JP2002340559A - Crystal angular speed sensor - Google Patents
Crystal angular speed sensorInfo
- Publication number
- JP2002340559A JP2002340559A JP2001141078A JP2001141078A JP2002340559A JP 2002340559 A JP2002340559 A JP 2002340559A JP 2001141078 A JP2001141078 A JP 2001141078A JP 2001141078 A JP2001141078 A JP 2001141078A JP 2002340559 A JP2002340559 A JP 2002340559A
- Authority
- JP
- Japan
- Prior art keywords
- tuning fork
- electrode
- electrodes
- groove
- fork arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は角速度センサとして
用いる音叉型屈曲水晶振動子の形状及び電極構成に関す
る。特に、小型で角速度の高い検出感度を有する新形状
と新電極構成の水晶角速度センサに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the shape and electrode configuration of a tuning-fork type bent quartz crystal resonator used as an angular velocity sensor. In particular, the present invention relates to a quartz angular velocity sensor having a new shape and a new electrode configuration having a small size and high detection sensitivity with high angular velocity.
【０００２】[0002]
【従来の技術】従来の技術としては、水晶などの圧電材
料を用いた音叉型振動子がよく知られている。図２１に
この従来例の正面図を示す。図２１において圧電振動子
３００は２本の音叉腕３０１，３０２と音叉基部３０３
を具えて構成されている。励振電極は音叉腕の表裏面と
側面に配置されている。図２２には図２１の音叉腕のｈ
−ｈ´断面図を示す。一方の音叉腕３０１の断面の上面
には電極３０４が下面には電極３０５が配置されてい
る。側面には電極３０６と３０７が配置されていて、電
極３０４と３０５、電極３０６と３０７が各々同極とな
るように構成され、２電極端子ＡＡ−ＢＢを構成する。2. Description of the Related Art As a conventional technique, a tuning fork type vibrator using a piezoelectric material such as quartz is well known. FIG. 21 shows a front view of this conventional example. In FIG. 21, a piezoelectric vibrator 300 includes two tuning fork arms 301 and 302 and a tuning fork base 303.
It is configured with. The excitation electrodes are arranged on the front and back surfaces and side surfaces of the tuning fork arm. FIG. 22 shows h of the tuning fork arm of FIG.
-H 'shows a sectional view. An electrode 304 is arranged on the upper surface of the cross section of one tuning fork arm 301, and an electrode 305 is arranged on the lower surface. Electrodes 306 and 307 are arranged on the side surface, and the electrodes 304 and 305 and the electrodes 306 and 307 are configured to have the same polarity, respectively, to form a two-electrode terminal AA-BB.
【０００３】他方の音叉腕３０２の上面には互いに異極
となる電極３０８と３０９が配置され下面にも互いに異
極となる電極３１０と３１１が配置され電極３０８と３
１１が同極に、電極３０９と３１０が同極となるように
構成されていて、２電極端子ＣＣ−ＤＤを構成する。
又、ｘ軸は圧電材料の電気軸で、ｙ´軸とｚ´軸はｘ軸
を回転軸として回転後の機械軸ｙ及び光軸ｚの新軸であ
る。一般的には、２電極端子ＡＡ−ＢＢは振動子駆動端
子を示し、２電極端子ＣＣ−ＤＤは角速度検出端子を示
す。[0003] On the upper surface of the other tuning fork arm 302, electrodes 308 and 309 having different polarities are arranged, and on the lower surface, electrodes 310 and 311 having different polarities are arranged.
11 is configured to have the same polarity, and the electrodes 309 and 310 are configured to have the same polarity, thereby forming a two-electrode terminal CC-DD.
The x-axis is an electric axis of the piezoelectric material, and the y'-axis and the z'-axis are new axes of the mechanical axis y and the optical axis z after the rotation about the x-axis. Generally, two-electrode terminals AA-BB indicate vibrator drive terminals, and two-electrode terminals CC-DD indicate angular velocity detection terminals.
【０００４】今、振動子駆動端子間に直流電圧（ＡＡ端
子に正、ＢＢ端子に負）を印加すると、電界は矢印のよ
うに働き、音叉腕の中立線を境にしてｘ軸方向の電界成
分Ｅxの向きが反対となる。その結果、音叉腕は曲げを
生じる。従って、振動子駆動端子ＡＡ−ＢＢ間に交流電
圧を印加すると、両音叉腕はｘ−ｙ´平面で屈曲振動を
する。更に、ｙ´軸廻りに角速度ωを印加すると、ｘ−
ｙ´平面に垂直となる方向に角速度ωに比例したコリオ
リ力が発生し、屈曲振動を引き起こす。この場合、音叉
腕３０２には実線と直線の矢印で示したような平行電界
が働く。しかし、そのｘ軸方向の電界成分は非常に小さ
いため、角速度検出端子ＣＣ−ＤＤ間に発生する電圧が
非常に小さくなる。When a DC voltage (positive to the AA terminal, negative to the BB terminal) is applied between the vibrator driving terminals, the electric field acts as shown by the arrow, and the electric field in the x-axis direction is applied to the neutral line of the tuning fork arm. The direction of the component Ex is reversed. As a result, the tuning fork arm bends. Therefore, when an AC voltage is applied between the vibrator drive terminals AA and BB, both tuning fork arms perform bending vibration in the xy ′ plane. Further, when an angular velocity ω is applied around the y ′ axis, x−
A Coriolis force proportional to the angular velocity ω is generated in a direction perpendicular to the y ′ plane, causing bending vibration. In this case, a parallel electric field acts on the tuning fork arm 302 as shown by the solid line and the straight arrow. However, since the electric field component in the x-axis direction is very small, the voltage generated between the angular velocity detection terminals CC and DD becomes very small.
【０００５】図２３は他の従来例の正面図を示す。２つ
の音叉型水晶振動子３１２と３１３が各音叉基部３１４
と３１５で接続されている。いわゆる、Ｈ型の音叉形状
を成している。一方の音叉型水晶振動子３１２は音叉腕
３１６と３１７と音叉基部３１４を具えて構成されてい
る。又、他方の音叉型水晶振動子３１３は音叉腕３１８
と３１９と音叉基部３１５を具えて構成されている。図
２４は図２３の音叉腕３１６と３１７のｉ−ｉ´断面図
を示す。音叉腕３１６の上下面には電極３２２と３２３
が側面には３２０と３２１が配置されている。又、音叉
腕３１７の上下面には電極３２６と３２７が側面には３
２４と３２５が配置されている。そして、電極３２０，
３２１，３２６，と３２７が同極に、電極３２２，３２
３，３２４，と３２５が同極になるように構成されてい
る。即ち、２電極端子ＥＥ−ＦＦを構成する。この端子
は振動子駆動端子を示す。FIG. 23 shows a front view of another conventional example. Two tuning-fork type crystal units 312 and 313 are connected to each tuning-fork base 314.
And 315. It has a so-called H-shaped tuning fork shape. One tuning-fork type crystal resonator 312 includes tuning fork arms 316 and 317 and a tuning fork base 314. The other tuning-fork type crystal oscillator 313 has a tuning fork arm 318.
319 and a tuning fork base 315. FIG. 24 is a sectional view taken along the line ii 'of the tuning fork arms 316 and 317 of FIG. The electrodes 322 and 323 are provided on the upper and lower surfaces of the tuning fork arm 316.
On the side, 320 and 321 are arranged. Further, electrodes 326 and 327 are provided on the upper and lower surfaces of the tuning fork arm 317, and 3
24 and 325 are arranged. And the electrodes 320,
321, 326, and 327 have the same polarity, and the electrodes 322, 32
3, 324 and 325 are configured to have the same polarity. That is, a two-electrode terminal EE-FF is formed. This terminal indicates a vibrator drive terminal.
【０００６】図２５は図２３の音叉腕３１８と３１９の
ｊ−ｊ´断面図を示す。音叉腕３１８には電極３２８，
３２９，３３２と３３３が配置され、電極３２８と３２
９が同極に、電極３３２と３３３が同極になるように構
成されている。即ち、側面に配置されている対抗電極は
互いに異極になるように構成されている。更に、音叉腕
３１９には電極３３０，３３１，３３４と３３５が配置
されている。電極３３０と３３１が同極に、電極３３４
と３３５が同極になるように構成されている。そして、
側面に配置されている対抗電極は互いに異極となるよう
に構成されている。更に電極３２８，３２９，３３０と
３３１が同極に、電極３３２，３３３，３３４，と３３
５が同極になるように構成され、２電極端子ＧＧ−ＨＨ
を構成する。２電極端子ＥＥ−ＦＦは振動子駆動端子を
示し、２電極端子ＧＧ−ＨＨは角速度検出端子を示す。FIG. 25 is a sectional view taken along the line JJ 'of the tuning fork arms 318 and 319 of FIG. The tuning fork arm 318 has an electrode 328,
329, 332 and 333 are arranged, and the electrodes 328 and 32
9 is configured to have the same polarity, and the electrodes 332 and 333 are configured to have the same polarity. That is, the opposing electrodes arranged on the side surface are configured to have different polarities from each other. Further, electrodes 330, 331, 334 and 335 are arranged on the tuning fork arm 319. The electrodes 330 and 331 have the same polarity, and the electrode 334
And 335 have the same polarity. And
The counter electrodes arranged on the side surface are configured to have different polarities from each other. Further, the electrodes 328, 329, 330 and 331 have the same polarity, and the electrodes 332, 333, 334 and 33 have the same polarity.
5 are configured to have the same polarity, and the two electrode terminals GG-HH
Is configured. The two-electrode terminal EE-FF indicates a vibrator drive terminal, and the two-electrode terminal GG-HH indicates an angular velocity detection terminal.
【０００７】今、振動子駆動端子ＥＥ−ＦＦ間に交流電
圧を印加すると、図２４で示すように、電界は実線の矢
印と点線の矢印のように交互に働き、音叉型水晶振動子
３１２はｘ−ｙ´平面内で屈曲振動をする。更に、ｙ´
軸廻りに角速度ωを印加するとｘ−ｙ´平面に垂直とな
る方向にコリオリ力が発生する。図２５には角速度検出
端子ＧＧ−ＨＨが設けられていて、コリオリ力により発
生する電圧を検出することができる。この場合、ｘ軸方
向の電界成分は矢印方向に働くので図２１の場合より大
きくなり角速度検出感度も高くなる。Now, when an AC voltage is applied between the vibrator driving terminals EE and FF, the electric field acts alternately as shown by the solid arrow and the dotted arrow as shown in FIG. Bending vibration occurs in the xy ′ plane. Furthermore, y '
When an angular velocity ω is applied around the axis, a Coriolis force is generated in a direction perpendicular to the xy ′ plane. FIG. 25 is provided with an angular velocity detection terminal GG-HH, and can detect a voltage generated by Coriolis force. In this case, since the electric field component in the x-axis direction acts in the direction of the arrow, it becomes larger than in the case of FIG.
【０００８】[0008]
【発明が解決しようとする課題】音叉型屈曲水晶振動子
の等価直列抵抗Ｒ１はｘ軸方向の電界成分Ｅxが大きい
ほど小さくなりＱ値が大きくなる。しかしながら、音叉
形状の場合、音叉腕の４面に電極を設け片方の音叉碗で
振動を駆動し、平行に電界が働く他方の音叉腕で角速度
を検出するために電界成分Ｅxが小さく、又、小型化す
るとＥxがより小さくなり角速度の検出感度が著しく小
さくなるという課題が残されていた。又、Ｈ型の音叉形
状の場合も振動子駆動電極が音叉碗の４面に設けている
ために小型化すると等価直列抵抗Ｒ１が大きく、且つ、
Ｑ値が著しく小さくなり高い感度が得られない等の課題
が残されていた。このようなことから、超小型で等価直
列抵抗Ｒ１が小さく、Ｑ値が高く、角速度の高い検出感
度を有する新形状と新電極構成の水晶角速度センサが所
望されていた。[0007] tuning fork type flexural equivalent series resistance R 1 of the quartz resonator Q value becomes smaller the larger the electric field component Ex of the x-axis direction is increased. However, in the case of the tuning fork shape, electrodes are provided on four surfaces of the tuning fork arm, vibration is driven by one tuning fork bowl, and the electric field component Ex is small in order to detect the angular velocity with the other tuning fork arm in which the electric field works in parallel. The problem remains that when the size is reduced, Ex becomes smaller and the detection sensitivity of angular velocity becomes significantly smaller. Also, large equivalent series resistance R 1 when miniaturized to be transducer drive electrodes when the H-shaped tuning fork is provided on the four sides of the tuning fork bowl, and,
Problems remain such that the Q value becomes extremely small and high sensitivity cannot be obtained. For this reason, low equivalent series resistance R 1 in a very small, Q value is high, the quartz angular rate sensors of the new shape and new electrode structure having a high detection sensitivity angular velocity has been desired.
【０００９】[0009]
【課題を解決するための手段】上記課題で解決する本発
明の第１の態様は、屈曲振動モードで振動する音叉型屈
曲水晶振動子で音叉碗の中立線を挟んだ中央部に溝を設
け、当該溝の内部に振動子駆動用電極と角速度検出用電
極を配置して課題を解決している。更に、詳述するなら
ば、音叉碗の中央部の上下面に溝を設け、一方の音叉腕
の溝の内部には同極となる電極が音叉腕の側面には前記
電極と異極となる電極が振動子駆動用電極として配置さ
れ、他方の音叉腕の溝の内部の側面には互いに異極とな
る電極が配置され、溝の内部の側面に配置された電極と
音叉腕の側面に対抗して配置された電極は互いに異極と
なるように角速度検出用電極を配置している。このよう
に構成することにより課題を解決している。According to a first aspect of the present invention, a tuning fork-type bent quartz-crystal vibrating in a bending vibration mode is provided with a groove at a center portion of the tuning fork bowl across a neutral line. The problem is solved by disposing a transducer driving electrode and an angular velocity detecting electrode inside the groove. More specifically, a groove is provided on the upper and lower surfaces of the central portion of the tuning fork bowl, and an electrode having the same polarity inside the groove of one tuning fork arm has a different polarity from the electrode on the side surface of the tuning fork arm. Electrodes are arranged as vibrator driving electrodes, and electrodes having opposite polarities are arranged on the inner side surface of the groove of the other tuning fork arm, and oppose the electrode arranged on the inner side surface of the groove and the side surface of the tuning fork arm. The electrodes for angular velocity detection are arranged so that the electrodes arranged in such a manner as to have mutually different polarities. With such a configuration, the problem is solved.
【００１０】本発明の第２の態様は、屈曲振動モードで
振動する音叉型屈曲水晶振動子で音叉基部に複数個の溝
を設け当該溝の内部に振動子駆動用電極と角速度検出用
電極を配置して課題を解決している。更に、詳述するな
らば、音叉腕の中立線を挟んだ中央部から延在する音叉
基部の上下面に溝を設け、更に、当該溝の間に溝を設
け、音叉腕の中央部から延在する一方の音叉基部の溝の
内部には同極となる電極が配置され、当該溝の側面の電
極と対抗する側面の電極は互いに異極となる電極が振動
子駆動用電極として配置され、音叉腕の中央部から延在
する他方の音叉基部の溝の内部の側面には互いに異極と
なる電極が配置され、当該溝の側面の電極と対抗する側
面の電極には互いに異極となるように角速度検出用電極
を配置して課題を解決している。According to a second aspect of the present invention, there is provided a tuning-fork type bent quartz crystal vibrating in a bending vibration mode, wherein a plurality of grooves are provided at a base of the tuning fork, and a vibrator driving electrode and an angular velocity detecting electrode are provided inside the grooves. The problem is solved by arranging. More specifically, grooves are provided on the upper and lower surfaces of the tuning fork base extending from the center of the tuning fork arm across the neutral line, and grooves are further provided between the grooves to extend from the center of the tuning fork arm. An electrode having the same polarity is disposed inside the groove of one of the tuning fork bases that are present, and electrodes on the side opposite to the electrode on the side of the groove are disposed as electrodes for driving the vibrator, and electrodes having opposite polarities are arranged as: Electrodes having different polarities are arranged on the inner side surface of the groove of the other tuning fork base extending from the central portion of the tuning fork arm, and electrodes having side surfaces opposite to the electrode on the side surface of the groove have different poles. Thus, the problem is solved by arranging the electrodes for angular velocity detection.
【００１１】本発明の第３の態様は、音叉型屈曲水晶振
動子が音叉基部で接続されたH型屈曲水晶振動子におい
て、音叉腕の中立線を挟んだ中央部に溝を設け当該溝に
振動子駆動用電極と角速度検出用電極を配置している。
更に詳述するならば、１つの音叉型屈曲水晶振動子の音
叉腕の中立線を挟んだ中央部の上下面の溝の内部には同
極となる電極が音叉腕の側面に異極となる電極が配置さ
れ、一方の音叉腕の溝の内部に配置された電極と他方の
音叉腕の側面に配置された電極は同極に、更に、前記し
た一方の音叉腕の側面に配置された電極と前記した他方
の音叉腕の溝の内部に配置された電極は同極となるよう
に振動子駆動用電極として配置され、他方の音叉型屈曲
水晶振動子の音叉腕の溝の内部の側面には互いに異極と
なる電極が配置され、溝の内部に配置された側面の電極
と対抗する音叉腕の側面電極は互いに異極となるように
角速度検出用電極を配置している。このように構成する
ことにより課題を解決している。According to a third aspect of the present invention, there is provided an H-shaped bent quartz resonator in which a tuning fork type bent quartz resonator is connected at a base of the tuning fork, a groove is provided at a central portion of the tuning fork arm across a neutral line, and the groove is provided in the groove. A vibrator driving electrode and an angular velocity detecting electrode are arranged.
More specifically, in the groove of the upper and lower surfaces of the central portion of the tuning fork arm of the one tuning fork type bent quartz oscillator with the neutral line interposed, electrodes of the same polarity are of different polarity on the side surface of the tuning fork arm. The electrode is arranged, the electrode arranged inside the groove of one tuning fork arm and the electrode arranged on the side surface of the other tuning fork arm have the same polarity, and further, the electrode arranged on the side surface of the one tuning fork arm described above. The electrode arranged inside the groove of the other tuning fork arm described above is arranged as a vibrator driving electrode so as to have the same polarity, and on the side surface inside the groove of the tuning fork arm of the other tuning fork type bent crystal resonator. Are arranged with electrodes having opposite polarities, and the electrodes for angular velocity detection are arranged such that the side electrodes of the tuning fork arm which oppose the electrodes on the side arranged inside the groove have opposite polarities. With such a configuration, the problem is solved.
【００１２】[0012]
【作用】このように、本発明は屈曲振動モードで振動す
る音叉型屈曲水晶振動子で、しかも、音叉腕の中立線を
挟んだ中央部に溝を設け、且つ、この溝の内部に振動子
駆動用電極と角速度検出用電極を配置することにより、
小型で、しかも角速度の高い検出感度を有する水晶角速
度センサが得られる。As described above, the present invention relates to a tuning-fork type bent crystal resonator vibrating in a bending vibration mode, and furthermore, a groove is provided at the center of the tuning-fork arm across the neutral line, and the resonator is provided inside the groove. By arranging the driving electrode and the angular velocity detecting electrode,
A quartz crystal angular velocity sensor having a small size and high detection sensitivity with a high angular velocity can be obtained.
【００１３】[0013]
【本発明の実施の形態】以下、本発明の実施例を図面に
基づき具体例を述べる。 （実施例１）図１は本発明の屈曲振動モードで振動する
音叉型屈曲水晶振動子１の外観図とその水晶座標系を示
す。水晶座標系は原点０、電気軸ｘ、機械軸ｙ、光軸ｚ
からなり０−ｘｙｚを構成している。図1では、音叉型
屈曲水晶振動子１はｘ軸を回転軸としてθ度回転してい
る。このとき、ｙ，ｚの新軸をｙ´，ｚ´軸とする。角
度θは通常は０°〜１５°の範囲に選ばれる。本発明の
音叉型屈曲振動子１は音叉腕２と音叉腕３と音叉基部４
を具えて構成され、音叉腕２と音叉腕３は音叉基部４に
接続されている。更に、音叉腕２の上面には中立線を挟
んで溝５が音叉腕３の上面には同様に溝６が設けられて
いる。Embodiments of the present invention will be described below with reference to the drawings. (Embodiment 1) FIG. 1 shows an external view of a tuning-fork type bent crystal vibrator 1 vibrating in a bending vibration mode of the present invention and a crystal coordinate system thereof. The crystal coordinate system is origin 0, electric axis x, mechanical axis y, optical axis z
To form 0-xyz. In FIG. 1, the tuning-fork type bent crystal resonator 1 is rotated by θ degrees around the x-axis as a rotation axis. At this time, the new axes of y and z are defined as y 'and z' axes. Is usually selected in the range of 0 ° to 15 °. The tuning fork type bending oscillator 1 of the present invention comprises a tuning fork arm 2, a tuning fork arm 3, and a tuning fork base 4.
The tuning fork arm 2 and the tuning fork arm 3 are connected to a tuning fork base 4. Further, a groove 5 is provided on the upper surface of the tuning fork arm 2 with a neutral line interposed therebetween, and a groove 6 is similarly provided on the upper surface of the tuning fork arm 3.
【００１４】図２は図１の音叉型屈曲水晶振動子１の正
面図を示す。図２では音叉腕２，３に設けられた溝５，
６の配置及び寸法等を詳述する。音叉腕２の中立線７を
挟むようにして溝５が設けられている。他方の音叉腕３
の中立線８を挟んで溝６が設けられている。溝５と６の
溝幅ｗ2は中立線７，８を挟んだ寸法が好ましい。この
理由は屈曲振動モードを引き起こすとき、音叉腕２，３
の振動を容易にすることができる。換言するならば、等
価直列抵抗R1の小さい、Q値の高い水晶振動子が実現で
きる。音叉腕２，３の全幅ｗはｗ＝ｗ１＋ｗ２＋ｗ３で
与えられ、幅部分ｗ１とｗ３はｗ１＝ｗ３となるように
設計される。又、溝幅ｗ２はｗ２≧ｗ１，ｗ３を満足す
るように通常は設計する。一方、音叉碗の長さｌには長
さｌ1の溝５，６が設けられていて、長さｌ1は振動モー
ドの次数によって決定される。例えば、基本波振動モー
ドでは溝の長さｌ1は音叉碗の長さｌの半分前後になる
ように設計される。図２の実施例では音叉腕２，３に溝
５，６を設け、音叉基部４の長さｌ2上にまで延在して
いない。又、音叉型屈曲水晶振動子１の音叉腕の全幅ｗ
や長さｌは要求される周波数や角速度の検出感度や振動
子を収納する容器の大きさから決定される。図示されて
いないが図２の音叉型屈曲水晶振動子１は厚みｔを有す
る振動子である。FIG. 2 is a front view of the tuning-fork type bent crystal resonator 1 shown in FIG. In FIG. 2, grooves 5 provided in tuning fork arms 2 and 3 are provided.
The arrangement, dimensions, etc. of 6 will be described in detail. The groove 5 is provided so as to sandwich the neutral line 7 of the tuning fork arm 2. The other tuning fork arm 3
The groove 6 is provided with the neutral line 8 interposed therebetween. The groove width w 2 of the groove 5 and 6 dimensions across the neutral line 7, 8 is preferred. The reason is that when the bending vibration mode is caused, the tuning fork arms 2 and 3
Vibration can be facilitated. In other words, a small equivalent series resistance R 1, the high crystal oscillator Q value can be realized. The total width w of the tuning fork arms 2 and 3 is given by w = w 1 + w 2 + w 3 , and the width portions w 1 and w 3 are designed so that w 1 = w 3 . Further, the groove width w 2 is usually so as to satisfy w 2 ≧ w 1, w 3 is designed. On the other hand, the tuning fork bowl length l be provided with grooves 5, 6 of the length l 1, the length l 1 is determined by the order of the vibration mode. For example, in the fundamental wave vibration mode, the length l 1 of the groove is designed to be about half the length l of the tuning fork bowl. The grooves 5 and 6 provided on the tuning fork arms 2 and 3 in the embodiment of FIG. 2, not extending over the length l 2 of the tuning fork base 4. In addition, the entire width w of the tuning fork arm of the tuning fork type bent crystal resonator 1
The length l is determined from the required sensitivity for detecting the required frequency and angular velocity, and the size of the container accommodating the vibrator. Although not shown, the tuning-fork type bent crystal resonator 1 of FIG. 2 is a resonator having a thickness t.
【００１５】図３は図２の音叉型屈曲水晶振動子１のａ
−ａ´断面図を示す。音叉腕３には中立線を挟んで溝６
と１３が設けられている。更に、溝６内部には電極１１
が溝１３内部には電極１２が配置され、これらは同極と
なるように配置されている。又、音叉腕３の側面には同
極となる電極９と１０が配置されている。ここで電極１
１，１２と対抗する電極９，１０は互いに異極となるよ
うに構成されている。即ち、振動子駆動用電極として配
置され２電極端子Ａ−Ｂを構成する。FIG. 3 shows the tuning fork type bent crystal resonator 1 shown in FIG.
-A 'shows a sectional view. The tuning fork arm 3 has a groove 6
And 13 are provided. Further, an electrode 11 is provided inside the groove 6.
The electrodes 12 are arranged inside the groove 13 and are arranged to have the same polarity. Electrodes 9 and 10 having the same polarity are arranged on the side surface of the tuning fork arm 3. Here electrode 1
The electrodes 9 and 10 opposed to the electrodes 1 and 12 are configured to have mutually different polarities. That is, the two-electrode terminals AB are arranged as transducer driving electrodes.
【００１６】今、電極端子Ａ−Ｂ間に交流電圧を印加す
ると実線と点線の矢印で示したｘ軸方向に電界Ｅxが交
互に働き、屈曲振動がｘ−ｙ´平面内で生じる。音叉腕
２にも音叉腕３と同様に溝５と２２が設けられている。
溝５の内部の側面には電極１６と１９が配置され、これ
らの電極１６と１９は互いに異極となるように構成され
る。更に、溝２２の内部の側面には電極１５と２０が配
置され、これらの電極１５と２０も異極となるように構
成される。又、音叉腕２の側面には電極１４，１８，２
１と１７が配置されていて、溝の内部の側面に配置され
た電極１５，１６，１９，２０と対抗する音叉腕の側面
溝の内部の側面に配置された電極１８，２１，１４，１
７は互いに異極となるように構成されている。即ち、角
速度検出用電極として配置され２電極端子Ｃ−Ｄを構成
する。When an AC voltage is applied between the electrode terminals AB, the electric field Ex acts alternately in the x-axis direction indicated by the solid line and the dotted arrow, and a bending vibration occurs in the xy ′ plane. Grooves 5 and 22 are also provided on tuning fork arm 2, similarly to tuning fork arm 3.
Electrodes 16 and 19 are arranged on the side surface inside the groove 5, and these electrodes 16 and 19 are configured to have different polarities from each other. Further, electrodes 15 and 20 are arranged on the side surface inside the groove 22, and these electrodes 15 and 20 are also configured to have different polarities. The electrodes 14, 18, 2 are provided on the side of the tuning fork arm 2.
Electrodes 1, 2, 1, 2, 1, 2, 1, 2, 1, 2, 1, 2 are arranged on the inner side surface of the groove of the tuning-fork arm opposite to the electrodes 15, 16, 19, 20 arranged on the inner side surface of the groove.
7 are configured to have different polarities from each other. That is, the two-electrode terminals CD are arranged as electrodes for detecting angular velocity.
【００１７】今、振動子駆動端子Ａ−Ｂ間に交流電圧を
印加すると両音叉腕２，３はｘ−ｙ´平面で屈曲運動を
する。更に、ｙ´軸廻りに角速度ωを加えると、ｘ−ｙ
´平面に垂直となる方向に角速度ωに応じたコリオリ力
が発生し屈曲振動を引き起こす。この時、音叉腕２には
実線と点線の矢印で示したようなｘ軸方向の電界Ｅx1が
生じる。この場合、ｘ軸方向の電界方向Ｅx1とその和が
非常に大きくなるので、角速度検出端子Ｃ−Ｄ間に発生
する電圧が非常に大きくなり、振動子を小型化した場合
でも角速度の高い検出感度が得られる。Now, when an AC voltage is applied between the vibrator drive terminals AB, the tuning fork arms 2 and 3 bend in the xy 'plane. Further, when an angular velocity ω is applied around the y ′ axis, xy
'A Coriolis force corresponding to the angular velocity ω is generated in a direction perpendicular to the plane, causing bending vibration. In this case, the electric field Ex 1 in the x-axis direction as indicated by the solid line and dotted arrows is generated in the tuning fork arms 2. In this case, since the electric field direction Ex 1 and the sum of the x-axis direction is very large, the voltage generated between the angular velocity detection terminal C-D is very large, high detection of angular velocities even when the vibrator is miniaturized Sensitivity is obtained.
【００１８】（実施例２）図４は本発明の音叉型屈曲水
晶振動子２３の正面図で他の実施例を示す。音叉腕２４
と２５は音叉基部２８に接続されている。音叉腕２４と
２５に設けられた溝２６と２７は音叉基部２８まで延在
して設けられている。又、音叉腕２４，２５の側面と溝
２６と２７の内部には図３で説明した電極が同じように
配置されている。このように、音叉腕２４，２５に設け
られた溝を音叉基部２８にまで延在することにより音叉
型屈曲水晶振動子２３の振動による電気機械変換効率が
より大きくなるので、角速度の検出感度をより高くでき
る。(Embodiment 2) FIG. 4 is a front view of a tuning-fork type bent crystal resonator 23 according to another embodiment of the present invention. Tuning fork arm 24
And 25 are connected to a tuning fork base 28. Grooves 26 and 27 provided in tuning fork arms 24 and 25 extend to tuning fork base 28. The electrodes described with reference to FIG. 3 are similarly arranged on the side surfaces of the tuning fork arms 24 and 25 and inside the grooves 26 and 27. By extending the grooves provided in the tuning fork arms 24 and 25 to the tuning fork base 28 in this manner, the electromechanical conversion efficiency due to the vibration of the tuning fork type bent quartz crystal resonator 23 is further increased. Can be higher.
【００１９】（実施例３）図５は本発明の音叉型屈曲水
晶振動子２９の正面図で他の実施例を示す。音叉腕３０
と３１には前記音叉腕と音叉基部３２にまで延在して設
けられた溝３３と３４が設けられている。更に、音叉基
部３２に設けられた溝３３と３４の間には２つの溝３５
と３６が設けられている。又、溝３５と３６の間には突
出部３７が設けられている。更に、音叉腕３０と３１の
中立線３８と３９で示される。(Embodiment 3) FIG. 5 is a front view of a tuning-fork type bent crystal resonator 29 according to another embodiment of the present invention. Tuning fork arm 30
And 31 are provided with grooves 33 and 34 extending to the tuning fork arm and the tuning fork base 32, respectively. Further, two grooves 35 are provided between the grooves 33 and 34 provided in the tuning fork base 32.
And 36 are provided. Further, a protrusion 37 is provided between the grooves 35 and 36. Further, the neutral lines 38 and 39 of the tuning fork arms 30 and 31 are shown.
【００２０】図６は図５の音叉型屈曲振動子２９のｂ−
ｂ´断面図を示す。音叉腕３１には中立線を挟んで溝３
４と４４が設けられている。更に、溝３４と４４の内部
には電極４２と４３が配置され、これらは同極になるよ
うに構成されている。音叉基部３２に設けられた溝３６
と５５には同極となる電極４１と４５が配置されてい
る。この電極４１と４５は音叉基部３２の側面に配置さ
れた電極４０と同極となるように構成されている。更
に、音叉腕３１の両側面にも電極４０と同極となる電極
が配置されている。ここで、溝３４に設けられた電極４
２，４３と対抗する電極４０，４１と４５は互いに異極
となるように構成されている。即ち、振動子駆動用電極
として配置されて２電極端子Ｅ−Ｆを構成する。FIG. 6 is a cross-sectional view of the tuning fork type bending vibrator 29 of FIG.
FIG. The tuning fork arm 31 has a groove 3 with a neutral line in between.
4 and 44 are provided. Further, electrodes 42 and 43 are arranged inside the grooves 34 and 44, and they are configured to have the same polarity. Groove 36 provided in tuning fork base 32
And 55 are provided with electrodes 41 and 45 having the same polarity. The electrodes 41 and 45 are configured to have the same polarity as the electrode 40 arranged on the side surface of the tuning fork base 32. Further, electrodes having the same polarity as the electrode 40 are arranged on both side surfaces of the tuning fork arm 31. Here, the electrode 4 provided in the groove 34
The electrodes 40, 41, and 45 opposing the electrodes 2, 43 are configured to have mutually different polarities. That is, the two-electrode terminals EF are arranged as vibrator driving electrodes.
【００２１】又、音叉腕３０と接続される音叉基部３２
には溝３３と５７が設けられ、その内部には互いに異極
となる電極５２と４９及び電極４８と５３が配置されて
いる。更に、溝３５には電極４７が溝５６には電極５１
が配置され、音叉基部３２の側面には電極５０，５４が
配置されている。換言するならば、溝３３と５７の側面
に配置された電極４８，４９，５２，５３と対抗して側
面に配置された電極５１，５４，４７，５０は互いに異
極となるように構成されている。即ち、角速度検出用と
して配置され２電極端子Ｇ−Ｈを構成する。A tuning fork base 32 connected to the tuning fork arm 30
Are provided with grooves 33 and 57, in which electrodes 52 and 49 and electrodes 48 and 53 having mutually different polarities are arranged. Further, the electrode 47 is provided in the groove 35 and the electrode 51 is provided in the groove 56.
Are arranged, and electrodes 50 and 54 are arranged on the side surface of the tuning fork base 32. In other words, the electrodes 48, 49, 52, 53 arranged on the side surfaces of the grooves 33 and 57 are configured so that the electrodes 51, 54, 47, 50 arranged on the side surface have opposite polarities. ing. That is, the two-electrode terminals GH are arranged for angular velocity detection.
【００２２】今、振動子駆動端子Ｅ−Ｆ間に交流電圧を
印加すると実線と点線の矢印で示したｘ軸方向に電界Ｅ
x2が交互に働き、両音叉腕３０と３１はｘ−ｙ´平面で
屈曲振動を行う。更に、ｙ´軸廻りに角速度ωを加える
とｘ−ｙ´平面に垂直となる方向に角速度ωに応じたコ
リオリ力が生じ屈曲振動を引き起こす。この時、音叉腕
３０と音叉基部３２には実線と点線の矢印で示したよう
なｘ軸方向の電界Ｅx3が生じる。この場合、ｘ軸方向の
電界Ｅx3とその和が非常に大きくなるので、角速度検出
端子Ｇ−Ｈ間に発生する電圧が非常に大きくなる。それ
故、角速度センサを小型化した場合でも角速度の高い検
出感度が得られる。When an AC voltage is applied between the vibrator driving terminals EF, an electric field E is applied in the x-axis direction indicated by the solid and dotted arrows.
x 2 works alternately, and both tuning fork arms 30 and 31 perform bending vibration in the xy ′ plane. Further, when an angular velocity ω is applied around the y ′ axis, a Coriolis force corresponding to the angular velocity ω is generated in a direction perpendicular to the xy ′ plane, causing bending vibration. In this case, the x-axis direction of the electric field Ex 3 as indicated by the solid line and dotted arrows occurs in the tuning fork arms 30 and tuning fork base portion 32. In this case, the electric field Ex 3 and the sum of the x-axis direction is very large, the voltage generated between the angular velocity detection terminal G-H becomes very large. Therefore, even when the angular velocity sensor is downsized, a high angular velocity detection sensitivity can be obtained.
【００２３】（実施例４）図７は本発明の音叉型屈曲水
晶振動子５８の正面図で他の実施例を示す。音叉型屈曲
水晶振動子５８は音叉腕５９、６０と音叉基部６１を具
えて構成されている。本実施例では、音叉基部６１にの
み溝６２，６３，６４と６５が設けられている。溝６２
と６３は音叉腕５９と６０から音叉基部６１に延在する
位置に設けられている。そして、溝６４と６５は溝６２
と６３の間に設けられている。電極配置及びその構成法
は図示されていないが、図６で説明した電極配置とその
構成法と同じである。(Embodiment 4) FIG. 7 is a front view of a tuning-fork type bent crystal resonator 58 according to another embodiment of the present invention. The tuning-fork type bent crystal resonator 58 includes tuning-fork arms 59 and 60 and a tuning-fork base 61. In this embodiment, grooves 62, 63, 64 and 65 are provided only in the tuning fork base 61. Groove 62
And 63 are provided at positions extending from the tuning fork arms 59 and 60 to the tuning fork base 61. The grooves 64 and 65 are
And 63 are provided. Although the electrode arrangement and the configuration method are not shown, they are the same as the electrode arrangement and the configuration method described with reference to FIG.
【００２４】（実施例５）図８は本発明の音叉型屈曲水
晶振動子６６の正面図で他の実施例を示す。音叉型屈曲
水晶振動子６６は音叉腕６７と６８と音叉基部６９を具
えて構成されている。音叉腕６７と６８には音叉基部６
９にまで延在して設けられた溝７０と７１が存在する。
又、音叉基部６９に設けられた溝７０と７１の間には溝
７２が設けられている。本実施例では図５で設けられて
いた突出物３７と４６は設けられていない。溝７２の深
さは溝７０と７１の深さと同等であれば十分である。
又、電極構成は図６と全く同じで、形状では図６の突出
部３７と４６が無い形状である。効果は図５と図６の振
動子と全く同じ効果を示す。(Embodiment 5) FIG. 8 is a front view of a tuning-fork type bent quartz crystal vibrator 66 according to another embodiment of the present invention. The tuning-fork type bent crystal resonator 66 includes tuning-fork arms 67 and 68 and a tuning-fork base 69. The tuning fork bases 6 are provided on the tuning fork arms 67 and 68.
There are grooves 70 and 71 extending to 9.
A groove 72 is provided between the grooves 70 and 71 provided in the tuning fork base 69. In this embodiment, the protrusions 37 and 46 provided in FIG. 5 are not provided. It is sufficient that the depth of the groove 72 is equal to the depth of the grooves 70 and 71.
The electrode configuration is exactly the same as that of FIG. 6, and the shape is such that there are no protrusions 37 and 46 in FIG. The effect is exactly the same as that of the vibrator shown in FIGS.
【００２５】（実施例６）図９は本発明の音叉型屈曲水
晶振動子７３の正面図で他の実施例を示す。音叉腕７４
には中立線８１に対称に溝７７と７８が設けられ、音叉
基部７６まで延在している。他方の音叉腕７５にも同様
に中立線８２に対称に溝７９と８０が音叉基部７６まで
延在して設けられている。(Embodiment 6) FIG. 9 is a front view of a tuning-fork type bent crystal resonator 73 according to another embodiment of the present invention. Tuning fork arm 74
Are provided with grooves 77 and 78 symmetrically with respect to the neutral line 81, and extend to the tuning fork base 76. Similarly, the other tuning fork arm 75 is provided with grooves 79 and 80 symmetrically with respect to the neutral line 82 and extending to the tuning fork base 76.
【００２６】図１０は図９の音叉型屈曲水晶振動子７６
のｃ−ｃ´断面図を示す。音叉腕７５には溝７９，８
０，９９と１００が設けられている。又、これらの溝の
内部には電極８９，９０，９１が配置され、同極となる
ように構成されている。音叉腕７５の側面には同極とな
る電極８３と８４が配置されている。即ち、音叉腕７５
の側面に配置された電極８３と８４に対抗する溝の側面
に配置された電極８９，９０と９１と９２は互いに異極
となるように構成される。即ち、振動子駆動用電極とし
て配置され２電極端子Ｉ−Ｊを構成する。FIG. 10 shows a tuning-fork type bent quartz-crystal vibrator 76 shown in FIG.
FIG. Grooves 79, 8 in tuning fork arm 75
0, 99 and 100 are provided. Electrodes 89, 90, and 91 are arranged inside these grooves so that they have the same polarity. Electrodes 83 and 84 having the same polarity are arranged on the side surface of the tuning fork arm 75. That is, the tuning fork arm 75
The electrodes 89, 90, 91, and 92 disposed on the side surfaces of the grooves opposing the electrodes 83 and 84 disposed on the side surfaces of the electrodes 83 and 84 are configured to have different polarities from each other. That is, the two-electrode terminals IJ are arranged as the transducer driving electrodes.
【００２７】更に、音叉腕７４にも溝７７，７８，１０
３，１０４が設けられていて、各溝に電極８６，９５，
９４，８７が配置されている。又、音叉腕７４の側面に
は電極８５，９３，８８と９６が配置されている。そし
て電極８５，８６，８７，８８は同極に、電極９３，９
４，９５，９６は同極になるように構成されている。換
言するならば、音叉腕７４の側面に配置された電極８
５，９３，８８，９６に対抗する溝１０３，７８，７
７，１０４の側面に配置された電極９４，８６，９５，
８７は互いに異極となるように構成されている。即ち、
角速度検出用電極として配置され２電極端子Ｋ−Ｌを構
成する。The tuning fork arm 74 also has grooves 77, 78, 10
3,104 are provided, and electrodes 86,95,
94 and 87 are arranged. Electrodes 85, 93, 88 and 96 are arranged on the side surface of the tuning fork arm 74. The electrodes 85, 86, 87, and 88 have the same polarity, and the electrodes 93, 9
4, 95, 96 are configured to have the same polarity. In other words, the electrode 8 arranged on the side surface of the tuning fork arm 74
Grooves 103, 78, 7 opposing 5, 93, 88, 96
7, 94, 86, 95,
87 are configured to have mutually different polarities. That is,
The two-electrode terminal KL is disposed as an angular velocity detecting electrode.
【００２８】（実施例７）図１１は本発明の音叉型屈曲
水晶振動子１０５と１０６が両方の音叉基部１１０と１
１５で接続されたＨ型屈曲水晶振動子１０７の正面図で
ある。音叉型屈曲水晶振動子１０５は音叉腕１０８と１
０９と音叉基部１１０を具えて構成されている。又、音
叉腕１０８と１０９には中立線を挟んで溝１１１と１１
２が設けられている。図示されていないが溝１１１と１
１２の内部の側面には電極が配置されている。更に、音
叉型屈曲水晶振動子１０６は音叉腕１１３と１１４と音
叉基部１１５を具えて構成されている。音叉腕１１３と
１１４には中立線を挟んで溝１１６と１１７が設けら
れ、図示されていないが溝１１６と１１７の内部の側面
には電極が配置されている。(Embodiment 7) FIG. 11 shows that the tuning-fork type bent quartz oscillators 105 and 106 of the present invention have both tuning-fork bases 110 and 1.
15 is a front view of the H-shaped bent quartz-crystal vibrator 107 connected at 15. FIG. The tuning fork type bending quartz oscillator 105 is
09 and a tuning fork base 110. The tuning fork arms 108 and 109 have grooves 111 and 11 with a neutral line in between.
2 are provided. Although not shown, grooves 111 and 1
Electrodes are arranged on the inner side surface of 12. Further, the tuning-fork type bent crystal resonator 106 includes tuning-fork arms 113 and 114 and a tuning-fork base 115. Grooves 116 and 117 are provided on the tuning fork arms 113 and 114 with a neutral line interposed therebetween. Although not shown, electrodes are arranged on the inner side surfaces of the grooves 116 and 117.
【００２９】図１２は図１１のＨ型水晶振動子１０７の
ｄ−ｄ´断面図である。音叉型１０９には中立線を挟ん
で溝１１２と１２７が設けられている。溝１１２と１２
７の内部には同極となる電極１２２と１２３が配置され
ている。更に、音叉腕１０９の両側面には同極となる電
極１１８と１１９が配置されている。また、音叉腕１０
８には中立線を挟んで溝１１１と１２９が設けられてい
る。溝１１１と１２９の内部には同極となる電極１２０
と１２１が配置されている。更に、音叉腕１０８の両側
面には同極となる電極１２４と１２５が配置されてい
る。換言するならば、電極１１８，１１９，１２０，１
２１は同極に、又、電極１２２，１２３，１２４，１２
５は同極になるように配置され、前記電極とは異極とな
る。更に、詳述するならば、音叉腕１０８と１０９の側
面に配置された電極１１８，１１９，１２４，１２５は
溝１１２，１２７，１１１，１２９の内部の側面に対抗
して配置された電極１２２，１２３，１２０，１２１と
は互いに異極となるように構成されている。即ち、振動
子駆動用電極として配置され２電極端子Ｍ−Ｎを構成す
る。FIG. 12 is a sectional view taken along the line dd 'of the H-type crystal unit 107 shown in FIG. The tuning fork type 109 is provided with grooves 112 and 127 with a neutral line interposed therebetween. Grooves 112 and 12
7, electrodes 122 and 123 having the same polarity are arranged. Further, electrodes 118 and 119 having the same polarity are arranged on both side surfaces of the tuning fork arm 109. Also, the tuning fork arm 10
8 is provided with grooves 111 and 129 with a neutral line in between. Electrodes 120 having the same polarity are provided inside the grooves 111 and 129.
And 121 are arranged. Further, electrodes 124 and 125 having the same polarity are arranged on both side surfaces of the tuning fork arm 108. In other words, the electrodes 118, 119, 120, 1
21 has the same polarity, and electrodes 122, 123, 124, 12
5 are arranged so as to have the same polarity, and have a different polarity from the electrode. More specifically, the electrodes 118, 119, 124, and 125 disposed on the side surfaces of the tuning fork arms 108 and 109 have electrodes 122, disposed opposite to the inner side surfaces of the grooves 112, 127, 111, and 129. 123, 120, and 121 are configured to have mutually different polarities. That is, the two-electrode terminals MN are arranged as the transducer driving electrodes.
【００３０】図１３は図１１のＨ型屈曲水晶振動子１０
７の音叉腕１１３と１１４のｅ−ｅ´断面図を示す。音
叉腕１１４には中立線を挟んで溝１１７と１４７が設け
られている。溝１１７の内部の側面には互いに異極とな
る電極１３９と１３２が配置されている。又、溝１４７
の内部の側面には互いに異極となる電極１３１と１４０
が配置され、右側の側面にも異極となる電極１４１と１
３３が配置されている。即ち、溝の内部の側面に配置さ
れた電極１３９，１３２，１３１，１４０と対抗する音
叉腕１１４の側面に配置された電極１３０，１４１，１
３８，１３３は互いに異極となるように構成されてい
る。又、音叉腕１１３には中立線を挟んで溝１１６と１
４９が設けられている。溝１１６の内部の側面には互い
に異極となる電極１３５と１４４が配置されている。更
に、溝１４９の内部の側面には互いに異極となる電極１
４３と１３６が配置されている。FIG. 13 shows the H-shaped bent quartz-crystal resonator 10 shown in FIG.
7 is a sectional view taken along the line ee ′ of the tuning fork arms 113 and 114 of FIG. Grooves 117 and 147 are provided on the tuning fork arm 114 with the neutral line interposed therebetween. Electrodes 139 and 132 having different polarities are arranged on the inner side surface of the groove 117. Also, the groove 147
The electrodes 131 and 140 having mutually different polarities
Are arranged, and the electrodes 141 and 1 having different polarities also on the right side surface.
33 are arranged. That is, the electrodes 130, 141, 1 disposed on the side surface of the tuning fork arm 114 opposing the electrodes 139, 132, 131, 140 disposed on the side surface inside the groove.
38 and 133 are configured to have mutually different polarities. The tuning fork arm 113 has grooves 116 and 1 with a neutral line in between.
49 are provided. Electrodes 135 and 144 having mutually different polarities are arranged on the side surface inside the groove 116. Further, electrodes 1 having opposite polarities are provided on the inner side surface of the groove 149.
43 and 136 are arranged.
【００３１】又、音叉腕１１３の左側の側面には異極と
なる電極１４２と１３４が右側の側面にも異極となる電
極１３７と１４５が配置されている。即ち、溝の内部の
側面に配置された電極１３５，１４４，１４３，１３６
と対抗する音叉腕１１３の側面に配置された電極１４
２，１３７，１３４，１４５は互いに異極となるように
構成される。換言するならば、電極１３０，１３１，１
３２，１３３，１３４，１３５，１３６，１３７は同極
に、又、電極１３８，１３９，１４０，１４１，１４
２，１４３，１４４，１４５は同極になるように配置さ
れ、前記電極とは異極となるように構成される。即ち、
角速度検出用電極として配置され２電極端子Ｏ−Ｐを構
成する。On the left side of the tuning fork arm 113, electrodes 142 and 134 having different polarities are arranged, and on the right side, electrodes 137 and 145 having different polarities are arranged. That is, the electrodes 135, 144, 143, and 136 disposed on the side surface inside the groove.
Electrode 14 arranged on the side of tuning fork arm 113 opposing to
2, 137, 134, 145 are configured to have mutually different polarities. In other words, the electrodes 130, 131, 1
32,133,134,135,136,137 have the same polarity, and the electrodes 138,139,140,141,14
2, 143, 144, and 145 are arranged to have the same polarity, and are configured to have a different polarity from the electrodes. That is,
The two-electrode terminal OP is arranged as an angular velocity detecting electrode.
【００３２】今、振動子駆動端子Ｍ−Ｎ間に交流電圧を
印加すると、実線と点線の矢印で示したｘ軸方向に電界
Ｅx4が交互に働き、両音叉腕１０８と１０９はｘ−ｙ´
平面で屈曲振動する。更に、ｙ´軸廻りに角速度ωを加
えると、ｘ−ｙ´平面に垂直となる方向に角速度ωに応
じたコリオリ力が生じ屈曲振動を引き起こす。この場
合、ｘ軸方向の電界Ｅx5とその和が非常に大きくなるの
で、角速度検出端子Ｏ−Ｐ間に発生する電圧が非常に大
きくなる。それ故、角速度センサを小型化しても角速度
の高い検出感度が得られる。When an AC voltage is applied between the vibrator drive terminals M-N, the electric field Ex 4 works alternately in the x-axis direction indicated by the solid and dotted arrows, and both tuning fork arms 108 and 109 become xy. ´
Bending vibration occurs on a flat surface. Further, when an angular velocity ω is applied around the y ′ axis, a Coriolis force corresponding to the angular velocity ω is generated in a direction perpendicular to the xy ′ plane, causing bending vibration. In this case, the electric field Ex 5 and the sum of the x-axis direction is very large, the voltage generated between the angular velocity detection terminal O-P is very large. Therefore, even if the angular velocity sensor is miniaturized, high angular velocity detection sensitivity can be obtained.
【００３３】（実施例８）図１４は本発明の音叉型屈曲
水晶振動子１５０と１５１が両方の音叉基部１５５と１
６２で接続されたＨ型屈曲水晶振動子１５２の正面図で
他の実施例である。音叉型屈曲水晶振動子１５０は音叉
腕１５３と１５４と音叉基部１５５を具えて構成されて
いる。又、音叉腕１５３と１５４には中立線１６７と１
６８の両側に溝１５６と１５７及び溝１５８と１５９が
設けられている。更に、音叉型屈曲水晶振動子１５１は
音叉腕１６０と１６１と音叉基部１６２を具えて構成さ
れている。音叉腕１６０と１６１には中立線１６７と１
６８の両側に溝１６３と１６４及び溝１６５と１６６が
設けられている。(Embodiment 8) FIG. 14 shows that the tuning-fork type bent quartz-crystal vibrators 150 and 151 of the present invention have both tuning-fork bases 155 and 1.
FIG. 14 is a front view of the H-shaped bent quartz crystal resonator 152 connected at 62, which is another embodiment. The tuning-fork type bent crystal resonator 150 includes tuning-fork arms 153 and 154 and a tuning-fork base 155. In addition, the neutral lines 167 and 1 are connected to the tuning fork arms 153 and 154, respectively.
Grooves 156 and 157 and grooves 158 and 159 are provided on both sides of 68. Further, the tuning-fork type bent crystal resonator 151 includes tuning fork arms 160 and 161 and a tuning fork base 162. Neutral lines 167 and 1 on tuning fork arms 160 and 161
Grooves 163 and 164 and grooves 165 and 166 are provided on both sides of 68.
【００３４】図１５は図１４のＨ型屈曲水晶振動子１５
２のｆ−ｆ´断面図である。音叉腕１５４には溝１５
８，１５９，１８１，１８２が設けられている。前記溝
の内部には同極となる１７５，１７６，１７７，１７８
が配置されている。又、音叉腕１５４の左側の側面には
電極１６９が右側の側面には電極１７０が同極となるよ
うに配置されている。音叉腕１５３には溝１５７，１５
６，１８３，１８４が設けられている。前記溝の内部に
は電極１７１，１７２，１７３，１７４が同極となるよ
うに配置されている。換言するならば、電極１６９，１
７０，１７１，１７２，１７３，１７４は同極に、又、
電極１７５，１７６，１７７，１７８，１７９，１８０
は同極になるように配置され、前記電極とは異極となる
ように構成される。即ち、振動子駆動用電極として配置
され２電極端子Ｑ−Ｒを構成する。FIG. 15 shows an H-shaped bent quartz-crystal resonator 15 shown in FIG.
FIG. 2 is a sectional view taken along line ff ′ of FIG. Groove 15 in tuning fork arm 154
8, 159, 181, 182 are provided. 175, 176, 177, 178 having the same polarity inside the groove.
Is arranged. The electrode 169 is arranged on the left side surface of the tuning fork arm 154, and the electrode 170 is arranged on the right side surface thereof so as to have the same polarity. Grooves 157, 15 are provided in the tuning fork arm 153.
6, 183 and 184 are provided. Electrodes 171, 172, 173, and 174 are disposed inside the groove so as to have the same polarity. In other words, the electrodes 169, 1
70, 171, 172, 173, 174 have the same polarity,
Electrodes 175, 176, 177, 178, 179, 180
Are arranged to have the same polarity, and are configured to have a different polarity from the electrodes. That is, the two-electrode terminals QR are arranged as transducer driving electrodes.
【００３５】図１６は図１４のＨ型屈曲水晶振動子１５
２のｇ−ｇ´断面図である。音叉腕１６１には中立線１
６８の外側に溝１６５，１６６，２０１と２０２が設け
られている。溝１６５，１６６，２０１と２０２の内部
には電極１９４，１８７，１８６と１９５が配置されて
いる。又、音叉腕１６１の側面にも電極１８５，１９
３，１９６，１８８が配置されている。又、音叉腕１６
０には電極１９７，１８９，１９２と２００が配置され
ている。換言するならば、電極１８５，１８６，１８
７，１８８，１８９，１９０，１９１と１９２は同極に
なるように配置され、電極１９３，１９４，１９５，１
９６，１９７，１９８，１９９と２００は同極になるよ
うに配置され、前期電極とは異極となるように構成され
ている。FIG. 16 shows the H-shaped bent quartz-crystal resonator 15 shown in FIG.
FIG. 2 is a sectional view taken along the line gg ′ of FIG. Neutral line 1 for tuning fork arm 161
Grooves 165, 166, 201 and 202 are provided outside 68. Electrodes 194, 187, 186 and 195 are arranged inside the grooves 165, 166, 201 and 202. The electrodes 185, 19 are also provided on the side of the tuning fork arm 161.
3,196,188 are arranged. Also, the tuning fork arm 16
At 0, electrodes 197, 189, 192 and 200 are arranged. In other words, the electrodes 185, 186, 18
7, 188, 189, 190, 191 and 192 are arranged to have the same polarity, and the electrodes 193, 194, 195, 1
96, 197, 198, 199 and 200 are arranged to have the same polarity, and are configured to have a different polarity from the electrodes.
【００３６】更に詳述するならば、音叉型屈曲水晶振動
子の音叉腕１６０，１６１の溝１６３，１６４，１６
５，１６６，２０１，２０２，２０３と２０４の内部の
側面には互いに異極となる電極が配置され溝の内部の側
面に配置された電極と音叉腕の側面に対抗して配置され
た電極は互いに異極となるように構成される。即ち、角
速度検出用電極として配置され２電極端子Ｓ−Ｔを構成
する。More specifically, the grooves 163, 164, 16 of the tuning fork arms 160, 161 of the tuning-fork type bent quartz crystal resonator.
5,166,201,202,203 and 204 are provided with electrodes having different polarities on the inner side surface, and the electrode disposed on the inner side surface of the groove and the electrode disposed opposite to the side surface of the tuning fork arm. It is constituted so that it may be mutually different. That is, the two-electrode terminals ST are arranged as angular velocity detecting electrodes.
【００３７】（実施例９）図１７〜図２０は本発明のＨ
型屈曲水晶振動子２０５，２１０，２１６，２２３の振
動子形状の実施例を示す。図１７の音叉腕には溝が設け
られている。Ｈ型屈曲水晶振動子２０５は接続部２０６
と２０７を介してマウント部２０８と２０９に接続され
ている。図１８は他の実施例で、Ｈ型屈曲水晶振動子２
１０は接続部２１１と２１２及び支持フレーム２１３と
２１４を介してマウント部２１５に接続されている。図
１９は他の実施例で、Ｈ型屈曲振動子２１６は接続部２
１７と２１８及び減衰部２１９と２２０を介してマウン
ト部２２１と２２２に接続されている。(Embodiment 9) FIGS. 17 to 20 show H of the present invention.
An example of the vibrator shape of the type bent quartz crystal vibrators 205, 210, 216 and 223 will be described. The tuning fork arm of FIG. 17 is provided with a groove. The H-shaped bent crystal oscillator 205 is
And 207 are connected to the mounts 208 and 209 via the ports. FIG. 18 shows another embodiment, in which an H-shaped bent quartz oscillator 2 is used.
Reference numeral 10 is connected to the mount unit 215 via the connection units 211 and 212 and the support frames 213 and 214. FIG. 19 shows another embodiment, in which the H-shaped bending oscillator 216 is connected to the connecting portion 2.
17 and 218 and attenuation parts 219 and 220 are connected to the mount parts 221 and 222.
【００３８】図１７〜図１９で説明した接続部は２つの
音叉型屈曲水晶振動子が接続される音叉基部の両端付近
で接続される。図２０は他の実施例で、Ｈ型屈曲水晶振
動子２２３は音叉のＵ字部に設けられた接続部２２４と
２２５を介してマウント部２２６と２２７に接続され
る。本実施例では、水晶について詳述したが、他の圧電
材料、例えばランガサイト、ＬｉＴａＯ3、ＬｉＮｂＯ3
に適用できることは言うまでも無い。The connecting portions described with reference to FIGS. 17 to 19 are connected near both ends of a tuning fork base to which two tuning fork-type bent quartz-crystal vibrators are connected. FIG. 20 shows another embodiment, in which an H-shaped bent crystal resonator 223 is connected to mount parts 226 and 227 via connection parts 224 and 225 provided in a U-shaped part of a tuning fork. In this embodiment, the quartz crystal has been described in detail, but other piezoelectric materials such as langasite, LiTaO 3 , LiNbO 3
Needless to say, it can be applied to
【００３９】[0039]
【発明の効果】以上述べたように、本発明の振動子形状
と電極構成を有する音叉型あるいはH型屈曲水晶振動子
の水晶角速度センサを提供することにより、次の著しい
効果を有する。 （１）音叉碗の中立線を挟んで溝を設けるので電界が垂
直に働く。その結果、水晶振動子の電気機械変換効率が
良くなるので、角速度の高い検出感度が得られる。 （２）音叉腕の中立線の両側に溝を設けるので電界が垂
直に働く。即ち、水晶振動の電気機械変換効率が良くな
るので、角速度の高い検出感度が得られる。 （３）H型の屈曲水晶振動子は振動子駆動用部分と角速
度検出用部分とが独立しているので、角速度の高い検出
感度が得られる。 （４）小型化した場合でも角速度の高い検出感度が得ら
れる。 （５）エッチング法によって形成できるので、１枚のウ
エハ上に多数個の振動子を一度にバッチ処理できる。そ
れ故、量産性に優れ、安価な水晶角速度センサが実現で
きる。 （６）H型屈曲振動子は接続部を介してマウント部に接
続され、マウント部で支持・固定されるので、耐衝撃性
に優れた角速度センサが実現できる。As described above, the following remarkable effects can be obtained by providing the crystal angular velocity sensor of the tuning fork type or the H type bent crystal resonator having the resonator shape and the electrode configuration of the present invention. (1) Since the groove is provided so as to sandwich the neutral line of the tuning fork bowl, the electric field works vertically. As a result, the electromechanical conversion efficiency of the crystal unit is improved, and a high angular velocity detection sensitivity is obtained. (2) Since grooves are provided on both sides of the neutral line of the tuning fork arm, the electric field works vertically. That is, since the electromechanical conversion efficiency of the crystal vibration is improved, a high angular velocity detection sensitivity can be obtained. (3) Since the H-shaped bent quartz-crystal vibrator has a vibrator driving part and an angular velocity detecting part independent of each other, a high angular velocity detection sensitivity can be obtained. (4) High detection sensitivity with a high angular velocity can be obtained even when the size is reduced. (5) Since it can be formed by an etching method, a large number of transducers can be batch-processed on one wafer at a time. Therefore, an inexpensive crystal angular velocity sensor excellent in mass productivity can be realized. (6) Since the H-shaped bending oscillator is connected to the mount section via the connection section and is supported and fixed by the mount section, an angular velocity sensor excellent in impact resistance can be realized.
【図１】 本発明の音叉型屈曲振動子の外観図とその水
晶座標系を示す。FIG. 1 shows an external view of a tuning-fork type bending oscillator of the present invention and a crystal coordinate system thereof.
【図２】 図１の音叉型屈曲振動子の正面図を示す。FIG. 2 shows a front view of the tuning fork type bending vibrator of FIG.
【図３】 図２の音叉型屈曲振動子のａ−ａ´断面図を
示す。FIG. 3 is a sectional view of the tuning fork type bending vibrator of FIG. 2 taken along the line aa ′.
【図４】 本発明の音叉型屈曲振動子の正面図で他の実
施例を示す。FIG. 4 is a front view of a tuning fork type bending vibrator according to another embodiment of the present invention.
【図５】 本発明の音叉型屈曲振動子の正面図で他の実
施例を示す。FIG. 5 is a front view of a tuning fork-type bending vibrator according to another embodiment of the present invention.
【図６】 図５の音叉型屈曲振動子のｂ−ｂ´断面図を
示す。FIG. 6 is a sectional view taken along the line bb 'of the tuning-fork bending vibrator of FIG.
【図７】 本発明の音叉型屈曲振動子の正面図で他の実
施例を示す。FIG. 7 is a front view of a tuning-fork type bending oscillator according to another embodiment of the present invention.
【図８】 本発明の音叉型屈曲振動子の正面図で他の実
施例を示す。FIG. 8 is a front view of a tuning-fork type bending vibrator according to another embodiment of the present invention.
【図９】 本発明の音叉型屈曲振動子の正面図で他の実
施例を示す。FIG. 9 is a front view of a tuning-fork type bending oscillator according to another embodiment of the present invention.
【図１０】 図９の音叉型屈曲振動子のｃ−ｃ´断面図
を示す。FIG. 10 is a sectional view taken along the line cc 'of the tuning fork-type bending vibrator of FIG.
【図１１】 本発明のＨ型屈曲水晶振動子の正面図であ
る。FIG. 11 is a front view of the H-shaped bent quartz-crystal vibrator of the present invention.
【図１２】 図１１のＨ型屈曲振動子のｄ−ｄ´断面図
を示す。FIG. 12 is a sectional view taken along the line dd ′ of the H-shaped bending oscillator of FIG. 11;
【図１３】 図１１のＨ型屈曲振動子のｅ−ｅ´断面図
を示す。FIG. 13 shows an ee ′ cross-sectional view of the H-shaped bending oscillator of FIG. 11;
【図１４】 本発明のＨ型屈曲水晶振動子の正面図で他
の実施例である。FIG. 14 is a front view of an H-shaped bent crystal resonator according to another embodiment of the present invention.
【図１５】 図１４のＨ型屈曲振動子のｆ−ｆ´断面図
を示す。FIG. 15 is a cross-sectional view of the H-shaped bending oscillator of FIG. 14, taken along line ff ′.
【図１６】 図１４のＨ型屈曲振動子のｇ−ｇ´断面図
を示す。FIG. 16 is a cross-sectional view of the H-type bending oscillator of FIG. 14 taken along the line gg ′.
【図１７】 本発明のＨ型屈曲水晶振動子の振動子形状
の実施例を示す。FIG. 17 shows an example of a vibrator shape of the H-shaped bent quartz crystal vibrator of the present invention.
【図１８】 本発明のＨ型屈曲水晶振動子の振動子形状
の実施例を示す。FIG. 18 shows an embodiment of a vibrator shape of the H-shaped bent quartz crystal vibrator of the present invention.
【図１９】 本発明のＨ型屈曲水晶振動子の振動子形状
の実施例を示す。FIG. 19 shows an example of a vibrator shape of the H-shaped bent quartz crystal vibrator of the present invention.
【図２０】 本発明のＨ型屈曲水晶振動子の振動子形状
の実施例を示す。FIG. 20 shows an embodiment of a vibrator shape of the H-shaped bent crystal vibrator of the present invention.
【図２１】 従来の音叉型屈曲水晶振動子の正面図を示
す。FIG. 21 is a front view of a conventional tuning-fork type bent crystal resonator.
【図２２】 図２１の音叉型屈曲水晶振動子のｈ−ｈ´
断面図を示す。FIG. 22 is an illustration hh ′ of the tuning-fork type bent quartz crystal resonator shown in FIG. 21;
FIG.
【図２３】 従来のＨ型屈曲水晶振動子の正面図を示
す。FIG. 23 shows a front view of a conventional H-shaped bent crystal resonator.
【図２４】 図２３のＨ型屈曲水晶振動子のｉ−ｉ´断
面図を示す。24 is a sectional view taken along the line ii 'of the H-shaped bent quartz-crystal vibrator shown in FIG.
【図２５】 図２３のＨ型屈曲水晶振動子のｊ−ｊ´断
面図を示す。25 is a sectional view of the H-shaped bent quartz-crystal vibrator shown in FIG. 23 taken along the line JJ ′.
ｘ 水晶の電気軸 ｙ 水晶の機械軸 ｚ 水晶の光軸 ｙ´ ｘ軸回転後のｙ軸の新軸 ｚ´ ｘ軸回転後のｚ軸の新軸 １，２３，２９，５８，６６，７３，１０５，１０６，
１５０，１５１，３１２，３１３ 音叉型屈曲水晶振動
子 １０７，１５２ Ｈ型屈曲水晶振動子 ３００ 圧電振動子 ２，３，２４，２５，３０，３１，５９，６０，６７，
６８，７４，７５，１０８，１０９，１１３，１１４，
１５３，１５４、１６０，１６１，３０１，３０２，３
１６，３１７，３１８，３１９ 音叉腕 ４，２８，３２，６１，６９，７６，１１０，１１５，
１５５，１６２，３０３，３１４，３１５ 音叉基部 ｗ 全幅 ｗ１，ｗ３ 幅部分 ｗ２ 溝幅 ｌ 音叉腕の長さ ｌ１ 音叉碗の溝の長さ ｌ２ 音叉基部の長さ θ 角度 ω 角速度 ｔ 音叉型屈曲水晶振動子の厚み ５，６，１３，２２，２６，２７，３３，３４，３５，
３６，４４，５５，５６，５７，６２，６３，６４，６
５，７０，７１，７２，７７，７８，７９，８０，９
９，１００，１０３，１０４，１１１，１１２，１１
６，１１７，１２７，１２９，１４７，１４９，１５
６，１５７，１５８，１５９，１６３，１６４，１６
５，１６６，１８１，１８２，１８３，１８４，２０
１，２０２，２０３，２０４ 溝 ９，１０，１１，１２，１４，１５，１６，１７，１
８，１９，２０，２１，４０，４１，４２，４３，４
５，４７，４８，４９，５０，５１，５２，５３，５
４，８３，８４，８５，８６，８７，８８，８９，９
０，９１，９２，９３，９４，９５，９６，１１８，１
１９，１２０，１２１，１２２，１２３，１２４，１２
５，１３０，１３１，１３２，１３３，１３４，１３
５，１３６，１３７，１３８，１３９，１４０，１４
１，１４２，１４３，１４４，１４５，１６９，１７
０，１７１，１７２，１７３，１７４，１７５，１７
６，１７７，１７８，１７９，１８０，１８５，１８
６，１８７，１８８，１８９，１９０，１９１，１９
２，１９３，１９４，１９５，１９６，１９７，１９
８，１９９，２００，３０４，３０５，３０６，３０
７，３０８，３０９，３１０，３１１，３２０，３２
１，３２２，３２３，３２４，３２５，３２６，３２
７，３２８，３２９，３３０，３３１，３３２，３３
３，３３４，３３５ 電極 ７，８，３８，３９，８１，８２，１６７，１６８ 中
立線 Ａ−Ｂ，Ｃ−Ｄ，Ｅ−Ｆ，Ｇ−Ｈ，Ｉ−Ｊ，Ｋ−Ｌ，Ｍ
−Ｎ，Ｏ−Ｐ，Ｑ−Ｒ，Ｓ−Ｔ，ＡＡ−ＢＢ，ＣＣ−Ｄ
Ｄ，ＥＥ−ＦＦ，ＧＧ−ＨＨ ２電極端子 ３７，４６ 突出物 ａ−ａ´，ｂ−ｂ´，ｃ−ｃ´，ｄ−ｄ´，ｅ−ｅ´，
ｆ−ｆ´，ｇ−ｇ´，ｈ−ｈ´，ｉ−ｉ´，ｊ−ｊ´
断面記号 Ｅx，Ｅx1，Ｅx2，Ｅx3，Ｅx4，Ｅx5 ｘ軸方向の電界x Electric axis of crystal y Mechanical axis of crystal z Optical axis of crystal y 'New axis of y axis after x axis rotation z' New axis of z axis after x axis rotation 1,23,29,58,66,73 , 105, 106,
150, 151, 312, 313 Tuning fork-shaped bent quartz oscillator 107, 152 H-shaped bent quartz oscillator 300 Piezoelectric oscillator 2, 3, 24, 25, 30, 31, 59, 60, 67,
68, 74, 75, 108, 109, 113, 114,
153, 154, 160, 161, 301, 302, 3
16,317,318,319 tuning fork arm 4,28,32,61,69,76,110,115,
155, 162, 303, 314, 315 Tuning fork base w Total width w 1 , w 3 Width part w 2 Groove width 1 Tuning fork arm length 1 1 Tuning fork bowl groove length l 2 Tuning fork base length θ Angle ω Angular velocity t Thickness of tuning fork-type bent quartz crystal resonator 5, 6, 13, 22, 26, 27, 33, 34, 35,
36,44,55,56,57,62,63,64,6
5,70,71,72,77,78,79,80,9
9,100,103,104,111,112,11
6,117,127,129,147,149,15
6,157,158,159,163,164,16
5,166,181,182,183,184,20
1,202,203,204 grooves 9,10,11,12,14,15,16,17,1
8, 19, 20, 21, 40, 41, 42, 43, 4
5,47,48,49,50,51,52,53,5
4,83,84,85,86,87,88,89,9
0, 91, 92, 93, 94, 95, 96, 118, 1
19, 120, 121, 122, 123, 124, 12
5,130,131,132,133,134,13
5,136,137,138,139,140,14
1,142,143,144,145,169,17
0,171,172,173,174,175,17
6,177,178,179,180,185,18
6,187,188,189,190,191,19
2,193,194,195,196,197,19
8,199,200,304,305,306,30
7,308,309,310,311,320,32
1,322,323,324,325,326,32
7,328,329,330,331,332,33
3,334,335 Electrodes 7, 8, 38, 39, 81, 82, 167, 168 Neutral lines AB, CD, EF, GH, IJ, KL, M
-N, OP, QR, ST, AA-BB, CC-D
D, EE-FF, GG-HH 2 electrode terminals 37, 46 Projecting parts aa ', bb', cc ', dd', ee ',
ff ', gg', hh ', ii', jj '
Cross symbol Ex, Ex 1, Ex 2, Ex 3, Ex 4, Ex 5 x axis direction of the electric field
Claims (10)
晶振動子で音叉腕の中立線を挟んだ中央部に溝を設け当
該溝の内部に振動子駆動用電極と角速度検出用電極を配
置した事を特徴とする水晶角速度センサ。1. A tuning fork type bent quartz crystal vibrating in a bending vibration mode, a groove is provided at a center portion of the tuning fork arm across a neutral line, and a vibrator driving electrode and an angular velocity detecting electrode are arranged inside the groove. Crystal angular velocity sensor characterized by the following.
方の音叉腕の溝の内部には同極となる電極が音叉腕の側
面には前記電極と異極となる電極が振動子駆動用電極と
して配置され、他方の音叉腕の溝の内部の側面には互い
に異極となる電極が配置され、溝の内部の側面に配置さ
れた電極と音叉腕の側面に対抗して配置された電極は互
いに異極となるように角速度検出用電極を配置した事を
特徴とする請求項１に記載の水晶角速度センサ。2. A groove is provided on the upper and lower surfaces of a central portion of a tuning fork arm, and an electrode having the same polarity is provided inside a groove of one tuning fork arm, and an electrode having a different polarity from the electrode is provided on a side surface of the tuning fork arm. Electrodes having different polarities are arranged on the inner side surface of the groove of the other tuning fork arm, and are arranged opposite to the electrode arranged on the inner side surface of the groove and the side surface of the tuning fork arm. 2. The crystal angular velocity sensor according to claim 1, wherein the electrodes for angular velocity detection are arranged such that the electrodes have mutually different polarities.
晶振動子で音叉基部に複数個の溝を設け当該溝の内部に
振動子駆動用電極と角速度検出用電極を配置した事を特
徴とする水晶角速度センサ。3. A tuning fork type bent quartz crystal vibrating in a bending vibration mode, wherein a plurality of grooves are provided in a base of the tuning fork, and a vibrator driving electrode and an angular velocity detecting electrode are arranged inside the grooves. Crystal angular velocity sensor.
する音叉基部の上下面に溝を設け、更に、当該溝の間に
溝を設け、音叉腕の中央部から延在する一方の音叉基部
の溝の内部には同極となる電極が配置され、当該溝の側
面の電極と対抗する側面の電極は互いに異極となる電極
が振動子駆動用電極として配置され、音叉腕の中央部か
ら延在する他方の音叉基部の溝の内部の側面には互いに
異極となる電極が配置され、当該溝の側面の電極と対抗
する側面の電極には互いに異極となるように角速度検出
用電極を配置した事を特徴とする請求項３に記載の水晶
角速度センサ。4. A groove is provided on upper and lower surfaces of a tuning fork base extending from a central portion of the tuning fork arm across a neutral line, and a groove is further provided between the grooves to extend from the central portion of the tuning fork arm. An electrode having the same polarity is arranged inside the groove at the base of the tuning fork, and an electrode on the side opposite to the electrode on the side of the groove is arranged with electrodes having different polarities as electrodes for driving the vibrator. Electrodes having different polarities are arranged on the inner side surface of the groove of the other tuning fork base extending from the central portion, and the electrodes on the side surface opposite to the electrodes on the side surface of the groove have different angular velocities so as to have different polarities. The crystal angular velocity sensor according to claim 3, wherein a detection electrode is arranged.
動子で音叉腕の上下面に複数個の溝を設け、一方の音叉
腕の溝の内部には同極となる電極が音叉腕の側面には異
極となる電極が振動子駆動用電極として配置され、他方
の音叉腕の溝の内部に配置された側面電極と対抗する音
叉腕の側面電極は互いに異極となるように角速度検出用
電極を設けた事を特徴とする水晶角速度センサ。5. A tuning fork type bending vibrator vibrating in a bending vibration mode, wherein a plurality of grooves are provided on the upper and lower surfaces of the tuning fork arm, and electrodes having the same polarity are provided inside the groove of one of the tuning fork arms. The electrodes having different polarities are arranged as electrodes for driving the vibrator, and the side electrodes arranged inside the groove of the other tuning fork arm and the side electrodes of the tuning fork arm opposed to each other are used for angular velocity detection so that they have different polarities. A quartz angular velocity sensor characterized by having electrodes.
されたH型屈曲水晶振動子において、音叉腕の中立線を
挟んだ中央部に溝を設け当該溝に振動子駆動用電極と角
速度検出用電極を配置した事を特徴とする水晶角速度セ
ンサ。6. An H-shaped bent quartz resonator in which a tuning fork type bent quartz resonator is connected at a tuning fork base, a groove is provided in a center portion of the tuning fork arm across a neutral line, and the resonator driving electrode and the angular velocity are provided in the groove. A crystal angular velocity sensor characterized by having a detection electrode.
中立線を挟んだ中央部の上下面の溝の内部には同極とな
る電極が音叉腕の側面に異極となる電極が配置され、一
方の音叉腕の溝の内部に配置された電極と他方の音叉腕
の側面に配置された電極は同極に、更に、前記した一方
の音叉腕の側面に配置された電極と前記した他方の音叉
腕の溝の内部に配置された電極は同極となるように振動
子駆動用電極として配置され、他方の音叉型屈曲水晶振
動子の音叉腕の溝の内部の側面には互いに異極となる電
極が配置され、溝の内部に配置された側面の電極と対抗
する音叉腕の側面電極は互いに異極となるように角速度
検出用電極を配置した事を特徴とする請求項６に記載の
水晶角速度センサ。7. An electrode having the same polarity and an electrode having a different polarity on the side surface of the tuning fork arm are provided inside the grooves on the upper and lower surfaces of the center of the tuning fork arm of the tuning fork arm of one tuning fork arm. The electrode arranged inside the groove of one tuning fork arm and the electrode arranged on the side surface of the other tuning fork arm have the same polarity, and further, the electrode arranged on the side surface of the one tuning fork arm and the electrode The electrode arranged inside the groove of the other tuning fork arm is arranged as a vibrator driving electrode so as to have the same polarity. 7. An electrode for detecting an angular velocity, wherein an electrode having a different polarity is disposed, and an electrode for detecting an angular velocity is disposed such that a side electrode of the tuning fork arm opposite to a side electrode disposed inside the groove has a different polarity. The crystal angular velocity sensor according to 1.
されたH型屈曲水晶振動子において、各々の音叉腕の上
下面に複数個の溝を設け当該溝に振動子駆動用電極と角
速度検出用電極を配置した事を特徴とする水晶角速度セ
ンサ。8. An H-shaped bent quartz resonator in which a tuning fork type bent quartz resonator is connected at the base of a tuning fork, a plurality of grooves are provided on the upper and lower surfaces of each tuning fork arm, and a resonator driving electrode and an angular velocity are provided in the grooves. A crystal angular velocity sensor characterized by having a detection electrode.
上下面の溝の内部には同極となる電極が音叉腕の側面に
異極となる電極が配置され、各音叉腕に４個の溝を設け
一方の音叉腕の溝の内部に配置された電極と他方の音叉
腕の側面に配置された電極は同極に、更に、前記した一
方の音叉腕の側面に配置された電極と前記した他方の音
叉腕の溝の内部に配置された電極は同極となるように振
動子駆動用電極として配置され、他方の音叉型屈曲水晶
振動子の音叉腕の溝の内部の側面には互いに異極となる
電極が配置され、溝の内部の側面に配置された電極と音
叉腕の側面に対抗して配置された電極は互いに異極とな
るように角速度検出用電極を配置した事を特徴とする請
求項８に記載の水晶角速度センサ。9. An electrode having the same polarity is disposed inside the grooves on the upper and lower surfaces of the tuning fork arm of one tuning-fork type bent crystal resonator, and an electrode having a different polarity is arranged on the side surface of the tuning fork arm. The electrode disposed inside the groove of one tuning fork arm and the electrode disposed on the side surface of the other tuning fork arm have the same polarity, and further, the electrode disposed on the side surface of the one tuning fork arm. The electrode arranged inside the groove of the other tuning fork arm is arranged as a vibrator driving electrode so as to have the same polarity, and is provided on the side surface inside the groove of the tuning fork arm of the other tuning fork type bent crystal resonator. The electrodes having opposite polarities are arranged, and the electrodes arranged on the inner side surface of the groove and the electrodes arranged opposite to the side surface of the tuning fork arm have the angular velocity detecting electrodes arranged so as to have different polarities from each other. The crystal angular velocity sensor according to claim 8, wherein:
続されたH型屈曲水晶振動子は接続部を介してマウント
部に接続されている事を特徴とする請求項６、又は請求
項８に記載の水晶角速度センサ。10. The H-shaped bent quartz resonator to which the tuning fork type bent quartz resonator is connected at the base of the tuning fork is connected to the mount part via the connection part. The crystal angular velocity sensor according to 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001141078A JP2002340559A (en) | 2001-05-11 | 2001-05-11 | Crystal angular speed sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001141078A JP2002340559A (en) | 2001-05-11 | 2001-05-11 | Crystal angular speed sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002340559A true JP2002340559A (en) | 2002-11-27 |
| JP2002340559A5 JP2002340559A5 (en) | 2008-05-22 |
Family
ID=18987583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001141078A Pending JP2002340559A (en) | 2001-05-11 | 2001-05-11 | Crystal angular speed sensor |
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| JP2006133004A (en) * | 2004-11-04 | 2006-05-25 | Matsushita Electric Ind Co Ltd | Angular velocity sensor |
| JP2006177944A (en) * | 2004-12-20 | 2006-07-06 | Eta Sa Manufacture Horlogere Suisse | Transducer for measuring angular velocity |
| JP2006177945A (en) * | 2004-12-20 | 2006-07-06 | Eta Sa Manufacture Horlogere Suisse | Transducer for measuring angular velocity |
| JP2006184176A (en) * | 2004-12-28 | 2006-07-13 | Kyocera Kinseki Corp | Inertia sensor element |
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| JP2006345519A (en) * | 2005-06-09 | 2006-12-21 | Eta Sa Manufacture Horlogere Suisse | Small-sized piezoelectric resonator |
| JP2007064826A (en) * | 2005-08-31 | 2007-03-15 | Kyocera Kinseki Corp | Inertial sensor element |
| US9024508B2 (en) | 2011-06-27 | 2015-05-05 | Seiko Epson Corporation | Bending vibration piece, method for manufacturing the same and electronic device |
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| JP2015141184A (en) * | 2014-01-30 | 2015-08-03 | 京セラクリスタルデバイス株式会社 | Angular velocity sensor, sensor element, and manufacturing method for sensor element |
| JP2016085184A (en) * | 2014-10-28 | 2016-05-19 | セイコーエプソン株式会社 | Sensor element, physical quantity sensor, electronic apparatus and movable body |
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| US9874484B2 (en) | 2014-03-24 | 2018-01-23 | Seiko Epson Corporation | Physical quantity detecting device, electronic apparatus, and moving object |
| TWI718368B (en) * | 2015-10-08 | 2021-02-11 | 日商村田製作所股份有限公司 | Crystal vibrating element and crystal vibrator provided with the crystal vibrating element |
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| US7043986B2 (en) | 2003-02-05 | 2006-05-16 | Ngk Insulators, Ltd. | Vibrators and vibratory gyroscopes |
| EP1445579A2 (en) * | 2003-02-05 | 2004-08-11 | Ngk Insulators, Ltd. | Vibrators and vibratory gyroscopes |
| EP1445579A3 (en) * | 2003-02-05 | 2007-02-21 | Ngk Insulators, Ltd. | Vibrators and vibratory gyroscopes |
| EP1898180A2 (en) | 2003-02-05 | 2008-03-12 | Ngk Insulators, Ltd. | Vibrators and vibratory gyroscopes |
| EP1898180A3 (en) * | 2003-02-05 | 2010-01-20 | Seiko Epson Corporation | Vibrators and vibratory gyroscopes |
| JP2006133004A (en) * | 2004-11-04 | 2006-05-25 | Matsushita Electric Ind Co Ltd | Angular velocity sensor |
| JP2006177944A (en) * | 2004-12-20 | 2006-07-06 | Eta Sa Manufacture Horlogere Suisse | Transducer for measuring angular velocity |
| JP2006177945A (en) * | 2004-12-20 | 2006-07-06 | Eta Sa Manufacture Horlogere Suisse | Transducer for measuring angular velocity |
| JP4711414B2 (en) * | 2004-12-20 | 2011-06-29 | イーティーエー エスエー マニュファクチュア ホルロゲア スイス | Angular velocity measurement transducer |
| JP4693116B2 (en) * | 2004-12-20 | 2011-06-01 | イーティーエー エスエー マニュファクチュア ホルロゲア スイス | Angular velocity measurement transducer |
| JP4667858B2 (en) * | 2004-12-28 | 2011-04-13 | 京セラキンセキ株式会社 | Inertial sensor element |
| JP2006184176A (en) * | 2004-12-28 | 2006-07-13 | Kyocera Kinseki Corp | Inertia sensor element |
| JP2006308359A (en) * | 2005-04-27 | 2006-11-09 | Kyocera Kinseki Corp | Inertia sensor element, and manufacturing method of inertia sensor element |
| JP2006345519A (en) * | 2005-06-09 | 2006-12-21 | Eta Sa Manufacture Horlogere Suisse | Small-sized piezoelectric resonator |
| JP2007064826A (en) * | 2005-08-31 | 2007-03-15 | Kyocera Kinseki Corp | Inertial sensor element |
| US9083307B2 (en) | 2011-06-24 | 2015-07-14 | Seiko Epson Corporation | Flexural vibrator element, electronic device, and method of manufacturing flexural vibrator element |
| US9024508B2 (en) | 2011-06-27 | 2015-05-05 | Seiko Epson Corporation | Bending vibration piece, method for manufacturing the same and electronic device |
| JP2015141184A (en) * | 2014-01-30 | 2015-08-03 | 京セラクリスタルデバイス株式会社 | Angular velocity sensor, sensor element, and manufacturing method for sensor element |
| US9874484B2 (en) | 2014-03-24 | 2018-01-23 | Seiko Epson Corporation | Physical quantity detecting device, electronic apparatus, and moving object |
| US10794778B2 (en) | 2014-03-24 | 2020-10-06 | Seiko Epson Corporation | Physical quantity detecting device, electronic apparatus, and moving object |
| JP2016085184A (en) * | 2014-10-28 | 2016-05-19 | セイコーエプソン株式会社 | Sensor element, physical quantity sensor, electronic apparatus and movable body |
| TWI718368B (en) * | 2015-10-08 | 2021-02-11 | 日商村田製作所股份有限公司 | Crystal vibrating element and crystal vibrator provided with the crystal vibrating element |
| CN106969760A (en) * | 2015-10-28 | 2017-07-21 | 精工爱普生株式会社 | Physical quantity detection vibrating reed, measuring physical, electronic equipment and moving body |
| CN106969760B (en) * | 2015-10-28 | 2022-02-18 | 精工爱普生株式会社 | Physical quantity detection vibrating reed, physical quantity detection device, electronic apparatus, and moving object |
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