JP2002355584A5 - - Google Patents

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Publication number
JP2002355584A5
JP2002355584A5 JP2002021269A JP2002021269A JP2002355584A5 JP 2002355584 A5 JP2002355584 A5 JP 2002355584A5 JP 2002021269 A JP2002021269 A JP 2002021269A JP 2002021269 A JP2002021269 A JP 2002021269A JP 2002355584 A5 JP2002355584 A5 JP 2002355584A5
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JP
Japan
Prior art keywords
aerosol
particles
deposition apparatus
flow path
differential mobility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002021269A
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English (en)
Japanese (ja)
Other versions
JP2002355584A (ja
JP4139112B2 (ja
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Publication date
Priority claimed from US09/772,688 external-priority patent/US6607597B2/en
Application filed filed Critical
Publication of JP2002355584A publication Critical patent/JP2002355584A/ja
Publication of JP2002355584A5 publication Critical patent/JP2002355584A5/ja
Application granted granted Critical
Publication of JP4139112B2 publication Critical patent/JP4139112B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002021269A 2001-01-30 2002-01-30 粒子を表面上に堆積させる堆積装置 Expired - Fee Related JP4139112B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/772,688 US6607597B2 (en) 2001-01-30 2001-01-30 Method and apparatus for deposition of particles on surfaces
US09/772688 2001-01-30

Publications (3)

Publication Number Publication Date
JP2002355584A JP2002355584A (ja) 2002-12-10
JP2002355584A5 true JP2002355584A5 (de) 2005-08-11
JP4139112B2 JP4139112B2 (ja) 2008-08-27

Family

ID=25095874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002021269A Expired - Fee Related JP4139112B2 (ja) 2001-01-30 2002-01-30 粒子を表面上に堆積させる堆積装置

Country Status (3)

Country Link
US (1) US6607597B2 (de)
JP (1) JP4139112B2 (de)
DE (1) DE10203580A1 (de)

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