WO2022107201A1 - Workpiece machining device and ultrasonic machining apparatus equipped with same - Google Patents

Workpiece machining device and ultrasonic machining apparatus equipped with same Download PDF

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Publication number
WO2022107201A1
WO2022107201A1 PCT/JP2020/042782 JP2020042782W WO2022107201A1 WO 2022107201 A1 WO2022107201 A1 WO 2022107201A1 JP 2020042782 W JP2020042782 W JP 2020042782W WO 2022107201 A1 WO2022107201 A1 WO 2022107201A1
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WO
WIPO (PCT)
Prior art keywords
cutter blade
work
angle
urging
processing apparatus
Prior art date
Application number
PCT/JP2020/042782
Other languages
French (fr)
Japanese (ja)
Inventor
辰巳 菱川
Original Assignee
スターテクノ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by スターテクノ株式会社 filed Critical スターテクノ株式会社
Priority to PCT/JP2020/042782 priority Critical patent/WO2022107201A1/en
Priority to JP2021510137A priority patent/JP7100926B1/en
Priority to CN202080106608.6A priority patent/CN116390825B/en
Priority to CN202410959510.5A priority patent/CN118650214A/en
Publication of WO2022107201A1 publication Critical patent/WO2022107201A1/en
Priority to JP2022102363A priority patent/JP2022132675A/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23DPLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D79/00Methods, machines, or devices not covered elsewhere, for working metal by removal of material

Definitions

  • the present invention relates to a work processing device for processing a work and an ultrasonic processing device provided with the work processing device.
  • Patent Document 1 and Patent Document 2 describe an ultrasonic processing apparatus that processes a work using a cutter blade 10, and the ultrasonic processing apparatus uses a cutter blade 10 according to the shape of the work.
  • the swing mechanism is urged against the swing angle direction of the cutter blade 10 by the coil spring mechanism 84 so that the cutter blade 10 is pressed against the surface of the workpiece. (See FIGS. 13 and 14 of Citation 1 and FIGS. 13 and 14 of Citation 2).
  • Cited Document 1 and Cited Document 2 are swung by the coil spring mechanism 84 and pressed against the workpiece, the pressing force against the workpiece is exerted by the swinging length. Unlike this, there was a problem that the workpiece could not be processed with high accuracy.
  • the present invention has been made in response to the above-mentioned problems of the prior art, and controls the pressing force of the cutter blade against the workpiece to make the workpiece (hereinafter referred to as "work") accurate. It is an object of the present invention to provide a work processing device capable of processing well, and an ultrasonic processing device provided with the work processing device and capable of processing the work with high accuracy.
  • the first aspect of the present invention is a work processing device for processing a work using a cutter blade, wherein the cutter blade is fixed with respect to the work according to the shape of the work.
  • the cutter blade position changing mechanism capable of changing the position of the direction and the cutter blade position urging mechanism for urging the cutter blade position changing mechanism against the changing direction of the position of the cutter blade are provided.
  • the position urging mechanism with a cutter blade is characterized in that the cutter blade position changing mechanism is urged with a substantially constant urging force regardless of the position of the cutter blade by the cutter blade position changing mechanism.
  • the second aspect of the present invention is characterized in that the work processing apparatus of the first aspect includes a cutter blade position locking mechanism for fixing the position of the cutter blade in the fixed direction with respect to the work.
  • the angle of the cutter blade with respect to the traveling direction can be changed according to the shape of the work. It is characterized by comprising a mechanism and a cutter blade angle urging mechanism that urges the cutter blade angle changing mechanism against the direction of changing the angle of the cutter blade.
  • a fourth aspect of the present invention is that in the work processing apparatus of the third aspect, the cutter blade angle urging mechanism has a cutter blade angle with a substantially constant urging force regardless of the angle of the cutter blade. It is characterized by encouraging a change mechanism.
  • the fifth aspect of the present invention is characterized in that the work processing apparatus of the third aspect or the fourth aspect is provided with a cutter blade angle locking mechanism for fixing the angle.
  • the ultrasonic processing apparatus includes the work processing apparatus according to any one of the first to fifth aspects, and the direction in which the cutter blade intersects the fixed direction with respect to the work.
  • the work is processed by ultrasonically vibrating.
  • the ultrasonic processing apparatus includes the work processing apparatus according to any one of the third to fifth aspects, and the cutter blade is oriented in a direction intersecting the angle changing direction. It is characterized by processing a workpiece by vibrating it with ultrasonic waves.
  • the cutter blade is positioned in a certain direction with respect to the work according to the shape of the work, in particular, for a device that processes a work using a cutter blade.
  • the cutter blade position urging mechanism is equipped with a changeable cutter blade position changing mechanism and a cutter blade position urging mechanism that urges the cutter blade position changing mechanism against the changing direction of the cutter blade position. Regardless of the position of the cutter blade by the cutter blade position changing mechanism, the cutter blade position changing mechanism is urged with a substantially constant urging force, so that the workpiece can be machined with high accuracy.
  • the work processing apparatus of the first aspect includes a cutter blade position locking mechanism for fixing the position of the cutter blade in a certain direction with respect to the work.
  • the work can be processed by selecting a mechanism for effectively pressing the cutter blade according to the shape of the work.
  • the angle of the cutter blade with respect to the traveling direction can be changed according to the shape of the work. Since the cutter blade angle changing mechanism and the cutter blade angle urging mechanism for urging the cutter blade angle changing mechanism against the changing direction of the cutter blade angle are provided, the first aspect or the second aspect is provided. In addition to the effect of the work processing device of the embodiment, it is possible to effectively press the cutter blade to process a work having a complicated processing shape.
  • the cutter blade angle urging mechanism is a cutter with a substantially constant urging force regardless of the angle of the cutter blade. Since the blade angle changing mechanism is urged, in addition to the effect of the work processing device of the third aspect, even a work having a complicated processing shape can be processed by pressing the cutter blade more effectively.
  • the work processing apparatus includes a cutter blade angle locking mechanism for fixing the angle.
  • the work can be processed by selecting a mechanism for effectively pressing the cutter blade according to the shape of the work.
  • the work processing apparatus according to any one of the first to fifth aspects is provided, and the cutter blade is oriented in a direction intersecting a certain direction with respect to the work. Since the work is machined by ultrasonically vibrating, the work can be machined more precisely.
  • the work processing apparatus according to any one of the third to fifth aspects is provided, and the cutter blade is oriented in a direction intersecting the angle changing direction. Since the work is machined by ultrasonically vibrating, the work can be machined more precisely.
  • FIG. 2 is a cross-sectional view taken along the line AA of FIG.
  • FIG. 2 is a cross-sectional view taken along the line BB of FIG. 2, showing a state in which the cutter blade angle urging cylinder is turned on and no load is applied to the cutter blade (angle of 0 degrees).
  • FIG. 2 is a cross-sectional view taken along the line CC of FIG. 2, showing a state in which the cutter blade position urging cylinder is turned on and no load is applied to the cutter blade (position 0 mm).
  • FIG. 2 is a cross-sectional view taken along the line CC of FIG.
  • FIG. 2 shows a state (angle + X1 mm) in which the cutter blade position urging cylinder is turned on, a load is applied to the cutter blade, and the cutter blade is displaced by the maximum displacement in the + X direction.
  • FIG. 2 it is a figure showing a state (angle ⁇ X1 mm) in which the cutter blade position urging cylinder is turned on, a load is applied to the cutter blade, and the cutter blade is displaced by the maximum displacement in the ⁇ X direction.
  • FIG. 2 In the cross-sectional view taken along the line CC of FIG. 2, it is a diagram showing a state (displacement 0 mm) in which the cylinder for locking the cutter blade position is turned on and the position of the cutter blade is fixed.
  • FIG. 1 is an overall side view of the ultrasonic processing apparatus according to the embodiment of the present invention.
  • the ultrasonic processing apparatus 1 of the present embodiment has a table 10, an articulated robot 3 fixed to the table 10, and a work rotatably connected to the tip of the articulated robot 3.
  • the processing apparatus 5 the work installation table 16 provided on the table 10, the oscillator 2, the main controller 4 and the robot controller 6 arranged on the table 10, and the air compressor 14 arranged outside the table 10 (see FIG. 6). ) And.
  • the ultrasonic processing apparatus 1 of the present embodiment ultrasonically vibrates the tapered cutter blade 69, which is connected to the tip of the work processing apparatus 5 and whose both sides are polished, in the vertical direction on the drawing by the vibrator 71.
  • the work W installed on the work installation table 16 is processed by the above method.
  • the work installation table 16 is provided with an operation panel 8, and the operator of the ultrasonic processing apparatus 1 can operate the ultrasonic processing apparatus 1 by operating the operation panel 8.
  • the articulated robot 3 is a general 5-axis articulated robot that operates according to a command from the robot controller 6, and faces the work W by freely changing the position and angle of the work processing device 5.
  • the articulated robot 3 has a first rotation shaft 44 for turning the second base 34 with respect to the first base 32, and a lower arm portion (lower arm portion) with respect to the second base 34.
  • the articulated robot 3 is electrically connected to the robot controller 6 by a cable (not shown), and the robot controller 6 is electrically connected to the main controller 4 (see FIG. 6).
  • FIG. 2 is an overall perspective view of the work processing device 5 provided in the ultrasonic processing device 1 of the present embodiment
  • FIG. 3 is a sectional view taken along the line AA of FIG. 2
  • FIG. 4 is a sectional view of FIG. It is a cross-sectional view of BB, and it is the figure which shows the state which the cylinder for urging the cutter blade angle is turned on, and the load is not applied to the cutter blade (the angle is 0 degree)
  • FIG. It is a figure which shows the state (the angle 0 degree) that the cylinder for urging the cutter blade position is turned on, and the load is not applied to the cutter blade.
  • the work processing device 5 is installed on the work installation table 16 by ultrasonically vibrating the cutter blade 69 connected to the tip thereof by the vibrator 71 electrically connected from the oscillator 2 via the cable 73.
  • the work W is processed.
  • the work processing apparatus 5 includes a lower cutter blade angle changing mechanism 9, a first cutter blade angle urging cylinder 75a, a second cutter blade angle urging cylinder 75b, and a cutter.
  • the cutter blade angle changing mechanism 9 is rotatably connected to a base shaft 11 fixed to the work processing device 5 and the base shaft 11, and the vibrator 71 and the cutter blade 69 are connected to the base shaft 11.
  • the first protruding portion 83 provided on the rotating body 13 and capable of contacting the third protruding portion 87 described later, and the first protruding portion 83 of the rotating body 13.
  • a second protrusion 85 provided and capable of contacting a fourth protrusion 89 described later, a recess 91 provided in the rotating body 13 to which the lock pin 39 described later fits, and the rotating body 13 can rotate. It is provided with the formed gap portion 15.
  • the first cutter blade angle urging cylinder 75a urges the rotating body 13 against the rotational force of the left rotation of the rotating body 13 in a plan view, and is the first having a gap 21 inside.
  • a first housing 17 includes a housing 17, a piston 19 slidably arranged in a gap 21 of the first housing 17, and a third protrusion 87 connected to the tip of the piston 19.
  • the gap 21 of the housing 17 and the air compressor 14 are communicated with each other by a connecting tube 23.
  • the second cutter blade angle urging cylinder 75b urges the rotating body 13 against the rotational force of clockwise rotation of the rotating body 13, and has a gap 29 inside.
  • the gap 29 of the housing 25 of 2 and the air compressor 14 are communicated with each other by a connecting tube 31.
  • the first cutter blade angle urging cylinder 75a, the second first cutter blade angle urging cylinder 75b, the connecting tube 23, the connecting tube 31, and the air compressor 14 are the “cutter blade angle urging cylinders" of the present invention. It constitutes a “mechanism”.
  • the cutter blade angle locking cylinder 77 stops the rotation of the rotating body 13, and has a third housing 33 having a gap 37 (see FIG. 12) inside, and a third housing thereof.
  • a piston 35 slidably arranged in the gap 37 of the 33, and a lock pin 39 connected to the tip of the piston 35 are provided, and the gap 37 of the third housing 33 and the air compressor 14 (FIG. 6) are provided. (See) is communicated with the connecting tube 41 and the connecting tube 43.
  • the cutter blade angle locking cylinder 77, the connecting tube 41, the connecting tube 43, and the air compressor 14 constitute the "cutter blade angle locking mechanism" of the present invention.
  • the cutter blade position changing mechanism 7 includes a base 92 fixed to the work processing device 5, a moving body 90 movably connected to the base 92, and the moving body thereof.
  • a portion 98 and a recess 93 provided in the moving body 90 and fitted with a lock pin 67 described later are provided.
  • the first cutter blade position urging cylinder 79a includes a fourth housing 45 having a gap 49 inside, and a piston 47 slidably arranged in the gap 49 of the fourth housing 45.
  • a fifth protrusion 95 connected to the tip of the piston 47 is provided, and the gap 49 of the fourth housing 45 and the air compressor 14 (see FIG. 6) are communicated with each other by a connecting tube 51. ..
  • the second cutter blade position urging cylinder 79b has a fifth housing 53 having a gap 57 inside and a piston slidably arranged in the gap 57 of the fifth housing 53.
  • the 55 and the sixth protrusion 99 connected to the tip of the piston 55 are provided, and the gap 57 of the fifth housing 53 and the air compressor 14 (see FIG. 6) are communicated with each other by a connecting tube 59. ing.
  • the first cutter blade position urging cylinder 79a, the second cutter blade position urging cylinder 79b, the connecting tube 51, the connecting tube 59, and the air compressor 14 provide the "cutter blade position urging mechanism" of the present invention. Configure.
  • the cutter blade position locking cylinder 81 slides into a sixth housing 61 having a gap 65 (see FIG. 16) inside and a gap 65 (see FIG. 16) of the sixth housing 61.
  • the cutter blade position locking cylinder 81, the connecting tube 94, the connecting tube 96, and the air compressor 14 constitute the "cutter blade position locking mechanism" of the present invention.
  • FIG. 6 is a block diagram of the ultrasonic processing apparatus of the present embodiment
  • FIG. 7 is a block diagram of the main controller of the ultrasonic processing apparatus of the present embodiment.
  • the ultrasonic processing apparatus 1 is electrically connected to a main controller 4 electrically connected to a power supply 12, and is electrically connected to the main controller 4, and is a first cutter blade angle urging cylinder 75a, a second. 1st cutter blade angle urging cylinder 75b, cutter blade angle locking cylinder 77, 1st cutter blade position urging cylinder 79a, 2nd cutter blade position urging cylinder 79b and cutter blade position locking
  • first cutter blade angle urging cylinder 75a and the second first cutter blade angle urging cylinder 75b are collectively referred to as “cylinder blade angle urging cylinder 75".
  • the cutter blade position urging cylinder 79a and the second cutter blade position urging cylinder 79b of 1 may be collectively referred to as “cylinder blade position urging cylinder 79".
  • the main controller 4 has a CPU (central processing unit) 22, a RAM (Random Access Memory) 24 connected to the CPU 22 so as to be input / output, and a ROM connected to the CPU 22 so as to be input / output. (Read Only Memory) 26 is provided.
  • CPU central processing unit
  • RAM Random Access Memory
  • ROM Read Only Memory
  • the RAM 24 is a processing data table 24a that stores processing data for processing the work W, and a processing mode data table that stores setting items corresponding to the processing modes described later when the ultrasonic processing apparatus 1 processes the work W. 24b and the like.
  • the ROM 26 includes a main program 26a that controls the operation of the entire ultrasonic processing apparatus 1 of the present embodiment, and an ultrasonic processing program 26b that executes ultrasonic processing of the ultrasonic processing apparatus 1 according to a processing mode described later. Be prepared.
  • FIG. 8 is a flowchart of the main program in the ultrasonic processing apparatus of the present embodiment
  • FIG. 9 is a flowchart of the ultrasonic processing program in the ultrasonic processing apparatus of the present embodiment.
  • the work W installed on the work installation table 16 is obtained by ultrasonically vibrating the cutter blade 69 connected to the tip of the work processing apparatus 5 by the vibrator 71. Is to be processed.
  • the ultrasonic processing apparatus 1 of the present embodiment has four processing modes as processing modes for processing the work W.
  • the ultrasonic processing apparatus 1 of the present embodiment urges the cutter blade 69 with the cutter blade angle urging cylinder 75 and the cutter blade position urging cylinder 79 turned on to urge the work W.
  • the first machining mode for machining and the second machining mode for machining the work W by urging the cutter blade 69 with the cutter blade angle locking cylinder 77 and the cutter blade position urging cylinder 79 turned on.
  • a fourth machining mode for machining the work W without urging the cutter blade 69 with the cutter blade position locking cylinder 81 turned on is provided.
  • FIG. 8 first, after the operator of the device turns on the power switch, the number of workpieces to be processed and the machining mode are input by the operation buttons on the operation panel 8 and the start button is pressed. , The arm of the articulated robot 3 is moved to the initial position (S1), the number of workpieces to be processed is set (S3), and the setting items are extracted from the processing mode data table 24b based on the input processing mode (S5). ), The ultrasonic processing program described later is executed (S7).
  • the first machining mode for machining the work W is set by urging the cutter blade 69 with the cutter blade angle urging cylinder 75 and the cutter blade position urging cylinder 79 turned on. do.
  • the first machining mode is the optimum machining mode when machining a work W having a complicated machining shape.
  • the first machining mode uses the cutter blade angle urging mode (S23: Yes)
  • the first cutter blade angle urging cylinder 75a and the second cutter blade angle urging cylinder 75b are turned on (S23: Yes).
  • S25 it is determined whether or not the machining mode is the cutter blade position urging mode (S29).
  • the first machining mode uses the cutter blade position urging mode (S29: Yes), the first cutter blade position urging cylinder 79a and the second cutter blade position urging cylinder 79b are used. It is turned on (S31).
  • the first cutter blade angle urging cylinder 75a is turned on, and air flows from the air compressor 14 via the connecting tube 23 to the first cutter blade angle urging cylinder.
  • the piston 19 is lowered to the upper and lower sides of the drawing, and a third protrusion 87 connected to the tip of the piston 19 is provided on the rotating body 13. It abuts on the protrusion 83 of 1.
  • the second cutter blade angle urging cylinder 75b is turned on, and air flows from the air compressor 14 via the connecting tube 31 to the gap portion of the second housing 25 of the second cutter blade angle urging cylinder 75b.
  • the piston 27 rises upward on the drawing, and the fourth protrusion 89 connected to the tip of the piston 27 abuts on the second protrusion 85 provided on the rotating body 13.
  • the rotating body 13 rotates clockwise with respect to the base shaft 11 in the drawing. Although rotatable in the direction and counterclockwise direction, the rotating body 13 is urged by a third protrusion 87 connected to the tip of the piston 19 and a fourth protrusion 89 connected to the tip of the piston 27. As a result, if no load is applied to the cutter blade 69, the cutter blade 69 is in a stable state at a position at an angle of 0 degrees (see FIG. 13).
  • each arm of the articulated robot 3 is moved (S39) so that the cutter blade 69 is located at the machining start position with respect to the work W, and the cutter blade 69 is moved to ultrasonically machine the work W (S41). ).
  • FIG. 10 shows a state in which the cutter blade angle urging cylinder is turned on, a load is applied to the cutter blade, and the cutter blade is rotated by a maximum angle in the counterclockwise direction (angle + ⁇ 1 degree) in the BB sectional view of FIG. 11 is a state in which the cutter blade angle urging cylinder is turned on, a load is applied to the cutter blade, and the cutter blade is rotated by the maximum angle in the clockwise direction in the BB sectional view of FIG. It is a figure which shows (angle ⁇ 1 degree), and FIG. 13 is a figure which looked at the attached cutter blade from the lower side, and is the explanatory view explaining the relationship between the cutter blade and the rotation direction of a cutter blade.
  • FIG. 4 shows a state in which no load is applied to the cutter blade 69, but in the first machining mode, the cutter blade 69 rotates from the work W during the work W machining of the work machining apparatus 5.
  • the cutter blade 69 is configured to be rotatable within a range of ⁇ several degrees (maximum ⁇ 5 °).
  • the rotating body 13 has a third protrusion 87 connected to the tip of the piston 19 by turning on the first cutter blade angle urging cylinder 75a and the second cutter blade angle urging cylinder 75b. Abuts on the first protrusion 83 provided on the rotating body 13, and the fourth protrusion 89 connected to the tip of the piston 27 hits the second protrusion 85 provided on the rotating body 13. It is correct that by touching the cylinder, it is always urged toward a position at an angle of 0 degrees (see FIG. 13), and it can rotate in that state.
  • a rotational load is applied to the cutter blade 69 with the first cutter blade angle urging cylinder 75a and the second cutter blade angle urging cylinder 75b turned on.
  • the first protrusion 83 provided on the rotating body 13 keeps pushing the third protrusion 87 connected to the tip of the piston 19, and the cutter blade 69 rotates the maximum angle in the counterclockwise direction on the drawing ( At an angle + ⁇ 1 degree)
  • the first protrusion 83 provided on the rotating body 13 abuts on the third protrusion 87 connected to the tip of the piston 19, but the second protrusion provided on the rotating body 13 is provided.
  • the protrusion 85 does not abut on the fourth protrusion 89 connected to the tip of the piston 27.
  • the first protrusion 83 provided on the rotating body 13 keeps pushing the third protrusion 87 connected to the tip of the piston 19, the first protrusion abuts on the third protrusion 87.
  • the portion 83 is urged from the third protrusion 87 in the ⁇ direction by a force of f1.
  • the force f1 does not change depending on the angle of the rotating body 13, but is constant as long as the first protrusion 83 abuts on the third protrusion 87.
  • a rotational load is applied to the cutter blade 69 with the first cutter blade angle urging cylinder 75a and the second cutter blade angle urging cylinder 75b turned on.
  • the second protrusion 85 provided on the rotating body 13 keeps pushing the fourth protrusion 89 connected to the tip of the piston 27, and the cutter blade 69 rotates the maximum angle in the clockwise direction on the drawing.
  • the second protrusion 85 provided on the rotating body 13 abuts on the fourth protrusion 89 connected to the tip of the piston 27, but is provided on the rotating body 13.
  • the first protrusion 83 does not abut on the third protrusion 87 connected to the tip of the piston 19.
  • FIG. 14 is a diagram showing a state (angle + X1 mm) in which the cutter blade position urging cylinder is turned on, a load is applied to the cutter blade, and the cutter blade is maximally displaced in the + X direction in the CC sectional view of FIG. 15 shows a state in which the cutter blade position urging cylinder is turned on, a load is applied to the cutter blade, and the cutter blade is displaced by the maximum displacement in the ⁇ X direction (angle-) in the CC sectional view of FIG. It is a figure which shows X1mm).
  • FIG. 5 shows a state (position 0 mm) in which the first cutter blade position urging cylinder 79a and the second cutter blade position urging cylinder 79b are turned on and no load is applied to the cutter blade.
  • the cutter blade 69 when the cutter blade 69 receives a load from the work W during the machining of the work W of the work machining apparatus 5, the cutter blade 69 is ⁇ several mm (maximum ⁇ 5 mm). It is configured to be movable within the range of.
  • the seventh protrusion 97 provided on the moving body 90 is formed by turning on the first cutter blade position urging cylinder 79a and the second cutter blade position urging cylinder 79b.
  • the eighth protrusion 98 provided on the moving body 90 abuts on the fifth protrusion 95 connected to the tip of the piston 47, and hits the sixth protrusion 99 connected to the tip of the piston 55. It is correct that the contact is always in a state of being urged toward the position of 0 mm (see FIG. 14), and it is possible to move in that state.
  • a load is applied to the cutter blade 69 with the first cutter blade position urging cylinder 79a and the second cutter blade position urging cylinder 79b turned on, and the moving body 90
  • the eighth protrusion 98 provided in the above continues to push the sixth protrusion 99 connected to the tip of the piston 55 and the cutter blade 69 moves the maximum displacement in the + X direction (angle + X1 mm)
  • the moving body 90 The eighth protrusion 98 provided on the moving body 90 abuts on the sixth protrusion 99 connected to the tip of the piston 55, while the seventh protrusion 97 provided on the moving body 90 abuts on the tip of the piston 47. Does not abut on the fifth protrusion 95 connected to.
  • the eighth protrusion 98 provided on the moving body 90 continues to push the sixth protrusion 99 connected to the tip of the piston 55, the eighth protrusion abuts on the sixth protrusion 99.
  • the portion 98 is urged from the sixth protrusion 99 in the ⁇ X direction by a force of f2. Note that this force f2 does not change depending on the position of the moving body 90, but is constant as long as the eighth protrusion 98 abuts on the sixth protrusion 99.
  • a load is applied to the cutter blade 69 and the cutter blade 69 moves while the first cutter blade position urging cylinder 79a and the second cutter blade position urging cylinder 79b are turned on.
  • the seventh protrusion 97 provided on the body 90 keeps pushing the fifth protrusion 95 connected to the tip of the piston 47, and the cutter blade 69 moves the maximum displacement in the ⁇ X direction (angle ⁇ X1 mm).
  • the seventh protrusion 97 provided on the moving body 90 abuts on the fifth protrusion 95 connected to the tip of the piston 47, but the eighth protrusion 98 provided on the moving body 90 is , Does not abut on the sixth protrusion 99 connected to the tip of the piston 55.
  • the seventh protrusion 97 provided on the moving body 90 continues to push the fifth protrusion 95 connected to the tip of the piston 47, the seventh protrusion abuts on the fifth protrusion 95.
  • the portion 97 is urged from the fifth protrusion 95 in the + X direction by a force of f2. Note that this force f2 does not change depending on the position of the moving body 90, but is constant as long as the seventh protrusion 97 abuts on the fifth protrusion 95.
  • the second machining mode does not use the cutter blade angle urging mode (S23: No)
  • the first cutter blade angle locking cylinder 77 is turned on (S27), so whether the machining mode is the cutter blade position urging mode. Whether or not it is determined (S29).
  • the second machining mode uses the cutter blade position urging mode (S29: Yes), the first cutter blade position urging cylinder 79a and the second cutter blade position urging cylinder 79b are used. It is turned on (S31).
  • FIG. 12 is a diagram showing a state (angle 0 degree) in which the cutter blade angle locking cylinder is turned on and the angle of the cutter blade is fixed in the cross-sectional view taken along the line BB of FIG.
  • the cutter blade angle locking cylinder 77 is turned on, and air flows from the air compressor 14 via the connecting tube 41 and the connecting tube 43 to the third cylinder 77 for locking the cutter blade angle.
  • the piston 35 moves to the left side in the drawing, and the lock pin 39 connected to the tip of the piston 35 fits into the recess 91 provided in the rotating body 13.
  • each arm of the articulated robot 3 is moved (S39) so that the cutter blade 69 is located at the machining start position with respect to the work W, and the cutter blade 69 is moved to ultrasonically machine the work W (S41). ).
  • FIGS. 5, 14 and 15 are shown. With reference, as described above.
  • the machining device 5 fixes the angle of the cutter blade 69 to an angle of 0 degrees, and at the same time, the cutter blade 69 is moved toward the position of the position 0 mm with a constant force f2 with respect to the work W.
  • the work W is processed so as to be urged.
  • the third machining mode is also an appropriate machining mode when machining a work W having a complicated machining shape, but is used when machining at a higher speed than the first machining mode.
  • the third machining mode uses the cutter blade angle urging mode (S23: Yes)
  • the first cutter blade angle urging cylinder 75a and the second cutter blade angle urging cylinder 75b are turned on (S23: Yes).
  • S25 it is determined whether or not the machining mode is the cutter blade position urging mode (S29).
  • FIG. 16 is a diagram showing a state (displacement 0 mm) in which the cutter blade position locking cylinder is turned on and the position of the cutter blade is fixed in the CC cross-sectional view of FIG.
  • the cutter blade position locking cylinder 81 is turned on, and air flows from the air compressor 14 via the connecting tube 94 and the connecting tube 96 to the sixth cylinder 81 for locking the cutter blade position.
  • the piston 63 moves to the left side in the drawing, and the lock pin 67 connected to the tip of the piston 63 fits into the recess 93 provided in the moving body 90.
  • each arm of the articulated robot 3 is moved (S39) so that the cutter blade 69 is located at the machining start position with respect to the work W, and the cutter blade 69 is moved to ultrasonically machine the work W (S41). ).
  • the internal operation is as described above with reference to FIGS. 4, 10, 11 and 13.
  • the machining apparatus 5 fixes the position of the cutter blade 69 to the position 0 mm, and attaches the cutter blade 69 to the work W with a constant force f1 toward an angle of 0 degrees.
  • the work W is processed so as to be vigorous.
  • the cutter blade angle locking cylinder 77 is turned on (S27), and whether the machining mode is the cutter blade position urging mode or not. It is determined (S29).
  • the cutter blade position locking cylinder 81 is turned on (S33).
  • each arm of the articulated robot 3 is moved (S39) so that the cutter blade 69 is located at the machining start position with respect to the work W, and the cutter blade 69 is moved to ultrasonically machine the work W (S41). ).
  • FIGS. 5 and 16 for the operation inside the work processing apparatus 5 when processing the work W without urging the cutter blade 69 with the cutter blade position locking cylinder 81 turned on. , As described above.
  • the processing apparatus 5 processes the work W by fixing the angle of the cutter blade 69 to an angle of 0 degrees and the position of the cutter blade 69 to a position of 0 mm.
  • the oscillator 2 is turned off in order to stop the ultrasonic vibration of the vibrator 71 connected to the cutter blade 69 (S9), and the first cutter blade angle urging cylinder 75a, Second cutter blade angle urging cylinder 75b, cutter blade angle locking cylinder 77, first cutter blade position urging cylinder 79a, second cutter blade position urging cylinder 79b and cutter blade position locking cylinder All the cylinders of 81 are turned off (S11).
  • the work W is machined by using the cutter blade 69, and the cutter blade 69 is particularly oriented in a certain direction with respect to the work W according to the shape of the work W.
  • the first cutter blade position urging cylinder 79a and the second cutter blade position urging cylinder 79a and the second cutter blade position changing mechanism 7 that can change the position and urge the cutter blade position changing mechanism 7 against the changing direction of the position of the cutter blade 69.
  • Cutter blade position urging cylinder 79b, and the first cutter blade position urging cylinder 79a and the second cutter blade position urging cylinder 79b are of the cutter blade 69 by the cutter blade position changing mechanism 7. Since the cutter blade position changing mechanism 7 is urged with a substantially constant urging force regardless of the position, the work can be machined with high accuracy.
  • the cutter blade position locking cylinder 81 for fixing the position of the cutter blade 69 with respect to the work W is provided, the cutter is provided according to the shape of the work W.
  • the work W can be machined by selecting a mechanism that effectively presses the blade 69.
  • the cutter blade angle changing mechanism 9 that can change the angle of the cutter blade 69 with respect to the traveling direction according to the shape of the work W, and the changing direction of the angle of the cutter blade 69.
  • a first cutter blade angle urging cylinder 75a and a second cutter blade angle urging cylinder 75b for urging the cutter blade angle changing mechanism 9 are provided, so that the processing shape is complicated.
  • the cutter blade 69 can be effectively pressed against the work W of the above for processing.
  • the first cutter blade angle urging cylinder 75a and the second cutter blade angle urging cylinder 75b are substantially constant regardless of the angle of the cutter blade 69. Since the cutter blade angle changing mechanism 9 is urged by the urging force of the above, even a work W having a complicated processing shape can be processed by pressing the cutter blade 69 more effectively.
  • the cutter blade angle locking mechanism 77 for fixing the angle since the cutter blade angle locking mechanism 77 for fixing the angle is provided, a mechanism for effectively pressing the cutter blade 69 is selected according to the shape of the work W. The work can be processed.
  • the cutter blade 69 is ultrasonically vibrated in a direction intersecting the moving direction of the moving body 90 to process the work, so that the work is processed more precisely. be able to.
  • the cutter blade 69 is ultrasonically vibrated in a direction intersecting the rotation direction of the rotating body 13 to process the work, so that the work is processed more precisely. be able to.
  • the oscillator 71 used in the above-described embodiment has been described so as to vibrate the cutter blade 69 in the vertical direction in the drawing, but the present invention is not limited to this, and the direction intersects the rotation direction of the rotating body 13. It may be a direction that intersects with the moving direction of the moving body 90.
  • cutter blade 69 used in the above-described embodiment has been described using a cutter blade for double-side polishing, but even a cutter blade for single-side polishing can be used if the processing direction is taken into consideration.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Milling, Broaching, Filing, Reaming, And Others (AREA)
  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
  • Machine Tool Copy Controls (AREA)
  • Milling Processes (AREA)

Abstract

[Problem] To provide: a workpiece machining device with which it is possible to highly accurately machine a workpiece by controlling the pressing force exerted from a cutter blade with respect to the workpiece; and an ultrasonic machining apparatus which is equipped with said workpiece machining device so as to enable machining of a workpiece to a high accuracy. [Solution] This workpiece machining device 5 is for machining a workpiece W by means of a cutter blade 69 and is provided in particular with: a cutter blade position shifting mechanism 7 capable of shifting the position of the workpiece W in a specific direction in accordance with the shape of the workpiece W; and a first cutter blade position biasing cylinder 79a and a second cutter blade position biasing cylinder 79b that bias the cutter blade position shifting mechanism 7 against the direction in which the position of the cutter blade 69 is being shifted.

Description

ワーク加工装置及びそのワーク加工装置を備えた超音波加工装置An ultrasonic processing device equipped with a work processing device and the work processing device.
本発明は、ワークを加工するためのワーク加工装置及びそのワーク加工装置を備えた超音波加工装置に関する。 The present invention relates to a work processing device for processing a work and an ultrasonic processing device provided with the work processing device.
従来から、ワークを加工するためのワーク加工装置及び超音波加工装置が知られている。 Conventionally, a work processing device and an ultrasonic processing device for processing a work have been known.
例えば、特許文献1及び特許文献2には、カッター刃10を使用してワークを加工する超音波加工装置が記載されており、この超音波加工装置は、カッター刃10を、ワークの形状に応じて揺動させるとともに、揺動機構を、コイルスプリング機構84によって、カッター刃10の揺動角度方向に抗して付勢することによって、カッター刃10を被加工物の面に押し当てるようにしている(引用文献1の図13及び図14等、引用文献2の図13及び図14等参照)。 For example, Patent Document 1 and Patent Document 2 describe an ultrasonic processing apparatus that processes a work using a cutter blade 10, and the ultrasonic processing apparatus uses a cutter blade 10 according to the shape of the work. The swing mechanism is urged against the swing angle direction of the cutter blade 10 by the coil spring mechanism 84 so that the cutter blade 10 is pressed against the surface of the workpiece. (See FIGS. 13 and 14 of Citation 1 and FIGS. 13 and 14 of Citation 2).
特開2008-273212号公報Japanese Unexamined Patent Publication No. 2008-273212 特開2008-030251号公報Japanese Unexamined Patent Publication No. 2008-030251
しかしながら、引用文献1及び引用文献2に記載のカッター刃は、コイルスプリング機構84によって揺動され、加工物に押し当てられていることから、揺動する長さによって被加工物に対する押し当て力が異なり、被加工物を精度良く加工することができないという問題があった。 However, since the cutter blades described in Cited Document 1 and Cited Document 2 are swung by the coil spring mechanism 84 and pressed against the workpiece, the pressing force against the workpiece is exerted by the swinging length. Unlike this, there was a problem that the workpiece could not be processed with high accuracy.
本発明は、従来技術が有する上述した問題に対応してなされたものであり、被加工物に対するカッター刃の押し当て力を制御して、被加工物(以下、「ワーク」と記す)を精度良く加工することができるワーク加工装置、また、そのワーク加工装置を備え、ワークを精度良く加工することができる超音波加工装置を提供することを目的とする。 The present invention has been made in response to the above-mentioned problems of the prior art, and controls the pressing force of the cutter blade against the workpiece to make the workpiece (hereinafter referred to as "work") accurate. It is an object of the present invention to provide a work processing device capable of processing well, and an ultrasonic processing device provided with the work processing device and capable of processing the work with high accuracy.
上述した課題を解決するために、本発明の第1の態様は、カッター刃を使用してワークを加工するワーク加工装置において、前記カッター刃を、前記ワークの形状に応じて、前記ワークに対する一定方向の位置を変更可能なカッター刃位置変更機構と、前記カッター刃の前記位置の変更方向に抗して、前記カッター刃位置変更機構を付勢するカッター刃位置付勢機構と、を備え、前記カッター刃付位置勢機構は、前記カッター刃位置変更機構による前記カッター刃の位置に拘わらず、略一定の付勢力で前記カッター刃位置変更機構を付勢することを特徴とする。 In order to solve the above-mentioned problems, the first aspect of the present invention is a work processing device for processing a work using a cutter blade, wherein the cutter blade is fixed with respect to the work according to the shape of the work. The cutter blade position changing mechanism capable of changing the position of the direction and the cutter blade position urging mechanism for urging the cutter blade position changing mechanism against the changing direction of the position of the cutter blade are provided. The position urging mechanism with a cutter blade is characterized in that the cutter blade position changing mechanism is urged with a substantially constant urging force regardless of the position of the cutter blade by the cutter blade position changing mechanism.
また、本発明の第2の態様は、第1の態様のワーク加工装置において、前記カッター刃の前記ワークに対する前記一定方向の位置を固定するカッター刃位置ロック機構を備えたことを特徴とする。 Further, the second aspect of the present invention is characterized in that the work processing apparatus of the first aspect includes a cutter blade position locking mechanism for fixing the position of the cutter blade in the fixed direction with respect to the work.
また、本発明の第3の態様は、第1の態様または第2の態様のワーク加工装置において、前記カッター刃の進行方向に対する角度を、前記ワークの形状に応じて変更可能なカッター刃角度変更機構と、前記カッター刃の前記角度の変更方向に抗して、前記カッター刃角度変更機構を付勢するカッター刃角度付勢機構と、を備えたことを特徴とする。 Further, in the third aspect of the present invention, in the work processing apparatus of the first aspect or the second aspect, the angle of the cutter blade with respect to the traveling direction can be changed according to the shape of the work. It is characterized by comprising a mechanism and a cutter blade angle urging mechanism that urges the cutter blade angle changing mechanism against the direction of changing the angle of the cutter blade.
また、本発明の第4の態様は、第3の態様のワーク加工装置において、前記カッター刃角度付勢機構は、前記カッター刃の前記角度に拘わらず、略一定の付勢力で前記カッター刃角度変更機構を付勢することを特徴とする。 Further, a fourth aspect of the present invention is that in the work processing apparatus of the third aspect, the cutter blade angle urging mechanism has a cutter blade angle with a substantially constant urging force regardless of the angle of the cutter blade. It is characterized by encouraging a change mechanism.
また、本発明の第5の態様は、第3の態様または第4の態様のワーク加工装置において、前記角度を固定するカッター刃角度ロック機構を備えたことを特徴とする。 Further, the fifth aspect of the present invention is characterized in that the work processing apparatus of the third aspect or the fourth aspect is provided with a cutter blade angle locking mechanism for fixing the angle.
また、本発明の第6の態様の超音波加工装置は、第1の態様乃至第5の態様の何れかのワーク加工装置を備え、前記カッター刃を、前記ワークに対する前記一定方向と交差する方向に、超音波振動させてワークを加工することを特徴とする。 Further, the ultrasonic processing apparatus according to the sixth aspect of the present invention includes the work processing apparatus according to any one of the first to fifth aspects, and the direction in which the cutter blade intersects the fixed direction with respect to the work. In addition, it is characterized in that the work is processed by ultrasonically vibrating.
さらに、本発明の第7の態様の超音波加工装置は、第3の態様乃至第5の態様の何れかのワーク加工装置を備え、前記カッター刃を、前記角度の変更方向と交差する方向に、超音波振動させてワークを加工することを特徴とする。 Further, the ultrasonic processing apparatus according to the seventh aspect of the present invention includes the work processing apparatus according to any one of the third to fifth aspects, and the cutter blade is oriented in a direction intersecting the angle changing direction. It is characterized by processing a workpiece by vibrating it with ultrasonic waves.
本発明の第1の態様のワーク加工装置によれば、カッター刃を使用してワークを加工するものを対象として、特に、カッター刃を、ワークの形状に応じて、ワークに対する一定方向の位置を変更可能なカッター刃位置変更機構と、カッター刃の位置の変更方向に抗して、カッター刃位置変更機構を付勢するカッター刃位置付勢機構と、を備え、カッター刃位置付勢機構は、カッター刃位置変更機構によるカッター刃の位置に拘わらず、略一定の付勢力でカッター刃位置変更機構を付勢するので、ワークを精度良く加工することができる。 According to the work processing apparatus of the first aspect of the present invention, the cutter blade is positioned in a certain direction with respect to the work according to the shape of the work, in particular, for a device that processes a work using a cutter blade. The cutter blade position urging mechanism is equipped with a changeable cutter blade position changing mechanism and a cutter blade position urging mechanism that urges the cutter blade position changing mechanism against the changing direction of the cutter blade position. Regardless of the position of the cutter blade by the cutter blade position changing mechanism, the cutter blade position changing mechanism is urged with a substantially constant urging force, so that the workpiece can be machined with high accuracy.
また、本発明の第2の態様のワーク加工装置によれば、第1の態様のワーク加工装置において、カッター刃のワークに対する一定方向の位置を固定するカッター刃位置ロック機構を備えているので、第1の態様のワーク加工装置の効果に加え、ワークの形状に応じて、カッター刃を有効に押し当てる機構を選択してワークを加工することができる。 Further, according to the work processing apparatus of the second aspect of the present invention, the work processing apparatus of the first aspect includes a cutter blade position locking mechanism for fixing the position of the cutter blade in a certain direction with respect to the work. In addition to the effect of the work processing device of the first aspect, the work can be processed by selecting a mechanism for effectively pressing the cutter blade according to the shape of the work.
また、本発明の第3の態様のワーク加工装置によれば、第1の態様または第2の態様のワーク加工装置において、カッター刃の進行方向に対する角度を、ワークの形状に応じて変更可能なカッター刃角度変更機構と、カッター刃の角度の変更方向に抗して、カッター刃角度変更機構を付勢するカッター刃角度付勢機構と、を備えているので、第1の態様または第2の態様のワーク加工装置の効果に加え、複雑な加工形状のワークに対しても、カッター刃を有効に押し当てて加工することができる。 Further, according to the work processing device of the third aspect of the present invention, in the work processing device of the first aspect or the second aspect, the angle of the cutter blade with respect to the traveling direction can be changed according to the shape of the work. Since the cutter blade angle changing mechanism and the cutter blade angle urging mechanism for urging the cutter blade angle changing mechanism against the changing direction of the cutter blade angle are provided, the first aspect or the second aspect is provided. In addition to the effect of the work processing device of the embodiment, it is possible to effectively press the cutter blade to process a work having a complicated processing shape.
また、本発明の第4の態様のワーク加工装置によれば、第3の態様のワーク加工装置において、カッター刃角度付勢機構は、カッター刃の角度に拘わらず、略一定の付勢力でカッター刃角度変更機構を付勢するので、第3の態様のワーク加工装置の効果に加え、複雑な加工形状のワークであっても、カッター刃をさらに有効に押し当てて加工することができる。 Further, according to the work processing apparatus of the fourth aspect of the present invention, in the work processing apparatus of the third aspect, the cutter blade angle urging mechanism is a cutter with a substantially constant urging force regardless of the angle of the cutter blade. Since the blade angle changing mechanism is urged, in addition to the effect of the work processing device of the third aspect, even a work having a complicated processing shape can be processed by pressing the cutter blade more effectively.
また、本発明の第5の態様のワーク加工装置によれば、第3の態様または第4の態様のワーク加工装置において、角度を固定するカッター刃角度ロック機構を備えているので、第3の態様または第4の態様のワーク加工装置の効果に加え、ワークの形状に応じて、カッター刃を有効に押し当てる機構を選択してワークを加工することができる。 Further, according to the work processing apparatus according to the fifth aspect of the present invention, the work processing apparatus according to the third aspect or the fourth aspect includes a cutter blade angle locking mechanism for fixing the angle. In addition to the effect of the work processing apparatus of the aspect or the fourth aspect, the work can be processed by selecting a mechanism for effectively pressing the cutter blade according to the shape of the work.
また、本発明の第6の態様の超音波加工装置によれば、第1の態様乃至第5の態様の何れかのワーク加工装置を備え、カッター刃を、ワークに対する一定方向と交差する方向に、超音波振動させてワークを加工するので、ワークをより精密に加工することができる。 Further, according to the ultrasonic processing apparatus according to the sixth aspect of the present invention, the work processing apparatus according to any one of the first to fifth aspects is provided, and the cutter blade is oriented in a direction intersecting a certain direction with respect to the work. Since the work is machined by ultrasonically vibrating, the work can be machined more precisely.
さらに、本発明の第7の態様の超音波加工装置によれば、第3の態様乃至第5の態様の何れかのワーク加工装置を備え、カッター刃を、角度の変更方向と交差する方向に、超音波振動させてワークを加工するので、ワークをより精密に加工することができる。 Further, according to the ultrasonic processing apparatus according to the seventh aspect of the present invention, the work processing apparatus according to any one of the third to fifth aspects is provided, and the cutter blade is oriented in a direction intersecting the angle changing direction. Since the work is machined by ultrasonically vibrating, the work can be machined more precisely.
本発明の実施形態の超音波加工装置の全体側面図である。It is an overall side view of the ultrasonic processing apparatus of embodiment of this invention. 本実施形態の超音波加工装置に備えられたワーク加工装置の全体斜視図である。It is an overall perspective view of the work processing apparatus provided in the ultrasonic processing apparatus of this embodiment. 図2のA-A断面図である。FIG. 2 is a cross-sectional view taken along the line AA of FIG. 図2のB-B断面図であり、カッター刃角度付勢用シリンダーをONさせ、カッター刃に負荷が掛かっていない状態(角度0度)を示す図である。FIG. 2 is a cross-sectional view taken along the line BB of FIG. 2, showing a state in which the cutter blade angle urging cylinder is turned on and no load is applied to the cutter blade (angle of 0 degrees). 図2のC-C断面図であり、カッター刃位置付勢用シリンダーをONさせ、カッター刃に負荷が掛かっていない状態(位置0mm)を示す図である。FIG. 2 is a cross-sectional view taken along the line CC of FIG. 2, showing a state in which the cutter blade position urging cylinder is turned on and no load is applied to the cutter blade (position 0 mm). 本実施形態の超音波加工装置のブロック図である。It is a block diagram of the ultrasonic processing apparatus of this embodiment. 本実施形態の超音波加工装置のメインコントローラのブロック図である。It is a block diagram of the main controller of the ultrasonic processing apparatus of this embodiment. 本実施形態の超音波加工装置におけるメインプログラムのフローチャートである。It is a flowchart of the main program in the ultrasonic processing apparatus of this embodiment. 本実施形態の超音波加工装置における超音波加工プログラムのフローチャートである。It is a flowchart of the ultrasonic processing program in the ultrasonic processing apparatus of this embodiment. 図2のB-B断面図において、カッター刃角度付勢用シリンダーをONさせ、カッター刃に負荷が掛かり、カッター刃が反時計回り方向に最大角度回転した状態(角度+θ1度)を示す図である。In the cross-sectional view taken along the line BB of FIG. 2, the cylinder for urging the cutter blade angle is turned on, a load is applied to the cutter blade, and the cutter blade is rotated by the maximum angle in the counterclockwise direction (angle + θ1 degree). be. 図2のB-B断面図において、カッター刃角度付勢用シリンダーをONさせ、カッター刃に負荷が掛かり、カッター刃が時計回り方向に最大角度回転した状態(角度-θ1度)を示す図である。In the cross-sectional view taken along the line BB of FIG. 2, the cylinder for urging the cutter blade angle is turned on, a load is applied to the cutter blade, and the cutter blade is rotated by a maximum angle in the clockwise direction (angle −θ1 degree). be. 図2のB-B断面図において、カッター刃角度ロック用シリンダーをONさせ、カッター刃の角度を固定した状態(角度0度)を示す図である。In the cross-sectional view taken along the line BB of FIG. 2, it is a diagram showing a state (angle 0 degree) in which the cylinder for locking the cutter blade angle is turned on and the angle of the cutter blade is fixed. 取り付けられたカッター刃を下方から見た図であり、カッター刃とカッター刃の回転方向との関係を説明した説明図である。It is the figure which looked at the attached cutter blade from the bottom, and is the explanatory view which explained the relationship between the cutter blade and the rotation direction of a cutter blade. 図2のC-C断面図において、カッター刃位置付勢用シリンダーをONさせ、カッター刃に負荷が掛かり、カッター刃が+X方向に最大変位移動した状態(角度+X1mm)を示す図である。FIG. 2 is a cross-sectional view taken along the line CC of FIG. 2 showing a state (angle + X1 mm) in which the cutter blade position urging cylinder is turned on, a load is applied to the cutter blade, and the cutter blade is displaced by the maximum displacement in the + X direction. 図2のC-C断面図において、カッター刃位置付勢用シリンダーをONさせ、カッター刃に負荷が掛かり、カッター刃が-X方向に最大変位移動した状態(角度-X1mm)を示す図である。In the CC sectional view of FIG. 2, it is a figure showing a state (angle −X1 mm) in which the cutter blade position urging cylinder is turned on, a load is applied to the cutter blade, and the cutter blade is displaced by the maximum displacement in the −X direction. .. 図2のC-C断面図において、カッター刃位置ロック用シリンダーをONさせ、カッター刃の位置を固定した状態(変位0mm)を示す図である。In the cross-sectional view taken along the line CC of FIG. 2, it is a diagram showing a state (displacement 0 mm) in which the cylinder for locking the cutter blade position is turned on and the position of the cutter blade is fixed.
以下、本発明の実施形態について、図面を参照して説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(実施形態)
先ず、本発明の実施形態について説明する。
(Embodiment)
First, an embodiment of the present invention will be described.
図1は、本発明の1実施形態の超音波加工装置の全体側面図である。 FIG. 1 is an overall side view of the ultrasonic processing apparatus according to the embodiment of the present invention.
図1に示すように、本実施形態の超音波加工装置1は、テーブル10と、そのテーブル10に固定された多関節ロボット3と、その多関節ロボット3の先端に回転可能に接続されたワーク加工装置5と、テーブル10に設けられたワーク設置台16と、テーブル10に配置された発振器2、メインコントローラ4及びロボットコントローラ6と、テーブル10の外部に配置されたエアコンプレッサー14(図6参照)とを備える。 As shown in FIG. 1, the ultrasonic processing apparatus 1 of the present embodiment has a table 10, an articulated robot 3 fixed to the table 10, and a work rotatably connected to the tip of the articulated robot 3. The processing apparatus 5, the work installation table 16 provided on the table 10, the oscillator 2, the main controller 4 and the robot controller 6 arranged on the table 10, and the air compressor 14 arranged outside the table 10 (see FIG. 6). ) And.
 そして、本実施形態の超音波加工装置1は、ワーク加工装置5の先端に接続された、断面両側が研磨された先細りのカッター刃69を振動子71によって図面上上下方向に超音波振動させることによって、ワーク設置台16に設置されたワークWを加工するものである。 Then, the ultrasonic processing apparatus 1 of the present embodiment ultrasonically vibrates the tapered cutter blade 69, which is connected to the tip of the work processing apparatus 5 and whose both sides are polished, in the vertical direction on the drawing by the vibrator 71. The work W installed on the work installation table 16 is processed by the above method.
なお、ワーク設置台16には、操作パネル8が設けられており、超音波加工装置1の操作者は、操作パネル8を操作することにより超音波加工装置1を動作させることができる。 The work installation table 16 is provided with an operation panel 8, and the operator of the ultrasonic processing apparatus 1 can operate the ultrasonic processing apparatus 1 by operating the operation panel 8.
多関節ロボット3は、ロボットコントローラ6からの指令によって動作する一般の5軸の多関節ロボットであり、ワーク加工装置5の位置及び角度を自在に変えて、ワークWに対向するものである。 The articulated robot 3 is a general 5-axis articulated robot that operates according to a command from the robot controller 6, and faces the work W by freely changing the position and angle of the work processing device 5.
多関節ロボット3は、第1の基台32に対して、第2の基台34を旋回させるための第1回転軸44と、第2の基台34に対して下腕部(下アーム部)36を前後に回動させるための第2回転軸46と、下腕部36に対して中腕部(中アーム部)38を上下に回動させるための第3回転軸48と、中腕部38に対して上腕部(上アーム部)40を上下に回動させるための第4回転軸50と、上腕部40に対して回転部42を同軸に回転させるための第5回転軸52との5軸を備える。 The articulated robot 3 has a first rotation shaft 44 for turning the second base 34 with respect to the first base 32, and a lower arm portion (lower arm portion) with respect to the second base 34. ) A second rotation shaft 46 for rotating the 36 back and forth, a third rotation shaft 48 for rotating the middle arm portion (middle arm portion) 38 up and down with respect to the lower arm portion 36, and a middle arm. A fourth rotating shaft 50 for rotating the upper arm portion (upper arm portion) 40 up and down with respect to the portion 38, and a fifth rotating shaft 52 for rotating the rotating portion 42 coaxially with respect to the upper arm portion 40. It is equipped with 5 axes.
多関節ロボット3は、ケーブル(図示せず)によってロボットコントローラ6に電気的に接続されており、ロボットコントローラ6は、メインコントーラ4に電気的に接続されている(図6参照)。 The articulated robot 3 is electrically connected to the robot controller 6 by a cable (not shown), and the robot controller 6 is electrically connected to the main controller 4 (see FIG. 6).
図2は、本実施形態の超音波加工装置1に備えられたワーク加工装置5の全体斜視図であり、図3は、図2のA-A断面図であり、図4は、図2のB-B断面図であり、カッター刃角度付勢用シリンダーをONさせ、カッター刃に負荷が掛かっていない状態(角度0度)を示す図であり、図5は、 図2のC-C断面図であり、カッター刃位置付勢用シリンダーをONさせ、カッター刃に負荷が掛かっていない状態(角度0度)を示す図である。 2 is an overall perspective view of the work processing device 5 provided in the ultrasonic processing device 1 of the present embodiment, FIG. 3 is a sectional view taken along the line AA of FIG. 2, and FIG. 4 is a sectional view of FIG. It is a cross-sectional view of BB, and it is the figure which shows the state which the cylinder for urging the cutter blade angle is turned on, and the load is not applied to the cutter blade (the angle is 0 degree), and FIG. It is a figure which shows the state (the angle 0 degree) that the cylinder for urging the cutter blade position is turned on, and the load is not applied to the cutter blade.
ワーク加工装置5は、その先端に接続されたカッター刃69を、発振器2からケーブル73を介して電気的に接続された振動子71により超音波振動させることによって、ワーク設置台16に設置されたワークWを加工するものである。 The work processing device 5 is installed on the work installation table 16 by ultrasonically vibrating the cutter blade 69 connected to the tip thereof by the vibrator 71 electrically connected from the oscillator 2 via the cable 73. The work W is processed.
ワーク加工装置5は、図2乃至図5に示すように、下部のカッター刃角度変更機構9、第1のカッター刃角度付勢用シリンダー75a、第2のカッター刃角度付勢用シリンダー75b及びカッター刃角度ロック用シリンダー77と、上部のカッター刃位置変更機構7、第1のカッター刃位置付勢用シリンダー79a、第2のカッター刃位置付勢用シリンダー79b及びカッター刃位置ロック用シリンダー81とを備える。 As shown in FIGS. 2 to 5, the work processing apparatus 5 includes a lower cutter blade angle changing mechanism 9, a first cutter blade angle urging cylinder 75a, a second cutter blade angle urging cylinder 75b, and a cutter. The blade angle locking cylinder 77, the upper cutter blade position changing mechanism 7, the first cutter blade position urging cylinder 79a, the second cutter blade position urging cylinder 79b, and the cutter blade position locking cylinder 81. Be prepared.
カッター刃角度変更機構9は、図3及び図4に示すように、ワーク加工装置5に固定された基軸11と、その基軸11に回転可能に接続され、振動子71及びカッター刃69が接続された回転体13と、その回転体13に設けられ、後述する第3の突起部87に当接可能な第1の突起部83と、回転体13の第1の突起部83とは反対側に設けられ、後述する第4の突起部89に当接可能な第2の突起部85と、回転体13に設けられ、後述するロックピン39が勘合する凹部91と、回転体13が回転可能に形成された空隙部15とを備える。 As shown in FIGS. 3 and 4, the cutter blade angle changing mechanism 9 is rotatably connected to a base shaft 11 fixed to the work processing device 5 and the base shaft 11, and the vibrator 71 and the cutter blade 69 are connected to the base shaft 11. On the opposite side of the rotating body 13, the first protruding portion 83 provided on the rotating body 13 and capable of contacting the third protruding portion 87 described later, and the first protruding portion 83 of the rotating body 13. A second protrusion 85 provided and capable of contacting a fourth protrusion 89 described later, a recess 91 provided in the rotating body 13 to which the lock pin 39 described later fits, and the rotating body 13 can rotate. It is provided with the formed gap portion 15.
第1のカッター刃角度付勢用シリンダー75aは、回転体13の平面視左回転の回転力に抗して回転体13を付勢するものであって、内部に空隙部21を有する第1の筐体17と、その第1の筐体17の空隙部21内にスライド可能に配置されたピストン19と、そのピストン19の先端に接続された第3の突起部87とを備え、第1の筐体17の空隙部21とエアコンプレッサー14(図6参照)とは、接続チューブ23によって連通されている。 The first cutter blade angle urging cylinder 75a urges the rotating body 13 against the rotational force of the left rotation of the rotating body 13 in a plan view, and is the first having a gap 21 inside. A first housing 17 includes a housing 17, a piston 19 slidably arranged in a gap 21 of the first housing 17, and a third protrusion 87 connected to the tip of the piston 19. The gap 21 of the housing 17 and the air compressor 14 (see FIG. 6) are communicated with each other by a connecting tube 23.
また、第2のカッター刃角度付勢用シリンダー75bは、回転体13の平面視右回転の回転力に抗して回転体13を付勢するものであって、内部に空隙部29を有する第2の筐体25と、その第2の筐体25の空隙部29内にスライド可能に配置されたピストン27と、そのピストン27の先端に接続された第4の突起部89とを備え、第2の筐体25の空隙部29とエアコンプレッサー14(図6参照)とは、接続チューブ31によって連通されている。 Further, the second cutter blade angle urging cylinder 75b urges the rotating body 13 against the rotational force of clockwise rotation of the rotating body 13, and has a gap 29 inside. A second housing 25, a piston 27 slidably arranged in a gap 29 of the second housing 25, and a fourth protrusion 89 connected to the tip of the piston 27. The gap 29 of the housing 25 of 2 and the air compressor 14 (see FIG. 6) are communicated with each other by a connecting tube 31.
なお、第1のカッター刃角度付勢用シリンダー75a、第2の第1のカッター刃角度付勢用シリンダー75b、接続チューブ23、接続チューブ31及びエアコンプレッサー14が本発明の「カッター刃角度付勢機構」を構成する。 The first cutter blade angle urging cylinder 75a, the second first cutter blade angle urging cylinder 75b, the connecting tube 23, the connecting tube 31, and the air compressor 14 are the "cutter blade angle urging cylinders" of the present invention. It constitutes a "mechanism".
さらに、カッター刃角度ロック用シリンダー77は、回転体13の回転を停止させるものであって、内部に空隙部37(図12参照)を有する第3の筐体33と、その第3の筐体33の空隙部37内にスライド可能に配置されたピストン35と、そのピストン35の先端に接続されたロックピン39とを備え、第3の筐体33の空隙部37とエアコンプレッサー14(図6参照)とは接続チューブ41及び接続チューブ43によって連通されている。 Further, the cutter blade angle locking cylinder 77 stops the rotation of the rotating body 13, and has a third housing 33 having a gap 37 (see FIG. 12) inside, and a third housing thereof. A piston 35 slidably arranged in the gap 37 of the 33, and a lock pin 39 connected to the tip of the piston 35 are provided, and the gap 37 of the third housing 33 and the air compressor 14 (FIG. 6) are provided. (See) is communicated with the connecting tube 41 and the connecting tube 43.
 なお、カッター刃角度ロック用シリンダー77、接続チューブ41、接続チューブ43及びエアコンプレッサー14が本発明の「カッター刃角度ロック機構」を構成する。 The cutter blade angle locking cylinder 77, the connecting tube 41, the connecting tube 43, and the air compressor 14 constitute the "cutter blade angle locking mechanism" of the present invention.
カッター刃位置変更機構7は、図3及び図5に示すように、ワーク加工装置5に固定された基台92と、その基台92に移動可能に接続された移動体90と、その移動体90に設けられ、後述する第5の突起部95に当接可能な第7の突起部97と、移動体90に設けられ、後述する第6の突起部99に当接可能な第8の突起部98と、移動体90に設けられ、後述するロックピン67が勘合する凹部93とを備える。 As shown in FIGS. 3 and 5, the cutter blade position changing mechanism 7 includes a base 92 fixed to the work processing device 5, a moving body 90 movably connected to the base 92, and the moving body thereof. A seventh protrusion 97 provided on the 90 and capable of contacting the fifth protrusion 95 described later, and an eighth protrusion provided on the moving body 90 and capable of contacting the sixth protrusion 99 described later. A portion 98 and a recess 93 provided in the moving body 90 and fitted with a lock pin 67 described later are provided.
第1のカッター刃位置付勢用シリンダー79aは、内部に空隙部49を有する第4の筐体45と、その第4の筐体45の空隙部49内にスライド可能に配置されたピストン47と、そのピストン47の先端に接続された第5の突起部95とを備え、第4の筐体45の空隙部49とエアコンプレッサー14(図6参照)とは、接続チューブ51によって連通されている。 The first cutter blade position urging cylinder 79a includes a fourth housing 45 having a gap 49 inside, and a piston 47 slidably arranged in the gap 49 of the fourth housing 45. A fifth protrusion 95 connected to the tip of the piston 47 is provided, and the gap 49 of the fourth housing 45 and the air compressor 14 (see FIG. 6) are communicated with each other by a connecting tube 51. ..
また、第2のカッター刃位置付勢用シリンダー79bは、内部に空隙部57を有する第5の筐体53と、その第5の筐体53の空隙部57内にスライド可能に配置されたピストン55と、そのピストン55の先端に接続された第6の突起部99とを備え、第5の筐体53の空隙部57とエアコンプレッサー14(図6参照)とは、接続チューブ59によって連通されている。 Further, the second cutter blade position urging cylinder 79b has a fifth housing 53 having a gap 57 inside and a piston slidably arranged in the gap 57 of the fifth housing 53. The 55 and the sixth protrusion 99 connected to the tip of the piston 55 are provided, and the gap 57 of the fifth housing 53 and the air compressor 14 (see FIG. 6) are communicated with each other by a connecting tube 59. ing.
 なお、第1のカッター刃位置付勢用シリンダー79a、第2のカッター刃位置付勢用シリンダー79b、接続チューブ51、接続チューブ59及びエアコンプレッサー14が本発明の「カッター刃位置付勢機構」を構成する。 The first cutter blade position urging cylinder 79a, the second cutter blade position urging cylinder 79b, the connecting tube 51, the connecting tube 59, and the air compressor 14 provide the "cutter blade position urging mechanism" of the present invention. Configure.
さらに、カッター刃位置ロック用シリンダー81は、内部に空隙部65(図16参照)を有する第6の筐体61と、その第6の筐体61の空隙部65(図16参照)内にスライド可能に配置されたピストン63と、そのピストン63の先端に接続されたロックピン67とを備え、第6の筐体61の空隙部65(図16参照)とエアコンプレッサー14(図6参照)とは、接続チューブ94及び接続チューブ96によって連通されている。 Further, the cutter blade position locking cylinder 81 slides into a sixth housing 61 having a gap 65 (see FIG. 16) inside and a gap 65 (see FIG. 16) of the sixth housing 61. A freely arranged piston 63 and a lock pin 67 connected to the tip of the piston 63, the gap 65 (see FIG. 16) and the air compressor 14 (see FIG. 6) of the sixth housing 61. Is communicated by a connecting tube 94 and a connecting tube 96.
 なお、カッター刃位置ロック用シリンダー81、接続チューブ94、接続チューブ96及びエアコンプレッサー14が本発明の「カッター刃位置ロック機構」を構成する。 The cutter blade position locking cylinder 81, the connecting tube 94, the connecting tube 96, and the air compressor 14 constitute the "cutter blade position locking mechanism" of the present invention.
次に、本実施形態の超音波加工装置1のブロック図について説明する。 Next, a block diagram of the ultrasonic processing apparatus 1 of the present embodiment will be described.
図6は、本実施形態の超音波加工装置のブロック図であり、図7は、本実施形態の超音波加工装置のメインコントローラのブロック図である。 FIG. 6 is a block diagram of the ultrasonic processing apparatus of the present embodiment, and FIG. 7 is a block diagram of the main controller of the ultrasonic processing apparatus of the present embodiment.
図6において、超音波加工装置1は、電源12に電気的に接続されたメインコントローラ4と、そのメインコントローラ4に電気的に接続され、第1のカッター刃角度付勢用シリンダー75a、第2の第1のカッター刃角度付勢用シリンダー75b、カッター刃角度ロック用シリンダー77、第1のカッター刃位置付勢用シリンダー79a、第2のカッター刃位置付勢用シリンダー79b及びカッター刃位置ロック用シリンダー81を駆動するためのエアコンプレッサー14と、メインコントローラ4に電気的に接続され、多関節ロボット3を制御するためのロボットコントローラ6と、振動子71を駆動するための発振器2と、装置の操作者からの入力を受け付ける操作パネル8とを備える。 In FIG. 6, the ultrasonic processing apparatus 1 is electrically connected to a main controller 4 electrically connected to a power supply 12, and is electrically connected to the main controller 4, and is a first cutter blade angle urging cylinder 75a, a second. 1st cutter blade angle urging cylinder 75b, cutter blade angle locking cylinder 77, 1st cutter blade position urging cylinder 79a, 2nd cutter blade position urging cylinder 79b and cutter blade position locking The air compressor 14 for driving the cylinder 81, the robot controller 6 electrically connected to the main controller 4 for controlling the articulated robot 3, the oscillator 2 for driving the vibrator 71, and the apparatus. It is provided with an operation panel 8 that receives input from an operator.
 なお、本実施形態においては、第1のカッター刃角度付勢用シリンダー75a及び第2の第1のカッター刃角度付勢用シリンダー75bを、纏めて「カッター刃角度付勢用シリンダー75」、第1のカッター刃位置付勢用シリンダー79a及び第2のカッター刃位置付勢用シリンダー79bを、纏めて「カッター刃位置付勢用シリンダー79」と記すこともある。 In the present embodiment, the first cutter blade angle urging cylinder 75a and the second first cutter blade angle urging cylinder 75b are collectively referred to as "cylinder blade angle urging cylinder 75". The cutter blade position urging cylinder 79a and the second cutter blade position urging cylinder 79b of 1 may be collectively referred to as "cylinder blade position urging cylinder 79".
また、図7において、メインコントローラ4は、CPU(中央演算処理装置)22と、そのCPU22に入出力可能に接続されたRAM(Random Access Memory)24と、CPU22に入出力可能に接続されたROM(Read Only Memory)26とを備える。 Further, in FIG. 7, the main controller 4 has a CPU (central processing unit) 22, a RAM (Random Access Memory) 24 connected to the CPU 22 so as to be input / output, and a ROM connected to the CPU 22 so as to be input / output. (Read Only Memory) 26 is provided.
RAM24は、ワークWを加工するための加工データを記憶した加工データテーブル24aと、超音波加工装置1がワークWを加工する際の後述する加工モードに対応した設定項目を記憶した加工モードデータテーブル24bとを備える。 The RAM 24 is a processing data table 24a that stores processing data for processing the work W, and a processing mode data table that stores setting items corresponding to the processing modes described later when the ultrasonic processing apparatus 1 processes the work W. 24b and the like.
また、ROM26は、本実施形態の超音波加工装置1全体の動作を司るメインプログラム26aと、後述する加工モードに応じて超音波加工装置1の超音波加工を実行する超音波加工プログラム26bとを備える。 Further, the ROM 26 includes a main program 26a that controls the operation of the entire ultrasonic processing apparatus 1 of the present embodiment, and an ultrasonic processing program 26b that executes ultrasonic processing of the ultrasonic processing apparatus 1 according to a processing mode described later. Be prepared.
次に、上述した構成の超音波加工装置1の動作について説明する。 Next, the operation of the ultrasonic processing apparatus 1 having the above-described configuration will be described.
図8は、本実施形態の超音波加工装置におけるメインプログラムのフローチャートであり、図9は、本実施形態の超音波加工装置における超音波加工プログラムのフローチャートである。 FIG. 8 is a flowchart of the main program in the ultrasonic processing apparatus of the present embodiment, and FIG. 9 is a flowchart of the ultrasonic processing program in the ultrasonic processing apparatus of the present embodiment.
本実施形態の超音波加工装置1は、前述した通り、ワーク加工装置5の先端に接続されたカッター刃69を振動子71によって超音波振動させることによって、ワーク設置台16に設置されたワークWを加工するものである。 In the ultrasonic processing apparatus 1 of the present embodiment, as described above, the work W installed on the work installation table 16 is obtained by ultrasonically vibrating the cutter blade 69 connected to the tip of the work processing apparatus 5 by the vibrator 71. Is to be processed.
また、本実施形態の超音波加工装置1は、ワークWを加工する加工モードとして、4つの加工モードを備えている。 Further, the ultrasonic processing apparatus 1 of the present embodiment has four processing modes as processing modes for processing the work W.
具体的には、本実施形態の超音波加工装置1は、カッター刃角度付勢用シリンダー75及びカッター刃位置付勢用シリンダー79をONさせた状態でカッター刃69を付勢し、ワークWを加工する第1の加工モードと、カッター刃角度ロック用シリンダー77及びカッター刃位置付勢用シリンダー79をONさせた状態でカッター刃69を付勢し、ワークWを加工する第2の加工モードと、カッター刃角度付勢用シリンダー75及びカッター刃位置ロック用シリンダー81をONさせた状態でカッター刃69を付勢し、ワークWを加工する第3の加工モードと、カッター刃角度ロック用シリンダー77及びカッター刃位置ロック用シリンダー81をONさせた状態でカッター刃69を付勢せずに、ワークWを加工する第4の加工モードと、を備える。 Specifically, the ultrasonic processing apparatus 1 of the present embodiment urges the cutter blade 69 with the cutter blade angle urging cylinder 75 and the cutter blade position urging cylinder 79 turned on to urge the work W. The first machining mode for machining and the second machining mode for machining the work W by urging the cutter blade 69 with the cutter blade angle locking cylinder 77 and the cutter blade position urging cylinder 79 turned on. A third machining mode in which the cutter blade 69 is urged with the cutter blade angle urging cylinder 75 and the cutter blade position locking cylinder 81 turned on to machine the work W, and the cutter blade angle locking cylinder 77. A fourth machining mode for machining the work W without urging the cutter blade 69 with the cutter blade position locking cylinder 81 turned on is provided.
図8において、先ず、装置の操作者が電源スイッチを入れた後、操作パネル8上の操作ボタンによってワークWの処理個数及び加工モードを入力してスタートボタンを押下すると、超音波加工装置1は、多関節ロボット3のアームを初期位置に移動させ(S1)、ワークWの処理個数をセットし(S3)、入力された加工モードに基づいて加工モードデータテーブル24bから設定項目を抽出し(S5)、後述する超音波加工プログラムを実行する(S7)。 In FIG. 8, first, after the operator of the device turns on the power switch, the number of workpieces to be processed and the machining mode are input by the operation buttons on the operation panel 8 and the start button is pressed. , The arm of the articulated robot 3 is moved to the initial position (S1), the number of workpieces to be processed is set (S3), and the setting items are extracted from the processing mode data table 24b based on the input processing mode (S5). ), The ultrasonic processing program described later is executed (S7).
(第1の加工モード)
先ず、カッター刃角度付勢用シリンダー75及びカッター刃位置付勢用シリンダー79をONさせた状態でカッター刃69を付勢し、ワークWを加工する第1の加工モードが設定されているとして説明する。なお、第1の加工モードは、複雑な加工形状のワークWを加工する際に最適な加工モードである。
(First machining mode)
First, it is explained that the first machining mode for machining the work W is set by urging the cutter blade 69 with the cutter blade angle urging cylinder 75 and the cutter blade position urging cylinder 79 turned on. do. The first machining mode is the optimum machining mode when machining a work W having a complicated machining shape.
図9において、超音波加工プログラムでは、先ず、加工データテーブル24aから加工データを取得した後(S21)、加工モードがカッター刃角度付勢モードか否かが判断される(S23)。 In FIG. 9, in the ultrasonic machining program, first, after acquiring machining data from the machining data table 24a (S21), it is determined whether or not the machining mode is the cutter blade angle urging mode (S23).
第1の加工モードは、カッター刃角度付勢モードを使用するため(S23:Yes)、第1のカッター刃角度付勢用シリンダー75a及び第2のカッター刃角度付勢用シリンダー75bがONされ(S25)、加工モードがカッター刃位置付勢モードか否かが判断される(S29)。 Since the first machining mode uses the cutter blade angle urging mode (S23: Yes), the first cutter blade angle urging cylinder 75a and the second cutter blade angle urging cylinder 75b are turned on (S23: Yes). S25), it is determined whether or not the machining mode is the cutter blade position urging mode (S29).
第1の加工モードは、カッター刃位置付勢モードを使用するため(S29:Yes)、第1のカッター刃位置付勢用シリンダー79a及び第2の第1のカッター刃位置付勢用シリンダー79bがONされる(S31)。 Since the first machining mode uses the cutter blade position urging mode (S29: Yes), the first cutter blade position urging cylinder 79a and the second cutter blade position urging cylinder 79b are used. It is turned on (S31).
 なお、上述した図4は、第1のカッター刃角度付勢用シリンダー75a及び第2の第1のカッター刃角度付勢用シリンダー75bがONされ、カッター刃に負荷が掛かっていない状態(角度0度)を示している。 In FIG. 4 described above, the first cutter blade angle urging cylinder 75a and the second first cutter blade angle urging cylinder 75b are turned on, and no load is applied to the cutter blade (angle 0). Degree) is shown.
図4を参照して、具体的に説明すると、第1のカッター刃角度付勢用シリンダー75aがONされ、エアがエアコンプレッサー14から接続チューブ23を介して第1のカッター刃角度付勢用シリンダー75aの第1の筐体17の空隙部21に注入されると、ピストン19が図面上下側に下がり、ピストン19の先端に接続された第3の突起部87が回転体13に設けられた第1の突起部83に当接する。 Specifically, with reference to FIG. 4, the first cutter blade angle urging cylinder 75a is turned on, and air flows from the air compressor 14 via the connecting tube 23 to the first cutter blade angle urging cylinder. When injected into the gap 21 of the first housing 17 of 75a, the piston 19 is lowered to the upper and lower sides of the drawing, and a third protrusion 87 connected to the tip of the piston 19 is provided on the rotating body 13. It abuts on the protrusion 83 of 1.
また、第2のカッター刃角度付勢用シリンダー75bがONされ、エアがエアコンプレッサー14から接続チューブ31を介して第2のカッター刃角度付勢用シリンダー75bの第2の筐体25の空隙部29に注入されると、ピストン27が図面上上側に上がり、ピストン27の先端に接続された第4の突起部89が回転体13に設けられた第2の突起部85に当接する。 Further, the second cutter blade angle urging cylinder 75b is turned on, and air flows from the air compressor 14 via the connecting tube 31 to the gap portion of the second housing 25 of the second cutter blade angle urging cylinder 75b. When injected into 29, the piston 27 rises upward on the drawing, and the fourth protrusion 89 connected to the tip of the piston 27 abuts on the second protrusion 85 provided on the rotating body 13.
 このように、第1のカッター刃角度付勢用シリンダー75a及び第2の第1のカッター刃角度付勢用シリンダー75bがONされると、回転体13は、基軸11に対して図面上右回り方向及び左周り方向に回転可能であるものの、回転体13が、ピストン19の先端に接続された第3の突起部87及びピストン27の先端に接続された第4の突起部89に付勢されることにより、カッター刃69に負荷が掛からない状態であれば、カッター刃69は、角度0度の位置(図13参照)に安定している状態となる。 In this way, when the first cutter blade angle urging cylinder 75a and the second first cutter blade angle urging cylinder 75b are turned on, the rotating body 13 rotates clockwise with respect to the base shaft 11 in the drawing. Although rotatable in the direction and counterclockwise direction, the rotating body 13 is urged by a third protrusion 87 connected to the tip of the piston 19 and a fourth protrusion 89 connected to the tip of the piston 27. As a result, if no load is applied to the cutter blade 69, the cutter blade 69 is in a stable state at a position at an angle of 0 degrees (see FIG. 13).
 超音波加工プログラムに戻り、加工モードの設定が完了すると、次に、ワークWがワーク設置台16にセットされているか否かが判断され(S35)、ワークWがワーク設置台16にセットされていない場合には(S35:No)、ワークWがワーク設置台16にセットされるまで待ち、ワークWがワーク設置台16にセットされている場合には(S35:Yes)、カッター刃69に接続された振動子71を超音波振動させるために発振器2を駆動する(S37)。 After returning to the ultrasonic machining program and completing the setting of the machining mode, it is determined whether or not the work W is set on the work setting table 16 (S35), and the work W is set on the work setting table 16. If not (S35: No), wait until the work W is set on the work installation table 16, and if the work W is set on the work installation table 16 (S35: Yes), connect to the cutter blade 69. The oscillator 2 is driven in order to ultrasonically vibrate the oscillator 71 (S37).
次に、カッター刃69がワークWに対する加工開始位置に位置するように、多関節ロボット3の各アームを移動させ(S39)、ワークWを超音波加工するためにカッター刃69を移動させる(S41)。 Next, each arm of the articulated robot 3 is moved (S39) so that the cutter blade 69 is located at the machining start position with respect to the work W, and the cutter blade 69 is moved to ultrasonically machine the work W (S41). ).
 ここで、カッター刃角度付勢用シリンダー75及びカッター刃位置付勢用シリンダー79をONさせた状態でカッター刃69を付勢してワークWを加工する第1の加工モードにおいて、ワーク加工装置5内部の動作について説明する。 Here, in the first processing mode in which the cutter blade 69 is urged to process the work W with the cutter blade angle urging cylinder 75 and the cutter blade position urging cylinder 79 turned on, the work processing apparatus 5 The internal operation will be described.
図10は、図2のB-B断面図において、カッター刃角度付勢用シリンダーをONさせ、カッター刃に負荷が掛かり、カッター刃が反時計回り方向に最大角度回転した状態(角度+θ1度)を示す図であり、図11は、図2のB-B断面図において、カッター刃角度付勢用シリンダーをONさせ、カッター刃に負荷が掛かり、カッター刃が時計回り方向に最大角度回転した状態(角度-θ1度)を示す図であり、図13は、取り付けられたカッター刃を下方から見た図であり、カッター刃とカッター刃の回転方向との関係を説明した説明図である。 FIG. 10 shows a state in which the cutter blade angle urging cylinder is turned on, a load is applied to the cutter blade, and the cutter blade is rotated by a maximum angle in the counterclockwise direction (angle + θ1 degree) in the BB sectional view of FIG. 11 is a state in which the cutter blade angle urging cylinder is turned on, a load is applied to the cutter blade, and the cutter blade is rotated by the maximum angle in the clockwise direction in the BB sectional view of FIG. It is a figure which shows (angle −θ1 degree), and FIG. 13 is a figure which looked at the attached cutter blade from the lower side, and is the explanatory view explaining the relationship between the cutter blade and the rotation direction of a cutter blade.
 上述した通り、図4は、カッター刃69に負荷が掛からない状態を示しているが、第1の加工モードにおいては、ワーク加工装置5のワークW加工中において、カッター刃69がワークWから回転負荷を受けた場合には、カッター刃69が±数度(最高±5°)の範囲内で回転可能なように構成されている。 As described above, FIG. 4 shows a state in which no load is applied to the cutter blade 69, but in the first machining mode, the cutter blade 69 rotates from the work W during the work W machining of the work machining apparatus 5. When a load is applied, the cutter blade 69 is configured to be rotatable within a range of ± several degrees (maximum ± 5 °).
しかしながら、回転体13は、第1のカッター刃角度付勢用シリンダー75a及び第2のカッター刃角度付勢用シリンダー75bがONすることによって、ピストン19の先端に接続された第3の突起部87が回転体13に設けられた第1の突起部83に当接し、かつ、ピストン27の先端に接続された第4の突起部89が回転体13に設けられた第2の突起部85に当接することによって、常に角度0度の位置(図13参照)に向かって付勢された状態にあって、その状態で回転可能というのが正しい。 However, the rotating body 13 has a third protrusion 87 connected to the tip of the piston 19 by turning on the first cutter blade angle urging cylinder 75a and the second cutter blade angle urging cylinder 75b. Abuts on the first protrusion 83 provided on the rotating body 13, and the fourth protrusion 89 connected to the tip of the piston 27 hits the second protrusion 85 provided on the rotating body 13. It is correct that by touching the cylinder, it is always urged toward a position at an angle of 0 degrees (see FIG. 13), and it can rotate in that state.
例えば、図10に示すように、第1のカッター刃角度付勢用シリンダー75a及び第2の第1のカッター刃角度付勢用シリンダー75bがONされた状態で、カッター刃69に回転負荷が掛かり、回転体13に設けられた第1の突起部83がピストン19の先端に接続された第3の突起部87を押し続け、カッター刃69が図面上反時計回り方向に最大角度回転した場合(角度+θ1度)には、回転体13に設けられた第1の突起部83は、ピストン19の先端に接続された第3の突起部87に当接するが、回転体13に設けられた第2の突起部85は、ピストン27の先端に接続された第4の突起部89に当接しない。 For example, as shown in FIG. 10, a rotational load is applied to the cutter blade 69 with the first cutter blade angle urging cylinder 75a and the second cutter blade angle urging cylinder 75b turned on. When the first protrusion 83 provided on the rotating body 13 keeps pushing the third protrusion 87 connected to the tip of the piston 19, and the cutter blade 69 rotates the maximum angle in the counterclockwise direction on the drawing ( At an angle + θ1 degree), the first protrusion 83 provided on the rotating body 13 abuts on the third protrusion 87 connected to the tip of the piston 19, but the second protrusion provided on the rotating body 13 is provided. The protrusion 85 does not abut on the fourth protrusion 89 connected to the tip of the piston 27.
回転体13に設けられた第1の突起部83がピストン19の先端に接続された第3の突起部87を押し続けている場合には、第3の突起部87に当接する第1の突起部83は、第3の突起部87から-θ方向にf1の力で付勢される。なお、この力f1は、回転体13の角度によって変わるものではなく、第1の突起部83が第3の突起部87に当接する限りにおいて一定である。 When the first protrusion 83 provided on the rotating body 13 keeps pushing the third protrusion 87 connected to the tip of the piston 19, the first protrusion abuts on the third protrusion 87. The portion 83 is urged from the third protrusion 87 in the −θ direction by a force of f1. The force f1 does not change depending on the angle of the rotating body 13, but is constant as long as the first protrusion 83 abuts on the third protrusion 87.
一方、例えば、図11に示すように、第1のカッター刃角度付勢用シリンダー75a及び第2の第1のカッター刃角度付勢用シリンダー75bがONされた状態で、カッター刃69に回転負荷が掛かり、回転体13に設けられた第2の突起部85がピストン27の先端に接続された第4の突起部89を押し続け、カッター刃69が図面上時計回り方向に最大角度回転した場合(角度-θ1度)には、回転体13に設けられた第2の突起部85は、ピストン27の先端に接続された第4の突起部89に当接するが、回転体13に設けられた第1の突起部83は、ピストン19の先端に接続された第3の突起部87に当接しない。 On the other hand, for example, as shown in FIG. 11, a rotational load is applied to the cutter blade 69 with the first cutter blade angle urging cylinder 75a and the second cutter blade angle urging cylinder 75b turned on. When the second protrusion 85 provided on the rotating body 13 keeps pushing the fourth protrusion 89 connected to the tip of the piston 27, and the cutter blade 69 rotates the maximum angle in the clockwise direction on the drawing. At (angle −θ1 degree), the second protrusion 85 provided on the rotating body 13 abuts on the fourth protrusion 89 connected to the tip of the piston 27, but is provided on the rotating body 13. The first protrusion 83 does not abut on the third protrusion 87 connected to the tip of the piston 19.
 回転体13に設けられた第2の突起部85がピストン27の先端に接続された第4の突起部89を押し続けている場合には、第4の突起部89に当接する第2の突起部85は、第4の突起部89から+θ方向にf1の力で付勢される。なお、この力f1も、回転体13の角度によって変わるものではなく、第2の突起部85が第4の突起部89に当接する限りにおいて一定である。 When the second protrusion 85 provided on the rotating body 13 continues to push the fourth protrusion 89 connected to the tip of the piston 27, the second protrusion abuts on the fourth protrusion 89. The portion 85 is urged from the fourth protrusion 89 in the + θ direction by a force of f1. Note that this force f1 does not change depending on the angle of the rotating body 13, and is constant as long as the second protrusion 85 abuts on the fourth protrusion 89.
図14は、図2のC-C断面図において、カッター刃位置付勢用シリンダーをONさせ、カッター刃に負荷が掛かり、カッター刃が+X方向に最大変位移動した状態(角度+X1mm)を示す図であり、図15は、図2のC-C断面図において、カッター刃位置付勢用シリンダーをONさせ、カッター刃に負荷が掛かり、カッター刃が-X方向に最大変位移動した状態(角度-X1mm)を示す図である。 FIG. 14 is a diagram showing a state (angle + X1 mm) in which the cutter blade position urging cylinder is turned on, a load is applied to the cutter blade, and the cutter blade is maximally displaced in the + X direction in the CC sectional view of FIG. 15 shows a state in which the cutter blade position urging cylinder is turned on, a load is applied to the cutter blade, and the cutter blade is displaced by the maximum displacement in the −X direction (angle-) in the CC sectional view of FIG. It is a figure which shows X1mm).
上述した通り、図5は、第1のカッター刃位置付勢用シリンダー79a及び第2のカッター刃位置付勢用シリンダー79bをONさせ、カッター刃に負荷が掛かっていない状態(位置0mm)を示しているが、第1の加工モードにおいては、ワーク加工装置5のワークW加工中において、カッター刃69がワークWから負荷を受けた場合には、カッター刃69が±数mm(最高±5mm)の範囲内で移動可能なように構成されている。 As described above, FIG. 5 shows a state (position 0 mm) in which the first cutter blade position urging cylinder 79a and the second cutter blade position urging cylinder 79b are turned on and no load is applied to the cutter blade. However, in the first machining mode, when the cutter blade 69 receives a load from the work W during the machining of the work W of the work machining apparatus 5, the cutter blade 69 is ± several mm (maximum ± 5 mm). It is configured to be movable within the range of.
しかしながら、移動体90は、第1のカッター刃位置付勢用シリンダー79a及び第2のカッター刃位置付勢用シリンダー79bがONすることによって、移動体90に設けられた第7の突起部97がピストン47の先端に接続された第5の突起部95に当接し、かつ、移動体90に設けられた第8の突起部98がピストン55の先端に接続された第6の突起部99に当接することによって、常に位置0mmの位置(図14参照)に向かって付勢された状態にあって、その状態で移動可能というのが正しい。 However, in the moving body 90, the seventh protrusion 97 provided on the moving body 90 is formed by turning on the first cutter blade position urging cylinder 79a and the second cutter blade position urging cylinder 79b. The eighth protrusion 98 provided on the moving body 90 abuts on the fifth protrusion 95 connected to the tip of the piston 47, and hits the sixth protrusion 99 connected to the tip of the piston 55. It is correct that the contact is always in a state of being urged toward the position of 0 mm (see FIG. 14), and it is possible to move in that state.
例えば、図14に示すように、第1のカッター刃位置付勢用シリンダー79a及び第2のカッター刃位置付勢用シリンダー79bがONされた状態で、カッター刃69に負荷が掛かり、移動体90に設けられた第8の突起部98がピストン55の先端に接続された第6の突起部99を押し続け、カッター刃69が+X方向に最大変位移動した場合(角度+X1mm)には移動体90に設けられた第8の突起部98は、ピストン55の先端に接続された第6の突起部99に当接するが、移動体90に設けられた第7の突起部97は、ピストン47の先端に接続された第5の突起部95に当接しない。 For example, as shown in FIG. 14, a load is applied to the cutter blade 69 with the first cutter blade position urging cylinder 79a and the second cutter blade position urging cylinder 79b turned on, and the moving body 90 When the eighth protrusion 98 provided in the above continues to push the sixth protrusion 99 connected to the tip of the piston 55 and the cutter blade 69 moves the maximum displacement in the + X direction (angle + X1 mm), the moving body 90 The eighth protrusion 98 provided on the moving body 90 abuts on the sixth protrusion 99 connected to the tip of the piston 55, while the seventh protrusion 97 provided on the moving body 90 abuts on the tip of the piston 47. Does not abut on the fifth protrusion 95 connected to.
移動体90に設けられた第8の突起部98がピストン55の先端に接続された第6の突起部99を押し続けている場合には、第6の突起部99に当接する第8の突起部98は、第6の突起部99から-X方向にf2の力で付勢される。なお、この力f2は、移動体90の位置によって変わるものではなく、第8の突起部98が第6の突起部99に当接する限りにおいて一定である。 If the eighth protrusion 98 provided on the moving body 90 continues to push the sixth protrusion 99 connected to the tip of the piston 55, the eighth protrusion abuts on the sixth protrusion 99. The portion 98 is urged from the sixth protrusion 99 in the −X direction by a force of f2. Note that this force f2 does not change depending on the position of the moving body 90, but is constant as long as the eighth protrusion 98 abuts on the sixth protrusion 99.
一方、例えば、図15に示すように、第1のカッター刃位置付勢用シリンダー79a及び第2のカッター刃位置付勢用シリンダー79bがONされた状態で、カッター刃69に負荷が掛かり、移動体90に設けられた第7の突起部97がピストン47の先端に接続された第5の突起部95を押し続け、カッター刃69が-X方向に最大変位移動した場合(角度-X1mm)には、移動体90に設けられた第7の突起部97は、ピストン47の先端に接続された第5の突起部95に当接するが、移動体90に設けられた第8の突起部98は、ピストン55の先端に接続された第6の突起部99に当接しない。 On the other hand, for example, as shown in FIG. 15, a load is applied to the cutter blade 69 and the cutter blade 69 moves while the first cutter blade position urging cylinder 79a and the second cutter blade position urging cylinder 79b are turned on. When the seventh protrusion 97 provided on the body 90 keeps pushing the fifth protrusion 95 connected to the tip of the piston 47, and the cutter blade 69 moves the maximum displacement in the −X direction (angle −X1 mm). The seventh protrusion 97 provided on the moving body 90 abuts on the fifth protrusion 95 connected to the tip of the piston 47, but the eighth protrusion 98 provided on the moving body 90 is , Does not abut on the sixth protrusion 99 connected to the tip of the piston 55.
移動体90に設けられた第7の突起部97がピストン47の先端に接続された第5の突起部95を押し続けている場合には、第5の突起部95に当接する第7の突起部97は、第5の突起部95から+X方向にf2の力で付勢される。なお、この力f2は、移動体90の位置によって変わるものではなく、第7の突起部97が第5の突起部95に当接する限りにおいて一定である。 If the seventh protrusion 97 provided on the moving body 90 continues to push the fifth protrusion 95 connected to the tip of the piston 47, the seventh protrusion abuts on the fifth protrusion 95. The portion 97 is urged from the fifth protrusion 95 in the + X direction by a force of f2. Note that this force f2 does not change depending on the position of the moving body 90, but is constant as long as the seventh protrusion 97 abuts on the fifth protrusion 95.
 超音波加工プログラムに戻り、ワークWの加工が完了したか否かが判断され(S43)、ワークWの加工が完了していない場合には(S43:No)、カッター刃69の移動(加工)を継続し(S41)、ワークWの加工が完了している場合には(S43:Yes)、メインプログラムに戻る(S45)。 Returning to the ultrasonic machining program, it is determined whether or not the machining of the work W is completed (S43), and if the machining of the work W is not completed (S43: No), the cutter blade 69 is moved (machining). (S41), and if the machining of the work W is completed (S43: Yes), the process returns to the main program (S45).
(第2の加工モード)
次に、カッター刃角度ロック用シリンダー77及びカッター刃位置付勢用シリンダー79をONさせた状態でカッター刃69を付勢し、ワークWを加工する第2の加工モードについて説明する。なお、第2の加工モードは、第1のモードよりも高速で加工する場合に使用される。
(Second machining mode)
Next, a second machining mode in which the cutter blade 69 is urged with the cutter blade angle locking cylinder 77 and the cutter blade position urging cylinder 79 turned on to machine the work W will be described. The second machining mode is used when machining at a higher speed than the first mode.
図9において、超音波加工プログラムでは、先ず、加工データテーブル24aから加工データを取得した後(S21)、加工モードがカッター刃角度付勢モードか否かが判断される(S23)。 In FIG. 9, in the ultrasonic machining program, first, after acquiring machining data from the machining data table 24a (S21), it is determined whether or not the machining mode is the cutter blade angle urging mode (S23).
第2の加工モードは、カッター刃角度付勢モードを使用しないため(S23:No)、第1のカッター刃角度ロック用シリンダー77がONされ(S27)、加工モードがカッター刃位置付勢モードか否かが判断される(S29)。 Since the second machining mode does not use the cutter blade angle urging mode (S23: No), the first cutter blade angle locking cylinder 77 is turned on (S27), so whether the machining mode is the cutter blade position urging mode. Whether or not it is determined (S29).
第2の加工モードは、カッター刃位置付勢モードを使用するため(S29:Yes)、第1のカッター刃位置付勢用シリンダー79a及び第2の第1のカッター刃位置付勢用シリンダー79bがONされる(S31)。 Since the second machining mode uses the cutter blade position urging mode (S29: Yes), the first cutter blade position urging cylinder 79a and the second cutter blade position urging cylinder 79b are used. It is turned on (S31).
図12は、図2のB-B断面図において、カッター刃角度ロック用シリンダーをONさせ、カッター刃の角度を固定した状態(角度0度)を示す図である。 FIG. 12 is a diagram showing a state (angle 0 degree) in which the cutter blade angle locking cylinder is turned on and the angle of the cutter blade is fixed in the cross-sectional view taken along the line BB of FIG.
図12を参照して、具体的に説明すると、カッター刃角度ロック用シリンダー77がONされ、エアがエアコンプレッサー14から接続チューブ41及び接続チューブ43を介してカッター刃角度ロック用シリンダー77の第3の筐体33の空隙部37に注入されると、ピストン35が図面上左側に移動し、ピストン35の先端に接続されたロックピン39が回転体13に設けられた凹部91に勘合する。 More specifically, with reference to FIG. 12, the cutter blade angle locking cylinder 77 is turned on, and air flows from the air compressor 14 via the connecting tube 41 and the connecting tube 43 to the third cylinder 77 for locking the cutter blade angle. When injected into the gap 37 of the housing 33, the piston 35 moves to the left side in the drawing, and the lock pin 39 connected to the tip of the piston 35 fits into the recess 91 provided in the rotating body 13.
 このように、カッター刃角度ロック用シリンダー77がONされると、回転体13は、ロックピン39によって固定され、カッター刃69は、角度0度の位置(図13参照)に固定される。 In this way, when the cutter blade angle locking cylinder 77 is turned on, the rotating body 13 is fixed by the lock pin 39, and the cutter blade 69 is fixed at the position at an angle of 0 degrees (see FIG. 13).
 超音波加工プログラムに戻り、加工モードの設定が完了すると、次に、ワークWがワーク設置台16にセットされているか否かが判断され(S35)、ワークWがワーク設置台16にセットされていない場合には、ワークWがワーク設置台16にセットされるのを待ち(S35:No)、ワークWがワーク設置台16にセットされている場合には(S35:Yes)、カッター刃69に接続された振動子71を超音波振動させるために発振器2を駆動する(S37)。 After returning to the ultrasonic machining program and completing the setting of the machining mode, it is determined whether or not the work W is set on the work setting table 16 (S35), and the work W is set on the work setting table 16. If not, wait for the work W to be set on the work installation table 16 (S35: No), and if the work W is set on the work installation table 16 (S35: Yes), set the cutter blade 69. The oscillator 2 is driven to ultrasonically vibrate the connected oscillator 71 (S37).
次に、カッター刃69がワークWに対する加工開始位置に位置するように、多関節ロボット3の各アームを移動させ(S39)、ワークWを超音波加工するためにカッター刃69を移動させる(S41)。 Next, each arm of the articulated robot 3 is moved (S39) so that the cutter blade 69 is located at the machining start position with respect to the work W, and the cutter blade 69 is moved to ultrasonically machine the work W (S41). ).
 なお、カッター刃位置付勢用シリンダー79をONさせた状態でカッター刃69を付勢してワークWを加工する際のワーク加工装置5内部の動作については、図5、図14及び図15を参照して、上述した通りである。 Regarding the operation inside the work processing device 5 when the cutter blade 69 is urged to process the work W with the cutter blade position urging cylinder 79 turned on, FIGS. 5, 14 and 15 are shown. With reference, as described above.
したがって、第2加工モードにおいては、加工装置5は、カッター刃69の角度を角度0度に固定するとともに、ワークWに対して、カッター刃69を位置0mmの位置に向かって一定の力f2で付勢するようにして、ワークWを加工する。 Therefore, in the second machining mode, the machining device 5 fixes the angle of the cutter blade 69 to an angle of 0 degrees, and at the same time, the cutter blade 69 is moved toward the position of the position 0 mm with a constant force f2 with respect to the work W. The work W is processed so as to be urged.
 そして、ワークWの加工が完了したか否かが判断され(S43)、ワークWの加工が完了していない場合には(S43:No)、カッター刃69の移動(加工)を継続し(S41)、ワークWの加工が完了している場合には(S43:Yes)、メインプログラムに戻る(S45)。 Then, it is determined whether or not the machining of the work W is completed (S43), and if the machining of the work W is not completed (S43: No), the movement (machining) of the cutter blade 69 is continued (S41). ), When the machining of the work W is completed (S43: Yes), the process returns to the main program (S45).
(第3の加工モード)
次に、カッター刃角度付勢用シリンダー75及びカッター刃位置ロック用シリンダー81をONさせた状態でカッター刃69を付勢し、ワークWを加工する第3の加工モードについて説明する。なお、第3の加工モードも、複雑な加工形状のワークWを加工する際に適切な加工モードであるが、第1の加工モードよりも高速で加工する場合に使用される。
(Third machining mode)
Next, a third machining mode for machining the work W by urging the cutter blade 69 with the cutter blade angle urging cylinder 75 and the cutter blade position locking cylinder 81 turned on will be described. The third machining mode is also an appropriate machining mode when machining a work W having a complicated machining shape, but is used when machining at a higher speed than the first machining mode.
図9において、超音波加工プログラムでは、先ず、加工データテーブル24aから加工データを取得した後(S21)、加工モードがカッター刃角度付勢モードか否かが判断される(S23)。 In FIG. 9, in the ultrasonic machining program, first, after acquiring machining data from the machining data table 24a (S21), it is determined whether or not the machining mode is the cutter blade angle urging mode (S23).
第3の加工モードは、カッター刃角度付勢モードを使用するため(S23:Yes)、第1のカッター刃角度付勢用シリンダー75a及び第2のカッター刃角度付勢用シリンダー75bがONされ(S25)、加工モードがカッター刃位置付勢モードか否かが判断される(S29)。 Since the third machining mode uses the cutter blade angle urging mode (S23: Yes), the first cutter blade angle urging cylinder 75a and the second cutter blade angle urging cylinder 75b are turned on (S23: Yes). S25), it is determined whether or not the machining mode is the cutter blade position urging mode (S29).
第3の加工モードは、カッター刃位置付勢モードを使用しないため(S29:No)、カッター刃位置ロック用シリンダー81がONされる(S33)。 Since the third machining mode does not use the cutter blade position urging mode (S29: No), the cutter blade position locking cylinder 81 is turned on (S33).
図16は、図2のC-C断面図において、カッター刃位置ロック用シリンダーをONさせ、カッター刃の位置を固定した状態(変位0mm)を示す図である。 FIG. 16 is a diagram showing a state (displacement 0 mm) in which the cutter blade position locking cylinder is turned on and the position of the cutter blade is fixed in the CC cross-sectional view of FIG.
図16を参照して、具体的に説明すると、カッター刃位置ロック用シリンダー81がONされ、エアがエアコンプレッサー14から接続チューブ94及び接続チューブ96を介してカッター刃位置ロック用シリンダー81の第6の筐体61の空隙部65に注入されると、ピストン63が図面上左側に移動し、ピストン63の先端に接続されたロックピン67が移動体90に設けられた凹部93に勘合する。 Specifically, with reference to FIG. 16, the cutter blade position locking cylinder 81 is turned on, and air flows from the air compressor 14 via the connecting tube 94 and the connecting tube 96 to the sixth cylinder 81 for locking the cutter blade position. When injected into the gap portion 65 of the housing 61, the piston 63 moves to the left side in the drawing, and the lock pin 67 connected to the tip of the piston 63 fits into the recess 93 provided in the moving body 90.
 このように、カッター刃位置ロック用シリンダー81がONされると、移動体90は、ロックピン67によって固定され、カッター刃69は、位置0mmの位置(図16等参照)に固定される。 In this way, when the cutter blade position locking cylinder 81 is turned on, the moving body 90 is fixed by the lock pin 67, and the cutter blade 69 is fixed at the position 0 mm (see FIG. 16 and the like).
 超音波加工プログラムに戻り、加工モードの設定が完了すると、次に、ワークWがワーク設置台16にセットされているか否かが判断され(S35)、ワークWがワーク設置台16にセットされていない場合には、ワークWがワーク設置台16にセットされるのを待ち(S35:No)、ワークWがワーク設置台16にセットされている場合には(S35:Yes)、カッター刃69に接続された振動子71を超音波振動させるために発振器2を駆動する(S37)。 After returning to the ultrasonic machining program and completing the setting of the machining mode, it is determined whether or not the work W is set on the work setting table 16 (S35), and the work W is set on the work setting table 16. If not, wait for the work W to be set on the work installation table 16 (S35: No), and if the work W is set on the work installation table 16 (S35: Yes), set the cutter blade 69. The oscillator 2 is driven to ultrasonically vibrate the connected oscillator 71 (S37).
次に、カッター刃69がワークWに対する加工開始位置に位置するように、多関節ロボット3の各アームを移動させ(S39)、ワークWを超音波加工するためにカッター刃69を移動させる(S41)。 Next, each arm of the articulated robot 3 is moved (S39) so that the cutter blade 69 is located at the machining start position with respect to the work W, and the cutter blade 69 is moved to ultrasonically machine the work W (S41). ).
 なお、第1のカッター刃角度付勢用シリンダー75a及び第2のカッター刃角度付勢用シリンダー75bがONさせた状態でカッター刃69を付勢してワークWを加工する際のワーク加工装置5内部の動作については、図4、図10、図11及び図13を参照して、上述した通りである。 The work processing device 5 for urging the cutter blade 69 to process the work W with the first cutter blade angle urging cylinder 75a and the second cutter blade angle urging cylinder 75b turned on. The internal operation is as described above with reference to FIGS. 4, 10, 11 and 13.
したがって、第3の加工モードにおいては、加工装置5は、カッター刃69の位置を位置0mmに固定するとともに、ワークWに対して、カッター刃69を角度0度に向かって一定の力f1で付勢するようにして、ワークWを加工する。 Therefore, in the third machining mode, the machining apparatus 5 fixes the position of the cutter blade 69 to the position 0 mm, and attaches the cutter blade 69 to the work W with a constant force f1 toward an angle of 0 degrees. The work W is processed so as to be vigorous.
そして、ワークWの加工が完了したか否かが判断され(S43)、ワークWの加工が完了していない場合には(S43:No)、カッター刃69の移動(加工)を継続し(S41)、ワークWの加工が完了している場合には(S43:Yes)、メインプログラムに戻る(S45)。 Then, it is determined whether or not the machining of the work W is completed (S43), and if the machining of the work W is not completed (S43: No), the movement (machining) of the cutter blade 69 is continued (S41). ), When the machining of the work W is completed (S43: Yes), the process returns to the main program (S45).
(第4の加工モード)
最後に、カッター刃角度ロック用シリンダー77及びカッター刃位置ロック用シリンダー81をONさせた状態でカッター刃69を付勢せずに、ワークWを加工する第4の加工モードについて説明する。なお、第4の加工モードは、最も高速で加工する場合に使用される。
(Fourth machining mode)
Finally, a fourth machining mode for machining the work W without urging the cutter blade 69 with the cutter blade angle locking cylinder 77 and the cutter blade position locking cylinder 81 turned on will be described. The fourth machining mode is used when machining at the highest speed.
図9において、超音波加工プログラムでは、先ず、加工データテーブル24aから加工データを取得した後(S21)、加工モードがカッター刃角度付勢モードか否かが判断される(S23)。 In FIG. 9, in the ultrasonic machining program, first, after acquiring machining data from the machining data table 24a (S21), it is determined whether or not the machining mode is the cutter blade angle urging mode (S23).
第4の加工モードは、カッター刃角度付勢モードを使用しないため(S23:No)、カッター刃角度ロック用シリンダー77がONされ(S27)、加工モードがカッター刃位置付勢モードか否かが判断される(S29)。 Since the fourth machining mode does not use the cutter blade angle urging mode (S23: No), the cutter blade angle locking cylinder 77 is turned on (S27), and whether the machining mode is the cutter blade position urging mode or not. It is determined (S29).
また、第4の加工モードは、カッター刃位置付勢モードも使用しないため(S29:No)、カッター刃位置ロック用シリンダー81がONされる(S33)。 Further, since the fourth machining mode does not use the cutter blade position urging mode (S29: No), the cutter blade position locking cylinder 81 is turned on (S33).
 そして、加工モードの設定が完了すると、次に、ワークWがワーク設置台16にセットされているか否かが判断され(S35)、ワークWがワーク設置台16にセットされていない場合には、ワークWがワーク設置台16にセットされるのを待ち(S35:No)、ワークWがワーク設置台16にセットされている場合には(S35:Yes)、カッター刃69に接続された振動子71を超音波振動させるために発振器2を駆動する(S37)。 Then, when the setting of the machining mode is completed, it is next determined whether or not the work W is set on the work setting table 16 (S35), and if the work W is not set on the work setting table 16, if the work W is not set on the work setting table 16. Waiting for the work W to be set on the work installation table 16 (S35: No), and when the work W is set on the work installation table 16 (S35: Yes), the oscillator connected to the cutter blade 69. The oscillator 2 is driven in order to ultrasonically vibrate the 71 (S37).
次に、カッター刃69がワークWに対する加工開始位置に位置するように、多関節ロボット3の各アームを移動させ(S39)、ワークWを超音波加工するためにカッター刃69を移動させる(S41)。 Next, each arm of the articulated robot 3 is moved (S39) so that the cutter blade 69 is located at the machining start position with respect to the work W, and the cutter blade 69 is moved to ultrasonically machine the work W (S41). ).
 なお、カッター刃角度ロック用シリンダー77をONさせた状態でカッター刃69を付勢せずにワークWを加工する際のワーク加工装置5内部の動作については、図4及び図12を参照して、上述した通りである。 For the operation inside the work processing device 5 when processing the work W without urging the cutter blade 69 with the cutter blade angle locking cylinder 77 turned on, refer to FIGS. 4 and 12. , As described above.
 また、カッター刃位置ロック用シリンダー81をONさせた状態でカッター刃69を付勢せずにワークWを加工する際のワーク加工装置5内部の動作についても、図5及び図16を参照して、上述した通りである。 Further, also refer to FIGS. 5 and 16 for the operation inside the work processing apparatus 5 when processing the work W without urging the cutter blade 69 with the cutter blade position locking cylinder 81 turned on. , As described above.
したがって、第4の加工モードにおいては、加工装置5は、カッター刃69の角度を角度0度に、カッター刃69の位置を位置0mm に固定して、ワークWを加工する。 Therefore, in the fourth processing mode, the processing apparatus 5 processes the work W by fixing the angle of the cutter blade 69 to an angle of 0 degrees and the position of the cutter blade 69 to a position of 0 mm.
 そして、ワークWの加工が完了したか否かが判断され(S43)、ワークWの加工が完了していない場合には(S43:No)、カッター刃69の移動(加工)を継続し(S41)、ワークWの加工が完了している場合には(S43:Yes)、メインプログラムに戻る(S45)。 Then, it is determined whether or not the machining of the work W is completed (S43), and if the machining of the work W is not completed (S43: No), the movement (machining) of the cutter blade 69 is continued (S41). ), When the machining of the work W is completed (S43: Yes), the process returns to the main program (S45).
図8のメインプログラムに戻ると、カッター刃69に接続された振動子71の超音波振動を停止させるために発振器2をOFFするとともに(S9)、第1のカッター刃角度付勢用シリンダー75a、第2のカッター刃角度付勢用シリンダー75b、カッター刃角度ロック用シリンダー77、第1のカッター刃位置付勢用シリンダー79a、第2のカッター刃位置付勢用シリンダー79b及びカッター刃位置ロック用シリンダー81のすべてのシリンダーをOFFする(S11)。 Returning to the main program of FIG. 8, the oscillator 2 is turned off in order to stop the ultrasonic vibration of the vibrator 71 connected to the cutter blade 69 (S9), and the first cutter blade angle urging cylinder 75a, Second cutter blade angle urging cylinder 75b, cutter blade angle locking cylinder 77, first cutter blade position urging cylinder 79a, second cutter blade position urging cylinder 79b and cutter blade position locking cylinder All the cylinders of 81 are turned off (S11).
そして、多関節ロボット3のアームを初期位置に移動させた後(S13)、加工されたワークWがワーク設置台16から除去されたか否かが判断され(S15)、ワークWが除去されていないと判断された場合には(S15:No)、ワークWが除去されるのを待ち、ワークWが除去されたと判断された場合には(S15:Yes)、さらに、ワークWの処理個数が操作パネル8で入力した処理個数に達したか否かが判断される(S17)。 Then, after moving the arm of the articulated robot 3 to the initial position (S13), it is determined whether or not the processed work W has been removed from the work setting table 16 (S15), and then the work W has not been removed. If it is determined (S15: No), the work W is waited to be removed, and if it is determined that the work W has been removed (S15: Yes), the number of processed works W is further manipulated. It is determined whether or not the number of processes input on the panel 8 has been reached (S17).
ここで、ワークWの処理個数が操作パネル8で入力した処理個数に達していないと判断された場合には(S17:No)、再度、超音波加工プログラムが実行され、ワークWの処理個数が操作パネル8で入力した処理個数に達したと判断された場合には(S17:Yes)、処理を終了する(S19)。 Here, if it is determined that the number of processes of the work W has not reached the number of processes input on the operation panel 8 (S17: No), the ultrasonic processing program is executed again and the number of processes of the work W is reduced. When it is determined that the number of processes input on the operation panel 8 has been reached (S17: Yes), the process is terminated (S19).
本実施形態のワーク加工装置5によれば、カッター刃69を使用してワークWを加工するものを対象として、特に、カッター刃69を、ワークWの形状に応じて、ワークWに対する一定方向の位置を変更可能なカッター刃位置変更機構7と、カッター刃69の位置の変更方向に抗して、カッター刃位置変更機構7を付勢する第1のカッター刃位置付勢用シリンダー79a及び第2のカッター刃位置付勢用シリンダー79bと、を備え、第1のカッター刃位置付勢用シリンダー79a及び第2のカッター刃位置付勢用シリンダー79bは、カッター刃位置変更機構7によるカッター刃69の位置に拘わらず、略一定の付勢力でカッター刃位置変更機構7を付勢するので、ワークを精度良く加工することができる。 According to the work processing apparatus 5 of the present embodiment, the work W is machined by using the cutter blade 69, and the cutter blade 69 is particularly oriented in a certain direction with respect to the work W according to the shape of the work W. The first cutter blade position urging cylinder 79a and the second cutter blade position urging cylinder 79a and the second cutter blade position changing mechanism 7 that can change the position and urge the cutter blade position changing mechanism 7 against the changing direction of the position of the cutter blade 69. Cutter blade position urging cylinder 79b, and the first cutter blade position urging cylinder 79a and the second cutter blade position urging cylinder 79b are of the cutter blade 69 by the cutter blade position changing mechanism 7. Since the cutter blade position changing mechanism 7 is urged with a substantially constant urging force regardless of the position, the work can be machined with high accuracy.
また、本実施形態のワーク加工装置5によれば、カッター刃69のワークWに対する一定方向の位置を固定するカッター刃位置ロック用シリンダー81を備えているので、ワークWの形状に応じて、カッター刃69を有効に押し当てる機構を選択してワークWを加工することができる。 Further, according to the work processing apparatus 5 of the present embodiment, since the cutter blade position locking cylinder 81 for fixing the position of the cutter blade 69 with respect to the work W is provided, the cutter is provided according to the shape of the work W. The work W can be machined by selecting a mechanism that effectively presses the blade 69.
また、本実施形態のワーク加工装置5によれば、カッター刃69の進行方向に対する角度を、ワークWの形状に応じて変更可能なカッター刃角度変更機構9と、カッター刃69の角度の変更方向に抗して、カッター刃角度変更機構9を付勢する第1のカッター刃角度付勢用シリンダー75a及び第2のカッター刃角度付勢用シリンダー75bと、を備えているので、複雑な加工形状のワークWに対しても、カッター刃69を有効に押し当てて加工することができる。 Further, according to the work processing apparatus 5 of the present embodiment, the cutter blade angle changing mechanism 9 that can change the angle of the cutter blade 69 with respect to the traveling direction according to the shape of the work W, and the changing direction of the angle of the cutter blade 69. A first cutter blade angle urging cylinder 75a and a second cutter blade angle urging cylinder 75b for urging the cutter blade angle changing mechanism 9 are provided, so that the processing shape is complicated. The cutter blade 69 can be effectively pressed against the work W of the above for processing.
また、本実施形態のワーク加工装置5によれば、第1のカッター刃角度付勢用シリンダー75a及び第2のカッター刃角度付勢用シリンダー75bは、カッター刃69の角度に拘わらず、略一定の付勢力でカッター刃角度変更機構9を付勢するので、複雑な加工形状のワークWであっても、カッター刃69をさらに有効に押し当てて加工することができる。 Further, according to the work processing apparatus 5 of the present embodiment, the first cutter blade angle urging cylinder 75a and the second cutter blade angle urging cylinder 75b are substantially constant regardless of the angle of the cutter blade 69. Since the cutter blade angle changing mechanism 9 is urged by the urging force of the above, even a work W having a complicated processing shape can be processed by pressing the cutter blade 69 more effectively.
また、本実施形態のワーク加工装置5によれば、角度を固定するカッター刃角度ロック機構77を備えているので、ワークWの形状に応じて、カッター刃69を有効に押し当てる機構を選択してワークを加工することができる。 Further, according to the work processing apparatus 5 of the present embodiment, since the cutter blade angle locking mechanism 77 for fixing the angle is provided, a mechanism for effectively pressing the cutter blade 69 is selected according to the shape of the work W. The work can be processed.
また、本実施形態の超音波加工装置1によれば、カッター刃69を、移動体90の移動方向と交差する方向に、超音波振動させてワークを加工するので、ワークをより精密に加工することができる。 Further, according to the ultrasonic processing apparatus 1 of the present embodiment, the cutter blade 69 is ultrasonically vibrated in a direction intersecting the moving direction of the moving body 90 to process the work, so that the work is processed more precisely. be able to.
さらに、本実施形態の超音波加工装置1によれば、カッター刃69を、回転体13の回転方向と交差する方向に、超音波振動させてワークを加工するので、ワークをより精密に加工することができる。 Further, according to the ultrasonic processing apparatus 1 of the present embodiment, the cutter blade 69 is ultrasonically vibrated in a direction intersecting the rotation direction of the rotating body 13 to process the work, so that the work is processed more precisely. be able to.
以上、本発明の実施形態における超音波加工装置及びワーク加工装置について説明してきたが、本発明は上記実施形態に限られるものではなく、その要旨を逸脱しない範囲において種々変更して実施することが可能である。 Although the ultrasonic processing apparatus and the work processing apparatus according to the embodiment of the present invention have been described above, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the gist thereof. It is possible.
例えば、上述の実施形態において使用した振動子71は、カッター刃69を図面上上下方向に振動させるように説明したが、それに限られるものではなく、回転体13の回転方向に対して交差する方向であっても良く、移動体90の移動方向に対して交差する方向であっても良い。 For example, the oscillator 71 used in the above-described embodiment has been described so as to vibrate the cutter blade 69 in the vertical direction in the drawing, but the present invention is not limited to this, and the direction intersects the rotation direction of the rotating body 13. It may be a direction that intersects with the moving direction of the moving body 90.
また、上述の実施形態において使用したカッター刃69は、両側研磨のカッター刃を使用して説明したが、片側研磨のカッター刃であっても加工方向を考慮すれば使用可能である。 Further, the cutter blade 69 used in the above-described embodiment has been described using a cutter blade for double-side polishing, but even a cutter blade for single-side polishing can be used if the processing direction is taken into consideration.
1・・・超音波加工装置
2・・・発振器
3・・・多関節ロボット
5・・・ワーク加工装置
6・・・ロボットコントローラ
7・・・カッター刃位置変更機構
9・・・カッター刃角度変更機構
14・・・エアコンプレッサー
69・・・カッター刃
71・・・振動子
75・・・カッター刃角度付勢用シリンダー
77・・・カッター刃角度ロック用シリンダー
79・・・カッター刃位置付勢用シリンダー
81・・・カッター刃位置ロック用シリンダー
W・・・ワーク
1 ... Ultrasonic processing device 2 ... Oscillator 3 ... Articulated robot 5 ... Work processing device 6 ... Robot controller 7 ... Cutter blade position change mechanism 9 ... Cutter blade angle change Mechanism 14 ・ ・ ・ Air compressor 69 ・ ・ ・ Cutter blade 71 ・ ・ ・ Oscillator 75 ・ ・ ・ Cutter blade angle urging cylinder 77 ・ ・ ・ Cutter blade angle locking cylinder 79 ・ ・ ・ Cutter blade position urging Cylinder 81 ・ ・ ・ Cylinder for locking the cutter blade position W ・ ・ ・ Work

Claims (7)

  1. カッター刃を使用してワークを加工するワーク加工装置において、
    前記カッター刃を、前記ワークの形状に応じて、前記ワークに対する一定方向の位置を変更可能なカッター刃位置変更機構と、
    前記カッター刃の前記位置の変更方向に抗して、前記カッター刃位置変更機構を付勢するカッター刃位置付勢機構と、
    を備え、
    前記カッター刃付位置勢機構は、前記カッター刃位置変更機構による前記カッター刃の位置に拘わらず、略一定の付勢力で前記カッター刃位置変更機構を付勢することを特徴とするワーク加工装置。
    In a work processing device that processes a work using a cutter blade
    A cutter blade position changing mechanism capable of changing the position of the cutter blade in a certain direction with respect to the work according to the shape of the work,
    A cutter blade position urging mechanism that urges the cutter blade position changing mechanism against the direction of changing the position of the cutter blade, and a cutter blade position urging mechanism.
    Equipped with
    The cutter blade position changing mechanism is a work processing apparatus characterized in that the cutter blade position changing mechanism is urged with a substantially constant urging force regardless of the position of the cutter blade by the cutter blade position changing mechanism.
  2. 前記カッター刃の前記ワークに対する前記一定方向の位置を固定するカッター刃位置ロック機構を備えたことを特徴とする請求項1に記載のワーク加工装置。 The work processing apparatus according to claim 1, further comprising a cutter blade position locking mechanism for fixing the position of the cutter blade in the fixed direction with respect to the work.
  3.  前記カッター刃の進行方向に対する角度を、前記ワークの形状に応じて変更可能なカッター刃角度変更機構と、
    前記カッター刃の前記角度の変更方向に抗して、前記カッター刃角度変更機構を付勢するカッター刃角度付勢機構と、
    を備えたことを特徴とする請求項1または請求項2に記載のワーク加工装置。
    A cutter blade angle changing mechanism that can change the angle of the cutter blade with respect to the traveling direction according to the shape of the work.
    A cutter blade angle urging mechanism that urges the cutter blade angle changing mechanism against the angle changing direction of the cutter blade, and a cutter blade angle urging mechanism.
    The work processing apparatus according to claim 1 or 2, wherein the work processing apparatus is provided.
  4. 前記カッター刃角度付勢機構は、前記カッター刃の前記角度に拘わらず、略一定の付勢力で前記カッター刃角度変更機構を付勢することを特徴とする請求項3に記載のワーク加工装置。 The work processing apparatus according to claim 3, wherein the cutter blade angle urging mechanism urges the cutter blade angle changing mechanism with a substantially constant urging force regardless of the angle of the cutter blade.
  5. 前記角度を固定するカッター刃角度ロック機構を備えたことを特徴とする請求項3または請求項4に記載のワーク加工装置。 The work processing apparatus according to claim 3 or 4, further comprising a cutter blade angle locking mechanism for fixing the angle.
  6.  請求項1乃至請求項5の何れかのワーク加工装置を備え、
     前記カッター刃を、前記ワークに対する前記一定方向と交差する方向に、超音波振動させてワークを加工することを特徴とする超音波加工装置。
    The work processing apparatus according to any one of claims 1 to 5 is provided.
    An ultrasonic processing apparatus characterized in that the cutter blade is ultrasonically vibrated in a direction intersecting the fixed direction with respect to the work to process the work.
  7.  請求項3乃至請求項5の何れかのワーク加工装置を備え、
     前記カッター刃を、前記角度の変更方向と交差する方向に、超音波振動させてワークを加工することを特徴とする超音波加工装置。
    The work processing apparatus according to any one of claims 3 to 5 is provided.
    An ultrasonic processing apparatus characterized in that the cutter blade is ultrasonically vibrated in a direction intersecting the angle changing direction to process a work.
PCT/JP2020/042782 2020-11-17 2020-11-17 Workpiece machining device and ultrasonic machining apparatus equipped with same WO2022107201A1 (en)

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JP2021510137A JP7100926B1 (en) 2020-11-17 2020-11-17 An ultrasonic processing device equipped with a work processing device and the work processing device.
CN202080106608.6A CN116390825B (en) 2020-11-17 2020-11-17 Workpiece processing device and ultrasonic processing device provided with same
CN202410959510.5A CN118650214A (en) 2020-11-17 2020-11-17 Force application device, workpiece processing device provided with same, and ultrasonic processing device provided with same
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