JP2002216937A - セラミックヒータの製造方法 - Google Patents
セラミックヒータの製造方法Info
- Publication number
- JP2002216937A JP2002216937A JP2001012409A JP2001012409A JP2002216937A JP 2002216937 A JP2002216937 A JP 2002216937A JP 2001012409 A JP2001012409 A JP 2001012409A JP 2001012409 A JP2001012409 A JP 2001012409A JP 2002216937 A JP2002216937 A JP 2002216937A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- cup
- manufacturing
- ceramic heater
- slurry
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 115
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 39
- 229910052751 metal Inorganic materials 0.000 claims abstract description 57
- 239000002184 metal Substances 0.000 claims abstract description 57
- 239000002002 slurry Substances 0.000 claims abstract description 49
- 229910010293 ceramic material Inorganic materials 0.000 claims abstract description 42
- 238000010438 heat treatment Methods 0.000 claims abstract description 25
- 238000010304 firing Methods 0.000 claims abstract description 7
- 238000001035 drying Methods 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 17
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 14
- 239000002245 particle Substances 0.000 claims description 13
- 238000002156 mixing Methods 0.000 claims description 9
- 239000003960 organic solvent Substances 0.000 claims description 7
- 238000011049 filling Methods 0.000 claims description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 4
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- 239000011230 binding agent Substances 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 239000001856 Ethyl cellulose Substances 0.000 claims description 3
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 claims description 3
- 238000009835 boiling Methods 0.000 claims description 3
- 229920001249 ethyl cellulose Polymers 0.000 claims description 3
- 235000019325 ethyl cellulose Nutrition 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 2
- 238000005245 sintering Methods 0.000 claims description 2
- 238000007789 sealing Methods 0.000 description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 229910052721 tungsten Inorganic materials 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- 239000012212 insulator Substances 0.000 description 4
- 239000008188 pellet Substances 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 239000010406 cathode material Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000011162 core material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- GIDFDWJDIHKDMB-UHFFFAOYSA-N osmium ruthenium Chemical compound [Ru].[Os] GIDFDWJDIHKDMB-UHFFFAOYSA-N 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 101100366707 Arabidopsis thaliana SSL11 gene Proteins 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 101000642815 Homo sapiens Protein SSXT Proteins 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 101100366562 Panax ginseng SS12 gene Proteins 0.000 description 1
- 102100035586 Protein SSXT Human genes 0.000 description 1
- 229910000691 Re alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- DECCZIUVGMLHKQ-UHFFFAOYSA-N rhenium tungsten Chemical compound [W].[Re] DECCZIUVGMLHKQ-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Landscapes
- Surface Heating Bodies (AREA)
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001012409A JP2002216937A (ja) | 2001-01-19 | 2001-01-19 | セラミックヒータの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001012409A JP2002216937A (ja) | 2001-01-19 | 2001-01-19 | セラミックヒータの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002216937A true JP2002216937A (ja) | 2002-08-02 |
| JP2002216937A5 JP2002216937A5 (enExample) | 2008-03-13 |
Family
ID=18879417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001012409A Pending JP2002216937A (ja) | 2001-01-19 | 2001-01-19 | セラミックヒータの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002216937A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004296146A (ja) * | 2003-03-25 | 2004-10-21 | Toshiba Corp | ヒータ構造体及び機能デバイス |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5235345A (en) * | 1975-09-15 | 1977-03-17 | Nippon Denso Co Ltd | Manufcturing method of exothermic element |
| JPS551080A (en) * | 1979-03-30 | 1980-01-07 | Toshiba Corp | Indirectly heated cathode manufacture |
| JPS6047495A (ja) * | 1983-08-25 | 1985-03-14 | 株式会社日立製作所 | セラミツク配線基板 |
| JPS60180085A (ja) * | 1984-02-24 | 1985-09-13 | 松下電器産業株式会社 | セラミック鋳込形ヒータの製造方法 |
| JPH02102618A (ja) * | 1988-10-12 | 1990-04-16 | Kaichiro Sakurada | 遠赤外線放射マット並びに該マットを用いたサウナ装置並びにバスマット |
| JPH05286749A (ja) * | 1992-04-07 | 1993-11-02 | Sumitomo Metal Ind Ltd | グリーンシートの製造方法 |
-
2001
- 2001-01-19 JP JP2001012409A patent/JP2002216937A/ja active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5235345A (en) * | 1975-09-15 | 1977-03-17 | Nippon Denso Co Ltd | Manufcturing method of exothermic element |
| JPS551080A (en) * | 1979-03-30 | 1980-01-07 | Toshiba Corp | Indirectly heated cathode manufacture |
| JPS6047495A (ja) * | 1983-08-25 | 1985-03-14 | 株式会社日立製作所 | セラミツク配線基板 |
| JPS60180085A (ja) * | 1984-02-24 | 1985-09-13 | 松下電器産業株式会社 | セラミック鋳込形ヒータの製造方法 |
| JPH02102618A (ja) * | 1988-10-12 | 1990-04-16 | Kaichiro Sakurada | 遠赤外線放射マット並びに該マットを用いたサウナ装置並びにバスマット |
| JPH05286749A (ja) * | 1992-04-07 | 1993-11-02 | Sumitomo Metal Ind Ltd | グリーンシートの製造方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004296146A (ja) * | 2003-03-25 | 2004-10-21 | Toshiba Corp | ヒータ構造体及び機能デバイス |
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