JP2002243567A - 半導体式圧力センサ - Google Patents
半導体式圧力センサInfo
- Publication number
- JP2002243567A JP2002243567A JP2001046722A JP2001046722A JP2002243567A JP 2002243567 A JP2002243567 A JP 2002243567A JP 2001046722 A JP2001046722 A JP 2001046722A JP 2001046722 A JP2001046722 A JP 2001046722A JP 2002243567 A JP2002243567 A JP 2002243567A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- amplifying
- sapphire diaphragm
- resistance element
- signals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 35
- 229910052594 sapphire Inorganic materials 0.000 claims abstract description 51
- 239000010980 sapphire Substances 0.000 claims abstract description 51
- 230000003321 amplification Effects 0.000 claims abstract description 7
- 238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 7
- 238000010030 laminating Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 abstract description 22
- 230000035945 sensitivity Effects 0.000 abstract description 10
- 238000009529 body temperature measurement Methods 0.000 abstract 1
- 239000012530 fluid Substances 0.000 description 9
- 239000007788 liquid Substances 0.000 description 8
- 238000009530 blood pressure measurement Methods 0.000 description 4
- 230000002542 deteriorative effect Effects 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 102100033040 Carbonic anhydrase 12 Human genes 0.000 description 1
- 102100033041 Carbonic anhydrase 13 Human genes 0.000 description 1
- 101000867855 Homo sapiens Carbonic anhydrase 12 Proteins 0.000 description 1
- 101000867860 Homo sapiens Carbonic anhydrase 13 Proteins 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001046722A JP2002243567A (ja) | 2001-02-22 | 2001-02-22 | 半導体式圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001046722A JP2002243567A (ja) | 2001-02-22 | 2001-02-22 | 半導体式圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002243567A true JP2002243567A (ja) | 2002-08-28 |
| JP2002243567A5 JP2002243567A5 (enrdf_load_stackoverflow) | 2009-01-08 |
Family
ID=18908285
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001046722A Pending JP2002243567A (ja) | 2001-02-22 | 2001-02-22 | 半導体式圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002243567A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2284074C1 (ru) * | 2005-04-06 | 2006-09-20 | Открытое акционерное общество "Научно-исследовательский институт теплоэнергетического приборостроения", (ОАО "НИИТеплоприбор ") | Полупроводниковый тензопреобразователь |
| RU2343589C1 (ru) * | 2007-07-25 | 2009-01-10 | Государственное образовательное учреждение Высшего профессионального образования "Тамбовский государственный технический университет" ГОУ ВПО "ТГТУ" | Устройство для измерения давления |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59151031A (ja) * | 1983-02-18 | 1984-08-29 | Aisin Seiki Co Ltd | 圧力センサ |
| JPH0265135U (enrdf_load_stackoverflow) * | 1988-11-07 | 1990-05-16 | ||
| JPH0342539A (ja) * | 1989-07-11 | 1991-02-22 | Kayaba Ind Co Ltd | 圧力センサ |
| JPH05507150A (ja) * | 1990-05-07 | 1993-10-14 | ミネベア株式会社 | 圧抵抗型圧力変換器 |
-
2001
- 2001-02-22 JP JP2001046722A patent/JP2002243567A/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59151031A (ja) * | 1983-02-18 | 1984-08-29 | Aisin Seiki Co Ltd | 圧力センサ |
| JPH0265135U (enrdf_load_stackoverflow) * | 1988-11-07 | 1990-05-16 | ||
| JPH0342539A (ja) * | 1989-07-11 | 1991-02-22 | Kayaba Ind Co Ltd | 圧力センサ |
| JPH05507150A (ja) * | 1990-05-07 | 1993-10-14 | ミネベア株式会社 | 圧抵抗型圧力変換器 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2284074C1 (ru) * | 2005-04-06 | 2006-09-20 | Открытое акционерное общество "Научно-исследовательский институт теплоэнергетического приборостроения", (ОАО "НИИТеплоприбор ") | Полупроводниковый тензопреобразователь |
| RU2343589C1 (ru) * | 2007-07-25 | 2009-01-10 | Государственное образовательное учреждение Высшего профессионального образования "Тамбовский государственный технический университет" ГОУ ВПО "ТГТУ" | Устройство для измерения давления |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080128 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080128 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20101027 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20101102 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20110301 |