JP2002322556A5 - - Google Patents
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- Publication number
- JP2002322556A5 JP2002322556A5 JP2002042851A JP2002042851A JP2002322556A5 JP 2002322556 A5 JP2002322556 A5 JP 2002322556A5 JP 2002042851 A JP2002042851 A JP 2002042851A JP 2002042851 A JP2002042851 A JP 2002042851A JP 2002322556 A5 JP2002322556 A5 JP 2002322556A5
- Authority
- JP
- Japan
- Prior art keywords
- organic compound
- light
- deposited
- film forming
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 150000002894 organic compounds Chemical class 0.000 claims 42
- 230000008020 evaporation Effects 0.000 claims 16
- 238000001704 evaporation Methods 0.000 claims 16
- 230000015572 biosynthetic process Effects 0.000 claims 11
- 230000001678 irradiating effect Effects 0.000 claims 9
- 238000000034 method Methods 0.000 claims 8
- 238000000151 deposition Methods 0.000 claims 5
- 230000008021 deposition Effects 0.000 claims 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims 2
- 229910052753 mercury Inorganic materials 0.000 claims 2
- 229940126062 Compound A Drugs 0.000 claims 1
- NLDMNSXOCDLTTB-UHFFFAOYSA-N Heterophylliin A Natural products O1C2COC(=O)C3=CC(O)=C(O)C(O)=C3C3=C(O)C(O)=C(O)C=C3C(=O)OC2C(OC(=O)C=2C=C(O)C(O)=C(O)C=2)C(O)C1OC(=O)C1=CC(O)=C(O)C(O)=C1 NLDMNSXOCDLTTB-UHFFFAOYSA-N 0.000 claims 1
- 238000004140 cleaning Methods 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002042851A JP2002322556A (ja) | 2001-02-21 | 2002-02-20 | 成膜方法及び成膜装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001-44650 | 2001-02-21 | ||
| JP2001044650 | 2001-02-21 | ||
| JP2002042851A JP2002322556A (ja) | 2001-02-21 | 2002-02-20 | 成膜方法及び成膜装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002322556A JP2002322556A (ja) | 2002-11-08 |
| JP2002322556A5 true JP2002322556A5 (zh) | 2005-08-11 |
Family
ID=26609791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002042851A Withdrawn JP2002322556A (ja) | 2001-02-21 | 2002-02-20 | 成膜方法及び成膜装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002322556A (zh) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SG114589A1 (en) * | 2001-12-12 | 2005-09-28 | Semiconductor Energy Lab | Film formation apparatus and film formation method and cleaning method |
| JP3877613B2 (ja) | 2002-03-05 | 2007-02-07 | 三洋電機株式会社 | 有機エレクトロルミネッセンス表示装置の製造方法 |
| JP4265393B2 (ja) * | 2003-02-24 | 2009-05-20 | 株式会社デンソー | 有機ｅｌパネルの製造方法 |
| JP4858169B2 (ja) * | 2004-07-23 | 2012-01-18 | コニカミノルタホールディングス株式会社 | 有機エレクトロルミネッセンス素子 |
| CN100514707C (zh) * | 2005-06-15 | 2009-07-15 | 株式会社爱发科 | 密封装置及密封方法 |
| JP2007042914A (ja) * | 2005-08-04 | 2007-02-15 | Seiko Epson Corp | 電子デバイスおよび電子機器 |
| JP5173175B2 (ja) | 2006-09-29 | 2013-03-27 | 東京エレクトロン株式会社 | 蒸着装置 |
| WO2012077659A1 (ja) * | 2010-12-07 | 2012-06-14 | 東京エレクトロン株式会社 | 表示デバイス製造装置、表示デバイスの製造方法、及び表示デバイス |
-
2002
- 2002-02-20 JP JP2002042851A patent/JP2002322556A/ja not_active Withdrawn
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