JP2002151895A - Electronic component mounting method - Google Patents

Electronic component mounting method

Info

Publication number
JP2002151895A
JP2002151895A JP2000340020A JP2000340020A JP2002151895A JP 2002151895 A JP2002151895 A JP 2002151895A JP 2000340020 A JP2000340020 A JP 2000340020A JP 2000340020 A JP2000340020 A JP 2000340020A JP 2002151895 A JP2002151895 A JP 2002151895A
Authority
JP
Japan
Prior art keywords
electronic component
bump
bumps
recognition
mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000340020A
Other languages
Japanese (ja)
Inventor
Masabumi Nishida
正文 西田
Nobutaka Abe
信孝 安倍
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2000340020A priority Critical patent/JP2002151895A/en
Publication of JP2002151895A publication Critical patent/JP2002151895A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/7515Means for applying permanent coating, e.g. in-situ coating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/757Means for aligning
    • H01L2224/75743Suction holding means
    • H01L2224/75745Suction holding means in the upper part of the bonding apparatus, e.g. in the bonding head

Landscapes

  • Supply And Installment Of Electrical Components (AREA)
  • Wire Bonding (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an electronic component mounting method capable of stably recognizing a bump forming surface. SOLUTION: In the mounting method for mounting an electronic component 13 on a substrate by joining bumps 13a of the component 13 to electrodes of the substrate, flattening is performed, in which a suction nozzle 7a holding the component 13 is lowered, with respect to a flattening stage 10 to make the bottom surface of the bumps 13a uniform in height, and then the nozzle 7a holding the component 13 is moved to a recognition section 11 for recognizing the flat surface of the bottom end portions of the bumps 13a by a line camera 11a from below. Thus, variation in the states of bumps 13a can be eliminated, and stable recognition can be carried out.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、フリップチップな
どのバンプ付の電子部品を基板に実装する電子部品実装
方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for mounting an electronic component having a bump, such as a flip chip, on a substrate.

【0002】[0002]

【従来の技術】電子部品の種類として、外部接合用のバ
ンプが設けられたフリップチップなどのバンプ付の電子
部品が知られている。この電子部品を基板に実装する際
には、電子部品の下面に設けられたバンプを、半田接合
もしくは樹脂接着剤中に導電粒子を含有させた導電性ペ
ーストを用いて基板の接続用電極に接合する。この実装
動作過程においては、電子部品の基板への搭載に先立っ
て電子部品のバンプ形成面を認識することにより電子部
品の識別や位置検出が行われる。そして認識後の電子部
品はフラットニング工程に送られ、バンプ形成面を平坦
面に押し付けることによってバンプ下面の高さを均一に
するフラットニングが行われた後に、導電性ペーストの
塗布が行われていた。
2. Description of the Related Art As a kind of electronic parts, electronic parts with bumps such as flip chips provided with bumps for external bonding are known. When mounting this electronic component on a substrate, the bumps provided on the lower surface of the electronic component are joined to the connection electrodes of the substrate by soldering or using a conductive paste containing conductive particles in a resin adhesive. I do. In this mounting operation process, identification and position detection of the electronic component are performed by recognizing the bump forming surface of the electronic component before mounting the electronic component on the substrate. After the recognition, the electronic component is sent to a flattening step, in which the bump forming surface is pressed against a flat surface to perform flattening to make the height of the bump lower surface uniform, and then the conductive paste is applied. Was.

【0003】[0003]

【発明が解決しようとする課題】ところが、上記従来の
電子部品実装方法では、電子部品の認識時にバンプの形
状のばらつきによって、認識ミスが発生しやすい。例え
ば、半田バンプなど柔らかい金属によって形成されたバ
ンプは荷重によって変形しやすく、トレイなどに収容さ
れた状態においては高さが高いバンプに集中して荷重が
作用するため、このようなバンプの下端部は押し付けら
れて変形する場合がある。このため、認識時においてバ
ンプの状態は、正常に球形状を保ったバンプや部分的に
押しつぶされて先端部が扁平になったバンプなど、形状
的にばらつきを示す。
However, in the above-described conventional electronic component mounting method, a recognition error is likely to occur due to a variation in the shape of the bump when the electronic component is recognized. For example, a bump formed of a soft metal such as a solder bump is easily deformed by a load, and when housed in a tray or the like, the load is concentrated on a bump having a high height. May be pressed and deformed. For this reason, at the time of recognition, the state of the bumps varies in shape, such as bumps that normally maintain a spherical shape and bumps that have been partially crushed and have flattened tips.

【0004】そしてこのようなバンプを認識すると、画
像処理において認識結果にばらつきを生じ、認識ミスを
誘発する要因となる。このように、従来のバンプ付きの
電子部品を実装する電子部品実装方法には、バンプ形成
面の認識をばらつきなく行うことが困難であるという問
題点があった。
[0004] Recognition of such bumps causes variations in recognition results in image processing, which causes recognition errors. As described above, the conventional electronic component mounting method for mounting an electronic component with a bump has a problem that it is difficult to recognize the bump formation surface without variation.

【0005】そこで本発明は、バンプ形成面の認識を安
定して行うことができる電子部品実装方法を提供するこ
とを目的とする。
Accordingly, an object of the present invention is to provide an electronic component mounting method capable of stably recognizing a bump formation surface.

【0006】[0006]

【課題を解決するための手段】請求項1記載の電子部品
実装方法は、電子部品に形成されたバンプを基板の電極
に接合することにより電子部品を基板に実装する電子部
品実装方法であって、前記電子部品を保持した吸着ヘッ
ドを平坦面を備えたフラットニングステージに対して下
降させて電子部品のバンプを前記平坦面に押圧すること
によりバンプ下面の高さをそろえるフラットニングを行
う工程と、フラットニング終了後の電子部品を保持した
吸着ヘッドを認識手段の上方に移動させて電子部品を下
方から認識する工程と、前記認識結果に基づいて吸着ヘ
ッドを移動させて保持した電子部品を基板に搭載する工
程とを含む。
According to a first aspect of the present invention, there is provided an electronic component mounting method for mounting an electronic component on a substrate by bonding a bump formed on the electronic component to an electrode of the substrate. Lowering the suction head holding the electronic component with respect to a flattening stage having a flat surface and pressing the bumps of the electronic component against the flat surface to perform flattening to make the height of the bump lower surface uniform. Moving the suction head holding the electronic component after flattening upward to the recognition means to recognize the electronic component from below, and moving the suction head based on the recognition result to move the electronic component held by the substrate to the substrate. And mounting the device on a substrate.

【0007】請求項2記載の電子部品実装方法は、請求
項1記載の電子部品実装方法であって、前記認識後の電
子部品のバンプに導電性ペーストもしくはフラックスを
転写する工程を含む。
According to a second aspect of the present invention, there is provided the electronic component mounting method according to the first aspect, including a step of transferring a conductive paste or a flux to the bumps of the recognized electronic component.

【0008】本発明によれば、電子部品のバンプを平坦
面に押圧することによりバンプ下面の高さをそろえるフ
ラットニング工程後に、電子部品のバンプ形成面の認識
を行うことにより、認識時のバンプの状態のばらつきを
排除して安定した認識を行うことができる。
According to the present invention, the bump forming surface of the electronic component is recognized after the flattening step of pressing the bumps of the electronic component against the flat surface to adjust the height of the lower surface of the bump, thereby obtaining the bump at the time of recognition. , And stable recognition can be performed.

【0009】[0009]

【発明の実施の形態】次に本発明の実施の形態を図面を
参照して説明する。図1は本発明の一実施の形態の電子
部品実装装置の斜視図、図2は本発明の一実施の形態の
電子部品実装装置の平面図、図3、図4は本発明の一実
施の形態の電子部品実装方法の工程説明図である。
Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 is a perspective view of an electronic component mounting apparatus according to one embodiment of the present invention, FIG. 2 is a plan view of an electronic component mounting apparatus according to one embodiment of the present invention, and FIGS. FIG. 4 is a process explanatory view of the electronic component mounting method of the embodiment.

【0010】まず図1、図2を参照して電子部品実装装
置について説明する。図1において、基台1の中央部に
はX方向に搬送路2が配設されている。搬送路2は基板
3を搬送し位置決めする位置決め部となっている。搬送
路2の両側には電子部品を供給する部品供給部4が配設
され、それぞれの部品供給部4には多数個のテープフィ
ーダ5が並設されている。テープフィーダ5はテープに
保持されたバンプ付きの電子部品を収納し、このテープ
をピッチ送りすることによりピックアップ位置5aに電
子部品を供給する。
First, an electronic component mounting apparatus will be described with reference to FIGS. In FIG. 1, a transport path 2 is provided in the center of a base 1 in the X direction. The transport path 2 serves as a positioning unit that transports and positions the substrate 3. Component supply units 4 for supplying electronic components are arranged on both sides of the transport path 2, and a large number of tape feeders 5 are arranged in each component supply unit 4. The tape feeder 5 stores electronic components with bumps held on the tape, and feeds the electronic components to the pickup position 5a by feeding the tape at a pitch.

【0011】X軸テーブル6には、移載ヘッド7が装着
されている。移載ヘッド7は、個別に昇降可能な単位移
載ヘッドを備えている。X軸テーブル6は平行に配置さ
れた2つのY軸テーブル8A,8Bに両端を支持されて
架設されている。X軸テーブル6およびY軸テーブル8
A,8Bを駆動することにより、移載ヘッド7は水平移
動する。このとき、単位移載ヘッドのそれぞれの下端部
に電子部品吸着用の吸着ノズルを装着することにより、
移載ヘッド7はテープフィーダ5のピックアップ位置5
aから電子部品を真空吸着してピックアップし、基板3
上に移載する。
A transfer head 7 is mounted on the X-axis table 6. The transfer head 7 includes a unit transfer head that can be individually raised and lowered. The X-axis table 6 is supported on both ends by two Y-axis tables 8A and 8B arranged in parallel with each other. X axis table 6 and Y axis table 8
By driving A and 8B, the transfer head 7 moves horizontally. At this time, by attaching a suction nozzle for electronic component suction to each lower end of the unit transfer head,
The transfer head 7 is located at the pickup position 5 of the tape feeder 5.
The electronic component is vacuum-adsorbed and picked up from the substrate a.
Transfer to the top.

【0012】搬送路2と部品供給部4の間の移載ヘッド
の移動経路には、ノズル保持部9、フラットニングステ
ージ10、認識部11、ペースト供給部12が配設され
ている。ノズル保持部9は、移載ヘッド7に装着され電
子部品の吸着保持に用いられる吸着ノズルや、ペースト
転写に用いられる転写ノズルを多数ストックする。そし
て移載ヘッド7をノズル保持部9にアクセスさせること
により、各単位移載ヘッドに装着されたノズルを交換す
ることができる。
A nozzle holding unit 9, a flattening stage 10, a recognition unit 11, and a paste supply unit 12 are arranged on the movement path of the transfer head between the transport path 2 and the component supply unit 4. The nozzle holding unit 9 stocks a large number of suction nozzles mounted on the transfer head 7 and used for suction holding of electronic components and transfer nozzles used for paste transfer. By causing the transfer head 7 to access the nozzle holding unit 9, the nozzle mounted on each unit transfer head can be replaced.

【0013】フラットニングステージ10は、上面に押
圧用の平坦面を備えた押圧用ステージであり、下面にバ
ンプ13aが形成されたバンプ付きの電子部品13(図
3参照)を保持した移載ヘッド7をフラットニングステ
ージ10に対して下降させ、所定圧力で押圧することに
より、電子部品13のバンプ13aの下端部を平坦化し
て高さをそろえるフラットニング処理を行う。
The flattening stage 10 is a pressing stage having a flat surface for pressing on the upper surface, and a transfer head holding an electronic component 13 with bumps 13a formed on the lower surface (see FIG. 3). 7 is lowered with respect to the flattening stage 10 and pressed with a predetermined pressure, thereby flattening the lower end portions of the bumps 13a of the electronic component 13 to perform a flattening process for equalizing the height.

【0014】認識部11はラインカメラ11aを備えて
おり、部品供給部4から電子部品13をピックアップし
た移載ヘッド7が上方を通過する際に、ラインカメラ1
1aにより吸着ノズルに保持された状態の電子部品13
を下方から撮像する。そして撮像結果を認識処理するこ
とにより電子部品13の識別や位置検出を行う。ペース
ト供給部12は、電子部品13の半田接合に用いられる
フラックスや電子部品接着用のペーストなどを回転テー
ブル状の容器に貯溜し、所定膜圧のペースト塗膜で供給
する。このペースト塗膜上に移載ヘッド7に保持された
電子部品13を下降させることにより、バンプ13aの
下端部にペーストが塗布される。
The recognizing unit 11 includes a line camera 11a. When the transfer head 7 picking up the electronic component 13 from the component supply unit 4 passes above, the line camera 1a
Electronic component 13 held by suction nozzle 1a
Is imaged from below. Then, the electronic component 13 is identified and its position is detected by recognizing the imaging result. The paste supply unit 12 stores flux used for soldering the electronic component 13, paste for bonding the electronic component, and the like in a rotary table-shaped container, and supplies the paste with a paste film having a predetermined film pressure. By lowering the electronic component 13 held by the transfer head 7 on the paste coating, the paste is applied to the lower end of the bump 13a.

【0015】この電子部品実装装置は上記のように構成
されており、以下実装動作について説明する。まず、移
載ヘッド7は部品供給部4に移動しそこで単位移載ヘッ
ドが昇降動作を行うことにより、テープフィーダ5のピ
ックアップ位置5aから吸着ノズル7aによって電子部
品13をピックアップする。次いで移載ヘッド7はフラ
ットニングステージ10上に移動する。
This electronic component mounting apparatus is configured as described above, and the mounting operation will be described below. First, the transfer head 7 moves to the component supply unit 4, where the unit transfer head performs an elevating operation to pick up the electronic component 13 from the pickup position 5a of the tape feeder 5 by the suction nozzle 7a. Next, the transfer head 7 moves onto the flattening stage 10.

【0016】ここで図3(a)に示すように単位移載ヘ
ッドが下降することにより吸着ノズル7aに保持された
電子部品13のバンプ13aはフラットニングステージ
10の平坦面10aに対して押圧される。これにより、
バンプ13aの下端部は部分的に押しつぶされ、そして
単位移載ヘッドが上昇することにより、図3(b)に示
すように、バンプ13aの下端部を平坦化して高さをそ
ろえるフラットニングが完了する。
Here, as shown in FIG. 3A, when the unit transfer head is lowered, the bump 13a of the electronic component 13 held by the suction nozzle 7a is pressed against the flat surface 10a of the flattening stage 10. You. This allows
The lower end of the bump 13a is partially crushed, and the unit transfer head is lifted, thereby completing the flattening of the lower end of the bump 13a to flatten and align the height as shown in FIG. 3B. I do.

【0017】次いでフラットニング後の電子部品13を
保持した移載ヘッド7は認識部11の上方に移動し、図
3(c)に示すように下方から照明光が照射された状態
で(矢印a参照)、ラインカメラ11aの上方で移載ヘ
ッド7が水平移動することにより、保持した電子部品1
3のバンプ形成面が撮像される。そしてこの撮像結果を
画像処理することにより、図3(d)に示すようにバン
プ13aの平坦面(バンプ13a中の非ハッチング部
分)と、周囲との明度差が明瞭な画像を取得することが
できる。そしてこの画像に基づいて、電子部品13が識
別されると共に検出されたバンプ13aから電子部品1
3の位置が検出される。
Next, the transfer head 7 holding the flattened electronic component 13 moves above the recognition unit 11 and is irradiated with illumination light from below as shown in FIG. 3C (arrow a). The electronic component 1 held by the transfer head 7 moving horizontally above the line camera 11a.
The image of the bump forming surface of No. 3 is taken. Then, by performing image processing on the imaging result, it is possible to obtain an image in which the brightness difference between the flat surface of the bump 13a (the non-hatched portion in the bump 13a) and the surroundings is clear as shown in FIG. it can. Then, based on this image, the electronic component 13 is identified and the electronic component 1 is removed from the detected bump 13a.
The position of No. 3 is detected.

【0018】このバンプ形成面の認識においては、バン
プ13aは全てフラットニングによって下端部が平坦化
されていることから、取得画像上でのバンプ13aの検
出を安定して高精度で行うことができる。すなわち、バ
ンプ13aの形状は一般に球状であることから、照明光
の照射角度や照射強度によって下方のラインカメラ11
aが受光する光の強度がばらつきやすい。そして画像認
識においては、受光強度に依存する画面上の輝度に基づ
いた処理が行われることから、バンプ13aのような球
面状の検出対象物を撮像する場合には、従来は水平に近
い角度の全周方向からバンプ13aに対して照明光を照
射するなど専用の照明方法を用いる必要があった。
In the recognition of the bump formation surface, since the lower end portion of all the bumps 13a is flattened by flattening, the detection of the bumps 13a on the acquired image can be performed stably and with high accuracy. . That is, since the shape of the bump 13a is generally spherical, depending on the irradiation angle and irradiation intensity of the illumination light, the lower line camera 11
The intensity of the light received by a tends to vary. In image recognition, processing is performed based on the luminance on the screen that depends on the received light intensity. Therefore, when an image of a spherical detection target such as the bump 13a is taken, a conventional method is used in which the angle is nearly horizontal. It is necessary to use a dedicated illumination method such as irradiating the bump 13a with illumination light from all directions.

【0019】これに対し、本実施の形態に示す実装動作
におけるバンプ形成面の認識においては、撮像に先立っ
て全てのバンプ13aの下端部が平坦化されていること
から、検出対象は格子状に点在する平坦部である。した
がって下方から照明光を照射する通常の照明方法によ
り、これらの平坦部を容易に認識することができる。
On the other hand, in the recognition of the bump formation surface in the mounting operation shown in the present embodiment, since the lower ends of all the bumps 13a are flattened prior to imaging, the detection target is a grid. These are dotted flat parts. Therefore, these flat portions can be easily recognized by a normal illumination method of irradiating illumination light from below.

【0020】また、半田バンプなど酸化されやすい金属
のバンプ13aでは、バンプ13aの表面は酸化膜によ
って覆われ、画像認識が困難な表面性状となり易い。こ
のような状態のバンプ13aを対象とする場合にあって
も、撮像に先立ってフラットニングを行うことによりバ
ンプ13aの表面はフラットニングステージ10に押圧
されることから、表面の酸化膜が破壊され平坦化された
バンプ表面は金属光沢面となる。これにより、明瞭な認
識に適した画像を取得することができる。
In the case of a bump 13a made of a metal which is easily oxidized such as a solder bump, the surface of the bump 13a is covered with an oxide film, so that the surface tends to have a surface property which makes image recognition difficult. Even when the bump 13a in such a state is targeted, the surface of the bump 13a is pressed by the flattening stage 10 by performing flattening prior to imaging, so that the oxide film on the surface is destroyed. The flattened bump surface becomes a metallic glossy surface. Thus, an image suitable for clear recognition can be obtained.

【0021】次に移載ヘッド7はペースト供給部12の
上方に移動する。そして単位移載ヘッドを下降させるこ
とにより、図4(a)に示すように保持した電子部品1
3のバンプ13aがペースト供給部12のペースト14
の塗膜に接触する。そして移載ヘッド7を上昇させるこ
とにより、図4(b)に示すようにバンプ13aの下端
部にはペースト14が転写により塗布される。
Next, the transfer head 7 moves above the paste supply unit 12. Then, by lowering the unit transfer head, the electronic component 1 held as shown in FIG.
The third bump 13 a is the paste 14 of the paste supply unit 12.
In contact with the coating film. By raising the transfer head 7, the paste 14 is applied by transfer to the lower end of the bump 13a as shown in FIG. 4B.

【0022】この後、移載ヘッド7は基板3上に移動
し、ここで単位移載ヘッドが各実装点に対して下降する
ことにより、保持した電子部品13のバンプ13aが基
板3の電極上に着地し、電子部品13の搭載が行われ
る。この搭載動作においては、認識部11での位置検出
結果に基づいて、電子部品13の基板3に対する位置ず
れが補正される。これによりバンプ13aは基板3の電
極に接合され、電子部品13の実装が完了する。
Thereafter, the transfer head 7 moves onto the substrate 3, where the unit transfer head is lowered with respect to each mounting point, so that the bumps 13 a of the held electronic components 13 are placed on the electrodes of the substrate 3. Then, the electronic component 13 is mounted. In this mounting operation, the displacement of the electronic component 13 with respect to the substrate 3 is corrected based on the position detection result of the recognition unit 11. Thereby, the bumps 13a are joined to the electrodes of the substrate 3, and the mounting of the electronic component 13 is completed.

【0023】上記説明したように、本実施の形態に示す
電子部品の実装動作においては、バンプ形成面の画像認
識に先立って電子部品のバンプを平坦化するフラットニ
ングを行うようにしたものである。これにより、認識時
のバンプの状態のばらつきを排除して、安定した画像認
識を行うことができる。
As described above, in the mounting operation of the electronic component according to the present embodiment, flattening for flattening the bump of the electronic component is performed prior to image recognition of the bump forming surface. . Thus, it is possible to perform stable image recognition while eliminating variations in the state of the bumps at the time of recognition.

【0024】[0024]

【発明の効果】本発明によれば、電子部品のバンプを平
坦面に押圧することによりバンプ下面の高さをそろえる
フラットニング工程後に、電子部品のバンプ形成面の認
識を行うようにしたので、認識時のバンプの状態のばら
つきを排除して安定した認識を行うことができる。
According to the present invention, the bump formation surface of the electronic component is recognized after the flattening step in which the bumps of the electronic component are pressed against the flat surface to make the height of the bump lower surface uniform. Stable recognition can be performed by eliminating variations in the state of bumps during recognition.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施の形態の電子部品実装装置の斜
視図
FIG. 1 is a perspective view of an electronic component mounting apparatus according to an embodiment of the present invention.

【図2】本発明の一実施の形態の電子部品実装装置の平
面図
FIG. 2 is a plan view of the electronic component mounting apparatus according to the embodiment of the present invention;

【図3】本発明の一実施の形態の電子部品実装方法の工
程説明図
FIG. 3 is a process explanatory view of the electronic component mounting method according to one embodiment of the present invention;

【図4】本発明の一実施の形態の電子部品実装方法の工
程説明図
FIG. 4 is a process explanatory view of the electronic component mounting method according to one embodiment of the present invention;

【符号の説明】[Explanation of symbols]

3 基板 7 移載ヘッド 7a 吸着ノズル 10 フラットニングステージ 10a 平坦面 11 認識部 12 ペースト供給部 13 電子部品 13a バンプ 14 ペースト 3 Substrate 7 Transfer Head 7a Suction Nozzle 10 Flattening Stage 10a Flat Surface 11 Recognition Unit 12 Paste Supply Unit 13 Electronic Component 13a Bump 14 Paste

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】電子部品に形成されたバンプを基板の電極
に接合することにより電子部品を基板に実装する電子部
品実装方法であって、前記電子部品を保持した吸着ヘッ
ドを平坦面を備えたフラットニングステージに対して下
降させて電子部品のバンプを前記平坦面に押圧すること
によりバンプ下面の高さをそろえるフラットニングを行
う工程と、フラットニング終了後の電子部品を保持した
吸着ヘッドを認識手段の上方に移動させて電子部品を下
方から認識する工程と、前記認識結果に基づいて吸着ヘ
ッドを移動させて保持した電子部品を基板に搭載する工
程とを含むことを特徴とする電子部品実装方法。
An electronic component mounting method for mounting an electronic component on a substrate by bonding a bump formed on the electronic component to an electrode on the substrate, wherein the suction head holding the electronic component has a flat surface. Recognizing a suctioning head that holds the electronic component after the flattening process, by lowering the electronic component bump against the flat surface by lowering the electronic component bump against the flat surface, thereby aligning the height of the bump lower surface. Electronic component mounting, comprising the steps of: moving the electronic component upward from the means and recognizing the electronic component from below; and mounting the electronic component held by moving the suction head based on the recognition result. Method.
【請求項2】前記認識後の電子部品のバンプに導電性ペ
ーストもしくはフラックスを転写する工程を含むことを
特徴とする請求項1記載の電子部品実装方法。
2. The electronic component mounting method according to claim 1, further comprising a step of transferring a conductive paste or a flux to the bumps of the electronic component after the recognition.
JP2000340020A 2000-11-08 2000-11-08 Electronic component mounting method Pending JP2002151895A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000340020A JP2002151895A (en) 2000-11-08 2000-11-08 Electronic component mounting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000340020A JP2002151895A (en) 2000-11-08 2000-11-08 Electronic component mounting method

Publications (1)

Publication Number Publication Date
JP2002151895A true JP2002151895A (en) 2002-05-24

Family

ID=18815000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000340020A Pending JP2002151895A (en) 2000-11-08 2000-11-08 Electronic component mounting method

Country Status (1)

Country Link
JP (1) JP2002151895A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006147860A (en) * 2004-11-19 2006-06-08 Toshiba Corp Method and device for manufacturing semiconductor device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07303000A (en) * 1994-05-06 1995-11-14 Matsushita Electric Ind Co Ltd Method and apparatus for mounting of ic component
JPH10154728A (en) * 1996-11-22 1998-06-09 Matsushita Electric Ind Co Ltd Pressure bonding of electronic component with bump
JPH10209208A (en) * 1997-01-23 1998-08-07 Hitachi Ltd Method and device for manufacturing semiconductor
JP2000124264A (en) * 1998-10-20 2000-04-28 Matsushita Electric Ind Co Ltd Apparatus for mounting electronic components with bump

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07303000A (en) * 1994-05-06 1995-11-14 Matsushita Electric Ind Co Ltd Method and apparatus for mounting of ic component
JPH10154728A (en) * 1996-11-22 1998-06-09 Matsushita Electric Ind Co Ltd Pressure bonding of electronic component with bump
JPH10209208A (en) * 1997-01-23 1998-08-07 Hitachi Ltd Method and device for manufacturing semiconductor
JP2000124264A (en) * 1998-10-20 2000-04-28 Matsushita Electric Ind Co Ltd Apparatus for mounting electronic components with bump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006147860A (en) * 2004-11-19 2006-06-08 Toshiba Corp Method and device for manufacturing semiconductor device
JP4709535B2 (en) * 2004-11-19 2011-06-22 株式会社東芝 Semiconductor device manufacturing equipment

Similar Documents

Publication Publication Date Title
US7059043B2 (en) Method for mounting an electronic part by solder position detection
US7281322B2 (en) Component mounting method
JP4386007B2 (en) Component mounting apparatus and component mounting method
JP2004103923A (en) Device for mounting electronic part and method for mounting the same
JP6717630B2 (en) Electronic component mounting equipment
JPH10294338A (en) Device and method for mounting conductive ball
JP2003273167A (en) Electronic component loading device and electronic component loading method
JP2002118153A (en) Method of manufacturing and apparatus for mounting electronic component
JP4960160B2 (en) Flux transfer device and electronic component mounting method
JP3899867B2 (en) Electronic component mounting apparatus and electronic component mounting method
JP2000022394A (en) Apparatus and method for mounting electronic component and apparatus and method for transferring flux
WO2009125520A1 (en) Bonding device, method for recognizing position of bonding object used in bonding device, and recording medium on which program for recognizing position of bonding object is recorded
JP5830650B2 (en) Component mounting method and component mounting apparatus
JP2002151895A (en) Electronic component mounting method
JP3744451B2 (en) Electronic component mounting apparatus and electronic component mounting method
JPH08162502A (en) Electronic part mounter
JP5071218B2 (en) Paste transfer apparatus and paste transfer method
JP4761672B2 (en) Bonding method and bonding apparatus
JP2002326177A (en) Electronic component mounter
JP2003273165A (en) Electronic component mounting device and electronic component mounting method
JP3397127B2 (en) Electronic component mounting apparatus and mounting method
CN112331582A (en) Chip mounting device and method for manufacturing semiconductor device
JP4743059B2 (en) Electronic component mounting system and electronic component mounting method
JP4702237B2 (en) Electronic component mounting apparatus and electronic component mounting method
JPH0758495A (en) Electronic part mounting device and method for correcting electronic part mounting position

Legal Events

Date Code Title Description
RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7421

Effective date: 20050630

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20060112

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20060117

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060303

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20060328