JP2002243421A5 - - Google Patents
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- JP2002243421A5 JP2002243421A5 JP2001374259A JP2001374259A JP2002243421A5 JP 2002243421 A5 JP2002243421 A5 JP 2002243421A5 JP 2001374259 A JP2001374259 A JP 2001374259A JP 2001374259 A JP2001374259 A JP 2001374259A JP 2002243421 A5 JP2002243421 A5 JP 2002243421A5
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- dimensional shape
- scanning
- measuring apparatus
- shape measuring
- reflected light
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Claims (23)
光束を発生する手段と、
該光束を偏向して走査させる偏向走査手段と、
該偏向走査手段を通過した光束を集光する走査集光手段と、
上記走査集光手段を通過した光束（以下、走査光束）の集光点が描く軌跡（以下、走査線）上の測定対象となる物体からの反射光を上記走査集光手段、及び上記偏向走査手段に導き、上記光位置検出器に入射させるとともに、上記走査光束と上記走査線の両者に垂直な方向（以下、副走査方向）に上記物体が移動した場合、上記光位置検出器にて得られる像の、上記副走査方向の移動の向きが、上記物体の移動の向きと同じで、かつ、上記像の移動距離が上記物体の移動距離の２倍未満となる反射光光路変換手段とを備えたことを特徴とする立体形状測定装置。In a three-dimensional shape measuring apparatus for detecting reflected light obtained by irradiating an object to be measured with a scanning light beam by an optical position detector and measuring the three-dimensional shape of the object from the detection result at each scanning position,
Means for generating luminous flux;
Deflection scanning means for deflecting and scanning the luminous flux;
And scanning condensing means for condensing a light beam having passed through said deflection scanning means,
Reflected light from an object to be measured on a trajectory (hereinafter referred to as a scanning line) drawn by a condensing point of a light beam (hereinafter referred to as a scanning light beam) that has passed through the scanning light condensing means is converted into the scanning light focusing means and the deflection scanning. When the object moves in a direction perpendicular to both the scanning light beam and the scanning line (hereinafter referred to as a sub-scanning direction), the light position detector obtains the light position detector. A reflected light path changing means in which the moving direction of the image to be moved is the same as the moving direction of the object, and the moving distance of the image is less than twice the moving distance of the object. A three-dimensional shape measuring apparatus comprising:
上記反射光光路変換手段は、上記走査線と平行に配置された２枚以上の偶数枚の鏡であることを特徴とする立体形状測定装置。The three-dimensional shape measuring apparatus according to claim 1,
The three-dimensional shape measuring apparatus, wherein the reflected light optical path changing means is an even number of two or more mirrors arranged in parallel with the scanning line.
上記鏡と鏡の間の相対位置関係が常に一定に保たれていることを特徴とする立体形状測定装置。The three-dimensional shape measuring apparatus according to claim 2,
A three-dimensional shape measuring apparatus characterized in that the relative positional relationship between the mirrors is always kept constant.
上記反射光光路変換手段は、上記走査線と平行な入射面と射出面とを持つ、くさび型のプリズムであることを特徴とする立体形状測定装置。The three-dimensional shape measuring apparatus according to claim 1,
The three-dimensional shape measuring apparatus, wherein the reflected light path conversion means is a wedge-shaped prism having an entrance surface and an exit surface parallel to the scanning line.
上記反射光光路変換手段は、上記走査線の方向に伸びた円筒レンズであることを特徴とする立体形状測定装置。The three-dimensional shape measuring apparatus according to claim 1,
The three-dimensional shape measuring apparatus, wherein the reflected light path changing means is a cylindrical lens extending in the direction of the scanning line.
上記反射光光路変換手段は、シート状の形状を有し、光を屈折させる光学素子であることを特徴とする立体形状測定装置。The three-dimensional shape measuring apparatus according to claim 1,
The three-dimensional shape measuring apparatus, wherein the reflected light path changing means is an optical element having a sheet shape and refracting light.
上記反射光光路変換手段を構成する偶数枚の鏡が、ひとつのプリズム本体の内面に形成されており、
上記反射光を上記光位置検出器上に集光した像の収差を改善する補正プリズムを、上記走査集光手段と上記光位置検出器との間に設けたことを特徴とする立体形状測定装置。In the three-dimensional shape measuring apparatus according to claim 3,
An even number of mirrors constituting the reflected light path conversion means are formed on the inner surface of one prism body,
A three-dimensional shape measuring apparatus characterized in that a correction prism for improving the aberration of an image obtained by condensing the reflected light on the optical position detector is provided between the scanning condensing means and the optical position detector. .
上記反射光を上記光位置検出器上に集光した像の収差を改善する補正プリズムを、上記走査集光手段と上記光位置検出器との間に設けたことを特徴とする立体形状測定装置。In the three-dimensional shape measuring apparatus according to claim 4 or 6,
A three-dimensional shape measuring apparatus characterized in that a correction prism for improving the aberration of an image obtained by condensing the reflected light on the optical position detector is provided between the scanning condensing means and the optical position detector. .
上記反射光を上記光位置検出器上に集光した像の収差を改善する円筒レンズを、上記集光手段と上記光位置検出器との間に設けたことを特徴とする立体形状測定装置。The three-dimensional shape measuring apparatus according to claim 5,
A three-dimensional shape measuring apparatus characterized in that a cylindrical lens for improving the aberration of an image obtained by condensing the reflected light on the optical position detector is provided between the condensing means and the optical position detector.
光束を発生する手段と、
該光束を偏向して走査させる偏向走査手段と、
該偏向走査手段を通過した光束を集光する走査集光手段と、
上記走査集光手段を通過した光束（以下、走査光束）の集光点が描く軌跡（以下、走査線）上の測定対象となる物体からの反射光を上記走査集光手段、及び上記偏向走査手段に導き、上記光位置検出器に入射させるとともに、上記走査集光手段を射出した上記走査光束の見かけ上の集光点が描く軌跡を通り、かつ、上記走査光束に垂直な面（以下、仮想走査面）に対して、上記集光点の上記走査集光手段に入射する反射光の見かけ上の発光点が、常に上記仮想走査面上に位置するようになる反射光光路変換手段とを備えたことを特徴とする立体形状測定装置。In a three-dimensional shape measuring apparatus for detecting reflected light obtained by irradiating an object to be measured with a scanning light beam by an optical position detector and measuring the three-dimensional shape of the object from the detection result at each scanning position,
Means for generating luminous flux;
Deflection scanning means for deflecting and scanning the luminous flux;
And scanning condensing means for condensing a light beam having passed through said deflection scanning means,
Reflected light from an object to be measured on a trajectory (hereinafter referred to as a scanning line) drawn by a condensing point of a light beam (hereinafter referred to as a scanning light beam) that has passed through the scanning light condensing means is converted into the scanning light focusing means and the deflection scanning. And a plane perpendicular to the scanning light beam (hereinafter, referred to as a path that is drawn by an apparent condensing point of the scanning light beam emitted from the scanning condensing unit). A reflected light path changing means that an apparent light emitting point of reflected light incident on the scanning light collecting means at the light collecting point is always located on the virtual scanning surface with respect to the virtual scanning surface). A three-dimensional shape measuring apparatus comprising:
上記走査集光手段を通過した上記走査光束が上記走査面に到達する間の光路に設けられ、上記走査光束の集光距離を変化させる集光距離変更手段を備えたことを特徴とする立体形状測定装置。The three-dimensional shape measuring apparatus according to claim 10, wherein
A three-dimensional shape provided with a condensing distance changing means for changing a condensing distance of the scanning light beam provided in an optical path while the scanning light beam passing through the scanning light condensing means reaches the scanning surface. measuring device.
上記集光距離変更手段は、上記走査線と平行な３枚以上の鏡から構成されていることを特徴とする立体形状測定装置。The three-dimensional shape measuring apparatus according to claim 11, wherein
The three-dimensional shape measuring apparatus, wherein the condensing distance changing means is composed of three or more mirrors parallel to the scanning line.
上記集光距離変更手段は、上記走査線と平行な入射面と射出面とを有する平行ガラスで構成されていることを特徴とする立体形状測定装置。The three-dimensional shape measuring apparatus according to claim 11, wherein
The three-dimensional shape measuring apparatus, wherein the condensing distance changing means is made of parallel glass having an entrance surface and an exit surface parallel to the scanning line.
上記測定対象からの上記反射光が上記走査集光手段に到達する間の光路に設けられ、上記反射光の見かけ上の発光点までの距離を変化させる反射光発光点距離変更手段を備えたことを特徴とする立体形状測定装置。The three-dimensional shape measuring apparatus according to claim 10, wherein
Reflected light emission point distance changing means for changing the distance to the apparent light emission point of the reflected light is provided in the optical path while the reflected light from the measurement object reaches the scanning condensing means. A three-dimensional shape measuring apparatus.
上記反射光発光点距離変更手段は、上記走査線と平行な３枚以上の鏡から構成されていることを特徴とする立体形状測定装置。The three-dimensional shape measuring apparatus according to claim 14,
The reflected light emission point distance changing means is composed of three or more mirrors parallel to the scanning line.
上記反射光発光点距離変更手段は、上記走査線と平行な入射面と射出面を有する平行ガラスで構成されていることを特徴とする立体形状測定装置。The three-dimensional shape measuring apparatus according to claim 14,
The three-dimensional shape measuring apparatus, wherein the reflected light emitting point distance changing means is made of parallel glass having an entrance surface and an exit surface parallel to the scanning line.
上記反射光発光点距離変更手段は、上記走査線方向に伸びた円筒レンズから構成されていることを特徴とする立体形状測定装置。The three-dimensional shape measuring apparatus according to claim 14,
The three-dimensional shape measuring apparatus, wherein the reflected light emitting point distance changing means is composed of a cylindrical lens extending in the scanning line direction.
上記反射光光路変換手段を構成する平行ガラスは、上記走査線と平行に配置された２枚以上の偶数枚の鏡をその内面に形成されて一体化されていることを特徴とする立体形状測定装置。The three-dimensional shape measuring apparatus according to claim 16, wherein
The parallel glass constituting the reflected light path conversion means is formed by integrating two or more even-numbered mirrors arranged in parallel with the scanning line on the inner surface thereof, and measuring the three-dimensional shape apparatus.
上記反射光光路変換手段を構成する一体化された平行ガラスは、上記走査光束の集光距離を変化させる、上記走査線と平行な入射面と射出面とを備えたことを特徴とする立体形状測定装置。The three-dimensional shape measuring apparatus according to claim 18,
The integrated parallel glass constituting the reflected light path changing means has a three-dimensional shape having an entrance surface and an exit surface parallel to the scan line, which change the focusing distance of the scan light beam. measuring device.
上記反射光の見かけ上の発光点までの距離を変化させる反射光発光点距離変更手段を、上記反射光光路変換手段を構成するプリズムと一体的に形成されていることを特徴とする立体形状測定装置。In the three-dimensional shape measuring apparatus according to any one of claims 4, 6, and 8,
The three-dimensional shape measurement characterized in that the reflected light emission point distance changing means for changing the distance to the apparent light emission point of the reflected light is formed integrally with the prism constituting the reflected light optical path conversion means. apparatus.
上記走査線と平行な入射面と射出面とを有する平行ガラスからなる、上記走査光束の集光距離を変化させる集光距離変更手段を、上記反射光光路変換手段を構成するプリズムと一体的に形成されていることを特徴とする立体形状測定装置。The three-dimensional shape measuring apparatus according to claim 20,
A condensing distance changing means for changing a condensing distance of the scanning light beam, which is made of parallel glass having an incident surface and an exit surface parallel to the scanning line, is integrated with a prism constituting the reflected light path conversion means. A three-dimensional shape measuring apparatus characterized by being formed.
上記反射光光路変換手段を構成する円筒レンズが、上記測定対象からの上記反射光が上記走査集光手段に到達する間の光路に設けられ、上記反射光の見かけ上の発光点までの距離を変化させる反射光発光点距離変更手段を一体化して構成していることを特徴とする立体形状測定装置。The three-dimensional shape measuring apparatus according to claim 5,
A cylindrical lens constituting the reflected light path conversion means is provided in an optical path while the reflected light from the measurement object reaches the scanning light collecting means, and the distance to the apparent light emission point of the reflected light is set. A three-dimensional shape measuring apparatus, wherein the reflected light emission point distance changing means to be changed is integrated.
上記反射光光路変換手段を構成する円筒レンズは、上記走査光束の集光距離を変化させる、上記走査線と平行な入射面と射出面とを有する平行ガラスからなる集光距離変更手段と一体化して構成されていることを特徴とする立体形状測定装置。The three-dimensional shape measuring apparatus according to claim 22,
The cylindrical lens constituting the reflected light path conversion means is integrated with a focusing distance changing means made of parallel glass having an incident surface and an exit surface parallel to the scanning line, which changes the focusing distance of the scanning light beam. A three-dimensional shape measuring apparatus characterized by being configured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001374259A JP3850279B2 (en) | 2000-12-11 | 2001-12-07 | 3D shape measuring device |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000376406 | 2000-12-11 | ||
| JP2000-376406 | 2000-12-11 | ||
| JP2001374259A JP3850279B2 (en) | 2000-12-11 | 2001-12-07 | 3D shape measuring device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002243421A JP2002243421A (en) | 2002-08-28 |
| JP2002243421A5 true JP2002243421A5 (en) | 2005-06-30 |
| JP3850279B2 JP3850279B2 (en) | 2006-11-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001374259A Expired - Fee Related JP3850279B2 (en) | 2000-12-11 | 2001-12-07 | 3D shape measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3850279B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5752082B2 (en) * | 2012-04-18 | 2015-07-22 | 株式会社日立エルジーデータストレージ | Scanning projector |
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2001
- 2001-12-07 JP JP2001374259A patent/JP3850279B2/en not_active Expired - Fee Related
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