JP3850279B2 - 立体形状測定装置 - Google Patents

立体形状測定装置 Download PDF

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Publication number
JP3850279B2
JP3850279B2 JP2001374259A JP2001374259A JP3850279B2 JP 3850279 B2 JP3850279 B2 JP 3850279B2 JP 2001374259 A JP2001374259 A JP 2001374259A JP 2001374259 A JP2001374259 A JP 2001374259A JP 3850279 B2 JP3850279 B2 JP 3850279B2
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JP
Japan
Prior art keywords
scanning
dimensional shape
measuring apparatus
shape measuring
light
Prior art date
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Expired - Fee Related
Application number
JP2001374259A
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English (en)
Japanese (ja)
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JP2002243421A (ja
JP2002243421A5 (enExample
Inventor
裕司 小野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
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Priority to JP2001374259A priority Critical patent/JP3850279B2/ja
Publication of JP2002243421A publication Critical patent/JP2002243421A/ja
Publication of JP2002243421A5 publication Critical patent/JP2002243421A5/ja
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Publication of JP3850279B2 publication Critical patent/JP3850279B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP2001374259A 2000-12-11 2001-12-07 立体形状測定装置 Expired - Fee Related JP3850279B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001374259A JP3850279B2 (ja) 2000-12-11 2001-12-07 立体形状測定装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000376406 2000-12-11
JP2000-376406 2000-12-11
JP2001374259A JP3850279B2 (ja) 2000-12-11 2001-12-07 立体形状測定装置

Publications (3)

Publication Number Publication Date
JP2002243421A JP2002243421A (ja) 2002-08-28
JP2002243421A5 JP2002243421A5 (enExample) 2005-06-30
JP3850279B2 true JP3850279B2 (ja) 2006-11-29

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001374259A Expired - Fee Related JP3850279B2 (ja) 2000-12-11 2001-12-07 立体形状測定装置

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JP (1) JP3850279B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5752082B2 (ja) * 2012-04-18 2015-07-22 株式会社日立エルジーデータストレージ 走査型投射装置
EP4246086A4 (en) * 2020-11-10 2024-04-17 Sony Semiconductor Solutions Corporation SHAPE MEASUREMENT SYSTEM

Also Published As

Publication number Publication date
JP2002243421A (ja) 2002-08-28

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