JP2002258026A - Filter producing device, filter producing method and filter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a filter producing device and a filter producing method by which the relative positions of the ink arrangement areas of a baseboard with a discharge part can be aligned without confirming discharge and increasing the production cost through the use of a simple configuration, and also to provide a filter produced by the method. SOLUTION: The filter producing device 100 is provided with the baseboard 14 having the multiple ink arrangement areas, a head part 190 having the discharge part to impact ink in the ink arrangement area, adjustment holding parts 130 and 180 for adjusting the relative position of the baseboard with the discharge part, a head rotating part 181 for rotating the head part, a first image pickup means 161 for specifying the position of the discharge part and second image pickup means 160 for specifying the position of the baseboard. The device 100 is also characterized by disposing the first image pickup means in the adjustment holding parts.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a filter manufacturing apparatus, a filter manufacturing method, and a filter for manufacturing a filter such as a color filter used for a display device such as a liquid crystal display device.

[0002]

2. Description of the Related Art For example, a color filter or the like used for a display device such as a liquid crystal display device is manufactured by arranging ink in each of a large number of ink arranging regions formed on a substrate. This ink is red (R),
It is made of green (G) or blue (B) ink, and these R, G, and B inks are arranged on the substrate in a predetermined pattern. As described above, since the R, G, and B inks are arranged with high accuracy and different colors for each ink arrangement area on the substrate, it is necessary to control the ink ejection with high accuracy. As a suitable method, an ink jet method is employed. The inkjet method is
A large number of nozzles for discharging ink are arranged on an ink jet head containing ink, and the amount of ink discharged from the nozzles is determined by the operation of a piezoelectric element or the like.

[0003] The operation of the piezoelectric element can be accurately controlled by the level of an externally applied voltage, and consequently, the ink jet method can accurately control the ink discharge amount. FIG. 11 shows a main part of such an inkjet type color filter manufacturing apparatus. As shown in FIG. 11, the color filter manufacturing apparatus 10 has a base portion 11, on which a Y-axis table 12 movable in the Y-axis direction in the figure is provided. This Y
A color filter substrate 13 is mounted on the axis table 12, and can be moved in the Y-axis direction by the Y-axis table 12. On the other hand, an X-axis table 15 that is movable in the X-axis direction in the figure is disposed above the base 11. Specifically, the X-axis table 15 is provided on four columns 11a provided on the base 11 and on the X-axis table support 14 held by the columns 11a.

The X-axis table 15 held movably in the X-axis direction has an inkjet head 1
6 are arranged and movably arranged in the X-axis direction by the X-axis table 15. In addition, these Y-axis tables 1
2 and the X-axis table 15 are also rotatable in the θ direction in the figure. As described above, the color filter substrate 1
3 is moved in the Y-axis direction or the θ direction, and the ink-jet head 16 is moved in the X-axis direction or the θ direction.
6 can be arranged. In order to dispose the inkjet head 16 at a predetermined position of the color filter substrate 13 in this manner, it is necessary to accurately recognize the positions of the color filter substrate 13 and the inkjet head 16 before the movement.

[0005] Therefore, as shown in FIG.
Four CCD cameras are provided along two long sides. Of these, the two cameras on the left are fixed cameras 17 for the substrate, and the two cameras on the right are fixed cameras 18 for the inkjet head. Note that the two board fixing cameras 17 are connected to the base unit 11 by a camera fixing unit (not shown).
It is provided on the base portion 11 so as to be located above.
FIG. 13 shows the relationship between the fixed camera 17 for the substrate and the fixed camera 18 for the inkjet head arranged in this way, the substrate 13 for the color filter, the inkjet head 16 and the like. As shown in FIG. 13, the two fixed cameras 17 for substrates capture an image of a surface edge of one side of the color filter substrate 13. In addition, the two fixed cameras 18 for the inkjet head capture an image of one short side end of the nozzle forming surface of the inkjet head 16. In response, as shown in FIG.
One alignment mark 13a is provided.

As shown in FIG. 15, the ink jet head 16 is provided with alignment marks 16a at both ends of the long side. Further, the alignment mark 16a is arranged at a position so as to be in line with the center line of the nozzle row composed of a plurality of nozzles. Therefore, the Y-axis table 1 of the color filter manufacturing apparatus 10
The color filter substrate 13 is disposed on the color filter substrate 2, and the two alignment marks 13a of the color filter substrate 13 are provided.
Is imaged by the two fixed cameras 17 for the substrates, so that the deviation due to the accuracy of the material removal of each color filter substrate 13 can be grasped. Therefore, based on this displacement information, the Y-axis table 12 is moved in the Y-axis direction or the θ direction to correct the displacement of the color filter substrate 13.
On the other hand, the inkjet head 16 is
Is moved in the X-axis direction and rotated by 90 ° in the θ direction so that the two alignment marks 16a of the inkjet head 16 shown in FIG. 15 are arranged on the line AA ′ in FIG. The two alignment marks 16 a of the inkjet head 16 are imaged by the inkjet head fixed camera 18.

[0007] Based on the image data, the displacement of the ink-jet head 16 is grasped, and the X-axis table 15 is moved in the X-axis direction or the θ-direction.
Will be corrected. By the way, in the inkjet head 16, a number of nozzles for discharging R, G, and B inks are arranged in a hatched portion in FIG. The multiple nozzles are provided at a constant nozzle pitch. In addition, also on the color filter substrate 13, a large number of pixel portions for arranging ink and forming pixels are arranged in a matrix, and the respective pixel portions are arranged at regular intervals. Here, since the nozzle pitch of the inkjet head 16 does not always coincide with the pitch of the pixel portion, the color filter substrate 13 is formed at an angle (90 ° with respect to the Y-axis direction) of the inkjet head 16 shown in FIG.
When the ink is ejected to the nozzle, the position of the nozzle does not match the position of the pixel portion, and the ink is ejected between the pixel portions.

Therefore, with the rotation center of the ink jet head 16 determined in advance, the ink jet head 16 is rotated so as to be inclined by a certain angle θ. By tilting in this manner, the nozzle pitch can be changed from B to C, as shown in the explanatory diagram of FIG. 16, whereby the nozzle pitch and the pitch of the pixel portion can be adjusted.

[0009]

However, since the angle at which the ink jet head 16 is tilted is a calculated value calculated from the center of rotation and the like, after the ink jet head 16 is tilted, the calculated value of the ink jet head 16 actually changes. You need to make sure that it is. At this time, in order to confirm the position of the ink jet head 16, FIG.
2 fixed cameras 18 for ink jet heads
Therefore, it is necessary to image the alignment mark 16a of the inkjet head 16 shown in FIG. However, FIG.
2 fixed cameras 18 for inkjet heads shown in FIG.
Is fixed to the base portion 11 and is separated from the ink jet head 16 arranged at the ink ejection position, so that it is difficult to image the two alignment marks 16a of the ink jet head 16.

For this reason, the color filter manufacturing apparatus 10
However, there is a problem that the accurate position of the inkjet head 16 after tilting cannot be grasped. Therefore,
Before actually discharging the ink to the color filter substrate 13, a test substrate is prepared, and an ink discharge test is performed on this substrate. If the discharge position is shifted, the ink jet head 16 Was corrected. After the correction, an ink ejection test is performed again,
After confirming that the ink ejection position is correct, it is necessary to prepare a test substrate in order to eject the ink to the actual color filter substrate 13, and thus there is a problem in that cost and time are required. .

In view of the above, the present invention makes it possible to adjust the relative positions of the ink arrangement area of the substrate and the discharge section without increasing the manufacturing cost and without having to check the discharge with a simple configuration. It is an object to provide a filter manufacturing apparatus, a filter manufacturing method, and a filter manufactured by the manufacturing method.

[0012]

According to a first aspect of the present invention, there is provided a substrate having a plurality of ink arrangement areas,
A head section having an ejection section for landing ink on the ink arrangement area, and an adjustment holding section for holding the head section and the substrate and adjusting a relative position between the substrate and the ejection section. A rotation unit for rotating the head unit, a first imaging unit for specifying a position of the ejection unit, and a second imaging unit for specifying a position of the substrate. The present invention is attained by a filter manufacturing apparatus, wherein the first imaging means is provided in the adjustment holding unit. According to the configuration of the first aspect, since the first imaging unit is provided in the adjustment holding unit, even if the position of the ejection unit changes, the adjustment holding unit is moved according to the changed position. By doing so, it is possible to easily move the first imaging means to the movement position of the ejection unit.

Preferably, according to the second aspect of the invention, in the configuration of the first aspect, the adjustment holding section holds a head moving section that holds the head section and moves the head section in a specific direction, and holds the substrate. A substrate moving unit that moves in a direction orthogonal to the head moving unit, wherein the first imaging unit is provided in the substrate moving unit. According to the configuration of claim 2, since the first imaging unit is provided in the substrate moving unit, by moving the substrate moving unit, the first imaging unit also moves to a desired position. Can be done.

Preferably, according to a third aspect of the present invention, in the configuration of the second aspect, the specific direction is an X-axis direction,
A direction orthogonal to the head moving unit is a Y-axis direction, the head moving unit is an X-axis table, and the substrate moving unit is a Y-axis direction.
A filter manufacturing apparatus, which is a shaft table. According to the configuration of the third aspect, since the substrate moving unit is a Y-axis table, the first imaging unit is provided on the Y-axis table, and is movable in the Y-axis direction.

Preferably, according to a fourth aspect of the present invention, in any one of the first to third aspects, the first imaging means is a head imaging camera, and the second imaging means is
Wherein the imaging means is a camera for imaging a substrate. According to the configuration of claim 4, the first imaging unit is a camera for imaging the head unit, and the second imaging unit is a camera for imaging the substrate. Then, it is possible to obtain position information and the like regarding the head portion. Further, the board imaging camera can capture an image of the board and obtain positional information and the like on the board.

Preferably, according to a fifth aspect of the present invention, in the configuration of the fourth aspect, one head portion imaging camera is provided at a substantially central portion in a direction orthogonal to a moving direction of the Y-axis table. A filter manufacturing apparatus characterized in that: According to the configuration of the fifth aspect, since one head imaging camera is provided at a substantially central portion in a direction orthogonal to the moving direction of the Y-axis table, the head imaging camera is an imaging target. A camera for imaging the head unit is provided substantially at the center of both ends of the long side of the head unit, which is the furthest part of the head unit. Therefore, it is easy to image, for example, both end portions of the head portion with one head portion imaging camera.

Preferably, according to a sixth aspect of the present invention, in the configuration of any one of the first to fifth aspects, the head portion and the substrate are provided with a plurality of alignment marks, respectively. It is a filter manufacturing apparatus characterized by the following. According to the configuration of claim 6, the head unit and the substrate are provided with a plurality of alignment marks, respectively, so that the first imaging unit or the camera for the head unit can control the alignment of the head unit with the plurality of alignment marks. An image of the mark is obtained, and positional information of the head unit is obtained. Further, the second imaging means or the board imaging camera takes an image of the alignment mark of the board and obtains positional information of the board.

Preferably, according to a seventh aspect of the present invention, in the configuration of the sixth aspect, the alignment marks of the head portion are arranged at both ends in the longitudinal direction on the side of the head portion on which the ejection section is provided. It is a filter manufacturing apparatus characterized by being performed. According to the configuration of claim 7, the first imaging unit or the camera for the head unit includes:
The alignment marks arranged at both ends in the longitudinal direction on the side where the ejection section of the head section is provided are imaged to obtain position information of the head section.

Preferably, according to an eighth aspect of the present invention, in any one of the third to seventh aspects, a head rotating portion for rotating the head portion and the Y-axis table for rotating the Y-axis table. The Y-axis table rotation unit is provided. The head rotation unit and the Y-axis table rotation unit are arranged so that the head rotates in a direction that rotates a Z-axis perpendicular to a plane formed by the X-axis direction and the Y-axis direction. And a Y-axis table. According to the configuration of claim 8, a head rotating unit for rotating the head and the Y-axis table and Y
Since the shaft table rotating unit is provided, the head unit and the Y-axis table can be moved in the Z-axis rotating direction θ. Therefore, the head portion and the Y-axis table can be moved with higher accuracy.

Preferably, according to the ninth aspect of the present invention, in the configuration of any one of the first to eighth aspects, a rotation center camera for specifying a rotation center of the head section is provided in the head section. A plurality of marks are arranged, and a plurality of marks on the glass mask are picked up by the plurality of rotation center cameras,
It is a filter manufacturing device characterized by being provided. According to the configuration of the ninth aspect, the head unit is provided with a plurality of rotation center cameras for specifying the rotation center of the head unit, and the marks captured by the plurality of rotation center cameras are placed on the glass mask. Are provided at a plurality of positions, so that the plurality of cameras for the center of rotation can capture the two marks on the glass mask, for example, and determine the center of rotation, thereby grasping the center of rotation of the head unit.

Preferably, according to the tenth aspect of the present invention,
10. The filter manufacturing apparatus according to claim 9, wherein the glass mask is provided with information for correcting the positions of the X-axis table and the Y-axis table. According to the configuration of claim 10, since the glass mask is provided with information for correcting the positions of the X-axis table and the Y-axis table, the relative position between the head unit and the substrate is corrected. Before, said X comprising
The positions of the axis table and the Y-axis table can be corrected.

Preferably, according to the eleventh aspect of the present invention,
11. The color filter substrate according to claim 1, wherein the substrate is a color filter substrate, and the ink disposition areas are provided in a matrix on a surface of the color filter substrate, and the ink is red (R). ), Green (G)
Alternatively, the filter manufacturing apparatus is any one of blue (B) inks. According to the configuration of claim 11, any one of red (R), green (G), and blue (B) inks is arranged in an ink arrangement area provided in a matrix on the surface of the substrate. A color filter substrate is formed.

According to the twelfth aspect of the present invention,
A step of rotating the head part by a necessary angle to adjust the distance between the plurality of ink arrangement areas provided on the surface of the substrate and the distance between the ink ejection parts provided in the head part; A step of moving a substrate moving section which also holds the substrate and also has an image pickup means, and picks up an image of an alignment mark provided on the head section with the image pickup means; and position information of the alignment mark picked up by the image pickup means And a step of verifying the rotation angle of the head section based on the above method. According to the configuration of claim 12, a step of moving the substrate moving unit that holds the substrate and also includes an imaging unit, and images the alignment mark provided on the head unit with the imaging unit, Based on the position information of the alignment mark imaged in
To have a step of verifying the rotation angle of the head part,
After rotating the head unit by a required angle, the head unit can be accurately arranged at a desired position without performing, for example, an ink ejection test on a test substrate.

According to a thirteenth aspect of the present invention,
A step of rotating the head part by a necessary angle to adjust the distance between the plurality of ink arrangement areas provided on the surface of the substrate and the distance between the ink ejection parts provided in the head part; A step of moving a substrate moving section which also holds the substrate and also has an image pickup means, and picks up an image of an alignment mark provided on the head section with the image pickup means; and position information of the alignment mark picked up by the image pickup means And a step of verifying the rotation angle of the head unit based on the filter. According to the configuration of the thirteenth aspect, it is not necessary to perform an ink ejection test at the time of manufacturing the filter, so that the number of manufacturing steps can be reduced and a low-cost filter can be provided.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic diagram illustrating a color filter manufacturing apparatus 100 according to a first embodiment of the filter manufacturing apparatus of the present invention. As shown in FIG. 1, the color filter manufacturing apparatus 100 includes a color filter manufacturing apparatus main body 110 and a portion for controlling the color filter manufacturing apparatus main body 110.
The color filter manufacturing apparatus main body 110 includes a rectangular parallelepiped base 120 as shown in FIG. On the base section 120, a Y-axis table 130 is arranged. The entire Y-axis table 130 is formed in a plate shape. The Y-axis table 130 is formed so as to be movable in the Y-axis direction in the figure and rotatable in the Z-axis rotation direction (arrow direction θ) in the figure. Also, Y
A color filter substrate 140, which is a substrate, is mounted on the axis table 130, and the color filter substrate 140 also moves and rotates as the Y-axis table 130 moves and rotates.

The color filter substrate 140 is formed of, for example, glass or the like, and is formed in a square plate shape as shown in FIG. And as shown in FIG.
Two alignment marks 140a are arranged on a portion of the color filter substrate 140 corresponding to the front surface in FIG. These two alignment marks 140a are
As will be described later, the color filter substrate 140 is provided on one side of the color filter substrate 140 corresponding to the side of the base unit 120 on which the substrate imaging camera is arranged. Further, on the surface of the color filter substrate 140, a substantially square pixel portion 141 which is an ink disposition area for disposing any one of red (R), green (G), and blue (B) inks is provided. However, as shown in FIG.

Each of the pixel portions 141 is formed so that each of the pixel portions becomes a pixel when the ink is arranged. Specifically, as shown in FIG. 4, a groove portion 141a is formed. FIG. 4 is a sectional view taken along line AA ′ of FIG.
The ink will be arranged in 41a. by the way,
FIG. 5 is a schematic view showing the surfaces of the base portion 120 and the color filter substrate 140 shown in FIG. 1. As shown, two substrate imaging cameras 160 are fixed on the surface of the base portion 120. It is provided in. Above these two substrate imaging cameras 160, a portion where the alignment mark 140 of the color filter substrate 140 on the Y-axis table 130 is provided as described above is formed.

A head imaging camera 161 as a head imaging camera is formed at a substantially central portion in the width direction which is a short side of the Y-axis table 130. The board imaging camera 160 and the head imaging camera 161 include:
It is formed by a small CCD camera. FIG. 6 is a schematic plan view of the main body portion 110 of the color filter manufacturing apparatus shown in FIG. 1. As shown by a broken line in FIG. 6, the head imaging camera 161 includes a Y-axis table 130 and a color filter substrate 140. And will be arranged between them. Further, the two board imaging cameras 160 are mounted on the color filter board 1.
It is arranged corresponding to the side where the 40 alignment marks 140a are attached.

As shown in FIG. 1, an X-axis table 180 is disposed above the color filter substrate 140 via four columns 170. The X-axis table 180 is provided with an inkjet head 190 as a head unit via a head holding unit 181. Such an X-axis table 180 is formed so as to be movable in the X-axis direction in FIG. The inkjet head 19
0 is specifically formed as shown in FIGS. 7 (a) and 7 (b). FIG. 7A is a schematic plan view of the inkjet head 190 of FIG. 1, and FIG. 7B is a schematic bottom view of the inkjet head 190 of FIG.

As shown in FIG. 7, the ink-jet head 190 has a head Z-axis 191 which is a head rotating unit.
90 rotates in the Z-axis rotation direction θ in FIG. Also, on the bottom surface of the inkjet head 190,
As shown in FIG. 7, six nozzle forming portions 192 are formed. In the nozzle forming section 192, for example, 180 nozzles serving as ejection sections are formed. A desired amount of red (R), green (G), or blue (B) ink is ejected from this nozzle. This amount of ink is controlled by the movement of a piezoelectric element provided in the inkjet head 190.

At both ends of the long side of the bottom surface of the ink jet head 190, outside the nozzle forming portion 192,
A total of two alignment marks 193 are formed. The two alignment marks 193 correspond to the above-described Y
Head imaging camera 1 provided on axis table 130
The image is taken by 61. At this time, the head imaging camera 161 is disposed at an intermediate portion between the two alignment marks 193 provided at both ends of the inkjet head 190.
1, the two alignment marks 193 can be efficiently imaged. In addition, near the two alignment marks 193, a rotation center camera 194 is provided as shown in FIG. 7B. The rotation center camera 194 is formed of, for example, a small CCD camera.

As shown in FIG. 7B, a total of two rotation center cameras 194 are provided, and a glass mask 195 mounted on the Y-axis table 130 by the two rotation center cameras 194. The upper specific portion is imaged, and the rotation center when the inkjet head 190 rotates the head Z axis is calculated. This glass mask 195
Unlike the above-described color filter substrate 140, it is not a target for ejecting ink, and adjusts the rotation center of the inkjet head 190 and, as described later, the X-axis table 180 of the color filter manufacturing apparatus 100.
And for adjusting the Y-axis table 130.

The color filter device main body 11 shown in FIG.
0 is configured as described above, and the following configuration is provided to operate the color filter device main body 110 and the like. First, as shown in FIG. 1, the X-axis table 180 is connected to an X-axis table driving unit 101 composed of, for example, a motor or the like. The X-axis table drive unit 101 moves the X-axis table 180 in the X-axis direction. The X-axis table drive unit 101 is connected to an X-axis table control unit 102 composed of a computer or the like for controlling the drive.
Therefore, the moving amount of the X-axis table 180 is controlled by the X-axis table control unit 102. Further, the X-axis table control unit 102 is connected to and controlled by a central control unit 103 composed of a computer or the like connected thereto.

The Y-axis table 130 shown in FIG.
The axis table driving unit 115 is configured to be moved in the Y-axis direction or the Z-axis rotation direction θ. The Y-axis table driving unit 115 is controlled by a Y-axis table control unit 116, and the Y-axis table control unit 116 is controlled by the central control unit 103. As shown in FIG. 1, the inkjet head 190 includes an inkjet head driving unit 10 including a motor for rotating the head Z axis 191 of the inkjet head 190 in the θ direction.
4 are connected. An inkjet head control unit 105 including a computer or the like for controlling the inkjet head driving unit 104 is provided.
Is controlled by

As for the rotation center camera 194 shown in FIG. 7B provided on the bottom surface of the ink jet head 190, the rotation center camera driving unit 106 for driving the rotation center camera 194 and this rotation center camera Drive unit 1
The camera controller 107 for the center of rotation for controlling the camera control unit 06 is provided. Further, the rotation center camera control unit 107 is controlled by the central control unit 103. Further, regarding the head imaging camera 161 provided on the Y-axis table 130, a head imaging camera drive unit 108 for driving the head imaging camera 161 and a head imaging camera control unit for controlling the head imaging camera drive unit 108 Part 10
9 are provided. The head imaging camera control unit 109 is controlled by the central control unit 103.

The board imaging camera 160 provided on the base section 120 shown in FIG. 5 also controls the board imaging camera drive section 111 for driving the board imaging camera 160 and the board imaging camera drive section 111. A substrate imaging camera control unit 112 is provided. The board control camera control unit 112 is also controlled by the central control unit 103. Data captured by the rotation center camera 194, the head imaging camera 161 and the board imaging camera 160 described above is transmitted from the imaging data transmission unit 113 in FIG.
03, and then stored in the data management unit 114.

The color filter manufacturing apparatus 100 according to the present embodiment is configured as described above. The operation and the like will be described below. Color filter manufacturing apparatus 100
Is the main body of the color filter manufacturing apparatus 100 before actually discharging any one of (red) R, (green) G, and (blue) B inks to the pixel portion 141 of the color filter substrate 140 in the color filter manufacturing apparatus 100. The unit 110 is adjusted. The adjustment of the color filter manufacturing apparatus main body 110 includes a pre-alignment preparation operation and an apparatus main body alignment operation.

(Preparation work before alignment) First, the above-mentioned glass mask 195 is placed on the Y-axis table 130 of the color filter manufacturing apparatus main body 110 shown in FIG.
At this time, the environment temperature is set to a predetermined use environment temperature or this temperature ± 0.5 ° C. By the way, the glass mask 1
95 includes an X-axis table 180 and a Y-axis table 130.
A predetermined mark, which is information for position correction, is formed. Further, as described above, the inkjet head 190 is used.
A mark for calculating the rotation center of the image is also formed.
Specifically, such a glass mask 195 has a plate shape with a short side of 370 mm and a long side of 470 mm as shown in FIG. 8, and has a thickness of, for example, 0.7 mm. On the surface of the glass mask 195, as shown in FIG. 8, the above-mentioned marks are formed, for example, of Cr (chromium).

The marks are formed at positions indicated by reference numerals D to H in FIG. The marks D to H have different configurations. 9A, 9B, 9C, 10A, and 10B are schematic enlarged views showing the configuration of each mark indicated by reference numerals D, E, F, G, and H, respectively. . Also, on the glass mask 195 shown in FIG. 8, there are four marks indicated by reference D, four marks indicated by E, 191 marks indicated by F, eight marks indicated by G, and The mark indicated by the symbol H is arranged at two places. Of the marks on such a glass mask 195,
First, the mark for correcting the X-axis table position is marked with the rotation center camera 194 (FIG. 7) of the inkjet head 190.
The image is taken in (b)). Then, the image data is temporarily stored in the data management unit 114 from the image data transmission unit 113 of FIG. 1 via the central control unit 103.

On the other hand, among the marks on the glass mask 195, the mark for correcting the Y-axis table position is picked up by the board pick-up camera 160 or the like shown in FIG. The data is temporarily stored in the data management unit 114 via the server 103. As described above, the mark for X-axis table position correction and the mark for Y-axis table position correction once stored in the data management unit 112 are data referred to at the time of initial setting before ink ejection in a color filter manufacturing process described later. Becomes That is, at the time of the initial setting before the ink discharge in the color filter manufacturing process, the glass mask 195 is placed, and when the captured image data differs from the data referred to above, the data becomes the same as the reference data. The correction operation is performed. This correction operation is performed according to an instruction from the central control unit 103 in FIG.
This is performed by moving the X-axis table 180 by the required amount in the X-axis direction via the axis table control unit 102 and the X-axis table driving unit 101.

In the correction operation, the Y-axis table 130 may be moved in the Y-axis direction or the like by a required amount via the Y-axis table control unit 116 and the Y-axis table driving unit 115 in accordance with an instruction from the central control unit 103. included. The X-axis table 180 and the Y-axis table 130 error data for performing such a correction operation in the future are registered in the data management unit 114 here. Next, registration of rotation center data of the inkjet head 190 is performed. That is, first, in response to an instruction from the central control unit 103 shown in FIG. 1, the two rotation center cameras 194 shown in FIG. 7B via the rotation center camera control unit 107 and the rotation center camera drive unit 106. Is moved, and two points on the glass mask 195 are imaged.

The image data is sent to the central control unit 1.
03 is stored in the data management unit 114 via the imaging data transmission unit 113 according to the instruction of 03. The central control unit 103 obtains the midpoint of the two points from the imaging data stored in the data management unit 114, and stores this as first midpoint data in the data management unit 114. Next, the central control unit 103
Is the inkjet head 1 via the inkjet head control unit 105 and the inkjet head driving unit 104
The 90 head Z-axis 191 is rotated 180 degrees in the θ direction.

Then, the central control unit 103 again controls the rotation center camera control unit 107 and the rotation center camera drive unit 1.
The two rotation center cameras 194 are moved via 06 to image two points on the glass mask 195. And
The imaging data is stored in the data management unit 114 in the same manner as described above, and a central point of the two points is obtained by the central control unit 103, and is stored in the data management unit 114 as second intermediate point data. If the first and second midpoint data are different, the central control unit 114 determines these midpoints,
The rotation center value of the inkjet head 190 is registered in the data management unit 114. The rotation center value is used as data when the inkjet head 190 is tilted in order to match the actual distance between the pixel portions 141 of the color filter substrate 140 with the nozzle pitch of the inkjet head 190.

Thus, the pre-alignment preparation operation is completed, and the glass mask 195 is removed from the Y-axis table 130. Then, the actual color filter substrate 140 shown in FIG. 2 is placed on the Y-axis table 130,
An alignment operation of the apparatus main body is performed.

(Alignment work of the main body of the apparatus) First, the central control section 103 performs control of the Y-axis table control section 1 shown in FIG.
16. The Y-axis table 130 is moved via the Y-axis table driving unit 115. The movement of the Y-axis table 130 at this time is based on the color filter substrate 1 on the Y-axis table 130.
Two alignment marks 140a attached to 40
2 (see FIG. 2) can be imaged by the two substrate imaging cameras 160 on the base unit 120. At the same time, the central control unit 103 controls the board imaging camera control unit 1.
12. The two substrate imaging cameras 160 are driven via the substrate imaging camera driving unit 111 to image the two alignment marks 140a.

The central control unit 103 includes the imaging data transmitting unit 1
In step 13, the imaging data is stored in the data management unit 114, compared with the theoretical value of the color filter substrate stored in advance, the correction data of the color filter substrate 140 is calculated, and registered in the data management unit 114. . The reason why the correction data of the color filter substrate 140 is obtained in this manner is that a manufacturing error occurs for each color filter substrate, and all the color filter substrates are not always the same size. That is, for example, a deviation may occur for each color filter substrate depending on the precision of the material to be removed of the color filter substrate.

On the other hand, the central control unit 103 includes a head imaging camera control unit 109 and a head imaging camera driving unit 108.
, One head imaging camera 161 on the Y-axis table 130 is operated. At this time, the central control unit 103 controls the Y-axis table control unit 116 and the Y-axis table control unit 116 so that the single head imaging camera 161 can capture two alignment marks 193 (see FIG. 7B) of the inkjet head 190. The Y-axis table 130 is moved in the Y-axis direction via the axis table driving unit 115. At this time,
The central control unit 103 controls the X-axis table 180 via the X-axis table control unit 102 and the X-axis table driving unit 101.
Move in the axial direction. By moving the Y-axis table 130 and the X-axis table 180 in this way, the head imaging camera 1
61 can image the two alignment marks 193 of the inkjet head 190.

The image data thus picked up is transmitted by the image data transmission section 113 and transmitted to the data management section 114.
Is stored in Then, the central control unit 103 compares the theoretical value of the alignment mark of the inkjet head 190 stored in advance with the mounting accuracy of the inkjet head 190, the positional accuracy of the alignment mark 193, and the like, and recognizes the theoretical position. Is calculated and registered in the data management unit 114. As described above, the displacement of the color filter substrate 140 on the Y-axis table 130 of the color filter manufacturing apparatus 100 includes:
The deviation of the inkjet head 190 of the X-axis table 130 is grasped, and correction data for matching the theoretical value is registered in the data management unit 114.

Then, based on the correction data, the central control section 103 executes an X-axis table 180, a Y-axis table 13
By moving the 0 and the head Z axis 191 by a predetermined amount in the θ direction, the positions of the inkjet head 190 and the color filter substrate 140 are matched with the theoretical values. Specifically, the central control unit 103 moves the X-axis table 180 in the X-axis direction by a required amount via the X-axis table control unit 102 and the X-axis table drive unit 101 based on the correction data. Further, based on this correction data, the Y-axis table controller 11
6. Y-axis table 1 via Y-axis table drive unit 115
30 is moved by a required amount in the Y axis direction or the θ direction. further,
Based on the correction data, the head Z-axis 191 is rotated by a required amount in the θ direction via the inkjet head control unit 105 and the inkjet head driving unit 101.

At this time, the pitch of the pixel portions 141 on the color filter substrate 140 and the ink jet head 19
Based on the value of the nozzle pitch of the nozzles formed in the 0 nozzle forming unit 192 (see FIG. 7B), the nozzles need to be arranged at positions where they can accurately discharge ink into the pixel unit 141. There is. Therefore, as shown in FIG. 16, it is necessary to incline the ink jet head 190 with respect to the color filter substrate 140 so that the nozzles are arranged at such positions. At this time, the length of B in the figure is, for example, 141.1 μm, and the length of C is, for example, 1
12.5 μm. This tilt angle is determined by the data management unit 1
14, and the central control unit 114 controls the head Z axis 1 so that the inclination angle becomes the registered inclination angle.
Rotate 91 in the θ direction.

In this state, each part is temporarily arranged at a theoretical position. However, the position of each part is a theoretical position, and may actually be slightly shifted. In particular, the rotation center value of the inkjet head 190 tends to deviate from the actual position. This inkjet head 1
When the difference between the theoretical position of 90 and the actual position occurs,
Ink of each color ejected from the nozzle is not accurately arranged in the pixel portion 141 of the color filter substrate 140, and the color filter substrate 140 becomes defective. Therefore, in the present embodiment, after the color filter manufacturing apparatus 100 is arranged at the theoretical position, central control is performed to check whether or not each nozzle of the inkjet head 190 is arranged at this theoretical position. The unit 114 instructs the following operation. That is, the central control unit 114 operates the head imaging camera 161 of the Y-axis table 130 via the head imaging camera control unit 109 and the head imaging camera driving unit 108, and subsequently, the Y-axis table 130 and X
The axis table 180 is moved as described above.

The head imaging camera 161
Then, the ink jet head 190 shown in FIG.
The two alignment marks 193 are imaged. At this time, the head imaging camera 161 moves the Y-axis table 130
Since the alignment mark 193 is provided above, even if the alignment mark 193 has moved from the initial position in the rotation direction θ of the Z axis, it is possible to easily move to the position and take an image. In addition, since the head imaging camera 161 is disposed at the middle of the Y-axis table 130 in the short side direction, this position is also located at the middle of the two alignment marks 193 of the inkjet head 190 shown in FIG. Become.
Therefore, the moving distance for the head imaging camera 161 to image the two alignment marks 193 is the shortest and the most effective position. Therefore, there is no need to arrange a plurality of head imaging cameras,
Cost can be reduced.

By the way, the image data picked up by the head image pickup camera 161 is stored again in the data management section 114, and is compared with the theoretical value by the central control section 114. At this time, if there is an error, correction data is generated again, and the head Z-axis 191 is again generated by the correction data.
Etc. are moved. In this manner, the head Z-axis 191 and the like are moved, the alignment mark 193 is imaged by the head imaging camera 161, and the process of comparing the theoretical value with the error is repeated until the setting accuracy is within ± 2 μm. Can be When the setting accuracy is within ± 2 μm, any one of red (R), green (G), and blue (B) inks is actually supplied from the nozzle of the inkjet head 190 to the pixel shown in FIG. Part 14
1 is discharged. Specifically, the pixel portion 141 shown in FIG.
The ink is placed in the groove 141a.

As described above, one color filter substrate 1
When the ejection of the ink to 40 ends, the one color filter substrate 140 is removed from the Y-axis table 130. Then, another color filter substrate 140
Is placed on the Y-axis table 130, and alignment work of the apparatus main body and ejection of ink are performed. As described above, according to the present embodiment, there is no need to perform a nozzle ejection test after the alignment work of the apparatus as in the related art.
The production cost can be reduced without the need for a test substrate or the like, and the inclination angle and the like of the inkjet head 190 can be adjusted in a short time.

In the present embodiment, the head imaging camera 161 is installed at the center in the short side direction of the Y-axis table 130, but is not limited to this.
May be provided at one of the corners. Furthermore, the present invention is not limited to the above embodiment, and various changes can be made without departing from the scope of the claims. The configuration of the above embodiment may omit a part of the configuration,
It can be changed to any other combination not described above.

The filter manufacturing apparatus and the filter manufacturing method of the present invention are not limited to the manufacture of a color filter for a liquid crystal cover device. For example, the present invention is applied to the manufacture of an EL (electroluminescence) display element. You can also. An EL display element has a configuration in which a thin film containing a fluorescent inorganic or organic compound is sandwiched between a cathode and an anode, and electrons and holes are injected into the thin film and recombined to form excitons. (Exciton), and emits light using light emission (fluorescence / phosphorescence) when the exciton is deactivated. Of the fluorescent materials used in such EL display elements, a material exhibiting red, green and blue emission colors is inkjet-patterned on an element substrate such as a TFT using the manufacturing apparatus or the manufacturing method of the present invention. A self-luminous full-color EL display element can be manufactured.

The EL display device manufactured by using the present invention is as follows.
The present invention can be applied to a low-information field such as a segment display and a simultaneous display of a still image with simultaneous simultaneous light emission, for example, pictures, characters, labels, and the like, or a light source having a point, line, or surface shape. Further, by using an active element such as a TFT, such as a passively driven display element, for driving, a full-color display element having high luminance and excellent responsiveness can be obtained. The range of the filter in the present invention includes the substrate of such an EL display element.

The ink jet head 190 described as an example in the embodiment of the present invention can discharge one type of ink among R, G, and B. Alternatively, it is of course possible to simultaneously eject three types of ink.

[0059]

According to the present invention, there is provided a filter manufacturing apparatus and a filter manufacturing apparatus capable of adjusting the relative positions of an ink arrangement area of a substrate and an ejection section without increasing the manufacturing cost and without having to confirm ejection with a simple structure. A filter manufacturing method and a filter manufactured by the manufacturing method can be provided.

[Brief description of the drawings]

FIG. 1 is a schematic view showing a color filter manufacturing apparatus according to an embodiment of the present invention.

FIG. 2 is a schematic view showing the color filter substrate of FIG. 1;

FIG. 3 is a schematic view showing a state of formation of a pixel portion of the color filter substrate of FIG. 2;

FIG. 4 is a schematic diagram illustrating a cross-sectional view taken along line AA ′ of the pixel unit in FIG. 3;

FIG. 5 is a schematic perspective view showing an arrangement state of a camera for imaging a substrate and a camera for imaging a head in FIG. 1;

FIG. 6 is a schematic plan view showing an arrangement state of the board imaging camera and the head imaging camera of FIG. 1;

FIG. 7A is a schematic plan view showing the ink jet head of FIG. 1; FIG. 2B is a schematic bottom view illustrating the inkjet head of FIG. 1.

FIG. 8 is a schematic view showing a glass mask.

9A is a schematic enlarged view showing a configuration of a mark indicated by reference numeral D formed on the glass mask of FIG.
FIG. 9B is a schematic enlarged view showing a configuration of a mark indicated by reference numeral E formed on the glass mask of FIG. 8. (C) FIG.
It is a schematic enlarged view which shows the structure of the mark shown with the code | symbol F formed on the glass mask of FIG.

FIG. 10A is a schematic enlarged view showing a configuration of a mark indicated by reference numeral G formed on the glass mask of FIG. 8;
FIG. 9B is a schematic enlarged view showing a configuration of a mark indicated by reference numeral H formed on the glass mask of FIG. 8.

FIG. 11 is a schematic view showing a main part of a conventional color filter manufacturing apparatus.

FIG. 12 is a schematic perspective view showing the state of the fixed camera for a substrate and the fixed camera for an inkjet head in FIG. 11;

13 is a schematic plan view showing an arrangement state of the fixed camera for a substrate and the fixed camera for an inkjet head in FIG. 11;

14 is a schematic perspective view showing an alignment mark of the color filter substrate of FIG.

FIG. 15 is a schematic diagram showing a state of formation and the like of two alignment marks 16a of the ink jet head of FIG. 11;

FIG. 16 is an explanatory diagram showing the state of the inclination of the inkjet head.

[Explanation of symbols]

 REFERENCE SIGNS LIST 100 color filter manufacturing apparatus 101 X-axis table drive unit 102 X-axis table control unit 103 Central control unit 104 Inkjet head drive unit 105 Inkjet head control unit 106 ... Camera drive unit for rotation center 107 ... Camera control unit for rotation center 108 ... Camera drive unit for head imaging 109 ... Camera control unit for head imaging 110 ... Color filter manufacturing device 110 ... Color filter manufacturing apparatus main body 111: substrate imaging camera driving unit 112: substrate imaging camera control unit 113: imaging data transmission unit 115: Y-axis table driving unit 116: Y-axis Table control unit 120 base unit 130 Y-axis table 140 substrate for color filter 140a Alignment mark 141 Pixel section 141a Groove section 160 Board imaging camera 161 Head imaging camera 170 Support column 180 X-axis table 181 Head holding section 190 ..Ink-jet head 191, Head Z-axis 192, Nozzle forming part 193, Alignment mark 194, Camera for rotation center 195, Glass mask

Claims (13)

[The claims] 1. A substrate having a plurality of ink arrangement regions, a head unit having a discharge unit for landing ink on the ink arrangement regions, and a substrate holding the head unit and the substrate, An adjustment holding unit for adjusting a relative position between the head unit and the ejection unit; a head rotating unit for rotating the head unit; a first imaging unit for specifying a position of the ejection unit; A filter manufacturing apparatus comprising: a second imaging unit for specifying the position of the filter; wherein the first imaging unit is provided in the adjustment holding unit. A head moving unit that holds the head unit and moves the head unit in a specific direction; a substrate moving unit that holds the substrate and moves the head unit in a direction orthogonal to the head moving unit; The filter manufacturing apparatus according to claim 1, wherein the first imaging unit is provided in the substrate moving unit. 3. The method according to claim 2, wherein the specific direction is an X-axis direction, a direction orthogonal to the head moving unit is a Y-axis direction, the head moving unit is an X-axis table, the substrate moving unit is a Y-axis table, The filter manufacturing apparatus according to claim 2, wherein: 4. The apparatus according to claim 1, wherein the first imaging unit is a camera for imaging a head unit, and the second imaging unit is a camera for imaging a substrate. Filter manufacturing equipment. 5. The filter manufacturing apparatus according to claim 4, wherein one head portion imaging camera is provided at a substantially central portion in a direction orthogonal to a moving direction of the Y-axis table. 6. The filter manufacturing apparatus according to claim 1, wherein a plurality of alignment marks are provided on the head portion and the substrate, respectively. 7. An alignment mark of the head portion,
The filter manufacturing apparatus according to claim 6, wherein the filter manufacturing apparatus is arranged at both ends in the longitudinal direction on the side of the head unit where the discharge unit is provided. 8. A head rotation unit for rotating the head unit and a Y-axis table rotation unit for rotating the Y-axis table are provided. The head rotation unit and the Y-axis table rotation unit are provided. 8. The head unit and the Y-axis table are rotated in a Z-axis rotation direction θ perpendicular to a plane formed by the X-axis direction and the Y-axis direction. 3. The filter manufacturing apparatus according to 1. 9. A plurality of rotation center cameras for specifying a rotation center of the head unit are arranged on the head unit,
The filter manufacturing apparatus according to any one of claims 1 to 8, wherein a plurality of marks to be taken by the plurality of rotation center cameras are provided on the glass mask. 10. The filter manufacturing apparatus according to claim 9, wherein the glass mask is provided with information for correcting the positions of the X-axis table and the Y-axis table. 11. The substrate for a color filter, wherein the ink placement area is provided in a matrix on the surface of the substrate for a color filter, wherein the ink is red (R), green (G) or blue ( The filter manufacturing apparatus according to any one of claims 1 to 10, wherein the ink is any one of the inks of (B). 12. A head having a required angle to adjust a distance between a plurality of ink disposition areas provided on a surface of a substrate and a distance between a plurality of ink ejection parts provided on a head. Rotating; moving a substrate moving unit that also has an imaging unit while holding the substrate; and imaging the alignment mark provided on the head unit with the imaging unit; Verifying the rotation angle of the head section based on the position information of the alignment mark. 13. A head part having a required angle to adjust a distance between a plurality of ink arrangement areas provided on a surface of a substrate and a distance between a plurality of ink ejection parts provided on a head part. Rotating; moving a substrate moving unit that also has an imaging unit while holding the substrate; and imaging the alignment mark provided on the head unit with the imaging unit; Verifying the rotation angle of the head unit based on the position information of the alignment mark.