JP2002523736A5 - - Google Patents

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Publication number
JP2002523736A5
JP2002523736A5 JP2000566649A JP2000566649A JP2002523736A5 JP 2002523736 A5 JP2002523736 A5 JP 2002523736A5 JP 2000566649 A JP2000566649 A JP 2000566649A JP 2000566649 A JP2000566649 A JP 2000566649A JP 2002523736 A5 JP2002523736 A5 JP 2002523736A5
Authority
JP
Japan
Prior art keywords
detection elements
output signal
sensor
switching circuit
electronic switching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000566649A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002523736A (ja
Filing date
Publication date
Priority claimed from US09/137,765 external-priority patent/US6142021A/en
Application filed filed Critical
Publication of JP2002523736A publication Critical patent/JP2002523736A/ja
Publication of JP2002523736A5 publication Critical patent/JP2002523736A5/ja
Pending legal-status Critical Current

Links

JP2000566649A 1998-08-21 1999-08-12 圧力センサおよびその形成方法 Pending JP2002523736A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/137,765 1998-08-21
US09/137,765 US6142021A (en) 1998-08-21 1998-08-21 Selectable pressure sensor
PCT/US1999/018474 WO2000011441A2 (en) 1998-08-21 1999-08-12 Pressure sensor and method of forming the same

Publications (2)

Publication Number Publication Date
JP2002523736A JP2002523736A (ja) 2002-07-30
JP2002523736A5 true JP2002523736A5 (enExample) 2006-10-05

Family

ID=22478952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000566649A Pending JP2002523736A (ja) 1998-08-21 1999-08-12 圧力センサおよびその形成方法

Country Status (6)

Country Link
US (1) US6142021A (enExample)
EP (1) EP1110067B1 (enExample)
JP (1) JP2002523736A (enExample)
DE (1) DE69915651T2 (enExample)
ES (1) ES2217809T3 (enExample)
WO (1) WO2000011441A2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6790699B2 (en) 2002-07-10 2004-09-14 Robert Bosch Gmbh Method for manufacturing a semiconductor device
DE102007062711A1 (de) * 2007-12-27 2009-07-02 Robert Bosch Gmbh Halbleiterwafer mit einer Vielzahl von Sensorelementen und Verfahren zum Vermessen von Sensorelementen auf einem Halbleiterwafer
US7926353B2 (en) * 2009-01-16 2011-04-19 Infineon Technologies Ag Pressure sensor including switchable sensor elements
GB2515715A (en) 2012-11-21 2015-01-07 Continental Automotive Systems Piezoresistive transducer with low thermal noise

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3456226A (en) * 1967-10-27 1969-07-15 Conrac Corp Strain gage configuration
JPS5217780A (en) * 1975-07-04 1977-02-09 Hitachi Ltd Pressure convertor with semi-conductor elements
US4322980A (en) * 1979-11-08 1982-04-06 Hitachi, Ltd. Semiconductor pressure sensor having plural pressure sensitive diaphragms and method
US4400681A (en) * 1981-02-23 1983-08-23 General Motors Corporation Semiconductor pressure sensor with slanted resistors
CA1186163A (en) * 1982-01-04 1985-04-30 James B. Starr Semiconductor pressure transducer
US4539554A (en) * 1982-10-18 1985-09-03 At&T Bell Laboratories Analog integrated circuit pressure sensor
JPS6077470A (ja) * 1983-10-04 1985-05-02 Nec Corp ダイアフラム型半導体圧力センサ
US4996082A (en) * 1985-04-26 1991-02-26 Wisconsin Alumni Research Foundation Sealed cavity semiconductor pressure transducers and method of producing the same
US4885621A (en) * 1988-05-02 1989-12-05 Delco Electronics Corporation Monolithic pressure sensitive integrated circuit
US5058435A (en) * 1989-06-22 1991-10-22 Ic Sensors, Inc. Single diaphragm transducer with multiple sensing elements
US5220838A (en) * 1991-03-28 1993-06-22 The Foxboro Company Overpressure-protected, differential pressure sensor and method of making the same
US5264075A (en) * 1992-11-06 1993-11-23 Ford Motor Company Fabrication methods for silicon/glass capacitive absolute pressure sensors
US5427975A (en) * 1993-05-10 1995-06-27 Delco Electronics Corporation Method of micromachining an integrated sensor on the surface of a silicon wafer
WO1995002164A1 (en) * 1993-07-07 1995-01-19 Ic Sensors, Inc. Pulsed thermal flow sensor system
DE19527687A1 (de) * 1995-07-28 1997-01-30 Bosch Gmbh Robert Sensor
US5672808A (en) * 1996-06-11 1997-09-30 Moore Products Co. Transducer having redundant pressure sensors

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