JP2002198411A5 - - Google Patents

Download PDF

Info

Publication number
JP2002198411A5
JP2002198411A5 JP2000395263A JP2000395263A JP2002198411A5 JP 2002198411 A5 JP2002198411 A5 JP 2002198411A5 JP 2000395263 A JP2000395263 A JP 2000395263A JP 2000395263 A JP2000395263 A JP 2000395263A JP 2002198411 A5 JP2002198411 A5 JP 2002198411A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000395263A
Other versions
JP2002198411A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000395263A priority Critical patent/JP2002198411A/ja
Priority claimed from JP2000395263A external-priority patent/JP2002198411A/ja
Priority to PCT/JP2001/011338 priority patent/WO2002052638A1/ja
Publication of JP2002198411A publication Critical patent/JP2002198411A/ja
Publication of JP2002198411A5 publication Critical patent/JP2002198411A5/ja
Pending legal-status Critical Current

Links

JP2000395263A 2000-12-26 2000-12-26 圧力制御方法、搬送装置およびクラスタツール Pending JP2002198411A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2000395263A JP2002198411A (ja) 2000-12-26 2000-12-26 圧力制御方法、搬送装置およびクラスタツール
PCT/JP2001/011338 WO2002052638A1 (fr) 2000-12-26 2001-12-25 Procede de regulation de pression, dispositif de transfert, et outil en grappe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000395263A JP2002198411A (ja) 2000-12-26 2000-12-26 圧力制御方法、搬送装置およびクラスタツール

Publications (2)

Publication Number Publication Date
JP2002198411A JP2002198411A (ja) 2002-07-12
JP2002198411A5 true JP2002198411A5 (ja) 2008-02-14

Family

ID=18860753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000395263A Pending JP2002198411A (ja) 2000-12-26 2000-12-26 圧力制御方法、搬送装置およびクラスタツール

Country Status (2)

Country Link
JP (1) JP2002198411A (ja)
WO (1) WO2002052638A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4134671B2 (ja) * 2002-10-17 2008-08-20 松下電器産業株式会社 プラズマ処理方法
JP4451076B2 (ja) * 2003-04-16 2010-04-14 東京エレクトロン株式会社 真空処理装置
JP5493005B2 (ja) * 2010-09-28 2014-05-14 株式会社アルバック ロードロック装置、排気制御装置及びロードロック装置の動作方法
CN111120281B (zh) * 2018-10-31 2021-07-09 北京北方华创微电子装备有限公司 共享干泵系统的控制方法以及共享干泵系统

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62142791A (ja) * 1985-12-18 1987-06-26 Anelva Corp 真空処理装置
JP3268394B2 (ja) * 1992-03-11 2002-03-25 東京エレクトロン株式会社 処理方法
JP3486821B2 (ja) * 1994-01-21 2004-01-13 東京エレクトロン株式会社 処理装置及び処理装置内の被処理体の搬送方法
JPH07321047A (ja) * 1994-05-23 1995-12-08 Tokyo Electron Ltd 真空処理装置
US5855681A (en) * 1996-11-18 1999-01-05 Applied Materials, Inc. Ultra high throughput wafer vacuum processing system
US5838121A (en) * 1996-11-18 1998-11-17 Applied Materials, Inc. Dual blade robot
JPH10270527A (ja) * 1997-03-21 1998-10-09 Ulvac Japan Ltd 複合型真空処理装置
JPH11204508A (ja) * 1998-01-09 1999-07-30 Toshiba Corp 半導体装置の製造方法及び半導体製造装置
JP2000232071A (ja) * 1999-02-09 2000-08-22 Kokusai Electric Co Ltd 基板処理方法および基板処理装置

Similar Documents

Publication Publication Date Title
BE2017C009I2 (ja)
BE2016C018I2 (ja)
BE2013C060I2 (ja)
BE2012C016I2 (ja)
BE2010C009I2 (ja)
BE2009C057I2 (ja)
BRPI0113085B8 (ja)
AR028236A3 (ja)
BE2010C040I2 (ja)
JP2002091726A5 (ja)
BR0112866A2 (ja)
CN3135488S (ja)
CN3141399S (ja)
AU2001273056A2 (ja)
AU2000280319A8 (ja)
AU2000280296A8 (ja)
AU2000278679A8 (ja)
AU2000271150A8 (ja)
BY6855C1 (ja)
CL2001002979A1 (ja)
CN3133951S (ja)
CN3134542S (ja)
CN3142146S (ja)
CN3135585S (ja)
CN3135639S (ja)