に用いられる。
【０００３】 本発明の課題は、酸化物層を制御し、再生可能に形成することのできる、金属
構造部材上に均質な酸化物層を形成する方法を提供することにある。
【０００４】 この課題を解決するため、冒頭に記載した形式の方法において、本発明によれ
ばＭＣｒＡｌＹ又はＰｔＡｌで被覆された金属構造部材上に均質な酸化物層を形
成するための所定の温度に達した後、この構造部材に約１０分間、１×１０-3〜
８×１０-2mbarの圧力で酸素とアルゴンの混合気を吹き付ける。
【０００５】 本発明方法の１つの重要な利点は、この方法でＭＣｒＡｌＹ又はＰｔＡｌで被
覆された金属構造部材上に均質な酸化物層を制御して形成することができ、かつ
再生可能である、即ちその層厚及び構造を目標通りに形成できることにある。そ
れと同時に、接着特性及び他の機械的又は化学的特性に関して、この酸化物層を
目標通りに独自の層として最適化することが可能となる。
【０００６】 本発明方法の有利な実施態様では、基本材料としてニッケル又はコバルトをベ
ースとし、ＭＣｒＡｌＹ又はＰｔＡｌで被覆されたタービンの羽根上に均質な酸
化物層を形成するため、タービンの羽根を真空室内に入れる。その後タービン羽
根の質量分布に配慮しながら、タービン羽根の足、翼及び頭板に異なった線量で
電子線照射を行い、その際翼の部分よりも大きい質量を有する脚の部分及び頭板
に対し電子線の照射量を著しく高める。タービン羽根が全体にわたり均等な約７
５０〜８５０℃の最低限の温度に達したならば、最短でも約１０分間、１×１０ -3 〜８×１０-2mbarの分圧の酸素とアルゴンの混合気で真空室内を満たす。厚さ
０．０１〜５μmの均質な酸化物層を有するタービ ン羽根が生成する。
【０００７】 上記の方法は、特に均質な酸化物層を形成するために、酸化物層を施すべき金
属構造部材に、特殊なガスシャワーを介して酸素とアルゴンの混合気を吹き付け
るように変更することも可能である。
───────────────────────────────────────────────────── フロントページの続き (72)発明者 ゼンフ、ヨアヒム ドイツ連邦共和国 デー‐01277 ドレス デン チンヴァルダー シュトラーセ 15

Claims (1)

    【特許請求の範囲】
  1. 【請求項１】 真空室内にある金属構造部材の全ての部位を、電子線照射に
    より均等に約８００℃の温度に予熱する金属構造部材の真空被覆法において、 ＭＣｒＡｌＹ又はＰｔＡｌで被覆された金属構造部材上に均質な酸化物層を形成
    するために所定の温度に達した後、構造部材に約１０分間の間１×１０-3〜８×
    １０-2ｍbarの圧力で酸素とアルゴンの混合気を吹き付けることを特徴とする金
    属構造部材の真空被覆方法。
JP2000572422A 1998-09-30 1999-09-30 金属構造部材の真空被覆法 Withdrawn JP2002525435A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19845803.7 1998-09-30
DE19845803A DE19845803C2 (de) 1998-09-30 1998-09-30 Verfahren zum Vakuumbeschichten von Metallbauteilen
PCT/DE1999/003236 WO2000018977A2 (de) 1998-09-30 1999-09-30 Verfahren zum vakuumbeschichten von metallbauteilen

Publications (1)

Publication Number Publication Date
JP2002525435A true JP2002525435A (ja) 2002-08-13

Family

ID=7883452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000572422A Withdrawn JP2002525435A (ja) 1998-09-30 1999-09-30 金属構造部材の真空被覆法

Country Status (5)

Country Link
US (1) US6589608B2 (ja)
EP (1) EP1129231B1 (ja)
JP (1) JP2002525435A (ja)
DE (2) DE19845803C2 (ja)
WO (1) WO2000018977A2 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1436441B2 (en) † 2001-09-10 2012-11-28 University Of Virginia Patent Foundation Method for applying metallic alloy coatings and coated component
DE10232289B4 (de) * 2002-07-16 2005-04-14 Von Ardenne Anlagentechnik Gmbh Verfahren und Anordnung zur Erzeugung einer homogenen Oxidschicht auf einem Metallbauteil
US20050123783A1 (en) * 2003-07-31 2005-06-09 Gregory Otto J. Composite used for thermal spray instrumentation and method for making the same

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6047348B2 (ja) * 1980-07-04 1985-10-21 株式会社東芝 熱処理装置
US5514482A (en) * 1984-04-25 1996-05-07 Alliedsignal Inc. Thermal barrier coating system for superalloy components
JPS61194168A (ja) * 1985-02-20 1986-08-28 Ishikawajima Harima Heavy Ind Co Ltd ステンレス鋼管の不働態化処理方法
JP2768952B2 (ja) * 1988-08-04 1998-06-25 忠弘 大見 金属酸化処理装置及び金属酸化処理方法
US5262245A (en) * 1988-08-12 1993-11-16 United Technologies Corporation Advanced thermal barrier coated superalloy components
JP3037768B2 (ja) * 1991-02-18 2000-05-08 大阪酸素工業株式会社 不動態化処理装置
GB9426257D0 (en) * 1994-12-24 1995-03-01 Rolls Royce Plc Thermal barrier coating for a superalloy article and method of application
DE19703338C2 (de) * 1996-12-27 1998-11-12 Ardenne Anlagentech Gmbh Verfahren zur Vorwärmung von Werkstücken bei der Vakuumbeschichtung

Also Published As

Publication number Publication date
DE19845803C2 (de) 2002-10-17
EP1129231A2 (de) 2001-09-05
US6589608B2 (en) 2003-07-08
EP1129231B1 (de) 2002-11-20
DE59903499D1 (de) 2003-01-02
US20010031314A1 (en) 2001-10-18
WO2000018977A3 (de) 2000-06-08
WO2000018977A2 (de) 2000-04-06
DE19845803A1 (de) 2000-04-20

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