JP2016110945A - Method of manufacturing organic el display panel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method of manufacturing an organic EL display panel that corrects positional displacement of a landing position of ink droplets caused by local distortion of a sub pixel pattern.SOLUTION: A method of manufacturing an organic EL display panel prepares an EL substrate on which plural coating scheduled areas are formed in a matrix form so that liquid droplets of ink containing organic light emitting material or high-performance material solved in solvent will be jetted from plural nozzles 423 and coated on the plural coating scheduled areas, and jetting the liquid droplets to the respective coating scheduled areas so as to correct the positional displacement by referring to positional displacement information representing the positional displacements of landing positions of liquid droplets from a target position. The positional displacement information is achieved by preparing a substrate 30 for measurement on which plural measurement cells 33 are formed in a matrix form in conformity with an arrangement pattern common to the arrangement pattern of the plural coating scheduled areas, jetting droplets from the plural nozzles 423 onto the substrate 30 for measurement, and measuring the positional displacements in the line direction between the respective reference positions of the plural measurement cells 33 and the landing positions of the corresponding droplets in a lump.SELECTED DRAWING: Figure 11

Description

  The present invention relates to a method for manufacturing an organic EL display panel, and more particularly to a manufacturing method using an inkjet method.

  In recent years, organic EL (Electro-Luminescence) display panels have been actively developed. The organic EL display panel has a configuration in which a light emitting layer and a functional layer for causing the light emitting layer to emit light are laminated between a pixel electrode and a common electrode. As a method for forming these light-emitting layers and functional layers, a method of applying an organic light-emitting material for forming a light-emitting layer or an ink containing a functional material for forming a functional layer onto a base substrate by an inkjet method or the like (application method) (For example, Patent Document 1).

  In the case where an organic EL display panel is formed by applying ink to a substrate using inkjet, ink droplets are applied to the inside of each of a plurality of application scheduled areas partitioned for each subpixel by a bank. In order to obtain a functional layer having performance, it is important that the functional layer formed in each application planned region has a desired film thickness. For this purpose, it is necessary to accurately control the amount of ink applied to each application planned area, and each of the ink droplets ejected from a plurality of nozzles provided in the inkjet head is within the target application area. It is necessary to control so that it will land accurately. When the substrate is displaced on the stage, or when the inkjet head and the substrate are relatively displaced, such as when the substrate itself is stretched, contracted, or distorted as a whole, The landing positions of the ink droplets to be shifted are also shifted. Therefore, conventionally, a method has been adopted in which an alignment mark provided on the peripheral portion of the substrate is read outside the image display scheduled portion and a relative positional deviation between the substrate and the inkjet head is corrected.

JP 2009-54608 A

The pixel electrode or bank application planned area is formed for each sub-pixel by patterning using a mask. At this time, the operation error of the apparatus for fixing the frame of the mask and the solid difference of the apparatus itself are formed. In some cases, local distortion, elongation, shrinkage, or the like occurs in the formed subpixel pattern.
However, in the method of Patent Document 2, a shift caused by elongation, shrinkage, or distortion that occurs uniformly over the entire base substrate, or a shift between the stage on which the base substrate is placed and the base substrate (vertical direction, horizontal direction). , In the rotational direction), these deviations can be corrected. However, the deviation cannot be corrected for distortion, elongation or shrinkage locally generated in the base substrate.

In recent years, with the increase in definition of organic EL display panels, the size of subpixels has become smaller. Therefore, the necessity for appropriately correcting such a shift is increasing.
An object of the present invention is to provide a method for manufacturing an organic EL display panel that can correct a deviation in landing position of an ink droplet due to local distortion, expansion, and contraction of a subpixel pattern.

  An organic EL display panel manufacturing method according to one embodiment of the present invention includes: an ink in which an organic light emitting material or a functional material is dissolved in a solvent; and the ink is applied by discharging droplets of the ink from a plurality of nozzles. A target position of a landing position of the ejected liquid droplets is prepared by preparing an EL substrate having a partition layer formed in a matrix in a display scheduled portion where a plurality of planned application regions to be displayed are to display an image With reference to misalignment information indicating misalignment from the nozzle, the nozzle having misalignment among the plurality of nozzles corresponds to each of the planned application regions of the plurality of nozzles so as to correct the misalignment. The droplets are ejected from the nozzles to each of the planned application areas, the ink is applied to the predetermined application area, and the solvent of the applied ink is dried. And a manufacturing method of an organic EL display panel in which a light emitting layer containing the organic light emitting material or a functional layer containing the functional material is formed in the planned application region, wherein the misregistration information includes the plurality of application information. Preparing a measurement substrate in which a plurality of measurement cells are formed in a matrix with an arrangement pattern common to the arrangement pattern of the planned region, and discharging the droplets from the plurality of nozzles on the measurement substrate; It is obtained by measuring the positional deviation in the row direction between the reference position of each of the plurality of measurement cells and the landing position of the corresponding droplet at a time.

According to the method for manufacturing an organic EL display panel according to one aspect of the present invention, when applying ink to a predetermined application area of an EL substrate, each application schedule is referred to by referring to positional deviation information stored in the storage unit. Ink droplets are ejected from the nozzles of the ink-jet head so as to correct the positional shift related to the measurement cell corresponding to the region.
Thereby, it is possible to perform the positional deviation correction of the ink droplet corresponding to the local distortion of the arrangement pattern of the application region in the surface of the EL substrate.

Further, since the positional deviation can be calculated based on the positional information (coordinate data) between the reference position of the measurement cell and the corresponding ink landing position in the same image, the obtained positional deviation information is used as the imaging apparatus. Not affected by the reproducibility of the operation.
Therefore, ink droplets can be landed more reliably in the intended application region, and the film thickness of the light emitting layer and functional layer can be made more uniform between subpixels, and color mixing can be suppressed. Thus, a higher quality organic EL display panel can be manufactured.

It is a schematic plan view which shows the arrangement form of the sub pixel in the organic electroluminescence display panel which concerns on Embodiment 1 of this invention. It is a schematic cross section which shows the AA cross section of FIG. It is a fragmentary sectional view which shows typically a part of manufacturing process of the organic electroluminescence display panel which concerns on Embodiment 1 of this invention. (A) is a fragmentary sectional view which shows the state in which the TFT layer was formed on the base material. (B) is a partial cross-sectional view showing a state in which an interlayer insulating layer is formed on the TFT layer. (C) is a partial cross-sectional view showing a state in which a pixel electrode material layer is formed on an interlayer insulating layer. (D) is a fragmentary sectional view showing a state where a hole injection material layer is formed on the pixel electrode material layer. (E) is a fragmentary sectional view showing a state where a pixel electrode and a hole injection layer are formed. (F) is a fragmentary sectional view showing the state where the first bank material layer is formed on the hole injection layer and the interlayer insulating layer. FIG. 4 is a partial cross-sectional view schematically showing a part of the manufacturing process of the organic EL display panel continued from FIG. 3. (A) is a fragmentary sectional view which shows the state in which the 1st bank was formed on the positive hole injection layer and the interlayer insulation layer. FIG. 6B is a partial cross-sectional view showing a state in which the hole injection layer, the interlayer insulating layer, and the second bank material layer are formed on the first bank. (C) is a partial cross-sectional view showing a state in which a second bank is formed on the hole injection layer, the interlayer insulating layer, and the first bank. (D) is a fragmentary sectional view showing a state in which a hole transport layer is formed in a bank application planned region. (E) is a partial cross-sectional view showing a state in which a light emitting layer is formed on the hole transport layer in a bank application planned region. FIG. 5 is a partial cross-sectional view schematically showing a part of the manufacturing process of the organic EL display panel continued from FIG. 4. (A) is a fragmentary sectional view which shows the state in which the electron carrying layer was formed on the bank and the light emitting layer. (B) is a fragmentary sectional view showing a state where an electron injection layer is formed on the electron transport layer. (C) is a fragmentary sectional view which shows the state in which the common electrode was formed on the electron injection layer. (D) is a fragmentary sectional view which shows the state in which the sealing layer was formed on the common electrode. It is a schematic process drawing which shows the manufacturing process of the organic display panel which concerns on Embodiment 1 of this invention. It is a model perspective view which shows the main structures of an inkjet apparatus. It is a functional block diagram of an inkjet apparatus. It is a model bottom view of an inkjet head. It is a schematic cross section of a sub head. FIG. 3 is a schematic plan view showing a positional relationship between a landing position of an ink droplet and a planned application area when ink is applied to an EL substrate in an initial mode in the method for manufacturing an organic EL display panel according to Embodiment 1 of the present invention. . In the manufacturing method of the organic EL display panel according to Embodiment 1 of the present invention, it is a schematic plan view showing a positional relationship between a landing position of an ink droplet and a planned application area when ink is applied to an EL substrate in a correction mode. . (A) is BB sectional drawing of FIG. (B) is a figure which shows typically the pulse signal applied to the piezoelectric element of a nozzle in an initial mode. (C) is a figure which shows typically the pulse signal applied to the piezoelectric element of a nozzle in correction mode. (D) is CC sectional drawing of FIG. It is a top view which shows typically a part of manufacturing method of the organic electroluminescent display panel which concerns on Embodiment 2 of this invention. (A) is a schematic top view which shows the state which ejected the ink droplet by the correction mode to the non-display plan part of EL board | substrate. (B) is a schematic plan view showing a state in which ink droplets are ejected in an additional correction mode within a planned application region of a display scheduled portion.

<< Outline of One Embodiment of the Present Invention >>
An organic EL display panel manufacturing method according to one embodiment of the present invention includes: an ink in which an organic light emitting material or a functional material is dissolved in a solvent; and the ink is applied by discharging droplets of the ink from a plurality of nozzles. A target position of a landing position of the ejected liquid droplets is prepared by preparing an EL substrate having a partition layer formed in a matrix in a display scheduled portion where a plurality of planned application regions to be displayed are to display an image With reference to misalignment information indicating misalignment from the nozzle, the nozzle having misalignment among the plurality of nozzles corresponds to each of the planned application regions of the plurality of nozzles so as to correct the misalignment. The droplets are ejected from the nozzles to each of the planned application areas, the ink is applied to the predetermined application area, and the solvent of the applied ink is dried. And a manufacturing method of an organic EL display panel in which a light emitting layer containing the organic light emitting material or a functional layer containing the functional material is formed in the planned application region, wherein the misregistration information includes the plurality of application information. Preparing a measurement substrate in which a plurality of measurement cells are formed in a matrix with an arrangement pattern common to the arrangement pattern of the planned region, and discharging the droplets from the plurality of nozzles on the measurement substrate; It is obtained by measuring the positional deviation in the row direction between the reference position of each of the plurality of measurement cells and the landing position of the corresponding droplet at a time.

According to the method for manufacturing an organic EL display panel according to one aspect of the present invention, it is possible to perform ink droplet misregistration correction corresponding to the local distortion of the arrangement pattern of the application region in the surface of the EL substrate.
Furthermore, since the positional information (coordinate data) between the reference position of the measurement cell and the corresponding ink landing position is measured at once rather than separately, the obtained positional deviation information is used for the reproducibility of the operation of the imaging device. Not affected.

Therefore, ink droplets can be landed more reliably in the intended application region, and the film thickness of the light emitting layer and functional layer can be made more uniform between subpixels, and color mixing can be suppressed. Thus, a higher quality organic EL display panel can be manufactured.
In a specific aspect of the method for manufacturing an organic EL display panel according to an aspect of the present invention, measurement of a positional deviation in the row direction between the reference position of each of the plurality of measurement cells and the landing position of the corresponding droplet is performed. Is characterized in that the measurement cell and the droplet landed on the measurement substrate are picked up by an image pickup device and performed on the picked up image.

Thus, after measuring the reference position of the measurement cell and the landing position of the ink droplet separately, the positional deviation obtained by actual measurement is compared with the case where the positional deviation in the row direction is calculated from both measured values. Is not affected by the reproducibility of the operation of the imaging apparatus.
Therefore, ink droplets can be landed more reliably in the intended application region, and the film thickness of the light emitting layer and functional layer can be made more uniform between subpixels, and color mixing can be suppressed. Thus, a higher quality organic EL display panel can be manufactured.

In a specific aspect of the method for manufacturing an organic EL display panel according to an aspect of the present invention, the reference position of the measurement cell is a line connecting the centers in the row direction of both end portions in the column direction of the measurement cell. It is characterized by being.
Thereby, even when the landing position of the ink droplet is slightly deviated from the reference position of the planned application area, the probability of landing in the planned application area can be increased.

In a specific aspect of the method for manufacturing an organic EL display panel according to an aspect of the present invention, the displacement of the ink landing position for each of the plurality of planned application areas in the application of the ink into the predetermined application area. This correction is performed by adjusting the discharge timing of the droplets from the nozzle.
Thereby, the positional deviation correction can be executed by a simple method of adjusting the timing of the pulse of the ejection signal applied to the nozzle.

In a specific aspect of the method for manufacturing an organic EL display panel according to an aspect of the present invention, the acquisition of the positional deviation information is performed for all the measurement cells corresponding to the planned application area formed in the planned display portion. It is characterized by performing about.
As a result, it is possible to detect local distortions in the arrangement pattern of the application-scheduled region over the entire display-scheduled portion, and to more comprehensively correct misalignment caused by the local distortions.

In a specific aspect of the method for manufacturing an organic EL display panel according to an aspect of the present invention, the organic EL display panel has pixel electrodes formed with an array pattern common to the application-scheduled region, and is used for the measurement. The cell is made of the same kind of material as that of the pixel electrode.
As a result, the measurement cell can be formed in the same process as the process of forming the pixel electrode, and it is not necessary to prepare another material or another manufacturing apparatus in order to form the measurement cell. Can help.

In a specific aspect of the method for manufacturing an organic EL display panel according to an aspect of the present invention, the measurement substrate includes a liquid-repellent layer that is disposed above the plurality of measurement cells and has a flat upper surface. The droplets are ejected so as to land on the liquid-repellent layer.
Thereby, since the ink droplets that have landed on the measurement substrate do not get wet and spread, the landing positions of the ink droplets can be easily specified.

In a specific aspect of the method for producing an organic EL display panel according to an aspect of the present invention, the liquid repellent layer is made of the same material as that for forming the partition wall layer.
Accordingly, the liquid repellent layer can be formed in the same step as the step of forming the partition wall layer, and it is not necessary to prepare another material or another manufacturing apparatus in order to form the liquid repellent layer. Therefore, it can contribute to cost control.

  In a specific aspect of the method for producing an organic EL display panel according to an aspect of the present invention, the patterning of the coating application region and the measurement cell is performed using a common mask, and each time the mask is replaced, The measurement substrate is newly created, and the measurement of the displacement is newly performed using the newly created measurement substrate, and the newly measured displacement information is stored in the storage unit. The positional deviation information is updated.

As a result, it is possible to cope with the distortion of the arrangement pattern of the planned application area due to the defect of the mask.
In a specific aspect of the method for manufacturing an organic EL display panel according to an aspect of the present invention, each time the mask is maintained, the measurement substrate is newly created, and the newly created measurement substrate The positional deviation information stored in the storage unit is updated with the newly measured positional deviation information.

Thereby, when a defect occurs in the mask during the maintenance of the mask, it is possible to cope with the distortion of the array pattern of the planned application area due to the defect.
In a specific aspect of the method for manufacturing an organic EL display panel according to an aspect of the present invention, each time a predetermined number of inks are applied to the EL substrate, the measurement substrate is newly created. The positional deviation information stored in the storage unit is updated with the newly measured positional deviation information by newly measuring the positional deviation using the created measurement substrate.

As a result, when a defect occurs in the mask due to fatigue over time or adhesion of dust or the like that occurs in the mask as the number of manufactured organic EL display panels increases, the distortion of the arrangement pattern of the planned application area due to the defect occurs. Can respond.
In a specific aspect of the method for manufacturing an organic EL display panel according to an aspect of the present invention, the display scheduled portion is disposed at a central portion of a main surface on the image display side of the EL substrate, and the display scheduled portion A non-display scheduled portion where no image is displayed is arranged adjacent to the column direction, and after the preparation of the EL substrate, prior to the application of the ink into the application planned region, When the droplets are ejected in the correction mode to a plurality of application scheduled areas located at both ends in the row direction among the application scheduled areas belonging to the correction reference row that is a row of the plurality of application scheduled areas close to each other. At the same timing, the liquid droplets are discharged to the non-display-scheduled part without discharging the liquid droplets to the display-scheduled part, and the landing positions of the liquid droplets discharged to the non-display-scheduled part , See above correction In the application of the ink into the plurality of planned application areas formed in the planned display portion, the position on the measurement substrate is measured. The liquid droplets are ejected from the nozzle in an additional correction mode in which the liquid droplets are ejected so as to correct both the displacement and the positional deviation measured in the non-display scheduled portion.

  In this way, the ink droplets are ejected to the non-display planned portion, the positional deviation in the row direction between the landing position and the reference position of the corrected reference row is measured, and the local direction in the row direction of each organic EL display panel is measured. Elongation and shrinkage can be detected. Then, by discharging ink droplets so as to correct the detected elongation and shrinkage, it is possible to more reliably target the application according to the local elongation and shrinkage in the row direction of each organic EL display panel. Ink droplets can be landed in the area, and the film thickness of the light-emitting layer and functional layer can be made more uniform between the sub-pixels, and color mixing can be suppressed, resulting in higher-quality organic EL display Panels can be manufactured.

In a specific aspect of the method for manufacturing an organic EL display panel according to an aspect of the present invention, the correction of the positional deviation measured in the non-display scheduled portion is performed by landing of the liquid droplets ejected on the non-display scheduled portion. The positional deviation is applied to the planned application area belonging to the same column as the corresponding planned application area in the correction reference row.
When the positional deviation is measured for each EL substrate, and the ink is applied in the area to be applied in the additional correction mode, when the expansion, contraction, distortion, etc. differ in each EL substrate, the positional deviation caused by these Can be additionally corrected for each EL substrate 10, so that ink droplets can be landed more reliably in the application region.

Thereby, since the film thickness of the light emitting layer and the functional layer in each subpixel is made more uniform, and the occurrence of color mixing can be further reduced, a higher quality organic EL display panel can be produced.
In a specific aspect of the method for manufacturing an organic EL display panel according to an aspect of the present invention, the measurement of the positional deviation in the non-display scheduled portion is performed for each EL substrate.

  As a result, the expansion and contraction of the EL substrate occurs only in the row direction and there is no expansion or contraction in the column direction, or in the case of an EL substrate having a long line bank in the column direction, By applying the misregistration correction to the planned application area belonging to the same column as the corresponding planned application area in the correction reference row, additional misregistration correction is performed for all the planned application areas in the display scheduled portion. It can be performed.

In a specific aspect of the method for manufacturing an organic EL display panel according to an aspect of the present invention, the ejection of the droplets to the non-display scheduled portion is performed on all the planned application regions belonging to the correction reference row. It is performed at the same timing as when the droplet is ejected in the correction mode.
Thereby, it is possible to detect not only the overall expansion and contraction in the row direction of the EL substrate but also the local extension and contraction in the row direction, and more accurate misalignment correction can be performed.

Hereinafter, a specific example is shown about embodiment and modification of this invention, and a structure, an effect | action, and an effect are demonstrated.
Note that the embodiment and the modification used in the following description are examples used for easy understanding of the configuration, operation, and effect according to one aspect of the present invention, and the present invention is not limited to the essential part. The present invention is not limited to the following embodiments and modifications.

Embodiment 1
[1. Schematic configuration of organic EL display panel]
As an example of a method for manufacturing an organic EL display panel according to an aspect of the present invention, a manufacturing method according to Embodiment 1 and a configuration of the organic EL display panel according to Embodiment 1 manufactured by the manufacturing method are illustrated in FIGS. This will be described with reference to FIG.

  FIG. 1 is a schematic plan view showing a schematic configuration of the organic EL display panel 100. As shown in FIG. 2, the organic EL display panel 100 according to this embodiment employs a so-called line bank structure. That is, the organic EL display panel 100 includes a plurality of first banks (first partition wall layers) 15a each having a length in the X-axis direction and spaced from each other in the Y-axis direction, A plurality of second banks (second partition wall layers) 15b that are long in the direction and are spaced apart from each other in the X-axis direction.

One of the light emitting elements 1R, 1G, and 1B is formed in each region defined by the pair of adjacent first banks 15a and the pair of adjacent second banks 15b, and each of the light emitting elements 1R, 1G, and 1B is formed. It is a subpixel. The length of each subpixel in the Y direction is, for example, 300 μm.
The light emitting element 1R emits red (R) light, the light emitting element 1G emits green (G) light, and the light emitting element 1B emits blue (B) light. Three light emitting elements 1R, 1G, and 1B adjacent in the X direction constitute one pixel. Note that when there is no need to particularly limit the emission color, these light-emitting elements are collectively referred to as the light-emitting element 1.

The height of the first bank 15a is, for example, in the range of 40% to 70% of the height of the second bank 15b, and more preferably in the range of 50% to 55%. When there is no need to distinguish between the first bank 15a and the second bank 15b, they are collectively referred to as a bank (partition wall layer) 15.
2 is a cross-sectional view taken along line AA in FIG. The organic EL display panel 100 includes a substrate 11, an interlayer insulating layer 12, a pixel electrode 13, a hole injection layer 14, a bank 15 (only the second bank 15b is displayed in FIG. 3), a hole transport layer 16, The light emitting layer 17 (17R, 17G, 17B), the electron transport layer 18, the electron injection layer 19, the common electrode 20, and the sealing layer 21 are provided and have a laminated structure in which these are laminated. The substrate 11, the interlayer insulating layer 12, the electron transport layer 18, the electron injection layer 19, the common electrode 20, and the sealing layer 21 are formed in common for a plurality of pixels. In the present embodiment, the hole transport layer 16, the light emitting layer 17, and the electron transport layer 18 are organic light emitting functional layers and are formed by a coating method.

Next, the configuration of each part of the organic EL display panel 100 will be described.
<Board>
The substrate 11 includes a base material 111 that is an insulating material and a TFT (Thin Film Transistor) layer 112. In the TFT layer 112, a drive circuit (not shown) is formed for each subpixel. As a material for forming the base material 111, for example, glass is used. Specific examples of the glass material include alkali-free glass, soda glass, non-fluorescent glass, phosphate glass, borate glass, quartz glass, and the like.

<Interlayer insulation layer>
The interlayer insulating layer 12 is formed on the substrate 11. The interlayer insulating layer 12 is made of a resin material, and is for flattening a step on the upper surface of the TFT layer 112. As the resin material on which the interlayer insulating layer 12 is formed, for example, a positive photosensitive material is used. Examples of such photosensitive materials include acrylic resins, polyimide resins, siloxane resins, and phenol resins.

<Pixel electrode>
The pixel electrode 13 is made of a conductive material, and is formed on the interlayer insulating layer 12 for each subpixel. Since the organic EL display panel 100 according to the present embodiment is a top emission type, the pixel electrode 13 may be formed of a conductive material having light reflectivity. Examples of the conductive material having light reflectivity include metals. Specifically, Ag (silver), Al (aluminum), aluminum alloy, Mo (molybdenum), APC (silver, palladium, copper alloy), ARA (silver, rubidium, gold alloy), MoCr (molybdenum and chromium) Alloy), MoW (alloy of molybdenum and tungsten), NiCr (alloy of nickel and chromium), and the like can be used. Further, the pixel electrode 13 may have a laminated structure of the conductive material having the light reflectivity and the transparent conductive material. In this case, as the transparent conductive material, ITO (Indium Tin Oxide), IZO (Indium Zinc Oxide), ZnO (zinc oxide), or the like can be used.

Although not shown in the sectional view, a contact hole is formed in the interlayer insulating layer 12 for each subpixel. A TFT connection wiring is embedded in the contact hole, and the pixel electrode 13 is electrically connected to a drive circuit formed in the TFT layer 112 via the TFT connection wiring.
<Hole injection layer>
The hole injection layer 14 has a function of promoting injection of holes from the pixel electrode 13 to the light emitting layer 17. The hole injection layer 14 is made of, for example, a metal oxide and is disposed on the pixel electrode 13. The hole injection layer 14 is formed by, for example, a sputtering method. Examples of the metal oxide that is a material for forming the hole injection layer 14 include tungsten oxide (WOx), molybdenum oxide (MoOx), silver (Ag), chromium (Cr), vanadium (V), and nickel (Ni). An oxide such as iridium (Ir) can be used.

<Bank>
The bank 15 is formed on the hole injection layer 14 in a state where a part of the upper surface of the hole injection layer 14 is exposed and a peripheral region is covered. A region not covered with the bank 15 on the upper surface of the hole injection layer 14 (hereinafter referred to as “opening”) corresponds to a subpixel. That is, the bank 15 has a coating application region 15c provided for each subpixel.

  The bank 15 is made of, for example, an insulating organic material (for example, an acrylic resin, a polyimide resin, a novolac resin, a phenol resin, or the like). The bank 15 functions as a structure for preventing the applied ink from overflowing when the light emitting layer 17 is formed by a coating method. When the light emitting layer 17 is formed by a vapor deposition method, the bank 15 is vapor deposited. It functions as a structure for mounting the mask. In the present embodiment, the bank 15 is made of a resin material, and for example, a positive photosensitive material can be used. Specific examples of such photosensitive materials include acrylic resins, polyimide resins, siloxane resins, and phenol resins.

<Hole transport layer>
The hole transport layer 16 has a function of transporting holes injected from the hole injection layer 14 to the light emitting layer 17 and is made of an organic material. As an organic material for forming the hole transport layer 16, polymer compounds such as polyfluorene and derivatives thereof, or polyarylamine and derivatives thereof can be used.

  The hole transport layer 16 is composed of triazole derivative, oxadiazole derivative, imidazole derivative, polyarylalkane derivative, pyrazoline derivative and pyrazolone derivative, phenylenediamine derivative, arylamine derivative, amino-substituted chalcone derivative, oxazole derivative, styrylanthracene derivative, It may be formed using fluorenone derivatives, hydrazone derivatives, stilbene derivatives, porphyrin compounds, aromatic tertiary amine compounds and styrylamine compounds, butadiene compounds, polystyrene derivatives, hydrazone derivatives, triphenylmethane derivatives, tetraphenylbenzine derivatives. . Particularly preferably, a porphyrin compound, an aromatic tertiary amine compound and a styrylamine compound may be used. In this case, the hole transport layer 16 is formed by a vacuum evaporation method.

<Light emitting layer>
The light emitting layer 17 includes an organic light emitting material, and is formed in the planned application region 15 c located above the pixel electrode 13. The light emitting layer 17 has a function of emitting light of an emission color corresponding to any of R, G, and B by recombination of holes and electrons.
Examples of the organic light emitting material included in the light emitting layer 17 include an oxinoid compound, a perylene compound, a coumarin compound, an azacoumarin compound, an oxazole compound, an oxadiazole compound, a perinone compound, a pyrrolopyrrole compound, a naphthalene compound, an anthracene compound, a fluorene compound, Fluoranthene compound, tetracene compound, pyrene compound, coronene compound, quinolone compound and azaquinolone compound, pyrazoline derivative and pyrazolone derivative, rhodamine compound, chrysene compound, phenanthrene compound, cyclopentadiene compound, stilbene compound, diphenylquinone compound, styryl compound, butadiene compound, Dicyanomethylenepyran compound, dicyanomethylenethiopyran compound, fluorescein compound, pyrylium Product, thiapyrylium compound, serenapyrylium compound, telluropyrylium compound, aromatic aldadiene compound, oligophenylene compound, thioxanthene compound, cyanine compound, acridine compound, metal chain of 8-hydroxyquinoline compound, metal chain of 2-bipyridine compound A fluorescent substance such as a chain of a Schiff salt and a group III metal, an oxine metal chain, or a rare earth chain can be used. In addition, a known phosphor such as a metal complex emitting phosphorescence such as tris (2-phenylpyridine) iridium can be used. The light emitting layer 17 is formed using polyfluorene or a derivative thereof, polyphenylene or a derivative thereof, a polymer compound such as polyarylamine or a derivative thereof, or a mixture of the low molecular compound and the polymer compound. Also good.

<Electron transport layer>
The electron transport layer 18 is provided on the light emitting layer 17 and the bank 15 in common to a plurality of pixels, and has a function of transporting electrons injected from the common electrode 20 to the light emitting layer 17. The electron transport layer 18 is formed using, for example, an oxadiazole derivative (OXD), a triazole derivative (TAZ), a phenanthroline derivative (BCP, Bphen), or the like.

<Electron injection layer>
The electron injection layer 19 is provided in common to a plurality of pixels on the electron transport layer 18 and has a function of promoting injection of electrons from the common electrode 20 to the light emitting layer 17. The electron injection layer 19 includes, for example, a low work function metal such as lithium, barium, calcium, potassium, cesium, sodium, and rubidium, a low work function metal salt such as lithium fluoride, and a low work function metal oxide such as barium oxide. It is formed using etc.

<Common electrode>
The common electrode 20 is provided on the electron injection layer 19 in common to a plurality of pixels. The common electrode 20 is formed of, for example, a light-transmitting material having conductivity such as ITO (indium tin oxide) or IZO (indium zinc oxide). By forming the common electrode 20 using a transparent conductive material, the light generated in the light emitting layer 17 can be extracted from the common electrode 20 side. In addition to the above, for example, MgAg (magnesium silver) can be used as the transparent conductive material used for the common electrode 20. In this case, light can be transmitted by setting the thickness of the common electrode 20 to about several tens of nm.

<Sealing layer>
A sealing layer 21 is provided on the common electrode 20. The sealing layer 21 prevents impurities (water, oxygen) from entering the common electrode 20, the electron injection layer 19, the electron transport layer 18, the light emitting layer 17, and the like from the opposite side of the substrate 11. It has a function to suppress deterioration of. Since the organic EL display panel 100 according to the present embodiment is a top emission type display panel, the material of the sealing layer 21 is a light transmissive material such as SiN (silicon nitride) or SiON (silicon oxynitride). Used.

<Others>
Although not shown in FIG. 3, a color filter or an upper substrate may be placed on the sealing layer 21 and bonded. By placing and bonding the upper substrate, it is possible to further protect the common electrode 20, the electron injection layer 19, the electron transport layer 18, the light emitting layer 17, and the like from impurities.

[2. Manufacturing method of organic EL display panel]
Next, an example of a method for manufacturing the organic EL display panel 100 will be described with reference to FIGS. 3 to 5 are partial cross-sectional views schematically illustrating the manufacturing process of the organic EL display panel 100, and FIG. 6 is a schematic process diagram illustrating the manufacturing process of the organic EL display panel 100.
First, as shown in FIG. 3A, a TFT layer 112 is formed on a substrate 111 to form a substrate 11 (step S1 in FIG. 6).

  Next, as shown in FIG. 3B, an interlayer insulating layer 12 is formed on the substrate 11 (step S2 in FIG. 6). In this embodiment, an acrylic resin that is a positive photosensitive material is used as the interlayer insulating layer resin that is a material of the interlayer insulating layer 12. The interlayer insulating layer 12 is formed by applying an interlayer insulating layer solution in which an acrylic resin, which is an interlayer insulating layer resin, is dissolved in an interlayer insulating layer solvent (for example, PGMEA) on the substrate 11, and then baking. Do. Firing is performed at a temperature of 150 ° C. or higher and 210 ° C. or lower for 180 minutes, for example.

Subsequently, as shown in FIG. 3C, a pixel electrode material layer 130 is formed on the interlayer insulating layer 12. The pixel electrode material layer 130 is formed to a thickness of about 150 [nm] by, for example, vacuum deposition or sputtering (step S3 in FIG. 6).
Next, as shown in FIG. 3D, the hole injection material layer 140 is formed on the pixel electrode material layer 130 (step S4 in FIG. 6). The hole injection material layer 140 is formed as a tungsten oxide layer by, for example, reactive sputtering.

Then, as shown in FIG. 3E, the pixel electrode material layer 130 and the hole injection material layer 140 are patterned by etching, so that the plurality of pixel electrodes 13 and the hole injection layer 14 partitioned for each subpixel are formed. It forms (step S5 of FIG. 6). In the present embodiment, the pixel electrode 13 is an anode.
Subsequently, as shown in FIG. 3F, a first bank resin, which is a material of the first bank 15a, is applied on the hole injection layer 14 and the interlayer insulating layer 12, and the first bank material layer 150a is applied. It forms (step S6 of FIG. 6). For example, a phenol resin, which is a positive photosensitive material, is used as the first bank resin. The first bank material layer 150a spins a solution obtained by dissolving a phenol resin, which is a resin for the first bank, in a solvent (for example, a mixed solvent of ethyl lactate and GBL) on the hole injection layer 14 and the interlayer insulating layer 12. It is formed by applying uniformly using a coating method or the like. Then, pattern exposure and development are performed on the first bank material layer 150a to form the first bank 15a, which is then baked to complete the first bank 15a (step S7 in FIGS. 4A and 6).

  Next, as shown in FIG. 4B, a second bank resin, which is a material of the second bank 15b, is applied on the hole injection layer 14, the interlayer insulating layer 12, and the first bank 15a, A two-bank material layer 150b is formed (step S8 in FIG. 6). As the second bank resin, a photosensitive material of a different type from the first bank resin (for example, a photosensitive material that is cured by light having a wavelength different from that of the first bank resin) is used.

The second bank material layer 150b is formed with a larger film thickness than the first bank material layer 150a. Then, pattern exposure and development are performed in the same manner as the first bank material layer 150a to form the second bank 15b, followed by baking to complete the second bank 15b (step S9 in FIGS. 4C and 6).
Thereby, a region to be coated with ink for forming the hole transport layer 16 and the light emitting layer 17, and a region to be coated 15 c serving as a region for forming the hole transport layer 16 and the light emitting layer 17 is defined. Firing of the first bank 15a and the second bank 15b is performed, for example, at a temperature of 150 ° C. to 210 ° C. for 60 minutes.

Note that the first bank 15a and the second bank 15b may be formed simultaneously using the same material. In that case, the first bank 15a is more than the second bank 15b by changing the exposure intensity and the exposure depth between the region where the first bank 15a is to be formed and the region where the second bank 15b is to be formed. Should be lower.
Further, in the bank 15 forming step, the surface of the bank 15 may be surface-treated with a predetermined alkaline solution, water, an organic solvent, or the like, or may be subjected to plasma treatment. This is performed for the purpose of adjusting the contact angle of the bank 15 with respect to the ink applied to the intended application region 15c, or for the purpose of imparting water repellency to the surface. Such a surface treatment may be performed only on the second bank 15b without being performed on the first bank 15a.

Next, after the ink containing the constituent material of the hole transport layer 16 is ejected from the nozzle 423 of the inkjet head 420 and applied onto the hole injection layer 14 in the application planned region 15c, Baking (drying) is performed to form the hole transport layer 16 (step S10 in FIG. 4D and FIG. 6).
Then, an ink containing the constituent material of the light emitting layer 17 is ejected from the nozzle 423 of the ink jet head 420 and applied onto the hole transport layer 16 in the application planned region 15c, and then baked (dried) to perform the light emitting layer. 17 is formed (FIG. 4E, step S11 in FIG. 6). At this time, in this embodiment, the upper surface of the light emitting layer 17 is located higher in the Z-axis direction than the upper surface of the first bank 15a, and the first bank 15a is covered with the light emitting layer 17.

Subsequently, as shown in FIG. 5A, the material constituting the electron transport layer 18 is formed on the light emitting layer 17 and the second bank 15b in common for each sub-pixel by vacuum deposition or sputtering. Then, the electron transport layer 18 is formed (step S12 in FIG. 6).
Next, as shown in FIG. 5B, the material constituting the electron injection layer 19 is formed on the electron transport layer 18 by a method such as a vapor deposition method, a spin coating method, or a casting method, and is applied to each subpixel. In common, the electron injection layer 19 is formed (step S13 in FIG. 6).

Then, as shown in FIG. 5C, a common electrode 20 is formed on the electron injection layer 19 by using a material such as ITO or IZO by a vacuum deposition method, a sputtering method, or the like (FIG. 6). Step S14). In the present embodiment, the common electrode 20 is a cathode.
Subsequently, as shown in FIG. 5D, a sealing layer 21 is formed on the common electrode 20 by using SiN as a material by sputtering, CVD (Chemical Vapor Deposition), or the like (FIG. 6). Step S15).

The organic EL display panel 100 is completed through the above steps.
A color filter or an upper substrate may be placed on the sealing layer 21 and bonded.
[3. Ink application by inkjet method]
Next, ink application by an inkjet method in forming the hole transport layer 16 and the light emitting layer 17 will be described.

<Configuration of Inkjet Device 1000>
First, the configuration of the ink jet apparatus 1000 used for ink application by the ink jet method will be described. FIG. 7 is a schematic perspective view showing a schematic configuration of a main part of the ink jet apparatus 1000. FIG. 8 is a functional block diagram of the ink jet apparatus 1000.
The ink jet device 1000 includes a work table 300, a head unit 400, a control device 500, and the like as main components.

  As illustrated in FIG. 8, the control device 500 includes a CPU 501, a storage unit 502 (including a large capacity storage unit such as an HDD), a display 503, and an input unit 504. Specifically, a personal computer (PC) can be used as the control device 500. The storage unit 502 stores a gantry unit 320 connected to the control device 500, a control program for driving the head unit 400, and the like. When the inkjet apparatus 1000 is driven, the CPU 501 performs predetermined control based on an instruction input by an operator through the input unit 504 and each control program stored in the storage unit 502.

(Work table)
As shown in FIG. 7, the work table 300 is a so-called gantry-type work table, and is disposed above the base 310 and the base 310 on which the EL substrate 10 that is the object of ink application is placed. And a long movable gantry 322. The EL substrate 10 is, for example, a substrate in the process of manufacturing the organic EL display panel 100, and after the planned application region 15c is formed, ink for forming the hole transport layer 16 or the light emitting layer 17 is applied. This is a substrate in a state before being applied (the state shown in FIGS. 4C and 4D), or a measurement substrate used for measuring an ink droplet landing position deviation described later. Further, for example, the EL substrate 10 may be a substrate in the middle of manufacturing an assembly of the organic EL display panels 100 so that the plurality of organic EL display panels 100 are divided after all layers are formed. . Also in this case, each application | coating scheduled area | region 15c formed in the upper surface 10a of EL substrate 10 becomes a long shape along the Y direction which is a short side direction of the upper surface 10a.

  The moving gantry 322 is bridged between a pair of guide shafts 312 a and 312 b arranged in parallel along the longitudinal direction of the base 310, so that the longitudinal direction of the moving gantry 322 is along the short direction of the base 310. Has been placed. The pair of guide shafts 312a and 312b are supported by columnar stands 311a, 311b, 311c, and 311d disposed at the four corners of the upper surface of the base 310.

  Column-shaped stands 311a, 311b, 311c, and 311d are disposed at the four corners of the upper surface of the base 310, respectively. A pair of guide shafts 312a and 312b are supported in parallel with each other along the longitudinal direction of the base 310 by these stands 311a, 311b, 311c and 311d. Between the guide shafts 312 a and 312 b, the movable frame 322 is bridged so that the longitudinal direction thereof is along the short direction of the base 310. Linear motors 321a and 321b are respectively attached to the longitudinal ends of the movable frame 322, and the linear motors 321a and 321b are attached to the guide shafts 312a and 312b, respectively. By driving the linear motors 321a and 321b, the movable frame 322 moves reciprocally along the longitudinal direction (X-axis direction) of the guide shafts 312a and 312b.

  A guide groove 322a is formed in the movable frame 322 along the longitudinal direction (Y-axis direction), and a fine rack is formed in the guide groove 322a along the longitudinal direction. An L-shaped base 323 is attached to the movable base 322, and a servo motor 324 is disposed on the base 323. A gear (not shown) is attached to the servo motor 324, and the gear meshes with the rack of the guide groove 322a. As a result, when the servo motor 324 is driven, the pedestal 323 precisely moves reciprocally along the longitudinal direction of the movable frame 322 by a so-called pinion rack mechanism.

The linear motors 321a and 321b and the servo motor 324 are controlled and driven by the control device 500 connected via the communication cables 601 and 602, respectively.
(Head 400)
The head unit 400 includes a main body unit 410 and an inkjet head 420. The main body portion 410 is fixed to the pedestal 323 of the gantry portion 320, and the ink jet head 420 is attached to the main body portion 410. As a result, the head moves in conjunction with the movement in the longitudinal direction (X-axis direction) along the guide shafts 312a and 312b of the moving base 322 and the movement in the short direction (Y direction) along the moving base 322 of the base 323. The part 400 is movable in the longitudinal direction and the lateral direction of the base 310. The main body 410 also has a built-in discharge controller 430 that includes a microcomputer that controls the operation of the inkjet head 420 in response to a control signal from the control device 500, and the discharge controller 430 connects the communication cable 603. Via the control device 500.

  The inkjet head 420 includes a base portion 421 that is a long member extending in the short direction of the base 310, and a plurality of sub heads 422 provided on the lower surface side of the base portion 421. FIG. 9 is a schematic bottom view of the inkjet head 420. On the lower surface side of the inkjet head 420, a plurality of elongate sub-heads 422 are arranged along the longitudinal direction of the base portion 421 (that is, the short direction of the base 310 and the Y-axis direction in FIG. 7). ing. In each sub head 422, a plurality of nozzles 423 are arranged at equal intervals along the longitudinal direction of the sub head 422. Each sub head 422 is fixed to the base portion 421 at the center portion in the longitudinal direction of the sub head 422, and is relatively rotatable with respect to the base portion 421 on a plane parallel to the upper surface of the base 310 around the center portion. In the ink jet apparatus 1000, the sub head 422 rotates relative to the base portion 421, thereby adjusting the interval (pitch) of the nozzles 423 along the longitudinal direction (Y axis direction) of the ink jet head 420 during ink application. it can. The rotation of the sub head 422 is performed when the control device 500 controls and drives a servo motor 411 (see FIG. 8) provided in the main body 410 via the discharge controller 430.

  FIG. 10 is a schematic cross-sectional view of the sub head 422. In the sub head 422, a plurality of nozzles 423 for discharging ink from the discharge ports 423a on the lower surface side are provided. Further, on the upper surface side of the sub head 422, piezo elements 423b are arranged at positions corresponding to the respective discharge ports 423a, and liquid chambers 423d are arranged below the piezo elements 423b via vibration plates 423c.

  Each piezo element 423b is connected to the control device 500 via the ejection control unit 430, and deforms the diaphragm 423c in accordance with a signal from the control device 500. The vibration plate 423c is a plate-like member common to the nozzles 423, is deformed by the piezo element 423b, and applies pressure to the liquid chamber 423d. The liquid chamber 423d is filled with ink supplied from an ink tank (not shown) via an infusion tube 604 (see FIG. 7), and when pressure is applied by the diaphragm 423c, ink is discharged from the ejection port 423a. Discharged. That is, in the ink jet apparatus 1000, the control apparatus 500 can independently control the ink discharge amount and the discharge timing of each nozzle 423.

Strictly speaking, the ink droplet is ejected from the ejection port 423a of the nozzle 423, but hereinafter, it is expressed that the ink droplet is ejected from the nozzle 423 unless otherwise specified.
(Imaging device)
The imaging device 700 is a CCD camera, for example, and is connected to the control device 500 via a communication cable 605. The imaging device 700 images the upper surfaces of the EL substrate 10 and the measurement substrate 30 and transmits the imaging data to the control device 500. The imaging device 700 is attached to the main body 410, and the CPU 501 of the control device 500 controls and drives the linear motors 321 a and 321 b and the servo motor 324 so that the imaging device 700 is fixed to the base 323 via the main body 410. The device 700 can be moved in the row and column directions.

  In this embodiment, the imaging device 700 is attached to the main body 410 and is movable in the row direction and the column direction together with the main body 410. However, the present invention is not limited to this, and the imaging device is an inkjet device. Another independent device may be used. In that case, driving means for moving the imaging device in the row direction and the column direction may be separately provided so that the imaging device can capture the upper surfaces of the EL substrate 10 and the measurement substrate 30.

[4. Ink droplet landing position deviation correction]
In general, nozzles of an ink jet head have a kind of wrinkles peculiar to individual nozzles such that ink droplets are deflected and ejected when ink droplets are ejected due to factors such as manufacturing errors. For this reason, when ink droplets are ejected from a plurality of nozzles provided in the ink jet head, generally, variations occur in the ink ejection direction, and as a result, variations occur in the landing positions of the ink droplets. If the ejected ink droplets land outside the intended application area, the amount of ink applied in the application area is reduced, and the film thickness of the formed layer is reduced. This causes variations in quality among pixels. In addition, if the ink droplets deviate significantly from the intended application area and land within the adjacent application area, this may cause color mixing. Need to be corrected.

Hereinafter, ink droplet landing position deviation correction in the method of manufacturing the organic EL display panel according to Embodiment 1 will be described.
(Overview)
In the method of manufacturing the organic EL display panel according to the present embodiment, when applying ink to the EL substrate 10, the positional deviation correction information acquired in advance and stored in the storage unit 502 is referred to. Ink droplets are ejected from the nozzles 423 into the planned application region 15c so as to correct the misalignment indicated by. The positional deviation information is acquired as follows.

First, ink droplets are ejected to the measurement substrate on which the measurement cells are formed in the same pattern as the arrangement pattern of the application planned region 15 c on the EL substrate 10 using the inkjet apparatus 1000.
Next, the imaging substrate 700 images the measurement substrate on which the ink droplets are ejected.
Then, in the captured image, the displacement direction (position displacement direction) and distance (position displacement amount) in the row direction (printing direction) between the reference position of the measurement cell and the landing position of the corresponding ink droplet are measured. To do. The measurement is performed for all the measurement cells, and the data of the positional deviation amount and the positional deviation direction measured for all the measurement cells is stored in the storage unit 502 as positional deviation information. Hereinafter, the positional deviation amount and the positional deviation direction are simply referred to as “positional deviation”.

Hereinafter, the ink droplet landing position deviation correction in the present embodiment will be described in more detail.
(Measurement board)
FIG. 11 is a schematic plan view illustrating a state in which the ink droplets ejected from the nozzles 423 to the measurement substrate 30 have landed on the measurement substrate 30 and are imaged by the imaging device 700. FIG. 13A is a schematic cross-sectional view of the measurement substrate 30 taken along line BB in FIG.

  As shown in FIG. 13A, the measurement substrate 30 includes a base material 31, a plurality of measurement cells 33 formed on the base material 31, and a liquid repellent covering the base material 31 and the measurement cells 33. And a sex layer 35. Here, “liquid repellency” means low affinity for ink. Since the measurement substrate 30 has the liquid-repellent layer 35, when the ink droplets land on the measurement substrate 30, the ink does not spread out and the landing position of the ink droplets can be easily observed with the imaging device. There are advantages.

  In this embodiment, the same material (same type) as that of the base material 111 is used for the base material 31, and the same (same type) as that of the pixel electrode 13 (pixel electrode material layer 130) is used for the measurement cell 33. ) Material is used, and the liquid repellent layer 35 is made of the same (same type) material as the first bank 15a (first bank material layer 150a) or the second bank 15b (second bank material layer 150b). It is used. The measurement cell 33 is formed of the same material as the pixel electrode 13 using the same mask and the same formation method.

  As shown in FIG. 11, the measurement substrate 30 includes a plurality of measurement cells 33 formed in a matrix. In FIG. 11, a part of the plurality of measurement cells 33 belonging to the four columns Ra, Rb, Rc, and Rd is shown, and the measurement cells 33 belonging to the columns Rb and Rc are arranged in the row direction. The positions are not aligned and the arrangement is shifted. That is, in the column Rb and the column Rc, there is a distortion in the arrangement pattern of the measurement cells 33. As shown in FIG. 13A, a liquid repellent layer 35 is uniformly formed on the measurement cell 33, but the liquid repellent layer 35 is sufficiently thin. 11, the lower measurement cell 33 is seen through. In the figure, the measurement cell 33 is indicated by a solid line.

  In the method for manufacturing the organic EL display panel 100 according to the present embodiment, the same mask is used for patterning the pixel electrodes 13 and forming the coating application region 15c. The measurement cell 33 and the pixel electrode 13 are patterned using the same mask. That is, the same mask is used for patterning the measurement cell 33 and forming the planned application region 15c. Here, the distortion of the arrangement pattern of the measurement cells 33 shown in FIG. 11 is caused by a defect of the mask. Therefore, when the bank 15 is formed and the planned application region 15c is formed, as shown in FIG. 12, the measurement cell 33 array pattern (the array pattern of the pixel electrodes 13) is arranged in the array of the planned application region 15c. As a result, distortion of the arrangement pattern common to the above occurs. In FIG. 11, the design measurement cell 33 </ b> D assumed when there is no defect in the mask and there is no distortion in the array pattern in the columns Rb and Rc is indicated by a broken line. In the column Ra and the column Rd, there is no distortion in the arrangement pattern, and the arrangement of the design measurement cell and the actual measurement cell is the same, so the illustration of the design measurement cell is omitted. Yes.

Note that the distortion of the arrangement pattern of the measurement cells 33 in FIG. 11 and the distortion of the arrangement pattern of the pixel electrode 13 and the application scheduled region 15c in FIG.
In addition, although it does not specifically limit that the base material 31, the pixel electrode 13, and the liquid repellent layer 35 are formed with the same material as used for manufacture of the organic electroluminescence display panel 100, it is like this In addition, since the measurement substrate 30 is formed using the same material used for manufacturing the organic EL display panel 100, it is not necessary to prepare another material for forming the measurement substrate 30. Therefore, there is an advantage that the material cost and the troublesomeness of material management can be reduced. Further, if the measurement substrate has a flat layer having liquid repellency on the uppermost surface, a TFT layer, an interlayer insulating layer, a hole injection layer, and the like are provided below the liquid repellant layer. May be. That is, an intermediate product in the state of manufacturing the organic EL display panel 100, for example, an intermediate product in the state shown in FIG. 3F or FIG. 4B may be used as the measurement substrate. In this way, in the production line of the organic EL display panel 100, one intermediate product can be extracted and used as a measurement substrate. Accordingly, it is not necessary to stop the production line of the organic EL display panel 100 or to prepare another production line for forming the measurement substrate in order to form the measurement substrate. It can contribute to the suppression of the deterioration of sex.

(Acquisition of misalignment information)
Next, a method for acquiring misregistration information will be described.
First, the measurement substrate 30 is set in the ink jet apparatus 1000. At this time, alignment marks M (see FIG. 14) may be formed in advance at the four corners of the measurement substrate, and the alignment may be adjusted using the alignment marks.

Next, ink droplets are discharged onto the measurement substrate 30 from the nozzles 423 of the inkjet head 420 while scanning the measurement substrate 30 with the inkjet head 420 in the row direction (X-axis direction).
Subsequently, the measurement substrate 30 on which the ink droplets are ejected is imaged by the imaging device 700. At this time, as in the case of applying ink droplets, the CPU 501 of the control device 500 controls and drives the linear motors 321a and 321b and the servo motor 324, whereby the imaging device 700 fixed to the pedestal 323 is measured. With respect to all the measurement cells 33 formed in the region corresponding to the display scheduled portion 10b (see FIGS. 14A and 14B) on the measurement substrate 30 by moving in the row direction and the column direction. Take an image. Then, in the captured image, for each measurement cell 33, a shift in the row direction (distance and shift direction) between the reference position of the measurement cell 33 and the landing position of the corresponding ink droplet is measured. Here, the corresponding ink droplet means an ink droplet ejected from the nozzle 423 so as to land in the area of the measurement cell 33 to be measured. The reference position of the measurement cell 33 is a center line connecting the centers in the row direction of both end portions in the column direction of the measurement cell 33. The ink droplet landing position is, for example, the center of the area when the ink droplet landed on the upper surface of the liquid repellent layer 35 of the measurement cell 33 (hereinafter referred to as “landing ink”) is viewed in plan. Alternatively, it may be an intersection of a line connecting both ends in the row direction and a line connecting both ends in the column direction. In the cross-sectional view shown in FIG. 13A, the amount of misalignment between the reference position XDa of the measurement cell 33a and the landing position Pa of the corresponding landing ink Ia is La, and the misalignment direction is the printing direction. It is the direction upstream (−X direction). The amount of positional deviation between the reference position XDb of the measurement cell 33b and the landing position Pb of the corresponding landing ink Ib is Lb, and the positional deviation direction is the −X direction. The amount of positional deviation between the reference position XDc of the measurement cell 33c and the landing position Pc of the corresponding landing ink Ic is Lc, and the positional deviation direction is the −X direction. The amount of positional deviation between the reference position XDd of the measurement cell 33d and the landing position Pd of the corresponding landing ink Id is Ld, and the positional deviation direction is the −X direction. In FIG. 11 and FIG. 13A, the landing inks Ia, Ib, Ic, and Id are all ejected from the nozzle 423s.

The positional deviation amount and the positional deviation direction data measured for all the measurement cells 33 by the method described above are stored in the storage unit 502 as positional deviation information.
In measuring the deviation in the row direction between the reference position of the measurement cell 33 and the landing position of the corresponding ink droplet, when ejecting the ink droplet from the nozzle 423 of the inkjet head 420 onto the measurement substrate 30, Although not particularly limited, in the present embodiment, ink droplets are ejected toward the designed reference position of the measurement cell 33D. Here, ejecting ink droplets toward the reference position of the design measurement cell 33D is based on the assumption that all nozzles 423 of the inkjet head 420 are free of wrinkles (no variation in ejection direction). This means that the ink droplets are ejected from each nozzle 423 at the timing when the ink droplets land on the reference position of the designed measurement cell 33D. Such a method of ejecting ink droplets aiming at the designed reference position of the measurement cell 33D is hereinafter referred to as “initial mode”.

For example, since the nozzle 423s has a spear that deflects and discharges ink droplets upstream in the printing direction, the landing inks Ia, Ib, Ic, and Id are all designed reference positions of the measurement cell 33D. Landing is made at a landing position (Pa, Pb, Pc, Pd) shifted to the upstream side in the printing direction from (XDa, XDb, XDc, XDd).
Further, since the measurement cells 33a and 33d coincide with the design measurement cell arrangement, the shift amounts are substantially equal here, and La and Ld are approximately equal.

(Position correction)
FIG. 13B is a diagram schematically illustrating a pulse signal applied to the piezo element 423b of the nozzle 423s when ink droplets are ejected in the initial mode. FIG. 13C schematically shows a pulse signal applied to the piezo element 423b of the nozzle 423s when ink droplets are ejected in the correction mode for correcting the positional deviation included in the obtained positional deviation information. It is. FIG. 12 is a schematic plan view showing a state where ink droplets ejected in the correction mode have landed on the EL substrate 10. FIG. 13D is a schematic cross-sectional view of the EL substrate 10 taken along the line CC in FIG. 12 and 13 (d) show a state before the landed ink spreads wet.

  In FIG. 13B, for the sake of simplicity, the pulse timing and the reference position (XDa, XDb, XDc, XDd) of the design measurement cell are shown in a line. The pulse is applied upstream from the reference position of the measurement cell for the time required for the ink droplet to fly (fall) from the discharge port 423a of the nozzle 423 to the upper surface of the measurement substrate 30. .

  In the correction mode, the position shift correction is performed by shifting the timing of applying the pulse signal to the piezo element 423b from the initial mode by the time required for the inkjet head to move the distance corresponding to the position shift amount. Specifically, for example, when an ink droplet ejected toward the measurement cell 33b lands on the landing position Pb upstream of the reference position XAb in the printing direction, in order to land on the reference position XAb In the correction mode, when the moving speed of the inkjet head is v, as shown in FIG. 13C, the time is shifted backward by a time tb such that tb = Lb / v from the timing of applying the pulse signal in the initial mode. At this timing, a pulse signal is applied to the piezo element 423b of the nozzle 423s. As a more specific example, when v = 50 mm / sec and Lb = 5 μm, tb = 0.1 μsec.

  By discharging ink droplets in the correction mode to the EL substrate 10 in this way, the positional deviation is corrected, and the discharged ink droplets land at a position closer to the reference position XAb. Specifically, for example, as shown in FIG. 13D, the landing position of the landing ink IKb is closer to the reference position XAb than the landing position Pb of the landing ink Ib. In other words, in the initial mode, the ink droplet is greatly deviated from the reference position XAb and landed outside the region corresponding to the planned application region 15cb. In the correction mode, the ejected ink droplet is close to the reference position XAb. It can be landed in 15cb. When ink droplets are ejected in the correction mode, it is most preferable that the landing position of the ejected ink droplets coincides with the reference position. Any position close to the reference position may be used. Hereinafter, the ink droplet landing position is expressed as being close to the reference position, including the case where the ink droplet landing position matches the reference position.

  Similarly, when ink droplets are ejected aiming at the reference position XAa in the planned application region 15ca, in the correction mode, a time ta such that ta = La / v is set behind the pulse signal application timing in the initial mode. By applying a pulse signal to the piezo element 423b of the nozzle 423s at the shifted timing, the landing position of the landing ink IKa becomes closer to the reference position XAa, and the ink droplet can be landed in the planned application region 15ca. it can. In the case where ink droplets are ejected aiming at the reference position XAc within the application scheduled region 15cc, in the correction mode, a timing shifted backward by a time tc such that tc = Lc / v from the timing of applying the pulse signal in the initial mode. Thus, by applying a pulse signal to the piezo element 423b of the nozzle 423s, the landing position of the landing ink IKc becomes a position close to the reference position XAc, and ink droplets can be landed in the intended application region 15cc. In the case of ejecting ink droplets aiming at the reference position XAd in the application planned region 15cd, in the correction mode, a timing shifted backward by a time td such that td = Ld / v from the timing of applying the pulse signal in the initial mode. Thus, by applying a pulse signal to the piezo element 423b of the nozzle 423s, the landing position of the landing ink IKd becomes a position close to the reference position XAd, and ink droplets can be landed in the planned application region 15cd.

  When applying ink to the EL substrate 10 in the correction mode, the CPU 501 of the control device 500 refers to the positional deviation information stored in the storage unit 502 and determines the positional deviation for each measurement cell 33 included in the positional deviation information. At the correction timing, a pulse signal is applied to the piezo element 423b of the corresponding nozzle 423 toward the application scheduled region 15c corresponding to each measurement cell 33, and ink droplets are ejected.

  The correction of the ejection timing is not necessarily performed for ejection of all ink droplets, and the landing position is out of the measurement cell 33 in the acquired positional deviation information (that is, the landing position is for measurement). At least the ink droplets (located outside the cell 33) may be performed. At this time, in the captured image, a part of the landed ink is overlapped with the outline of the measurement cell 33, even if the landing position is inside the measurement cell 33, it is deviated from the measurement cell 33. It may be determined and included in the target of discharge timing correction. Further, when the contour of the measurement cell 33 and the contour of the planned application region 15c (that is, the inner peripheral edge of the opening of the bank 15) do not match, for example, when viewed in plan, the measurement cell 33 (pixel electrode 13) If the contour of the planned application region 15 c is inside the contour, the boundary for determining whether or not the landing position is out of the measurement cell 33 is taken into consideration. It may be determined on the inner side.

  Further, even when the landed ink droplet is inside the corresponding measurement cell 33 (that is, does not protrude from the measurement cell 33), the landing position is the reference position of the corresponding measurement cell 33. The ejection timing may be corrected for all of the ink droplets deviating from the above. Of course, it is not necessary to correct the ejection timing for the landing positions that coincide with the reference positions of the corresponding measurement cells 33. The ejection of ink droplets in the correction mode includes the ejection of ink droplets in which the ejection timing is not corrected for the ejection of some of the ink droplets.

[5. Summary of Embodiment 1]
In the method for manufacturing an organic EL display panel according to the present embodiment, when layers such as a light emitting layer and a hole transport layer are formed, ink containing materials for forming these layers is transferred from the nozzles of the inkjet head to the EL substrate. It is discharged and applied to a predetermined application area.
Here, prior to ink application to the planned application region, ink droplets are ejected from the nozzles of the inkjet head onto the measurement substrate on which the measurement cells are formed with the same arrangement pattern as the arrangement pattern of the planned application region. The measurement substrate on which the ink has landed is imaged with an imaging device, and the positional deviation between the landing position of the ink droplet and the reference position of the corresponding measurement cell is measured in the captured image, and each measured measurement cell Is stored in the storage unit as misalignment information.

Then, when ink is applied to the planned application area of the EL substrate, the positional deviation related to the measurement cell corresponding to each planned application area is corrected with reference to the positional deviation information stored in the storage unit. Ink droplets are ejected from the nozzles of the inkjet head.
Thereby, it is possible to perform the positional deviation correction of the ink droplet corresponding to the local distortion of the arrangement pattern of the application region in the surface of the EL substrate.

Furthermore, in the method of manufacturing the organic EL display panel according to the present embodiment, position information (coordinate data) between the reference position of the measurement cell and the corresponding ink landing position is acquired and compared in the same captured image. Since the displacement amount is calculated, the obtained displacement amount is not affected by the reproducibility of the operation of the imaging apparatus.
On the other hand, when the positional deviation information of the ink droplet is acquired by performing imaging a plurality of times, an error due to the influence of the reproducibility of the operation of the imaging apparatus is included in the obtained positional deviation amount.

  The reason is as follows. For example, assume the following case. First, a coating application area is imaged by an imaging device using an EL substrate to which ink is not applied, and the position (coordinate data) of each coating application area on the EL substrate is stored in the storage unit. Next, the state after the ink droplets are ejected onto the EL substrate or the inspection substrate (the application target region and the measurement cell corresponding thereto are not necessarily formed) is imaged by the imaging device, and the ink droplets are captured. The landing position (coordinate data) is stored in the storage unit. Then, the positional deviation amount is calculated by comparing both coordinate data. In the case of such a method, imaging is performed when the coordinate data of the coating application area is acquired (first imaging) and when the coordinate data of the landing position of the ink droplet is acquired (second imaging). It is very difficult to move the device in exactly the same way. This is because the linear motor and the servo motor are not always driven at the same speed at the same position in the first imaging and the second imaging, and there is a slight fluctuation in speed. Therefore, an error due to such a small difference in operation of the imaging apparatus is included in the obtained positional deviation amount. In addition, if the temperature of the place where the device is installed changes between the first imaging and the second imaging, a minute expansion / contraction occurs in the guide shaft and the moving frame, and a slight deviation occurs in both coordinate data. Because it is possible.

In the manufacturing method of the organic EL display panel according to the present embodiment, since the above-described minute shift of the coordinate data is not included in the position shift amount, more accurate position shift correction can be performed. This is even more preferable when the planned application area becomes smaller due to high definition and the interval between adjacent application planned areas becomes narrower.
<< Embodiment 2 >>
In the manufacturing method of the organic EL display panel according to the first embodiment, there is an effect that the displacement correction can be performed more accurately with respect to the in-plane distortion of the array pattern of the application scheduled region due to the mask distortion. there were.

  However, the EL substrate has undergone various processes such as etching and baking when forming the bank that defines the region to be coated and the layers below the bank. SKEW) or the like may occur, and the degree varies depending on the individual EL substrate. In other words, the manufacturing method of the organic EL display panel according to the first embodiment cannot cope with such a solid difference in strain.

Therefore, in the method for manufacturing the organic EL display panel according to the second embodiment, in addition to the method for manufacturing the organic EL display panel according to the first embodiment, additional misalignment correction described below is performed.
The second embodiment will be described with reference to FIGS. 14 (a) and 14 (b), taking as an example a case where positional deviation correction is performed corresponding to the elongation of each EL substrate.
Since parts common to the method for manufacturing the organic EL display panel according to the first embodiment have already been described in the first embodiment, the second embodiment focuses on the part related to the additional misregistration correction. To do. The same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof has already been described in the first embodiment. Hereinafter, the same applies to each modification.

As shown in FIG. 14A, the EL substrate 10 has a display scheduled portion 10b that is an area where an image is to be displayed in the center, and a non-display area that is an area where no image is to be displayed outside. It has a planned portion 10c. A plurality of planned application areas 15c are formed in the scheduled display portion 10b.
First, a plurality of ink droplets are ejected in the correction mode from the nozzle 423 (see FIG. 9) of the inkjet head 420 (see FIG. 9) onto the non-display scheduled portion 10c of the EL substrate 10. In the present embodiment, ink droplets are ejected for each row to the non-display planned portions 10c on both sides in the column direction of the display planned portion 10b.

  Next, the state in which the ink droplet ejected by the imaging device 700 (see FIG. 7) has landed on the non-display planned portion 10c is imaged. At this time, it belongs to the corrected reference row Rf which is the row closest to the non-display scheduled portion 10c (that is, the row located at the end in the column direction) among the rows of the planned application region 15c formed in the display planned portion 10b. Imaging is performed so that the application-scheduled region 15c and the landing ink are within the same image. In the planned application region 15c belonging to the correction reference row Rf, only the planned application region 15c corresponding to the landing ink to be imaged needs to be within the same image. Here, the planned application region 15c corresponding to the landing ink is based on the assumption that the planned application region 15c is formed in the non-display scheduled portion 10c among the plurality of planned application regions 15c belonging to the correction reference row Rf. This is a coating application region 15c belonging to the same column as the assumed coating application region 15c of the non-display scheduled portion 10c where the landing ink to be imaged is scheduled to land.

Subsequently, in the captured image, the coordinate data of the reference position of the landing ink and the coordinate data of the reference position of the corresponding application scheduled area 15c of the correction reference row Rf are obtained, and the amount of displacement and the displacement direction are calculated. This is performed for each landing ink of the non-display scheduled portion 10c.
As shown in FIG. 14A, the EL substrate 10 has an extension at the end on the downstream side in the printing direction (X direction side), and among the plurality of planned coating regions 15c belonging to the correction reference row Rf, As for the three planned application regions 15c (15c1, 15c2, 15c3) located at the end on the downstream side in the printing direction, the intervals are wider toward the downstream side. Therefore, there is a misregistration amount G1 between the reference position P1 of the landing ink IN1 and the reference position of the planned application region 15c1, and the misalignment direction is the upstream side in the printing direction (−X direction). There is a misregistration amount G2 between the reference position P2 of the landing ink IN2 and the reference position of the planned application region 15c2, and the misalignment direction is on the upstream side in the printing direction (−X direction). There is a misregistration amount G3 between the reference position P3 of the landing ink IN3 and the reference position of the planned application region 15c3, and the misregistration direction is upstream in the printing direction (−X direction). It should be noted that there is no misalignment between the other landing ink and the corresponding application scheduled region 15c.

The additional position deviation information for each landing ink of the non-display scheduled portion 10c obtained by the above method is stored in the storage unit 502 (see FIG. 8).
As described above, in the first embodiment, the positional deviation information is acquired by using the measurement substrate 30, but in the second embodiment, the additional positional deviation information is actually obtained by using the EL substrate 10 that is actually used for manufacturing the organic EL display panel 100. To get.

  Then, when forming the hole transport layer 16 and the light emitting layer 17 shown in FIGS. 4D and 4E, the positions obtained by the method of Embodiment 1 stored in the storage unit 502 are obtained. With reference to the deviation information and the additional positional deviation information obtained by the method of the second embodiment, in addition to the positional deviation correction based on the positional deviation information obtained by the method of the first embodiment, it is obtained by the method of the second embodiment. In an additional correction mode in which positional deviation correction is performed based on the added additional positional deviation information, ink droplets are ejected from the nozzles 423 of the inkjet head 420, and ink is applied in the application application region 15c of the EL substrate 10. As a result, as shown in FIG. 14B, the ink droplets ejected aiming at the planned application region 15c1 land on the planned application region 15c1 (landing ink IK1), and ejected toward the planned application region 15c2. The applied ink droplets land in the application planned area 15c2 (landing ink IK2), and the ink droplets ejected aiming at the application planned area 15c3 land in the application planned area 15c3 (landing ink IK3).

And about the application | coating scheduled area | region 15c which belongs to lines other than a correction | amendment reference line, with respect to the application | coating scheduled area | region of the correction | amendment reference line corresponding to the application | coating scheduled area | region which belongs to the same column as each application | coating scheduled area in a correction | amendment reference line Apply the misalignment correction to be performed.
In the case where the EL substrate expands or contracts only in the row direction and does not expand or contract in the column direction, or in the case of an EL substrate having a long line bank in the column direction, all coatings belonging to the same column There is no problem even if the same misregistration correction is applied to the planned area 15c, so that the misregistration correction can be effectively performed on the entire planned application area 15c of the scheduled display portion 10b other than the correction reference row Rf. .

  According to the method of manufacturing the organic EL display panel according to the second embodiment, the additional EL information is obtained for each EL substrate 10, and the ink is applied in the application scheduled region 15c in the additional correction mode, whereby each EL Since misalignment caused by different expansion, contraction, distortion, etc. in the substrate 10 can be corrected for each EL substrate 10, ink droplets can be landed more reliably in the application region.

  Thereby, since the film thickness of the light emitting layer and the functional layer in each subpixel is made more uniform, and the occurrence of color mixing can be further reduced, a higher quality organic EL display panel can be produced. In addition, when manufacturing an organic EL display panel in which the planned application area becomes smaller and the interval between adjacent application planned areas becomes narrower due to higher definition, the method for manufacturing the organic EL display panel according to this embodiment Is more preferred.

≪Modification≫
As described above, the present invention has been described based on the first embodiment and the second embodiment. However, the present invention is not limited to the above-described embodiment, and the following modifications can be implemented. In addition, in order to avoid duplication of description, about the same component as embodiment, the same code | symbol is attached | subjected and the description is abbreviate | omitted.

(Modification 1)
In the second embodiment, one line of ink droplets is ejected to the non-display scheduled portion 10c. However, the present invention is not limited to this. For example, one or several ink droplets may be ejected at both ends in the row direction, and the ink droplets may not be ejected at the center in the row direction. If at least one ink droplet is ejected to each of both end portions in the row direction, the expansion, contraction, and distortion in the row direction of the entire EL substrate 10 can be detected, and this is caused by the detected elongation, shrinkage, and distortion. Misalignment can be corrected.

(Modification 2)
In the second embodiment, all the ink droplets for one line are ejected to the non-display scheduled portion 10c. However, the present invention is not limited to this, and thinning may be performed.
In addition, there is an advantage that local expansion and contraction in the row direction of the EL substrate 10 can be detected as the number of droplets to be ejected increases.

(Modification 3)
In the second embodiment, ink droplets are respectively ejected to the non-display scheduled portions 10c on both sides in the column direction of the display scheduled portion 10b. However, the present invention is not limited to this, and the ink liquid is applied only to one non-display scheduled portion 10c in the column direction. Drops may be ejected. Even when ink droplets are ejected only to one non-display-scheduled portion 10c, it is possible to detect the expansion and contraction of the EL substrate 10 in the column direction. However, in this case, the distortion of the EL substrate 10 cannot be detected.

(Modification 4)
In the first and second embodiments, the case where the EL substrate 10 and the measurement substrate 30 have line banks has been described as an example, but the present invention is not limited to this. The method for manufacturing an organic EL display panel according to one embodiment of the present invention can also be applied when the EL substrate and the measurement substrate have pixel banks.

  As mentioned above, although the organic light-emitting device and display apparatus which concern on this invention were demonstrated based on embodiment and a modification, this invention is not limited to said embodiment and a modification. A form obtained by making various modifications conceivable by those skilled in the art with respect to the above-described embodiments and modifications, and by arbitrarily combining components and functions in each embodiment and each modification without departing from the spirit of the present invention. Implemented forms are also included in the present invention.

  The present invention is useful for manufacturing a high-quality organic EL display panel.

DESCRIPTION OF SYMBOLS 10 EL board | substrate 10b Display plan part 10c Non-display plan part 13 Pixel electrode 15 Bank (partition wall layer)
15a First bank 15b Second bank 15c Planned coating region 16 Hole transport layer (functional layer)
17 Light emitting layer 30 Measurement substrate 33 Measurement cell 35 Liquid repellent layer 502 Storage unit 423 Nozzle Rf Correction reference row

Claims (15)

An ink in which an organic light emitting material or a functional material is dissolved in a solvent, and a plurality of application planned areas to which the ink is to be applied by discharging droplets of the ink from a plurality of nozzles are scheduled to display an image. Preparing an EL substrate having a partition layer formed in a matrix in a display scheduled portion,
Reference is made to misalignment information indicating misalignment of the landing position of the ejected liquid droplet from the target position, and the plurality of nozzles having misalignment among the plurality of nozzles are corrected so as to correct the misalignment. From the nozzles corresponding to each of the planned application areas of the nozzles, the droplets are ejected to each of the planned application areas, and the ink is applied in the planned application area,
A method for producing an organic EL display panel, wherein a light emitting layer containing the organic light emitting material or a functional layer containing the functional material is formed in the planned application region by drying the solvent of the applied ink. And
The positional deviation information is
Preparing a measurement substrate in which a plurality of measurement cells are formed in a matrix with an array pattern common to the array pattern of the plurality of application scheduled regions;
The droplets are ejected from the plurality of nozzles onto the measurement substrate,
A method for manufacturing an organic EL display panel, which is obtained by measuring a positional deviation in a row direction between a reference position of each of the plurality of measurement cells and a corresponding landing position of the droplet. The measurement of the positional deviation in the row direction between the reference position of each of the plurality of measurement cells and the landing position of the corresponding droplet is performed by imaging the measurement cell and the droplet landed on the measurement substrate. The method for manufacturing an organic EL display panel according to claim 1, wherein the image is picked up by the method and performed on the picked-up image. The method for manufacturing an organic EL display panel according to claim 1, wherein the reference position of the measurement cell is a line connecting the centers in the row direction of both end portions in the column direction of the measurement cell. Correction of positional deviation of the landing position of the ink for each of the plurality of planned application areas in the application of the ink into the predetermined application area,
The method for manufacturing an organic EL display panel according to claim 1, wherein the method is performed by adjusting a discharge timing of the droplets from the nozzle. 5. The organic EL display panel according to claim 1, wherein the acquisition of the positional deviation information is performed for all of the measurement cells corresponding to the planned application area formed in the planned display portion. Method. The organic EL display panel has a plurality of pixel electrodes,
The pixel electrode, the measurement cell, and the coating application region are formed using a common mask,
6. The method of manufacturing an organic EL display panel according to claim 1, wherein the measurement cell is made of the same material as the material of the pixel electrode. The measurement substrate is disposed above the plurality of measurement cells and has a liquid-repellent layer having a flat upper surface,
The method for manufacturing an organic EL display panel according to claim 1, wherein the droplets are ejected so as to land on the liquid-repellent layer. The method for manufacturing an organic EL display panel according to claim 7, wherein the liquid repellent layer is made of the same material as that for forming the partition wall layer. The positional deviation information is stored in a storage unit,
The patterning of the coating application region and the measurement cell is performed using a common mask,
Each time the mask is replaced, a new measurement substrate is created, and a new measurement of misalignment is performed using the newly created measurement substrate, and the newly measured misregistration information is used. The method for manufacturing an organic EL display panel according to claim 1, wherein the positional deviation information stored in the storage unit is updated. Every time maintenance of the mask is performed, the measurement substrate is newly created, and the newly created measurement substrate is used to newly measure misalignment, and the newly measured misregistration information. The manufacturing method of the organic EL display panel according to claim 9, wherein the positional deviation information stored in the storage unit is updated. Each time a predetermined number of inks are applied to the EL substrate, the measurement substrate is newly created, and the newly created measurement substrate is used to newly measure misalignment. The manufacturing method of the organic EL display panel according to claim 9 or 10, wherein the positional deviation information stored in the storage unit is updated with the positional deviation information measured in a step. The display scheduled portion is arranged at a central portion of the main surface on the EL substrate side where an image is displayed, adjacent to the column direction of the display scheduled portion, a non-display scheduled portion where no image is displayed is arranged,
When the ejection of the droplet for correcting the positional deviation indicated by the positional deviation information is set as a correction mode,
After the preparation of the EL substrate, prior to the application of the ink into the application planned area,
In the correction mode, a plurality of planned application regions at least at both ends in the row direction among the planned application regions belonging to the correction reference row that is the row of the plurality of planned application regions closest to the non-display scheduled portion. At the same timing as when the liquid droplets are discharged, the liquid droplets are not discharged onto the display scheduled portion, and a plurality of liquid droplets are discharged onto the non-display planned portion,
Measure the positional deviation in the row direction between the landing position of the droplets ejected on the non-display scheduled portion and the reference position of the corresponding application scheduled region in the correction reference row,
In the application of the ink into the plurality of planned application regions formed in the scheduled display portion, both the positional deviation in the measurement substrate and the positional deviation measured in the non-display planned portion are corrected. The method of manufacturing an organic EL display panel according to claim 1, wherein the droplets are discharged from the nozzles in an additional correction mode for discharging the droplets. The correction of the misregistration measured in the non-display scheduled portion is performed by calculating the misalignment of the landing positions of the droplets ejected on the non-display scheduled portion in the same column as the corresponding application planned region in the correction reference row. The method of manufacturing an organic EL display panel according to claim 12, wherein the method is applied to the application-scheduled region belonging to the above. The method for manufacturing an organic EL display panel according to claim 12 or 13, wherein the measurement of the positional deviation in the non-display scheduled portion is performed for each EL substrate. 15. The ejection of the droplets to the non-display scheduled portion is performed at the same timing as when the droplets are ejected in the correction mode to all the application scheduled regions belonging to the correction reference row. The manufacturing method of the organic electroluminescent display panel of any one of these.

Images