JP2002246098A5 - - Google Patents
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- Publication number
- JP2002246098A5 JP2002246098A5 JP2001042220A JP2001042220A JP2002246098A5 JP 2002246098 A5 JP2002246098 A5 JP 2002246098A5 JP 2001042220 A JP2001042220 A JP 2001042220A JP 2001042220 A JP2001042220 A JP 2001042220A JP 2002246098 A5 JP2002246098 A5 JP 2002246098A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001042220A JP2002246098A (ja) | 2001-02-19 | 2001-02-19 | 真空チャンバー電力供給用の電流導入端子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001042220A JP2002246098A (ja) | 2001-02-19 | 2001-02-19 | 真空チャンバー電力供給用の電流導入端子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002246098A JP2002246098A (ja) | 2002-08-30 |
| JP2002246098A5 true JP2002246098A5 (enExample) | 2008-02-14 |
Family
ID=18904550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001042220A Pending JP2002246098A (ja) | 2001-02-19 | 2001-02-19 | 真空チャンバー電力供給用の電流導入端子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002246098A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004152536A (ja) * | 2002-10-29 | 2004-05-27 | Otax Co Ltd | 電子部品用ソケット |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2965846B2 (ja) * | 1994-01-20 | 1999-10-18 | 株式会社ヨコオ | 電気接続用コネクタ |
| JP4060919B2 (ja) * | 1997-11-28 | 2008-03-12 | 富士通株式会社 | 電気的接続装置、接触子製造方法、及び半導体試験方法 |
| JPH11163066A (ja) * | 1997-11-29 | 1999-06-18 | Tokyo Electron Ltd | ウエハ試験装置 |
| CN1246698C (zh) * | 1998-07-10 | 2006-03-22 | 日本发条株式会社 | 导电的接触单元 |
| JP2000243500A (ja) * | 1999-02-18 | 2000-09-08 | Yokowo Co Ltd | スプリングコネクタおよびその製造方法 |
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2001
- 2001-02-19 JP JP2001042220A patent/JP2002246098A/ja active Pending