JP2002340559A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2002340559A5 JP2002340559A5 JP2001141078A JP2001141078A JP2002340559A5 JP 2002340559 A5 JP2002340559 A5 JP 2002340559A5 JP 2001141078 A JP2001141078 A JP 2001141078A JP 2001141078 A JP2001141078 A JP 2001141078A JP 2002340559 A5 JP2002340559 A5 JP 2002340559A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001141078A JP2002340559A (en) | 2001-05-11 | 2001-05-11 | Crystal angular speed sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001141078A JP2002340559A (en) | 2001-05-11 | 2001-05-11 | Crystal angular speed sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002340559A JP2002340559A (en) | 2002-11-27 |
| JP2002340559A5 true JP2002340559A5 (en) | 2008-05-22 |
Family
ID=18987583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001141078A Pending JP2002340559A (en) | 2001-05-11 | 2001-05-11 | Crystal angular speed sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002340559A (en) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7043986B2 (en) | 2003-02-05 | 2006-05-16 | Ngk Insulators, Ltd. | Vibrators and vibratory gyroscopes |
| JP2006133004A (en) * | 2004-11-04 | 2006-05-25 | Matsushita Electric Ind Co Ltd | Angular velocity sensor |
| EP1672316B1 (en) * | 2004-12-20 | 2008-04-16 | ETA SA Manufacture Horlogère Suisse | Transducer for measuring angular speed |
| EP1672315B1 (en) * | 2004-12-20 | 2007-09-26 | ETA SA Manufacture Horlogère Suisse | Transducer for measuring angular velocity |
| JP4667858B2 (en) * | 2004-12-28 | 2011-04-13 | 京セラキンセキ株式会社 | Inertial sensor element |
| JP5144004B2 (en) * | 2005-04-27 | 2013-02-13 | 京セラクリスタルデバイス株式会社 | Inertial sensor element |
| EP1732217B1 (en) * | 2005-06-09 | 2009-01-21 | ETA SA Manufacture Horlogère Suisse | Small-sized piezoelectric resonator |
| JP2007064826A (en) * | 2005-08-31 | 2007-03-15 | Kyocera Kinseki Corp | Inertial sensor element |
| JP5724672B2 (en) | 2011-06-24 | 2015-05-27 | セイコーエプソン株式会社 | Bending vibration piece, manufacturing method thereof, and electronic device |
| JP5765087B2 (en) | 2011-06-27 | 2015-08-19 | セイコーエプソン株式会社 | Bending vibration piece, method for manufacturing the same, and electronic device |
| JP6258051B2 (en) * | 2014-01-30 | 2018-01-10 | 京セラ株式会社 | Angular velocity sensor, sensor element, and method of manufacturing sensor element |
| JP6399283B2 (en) | 2014-03-24 | 2018-10-03 | セイコーエプソン株式会社 | Physical quantity detection device, electronic device, and moving object |
| JP6492537B2 (en) * | 2014-10-28 | 2019-04-03 | セイコーエプソン株式会社 | Sensor element, physical quantity sensor, electronic device and mobile object |
| CN113472310A (en) * | 2015-10-08 | 2021-10-01 | 株式会社村田制作所 | Crystal oscillator element and crystal resonator provided with same |
| JP6623682B2 (en) * | 2015-10-28 | 2019-12-25 | セイコーエプソン株式会社 | Physical quantity detection vibrating piece, physical quantity detection device, electronic equipment and moving object |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3500513B2 (en) * | 1994-12-28 | 2004-02-23 | Ｎｅｃトーキン株式会社 | Method of manufacturing vibrator for piezoelectric vibrating gyroscope |
| JPH09196680A (en) * | 1996-01-16 | 1997-07-31 | Tokimec Inc | Gyro apparatus and its manufacture |
| JPH116735A (en) * | 1997-06-18 | 1999-01-12 | Kinseki Ltd | Angular speed sensor |
| JP3973742B2 (en) * | 1997-07-04 | 2007-09-12 | 日本碍子株式会社 | Vibrating gyroscope |
| JP4852195B2 (en) * | 1999-01-20 | 2012-01-11 | セイコーエプソン株式会社 | Tuning fork crystal unit |
| JP3767303B2 (en) * | 2000-02-22 | 2006-04-19 | セイコーエプソン株式会社 | Angular velocity detector |
| JP3477618B2 (en) * | 2000-10-31 | 2003-12-10 | 有限会社ピエデック技術研究所 | Bending quartz crystal |
-
2001
- 2001-05-11 JP JP2001141078A patent/JP2002340559A/en active Pending