JP2002326061A5 - - Google Patents

Download PDF

Info

Publication number
JP2002326061A5
JP2002326061A5 JP2001170262A JP2001170262A JP2002326061A5 JP 2002326061 A5 JP2002326061 A5 JP 2002326061A5 JP 2001170262 A JP2001170262 A JP 2001170262A JP 2001170262 A JP2001170262 A JP 2001170262A JP 2002326061 A5 JP2002326061 A5 JP 2002326061A5
Authority
JP
Japan
Prior art keywords
dicing frame
vacuum pressure
sealed chamber
hole
dicing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001170262A
Other languages
English (en)
Japanese (ja)
Other versions
JP4164623B2 (ja
JP2002326061A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001170262A priority Critical patent/JP4164623B2/ja
Priority claimed from JP2001170262A external-priority patent/JP4164623B2/ja
Publication of JP2002326061A publication Critical patent/JP2002326061A/ja
Publication of JP2002326061A5 publication Critical patent/JP2002326061A5/ja
Application granted granted Critical
Publication of JP4164623B2 publication Critical patent/JP4164623B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2001170262A 2001-04-27 2001-04-27 ダイシングフレーム洗浄機及びダイシングフレーム乾燥装置 Expired - Fee Related JP4164623B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001170262A JP4164623B2 (ja) 2001-04-27 2001-04-27 ダイシングフレーム洗浄機及びダイシングフレーム乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001170262A JP4164623B2 (ja) 2001-04-27 2001-04-27 ダイシングフレーム洗浄機及びダイシングフレーム乾燥装置

Publications (3)

Publication Number Publication Date
JP2002326061A JP2002326061A (ja) 2002-11-12
JP2002326061A5 true JP2002326061A5 (enExample) 2005-08-11
JP4164623B2 JP4164623B2 (ja) 2008-10-15

Family

ID=19012204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001170262A Expired - Fee Related JP4164623B2 (ja) 2001-04-27 2001-04-27 ダイシングフレーム洗浄機及びダイシングフレーム乾燥装置

Country Status (1)

Country Link
JP (1) JP4164623B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009178707A (ja) * 2008-01-31 2009-08-13 Omiya Kogyo Kk ダイシングフレーム洗浄方法及びその装置
CN107185874A (zh) * 2017-05-25 2017-09-22 天津恒丰达塑业股份有限公司 载带除尘箱
CN110696077A (zh) * 2019-09-04 2020-01-17 天能电池(芜湖)有限公司 连续涂膏余膏清理装置
CN113432401A (zh) * 2021-06-11 2021-09-24 绍兴帛航纺织有限公司 一种纺织用布料烘干装置

Similar Documents

Publication Publication Date Title
KR101599214B1 (ko) 대면적 초음파 정밀 세정장치
WO2007085015A3 (en) Acoustic energy system, method and apparatus for processing flat articles
TWI256425B (en) Apparatus and method for feeding water, and washer provided therewith
JP2015202471A (ja) 薄形状物体用クリーニング装置
JP2004221244A5 (enExample)
JP2002326061A5 (enExample)
US20150375264A1 (en) Waterproof Coating Process Machine and Its Negative Pressure Coating and Atomized Coating Methods
KR20150088495A (ko) 파티클의 비산 방지 기능이 구비된 공기 분사식 세정기
ATE545950T1 (de) Substratverarbeitungssystem
WO2008116341A3 (de) Dekontaminationsanordnung für einen reinraum und von temporär darin einbringbares behandlungsgut
CN104862916B (zh) 拉幅定型机除尘带无水清洁装置
CN104415930B (zh) 应用清洗基板方法的流体喷头及流体喷头装置
HK1253975A2 (zh) 清洗桶的装置
TWI283441B (en) Substrate treating device
CN212792184U (zh) 一种用于彩涂铝板加工的表面辊涂装置
JP2006218389A (ja) マット洗浄装置
CN210160089U (zh) 一种eb胶粘剂涂装用薄膜清洗装置
CN109290277B (zh) 粉尘去除装置
JP2007512863A5 (enExample)
TWI291342B (en) Tableware cleaning machine
JPS5924013Y2 (ja) めがね洗浄乾燥器
JP4371337B2 (ja) 塗布ノズルの洗浄装置
JP2008540994A5 (enExample)
JPS56118347A (en) Drying device
JP2000343015A5 (enExample)