JP2002156591A5 - - Google Patents

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Publication number
JP2002156591A5
JP2002156591A5 JP2000350115A JP2000350115A JP2002156591A5 JP 2002156591 A5 JP2002156591 A5 JP 2002156591A5 JP 2000350115 A JP2000350115 A JP 2000350115A JP 2000350115 A JP2000350115 A JP 2000350115A JP 2002156591 A5 JP2002156591 A5 JP 2002156591A5
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JP
Japan
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JP2000350115A
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JP2002156591A (ja
JP4680373B2 (ja
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Priority to JP2000350115A priority Critical patent/JP4680373B2/ja
Priority claimed from JP2000350115A external-priority patent/JP4680373B2/ja
Publication of JP2002156591A publication Critical patent/JP2002156591A/ja
Priority to US10/191,137 priority patent/US6879747B2/en
Publication of JP2002156591A5 publication Critical patent/JP2002156591A5/ja
Application granted granted Critical
Publication of JP4680373B2 publication Critical patent/JP4680373B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000350115A 2000-11-16 2000-11-16 ガルバノミラー Expired - Fee Related JP4680373B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2000350115A JP4680373B2 (ja) 2000-11-16 2000-11-16 ガルバノミラー
US10/191,137 US6879747B2 (en) 2000-11-16 2002-07-09 Galvanometer mirror and optical switching device using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000350115A JP4680373B2 (ja) 2000-11-16 2000-11-16 ガルバノミラー

Publications (3)

Publication Number Publication Date
JP2002156591A JP2002156591A (ja) 2002-05-31
JP2002156591A5 true JP2002156591A5 (ja) 2008-01-10
JP4680373B2 JP4680373B2 (ja) 2011-05-11

Family

ID=18823402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000350115A Expired - Fee Related JP4680373B2 (ja) 2000-11-16 2000-11-16 ガルバノミラー

Country Status (2)

Country Link
US (1) US6879747B2 (ja)
JP (1) JP4680373B2 (ja)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4217217B2 (ja) * 2002-12-11 2009-01-28 オリンパス株式会社 光学素子の支持装置およびその製造方法、製造装置
JP4088188B2 (ja) * 2003-04-07 2008-05-21 セイコーエプソン株式会社 プロジェクタ
US7365374B2 (en) * 2005-05-03 2008-04-29 Nitronex Corporation Gallium nitride material structures including substrates and methods associated with the same
US20080304023A1 (en) * 2007-06-06 2008-12-11 Hyun Cheal Bang Tilting actuator for light-projection
JP4974839B2 (ja) * 2007-10-17 2012-07-11 キヤノン株式会社 光偏向装置及び画像形成装置
JP5693564B2 (ja) * 2009-04-23 2015-04-01 ケンブリッジ テクノロジー インコーポレイテッド 有限回転モータに連結された走査ミラーの性能向上をもたらすシステムおよび方法およびミラー
WO2011007628A1 (ja) * 2009-07-17 2011-01-20 日本電気株式会社 小型ミラーチルトアクチュエータ
JP6507550B2 (ja) * 2014-09-30 2019-05-08 セイコーエプソン株式会社 光学デバイス、画像表示装置およびプロジェクター
EP3006975A3 (en) 2014-10-08 2016-05-25 Optotune AG Device for tilting an optical element, particularly a mirror
EP3238609B1 (en) * 2014-12-26 2021-10-20 Nikon Corporation Fundus image forming device
JP2017187603A (ja) * 2016-04-05 2017-10-12 ミツミ電機株式会社 １軸回転アクチュエーター
DE102017202182A1 (de) * 2017-02-10 2018-08-16 Micro-Epsilon Messtechnik Gmbh & Co. Kg Reluktanz-Aktor
JP2019144484A (ja) * 2018-02-23 2019-08-29 株式会社アイティプランツ 光偏向システム、及び光偏向機構
EP3674769A3 (en) 2018-12-27 2020-09-16 Tdk Taiwan Corp. Driving mechanism
CN112394536B (zh) * 2019-07-31 2022-04-29 华为技术有限公司 一种光学防抖装置及控制方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3023214B2 (ja) 1991-07-03 2000-03-21 オリンパス光学工業株式会社 光学的情報記録再生装置
JP2983088B2 (ja) 1991-08-31 1999-11-29 キヤノン株式会社 光偏向器アレイ
JPH10160418A (ja) 1996-12-03 1998-06-19 Yamatake Honeywell Co Ltd 測定装置
JP3684016B2 (ja) 1997-01-28 2005-08-17 ペンタックス株式会社 ２次元光偏向装置
JPH10268211A (ja) * 1997-03-21 1998-10-09 Casio Comput Co Ltd 可動板の傾き制御装置およびそれを用いた撮像装置
US6295154B1 (en) * 1998-06-05 2001-09-25 Texas Instruments Incorporated Optical switching apparatus
WO1999063531A1 (en) * 1998-06-05 1999-12-09 Herzel Laor Optical switch for disk drive
JP4428741B2 (ja) 1998-09-04 2010-03-10 キヤノン株式会社 ガルバノミラーアクチュエータ
US6556737B1 (en) * 1999-08-02 2003-04-29 Integrated Micromachines, Inc. Silicon bulk-micromachined electromagnetic fiber-optics bypass microswitch
JP2001305598A (ja) * 2000-04-20 2001-10-31 Konica Corp 光学装置、撮像装置及び画像書込装置
US6925218B2 (en) * 2000-05-26 2005-08-02 Vitesse Semiconductor Corporation Control techniques and devices for an optical switch array
US6580846B1 (en) * 2000-05-26 2003-06-17 Versatile Optical Networks, Inc. Actively-controllable optical switches based on optical position sensing and applications in optical switching arrays
US6388789B1 (en) * 2000-09-19 2002-05-14 The Charles Stark Draper Laboratory, Inc. Multi-axis magnetically actuated device
JP2002116421A (ja) * 2000-10-04 2002-04-19 Fdk Corp 旋光器及びそれを用いた光デバイス
US6792170B2 (en) * 2001-06-14 2004-09-14 Lightbay Networks Corporation Method for maximizing light throughput in an optical switch

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