JP6827685B2 - Heat treatment equipment - Google Patents

Description

The present invention relates to a heat treatment facility including a processing chamber for heat-treating an object to be processed and a transport unit for carrying in and out the object to be processed to the processing chamber. In particular, when the high-temperature object to be heat-treated is cooled in the heating chamber where the object to be heat-treated, while the low-temperature object to be heat-treated is heated, the high-temperature object to be heat-treated is heated. It is characterized in that the low-temperature object to be treated is heated before being heat-treated by effectively utilizing the heat of the above.

Conventionally, as a heat treatment facility for performing various heat treatments, an object to be treated is sequentially introduced into a long continuous processing furnace, and the object to be processed is sequentially moved in this continuous processing furnace to become an object to be processed. On the other hand, a continuous heat treatment facility in which heat treatment such as heating, soaking, and cooling is continuously performed, and an object to be treated are introduced into an independent batch type heat treatment chamber, and the above-mentioned heat treatment chamber is used. A batch type heat treatment facility is known in which heat treatment such as heating, soaking, and cooling is individually performed on an object.

Here, in the case of a continuous heat treatment facility, since the object to be treated is continuously heat-treated in a constant heat treatment pattern, the productivity is good, but the heat treatment patterns such as temperature rise and temperature decrease are constant, as in recent years. There was a problem that it was not possible to flexibly respond to the request to produce various kinds of products in small quantities.

On the other hand, in the batch type heat treatment equipment, the object to be processed is introduced into the independent batch type heat treatment chamber as described above, and the object to be processed is heated, soothed, cooled, etc. in this heat treatment chamber. Since the heat treatments are individually performed one by one, it takes a lot of time to heat-treat one object to be treated, which causes a problem that productivity is deteriorated.

Further, in recent years, as shown in Patent Documents 1 to 3, etc., as a heat treatment chamber for heat-treating the object to be treated, a heating chamber for heat-treating the object to be treated and cooling for cooling the heat-treated object are cooled. A heat treatment facility is shown in which chambers and the like are separately provided and a transport unit for transporting an object to be processed to a heating chamber, a cooling chamber, or the like is provided.

Then, in the heat treatment equipment, the object to be processed is carried into the transport unit from the carry-in portion or the like, the transport unit is moved to the position of the heating chamber and connected to the heating chamber, and the object to be treated is transported. It is carried into the heating chamber from the unit, and the object to be treated is uniformly heated to a predetermined temperature in the heating chamber to be treated.

After that, the transport unit is moved to the position of the heating chamber, the transport unit is connected to the heating chamber, and the object to be appropriately heated in the heating chamber is carried into the transport unit, and then the transport unit is carried. Is moved to the position of the cooling chamber and connected to the cooling chamber, and the heated object to be processed is carried into the cooling chamber from the transport unit to be cooled.

Then, as described above, a new object to be processed is carried into the transport unit, and the above operations are repeated to heat-treat the object to be processed in order.

Here, when the object to be treated, which has been heated to a predetermined temperature in the heating chamber as described above, is carried into the cooling chamber by the transport unit and cooled, the heat-treated object is subjected to a short time. It will be possible to cool it with.

However, when it is not necessary to cool the heat-treated object in a short time as described above, or when the heat-treated object is slowly cooled, carbon is slowly immersed in iron particles or the like to carry out iron carbide. In the case of spheroidizing particles or the like, the heat of the object to be heat-treated to a predetermined temperature cannot be effectively used, for example, the heat of the object to be heat-treated to a predetermined temperature. Could not be effectively used to heat a new object to be treated, and the time for carrying the new object to be processed into a heating chamber and heating it to a predetermined temperature for processing could not be shortened.

Japanese Unexamined Patent Publication No. 2013-64184 Japanese Unexamined Patent Publication No. 2006-63363 Japanese Unexamined Patent Publication No. 2016-3372

An object of the present invention is to solve the above-mentioned problems in a heat treatment facility provided with a processing chamber for heat-treating an object to be processed and a transport unit for carrying in and out of the object to be processed to the processing chamber. To do.

That is, in the present invention, the high-temperature object to be heat-treated is cooled in the heating chamber for heat-treating the object to be treated, while the low-temperature object to be heat-treated before being heat-treated is heat-treated. An object of the present invention is to make it possible to effectively utilize the heat of a high-temperature object to be processed.

In the first heat treatment facility of the present invention, in order to solve the above-mentioned problems, at least a heating chamber for heat-treating the object to be treated and a heating chamber for heat-treating the object to be treated are heat-treated as the treatment chamber for heat-treating the object to be treated. A heat exchange chamber in which a hot object to be treated and a low temperature object that has not been heat-treated are vertically arranged and housed together to exchange heat between the high temperature object and the low temperature object. A cooling chamber for cooling the object to be processed after heat treatment and heat exchange is provided, and a transfer unit for carrying in and out the object to be processed is provided for each processing chamber. When, in a state of being sealed at least between the heating chamber and the heat exchange chamber, so as to loading and unloading an object to be processed, Ru provided an elevating member is raised and lowered by the lifting device into the heat exchange chamber of the At the same time, a rotating device for rotating a fan rotating in the heat exchange chamber is provided on the wall of the heat exchange chamber on the side opposite to the side connected to the transport unit, and the elevating member is raised and lowered to raise the temperature in the heat exchange chamber. The object to be processed and the object to be processed at a low temperature were housed side by side in the vertical direction, and in this state, the fan was rotated by the above- mentioned rotating device .

Then, as the first heat treatment equipment, and the high temperature of the workpiece which has been heat treated in a heating chamber, and a low temperature of the object that has not been heat treated together with it is housed together with the heat exchange chamber of the When the fan is rotated in the heat exchange chamber by the above-mentioned rotating device, heat is exchanged between the high-temperature object to be processed and the low-temperature object to be processed in the heat exchange chamber, and the heat-treated high-temperature object is used. The heat radiated heats the low-temperature object to be treated, which has not been heat-treated, and exchanges heat. In this way, the heat of the heat-treated high-temperature object to be treated can be effectively utilized, and the time for heating the unheat-treated low-temperature object to be processed in the heating chamber can be shortened. ..

Further, when the object to be processed is carried in and out in a state where the transfer unit and at least the heating chamber and the heat exchange chamber are sealed as in the first heat treatment facility. When a high-temperature object to be heat-treated between the transfer unit and the heating chamber or heat exchange chamber is carried in and out, the heat in the heating chamber or heat exchange chamber leaks to the outside or is heat-treated. It is possible to prevent the hot object to be treated from coming into contact with air and being oxidized.

In the first heat treatment equipment of the, in the heat exchange chamber of said, per the object to be processed in a low temperature which is not heat treated with an object to be processed of the heat treated high temperature is accommodated side by side in the vertical direction, the An elevating member that is elevated and lowered by an elevating device is provided in the heat exchange chamber, and the elevating member is elevated so that the high temperature object to be processed and the low temperature object to be processed are vertically arranged and accommodated in the heat exchange chamber. ..

Here, when the heat-treated high-temperature object and the non-heat-treated low-temperature object are housed vertically side by side in the heat exchange chamber, the heat-treated high-temperature object is placed. When the low-temperature object to be treated that has not been heat-treated is stored under the low-temperature object to be treated, the heat of the high-temperature object to be processed that is stored on the lower side rises toward the low-temperature object that is stored on the upper side. Sufficient heat is dissipated, and heat exchange between the high-temperature object to be processed and the low-temperature object to be processed can be appropriately performed in a short time.

Further, in the second heat treatment facility of the present invention, in order to solve the above-mentioned problems, at least a heating chamber for heat-treating the object to be treated and a heat treatment chamber for heat-treating the object to be treated are heat-treated. A cooling chamber for cooling the object to be processed is provided, and a transfer unit for carrying in and out the object to be processed is provided in each processing chamber. In the transfer unit, the high temperature heat-treated in the heating chamber is provided. In carrying out heat exchange between the high-temperature object and the low-temperature object by vertically arranging the object to be processed and the low-temperature object to be treated and accommodating them together, the above-mentioned Rutotomoni provided an elevating member is raised and lowered by the lifting device in the conveying unit, a rotating device for rotating the fan to rotate in the conveying unit to a wall of the transport unit in the side opposite to the side to be connected to the processing chamber is provided, by lifting the lift member, and a high temperature of the workpiece and cold of the workpiece is housed side by side in a direction perpendicular to the transport unit, in this state, as well as to rotate the fan by the rotary device , The object to be processed is carried in and out with the above-mentioned transport unit and at least the above-mentioned heating chamber sealed.

Then, as the second heat treatment equipment, in the transport unit, is accommodated and the high temperature of the workpiece which has been heat treated in a heating chamber, and a low temperature of the object that has not been heat treated together Rutotomoni When the fan is rotated in the transport unit by the rotating device to exchange heat between the high-temperature object to be processed and the low-temperature object to be processed, the same as in the first heat treatment facility described above. The heat radiated from the heat-treated high-temperature object to be treated heats the unheat-treated low-temperature object to be treated, and the heat of the heat-treated high-temperature object is effectively utilized for heat treatment. It is also possible to shorten the time for heating the untreated low-temperature object to be treated in the heating chamber.

Further, when the object to be processed is carried in and out in a state where the transfer unit and at least the heating chamber are sealed as in the second heat treatment facility, the transfer unit and the heating are performed. When a high-temperature heat-treated object is carried in and out of the chamber, the heat in the heating chamber leaks to the outside, or the heat-treated high-temperature object comes into contact with air. It can be prevented from being oxidized.

In the second heat treatment equipment of the, in the transport unit, per the object to be processed in a low temperature which is not heat treated with an object to be processed of the heat treated high temperature is accommodated side by side in the vertical direction, the A lifting member that is lifted and lowered by a lifting device is provided in the transport unit, and the lifting member is lifted and lowered so that the high-temperature object to be processed and the low-temperature object to be processed are vertically arranged and accommodated in the transfer unit. ..

Here, when the heat-treated high-temperature object to be processed and the non-heat-treated low-temperature object to be processed are vertically arranged and accommodated in the transport unit, the heat-treated high-temperature object is stored. When the low-temperature object to be treated that has not been heat-treated is stored under the low-temperature object to be treated, the heat of the high-temperature object to be treated that is stored in the lower side rises, and it is sufficient toward the low-temperature object that is stored in the upper side. The heat is dissipated to the heat, and heat exchange between the high-temperature object to be processed and the low-temperature object to be processed can be appropriately performed in a short time.

In the first heat treatment facility of the present invention, the high-temperature object to be heat-treated in the heating chamber and the low-temperature object to be heat-treated are housed together in the heat exchange chamber, and in this heat exchange chamber. The heat radiated from the heat-treated high-temperature object is used to heat the unheated low-temperature object to exchange heat. In the second heat treatment facility, the inside of the transport unit is used. The high-temperature object to be heat-treated in the heating chamber and the low-temperature object to be heat-treated are housed together, and heat is dissipated from the high-temperature object to be heat-treated in this transport unit. The low-temperature object to be treated, which has not been heat-treated, is heated by the heat to exchange heat.

As a result, in the first and second heat treatment facilities, the high-temperature object to be heat-treated in the heating chamber is cooled, while the low-temperature object to be heat-treated before the heat treatment is heated. The heat of the high-temperature object to be treated can be effectively used, and the time for heating the low-temperature object to be treated that has not been heat-treated in the heating chamber and the time to heat the high-temperature object to be heat-treated in the cooling chamber It also becomes possible to shorten the cooling time in.

In the reference embodiment of the heat treatment equipment according to the first embodiment of the present invention, a carry-in portion for carrying the object to be processed into the transport unit, a heating chamber for heat-treating the object to be processed, and a high temperature heat-treated in the heating chamber. A heat exchange chamber in which an object to be treated and a low-temperature object to be heat-treated are housed together to exchange heat between the high-temperature object and the low-temperature object to be treated, and a heat-treated object. The cooling chamber for cooling the processed object and the carrying-out portion for carrying out the object to be processed cooled in the cooling chamber are made to face the transport unit traveling along the traveling rail, and are sequentially arranged in the traveling direction of the transport unit. It is a schematic plan view which showed the arranged state. In the reference embodiment of the heat treatment equipment according to the first embodiment , it is a schematic plan view showing a state in which an object to be treated before heat treatment is carried into a transport unit from a carry-in portion. In the reference embodiment of the heat treatment equipment according to the first embodiment , the transport unit carrying the object to be processed is guided to the position of the heating chamber, and the connecting portion of the transport unit and the connecting portion of the heating chamber are sealed. It is a schematic plan view which showed the state which was connected in the state, and the object to be processed carried into a transport unit is carried into a heating chamber, while the new object to be processed is guided to a carry-in part. In the reference embodiment of the heat treatment equipment according to the first embodiment , it is a schematic cross-sectional explanatory view showing a state in which the transport unit in which the object to be processed is carried is guided to a position facing the heating chamber. In the reference embodiment of the heat treatment equipment according to the first embodiment , the connecting portion of the transport unit and the connecting portion of the heating chamber are connected in a state where the transport unit carrying the object to be processed is guided to a position facing the heating chamber. Is a schematic cross-sectional explanatory view showing a state in which the above-mentioned object to be processed in the transport unit is carried into the heating chamber by connecting the above-mentioned objects in a sealed state and opening the opening / closing door between the transport unit and the heating chamber. In the reference embodiment of the heat treatment equipment according to the first embodiment , after the object to be processed in the transport unit is carried into the heating chamber, the opening / closing door between the transport unit and the heating chamber is closed, and the transport unit is moved from the heating chamber. It is schematic cross-sectional explanatory view which showed the state which heat-treated the object to be processed carried into a heating chamber while separating. In the reference embodiment of the heat treatment equipment according to the first embodiment , a new object to be processed, which is guided to the carry-in portion, is carried into the transport unit, and the transport unit is moved to a position facing the heat exchange chamber. It is a schematic plan view which showed the state which the object to be carried into this transfer unit was carried into a heat exchange chamber through one connecting part of a heat exchange chamber. FIG. 5 is a schematic cross-sectional explanatory view showing a state in which a transfer unit containing an object to be processed is guided to a position facing the heat exchange chamber in the reference embodiment of the heat treatment equipment according to the first embodiment. In the reference embodiment of the heat treatment equipment according to the first embodiment , a state in which the connecting portion of the transport unit and the connecting portion of the heat exchange chamber are sealed in a state where the transport unit is guided to a position facing the heat exchange chamber. It is a schematic cross-sectional explanatory view which showed the state which opened the opening / closing door in a transfer unit and a heat exchange chamber, and carried an object to be processed in a transfer unit into a heat exchange chamber. In the reference embodiment of the heat treatment equipment according to the first embodiment , the object to be processed in the transport unit is carried into the heat exchange chamber, the opening / closing door between the transport unit and the heating chamber is closed, and then the transport unit is moved to the heating chamber. It is a schematic cross-sectional explanatory view which showed the state of being separated from. In the reference embodiment of the heat treatment equipment according to the first embodiment , after the high-temperature object to be heat-treated in the heating chamber is carried into the transport unit, the transport unit is transferred to the other in the heat exchange chamber. FIG. 5 is a schematic plan view showing a state in which the heat-treated object to be treated, which has been moved to a position facing the connecting portion and carried into the transport unit, is carried into the heat exchange chamber through the other connecting portion. .. In the reference embodiment of the heat treatment facility according to the first embodiment, heat exchange is performed in a state where the heat-treated object to be treated and the heat-treated high-temperature object to be treated are carried into the heat exchange chamber. While rotating the fan in the room to exchange heat between the unheat-treated object and the heat-treated high-temperature object, the heat-treated object is cooled to an appropriate temperature. , Is a schematic cross-sectional explanatory view showing a state in which the object to be treated before the heat treatment, which has been carried in earlier, is heated to an appropriate temperature. In the reference embodiment of the heat treatment equipment according to the first embodiment , the object to be treated before the heat treatment, which has been heated to an appropriate temperature in the heat exchange chamber, is carried into the transport unit through one connecting portion, and the transport unit is carried. Is guided to the position of the heating chamber, the object to be treated before the heat treatment is carried into the heating chamber from the inside of the transport unit, and the object to be treated before the heat treatment heated to an appropriate temperature is further carried into the heating chamber. It is a schematic plan view which showed the state of heat treatment. In the reference embodiment of the heat treatment equipment according to the first embodiment , the object to be heat-treated, which has been cooled to an appropriate temperature in the heat exchange chamber, is carried into the transport unit through the other connecting portion, and the transport unit is carried. Is guided to the position of the cooling chamber, the object to be treated after the heat treatment is carried into the cooling chamber from the inside of the transport unit, and the object to be treated cooled to an appropriate temperature after the heat treatment is further cooled in the cooling chamber. It is a schematic plan view which showed the state which guides a new object to be processed to a carry-in part. In the reference embodiment of the heat treatment equipment according to the first embodiment , the state in which the transport unit in which the object to be treated after the heat treatment cooled to an appropriate temperature is carried in is guided to a position facing the cooling chamber is shown. It is a schematic cross-sectional explanatory view. In the reference embodiment of the heat treatment equipment according to the first embodiment , the transport unit carrying the object to be treated after the heat treatment cooled to an appropriate temperature is guided to a position facing the cooling chamber. A state in which the connecting portion of the unit and the connecting portion of the cooling chamber are connected in a sealed state, the opening / closing door between the transport unit and the cooling chamber is opened, and the object to be processed in the transport unit is carried into the cooling chamber. It is a schematic cross-sectional explanatory view shown. In the reference embodiment of the heat treatment equipment according to the first embodiment , after the object to be heat-treated, which has been cooled to an appropriate temperature from the inside of the transport unit, is carried into the cooling chamber, the transfer unit and the cooling chamber are used. It is schematic cross-sectional explanatory view which showed the state which closed the opening and closing door, separated the transport unit from a cooling chamber, and further cooled the object to be processed carried into a cooling chamber. In the heat treatment equipment according to the first embodiment of the present invention, in the heat treatment equipment, the low temperature object to be treated before the heat treatment and the high temperature object to be treated after the heat treatment are vertically moved into the heat exchange chamber. The transfer unit containing the object to be treated before heat treatment is connected to the heat exchange chamber in a sealed state, and the opening / closing door between the transfer unit and the heat exchange chamber is opened to exchange heat with the transfer unit. FIG. 5 is a schematic cross-sectional explanatory view showing a state in which the object to be processed in the transport unit is carried into the heat exchange chamber and held on a holding table in this state by communicating with the chamber. In the heat treatment equipment according to the first embodiment of the closed opening and closing door in the transport unit and the heat exchange chamber, with separating the conveying unit from the heat exchange chamber is held heat treated to holder of the heat exchange chamber In the schematic cross-sectional explanatory view showing a state in which the object to be processed is held by an elevating member that is elevated and lowered by an elevating device provided on the heat exchange chamber and is raised, and is held above the holding table. is there. In the heat treatment facility according to the first embodiment, the transport unit carrying the high-temperature object to be heat-treated in the heating chamber is connected to the heat exchange chamber in a sealed state, and the transport unit and the heat exchange chamber are connected. The opening / closing door of the above is opened to communicate the transport unit and the heat exchange chamber, and in this state, the heat-treated high-temperature object to be treated in the transport unit is carried into the heat exchange chamber and held on the holding table. It is a schematic cross-sectional explanatory view which showed the state. In the heat treatment facility according to the first embodiment, the opening / closing door between the transfer unit and the heat exchange chamber is closed, the transfer unit is separated from the heat exchange chamber, and then the fan in the heat exchange chamber is rotated to exchange heat. Heat treatment is performed by exchanging heat between the heat-treated high-temperature object held on the holding table in the room and the object to be heat-treated held above the holding table by the elevating member. It is a schematic cross-sectional explanatory view showing the state which shows the state which cools the object to be processed afterwards to an appropriate temperature, and heats the object to be processed before heat treatment to an appropriate temperature. In the heat treatment equipment according to the second embodiment of the present invention, a carry-in unit for carrying the object to be processed into the transport unit, a heating chamber for heat-treating the object to be processed, and a cooling chamber for cooling the heat-treated object. And the carrying-out portion for carrying out the object to be processed cooled in the cooling chamber are arranged in order in the traveling direction of the transport unit so as to face the transport unit traveling along the traveling rail, and the above-mentioned transporting is performed. When the low-temperature object to be treated before heat treatment and the high-temperature object to be heat-treated are placed in the unit in the vertical direction and carried in, the object to be treated before heat treatment is carried in from the above-mentioned carry-in portion. Is a schematic plan view showing a state in which the vehicle is carried into the transport unit. In the heat treatment equipment according to the second embodiment, the transport unit to which the object to be treated before the heat treatment is carried is guided to the position of the heating chamber, and the transport unit and the heating chamber are connected in a sealed state. It is a schematic plan view which showed the state which brought in the object to be processed before the heat treatment carried into a transport unit, and is leading a new object to be processed to a carry-in part. In the heat treatment equipment according to the second embodiment, the object to be treated before the heat treatment in the transport unit guided to the position facing the heating chamber is carried into the heating chamber, and the object to be treated is heat-treated. It is schematic cross-sectional explanatory view which showed the state which performs. In the heat treatment equipment according to the second embodiment, the new object to be treated guided to the carry-in portion is carried into the transport unit, and the object to be treated before the heat treatment carried into the transport unit is carried into the transport unit. It is held and lifted by a lifting member that is lifted and lowered by a lifting device provided on the transport unit, and is held above the loading / unloading member in the transport unit, and the transport unit is held as described above for the object to be processed. It is a schematic cross-sectional explanatory view which showed the state which led to the position facing the heating chamber which had been heat-treated. In the heat treatment equipment according to the second embodiment, the transport unit is communicated with the heating chamber, and the object to be heat-treated in the heating chamber is carried by the carry-in / carry-out member in the transport unit. It is schematic cross-sectional explanatory view which showed the state which carried in the transfer unit. In the heat treatment equipment according to the second embodiment, the opening / closing door between the transport unit and the heating chamber is closed, and the fan in the transport unit is rotated while the transport unit is separated from the heating chamber. Between the heat-treated high-temperature object held by the carry-in / carry-out member in the transport unit and the object to be heat-treated held above the carry-in / carry-out member by the elevating member. It is a schematic cross-sectional explanatory view showing a state in which the object to be treated after the heat treatment is cooled to an appropriate temperature while the object to be treated before the heat treatment is heated to an appropriate temperature. In the heat treatment equipment according to the second embodiment, the transport unit was guided to a position facing the cooling chamber, and the transport unit and the cooling chamber were communicated with each other and cooled to an appropriate temperature in the transport unit. FIG. 5 is a schematic cross-sectional explanatory view showing a state in which the object to be treated after the heat treatment is carried into the cooling chamber by the carry-in / carry-out member. In the heat treatment equipment according to the second embodiment, the object to be treated after the heat treatment is subjected to a state in which the opening / closing door between the transport unit and the cooling chamber is closed and the transport unit is separated from the cooling chamber. A state in which the object to be heat-treated, which has been heated to an appropriate temperature in the transport unit, is lowered by the elevating member and held on the carry-in / carry-out member while being further cooled in the cooling chamber. It is a schematic cross-sectional explanatory view which showed. In the heat treatment equipment according to the second embodiment, the carrying-in / carrying-out member is in a state where the carrying unit is guided to a position facing the heating chamber and the transport unit is communicated with the heating chamber. FIG. 5 is a schematic cross-sectional explanatory view showing a state in which an object to be heat-treated, which is held above and heated to an appropriate temperature, is carried into a heating chamber from the inside of a transport unit.

Hereinafter, the heat treatment equipment according to the embodiment of the present invention will be specifically described with reference to the accompanying drawings. The heat treatment equipment according to the present invention is not limited to the equipment shown in the following embodiments, and can be appropriately modified and implemented without changing the gist of the invention.

(First Embodiment)
In the heat treatment equipment according to the reference embodiment of the first embodiment, as shown in FIG. 1 and the like, the carry-in unit 1 for carrying in the object to be processed W and the object to be processed W are heated to a predetermined temperature in a non-oxidizing atmosphere. The heating chamber 10 to be heat-treated and the high-temperature object W to be heat-treated in the heating chamber 10 and the low-temperature object W not to be heat-treated are housed together to accommodate the high-temperature object to be processed. It is cooled in the heat exchange chamber 20 that exchanges heat between W and the low-temperature object W, the cooling chamber 30 that cools the object W that has been heat-treated and heat-exchanged, and the cooling chamber 30. The carry-out unit 2 for carrying out the object to be processed W is arranged in order in the traveling direction of the transport unit 40 so as to face the transport unit 40 traveling along the traveling rail L.

Here, in the transport unit 40 in this reference embodiment , as shown in FIG. 1 and the like, the transport unit 40 is placed in a portion facing the heating chamber 10, the heat exchange chamber 20, and the cooling chamber 30. A connecting portion 41 for connecting to the heat exchange chamber 20 and the cooling chamber 30 in a sealed state is provided, and an opening / closing door 42 for opening and closing an opening portion for carrying in / out the object W to be processed is provided through the connecting portion 41. Further, in the transport unit 40, as shown in FIG. 4 and the like, a stretchable carry-in / carry-out member 43 for carrying in / out the object W to be processed is provided in the transport unit 40.

Here, in this reference embodiment , in order to clarify whether the object W to be treated is before or after the heat treatment in the heating chamber 10, the object to be treated before the heat treatment is used. W is shown as an object W1 to be processed, and the object W to be processed after heat treatment is shown as an object W2 to be processed.

Then, in this reference mode , as shown in FIG. 2, the transport unit 40 is guided to the position of the carry-in portion 1, and although not shown, the opening / closing door 42 of the transport unit 40 is opened / closed. The carry-in / carry-out member 43 provided in the transport unit 40 causes the object to be processed W1 before the heat treatment to be carried into the transport unit 40 from the carry-in unit 1.

Next, as shown in FIG. 3, the transport unit 40 into which the object to be processed W1 is carried in is moved to a position facing the heating chamber 10 along the traveling rail L, and is carried into the transport unit 40. The object to be processed W1 is carried out from the transport unit 40 and carried into the heating chamber 10. Further, the next object to be processed W1 is guided to the carry-in portion 1 at an appropriate timing.

Here, in the heating chamber 10, as shown in FIGS. 3 to 6, in a sealed state with the connecting portion 41 of the transport unit 40 so as to correspond to the connecting portion 41 of the transport unit 40. A connecting portion 11 to be connected is provided, and an opening / closing door 12 for opening and closing an opening portion for carrying in / out the object to be processed W (W1, W2) is provided through the connecting portion 11, and the object to be processed W (W) is provided in the heating chamber 10. A holding table 13 for holding W1 and W2) is provided, and a heating device (not shown) such as an electric heater for heating the object to be processed W1 before the heat treatment is provided in the heating chamber 10.

Then, when the object W1 to be processed before the heat treatment is carried out from the transport unit 40 and carried into the heating chamber 10 as described above, the transport unit 40 faces the heating chamber 10 as shown in FIG. As shown in FIG. 5, the connecting portion 41 of the transport unit 40 is connected to the connecting portion 11 of the heating chamber 10 in a sealed state, and the opening / closing door 42 of the transport unit 40 and the heating chamber 10 are connected to each other. The opening / closing door 12 of the above is opened to communicate the transport unit 40 and the heating chamber 10, and in this state, the object to be processed W1 before the heat treatment in the transport unit 40 is carried by the above-mentioned carry-in / carry-out member 43. The object W1 to be processed is held on the holding table 13 provided in the heating chamber 10 by carrying it out of the transport unit 40 and carrying it into the heating chamber 10.

Further, after the object W1 to be processed is held on the holding table 13 in the heating chamber 10 in this way, as shown in FIG. 6, the opening / closing door 42 of the transport unit 40 and the opening / closing door 12 of the heating chamber 10 are used. After closing and, the transport unit 40 connected to the heating chamber 10 in a sealed state is separated from the heating chamber 10, and the holding table 13 is provided by the heating device (not shown) provided in the heating chamber 10. The object to be treated W1 before the heat treatment held in the heating chamber 10 is heated to a predetermined temperature in the heating chamber 10 and heat-treated over a predetermined time to obtain the heat-treated object W2.

Next, as shown in FIG. 7, the object to be processed W1 before the next heat treatment guided to the carry-in section 1 is carried into the transport unit 40 from the carry-in section 1 as described above, and then. The transfer unit 40 is moved along the traveling rail L to a position facing the heat exchange chamber 20, and the object to be processed W1 carried into the transfer unit 40 is carried out from the transfer unit 40 for heat exchange. Let it be carried into the room 20.

Here, in the heat exchange chamber 20 in this reference embodiment , as shown in FIGS. 8 to 10, the transport unit 40 is used as the connecting portion 21 to be connected to the connecting portion 41 in the transport unit 40 in a sealed state. Two connecting portions 21a and 21b are provided in parallel in the horizontal direction along the moving direction of the above, and the object to be processed W (W1, W2) is passed from the conveying unit 40 into the heat exchange chamber 20 through the connecting portion 21. As the opening / closing door 22 for opening / closing the opening to be carried in / out, two opening / closing doors 22a and 22b are provided in parallel in the horizontal direction corresponding to the respective connecting portions 21a and 21b, and in the heat exchange chamber 20. As the holding table 23 for holding the object W to be processed, two holding tables 23a and 23b for holding the two objects W (W1, W2) to be heat-exchanged are provided, and further provided above the heat exchange chamber 20. A fan 25 rotated by the rotating device 24 is provided in the heat exchange chamber 20.

Then, in carrying the object to be processed W1 before heat treatment carried into the transport unit 40 from the carry-in unit 1 into the heat exchange chamber 20 as described above, as shown in FIG. 7 in this embodiment. The transport unit 40 is moved so that the connecting portion 41 in the transport unit 40 faces one of the connecting portions 21a in the heat exchange chamber 20, and as shown in FIG. 8, the connecting portion 41 in the transport unit 40 is heat exchanged. After being connected to one connecting portion 21a in the chamber 20 in a sealed state, as shown in FIG. 9, the opening / closing door 42 of the transport unit 40 and the one opening / closing door 22a in the heat exchange chamber 20 are opened to form the transport unit 40. In this state, the object to be processed W1 in the transport unit 40 is carried out from the transport unit 40 by the carry-in / carry-out member 43 and carried into the heat exchange chamber 20 in communication with the heat exchange chamber 20. It is made to be held on one holding table 23a provided in the heat exchange chamber 20.

Further, after the object to be treated W1 before the heat treatment is held on one of the holding tables 23a provided in the heat exchange chamber 20, as shown in FIG. 10, the transfer unit 40 opens and closes. After closing the door 42 and the opening / closing door 22a in the heat exchange chamber 20, the transport unit 40 connected to the heat exchange chamber 20 is separated from the heat exchange chamber 20.

Next, as shown in FIG. 11, the transport unit 40 is guided to the position of the heating chamber 10 in which the object to be processed W2 is heat-treated by the heating device provided in the heating chamber 10 as described above, and is transported as described above. The connecting portion 41 of the unit 40 is connected to the connecting portion 11 of the heating chamber 10 in a sealed state, and the opening / closing door 42 of the transport unit 40 and the opening / closing door 12 of the heating chamber 10 are opened to communicate the transport unit 40 and the heating chamber 10. In this state, the high-temperature object W2 heat-treated in the heating chamber 10 is carried into the transport unit 40 from the heating chamber 10 by the carry-in / carry-out member 43 in the transport unit 40. The opening / closing door 42 of the transport unit 40 and the open / close door 12 of the heating chamber 10 are closed to separate the transport unit 40 into which the heat-treated high-temperature object W2 is carried from the heating chamber 10 as described above.

Then, as shown in FIG. 11, the transfer unit 40 into which the high-temperature object W2 heat-treated is carried in, and the connecting portion 41 in the transfer unit 40 is the other in the heat exchange chamber 20. It is moved so as to face the connecting portion 21b, and as described above, the connecting portion 41 in the transport unit 40 is connected to the other connecting portion 21b in the heat exchange chamber 20 in a sealed state, and heat exchanges with the opening / closing door 42 of the transport unit 40. The other opening / closing door 22b in the chamber 20 is opened to communicate the transport unit 40 and the heat exchange chamber 20, and in this state, the heat-treated high-temperature object W2 in the transport unit 40 is carried in. It is carried out from the transport unit 40 by the carry-out member 43 and carried into the heat exchange chamber 20, and is held on the other holding table 23b provided in the heat exchange chamber 20.

Next, after the high-temperature object W2 heat-treated in this way is held on the other holding table 23b provided in the heat exchange chamber 20, the opening / closing door 42 and the heat exchange chamber 20 in the transport unit 40 are held. After closing the opening / closing door 22b in the above, the transport unit 40 connected to the heat exchange chamber 20 is separated from the heat exchange chamber 20.

Then, as shown in FIG. 12, the heat exchange chamber 20 contains the object W1 to be treated before the heat treatment and the high temperature object W2 to be heat-treated in the heat exchange chamber 20. The fan 25 provided in the 20 is rotated by the rotating device 24 to generate an air flow in the heat exchange chamber 20, and the heat-treated high-temperature object W2 carried into the heat exchange chamber 20 is carried in first. The heat-treated object W2 is cooled to an appropriate temperature by exchanging heat with the above-mentioned object W1 to be processed, while the previously carried-in object W1 before heat treatment is subjected to heat exchange. Try to heat to a suitable temperature.

Then, after heat exchange is performed between the high-temperature object W2 that has been heat-treated in this way and the object W1 that has been previously carried in, heat treatment is performed as shown in FIG. The transport unit 40 is moved so that one connecting portion 21a in the heat exchange chamber 20 into which the previous object to be processed W1 is carried in and the connecting portion 41 in the transport unit 40 face each other, and the transport unit 40 is moved as described above. After connecting the connecting portion 41 in the heat exchange chamber 20 to one connecting portion 21a in the heat exchange chamber 20 in a sealed state, the opening / closing door 42 of the transport unit 40 and the one opening / closing door 22a in the heat exchange chamber 20 are opened to form the transport unit 40. The object to be treated W1 before heat treatment, which is communicated with the heat exchange chamber 20 and has been heat-exchanged in the heat exchange chamber 20 and heated to an appropriate temperature, is carried out from the heat exchange chamber 20 and into the transport unit 40. Bring it in.

Next, as shown in FIG. 13, the transport unit 40 is guided to the position of the heating chamber 10, and the connecting portion 41 in the transport unit 40 is connected to the connecting portion 11 in the heating chamber 10 in a sealed state as described above. Then, the opening / closing door 42 of the transport unit 40 and the open / close door 12 of the heating chamber 10 are opened to communicate the transport unit 40 and the heating chamber 10, and in this state, heating is performed to an appropriate temperature in the transport unit 40. The object to be treated W1 before the treatment is carried into the heating chamber 10.

After that, the opening / closing door 42 of the transport unit 40 and the opening / closing door 12 of the heating chamber 10 are closed as described above to separate the transport unit 40 from the heating chamber 10 as described above, and at an appropriate temperature as described above. The object to be treated W1 before the heat treatment, which has been heated up to the above, is heated to a predetermined temperature in the heating chamber 10 to be heat-treated.

Further, as shown in FIG. 14, the transport unit 40 is such that one connecting portion 21b in the heat exchange chamber 20 into which the heat-treated object W2 is carried in and the connecting portion 41 in the transport unit 40 face each other. To connect the connecting portion 41 in the transport unit 40 to one connecting portion 21b in the heat exchange chamber 20 in a sealed state as described above, and then one of the opening / closing door 42 of the transport unit 40 and the heat exchange chamber 20. The opening / closing door 22b is opened to communicate the transport unit 40 and the heat exchange chamber 20, and the heat exchange chamber 20 is used to exchange heat in the heat exchange chamber 20 to cool the heat-treated object W2 to an appropriate temperature. It is carried out from the inside of the 20 and carried into the transport unit 40.

After that, as shown in FIG. 14, the transport unit 40 is guided to the position of the cooling chamber 30, and the heat-treated object W2 cooled to an appropriate temperature is cooled from the inside of the transport unit 40. It is carried into the chamber 30, and the object to be treated W2 after the heat treatment, which has been cooled to an appropriate temperature, is further cooled in the cooling chamber 30.

Here, in the cooling chamber 30, as shown in FIGS. 15 to 17, the connecting portion 41 of the transport unit 40 is sealed so as to correspond to the connecting portion 41 of the transport unit 40. A connecting portion 31 to be connected is provided, and an opening / closing door 32 for opening and closing an opening portion for carrying in / out the object to be processed W2 after heat treatment cooled to an appropriate temperature through the connecting portion 31 is provided, and the inside of the cooling chamber 30 is provided. A holding table 33 for holding the object to be processed W2 is provided.

Then, when the object W2 to be heat-treated, which has been cooled to an appropriate temperature as described above, is carried out from the transport unit 40 and carried into the cooling chamber 30, as shown in FIG. 15, the transport unit 40 is used. Is moved to a position facing the cooling chamber 30, and then, as shown in FIG. 16, the connecting portion 41 in the transport unit 40 is connected to the connecting portion 31 in the cooling chamber 30 in a sealed state, and the transport unit 40 is opened and closed. The door 42 and the opening / closing door 32 of the cooling chamber 30 are opened to communicate the transport unit 40 and the cooling chamber 30, and in this state, the object to be processed W2 in the transport unit 40 is carried in / out. The object W2 to be processed is held on the holding table 33 provided in the cooling chamber 30 by being carried out from the transport unit 40 by 43 and carried into the cooling chamber 30.

Further, after the object W2 to be processed is held on the holding table 33 in the cooling chamber 30 in this way, as shown in FIG. 17, the opening / closing door 42 of the transport unit 40 and the opening / closing door 32 of the cooling chamber 30 After that, the transport unit 40, which is hermetically connected to the cooling chamber 30, is separated from the cooling chamber 30, and the object W2 to be processed, which has been cooled to an appropriate temperature, is further cooled in the cooling chamber 30.

Next, after cooling the object to be processed W2 after being heat-treated in this way in the cooling chamber 30, although not shown, the transport unit 40 is guided to the position of the cooling chamber 30 and cooled. The object W2 to be processed after the heat treatment further cooled in the chamber 30 is carried into the transport unit 40 from the cooling chamber 30, and then the transport unit 40 is guided to the position of the carry-out unit 2 and the transport unit The object W2 to be heat-treated, which has been further cooled in the cooling chamber 30 from the inside of 40, is carried out to the carry-out unit 2.

Here, in this reference embodiment , only one heating chamber 10 and one heat exchange chamber 20 are provided, but in the heating chamber 10, the time required to heat the object to be processed W1 to a predetermined temperature for heat treatment. On the other hand, when the time for heat exchange between the high temperature object W2 after the heat treatment and the low temperature object W1 before the heat treatment in the heat exchange chamber 20 is short, 1 A plurality of heating chambers 10 may be provided for each heat exchange chamber 20. In this way, the object to be treated W1 before the heat treatment, which has been heat-exchanged in the heat exchange chamber 20 and heated to an appropriate temperature, is carried into another heating chamber 10 to determine the object to be treated W1. Heat that accommodates a high-temperature object W2 that has been heat-treated to a temperature or has been heat-treated to a predetermined temperature in another heating chamber 10 and a low-temperature object W1 that has not been heat-treated. It can be carried into the exchange room 20 to exchange heat.

Further, in this reference embodiment , the low-temperature object W1 before the heat treatment and the high-temperature object W2 after the heat treatment are arranged horizontally in the heat exchange chamber 20. ..

Further, in the heat treatment equipment according to the first embodiment of the present invention, as shown in FIGS. 18 to 21, the low temperature object W1 before the heat treatment and the high temperature object W1 after the heat treatment are treated. and things W2, was set to be arranged in the vertical direction in the heat exchange chamber 20.

Here, when the low-temperature object W1 before the heat treatment and the high-temperature object W2 after the heat treatment are arranged in the heat exchange chamber 20 in the vertical direction, the above reference embodiment is used. Unlike the above, the connecting portion 21 in the heat exchange chamber 20 connected to the connecting portion 41 of the transport unit 40 and the opening / closing door 22 for opening and closing the opening portion in the heat exchange chamber 20 are provided one by one. One holding table 23 is provided in the heat exchange chamber 20 of the above. Further, in this embodiment , unlike the above-mentioned reference embodiment , a rotating device 24 for rotating the fan 25 in the heat exchange chamber 20 is provided on the wall portion on the side opposite to the connecting portion 21, and the heat exchange chamber is provided. An elevating device 26 is provided on the elevating device 26, and the elevating member 27 is elevated and lowered in the heat exchange chamber 20 by the elevating device 26 so as to raise and lower the object W held on the holding table 23. There is.

Then, in the heat exchange chamber 20, the low-temperature object W1 before the heat treatment and the high-temperature object W2 after the heat treatment are arranged in the heat exchange chamber 20 in the vertical direction. In this process, as shown in FIG. 18, the connecting portion 41 of the transport unit 40 accommodating the object W1 to be heat-treated is connected to the connecting portion 21 of the heat exchange chamber 20 in a sealed state. The opening / closing door 42 of the transport unit 40 and the open / close door 22 of the heat exchange chamber 20 are opened to communicate the transport unit 40 and the heat exchange chamber 20, and in this state, the low temperature before heat treatment in the transport unit 40 is performed. The object W1 to be processed is carried out from the inside of the transport unit 40 by the carry-in / carry-out member 43 and held on the holding table 23 in the heat exchange chamber 20.

After that, as shown in FIG. 19, the opening / closing door 42 in the transport unit 40 and the open / close door 22 in the heat exchange chamber 20 are closed to separate the transport unit 40 from the heat exchange chamber 20, and the holding base 23 of the heat exchange chamber 20. The object to be treated W1 before being heat-treated held on the heat exchange chamber 20 is held by an elevating member 27 which is elevated and lowered by the elevating device 26 provided on the heat exchange chamber 20 to be raised and heat-treated. The previous object to be processed W1 is held above the holding table 23.

Next, the transport unit 40 is guided to the position of the heating chamber 10 where the object W2 to be heat-treated, and the high-temperature object W2 heat-treated in the heating chamber 10 as described above is brought into the transport unit 40. In the heat exchange chamber 20, the transport unit 40 into which the heat-treated high-temperature object W2 was carried in after being carried into the transport unit 40 from the heating chamber 10 by the carry-in / carry-out member 43 in the above. Try to lead to the position.

Then, as shown in FIG. 20, the connecting portion 41 of the transport unit 40 accommodating the heat-treated object W2 as described above holds the object W1 to be heat-treated as described above. It is connected to the connecting portion 21 of the heat exchange chamber 20 held above the table 23 in a sealed state, and the opening / closing door 42 of the transport unit 40 and the opening / closing door 22 of the heat exchange chamber 20 are opened to exchange heat with the transport unit 40. In this state, the heat-treated high-temperature object W2 in the transport unit 40 is carried out from the transport unit 40 by the carry-in / carry-out member 43 to communicate with the chamber 20, and in the heat exchange chamber 20. It is held on the holding table 23.

After that, as shown in FIG. 21, the opening / closing door 42 of the transport unit 40 and the opening / closing door 22 in the heat exchange chamber 20 are closed to separate the transport unit 40 from the heat exchange chamber 20, and in this state, heat exchange is performed. The fan 25 provided in the chamber 20 is rotated by the rotating device 24 to generate an air flow in the heat exchange chamber 20, and the high temperature after the heat treatment is held on the holding table 23 in the heat exchange chamber 20. Heat is exchanged between the object to be processed W2 and the object to be processed W1 before the heat treatment held above the holding table 23 by the elevating member 27 to bring the object to be processed W2 after the heat treatment to an appropriate temperature. While cooling, the object to be treated W1 before the heat treatment is heated to an appropriate temperature.

Then, in the heat exchange chamber 20, the object W2 to be treated after the heat treatment is cooled to an appropriate temperature, while the object W1 to be processed before the heat treatment is heated to an appropriate temperature, which is shown in the figure. Although not, the transport unit 40 is guided to the position of the heat exchange chamber 20, and the object to be treated W2 after the heat treatment cooled to an appropriate temperature as described above is carried out from the heat exchange chamber 20. The transfer unit 40 is carried into the transfer unit 40, then the transfer unit 40 is guided to the position of the cooling chamber 30, and the heat-treated object W2 cooled to an appropriate temperature as described above is transferred to the transfer unit 40. It is carried into the cooling chamber 30 from the inside. Further, after the object to be processed W2 after the heat treatment is further cooled in the cooling chamber 30 as described above, the object to be processed W2 is carried into the transport unit 40 from the cooling chamber 30 as described above. Then, the object to be processed W2 is carried out from the transport unit 40 to the carry-out unit 2.

Further, after the object W2 to be heat-treated, which has been cooled to an appropriate temperature as described above, is carried out from the heat exchange chamber 20 and carried into the transport unit 40, the said in the heat exchange chamber 20. The object W1 to be processed before heat treatment, which is held above the holding table 23 by the elevating member 27 and heated to an appropriate temperature, is lowered by the elevating device 26, and the elevating member 27 is lowered. The processed object W1 is held on the holding table 23, the transport unit 40 is guided to the position of the heat exchange chamber 20, and the object to be processed W1 before the heat treatment is heated to an appropriate temperature as described above. Is carried out of the heat exchange chamber 20 and carried into the transport unit 40. After that, the transport unit 40 is guided to the position of the heating chamber 10, and the object to be treated W1 before the heat treatment, which has been heated to an appropriate temperature as described above, is carried into the heating chamber 10 from the inside of the transport unit 40. Then, in the heating chamber 10, the object to be processed W1 is heated to a predetermined temperature to be heat-treated.

In this first embodiment, for convenience, one heating chamber 10, one heat exchange chamber 20, and one cooling chamber 30 have been described, but a plurality of these are provided in order in the traveling direction of the transport unit 40. It may be placed in. By doing so, a large amount of the object W to be processed can be processed.

(Second Embodiment)
In the heat treatment facility according to the second embodiment, as shown in FIG. 22 and the like, the carry-in unit 1 for carrying in the object to be processed W and the object to be processed W are heated to a predetermined temperature in a non-oxidizing atmosphere to heat them. The heating chamber 10 to be processed, the cooling chamber 30 for cooling the object to be processed W after being heat-treated and heat exchanged, and the carry-out unit 2 for carrying out the object to be processed W cooled in the cooling chamber 30 travel. The heat exchange chamber 20 in the first embodiment is eliminated by arranging the transport units 40 in order in the traveling direction so as to face the transport unit 40 traveling along the rail L. The low-temperature object W1 that has not been heat-treated and the object W2 that has been heat-treated and heated to a high temperature are housed together in the unit 40, and the object to be heat-treated to a high temperature is housed in the transport unit 40. The heat is exchanged between the processed object W2 and the low-temperature object W1 that has not been heat-treated. In the description of this embodiment, the same configuration and operation as those of the first embodiment will be briefly described.

Here, in the transport unit 40 in this embodiment, similarly to the above-described embodiment, the transport unit 40 is connected to the connecting portion 11 and the cooling chamber 30 of the heating chamber 10 in a portion facing the heating chamber 10 and the cooling chamber 30. A connecting portion 41 for connecting in a sealed state is provided on the connecting portion 31, and an opening / closing door 42 for opening / closing an opening for carrying in / out the object W (W1, W2) to be carried in / out through the connecting portion 41 is provided. As shown in FIG. 4 and the like, a stretchable carry-in / carry-out member 43 for carrying in / out the object to be processed W (W1, W2) into the transport unit 40 is provided in the 40.

Further, in the transport unit 40 of this embodiment, the low temperature object W1 before the heat treatment and the high temperature object W2 after the heat treatment are arranged in the transport unit 40 in the vertical direction. In the above-mentioned transport unit 40, the rotating device 44 transports the heat to the connecting portion 11 of the heating chamber 10 and the wall portion on the opposite side of the connecting portion 41 connected to the connecting portion 31 of the cooling chamber 30. A fan 45 that is rotated in the unit 40 is provided, and a lifting device 46 is provided on the transport unit 40, and the lifting member 47 is lifted and lowered in the transport unit 40 by the lifting device 46 for carrying in and out. The object to be processed W (W1, W2) held by the member 43 is moved up and down.

Then, in this embodiment, as shown in FIG. 22, the transport unit 40 is guided to the position of the carry-in portion 1, and although not shown, the opening / closing door 42 of the transport unit 40 is opened / closed. The carry-in / carry-out member 43 provided in the transport unit 40 causes the object to be processed W1 before the heat treatment to be carried into the transport unit 40 from the carry-in unit 1.

Next, as shown in FIG. 23, the transport unit 40 into which the object to be processed W1 is carried in is moved to a position facing the heating chamber 10 along the traveling rail L, and the transport unit 40 and the heating chamber are moved. 10 is connected in a sealed state, and the object to be processed W1 before heat treatment carried into the transport unit 40 is carried out from the transport unit 40 by the carry-in / carry-out member 43 and into the heating chamber 10. It is carried in and held on a holding table 13 in the heating chamber 10, while the next object to be processed W1 is guided to the carrying-in portion 1 at an appropriate timing.

Then, after the object to be processed W1 before the heat treatment is carried into the heating chamber 10 as described above, as shown in FIG. 24, the opening / closing door 12 of the heating chamber 10 and the opening / closing door 42 of the transport unit 40 are connected. When closed, the transfer unit 40 is separated from the heating chamber 10, and in this state, the object to be treated W1 before the heat treatment carried into the heating chamber 10 is heat-treated.

Next, the transport unit 40 is guided to the position of the carry-in section 1, and the next object to be processed W1 guided to the carry-in section 1 is brought from the carry-in section 1 by the carry-in / carry-out member 43 as described above. After being carried into the transport unit 40, as shown in FIG. 25, the transport unit 40 is guided to the position of the heating chamber 10 in which the object W2 to be heat-treated as described above is housed, and the transport unit 40 is accommodated. The object to be processed W1 held by the carry-in / carry-out member 43 inside is held by the elevating member 47 which is raised and lowered by the elevating device 46 provided on the transport unit 40 to be lifted and heat-treated. The object to be processed W1 before the operation is held above the carry-in / carry-out member 43.

Then, as shown in FIG. 26, the transport unit 40 and the heating chamber 10 are connected in a sealed state, the opening / closing door 12 in the heating chamber 10 and the opening / closing door 42 in the transport unit 40 are opened, and the heating chamber 10 and the transport unit are opened. The high-temperature object W2 to be heat-treated in the heating chamber 10 by communicating with 40 is transferred from above the holding table 13 in the heating chamber 10 by the carry-in / carry-out member 43 in the transport unit 40. The heat-treated high-temperature object W2 is held by the carry-in / carry-out member 43 under the object W1 before the heat treatment held by the elevating member 47. Let me.

After that, as shown in FIG. 27, the opening / closing door 42 in the transport unit 40 and the opening / closing door 12 in the heating chamber 10 are closed to separate the transport unit 40 from the heating chamber 10, and in this state, the inside of the transport unit 40. The fan 45 provided in the above-mentioned fan 45 is rotated by the rotating device 44 to generate an air flow in the transport unit 40, and the heat-treated high-temperature object to be treated held in the carry-in / carry-out member 43 in the transport unit 40. Heat is exchanged between the object W2 and the object to be processed W1 before the heat treatment, which is held above the loading / unloading member 43 by the elevating member 47, and the object W2 to be processed after the heat treatment is suitable. While cooling to a temperature, the object to be treated W1 before the heat treatment is heated to an appropriate temperature.

Then, in the transport unit 40 in this way, the object W2 to be processed after the heat treatment is cooled to an appropriate temperature, while the object W1 to be processed before the heat treatment is heated to an appropriate temperature, and then FIG. 28 shows. As shown, the transport unit 40 is guided to the position of the cooling chamber 30, the connecting portion 41 in the transport unit 40 is connected to the connecting portion 31 in the cooling chamber 30 in a sealed state, and the opening / closing door 42 of the transport unit 40 is connected. After the heat treatment, in which the opening / closing door 32 of the cooling chamber 30 is opened and the transport unit 40 and the cooling chamber 30 are communicated with each other, the transport unit 40 and the cooling chamber 30 are held by the carry-in / carry-out member 43 and cooled to an appropriate temperature. The object W2 to be processed is carried out from the inside of the transport unit 40 by the carry-in / carry-out member 43 and carried into the cooling chamber 30, and is held on the holding table 33 in the cooling chamber 30.

After that, as shown in FIG. 29, the opening / closing door 42 of the transport unit 40 and the open / close door 32 of the cooling chamber 30 are closed, and the transport unit 40 connected to the cooling chamber 30 is separated from the cooling chamber 30. In the cooling chamber 30, the object to be treated W2 after the heat treatment, which has been cooled to an appropriate temperature, is further cooled. Further, after the heat-treated object W2 is further cooled in this way, although not shown, the cooled heat-treated object W2 is cooled in the cooling chamber 30 as in the above embodiment. It is carried into the transport unit 40 from the inside, and the object to be processed W2 is carried out from the transport unit 40 to the carry-out unit 2.

Further, after the object W2 to be heat-treated, which has been cooled to an appropriate temperature as described above, is carried into the cooling chamber 30 from the transport unit 40 by the carry-in / carry-out member 43, it is shown in FIG. As described above, in the transport unit 40, the object to be treated W1 before the heat treatment, which is held above the carry-in / carry-out member 43 by the elevating member 47 and heated to an appropriate temperature as described above, is subjected to the heat treatment. The elevating member 47 is lowered by the elevating device 46, and the object to be processed W1 is held on the loading / unloading member 43.

Next, the transport unit 40 is guided to the position of the heating chamber 10, and as shown in FIG. 30, the transport unit 40 and the heating chamber 10 are connected in a sealed state, and the opening / closing door 42 of the transport unit 40 and the heating chamber are connected. With the opening / closing door 12 of 10 opened and the transport unit 40 and the heating chamber 10 communicated with each other, the object to be treated W1 before the heat treatment, which has been heated to an appropriate temperature in the transport unit 40, is carried in. It is carried into the heating chamber 10 from the inside of the transport unit 40 by the carry-out member 43, and is held on the holding table 13 in the heating chamber 10.

After that, the object to be treated W1 before the heat treatment, which has been heated to an appropriate temperature, is heated to a predetermined temperature in the heating chamber 10 to be heat-treated, and the above operation is repeated.

In the second embodiment, for convenience, one heating chamber 10 and one cooling chamber 30 are provided, but a plurality of these may be arranged in order in the traveling direction of the transport unit 40. Good. By doing so, a large amount of the object W to be processed can be processed.

1: Carry-in part 2: Carry-out part 10: Heating chamber 11: Connecting part 12: Opening / closing door 13: Holding stand 20: Heat exchange chamber 21: Connecting part 21a: First connecting part 21b: Second connecting part 22: Opening / closing Door 22a: First opening / closing door 22b: Second opening / closing door 23: Holding base 23a: First holding base 23b: Second holding base 24: Rotating device 25: Fan 26: Elevating device 27: Elevating member 30: Cooling chamber 31: Connecting part 32: Opening / closing door 33: Holding stand 40: Conveying unit 41: Connecting part 42: Opening / closing door 43: Loading / unloading member 44: Rotating device 45: Fan 46: Lifting device 47: Lifting member L: Traveling rail W: Object to be treated W1: Object to be treated before heat treatment W2: Object to be treated after heat treatment

Claims (4)

As a treatment chamber for heat-treating the object to be treated, at least a heating chamber for heat-treating the object to be treated, a high-temperature object to be heat-treated in the heating chamber, and a low-temperature object to be heat-treated are vertically oriented. A heat exchange chamber for heat exchange between a high-temperature object to be processed and a low-temperature object to be processed, and a cooling chamber for cooling the object to be processed after heat treatment and heat exchange. In addition to providing a transport unit for carrying in and out of the object to be processed to each treatment chamber, the transport unit is sealed at least between the heating chamber and the heat exchange chamber. so as to loading and unloading an object to be processed, Rutotomoni provided an elevating member is raised and lowered by the lifting device to the heat exchange chamber of the, in the wall of the heat exchange chamber at the side opposite to the side to be connected to the transport unit A rotating device for rotating a fan that rotates in the heat exchange chamber is provided, and the elevating member is moved up and down to accommodate the high-temperature object to be processed and the low-temperature object to be processed vertically side by side in this state. A heat treatment facility characterized in that the fan is rotated by the above-mentioned rotating device . In the heat treatment equipment according to claim 1, heat treatment is performed when the heat-treated high-temperature object and the unheat-treated low-temperature object are vertically arranged and accommodated in the heat exchange chamber. A heat treatment facility characterized by accommodating a high-temperature object to be processed under a low-temperature object to be processed that has not been heat-treated. As a treatment chamber for heat-treating the object to be treated, at least a heating chamber for heat-treating the object to be treated and a cooling chamber for cooling the heat-treated object are provided, and the object to be treated is placed in each treatment chamber. On the other hand, a transport unit for carrying in and out is provided, and in the above-mentioned transport unit, a high-temperature object to be heat-treated in the heating chamber and a low-temperature object to be heat-treated are arranged vertically and together. by accommodating the coupling carrying out the heat exchange, Rutotomoni provided an elevating member is raised and lowered by the lifting device in the transport unit, and the processing chamber with the hot object and the low temperature of the object A rotating device for rotating a fan rotating in the transport unit is provided on the wall of the transport unit on the side opposite to the side to be operated, and the elevating member is moved up and down to raise and lower the high temperature object to be processed and the low temperature object to be processed in the transfer unit. Objects are housed side by side in the vertical direction, and in this state, the fan is rotated by the rotating device , and the transfer unit and at least the heating chamber are sealed. A heat treatment facility characterized by loading and unloading processed materials. In the heat treatment facility according to claim 3, heat treatment is performed when the heat-treated high-temperature object and the unheat-treated low-temperature object are vertically arranged and accommodated in the transport unit. A heat treatment facility characterized by accommodating a high-temperature object to be processed under a low-temperature object that has not been heat-treated.

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