JP2002257658A - 高温計測用半導体式圧力センサ - Google Patents

高温計測用半導体式圧力センサ

Info

Publication number
JP2002257658A
JP2002257658A JP2001051884A JP2001051884A JP2002257658A JP 2002257658 A JP2002257658 A JP 2002257658A JP 2001051884 A JP2001051884 A JP 2001051884A JP 2001051884 A JP2001051884 A JP 2001051884A JP 2002257658 A JP2002257658 A JP 2002257658A
Authority
JP
Japan
Prior art keywords
pressure
high temperature
bottom portion
pressure sensor
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001051884A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002257658A5 (enExample
Inventor
Yasuhide Shinohara
康英 篠原
Hidekatsu Aoi
英勝 青井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Minebea Co Ltd
Original Assignee
Minebea Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minebea Co Ltd filed Critical Minebea Co Ltd
Priority to JP2001051884A priority Critical patent/JP2002257658A/ja
Publication of JP2002257658A publication Critical patent/JP2002257658A/ja
Publication of JP2002257658A5 publication Critical patent/JP2002257658A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP2001051884A 2001-02-27 2001-02-27 高温計測用半導体式圧力センサ Pending JP2002257658A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001051884A JP2002257658A (ja) 2001-02-27 2001-02-27 高温計測用半導体式圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001051884A JP2002257658A (ja) 2001-02-27 2001-02-27 高温計測用半導体式圧力センサ

Publications (2)

Publication Number Publication Date
JP2002257658A true JP2002257658A (ja) 2002-09-11
JP2002257658A5 JP2002257658A5 (enExample) 2009-01-08

Family

ID=18912602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001051884A Pending JP2002257658A (ja) 2001-02-27 2001-02-27 高温計測用半導体式圧力センサ

Country Status (1)

Country Link
JP (1) JP2002257658A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005315602A (ja) * 2004-04-27 2005-11-10 Nippon Seiki Co Ltd 半導体センサ装置
JP2007139453A (ja) * 2005-11-15 2007-06-07 Denso Corp 圧力センサ
JP2017011989A (ja) * 2015-06-16 2017-01-12 キストラー ホールディング アクチエンゲゼルシャフト ケーブルの取り外し装置、取り外し装置を用いたケーブルの取り外し方法、及びその方法に用いるケーブル
JP2018054347A (ja) * 2016-09-27 2018-04-05 シチズンファインデバイス株式会社 圧力検出装置、圧力検出装置付き内燃機関、圧力検出装置の製造方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62259475A (ja) * 1986-05-02 1987-11-11 Toyota Central Res & Dev Lab Inc 半導体圧力変換器及びその製造方法
JPS635232A (ja) * 1986-06-25 1988-01-11 Nippon Soken Inc 圧力検出器
JPS6437636A (en) * 1987-07-29 1989-02-08 Ibm Control system for data processing system
JPH0534231A (ja) * 1991-07-29 1993-02-09 Matsushita Electric Ind Co Ltd 圧電型圧力センサ
JPH05507150A (ja) * 1990-05-07 1993-10-14 ミネベア株式会社 圧抵抗型圧力変換器
JPH06109570A (ja) * 1992-09-25 1994-04-19 Matsushita Electric Works Ltd 半導体圧力センサ
JPH0647836U (ja) * 1992-12-11 1994-06-28 ツルミ工業株式会社 圧力計保護器

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62259475A (ja) * 1986-05-02 1987-11-11 Toyota Central Res & Dev Lab Inc 半導体圧力変換器及びその製造方法
JPS635232A (ja) * 1986-06-25 1988-01-11 Nippon Soken Inc 圧力検出器
JPS6437636A (en) * 1987-07-29 1989-02-08 Ibm Control system for data processing system
JPH05507150A (ja) * 1990-05-07 1993-10-14 ミネベア株式会社 圧抵抗型圧力変換器
JPH0534231A (ja) * 1991-07-29 1993-02-09 Matsushita Electric Ind Co Ltd 圧電型圧力センサ
JPH06109570A (ja) * 1992-09-25 1994-04-19 Matsushita Electric Works Ltd 半導体圧力センサ
JPH0647836U (ja) * 1992-12-11 1994-06-28 ツルミ工業株式会社 圧力計保護器

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005315602A (ja) * 2004-04-27 2005-11-10 Nippon Seiki Co Ltd 半導体センサ装置
JP2007139453A (ja) * 2005-11-15 2007-06-07 Denso Corp 圧力センサ
JP2017011989A (ja) * 2015-06-16 2017-01-12 キストラー ホールディング アクチエンゲゼルシャフト ケーブルの取り外し装置、取り外し装置を用いたケーブルの取り外し方法、及びその方法に用いるケーブル
JP2018054347A (ja) * 2016-09-27 2018-04-05 シチズンファインデバイス株式会社 圧力検出装置、圧力検出装置付き内燃機関、圧力検出装置の製造方法

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