JP2002243556A - Temperature measuring device for inline type heat treatment equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a temperature measuring device for inline type heat treatment equipment capable of measuring, simultaneously and accurately, the temperature of a treating object under treatment. SOLUTION: This inline type heat treatment equipment is provided with a coupling means between a thermocouple mounted on the treating object and a measuring means for measuring the output of the thermocouple. The coupling means comprises an engaging part 66 mounted on a stationary part, and an engaged part 65 mounted on a conveyance means 53 for conveying the treating object into a treating chamber 81 and moving together therewith. The engaging part 66 is connected to the measuring means, and a terminal 113 to which a lead wire from a temperature measuring junction of the thermocouple mounted on the treating object is connected is mounted on the engaged part 65, and the engaging part 66 and the engaged part 65 are engaged with each other when measuring the temperature of the treating object.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a temperature measuring apparatus for an in-line type heat treatment apparatus for sequentially carrying an object to be processed into a plurality of connected processing chambers by a carrying means and performing a predetermined process.

[0002]

2. Description of the Related Art In a batch type heat treatment apparatus 9 shown in FIG. 11, since all processes in different processes are performed in one processing chamber 6, when measuring the temperature of the workpiece 2 during the process, the If the thermocouple 4 is attached to the workpiece 2 as a sensor and is placed in the processing chamber 6, the temperature of the workpiece 2 during the heat treatment can be measured in real time (taken out to the external measuring means 5 via the conducting wire 7). ), And the heater 3 can be immediately controlled from the obtained temperature information.

However, in order to further improve product quality, improve productivity, and reduce production costs, it is necessary to use in-line processing. FIG. 12 shows, as an example, an in-line heat treatment apparatus 25 using a rack and a pinion as the transport means.

A processing chamber 24 is heated by a furnace wall 15 by a heater h.
Are divided into a heating unit 16 provided with
The carrier frame 11 on which the object 12 to be heated is loaded is opened into the heating unit 16 of the processing chamber 24 from the adjacent preprocessing chamber (or charging chamber) 26 by opening the gate valve 14.
After the heat treatment, the gate valve 29 is opened, and is carried out to a post-treatment chamber (or an extraction chamber) 28 of the next chamber.

[0005] First, the rotation of a motor (not shown) is transmitted to a small pinion 21a via a drive shaft 17 of the small pinion 21a.
The large pinion 21b meshing with a is rotated. As a result, the rack 8 provided with the pins 13 engaged with the large pinion 21b moves in the direction of arrow d. Along with this, the hanger 18 connected to the rack 8 also moves in the direction of the arrow d, and the carrier frame 1 suspended by the hanger 18
Convey 1. Further, four wheels 19 moving on rails 22 fixed to the wall of the processing chamber 24 are
Is connected to the hanger 18. One end of the shaft 20 is fixed to the hanger 18, and the other end is fitted into the center of the wheel 19 and is rotatable. As a result, the hanger 18 is supported and at the same time moves with the movement of the rack 8.

As described above, in the in-line type heat treatment apparatus, a plurality of connected processing chambers are partitioned by the gate valve (although only three processing chambers are shown in the above example). It is not possible to measure while dragging the lead wire connected to the external measuring device while it is attached to the device.

Therefore, conventionally, in an in-line heat treatment apparatus, the temperature of an object to be processed is measured by the following method.

First, as a first conventional example, test measurement is performed before actual production processing. In this method, an object to be processed and a thermocouple are set at room temperature for each processing chamber, and then the temperature is raised to measure a temperature distribution at an actual use temperature (processing temperature) in advance. As shown in the graph of FIG. 13, the inside of the processing chamber is raised from room temperature to a set processing temperature by heating from the heater, and the object to be processed is also heated from room temperature. Then, when reaching the soaking area after the temperature rise, the highest temperature part (MAX) and the lowest temperature part (MI)
N), the temperature in the processing chamber is kept constant so that the temperature difference ΔT with respect to N) decreases. In this way, the temperature characteristics of the object to be processed for each chamber are obtained in advance, and the heater control in the actual processing is performed based on the temperature characteristics.

However, in practice, different processing temperatures are set for each of the chambers, and the object to be processed is transferred by the transfer means and enters each of the processing chambers. However, the processing chamber is already heated to the set temperature. Have been. Therefore, FIG.
As shown in (2), the temperature rise time t2 at which the object increases to near the set temperature is shorter than the temperature rise time t1 from room temperature. Therefore, the data obtained by the test measurement by raising the temperature from room temperature is different from the temperature characteristics in the actual production process.

Therefore, since the temperature t2 is unknown, when determining the temperature rise time in actual production, the object to be processed is heat-treated at the temperature rise time t1 obtained in advance, and then the material to be processed which has come out is processed. After confirming the state of the object, the heating time is gradually reduced from t1 (t1-α). The above operation is repeated to approach the optimal temperature rise time t2. Therefore, it takes time and effort, and if the set time is longer than t2,
Since the production time is longer than the actual time, efficient production cannot be performed. If the production time is shorter than t2, sufficient processing cannot be performed. . In addition, especially when there are multiple chambers, it is necessary to insert an object to be processed and a thermocouple for each processing chamber and measure temperature characteristics at a processing temperature for each chamber.
It takes great effort and time.

Next, as a second conventional example, there is a measurement using a storage type temperature measuring device. This is because a device called a “store” that can electrically record the temperature of the object under vacuum high temperature (200 ° C.) for about 60 minutes is passed through each processing chamber together with the object, and the heat received by the object. After the history (temperature information in each processing chamber recorded in the store via the thermocouple) comes out of the heat treatment apparatus, it is taken out as measurement data.

However, it takes a lot of time and labor, especially when there are many temperature control elements. For example, in the temperature control by the master-slave method of the nine-division control, one of the measurement points is set as the master side, and the deviation is reduced by comparing the measured temperatures of the master side and the other eight slave sides. In this case, the PID control amount of the heating control system on each slave side is set. In this case, the control amount of each unit is set again by looking at each data recorded in the store, and then again set in each processing chamber. Go through. This is repeated many times to narrow down the required temperature conditions. Further, when the conditions (type, size, shape, heat capacity, etc.) of the object to be processed are changed, it is necessary to narrow down the temperature conditions again from the beginning. Therefore, it takes much time to adjust the heating control conditions more optimal than in actual production, which leads to an increase in production cost.

Further, in the temperature measurement in the in-line type heat treatment apparatus shown in the first and second conventional examples, temperature information of the object to be processed cannot be obtained in real time during the heat treatment. (The temperature rise is too early or too late.)
Irrespective of the above, the heating control program proceeds so that defective products may be produced. Therefore, as a third conventional example, there is temperature control in which temperature information of an object to be processed is obtained in real time during heat treatment, and feedback is immediately provided to the heating control system from the obtained temperature information.

This is a measurement by telemetry (telemetry method), in which temperature information is transmitted from a transmitter attached to an object to be processed and transmitted to an external measuring device using radio waves for measurement. ing.

However, this measuring method is vulnerable to noise, and accurate measurement cannot be performed, particularly when the heater is in an energized state.
For this reason, a method was adopted in which the heater was temporarily turned off during the heat treatment, and measurement was quickly performed during that time. However, this method could not perform measurement for a long time and could not perform accurate measurement. Also,
It is not preferable to stop the heater during the heat treatment irrespective of the object to be processed and the state in the processing chamber.

[0016]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and has been made in consideration of the above-described problems. The task is to provide

[0017]

The object of the present invention is to provide a loading chamber and an unloading chamber connected before and after at least one processing chamber for performing a predetermined process on a workpiece. What is claimed is: 1. A temperature measuring device for an in-line heat treatment apparatus comprising a conveying unit for sequentially conveying an object to be processed, wherein at least one thermocouple attached to the object to be processed and a measuring unit for measuring an output of the thermocouple; And coupling means provided between the thermocouple and the measuring means, the coupling means being provided with an engaging part attached to a stationary part of the processing chamber, and being attached to the carrying means and being provided with the carrier together. The engaging portion is connected to the measuring means, the terminal of the thermocouple is attached to the engaged portion, and the temperature of the object to be processed is controlled. When measuring, The in-line heat treatment apparatus for temperature measurement device is characterized in that so as to engage the engaged portion, it is solved by the.

That is, since a detachable coupling means is provided between the thermocouple attached to the object to be processed and the measuring means, in the in-line type heat treatment apparatus, each of the processing chambers of the object is processed. Without disturbing the transport of
The temperature of the workpiece during the actual processing can be accurately measured.

[0019]

Embodiments of the present invention will be described below with reference to the drawings.

FIGS. 1 and 2 show a main part of a temperature measuring device 30 for an in-line heat treatment apparatus according to the present embodiment.
FIG. 2 is a sectional view taken along the line [1]-[1] in FIG.
FIG. 2 is a sectional view taken along line [2]-[2] in FIG. 1.

As in the in-line type heat treatment apparatus shown in the conventional example, the processing chamber 8 is formed in the housing 34 by the furnace wall 84.
1 and an installation chamber Q of the transfer means 53 are separated from each other, and an object to be processed (not shown) is separated by a rack 77 and a pinion 143.
The hanger 80 for suspending the carrier 85 as a container accommodating is moved in the transport direction.

The transporting means 53 includes a hanger 80, wheels 78 rotatably mounted around a shaft 78a fixed to the hanger 80, and rails fixed to the housing 34 for guiding the wheels 78 in the transport direction. 79
And a rack 77 integrally attached to the upper part of the hanger 80 and extending in the transport direction, and a pinion 143 engaged with the rack 77.

A carrier 85 is suspended from the hanger 80 in a processing chamber 81 by a guide cylinder 83 (see FIG. 1), and an object to be processed is accommodated in the carrier 85. A heater 82 is attached to the furnace wall 84, and a heat reflector 87 is provided between the transfer means 53 and the processing chamber 81.

A pedestal 126 is fixed to the vertical wall of the hanger 80, and the engaged portion 6
5 is slidably mounted in the transport direction. A connector terminal portion 113 is formed on the engaged portion 65, and a cylindrical receiving portion 76 is attached to the mounting plate 102, as will be described in detail with reference to FIGS. A support ring 104 is mounted. Support ring 1
04, two positioning pins 71 and 72 and twelve terminals AL1 to AL3 and CH1 to CH9 (10
Book) is mounted in the circumferential direction. The twelve terminals AL1 to AL3 and CH1 to CH9 are connected to the conductors from the temperature measuring contacts of the thermocouple attached to the object to be processed in the carrier 85 through the guide cylinder 83, respectively. I have. This wiring relationship will be described later in detail with reference to FIG.

1 and 2, an opening 37 is formed on the left side of the housing 34, and a plurality of bolts 51 and nuts in which a ring-shaped mounting plate 36 is disposed in the circumferential direction are formed. It is attached to the housing 34 by 50. A disk-shaped cover 38 is attached to the mounting board 36 by a plurality of bolts 49 arranged in the circumferential direction so as to close the opening 37 and the central hole of the mounting board 36. Reference numerals 35 and 64 are seal rings.

An engaging portion driving mechanism 114 is attached to the cover 38. An engaging portion 66 formed on the engaging portion driving mechanism 114 is engaged with an
And is facing. Coupling means 118 is constituted by the engaging portion 66 and the engaged portion 65.

The engagement portion drive mechanism 114 includes an engagement portion drive cylinder 33, an engagement portion drive rod 58 driven by the engagement portion drive cylinder 33, and a second portion provided above the engagement portion drive rod 58.
The cover driving cylinder 31 and the rod 55 driven by the same, the first cover driving cylinder 32 provided below the engaging portion driving rod 58 and the rod 56 driven by the same, And a pair of guide pipes 90a and 90b.

The second cover driving cylinder 31 and the first cover driving cylinder 32 are fixed to a cover 38. Engagement part drive rod 58 and guide pipes 90a, 90
0b is integrally attached via a mounting plate 89, and the engagement portion drive rod 33 is used by the engagement portion drive cylinder 33.
When the guide 8 moves in the direction of arrow E while being guided by the guide cylinder 52 attached to the cover 38 via the mounting boss 40, the guide pipes 90a and 90b are also fixed to the guide cylinder 92a, It moves in the direction of arrow E guided by 92b.

Further, the cover 38 has a case 5 for accommodating the engagement portion drive rod 58 and the guide pipes 90a and 90b.
The guide cylinder 52 for guiding the engagement portion drive rod 58 described above is provided with a pair of support members 46a fixed vertically inside the case 57,
46b.

Next, the distal end portion 58 of the engagement portion drive rod 58
The engaging portion 66 formed on the portion a will be described. As shown in FIG. 2, an engagement ring 59 fixed to the distal end portion 58a
A mounting plate 89 is attached to the mounting plate 89. The engagement ring 59 has twelve terminals AL1-A formed on the engaged portion 65.
Twelve sockets are formed in the circumferential direction corresponding to L3 and CH1 to CH9. Also, positioning holes corresponding to the two positioning pins 71 and 72 of the engaged portion 65 are formed. Conductors are connected to the respective receiving ports, and these twelve conductors 100 are divided into six pieces on the mounting plate 89, and into the guide pipes 90a and 90b from two holes formed in the mounting plate 89. It is led. The conducting wire 100 guided into the guide pipes 90a and 90b is connected to measuring means (not shown) from the ends of the guide pipes 90a and 90b outside the housing 34 as shown in FIG.

Referring to FIG. 1, a first cover 60 for opening and closing the opening 57a is attached to the case 57 via a hinge H. A first cover attaching member 62 is attached to a lower portion of the first cover 60, and the first cover attaching member 62 is rotatable around a pin 61 attached to the case 57 via the attaching member 48. I have. Further, a first cover driving piece 63 is mounted on the first cover mounting member 62. Further, two mounting screws 56a and 56b are attached to the distal end of the driving rod 56 of the first cover driving cylinder 32, and the first cover driving piece 63 is slidable between the mounting screws 56a and 56b. I agree.

Next, the engaged portion 65 will be described in detail. FIG. 3 is an enlarged view of the engaged portion 65 in FIG.
FIG. 4 is an enlarged view of the engaged portion 65 in FIG. 2, and FIG.
2 is a sectional view taken along line [6]-[6] of FIG.

A pair of mounting rings 105a and 105b are formed on the mounting plate 102 on which the connector terminal portion 113 described above is mounted in the front and rear direction with respect to the transport direction F, and these mounting rings 105a and 105b are respectively provided. A screw hole is formed. The pedestal 126 fixed to the hanger 80 is formed with a pair of spring receivers 110a and 110b in the front and rear direction with respect to the transport direction F.
A through-hole whose center is aligned with the screw holes of a and 105b is formed.

Bolts 106a and 106b are respectively inserted through the through holes of the spring receivers 110a and 110b in the direction perpendicular to the center line A of the pedestal 126. Ring 105a, 1
05b and fixed by nuts 112a and 112b. Spring supports 110a, 110b and bolt 10
Compression springs 108a and 108b are provided between the heads 6a and 106b via two spring seats 107a, 107a and 107b and 107b, respectively.

Referring to FIG. 3, on the upper part of base 126,
A horizontal spring receiving portion 124 is formed, and a rod 123 is inserted into a through hole formed in the spring receiving portion 124, and a stopper member 120 is attached to an upper end of the rod 123 by a pin 121. A contact member 125 having an arc-shaped contact surface is integrally attached to the lower end of the rod 123. Spring receiving portion 124 and contact member 125
A compression spring 122 is wound around the rod 123 and is disposed on the contact plate 103 horizontally attached to the upper end of the mounting plate 102 on the engaged portion 65 side. The contact surfaces are in contact.

A connector terminal 113 is provided on the mounting plate 102.
A cylindrical case 75 is attached so as to cover the whole. A second cover 70 that opens and closes an opening 75a of the case 75 is attached to an upper portion of the case 75 via a hinge H '. The structure of the hinge H ′ will be described.
8b are attached, and these attachment members 128a,
A pin 68 is passed through a hole formed in 128b and is supported. Further, two second cover mounting members 129a and 129b are rotatable on the pin 68, and the second cover 70 and the second cover driving piece 67 are mounted on the second cover mounting members 129a and 129b. Have been. Further, the pin 68 has two torsion coil springs 132.
a, 132b are wound, one end of which is a case 75
The guide members 130a and 130b attached to the upper part are in contact with each other, and the other end is in contact with the second cover 70.

Next, the drive mechanism 146 of the transport means 53 will be described with reference to FIG. As described above, the rotational driving force of the motor is controlled by the small gear 141 fixed to the drive shaft 140a of the motor and the large gear 1 meshed with the small gear 141.
42, and transmitted to a pinion 143 that rotates integrally with the large gear 142 and the rotation shaft 142a.

Both ends of the drive shaft 140a and the rotary shaft 142a are fitted into holes formed in a pair of rotary levers 139a, respectively. The rotation lever 139a is
A straight line L connecting the center of the rotation axis 142a and the center of the rotation axis 142a is
The pinion 143 is offset from the straight line M connecting the center of the rotation shaft 142a and the engagement point between the pinion 143 and the rack 77 toward the rotation direction N of the pinion 143, and is rotatable about the drive shaft 140a. I have.

Above the rotating lever 139a,
A spring 136a is provided, and one end of the spring 136a is connected to a mounting bracket 144a,
44b, and the other end is a rotating lever 139a.
Are fixed to the mounting member 137a fixed to the upper part of the. A stopper bolt 138a is attached to a mounting bracket 133a fixed to the housing 34 below the rotating lever 139a, and abuts at the position of the rotating lever 139a shown in FIG. , The rotation in the direction opposite to the direction N is restricted.

Reference numeral 134 denotes an air cylinder. The driving rod 135 is integrally formed with a horizontal arm 135a.
And an inclined arm portion 119a are formed, and move up and down together with the vertical movement of the drive rod 135.

Next, the wiring of the thermocouple will be described with reference to FIG. In the object to be treated, nine temperature measuring contacts THC1 to THC9 are provided at nine locations in a combination of alumel and chromel.
Is attached. These temperature measuring contacts THC1 to THC
The alumel wire and the chromel wire from C9 are connected to the terminals AL1 to AL1 of the connector terminal portion 113 of the engaged portion 65 as shown in FIG.
AL3 and connected to CH1 to CH9. Here, the terminals AL1 to AL3 are commonly used to reduce the number of contacts.

These terminals AL1 to AL3 and CH1 to C
When H9 engages with the engaging portion 66 at the time of temperature measurement as described later, the engaging portion 66 is connected to the external measuring means 115 via the conducting wire 100. Measured.

The temperature measuring apparatus for an in-line heat treatment apparatus according to the present embodiment is configured as described above. Next, this operation will be described.

First, referring to FIG. 7, the rotational driving force from the motor is transmitted to pinion 143 via small gear 141 and large gear 142, and pinion 143 is rotated in direction N. As a result, the rack 77 engaged with the pinion 143 moves rightward in FIG. These pinions 143
When the pinion 143 is engaged with the rack 77,
Rotating lever 139 around the drive shaft 140a of the motor
It moves upward and escapes together with a.
At this time, the spring 136a is pulled and extended by the attachment member 137a, and functions to return the rotating lever 139a and the pinion 143. At this time, the horizontal arm 135a and the inclined arm 119a are located at the positions indicated by the dashed lines in FIG.

When measuring the temperature of the object to be processed, FIG.
In the above, the engaged portion 65 is stopped at a position where the engaged portion 65 faces the engaging portion 66. After the pinion 143 is stopped by stopping the driving of the motor, since there is a gap between the teeth of the pinion 143 and the pins of the rack 77, the rack 77 advances further by inertia and tries to push up the pinion 143. When stopped, the rod 135 of the cylinder 134 is driven, and the horizontal arm 135a and the tilt arm 1
19a is lowered from the position shown by the alternate long and short dash line in FIG. 7 and pressed against the rotating lever 139a. This prevents the pinion 143 from being pushed up, and the rack 77
However, the movement of the motor after stopping can also be suppressed. Therefore, the engaged portion 65 attached to the rack 77 can be stopped accurately.

When the engaged portion 65 is stopped, first, the first
The rod 56 of the cover drive cylinder 32 is driven to the left in FIG. As a result, the first cover driving piece 63 engaged between the two mounting screws 56a and 56b at the end of the rod 56 is rotated around the pin 61, and the case 57 is rotated.
The first cover 60 covering the opening 57a is opened. Then
The rod 55 of the second cover drive cylinder 31 is driven to the right in FIG. 1, and the tip of the rod 55 is brought into contact with the second cover drive piece 67 and pushed to rotate around the pin 68. Thus, the second cover 70 closing the case 75 is opened. Except when the engaged portion 65 and the engaging portion 66 are engaged, the first cover 60 and the second cover 70
Is closed, for example, when the brazing process is being performed in the processing chamber 81, the magnesium and the like contained in the brazing material evaporate, and the engaged portion 65 and the engaging portion 66 Adherence can be prevented.

Next, the engaging portion driving rod 58 of the cylinder 33 is driven rightward in FIG.
Into the receiving portion 76 of the engaged portion 65, and the engaging portion 6
6 are provided with the connector terminal portions 113
12 terminals AL1 to AL3 and CH1 to CH9 are engaged. Therefore, as shown in FIG. 9, the temperature measuring contacts THC1 to THC9 of the thermocouple attached to the object to be processed are electrically connected to the measuring means 115, and the temperature of the object during the heat treatment is measured. Can be measured in real time.

Next, the alignment at the time of engagement will be described with reference to FIGS. 5 and 6, the dashed line A indicates the center of the pedestal 126 after the stop, and the two-dot chain line B indicates the center on the engaging portion 66 side. In other words, this represents a state in which the engaged portion 65 is off center with respect to the engaging portion 66 and stopped.
In this state, the conical tip portion 58a of the rod 58
Is inserted into the receiving portion 76, as shown in FIG.
A force to move in the direction F acts on the engaged portion 65 to expand the compression spring 108b and contract the compression spring 108a,
Slide in direction F. Thus, the engaged portion 65 is engaged with its center aligned with the center B of the engaging portion 66. Therefore, even if the stop position of the engaged portion 65 is shifted, it can be corrected at the time of engagement.

Further, referring to FIG.
13, the contact chamber 125 urged by the compression spring 122 is pressed downward via the contact plate 103 formed on the mounting plate 102, so that the processing chamber 81 (below the connector terminal portion 113). (See FIG. 1) can be suppressed from being deformed upward by heat. Therefore, good positional accuracy in the direction perpendicular to the transport direction can be maintained.

As described above, according to the present embodiment, since the temperature information of the object to be processed during the heat treatment can be obtained in real time, the optimum heating conditions for the heater can be immediately obtained from the obtained temperature information. Can be controlled as follows. For example, as shown in FIG. 10, at time t ′, the temperatures at nine measurement points (only three points are shown in the graph) of the object to be processed are observed, and the temperature increase at the measurement point a where the temperature is increased rapidly stops. As described above, at time t ″, the temperature rise at other points is stopped until the measurement point c whose temperature rises slowly rises to the temperature T3.
The heater can be controlled. Thus, it is possible to prevent the temperature of the entire object to be processed from being excessively increased or to increase the temperature difference in each part of the object to be processed, and to produce a high-quality product.

Next, a temperature measuring device 164 for an in-line heat treatment apparatus according to a second embodiment of the present invention will be described with reference to FIG.

As in the first embodiment, the hanger 153
15 which engages with a rack 151 attached to the
By the drive of 0, the hanger 153 is conveyed while being guided by the wheels 163 by the rails 165. Hanger 153
From above, a carrier 158 is suspended via a guide tube 154, and the carrier 158 is transported to a processing chamber 157 in which a heat insulating material 155 and a heater 156 are provided. The hanger 153 is provided with an engaged portion 65 similar to that of the first embodiment.
3 is mounted facing up. An engaging portion drive mechanism 114 similar to that of the first embodiment is attached to an upper portion of the housing 157, and the engaging portion 66 faces the connector terminal portion 113.

As in the first embodiment, the carrier 158
An object to be processed (not shown) is accommodated therein. Conductors from the temperature measuring contacts of the nine thermocouples attached to the object to be processed pass through the guide tube 154 and are connected to the connector terminal portion 113. When the temperature is measured, the engaged portion 65 is stopped and engaged with the engaging portion 66. As a result, the temperature of the object to be processed is output to an external measuring means and measured. Also, reference numeral 1
Reference numerals 60a, 160b, and 160c denote thermocouples for measuring a space temperature in the processing chamber 157, which are attached to the housing 157. In addition to the temperature of the object to be processed, the space temperature is also measured and the heater 156 is controlled. This is the same in the first embodiment. Reference numeral 161 denotes a water-cooled electrode of the heater 156, and 152 and 1
Reference numeral 62 denotes a water cooling pipe.

Also in the second embodiment, since the heater can be controlled while measuring the temperature of the object during the heat treatment, the productivity and the quality of the product can be improved.

Although the embodiments of the present invention have been described above, the present invention is, of course, not limited to these embodiments.
Various modifications are possible based on the technical idea of the present invention.

In each of the above embodiments, the terminal is attached to the engaged portion 65 and the socket is attached to the engaging portion 66. However, the order may be reversed.

In each of the above embodiments, the engaging portion 6
Although 6 is attached to the housing of the heat treatment apparatus, the present invention is not limited to this, and another stationary portion may be used. For example, if it is mounted on a stand with casters, the engaging portion 66 can be used in common with other heat treatment devices.

In each of the above embodiments, the guide pipe for guiding the thermocouple wire to the external measuring means is 90a,
90b are used, but the number is not limited to this, and one may be used, for example.

In each of the above embodiments, the rack and the pinion are used as the transport means. However, the present invention is not limited to this. For example, the carrier may be moved by driving a rod in the transport direction by a cylinder device. You may. Further, the transfer means may be provided not on the upper side of the processing chamber but on the lower side or the lateral direction. Further, instead of the wheel, a member that engages with a groove or a protrusion formed on a roller or a rail may be guided along the rail.

Further, in each of the above embodiments, the temperature of the object to be processed is measured at nine points. However, the number of measurement points other than this may be used.
Of course, the number of terminals and sockets is not limited to twelve. Further, a thermocouple of a combination other than alumel and chromel may be used.

[0061]

According to the temperature measuring apparatus for an in-line type heat treatment apparatus of the present invention, the temperature of the object to be processed during the processing can be accurately measured without taking time and effort.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing a temperature measuring device for an in-line heat treatment apparatus according to a first embodiment of the present invention.

FIG. 2 is a sectional view taken along line [2]-[2] in FIG.

FIG. 3 is an enlarged view of an engaged portion in FIG. 1;

FIG. 4 is a sectional view taken along the line [6]-[6] in FIG.

FIG. 5 is an enlarged view of an engaged portion in FIG. 2;

6 is a diagram illustrating a state where the engaged portion has moved rightward during engagement from the state of FIG. 5;

FIG. 7 is a longitudinal sectional view of a main part of the conveying means.

FIG. 8 is a longitudinal sectional view showing a temperature measuring device for an in-line heat treatment apparatus according to a second embodiment of the present invention.

FIG. 9 is a wiring diagram showing a connection of a thermocouple attached to an object to be measured to a measuring means.

FIG. 10 is a graph for explaining the effect of the present invention.

FIG. 11 is a schematic diagram showing temperature measurement of an object to be processed in a batch furnace.

FIG. 12 is a longitudinal sectional view of a conventional in-line heat treatment apparatus.

FIG. 13 is a graph for explaining conventional temperature measurement.

FIG. 14 is a graph for explaining a conventional temperature measurement for comparison with FIG. 13;

[Explanation of symbols]

 33 Cylinder 34 Housing 53 Transport means 58 Drive rod 65 Engaged part 66 Engagement part 77 Rack 81 Processing chamber 82 Heater 85 Carrier 143 Pinion

 ──────────────────────────────────────────────────の Continuing on the front page (72) Inventor Toshiharu Naka 2500 Hagizono, Chigasaki-shi, Kanagawa Japan F-term (reference) 2F056 CL01 4K050 AA02 CA13 CG30 EA02 EA07 4K056 AA09 BA02 BB05 FA04 FA12

Claims (5)

[Claims] 1. A loading chamber and an unloading chamber are provided in front of and behind at least one processing chamber for performing predetermined processing on an object to be processed, and a transfer for sequentially transferring the object into the processing chamber. A temperature measuring apparatus for an in-line heat treatment apparatus, comprising: at least one thermocouple attached to the object to be processed;
Measuring means for measuring the output of the thermocouple; and coupling means provided between the thermocouple and the measuring means, wherein the coupling means comprises an engaging part attached to a stationary part of the processing chamber. And an engaged portion which is attached to the transporting means and moves together in the transporting direction, wherein the engaging portion is connected to the measuring means, and a terminal of the thermocouple is attached to the engaged portion. A temperature measuring device for the in-line type heat treatment apparatus, wherein when the temperature of the workpiece is measured, the engaging portion and the engaged portion are engaged with each other. 2. A pair of spring receiving members are provided on a pedestal fixed to the transporting means in front and rear with respect to the moving direction, and the spring receiving members have through holes formed in parallel with the moving direction. A bolt is inserted into each of the through holes, and a tip portion of a shaft portion of the inserted bolt is fixed to the engaged portion, and a bolt is inserted between the spring receiving member and a head of the bolt. The compression spring is wound around each of the shafts of the bolts, and the engaged portion is attached to the base so as to be movable in the direction of the movement. The temperature measuring device for the in-line heat treatment apparatus according to the above. 3. A spring receiving portion having a through-hole perpendicular to the direction of movement is formed in the conveying means, and a rod is inserted into the through-hole, and both ends of the rod are sandwiched between the spring receiving portion. A contact member, a stopper member larger than the diameter of the through hole is attached, a compression spring is wound around the rod between the spring receiving portion and the contact member,
The temperature measuring device for an in-line heat treatment apparatus according to claim 1, wherein the contact member is in contact with a contact plate provided on the engaged portion. 4. A first cover and a second cover, each of which is capable of opening and closing an engagement surface side, are attached to the engagement portion and the engaged portion, respectively. 4. The device according to claim 1, wherein the second cover is opened by driving a rod of a second cover driving cylinder, and then the second cover is opened by driving a rod of a second cover driving cylinder. 5. Temperature measuring device for in-line heat treatment equipment. 5. A container accommodating the object to be processed is suspended from the transport means via a guide cylinder, and a lead wire from a temperature measuring contact of the thermocouple attached to the object to be processed is provided. The in-line type according to any one of claims 1 to 4, wherein the connection portion is connected to the terminal of the engaged portion attached to the transport means through the inside of the guide cylinder. Temperature measuring device for heat treatment equipment.