JPH08184442A - Oscillator for piezoelectric oscillation gyro and manufacture thereof - Google Patents

Abstract

PURPOSE: To obtain an oscillator for piezoelectric oscillation gyro, and manufacturing method thereof, in which no error occur in the parallelism between a stripe electrode and a cut face or in the dimensions even at the time of cutting. CONSTITUTION: In the oscillator for a piezoelectric oscillation gyro where a plurality of stripe electrodes for driving, detection and earth are applied to the side face of a piezoelectric ceramic prism 1 in parallel with the longitudinal direction thereof, the side face of the piezoelectric ceramic prism 1 is formed irregularly and the stripe electrodes 11, 12, 13, 14, 15 and 16 are located in the recesses on the side face of the piezoelectric ceramic prism 1.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrator used in a piezoelectric vibrating gyro used in a camera-integrated VTR for preventing camera shake, an automobile navigation system, etc., and more particularly to a piezoelectric vibrating gyro using a rod-shaped bending vibrator.

[0002]

2. Description of the Related Art A piezoelectric vibrating gyro is a gyroscope which utilizes a mechanical phenomenon in which a Coriolis force is generated in a direction perpendicular to a vibrating direction when a rotating angular velocity is applied to a vibrating object. In a vibration system configured to be able to excite and detect in two directions orthogonal to each other, with one vibration being excited, the vibrator itself is centered on an axis parallel to the line where the two vibrating planes intersect. When rotated, a force acts in the direction perpendicular to this vibration due to the action of the Coriolis force described above, and the other vibration is excited. Since the magnitude of this vibration is proportional to the magnitude of the vibration on the input side and the rotational angular velocity,
When the input voltage is constant, the magnitude of the rotational angular velocity can be obtained from the magnitude of the output voltage.

FIG. 3 is a cross-sectional view of a conventional piezoelectric vibrating gyroscope vibrator, in which two piezoelectric ceramic prisms 1 face each other.
A total of six strip-shaped electrodes 21, 22, 23, 24, 25, and 26, three on each side, are formed on both sides of one side of the set in parallel with the length direction of the piezoelectric ceramic prism 1. These strip-shaped electrodes 21, 22, 23, 24, 25, 26 are connected to each other every other and subjected to polarization treatment as two terminals, and after this polarization treatment, every other strip-shaped electrodes 21, 2
3, 3 and 25 are connected to serve as a common ground electrode, and among the remaining strip electrodes 22, 24 and 26, the strip electrode 22 is a drive electrode, and the strip electrodes 24 and 26 are detection electrodes to provide a piezoelectric vibrating gyro oscillator. Can be configured.

FIG. 4 is an explanatory view of a conventional method for manufacturing a vibrator for a piezoelectric vibrating gyroscope, in which a plurality of strip electrodes 20 are formed by screen printing on both sides of a piezoelectric ceramic rectangular plate 2 and the width is cut off at the time of cutting. The piezoelectric vibrating gyroscope vibrator shown in FIG. 3 can be obtained by providing the cut margins 3 corresponding to 3 at intervals and cutting the cut margins 3 in parallel with the strip electrode 20.

[0005]

However, in the conventional vibrator for a piezoelectric vibrating gyroscope, the band-shaped electrode 20 may be bleeded at the time of the above-mentioned screen printing,
Due to such bleeding or the like, an error may occur in the parallelism or the dimension between the strip electrode 20 and the cut surface during cutting. Such an error impairs the symmetry of the shape of the vibrator for a piezoelectric vibration gyro and, as a result, adversely affects the characteristics of the piezoelectric vibration gyro.

An object of the present invention is to provide a vibrator for a piezoelectric vibrating gyroscope which does not cause an error in the parallelism between the strip electrode and the cut surface and the dimension even when the above-mentioned cutting is performed, and a method for manufacturing the same, which impairs mass productivity. The purpose is to improve the characteristics of the piezoelectric vibration gyro.

[0007]

According to the present invention, a plurality of driving, detecting and grounding strip electrodes parallel to the length direction of the piezoelectric ceramic prism are provided on the side surface of the prismatic piezoelectric ceramic. In a piezoelectric vibrating gyro oscillator, a piezoelectric vibrating gyro oscillator is characterized in that a side surface of the piezoelectric ceramic prism is formed in a concavo-convex shape, and the strip electrode is positioned along the concave part of the concavo-convex shape. can get.

Further, according to the present invention, after forming a concave portion on a side surface of the piezoelectric ceramic prism where a strip electrode is to be formed, an electrode layer is formed on the entire side surface of the piezoelectric ceramic prism, and the electrode layer is formed. A piezoelectric vibrating gyroscopic vibration characterized in that the strip electrode is formed by polishing the side surface of the piezoelectric ceramic prism until the portion formed in the concave portion remains and the portion other than the concave portion disappears. A method of manufacturing a child is obtained.

Further, according to the present invention, a step of forming a plurality of recesses on both surfaces of the piezoelectric ceramic plate material, and a step of forming an electrode layer on both entire surfaces of the piezoelectric ceramic plate material,
The step of providing margins at predetermined intervals on both sides of the piezoelectric ceramic plate material, and until the portion of the electrode layer formed in the concave portion remains and the portion of the piezoelectric ceramic plate material other than the concave portion disappears A method of manufacturing a vibrator for a piezoelectric vibration gyro, which comprises a step of polishing both surfaces of a piezoelectric ceramic plate material and a step of cutting the margin in parallel with the recess.

[0010]

In the vibrator for a piezoelectric vibrating gyroscope according to the present invention, a concave portion is formed on a side surface of a piezoelectric ceramic prism to form a strip electrode, and then an electrode layer is formed on the entire side surface of the piezoelectric ceramic prism. The strip electrode is formed by polishing the side surface of the piezoelectric ceramic prism until the portion of the layer formed in the concave portion remains and the portion other than the concave portion is eliminated.

Therefore, unlike the conventional vibrator for a piezoelectric vibrating gyroscope in which the band-shaped electrode is formed by performing the screen printing described above, the band-shaped electrode is not bleeded.

Therefore, due to such bleeding or the like, an error does not occur in the parallelism and the dimension between the strip electrode and the cut surface at the time of cutting.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A vibrator for a piezoelectric vibrating gyroscope and a method of manufacturing the same according to embodiments of the present invention will be described below with reference to the drawings.

The piezoelectric vibrating gyroscope of this embodiment is
As shown in FIG. 1, on the side surface of the piezoelectric ceramic prism 1,
In a piezoelectric vibrating gyroscope vibrator provided with a plurality of drive-, detection-, and ground strip electrodes parallel to the length direction of the piezoelectric ceramic prism 1, a side surface of the piezoelectric ceramic prism 1 is formed into an uneven shape to form a strip electrode. 11, 12, 13, 1
4, 15, 16 are arranged along the concave and convex portions.

That is, FIG. 1 is a cross-sectional view of the piezoelectric vibrating gyroscope according to the present embodiment. Of the two sets of side faces of the piezoelectric ceramic prism 1, one set of side faces has three sets of three sets, six sets in total. The strip electrodes 11, 12, 13, 14, 15, 16 are formed parallel to the length direction of the piezoelectric ceramic prism 1. These strip electrodes 11, 12, 13, 14, 1
Every other 5 and 16 are connected to each other and subjected to polarization treatment as two terminals. After this polarization treatment, every other strip-shaped electrodes 11, 13 and 15 are connected to form a common ground electrode, and the remaining strip-shaped electrodes are A piezoelectric vibrating gyro oscillator can be configured by using the strip electrodes 12 as drive electrodes and the strip electrodes 14 and 16 as detection electrodes.

In order to manufacture the piezoelectric vibrating gyroscope of this embodiment, a concave portion is formed on the side surface of the above-mentioned piezoelectric ceramic prism 1 at a position where a strip electrode is desired to be formed.
An electrode layer is formed on the entire side surface of the piezoelectric ceramic prism 1.
The strip-shaped electrode 1 is formed by polishing the side surface of the piezoelectric ceramic prism 1 until the portion of the electrode layer formed in the concave portion remains and the portion other than the concave portion disappears.
1, 12, 13, 14, 15, 16 are formed.

That is, FIG. 2 is an explanatory view of a method for manufacturing the vibrator for a piezoelectric vibration gyroscope of this embodiment, in which a plurality of concave portions 4 are formed on both surfaces of the piezoelectric ceramic rectangular plate 2 and then an electrode layer is formed by vapor deposition or the like. Polished surface where 10 is formed, and two cutting margins 3'corresponding to the width to be cut at the time of cutting are provided at intervals, and the portions formed in the concave portions 4 remain and the electrode layer 10 formed in the portions other than the concave portions 4 is eliminated Polish both sides of the piezoelectric ceramic rectangular plate 2 up to 8 and finally cut parallel to the recess 4 3 '
The piezoelectric vibrator for gyroscope shown in FIG. 1 can be obtained by cutting.

[0018]

As described above, in the piezoelectric vibrating gyroscope according to the present invention, after forming the concave portion on the side surface of the piezoelectric ceramic prism at the position where the strip electrode is desired to be formed, the entire side surface of the piezoelectric ceramic prism is formed. An electrode layer is formed on, and the portion of the electrode layer formed in the recess remains.
Further, the strip electrodes are formed by polishing the side surfaces of the piezoelectric ceramic prism until there is no portion other than the recessed portion formed.

Therefore, unlike the conventional vibrator for a piezoelectric vibrating gyroscope in which the strip-shaped electrode is formed by performing the screen printing described above, the strip-shaped electrode does not have bleeding or the like. There is no error in the parallelism between the cut surface and the cut surface or in the dimension.

Therefore, according to the present invention, the symmetry of the shape of the vibrator for a piezoelectric vibration gyro falls within the error range of machining, and the characteristics of the piezoelectric vibration gyro can be greatly improved. Further, it can be said that the mass production is almost the same as the conventional one.

[Brief description of drawings]

FIG. 1 is a sectional view of a vibrator for a piezoelectric vibration gyro of the present invention.

FIG. 2 is an explanatory diagram of a method for manufacturing a vibrator for a piezoelectric vibrating gyroscope of the present invention.

FIG. 3 is a cross-sectional view of a conventional piezoelectric vibration gyro oscillator.

FIG. 4 is an explanatory view of a conventional method for manufacturing a vibrator for a piezoelectric vibration gyro.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Piezoelectric ceramic prism 2 Piezoelectric ceramic rectangular plate 3,3 'Cutting margin 4 Recessed surface 8 Polishing surface 10 Electrode layer 11, 12, 13, 14, 15, 15 Strip electrode 20 Strip electrode 21, 22, 23, 24, 25, 26 Strip electrode

Claims (3)

[Claims] 1. A plurality of driving members parallel to the length direction of the piezoelectric ceramic prism on the side surface of the prismatic piezoelectric ceramic.
In a vibrator for a piezoelectric vibration gyroscope provided with a strip electrode for detection / grounding, the side surface of the piezoelectric ceramic prism is formed in an uneven shape so that the strip electrode is located along the concave portion of the uneven shape. Piezoelectric vibrating gyroscope characterized by. 2. The method for manufacturing a piezoelectric vibrating gyroscope according to claim 1, wherein a concave portion is formed at a position on the side surface of the piezoelectric ceramic prism where the strip electrode is to be formed, and then the entire side surface of the piezoelectric ceramic prism is formed. An electrode layer is formed, and a portion of the electrode layer formed in the recess remains,
A method for manufacturing a vibrator for a piezoelectric vibration gyro, characterized in that the strip electrode is formed by polishing a side surface of the piezoelectric ceramic prism until there is no portion other than the recessed portion formed. 3. The method of manufacturing a vibrator for a piezoelectric vibration gyroscope according to claim 1, wherein a step of forming a plurality of recesses on both surfaces of the piezoelectric ceramic plate material and forming an electrode layer on both entire surfaces of the piezoelectric ceramic plate material. A step, a step of providing a margin at predetermined intervals on both surfaces of the piezoelectric ceramics plate material, a portion of the electrode layer formed in the recessed portion remains, and a portion of the piezoelectric ceramics plate material formed other than the recessed portion A method for manufacturing a vibrator for a piezoelectric vibrating gyroscope, comprising: a step of polishing both surfaces of the piezoelectric ceramic plate material until there is no more; and a step of cutting the margin in parallel with the recess.