JP2002243421A5 - - Google Patents

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Publication number
JP2002243421A5
JP2002243421A5 JP2001374259A JP2001374259A JP2002243421A5 JP 2002243421 A5 JP2002243421 A5 JP 2002243421A5 JP 2001374259 A JP2001374259 A JP 2001374259A JP 2001374259 A JP2001374259 A JP 2001374259A JP 2002243421 A5 JP2002243421 A5 JP 2002243421A5
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JP
Japan
Prior art keywords
dimensional shape
scanning
measuring apparatus
shape measuring
reflected light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001374259A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002243421A (ja
JP3850279B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001374259A priority Critical patent/JP3850279B2/ja
Priority claimed from JP2001374259A external-priority patent/JP3850279B2/ja
Publication of JP2002243421A publication Critical patent/JP2002243421A/ja
Publication of JP2002243421A5 publication Critical patent/JP2002243421A5/ja
Application granted granted Critical
Publication of JP3850279B2 publication Critical patent/JP3850279B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001374259A 2000-12-11 2001-12-07 立体形状測定装置 Expired - Fee Related JP3850279B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001374259A JP3850279B2 (ja) 2000-12-11 2001-12-07 立体形状測定装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000376406 2000-12-11
JP2000-376406 2000-12-11
JP2001374259A JP3850279B2 (ja) 2000-12-11 2001-12-07 立体形状測定装置

Publications (3)

Publication Number Publication Date
JP2002243421A JP2002243421A (ja) 2002-08-28
JP2002243421A5 true JP2002243421A5 (enExample) 2005-06-30
JP3850279B2 JP3850279B2 (ja) 2006-11-29

Family

ID=26605617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001374259A Expired - Fee Related JP3850279B2 (ja) 2000-12-11 2001-12-07 立体形状測定装置

Country Status (1)

Country Link
JP (1) JP3850279B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5752082B2 (ja) * 2012-04-18 2015-07-22 株式会社日立エルジーデータストレージ 走査型投射装置
EP4246086A4 (en) * 2020-11-10 2024-04-17 Sony Semiconductor Solutions Corporation SHAPE MEASUREMENT SYSTEM

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