EP1129231B1 - Verfahren zum vakuumbeschichten von metallbauteilen - Google Patents
Verfahren zum vakuumbeschichten von metallbauteilen Download PDFInfo
- Publication number
- EP1129231B1 EP1129231B1 EP99959190A EP99959190A EP1129231B1 EP 1129231 B1 EP1129231 B1 EP 1129231B1 EP 99959190 A EP99959190 A EP 99959190A EP 99959190 A EP99959190 A EP 99959190A EP 1129231 B1 EP1129231 B1 EP 1129231B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- metal components
- oxide layer
- vacuum coating
- coating metal
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
- C23C28/3215—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer at least one MCrAlX layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/02—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/10—Oxidising
Definitions
- metal components with an oxide layer it is often necessary to have metal components with an oxide layer to provide in order to determine the components on their surface impart mechanical or chemical properties; oxide layers are also used as an adhesion promoter layer Metal components often required, so in further process steps Coatings made on the metal components can be.
- US 5,763,107 discloses a method of making a Thermal insulation layer for superalloys, in which below the Thermal insulation layer a platinum-enriched aluminum layer is present, on which a thin oxide layer is applied becomes.
- the thin oxide layer is preferably created by easy heating in an oxygen-containing The atmosphere.
- the invention has for its object a method for Propose creating a homogeneous oxide layer on metal components, with which the oxide layer is controlled and reproducible can be applied.
- a method for producing a homogeneous oxide layer on metal components in which the metal components are heated uniformly in all their areas in a vacuum chamber and after reaching a predetermined temperature with an oxygen-argon mixture for a predetermined period of time about 10 minutes with a predetermined pressure between 1x10 -3 and 8x10 -2 mbar.
- the turbine blades are accommodated in a chamber which is evacuated.
- the described method can be modified in such a way that the metal components to be provided with an oxide layer via special gas showers with the oxygen-argon mixture component-specific to a particular to produce a homogeneous oxide layer.
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Physical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Turbine Rotor Nozzle Sealing (AREA)
Description
Claims (1)
- Verfahren zum Vakuumbeschichten von Metallbauteilen, bei demdie Metallbauteile in allen ihren Bereichen in einer Vakuumkammer mittels Elektronenbestrahlung gleichmäßig auf eine Temperatur von etwa 800°C vorgewärmt werden,nach Erreichen der vorgegebenen Temperatur zum Erzeugen einer homogenen Oxidschicht auf mit MCrAlY oder PtAl beschichteten Metallbauteilen diese mit einem Sauerstoff-Argon-Gemisch für eine Zeit von etwa 10 Minuten mit einem Druck zwischen 1x10-3 und 8x10-2 mbar beaufschlagt werden.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19845803A DE19845803C2 (de) | 1998-09-30 | 1998-09-30 | Verfahren zum Vakuumbeschichten von Metallbauteilen |
DE19845803 | 1998-09-30 | ||
PCT/DE1999/003236 WO2000018977A2 (de) | 1998-09-30 | 1999-09-30 | Verfahren zum vakuumbeschichten von metallbauteilen |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1129231A2 EP1129231A2 (de) | 2001-09-05 |
EP1129231B1 true EP1129231B1 (de) | 2002-11-20 |
Family
ID=7883452
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99959190A Expired - Lifetime EP1129231B1 (de) | 1998-09-30 | 1999-09-30 | Verfahren zum vakuumbeschichten von metallbauteilen |
Country Status (5)
Country | Link |
---|---|
US (1) | US6589608B2 (de) |
EP (1) | EP1129231B1 (de) |
JP (1) | JP2002525435A (de) |
DE (2) | DE19845803C2 (de) |
WO (1) | WO2000018977A2 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ATE450631T1 (de) † | 2001-09-10 | 2009-12-15 | Univ Virginia | Verfahren zum aufbringen von metalllegierungsüberzügen und überzogene komponente |
DE10232289B4 (de) * | 2002-07-16 | 2005-04-14 | Von Ardenne Anlagentechnik Gmbh | Verfahren und Anordnung zur Erzeugung einer homogenen Oxidschicht auf einem Metallbauteil |
US20050123783A1 (en) * | 2003-07-31 | 2005-06-09 | Gregory Otto J. | Composite used for thermal spray instrumentation and method for making the same |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6047348B2 (ja) * | 1980-07-04 | 1985-10-21 | 株式会社東芝 | 熱処理装置 |
US5514482A (en) * | 1984-04-25 | 1996-05-07 | Alliedsignal Inc. | Thermal barrier coating system for superalloy components |
JPS61194168A (ja) * | 1985-02-20 | 1986-08-28 | Ishikawajima Harima Heavy Ind Co Ltd | ステンレス鋼管の不働態化処理方法 |
JP2768952B2 (ja) * | 1988-08-04 | 1998-06-25 | 忠弘 大見 | 金属酸化処理装置及び金属酸化処理方法 |
US5262245A (en) * | 1988-08-12 | 1993-11-16 | United Technologies Corporation | Advanced thermal barrier coated superalloy components |
JP3037768B2 (ja) * | 1991-02-18 | 2000-05-08 | 大阪酸素工業株式会社 | 不動態化処理装置 |
GB9426257D0 (en) * | 1994-12-24 | 1995-03-01 | Rolls Royce Plc | Thermal barrier coating for a superalloy article and method of application |
DE19703338C2 (de) * | 1996-12-27 | 1998-11-12 | Ardenne Anlagentech Gmbh | Verfahren zur Vorwärmung von Werkstücken bei der Vakuumbeschichtung |
-
1998
- 1998-09-30 DE DE19845803A patent/DE19845803C2/de not_active Expired - Fee Related
-
1999
- 1999-09-30 WO PCT/DE1999/003236 patent/WO2000018977A2/de active IP Right Grant
- 1999-09-30 JP JP2000572422A patent/JP2002525435A/ja not_active Withdrawn
- 1999-09-30 EP EP99959190A patent/EP1129231B1/de not_active Expired - Lifetime
- 1999-09-30 DE DE59903499T patent/DE59903499D1/de not_active Expired - Lifetime
-
2001
- 2001-03-30 US US09/821,856 patent/US6589608B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE19845803A1 (de) | 2000-04-20 |
US20010031314A1 (en) | 2001-10-18 |
WO2000018977A2 (de) | 2000-04-06 |
DE19845803C2 (de) | 2002-10-17 |
DE59903499D1 (de) | 2003-01-02 |
JP2002525435A (ja) | 2002-08-13 |
EP1129231A2 (de) | 2001-09-05 |
US6589608B2 (en) | 2003-07-08 |
WO2000018977A3 (de) | 2000-06-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69210146T2 (de) | Verfahren zur Herstellung einer porenfreien, harten Schicht | |
DE3243283C2 (de) | ||
DE19807636C1 (de) | Verfahren zum Herstellen einer korrosions- und oxidationsbeständigen Schlickerschicht | |
DE2621753A1 (de) | Verfahren zur herstellung von aluminid-ueberzuegen auf nickel-, kobalt- und eisen-basislegierungen | |
DE42872T1 (de) | Thermische schutzbeschichtungen aus saeulenartig koernig keramischem material. | |
DE2927057A1 (de) | Gespritzte legierungsschicht und verfahren zu deren herstellung | |
DE69942392D1 (de) | Verfahren zur herstellung aufgerauhter platinschichten, und verfahren zur kondensatoren-herstellung, die diese aufgerauhten platinschichten enthalten | |
DE2113437A1 (de) | Plattierter Metallformkoerper und Verfahren zu seiner Herstellung | |
EP1032721A2 (de) | Verschleissbeständiger, mechanisch hochbelastbarer und reibungsarmer randschichtaufbau für titan oder seine legierungen sowie verfahren zu seiner herstellung | |
DE59703543D1 (de) | Verfahren zum Beschichten von Kohlenstoffsubstraten oder nichtmetallischen, kohlenstoffhaltigen Substraten sowie Substrat beschichtet nach dem Verfahren | |
EP1007753B1 (de) | Verfahren zum herstellen einer haftschicht für eine wärmedämmschicht | |
EP1129231B1 (de) | Verfahren zum vakuumbeschichten von metallbauteilen | |
DE3627775A1 (de) | Verfahren zur herstellung von targets | |
EP2065107B1 (de) | Verfahren zum Herstellen eines Bauteils mit gehärteter Oberfläche | |
DE102004002303A1 (de) | Verfahren zum Zweifach- oder Mehrfachbeschichten eines Kohlenstoff/Kohlenstoff-Verbundwerkstoffes | |
DE3726073C1 (de) | Verfahren zur Herstellung von duennwandigem Halbzeug und dessen Verwendungen | |
DE3810851C2 (de) | Verfahren zur Herstellung von Formteilen | |
WO1988004698A2 (en) | Process for manufacturing and/or redimensioning components, and component thus produced | |
DE3390480T1 (de) | Verfahren zum Aufbringen von Hitzeschutzüberzügen auf Metalle und damit erhaltenes Produkt | |
EP1367144A1 (de) | Verfahren zur Entfernung von zumindest einem Teilbereich eines Bauteils aus Metall oder einer Metallverbindung | |
DE19960353A1 (de) | Verfahren zur Herstellung einer Diffusionsbarriere zur Lebensdauererhöhung von Hochtemperatur-Schutzschichten | |
EP1088907A1 (de) | Verfahren zum Herstellen einer Panzerung für ein metallisches Bauteil | |
DE19510439C1 (de) | Cermet- Hartstoffschicht- Verbund und Verfahren zu dessen Herstellung | |
DD244150A1 (de) | Verfahren zur herstellung einer hochverschleissfesten oberflaeche | |
DE4141366C2 (de) | Verfahren zur Modifizierung der Oberfläche von Siliciumnitridsinterkörpern |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20010220 |
|
AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE |
|
17Q | First examination report despatched |
Effective date: 20011218 |
|
GRAG | Despatch of communication of intention to grant |
Free format text: ORIGINAL CODE: EPIDOS AGRA |
|
GRAG | Despatch of communication of intention to grant |
Free format text: ORIGINAL CODE: EPIDOS AGRA |
|
GRAH | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOS IGRA |
|
GRAH | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOS IGRA |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): CH DE FR GB IT LI |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: FG4D Free format text: NOT ENGLISH |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: NV Representative=s name: SIEMENS SCHWEIZ AG Ref country code: CH Ref legal event code: EP |
|
REG | Reference to a national code |
Ref country code: IE Ref legal event code: FG4D Free format text: GERMAN |
|
REF | Corresponds to: |
Ref document number: 59903499 Country of ref document: DE Date of ref document: 20030102 |
|
GBT | Gb: translation of ep patent filed (gb section 77(6)(a)/1977) |
Effective date: 20030211 |
|
ET | Fr: translation filed | ||
REG | Reference to a national code |
Ref country code: IE Ref legal event code: FD4D Ref document number: 1129231E Country of ref document: IE |
|
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
26N | No opposition filed |
Effective date: 20030821 |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PCAR Free format text: SIEMENS SCHWEIZ AG;INTELLECTUAL PROPERTY FREILAGERSTRASSE 40;8047 ZUERICH (CH) |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 20101119 Year of fee payment: 12 Ref country code: CH Payment date: 20101207 Year of fee payment: 12 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20110915 Year of fee payment: 13 Ref country code: FR Payment date: 20111005 Year of fee payment: 13 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: IT Payment date: 20110927 Year of fee payment: 13 |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PL |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R119 Ref document number: 59903499 Country of ref document: DE Effective date: 20120403 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LI Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20110930 Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20120403 Ref country code: CH Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20110930 |
|
GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 20120930 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST Effective date: 20130531 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20120930 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20121001 Ref country code: IT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20120930 |