JP2002246098A - 真空チャンバー電力供給用の電流導入端子 - Google Patents

真空チャンバー電力供給用の電流導入端子

Info

Publication number
JP2002246098A
JP2002246098A JP2001042220A JP2001042220A JP2002246098A JP 2002246098 A JP2002246098 A JP 2002246098A JP 2001042220 A JP2001042220 A JP 2001042220A JP 2001042220 A JP2001042220 A JP 2001042220A JP 2002246098 A JP2002246098 A JP 2002246098A
Authority
JP
Japan
Prior art keywords
current
terminal
tip
spring material
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001042220A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002246098A5 (enExample
Inventor
Yasuji Sakamoto
保司 坂本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Usui Kokusai Sangyo Kaisha Ltd
Original Assignee
Usui Kokusai Sangyo Kaisha Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Usui Kokusai Sangyo Kaisha Ltd filed Critical Usui Kokusai Sangyo Kaisha Ltd
Priority to JP2001042220A priority Critical patent/JP2002246098A/ja
Publication of JP2002246098A publication Critical patent/JP2002246098A/ja
Publication of JP2002246098A5 publication Critical patent/JP2002246098A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2001042220A 2001-02-19 2001-02-19 真空チャンバー電力供給用の電流導入端子 Pending JP2002246098A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001042220A JP2002246098A (ja) 2001-02-19 2001-02-19 真空チャンバー電力供給用の電流導入端子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001042220A JP2002246098A (ja) 2001-02-19 2001-02-19 真空チャンバー電力供給用の電流導入端子

Publications (2)

Publication Number Publication Date
JP2002246098A true JP2002246098A (ja) 2002-08-30
JP2002246098A5 JP2002246098A5 (enExample) 2008-02-14

Family

ID=18904550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001042220A Pending JP2002246098A (ja) 2001-02-19 2001-02-19 真空チャンバー電力供給用の電流導入端子

Country Status (1)

Country Link
JP (1) JP2002246098A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004152536A (ja) * 2002-10-29 2004-05-27 Otax Co Ltd 電子部品用ソケット

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07211383A (ja) * 1994-01-20 1995-08-11 Yokowo Co Ltd 電気接続用コネクタ
JPH11162270A (ja) * 1997-11-28 1999-06-18 Fujitsu Ltd 電気的接続装置、接触子製造方法、及び半導体試験方法
JPH11163066A (ja) * 1997-11-29 1999-06-18 Tokyo Electron Ltd ウエハ試験装置
WO2000003251A1 (en) * 1998-07-10 2000-01-20 Nhk Spring Co., Ltd. Conductive contact
JP2000243500A (ja) * 1999-02-18 2000-09-08 Yokowo Co Ltd スプリングコネクタおよびその製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07211383A (ja) * 1994-01-20 1995-08-11 Yokowo Co Ltd 電気接続用コネクタ
JPH11162270A (ja) * 1997-11-28 1999-06-18 Fujitsu Ltd 電気的接続装置、接触子製造方法、及び半導体試験方法
JPH11163066A (ja) * 1997-11-29 1999-06-18 Tokyo Electron Ltd ウエハ試験装置
WO2000003251A1 (en) * 1998-07-10 2000-01-20 Nhk Spring Co., Ltd. Conductive contact
JP2000243500A (ja) * 1999-02-18 2000-09-08 Yokowo Co Ltd スプリングコネクタおよびその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004152536A (ja) * 2002-10-29 2004-05-27 Otax Co Ltd 電子部品用ソケット

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