JP2002352950A5 - - Google Patents
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- Publication number
- JP2002352950A5 JP2002352950A5 JP2002031539A JP2002031539A JP2002352950A5 JP 2002352950 A5 JP2002352950 A5 JP 2002352950A5 JP 2002031539 A JP2002031539 A JP 2002031539A JP 2002031539 A JP2002031539 A JP 2002031539A JP 2002352950 A5 JP2002352950 A5 JP 2002352950A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- metal film
- recess
- film
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000002184 metal Substances 0.000 claims 73
- 229910052751 metal Inorganic materials 0.000 claims 73
- 239000012044 organic layer Substances 0.000 claims 16
- 239000000758 substrate Substances 0.000 claims 9
- 238000000034 method Methods 0.000 claims 8
- 238000004519 manufacturing process Methods 0.000 claims 6
- 238000005498 polishing Methods 0.000 claims 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 238000012790 confirmation Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 239000011810 insulating material Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 claims 1
- 229910052763 palladium Inorganic materials 0.000 claims 1
- 235000012239 silicon dioxide Nutrition 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- 239000002356 single layer Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002031539A JP2002352950A (ja) | 2001-02-07 | 2002-02-07 | 発光装置およびその作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001-31594 | 2001-02-07 | ||
| JP2001031594 | 2001-02-07 | ||
| JP2002031539A JP2002352950A (ja) | 2001-02-07 | 2002-02-07 | 発光装置およびその作製方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008102211A Division JP4777380B2 (ja) | 2001-02-07 | 2008-04-10 | 発光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002352950A JP2002352950A (ja) | 2002-12-06 |
| JP2002352950A5 true JP2002352950A5 (enExample) | 2005-08-18 |
Family
ID=26609090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002031539A Withdrawn JP2002352950A (ja) | 2001-02-07 | 2002-02-07 | 発光装置およびその作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002352950A (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7126270B2 (en) | 2003-06-30 | 2006-10-24 | Semiconductor Energy Laboratory Co., Ltd. | Reflector for a light emitting device |
| JP4522760B2 (ja) * | 2003-06-30 | 2010-08-11 | 株式会社半導体エネルギー研究所 | 発光装置及び発光装置の作製方法 |
| JP4504645B2 (ja) * | 2003-08-27 | 2010-07-14 | 明義 三上 | 複合発光装置 |
| US7816863B2 (en) | 2003-09-12 | 2010-10-19 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device and method for manufacturing the same |
| JP4823478B2 (ja) | 2003-09-19 | 2011-11-24 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
| JP4654581B2 (ja) * | 2004-01-30 | 2011-03-23 | セイコーエプソン株式会社 | Ｔｆｔ基板の製造方法 |
| JP4761777B2 (ja) * | 2005-01-20 | 2011-08-31 | 三菱電機株式会社 | 表示装置及びその製造方法 |
| JP5238136B2 (ja) * | 2005-03-25 | 2013-07-17 | 株式会社半導体エネルギー研究所 | 発光装置 |
| WO2006104020A1 (en) | 2005-03-25 | 2006-10-05 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting element, light emitting device and electric appliance using the same |
| US7800101B2 (en) | 2006-01-05 | 2010-09-21 | Samsung Electronics Co., Ltd. | Thin film transistor having openings formed therein |
| JP5160754B2 (ja) | 2006-01-31 | 2013-03-13 | エルジー ディスプレイ カンパニー リミテッド | Ｅｌ装置 |
| WO2010005064A1 (en) | 2008-07-10 | 2010-01-14 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device and electronic device |
-
2002
- 2002-02-07 JP JP2002031539A patent/JP2002352950A/ja not_active Withdrawn
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