JP2002326827A5 - - Google Patents
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- JP2002326827A5 JP2002326827A5 JP2002073332A JP2002073332A JP2002326827A5 JP 2002326827 A5 JP2002326827 A5 JP 2002326827A5 JP 2002073332 A JP2002073332 A JP 2002073332A JP 2002073332 A JP2002073332 A JP 2002073332A JP 2002326827 A5 JP2002326827 A5 JP 2002326827A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/808719 | 2001-03-15 | ||
| US09/808,719 US6510707B2 (en) | 2001-03-15 | 2001-03-15 | Methods for making silica crucibles |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002326827A JP2002326827A (ja) | 2002-11-12 |
| JP2002326827A5 true JP2002326827A5 (https=) | 2005-09-08 |
| JP4462808B2 JP4462808B2 (ja) | 2010-05-12 |
Family
ID=25199527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002073332A Expired - Fee Related JP4462808B2 (ja) | 2001-03-15 | 2002-03-15 | 石英ガラスるつぼの製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6510707B2 (https=) |
| EP (1) | EP1241141B1 (https=) |
| JP (1) | JP4462808B2 (https=) |
| KR (1) | KR100495772B1 (https=) |
| DE (1) | DE60220112T2 (https=) |
| TW (1) | TWI238204B (https=) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4592037B2 (ja) * | 2000-05-31 | 2010-12-01 | 信越石英株式会社 | 石英ガラスルツボの製造方法 |
| US6755049B2 (en) * | 2001-03-08 | 2004-06-29 | Heraeus Quarzglas Gmbh & Co. Kg | Method of producing a quartz glass crucible |
| US20040118156A1 (en) * | 2001-03-08 | 2004-06-24 | Gabriele Korus | Method of producing a quartz glass crucible |
| US20030024467A1 (en) * | 2001-08-02 | 2003-02-06 | Memc Electronic Materials, Inc. | Method of eliminating near-surface bubbles in quartz crucibles |
| US20040258496A1 (en) * | 2002-04-08 | 2004-12-23 | Marusich Troy D. | High frequency tooth pass cutting device and method |
| US7383696B2 (en) * | 2005-09-08 | 2008-06-10 | Heraeus Shin-Etsu America, Inc. | Silica glass crucible with bubble-free and reduced bubble growth wall |
| US7427327B2 (en) * | 2005-09-08 | 2008-09-23 | Heraeus Shin-Etsu America, Inc. | Silica glass crucible with barium-doped inner wall |
| US7837955B2 (en) * | 2006-03-08 | 2010-11-23 | Unimin Corporation | Continuous reactor system for anoxic purification |
| US7716948B2 (en) * | 2006-12-18 | 2010-05-18 | Heraeus Shin-Etsu America, Inc. | Crucible having a doped upper wall portion and method for making the same |
| JP5143520B2 (ja) * | 2007-09-28 | 2013-02-13 | ジャパンスーパークォーツ株式会社 | シリカガラスルツボとその製造方法および引き上げ方法 |
| DE102008030310B3 (de) * | 2008-06-30 | 2009-06-18 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren zur Herstellung eines Quarzglastiegels |
| JP5523018B2 (ja) * | 2008-08-30 | 2014-06-18 | 株式会社Ｓｕｍｃｏ | 石英ルツボの製造装置 |
| JP5377930B2 (ja) * | 2008-10-31 | 2013-12-25 | 株式会社Ｓｕｍｃｏ | シリコン単結晶引上用石英ガラスルツボの製造方法 |
| US8272234B2 (en) * | 2008-12-19 | 2012-09-25 | Heraeus Shin-Etsu America, Inc. | Silica crucible with pure and bubble free inner crucible layer and method of making the same |
| JP4975012B2 (ja) * | 2008-12-29 | 2012-07-11 | ジャパンスーパークォーツ株式会社 | シリコン単結晶引き上げ用石英ガラスルツボ及びその製造方法 |
| JP5047227B2 (ja) | 2009-05-27 | 2012-10-10 | ジャパンスーパークォーツ株式会社 | シリコン単結晶の製造方法及びシリコン単結晶引き上げ装置 |
| JP4922355B2 (ja) * | 2009-07-15 | 2012-04-25 | 信越石英株式会社 | シリカ容器及びその製造方法 |
| US9003832B2 (en) * | 2009-11-20 | 2015-04-14 | Heraeus Shin-Etsu America, Inc. | Method of making a silica crucible in a controlled atmosphere |
| FR2954764B1 (fr) * | 2009-12-30 | 2011-12-30 | Saint Gobain Quartz Sas | Creuset en silice |
| JP4854814B1 (ja) * | 2011-04-28 | 2012-01-18 | Ｆｔｂ研究所株式会社 | シリコン結晶成長用石英坩堝のコーティング方法及びシリコン結晶成長用石英坩堝 |
| US8713966B2 (en) | 2011-11-30 | 2014-05-06 | Corning Incorporated | Refractory vessels and methods for forming same |
| EP3371119A4 (en) | 2015-11-04 | 2019-07-03 | Sibelco North America, Inc. | CLEANED, FOR PUNCHING A FIBER CABLE MODIFIED QUARTZ POWDER |
| JP7379054B2 (ja) * | 2018-12-27 | 2023-11-14 | モメンティブ・テクノロジーズ・山形株式会社 | 石英ガラスるつぼの製造方法および光学ガラス溶融用石英ガラスるつぼ |
| JP7282022B2 (ja) * | 2019-12-24 | 2023-05-26 | クアーズテック株式会社 | シリカガラスの製造方法 |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4116657A (en) * | 1977-05-05 | 1978-09-26 | Corning Glass Works | Process for increasing the annealing point of 96% silica glass |
| US4102664A (en) * | 1977-05-18 | 1978-07-25 | Corning Glass Works | Method for making glass articles with defect-free surfaces |
| DE2928089C3 (de) | 1979-07-12 | 1982-03-04 | Heraeus Quarzschmelze Gmbh, 6450 Hanau | Verbundtiegel für halbleitertechnologische Zwecke und Verfahren zur Herstellung |
| DE3014311C2 (de) | 1980-04-15 | 1982-06-16 | Heraeus Quarzschmelze Gmbh, 6450 Hanau | Verfahren zur Herstellung von Quarzglastiegeln und Vorrichtung zur Durchführung dieses Verfahrens |
| DE3302745A1 (de) * | 1983-01-27 | 1984-08-02 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verfahren zur herstellung von gegenstaenden aus hochreinem synthetischem quarzglas |
| GB8427915D0 (en) | 1984-11-05 | 1984-12-12 | Tsl Thermal Syndicate Plc | Vitreous silica products |
| US4632686A (en) * | 1986-02-24 | 1986-12-30 | Gte Products Corporation | Method of manufacturing quartz glass crucibles with low bubble content |
| US4713104A (en) * | 1986-03-31 | 1987-12-15 | Gte Products Corporation | Quartz glass crucibles |
| JPH085739B2 (ja) | 1986-12-26 | 1996-01-24 | 東芝セラミツクス株式会社 | 石英ガラスルツボの製造方法 |
| US4935046A (en) | 1987-12-03 | 1990-06-19 | Shin-Etsu Handotai Company, Limited | Manufacture of a quartz glass vessel for the growth of single crystal semiconductor |
| JPH0692276B2 (ja) | 1988-02-03 | 1994-11-16 | 三菱マテリアル株式会社 | シリコン単結晶引上げ用石英ルツボ |
| JP2602442B2 (ja) | 1988-02-03 | 1997-04-23 | 三菱マテリアル 株式会社 | シリコン単結晶引上げ用石英ルツボ |
| US4880453A (en) * | 1988-12-19 | 1989-11-14 | Corning Incorporated | Method for making glass articles with defect-free surfaces and soluble glasses therefor |
| US5100452A (en) * | 1990-05-17 | 1992-03-31 | Corning Incorporated | Making glass articles with defect-free surfaces |
| JP2933404B2 (ja) * | 1990-06-25 | 1999-08-16 | 信越石英 株式会社 | シリコン単結晶引き上げ用石英ガラスルツボとその製造方法 |
| CA2142282A1 (en) * | 1992-08-13 | 1994-03-03 | Paul Ducheyne | Bioactive material template for in vitro synthesis of bone tissue |
| US5449887A (en) * | 1993-03-25 | 1995-09-12 | Martin Marietta Energy Systems, Inc. | Thermal insulation for high temperature microwave sintering operations and method thereof |
| US5342426A (en) * | 1993-07-16 | 1994-08-30 | Corning Incorporated | Making glass sheet with defect-free surfaces and alkali metal-free soluble glasses therefor |
| JP3124674B2 (ja) | 1993-12-28 | 2001-01-15 | 東芝セラミックス株式会社 | シリコン単結晶引上げ用石英ガラス製ルツボの製造方法 |
| JP2830987B2 (ja) * | 1994-07-19 | 1998-12-02 | 信越石英株式会社 | 石英ガラスルツボ及びその製造方法 |
| DE19541372A1 (de) * | 1994-11-15 | 1996-05-23 | Gen Electric | Tiegel aus geschmolzenem Quarz sowie Verfahren zu dessen Herstellung |
| EP0737653B1 (en) * | 1995-04-10 | 1998-01-14 | Heraeus Quarzglas GmbH | Process for continuously refining of quartz powder |
| US5976247A (en) | 1995-06-14 | 1999-11-02 | Memc Electronic Materials, Inc. | Surface-treated crucibles for improved zero dislocation performance |
| JP3533416B2 (ja) * | 1996-02-06 | 2004-05-31 | 三菱住友シリコン株式会社 | 単結晶引上装置 |
| JP3764776B2 (ja) * | 1996-03-18 | 2006-04-12 | 信越石英株式会社 | 単結晶引き上げ用石英ガラスるつぼ及びその製造方法 |
| DE19917288C2 (de) * | 1999-04-16 | 2001-06-28 | Heraeus Quarzglas | Quarzglas-Tiegel |
| JP3672460B2 (ja) * | 1999-06-18 | 2005-07-20 | 東芝セラミックス株式会社 | シリコン単結晶引上用石英ガラスルツボの製造方法 |
-
2001
- 2001-03-15 US US09/808,719 patent/US6510707B2/en not_active Expired - Fee Related
-
2002
- 2002-03-05 TW TW091103994A patent/TWI238204B/zh active
- 2002-03-11 KR KR10-2002-0012925A patent/KR100495772B1/ko not_active Expired - Fee Related
- 2002-03-12 DE DE60220112T patent/DE60220112T2/de not_active Expired - Lifetime
- 2002-03-12 EP EP02005568A patent/EP1241141B1/en not_active Expired - Lifetime
- 2002-03-15 JP JP2002073332A patent/JP4462808B2/ja not_active Expired - Fee Related