JP2002218610A - Gas insulated equipment - Google Patents

Gas insulated equipment

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Publication number
JP2002218610A
JP2002218610A JP2001009846A JP2001009846A JP2002218610A JP 2002218610 A JP2002218610 A JP 2002218610A JP 2001009846 A JP2001009846 A JP 2001009846A JP 2001009846 A JP2001009846 A JP 2001009846A JP 2002218610 A JP2002218610 A JP 2002218610A
Authority
JP
Japan
Prior art keywords
gas
shield electrode
insulating
insulator
triple junction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001009846A
Other languages
Japanese (ja)
Inventor
Mitsutoshi Koyama
光敏 小山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP2001009846A priority Critical patent/JP2002218610A/en
Publication of JP2002218610A publication Critical patent/JP2002218610A/en
Pending legal-status Critical Current

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  • Gas-Insulated Switchgears (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a simply method for preventing drop in dielectric breakdown voltage caused by the presence of a triple junction part TJ, instead of removing the triple junction part TJ which is hard to realize actually. SOLUTION: A shield electrode connected to a conductor at the same potential is provided so as to surround the triple junction part formed in a place in which the conductor, an insulating gas and an insulator meet. An insulation ring is closely mounted in a gap between the shield electrode and the insulator.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、六弗化硫黄ガス
(以下、SF6ガス)等の絶縁特性の優れたガスを絶縁媒
体としたガス絶縁機器に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas insulating device using a gas having excellent insulating properties such as sulfur hexafluoride gas (hereinafter, SF6 gas) as an insulating medium.

【0002】[0002]

【従来の技術】近年、接地電位にある金属容器内に高電
圧導体を配置し、これらの間に絶縁性能の優れたガス、
例えばSF6ガスを圧縮充填してなるガス絶縁機器の採用
は、増加の一途をたどっている。このSF6ガスは、平等
電界のもとでは非常に優れた絶縁特性を示すが、不平等
電界のもとでは極端に絶縁性能が低下する性質がある。
2. Description of the Related Art In recent years, a high voltage conductor is arranged in a metal container at a ground potential, and a gas having excellent insulation performance is interposed between these conductors.
For example, the use of gas-insulated equipment made by compression filling of SF6 gas has been increasing steadily. This SF6 gas shows very excellent insulation properties under a uniform electric field, but has a property that the insulation performance is extremely deteriorated under an uneven electric field.

【0003】ガス絶縁機器内の電界分布を乱す要因とし
ては様々なことが考えられる。それには高電圧導体表面
の打痕等の欠陥、組立ミスによる高電圧導体部の接触不
良、ボイド等絶縁スペーサの欠陥など、製造・組立時に
基因するものの他に、機器の構造に基因するものもあ
る。
Various factors can be considered as factors that disturb the electric field distribution in the gas-insulated equipment. Defects such as dents on the surface of the high-voltage conductor, poor contact of the high-voltage conductor due to assembly errors, defects in the insulating spacers such as voids, etc. is there.

【0004】機器の構造に基因するものの一つに、トリ
プルジャンクション部の存在があげられる。これについ
て図面を参照して説明する。図4はガス絶縁機器の一例
としてタンク形避雷器の断面を示す図である。図4
(A)において、1はSF6ガス等の絶縁ガス9を封入し
たタンク形接地金属容器であり、この金属容器1内に、
両端に金属フランジ2a、2bを有する厚みdの絶縁筒
3が固定されており、その絶縁筒3内に酸化亜鉛素子を
積層した内部要素4が収納されている。
One of the causes of the structure of the device is the presence of a triple junction. This will be described with reference to the drawings. FIG. 4 is a diagram showing a cross section of a tank type lightning arrester as an example of a gas insulated device. FIG.
In FIG. 1A, reference numeral 1 denotes a tank-type grounded metal container filled with an insulating gas 9 such as SF6 gas.
An insulating cylinder 3 having a thickness d having metal flanges 2a and 2b at both ends is fixed, and an internal element 4 in which a zinc oxide element is laminated is accommodated in the insulating cylinder 3.

【0005】5aおよび5bはそれぞれ内部要素4の高
圧側電極および接地側電極であり、高圧側フランジ5a
は高圧側導体6に接続され、その高圧側導体6は絶縁ス
ペーサ7を貫通して図示しないガス絶縁開閉装置に接続
されるようになっている。
[0005] Reference numerals 5a and 5b denote a high voltage side electrode and a ground side electrode of the internal element 4, respectively.
Is connected to a high-voltage side conductor 6, and the high-voltage side conductor 6 passes through an insulating spacer 7 and is connected to a gas insulated switchgear (not shown).

【0006】一方、接地側フランジ5bは金属容器1の
底部に溶接等で固定されている。前記高圧側フランジ2
a、接地側フランジ2bの絶縁筒3と接する内周縁部8
を後述する理由により、切り欠いている。
On the other hand, the ground side flange 5b is fixed to the bottom of the metal container 1 by welding or the like. The high pressure side flange 2
a, inner peripheral edge portion 8 of ground side flange 2b in contact with insulating cylinder 3
Are notched for the reason described later.

【0007】図4(B)はこの部分の詳細を示す拡大断
面図であり、前述した高圧側フランジ2aの絶縁筒3と
接する内周縁部8は金属、絶縁筒および絶縁ガスの三者
が交わる、いわゆるトリプルジャンクション(三重点)
が形成されていることを表している。
FIG. 4B is an enlarged cross-sectional view showing the details of this portion. The inner peripheral edge portion 8 of the high-pressure side flange 2a in contact with the insulating tube 3 intersects a metal, an insulating tube, and an insulating gas. , The so-called triple junction
Is formed.

【0008】このトリプルジャンクション部分に電界の
特異性が生じることは、例えば「宅間」;「複合誘電体
における電界集中」静電気学会誌、Vol 14 、No.1、199
0年や特開平11−214117号公報に記載されてい
る。
The occurrence of an electric field peculiarity in the triple junction portion is described in, for example, "Houseroom";"Electric Field Concentration in Composite Dielectric", Journal of the Electrostatics Society of Japan, Vol. 14, No. 1, 199.
0 and Japanese Unexamined Patent Application Publication No. 11-214117.

【0009】ところで、図4のように金属フランジ2a
の内周縁8に切り欠きを設けた主な理由は工作上のため
であるが、この部分の電界は相当大きな値となり、絶縁
筒3の表面に放電Dが生じやすく絶縁破壊電圧が著しく
低下する。
By the way, as shown in FIG.
The main reason for providing the notch in the inner peripheral edge 8 is that it is due to machining, but the electric field in this portion has a considerably large value, and discharge D is easily generated on the surface of the insulating cylinder 3 and the dielectric breakdown voltage is significantly reduced. .

【0010】[0010]

【発明が解決しようとする課題】このようなトリプルジ
ャンクション部8の存在による絶縁破壊電圧の低下を防
ぐには、トリプルジャンクション部8を無くすことが最
良の手段であるが、現実的には困難を伴う。
In order to prevent such a decrease in breakdown voltage due to the presence of the triple junction section 8, it is best to eliminate the triple junction section 8. However, in practice, it is difficult. Accompany.

【0011】そこで本発明は上記の従来技術の問題点を
解消するためになされたもので、絶縁破壊を生じ難くさ
せた、簡便にして信頼性の高いガス絶縁機器を提供する
ことを目的とするものである。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems of the prior art, and has as its object to provide a simple and highly reliable gas-insulated apparatus in which dielectric breakdown hardly occurs. Things.

【0012】[0012]

【課題を解決するための手段】上記の目的を達成するた
め、請求項1に記載のガス絶縁機器の発明は、絶縁ガス
を封入した金属容器内に絶縁物によって支えられる導電
体を配置したガス絶縁機器において、前記導電体、絶縁
ガスおよび絶縁物の三者が交わることにより形成された
トリプルジャンクション部を、先端部に絶縁物に向かっ
て突設した円弧部を備えたシールド電極で包囲するよう
にし、このシールド電極と前記絶縁物との間隙部に絶縁
リングを密接して取り付けたものである。また、請求項
2に記載のガス絶縁機器の発明は、前記シールド電極と
前記絶縁リングとの寸法関係を、絶縁リングの高さをd
2、シールド電極の長さをd1としたとき、d2<(d
1/2)が成立するようにしたものである。
In order to achieve the above object, a gas-insulated apparatus according to the first aspect of the present invention is a gas-insulated apparatus in which a conductor supported by an insulator is disposed in a metal container filled with an insulating gas. In the insulating device, a triple junction formed by the conductor, the insulating gas, and the insulator intersecting each other is surrounded by a shield electrode having an arc portion protruding toward the insulator at a tip end. An insulating ring is closely attached to a gap between the shield electrode and the insulator. Further, in the invention of the gas insulated device according to claim 2, the dimensional relationship between the shield electrode and the insulating ring is determined by the height of the insulating ring as d.
2. When the length of the shield electrode is d1, d2 <(d
(2) is established.

【0013】このように構成したことにより、トリプル
ジャンクション部は間隙部の奥に位置することになり、
絶縁物表面の放電を進展しにくくすることが可能であ
り、絶縁破壊電圧を向上させることが可能となる。
[0013] With this configuration, the triple junction is located at the back of the gap,
It is possible to make it difficult for the discharge on the surface of the insulator to progress, and it is possible to improve the dielectric breakdown voltage.

【0014】また、請求項3に記載のガス絶縁機器の発
明は、前記絶縁リングに襞部を設け、この襞部をシール
ド電極の先端部に形成した円弧部で覆うようにしたもの
である。このように構成したことにより、絶縁物表面の
放電をより一層進展しにくくすることが可能であり、絶
縁破壊電圧を大幅に向上させることが可能となる。
According to a third aspect of the present invention, there is provided a gas insulated device wherein a fold is provided on the insulating ring, and the fold is covered with an arc formed at the tip of the shield electrode. With such a configuration, it is possible to make it more difficult for the discharge on the surface of the insulator to proceed, and it is possible to greatly improve the dielectric breakdown voltage.

【0015】[0015]

【発明の実施の形態】(第1の実施形態)以下、図面を
参照して本発明の第1実施形態について説明する。図1
は本発明をタンク形避雷器に適用した場合の全体構成図
の縦断面図である。図1において、図4と同一部分には
同一符号をつけて説明する。ただし、重複する部分につ
いては省略もしくは最小限の説明に留める。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) A first embodiment of the present invention will be described below with reference to the drawings. Figure 1
FIG. 1 is a longitudinal sectional view of the overall configuration when the present invention is applied to a tank type lightning arrester. In FIG. 1, the same parts as those in FIG. However, overlapping parts are omitted or minimally described.

【0016】1はSF6ガス等の絶縁ガス9を封入したタ
ンク形の接地金属容器であり、この金属容器1内部に
は、両端に金属製の円盤状フランジ2a、2bを有する
厚みdの絶縁筒3が固定されており、その絶縁等筒3内
に酸化亜鉛素子を積層した内部要素4が収納されてい
る。
Reference numeral 1 denotes a tank-shaped grounded metal container in which an insulating gas 9 such as SF6 gas is sealed. Inside the metal container 1, an insulating cylinder having a thickness of d having metal disk-shaped flanges 2a and 2b at both ends is provided. 3 is fixed, and an inner element 4 having a zinc oxide element laminated therein is accommodated in the insulating or other cylinder 3.

【0017】5aおよび5bはそれぞれ内部要素4の高
圧側電極および接地側電極であり、高圧側電極5aは高
圧側導体6により絶縁スペーサ7を貫通して図示しない
ガス絶縁開閉装置に接続され、接地側電極5bは金属容
器1の底部を形成するフランジ2aに溶接等で固定され
ている。
Reference numerals 5a and 5b denote a high voltage side electrode and a ground side electrode of the internal element 4, respectively. The high voltage side electrode 5a is connected to a gas insulated switchgear (not shown) through a high voltage side conductor 6 through an insulating spacer 7 and a ground. The side electrode 5b is fixed to the flange 2a forming the bottom of the metal container 1 by welding or the like.

【0018】そして、前記円盤状金属フランジ2aの図
示下面にはこれと同電位となるように、筒状のシールド
電極10aを取着している。このシールド電極10aの
内径は前記絶縁筒3の外径よりも大きくしてあり、両者
の寸法差を利用して環状の間隙部11aを形成してい
る。
A cylindrical shield electrode 10a is attached to the lower surface of the disk-shaped metal flange 2a in the drawing so as to have the same potential. The inner diameter of the shield electrode 10a is larger than the outer diameter of the insulating tube 3, and an annular gap 11a is formed by utilizing the dimensional difference between the two.

【0019】そして、この環状の間隙部11aに絶縁リ
ング12aを密着して挿入している。ここでいう、前記
絶縁リング12aを密着して挿入するということは、前
記絶縁リング12aと金属フランジ2a、絶縁筒3およ
びシールド電極10aとの接触面に隙間ができないよう
にすること、即ちSF6ガスが隙間に入ってトリプルジャ
ンクションが形成されないようにするためである。
An insulating ring 12a is inserted into the annular gap 11a in close contact therewith. Here, the close insertion of the insulating ring 12a means that there is no gap between the contact surface of the insulating ring 12a and the metal flange 2a, the insulating cylinder 3, and the shield electrode 10a, that is, SF6 gas. This is to prevent triple junctions from being formed in gaps.

【0020】同様にして、前記接地金属容器1の底部
に、絶縁筒3と同心的に配置された筒状シールド電極1
0bを接続固定し、このシールド電極10bと絶縁筒3
との間に形成された環状の間隙部11bにも絶縁リング
12bを密着挿入している。
Similarly, at the bottom of the grounded metal container 1, a cylindrical shield electrode 1 concentrically arranged with the insulating tube 3 is provided.
0b is connected and fixed, and the shield electrode 10b and the insulating cylinder 3 are connected.
The insulating ring 12b is also tightly inserted into the annular gap 11b formed between them.

【0021】図2は図1の破線で囲んだ部分II、IIIの
拡大断面図である。図2から明らかなように、絶縁リン
グ12aの高さ(軸線方向に長さ)をd2、シールド電
極10aの軸線方向の長さをd1としたとき、絶縁リン
グの高さd2がシールド電極の長さd1の半分以下(d
2<d1/2)となるように選定している。またシール
ド電極10aの図示下部内周部には、電界が集中するこ
とを防止するために円弧部10a1を絶縁筒3に向けて
突設している。
FIG. 2 is an enlarged sectional view of portions II and III surrounded by broken lines in FIG. As is clear from FIG. 2, when the height (length in the axial direction) of the insulating ring 12a is d2 and the length in the axial direction of the shield electrode 10a is d1, the height d2 of the insulating ring is equal to the length of the shield electrode. Less than half of d1 (d
2 <d1 / 2). Further, an arc portion 10a1 is provided on the inner peripheral portion of the lower portion of the shield electrode 10a so as to project toward the insulating cylinder 3 in order to prevent concentration of an electric field.

【0022】本実施形態の場合も、前記シールド電極1
0a、絶縁リング12aおよびSF6ガス9によるトリプ
ルジャンクション部8(破線円の部分)が形成される
が、この部分は直角であり、電界の値は大きくならない
はずである。
Also in the case of this embodiment, the shield electrode 1
A triple junction portion 8 (a portion indicated by a dashed circle) is formed by Oa, the insulating ring 12a, and the SF6 gas 9, but this portion is a right angle, and the electric field value should not increase.

【0023】しかし、製造上の理由等でトリプルジャン
クション部8を直角にすることができず、実際の電界の
値がかなり大きくなったとしても、円弧部10a1を突
設したシールド電極10aを設けるようにしたので、ト
リプルジャンクション部8が環状の間隙部11aの奥に
位置する状態となり、この結果電界は緩和され、例え放
電が生じたとしても、絶縁筒3がバリアとして作用し、
放電の進展を抑制することができる。
However, even if the triple junction 8 cannot be made right-angled due to manufacturing reasons or the like and the actual electric field value becomes considerably large, the shield electrode 10a having the arcuate portion 10a1 protruding is provided. As a result, the triple junction portion 8 is located at the back of the annular gap portion 11a. As a result, the electric field is reduced, and even if a discharge occurs, the insulating cylinder 3 acts as a barrier,
Discharge progress can be suppressed.

【0024】(第2の実施形態)図3は図1の破線で囲
んだ部分II、IIIの拡大断面図である。本実施形態と第
1の実施形態とは基本的な違いはないが、絶縁リング1
2aの前記シールド電極10aに接する側に襞12a1
を設けたことおよびこの襞12a1の先端部を覆うよう
にシールド電極10aの円弧部10a1に窪み10a2
を設けたことである。
(Second Embodiment) FIG. 3 is an enlarged sectional view of portions II and III surrounded by broken lines in FIG. There is no fundamental difference between the present embodiment and the first embodiment.
A fold 12a1 is formed on the side of the second electrode 2a in contact with the shield electrode 10a.
And a depression 10a2 in the arc portion 10a1 of the shield electrode 10a so as to cover the tip of the fold 12a1.
That is,

【0025】前記円弧部10a1で前記襞12a1の先
端部を覆うために、前記窪み10a2の幅d3は、絶縁
リング12aの襞12a1の先端部の厚みd4よりも大
きく(d3>d4)選定してある。
In order to cover the tip of the fold 12a1 with the circular arc portion 10a1, the width d3 of the depression 10a2 is selected to be larger than the thickness d4 of the tip of the fold 12a1 of the insulating ring 12a (d3> d4). is there.

【0026】本実施形態は、このように前記絶縁リング
12aの高さをd2、シールド電極10aの軸線方向の
長さをd1とし、またシールド電極10aの図示下部内
周部に円弧部10a1を形成しているので、トリプルジ
ャンクション部(図3点線部)8は、絶縁筒3の表面よ
り離れると共に、絶縁リング12a自体もバリアとなる
ため絶縁筒3表面の放電がより一層進展しにくくなる。
In this embodiment, the height of the insulating ring 12a is d2, the length of the shield electrode 10a in the axial direction is d1, and the arc portion 10a1 is formed in the lower inner peripheral portion of the shield electrode 10a in the drawing. As a result, the triple junction portion (dotted line portion in FIG. 3) 8 is separated from the surface of the insulating cylinder 3 and the insulating ring 12a itself also functions as a barrier, so that the discharge on the surface of the insulating cylinder 3 becomes more difficult to progress.

【0027】なお、以上説明した実施形態はガス絶縁機
器としてタンク形避雷器に適用した場合についてである
が、本発明はこれのみに限定されるものではなく、トリ
プルジャンクション部を形成する他のガス絶縁機器にも
適用できるものである。
Although the above-described embodiment is applied to the case where the present invention is applied to a tank type lightning arrester as a gas insulating device, the present invention is not limited to this, and other gas insulating devices forming a triple junction portion may be used. It can also be applied to equipment.

【0028】[0028]

【発明の効果】以上説明したように本発明によれば、絶
縁リングとシールド電極を設けてトリプルジャンクショ
ン部を包囲するように構成したので、絶縁破壊電圧を向
上させることが可能となり、簡便にして信頼性の高いガ
ス絶縁機器を提供できる。
As described above, according to the present invention, since the insulation ring and the shield electrode are provided to surround the triple junction, the dielectric breakdown voltage can be improved, and the structure can be simplified. A highly reliable gas insulation device can be provided.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係わる第1の実施形態の全体構成を示
す断面図。
FIG. 1 is a cross-sectional view showing the overall configuration of a first embodiment according to the present invention.

【図2】第1の実施形態の一部拡大断面図。FIG. 2 is a partially enlarged cross-sectional view of the first embodiment.

【図3】本発明に係わる第2の実施形態の一部拡大断面
図。
FIG. 3 is a partially enlarged cross-sectional view of a second embodiment according to the present invention.

【図4】本発明の従来例を示す図であり、特に(A)は
全体構成図、(B)は一部拡大断面図。
4A and 4B are diagrams showing a conventional example of the present invention, in particular, FIG. 4A is an overall configuration diagram, and FIG.

【符号の説明】 1…金属容器、2a、2b…フランジ、3…絶縁筒、4
…内部要素、5a,5b…電極、6…導体、7…絶縁ス
ペーサ、8…トリプルジャンクション、9…絶縁ガス、
10a、10b…シールド電極、10a1…円弧部、1
0a2…窪み、12a、12b…絶縁リング、12a1
…絶縁リングの襞。
[Description of Signs] 1 ... Metal container, 2a, 2b ... Flange, 3 ... Insulating cylinder, 4
... internal elements, 5a, 5b ... electrodes, 6 ... conductors, 7 ... insulating spacers, 8 ... triple junctions, 9 ... insulating gas,
10a, 10b ... shield electrode, 10a1 ... arc part, 1
0a2: recess, 12a, 12b: insulating ring, 12a1
... folds on the insulating ring.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 絶縁ガスを封入した金属容器内に絶縁物
によって支えられる導電体を配置したガス絶縁機器にお
いて、前記導電体、絶縁ガスおよび絶縁物の三者が交わ
ることにより形成されたトリプルジャンクション部を、
先端部に絶縁物に向かって突設した円弧部を備えたシー
ルド電極で包囲するようにし、このシールド電極と前記
絶縁物との間隙部に絶縁リングを密接して取り付けたこ
とを特徴とするガス絶縁機器。
1. A gas insulated device in which a conductor supported by an insulator is disposed in a metal container filled with an insulating gas, wherein a triple junction formed by the intersection of the conductor, the insulating gas, and the insulator. Department
A gas characterized by being surrounded by a shield electrode having an arc portion protruding toward an insulator at a tip end thereof, and an insulating ring being closely attached to a gap between the shield electrode and the insulator. Insulation equipment.
【請求項2】 請求項1の記載のガス絶縁機器におい
て、前記シールド電極と前記絶縁リングとの寸法関係
を、絶縁リングの高さをd2、シールド電極の長さをd
1としたとき、d2<(d1/2)が成立するようにし
たことを特徴とするガス絶縁機器。
2. The gas-insulated apparatus according to claim 1, wherein the dimensional relationship between the shield electrode and the insulating ring is such that the height of the insulating ring is d2 and the length of the shield electrode is d.
A gas-insulated device characterized in that d2 <(d1 / 2) holds when 1 is set.
【請求項3】 請求項1の記載のガス絶縁機器におい
て、前記絶縁リングの前記シールド電極に接する側に襞
部を設け、この襞部を前記シールド電極の先端部に形成
した円弧部で覆うようにしたことを特徴とするガス絶縁
機器。
3. The gas-insulated apparatus according to claim 1, wherein a fold is provided on a side of the insulating ring in contact with the shield electrode, and the fold is covered by an arc formed at a tip of the shield electrode. Gas insulated equipment characterized in that:
JP2001009846A 2001-01-18 2001-01-18 Gas insulated equipment Pending JP2002218610A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001009846A JP2002218610A (en) 2001-01-18 2001-01-18 Gas insulated equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001009846A JP2002218610A (en) 2001-01-18 2001-01-18 Gas insulated equipment

Publications (1)

Publication Number Publication Date
JP2002218610A true JP2002218610A (en) 2002-08-02

Family

ID=18877264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001009846A Pending JP2002218610A (en) 2001-01-18 2001-01-18 Gas insulated equipment

Country Status (1)

Country Link
JP (1) JP2002218610A (en)

Cited By (2)

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Publication number Priority date Publication date Assignee Title
WO2017109981A1 (en) * 2015-12-25 2017-06-29 株式会社ニコン Charged particle device, structure manufacturing method, and structure manufacturing system
JP2018536978A (en) * 2015-12-23 2018-12-13 ニコン・メトロロジー・エヌヴェ Target assembly for X-ray emission device and X-ray emission device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018536978A (en) * 2015-12-23 2018-12-13 ニコン・メトロロジー・エヌヴェ Target assembly for X-ray emission device and X-ray emission device
US10614990B2 (en) 2015-12-23 2020-04-07 Nikon Metrology Nv Target assembly for an x-ray emission apparatus and x-ray emission apparatus
WO2017109981A1 (en) * 2015-12-25 2017-06-29 株式会社ニコン Charged particle device, structure manufacturing method, and structure manufacturing system
JPWO2017109981A1 (en) * 2015-12-25 2018-10-18 株式会社ニコン Charged particle device, structure manufacturing method, and structure manufacturing system
CN108780728A (en) * 2015-12-25 2018-11-09 株式会社尼康 Charged particle devices, the manufacturing method of works and works manufacture system
CN108780728B (en) * 2015-12-25 2020-05-15 株式会社尼康 Charged particle device, method for manufacturing structure, and system for manufacturing structure

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