JP2002361547A - Optical element machining method, optical element machining device, optical element, lens, lens smoothing and polishing device, and method for machining optical functional surface of lens - Google Patents

Abstract

PROBLEM TO BE SOLVED: To achieve automation of a work of a worker by automating the lens polishing work. SOLUTION: In a machining method in which an optical element to be machined is placed on a machining tool and a surface of the optical element is machined by the rotational motion of the machining tool and the oscillating motion of the optical element, the machining quantity of the optical element is measured in an interlocking manner with the oscillating motion.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method for processing an optical element such as a lens. The present invention also relates to a method for detecting a numerical value during processing of an optical function surface of an optical element such as a lens.
Further, the present invention relates to an apparatus for processing an optical element such as a lens.

[0002]

2. Description of the Related Art To polish an optical surface of an optical element such as a lens, an optical element to be processed is placed on a polishing tool such as a polishing dish, and the rotating motion of the polishing dish and the optical element are polished by means such as a wrench. 2. Description of the Related Art A method and apparatus for processing by pressurizing and oscillating motion are known. This processing method depends on the processing capability of the polishing tool,
This is a method in which the operator sets the processing time based on the data such as the material of the optical element, the numerical value of the pressure, etc., and performs the processing by changing the processing capacity of the polishing tool, the material of the optical element, etc. It manages the processing dimensions of

On the other hand, in an apparatus for planar polishing such as lapping or polishing of a semiconductor silicon wafer or the like, Japanese Patent Application Laid-Open Nos. 06-155285 and 09-09
Japanese Patent Application Laid-Open No. 285959/1999 proposes a processing device with a sizing device.

[0004]

In the processing of an optical element such as a lens in the above-mentioned conventional polishing method and apparatus, a reduction in processing capacity during processing of a processing tool, a change in processing conditions such as pressurization, and a material to be processed. The processing dimensions of the processed optical element are likely to be non-uniform due to factors such as changes in the size, and it is difficult to uniformly manage the processing conditions.

[0005] Further, it is necessary to adjust the initially set processing time according to the object to be processed, and it is difficult to reduce the processing cost.

Conventionally, there is a case where an operator needs to adjust the processing conditions in consideration of the above-mentioned change in the processing conditions, and the workability, productivity and quality are adjusted according to the skill of the operator. There are many problems with the stability of.

[0007]

According to the present invention, in order to solve the above-mentioned problems, an optical element to be processed is mounted on a processing tool, and the rotational movement of the processing tool and the oscillating motion of the optical element to be processed cause the processing. In a processing method for processing the surface of an optical element, a method for processing an optical element, characterized by measuring a processing amount of the optical element to be processed during processing in association with the swinging motion, is proposed.

The present invention relates to a method for processing a surface of an optical element to be processed by placing an optical element to be processed on a processing tool and rotating the processing tool and oscillating movement of the optical element to be processed. An initial value of the processing optical element before processing is set, the processing of the optical element to be processed is performed by the rotational movement and the oscillating movement, and the processing is terminated when the set value with respect to the initial value is reached. The problem is solved by the method for processing an optical element described above.

One aspect of the present invention is a polishing method for attaching an optical element to a polishing tool and polishing a processing surface of the optical element by rotating and oscillating movement of the optical element. A step of detecting a processing end value before processing and a step of detecting a processing value of the optical element being processed, and ending the processing when the processing value reaches the processing end value. A polishing method for an optical element, characterized in that the polishing is performed, is proposed.

Another aspect of the present invention is a method of attaching an optical element to a polishing tool and polishing a processing surface of the optical element by rotating and swinging the optical element. A step of detecting a processing end numerical value before processing, calculating a processing time of the optical element based on a result of the detection step, and stopping the processing at the end of the processing time. An element polishing method is proposed. Further, the present invention provides a method of attaching an optical element to a polishing tool, and polishing a processing surface of the optical element by a rotational motion and a swinging motion of the optical element.
Means for detecting the numerical value of the optical element before processing,
The object is solved by a proposal of a polishing apparatus for an optical element, characterized in that the element to be optically processed is processed by means for managing the processing time by the polishing tool based on the result of the detection means.

In a method of attaching an optical element to a polishing tool and polishing the processing surface of the optical element by rotating and oscillating motion of the optical element, the dimensional value of the optical element before processing is determined by polishing. A polishing apparatus for an optical element, characterized in that the optical element is processed by means for managing the processing amount of the polishing tool based on a result of the detecting means and a result of the detecting means, is proposed. Further, the apparatus according to the present invention is a processing apparatus having means for oscillating an optical element to be processed and means for rotating a processing tool for processing the surface of the optical element to be processed, wherein the oscillating motion is A device for processing an optical element, characterized by comprising means for detecting the processing amount of the optical element to be processed in conjunction with the optical device.

Means for oscillating the optical element to be processed, means for rotating a processing tool for processing the surface of the optical element to be processed, means for detecting the processing amount of the optical element to be processed, There is a device for processing an optical element, comprising: means for stopping processing of an optical element to be processed. Further, the present invention is an optical element for processing an optical functional surface by a rotational motion of a processing tool and a swinging mobility of an optical element to be processed, while measuring a processing amount of the optical element during processing of the optical element. An optical element characterized by being processed is proposed.

The present invention is a lens for polishing by rotating and oscillating motion by placing a lens on a polishing dish, and detecting the size of the lens during machining in conjunction with the oscillating motion of the polishing process. There is an embodiment of a lens characterized by the following. In addition, a polishing plate that rotates with the lens on it,
A kansashi supporting the lens on the polishing plate; a unit for pressing and swinging the lens via the kansashi; and a unit for measuring the size of the lens in conjunction with the swinging movement. A featured lens polishing device is proposed.

12. The apparatus according to claim 11, wherein said measuring means has a detecting member which is linked to the movement of said kansashi.
There is an embodiment of the lens polishing apparatus described above. Further, a method for processing an optical function surface of a lens, wherein the lens is mounted on a processing apparatus, and after mounting, a reference value before processing the lens is measured, processing is performed, and the optical function is performed during processing. A method of processing an optically functional surface of a lens, characterized in that a numerical value of a surface is measured and compared with the reference value to process the lens into a predetermined lens size. Further, a method of processing an optical surface of a lens by a polishing plate that rotates and carries a lens, a kanshi supporting the lens on the polishing plate, and a unit that presses and swings the lens through the kanshi. In, a detection member linked to the Kansashi is connected to length measuring means, a reference value before processing of the lens is measured, a numerical value of the lens being processed is detected by the movement of the detection member,
A lens processing method is proposed wherein the processing value is detected by comparing the detected value with the reference value.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 shows the structure of a main part of an apparatus according to an embodiment of the present invention. In the figure, reference numeral 1 denotes an apparatus base, 2 denotes a polishing tank mounted on the base 1, and 4 denotes a polishing plate for polishing. Yes, it is rotated in the processing tank by the mounting shaft 6, the pulley 8, and the motor 10. Reference numeral 12 denotes a lens of the workpiece placed on the polishing plate 4, and reference numeral 14 denotes a lens holding member. Reference numeral 16 denotes a wrench member fitted in the pivot hole of the lens holding member 14, and 18 denotes a wrench holding member. 20A, 20
B is a kansashi arm divided into two branches. (See Fig. 2)

FIG. 2 is a plan view of a main part of FIG.
2 is a fixed plate member fixed on the base 1;
An LM guide 24 as a straight guide is mounted on the fixed plate 22. A rectilinear plate member 26 is attached to the LM guide 24 and moves linearly along the guide 24. Reference numeral 28 denotes a motor attached to the base 1. The rotation of the rotating shaft of the motor 28 is controlled by the belt 30, the pulley 3,
2 and 34, shafts 36A and 36B implanted at both ends of the oscillating member 36 via the oscillating member 36
A is fitted into the fitting hole 26B to cause the rectilinear plate 26 to swing. The straight plate 26 is an extended arm 26
The shaft 36B fits into the hole 26a of A and moves linearly along the LM guide 24 in conjunction with the swing member 36.

Reference numeral 40 denotes a pressurizing cylinder mounted on the rectilinear plate 26. The distal end 42A of a piston 42 of the cylinder is fitted with an engaging member 100 extending from the kansashi arm 20 by a shaft member 100a. And applies a pressing force to the kansashi arm 20.

Reference numeral 44 denotes a detection arm, and the arm shaft member 4
6 and connected to the kansashi arm 20. The detection arm 44 is linked to the movement of the kansashi arm 20 with the arm shaft 46 as a fulcrum. A detection probe 48 is engaged with the other end 44A of the detection arm 44. The detection probe 48 is held by a holder 50, and a position signal of the detection probe 48 is controlled by a control means via a signal line 52. 10
Enter 0.

That is, the detection arm 44 also swings about the shaft member 46 in accordance with the swing movement (arrow B) of the kansashi arm 20, whereby the signal output of the detection probe 48 changes.

FIG. 3 shows a control program of the present apparatus. The thickness of the lens 12 to be processed set on the polishing tool 4 before processing is measured at the initial position in the state of FIG.
4. Calculated every moment by the detection probe 48 and the control means 100.

(First Embodiment) A first embodiment of the operation of lens polishing will be described below. This example describes an example in which the processing amount of the lens to be processed is calculated, and the processing is terminated when the processing amount of the lens to be processed reaches the calculated processing amount.

(Setting of the origin position of the kansashi arm) The detection probe 48 on the detection arm 44 is set at the original position at a position before the lens to be processed on the polishing plate is installed. The origin position of the kansashi arm 20 is set to the position where the swinging position has moved the most in the direction A1 in FIG.

First, the lens 12 to be processed is set on the polishing plate 4. The polishing plate 4 stops at a position where it is most moved in the swinging motion direction A1 of the kansashi arm 20, and the lens 12 is installed at that position. (State in FIG. 1) When the lens is installed at the above position, the detection arm 44 is installed at the vertex position in the clockwise rotation direction in FIG.

The detection probe 48 on the detection arm 44
Is the axis fulcrum of the detection arm 44 accompanying the swinging movement of the kansashi arm 44 in the B direction due to the vertical movement of the kansashi 16 due to the installation of the lens to be processed on the polishing plate from the origin position of the kansashi arm 44. The movement in the counterclockwise direction with respect to the center is performed, whereby the detection probe 48 moves by a distance corresponding to the thickness dimension of the lens 12 to be processed, and the movement information of this probe indicates the dimension before processing of the lens to be processed. The information is input into the first lens information input unit 50 of the control unit 100.

(Input of lens processing operation information) The polishing plate 4
After the lens 12 to be processed is installed, information for processing the lens is input. As the information, the rotation speed of the rotation motor 10 for the polishing dish is set in the motor control unit M1. Inputting the pressure information of the pressure cylinder to the pressure control means P. The rotation speed of the motor 28 for the kansashi rocking is set in the motor control means M1.

(Input of Lens Information) The information input to the first lens information input means 50 is input to the first memory means 52. The lens thickness dimension of the lens to be processed 12 after processing is input from the second lens information input means 54 to the second memory means 56.

(Calculation of lens processing amount) The processing amount of the lens 12 to be processed is calculated by the calculating means 58 based on the information from the first lens information input means 50 and the second lens information input means.
Is calculated by

(Lens processing) In the above state, the motors 10 and 2 are driven by a processing start command signal from the control means 100.
The start signal is transmitted to 8 so that the rotating movement of the polishing plate 4 and the reciprocating movement of the rectilinear plate 36 are performed.

The reciprocating motion of the rectilinear plate 36 is converted into the oscillating motion of the kansashi arm 20, and
Oscillating motion of the lens 12 on the polishing plate is performed via the. Then, a pressurizing action by the pressurizing cylinder 40 is applied, and the lens is polished.

FIG. 4 shows the detection probe 48 at the position of movement of the lens in the polishing plate 4 due to the rotational movement of the polishing tool 4 and the swinging movement of the kansashi arm 20 during the polishing of the lens.
FIG. 3 is a diagram schematically showing a moving state of FIG. In accordance with the position of the lens on the polishing plate, the kansashi arm swings about the pivot point 46 and the position of the detection probe 48 changes. When the polishing of the lens on the polishing plate progresses and the thickness of the lens decreases due to the polishing of the lens being processed, the detection signal of the detection probe 48 changes. Therefore, the change amount of the detection signal of the detection probe 48 at the origin position of the lens on the polishing plate can be replaced with the processing amount (polishing amount) of the lens. The signal from the detection probe 48 at the origin position of the lens being processed is input to the second memory 56 through the lens information input means 54.

(End of processing) The polishing operation of the lens 12 proceeds, the dimension information of the lens being processed through the detection probe 48 is sequentially input to the calculating means 58, and the processing is completed with the dimension of the lens being processed set. When the dimensions match, the control means 100 performs a lens processing end operation.

(Second Embodiment) Another embodiment of the present invention is a processing method for inputting information before processing of a lens to be processed from the detection probe 48 and controlling a processing time based on the information. Can be suggested.

The configuration shown in FIGS. 1 and 2 can be adopted and the control block can be partially changed to cope with the problem.

In FIG. 5, lens dimension information before processing of a lens to be processed is detected through a detection probe, and processing end dimension information of the lens is input to the second lens information input means. The time required for processing the lens to be installed at the estuary is calculated by the second calculating means 60 based on the two pieces of lens dimensional information and the information such as the polishing processing capability of the polishing tool 4, the number of rotations of the motor, and the amount of oscillating momentum.

In FIG. 5, means having the same or similar functions as in the first embodiment are denoted by the same reference numerals. The time calculated by the second calculation means is input to the operation time setting means 62, and the processing time is managed by controlling the operation time of the motor control means M1 based on the information of the operation time setting means. be able to.

[0037]

As described above, according to the present invention, information on the amount of processing is calculated by inputting lens information before processing the lens to be processed and inputting lens information during processing every moment. In addition, by calculating information on the amount of processing, the productivity of lens processing could be increased.

Further, according to the present invention, since the processing time can be managed based on the input of the lens information, the worker does not need to stick to the machine, and the production efficiency can be improved.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram of a configuration of a polishing apparatus according to the present invention.

FIG. 2 is an explanatory view of a plane in FIG.

FIG. 3 is a control block diagram of the first embodiment.

FIG. 4 is an explanatory diagram of a kansashi arm and a detection arm.

FIG. 5 is a control block diagram of a second embodiment.

[Explanation of symbols]

 2 Processing tank 4 Polishing tool (polishing dish) 10 Motor 12 Lens 14 Lens holding member 16 Kansashi 18 Kansashi holding member 20A, 20B Kansashi arm 22 Holding plate 24 Straight guide (LM guide) 26 Swing plate 28 Motor 30 Belt 36 Straight member 40 Pressurizing cylinder 44 Detection arm 48 Detection probe 50, 54 Lens information input means 52, 56 Memory means 58 First calculation means 60 Second calculation means 62 Operation time setting means 100, 110 Control means

Continued on the front page (51) Int.Cl. ⁷ Identification FI FI Theme Court II (Reference) B24B 51/00 B24B 51/00 (72) Inventor Shunichi Asami 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. F term (reference) 3C034 AA08 AA13 BB39 BB76 BB92 CB03 CB18 3C049 AA04 AA12 AA13 BA07 CA02 CB01

Claims (14)

[Claims] 1. A processing method of mounting a processing optical element on a processing tool and processing a surface of the processing optical element by a rotational motion of the processing tool and a rocking motion of the processing optical element. A method for processing an optical element, comprising: measuring a processing amount of the optical element to be processed during processing in conjunction with the optical element. 2. A processing method for mounting an optical element to be processed on a processing tool and processing the surface of the optical element to be processed by a rotational motion of the processing tool and a swinging motion of the optical element to be processed. An initial value before processing the element is set, the processing of the optical element to be processed is performed by the rotational movement and the oscillating movement, and the processing is terminated when the set value for the initial value is reached. Processing method of optical element. 3. A polishing method in which an optical element is mounted on a polishing tool and a processing surface of the optical element is polished by rotating and oscillating motion of the optical element. A step of detecting a numerical value and a step of detecting a numerical value of the optical element being processed during processing are provided, and the processing is terminated when the numerical value during processing reaches the processing end value. Polishing method for an optical element. 4. A method of attaching an optical element to a polishing tool and polishing a processing surface of the optical element by rotating and oscillating movement of the optical element. Detecting the, the processing time of the optical element based on the result of the detection step is calculated,
A polishing method for an optical element, wherein the processing is stopped when the processing time ends. 5. A method of attaching an optical element to a polishing tool and polishing a processing surface of the optical element by rotating and oscillating movement of the optical element. An optical element polishing apparatus, characterized in that the optical element is machined by a means for detecting and a means for managing a machining time by the polishing tool based on a result of the detecting means. 6. A method of attaching an optical element to a polishing tool and polishing a processing surface of the optical element by rotating and oscillating motion of the optical element, wherein a dimensional value of the optical element before processing is determined. An optical element polishing apparatus, characterized in that the optical element is machined by a means for detecting and a means for managing an amount of machining by the polishing tool based on a result of the detecting means. 7. A processing apparatus having means for oscillating an optical element to be processed and means for rotating a processing tool for processing the surface of the optical element to be processed. An apparatus for processing an optical element, comprising: means for detecting a processing amount of the optical element to be processed. 8. A means for oscillating the optical element to be processed, a means for rotating a processing tool for processing the surface of the optical element to be processed, a means for detecting a processing amount of the optical element to be processed, Means for stopping the processing of the optical element to be processed. 9. An optical element for processing an optical function surface by a rotational motion of a processing tool and a swinging mobility of an optical element to be processed, wherein the processing is performed while measuring a processing amount of the optical element during processing of the optical element. An optical element characterized in that: 10. A lens to be polished by rotating and oscillating motion by placing a lens on a polishing dish, wherein the size of the lens being processed is detected in conjunction with the oscillating motion of the polishing process. A lens characterized by the following. 11. A polishing plate that rotates with a lens mounted thereon, a kansashi supporting the lens on the polishing plate,
An apparatus for polishing a lens, comprising: means for pressurizing and oscillating the lens via the kansashi; and means for measuring the size of the lens in conjunction with the oscillating movement. 12. The lens polishing apparatus according to claim 6, wherein said measuring means has a detecting member which is linked to the movement of said kansashi. 13. A method for processing an optically functional surface of a lens, comprising: mounting the lens on a processing device; measuring a reference value before processing the lens after mounting; performing processing; A method of processing an optically functional surface of a lens, comprising: measuring a numerical value of the optically functional surface; comparing the numerical value with the reference value; 14. A polishing plate that rotates with a lens placed thereon, a kansashi supporting the lens on the polishing plate,
In a method of processing an optical surface of a lens by means for pressing and swinging the lens through the kansashi, a detecting member linked to the kansashi is connected to a length measuring means, and a reference value before processing the lens is measured. A numerical value of the lens being processed is detected by the movement of the detection member, and the detected value is compared with the reference value to detect a processing state.