JP2002286574A5 - - Google Patents
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- Publication number
- JP2002286574A5 JP2002286574A5 JP2001089051A JP2001089051A JP2002286574A5 JP 2002286574 A5 JP2002286574 A5 JP 2002286574A5 JP 2001089051 A JP2001089051 A JP 2001089051A JP 2001089051 A JP2001089051 A JP 2001089051A JP 2002286574 A5 JP2002286574 A5 JP 2002286574A5
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- pressure sensor
- corrosion resistance
- exhaust pipe
- manufacturing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005260 corrosion Methods 0.000 description 13
- 230000007797 corrosion Effects 0.000 description 13
- 239000002184 metal Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000011109 contamination Methods 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001089051A JP2002286574A (ja) | 2001-03-27 | 2001-03-27 | 圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001089051A JP2002286574A (ja) | 2001-03-27 | 2001-03-27 | 圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002286574A JP2002286574A (ja) | 2002-10-03 |
| JP2002286574A5 true JP2002286574A5 (enExample) | 2004-09-02 |
Family
ID=18944041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001089051A Pending JP2002286574A (ja) | 2001-03-27 | 2001-03-27 | 圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002286574A (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4720451B2 (ja) * | 2005-11-15 | 2011-07-13 | 株式会社デンソー | 圧力センサ |
| KR101289096B1 (ko) | 2011-11-14 | 2013-07-23 | 재단법인 포항산업과학연구원 | 고온 압력센서장치 및 그 제조방법 |
| CN105547569A (zh) * | 2015-12-30 | 2016-05-04 | 黄福春 | 一种高温绝压传感器 |
| CN106679854B (zh) * | 2016-11-29 | 2020-02-07 | 中国电子科技集团公司第四十八研究所 | 一种绝压压力传感器及其制备方法 |
| JP7736425B2 (ja) * | 2020-04-03 | 2025-09-09 | アズビル株式会社 | 圧力センサ素子および圧力センサ |
-
2001
- 2001-03-27 JP JP2001089051A patent/JP2002286574A/ja active Pending
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