JP2002134685A - 集積回路装置 - Google Patents

集積回路装置

Info

Publication number
JP2002134685A
JP2002134685A JP2000326776A JP2000326776A JP2002134685A JP 2002134685 A JP2002134685 A JP 2002134685A JP 2000326776 A JP2000326776 A JP 2000326776A JP 2000326776 A JP2000326776 A JP 2000326776A JP 2002134685 A JP2002134685 A JP 2002134685A
Authority
JP
Japan
Prior art keywords
chip
conductive material
integrated circuit
circuit device
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000326776A
Other languages
English (en)
Inventor
Katsuya Ogura
勝也 小倉
Yoshihiro Ikuto
義弘 生藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP2000326776A priority Critical patent/JP2002134685A/ja
Priority to US09/983,396 priority patent/US20020050635A1/en
Publication of JP2002134685A publication Critical patent/JP2002134685A/ja
Pending legal-status Critical Current

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Classifications

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    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01004—Beryllium [Be]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01005—Boron [B]
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    • H01—ELECTRIC ELEMENTS
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    • H01—ELECTRIC ELEMENTS
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Abstract

(57)【要約】 【課題】 ノイズに起因して生じる誤動作を低減したチ
ップ・オン・チップ構造の集積回路装置を提供する。 【解決手段】 チップ・オン・チップ構造のＩＣチップ
１及び２のうちのフレーム５に直接的には実装されてい
ないＩＣチップ２の上面に導電材７を設け、この導電材
７をグランド電位となるフレーム５にワイヤ８で接続す
る。

Description

【発明の詳細な説明】
【０００１】
【発明の属する技術分野】本発明は、バンプを介するな
どして接合されることにより互いに電気的に接続された
複数のＩＣチップを有する集積回路装置に関するもので
ある。
【０００２】
【従来の技術】従来から、２つの半導体チップを実装す
るにあたって、両方のチップをバンプを介して接合する
などして電気的に接続した構造（以下、「チップ・オン
・チップ構造」と称する）にする場合がある。このチッ
プ・オン・チップ構造を採用することによって、各チッ
プを別々に実装する場合に比して、実装面積を小さくで
きるというメリットがある。
【０００３】
【発明が解決しようとする課題】しかしながら、従来
は、図７に示すように、チップ・オン・チップ構造のＩ
Ｃチップ１及び２をフレーム５に単に積み重ねた構成に
なっていたので、特に高周波信号を取り扱う場合には、
外部ノイズをひろったり、内部チップからのノイズが回
り込んで、誤動作が発生したり、動作しないことがあっ
た。
【０００４】そこで、本発明は、ノイズに起因して生じ
る誤動作を低減したチップ・オン・チップ構造の集積回
路装置を提供することを目的とする。
【０００５】
【課題を解決するための手段】上記の目的を達成するた
め、第１のＩＣチップと第２のＩＣチップとが接合され
ることにより互いに電気的に接続された上で基板に実装
されて成る集積回路装置において、前記第１のＩＣチッ
プと前記第２のＩＣチップのうちの前記基板に直接的に
は実装されていない方のＩＣチップの上面、または、前
記第１のＩＣチップと前記第２のＩＣチップとの間に導
電材を設けるとともに、該導電材を定電位点に接続して
いる。この構成により、シールド効果が高まり、外部ノ
イズの混入や内部チップで発生するノイズの回り込みが
抑制される。
【０００６】
【発明の実施の形態】以下に、本発明の実施形態を図面
を参照しながら説明する。図１は本発明の実施形態であ
る集積回路装置の断面図である。第１のＩＣチップ１
と、第２のＩＣチップ２とが、金などのバンプ３を介し
て電気的に接続されることにより、チップ・オン・チッ
プ構造となっている。第１のＩＣチップ１と第２のＩＣ
チップ２とはこれらのＩＣチップが対向する方向にのみ
導電性を示す異方性導電フィルム４を挟んで熱圧着され
ることにより接合されている。その後、樹脂によりモー
ルドしてパッケージを形成したり、樹脂をポッティング
したりするが、一般的な方法なので説明は省略する。
【０００７】第１のＩＣチップ１は裏面（第２のＩＣチ
ップ２が接合されていない側の面）をフレーム５側にし
てフレーム５に実装されている。第１のＩＣチップ１と
フレーム５とはワイヤ６により電気的に接続されてい
る。フレーム５はグランドに接続される。フレーム５と
しては、樹脂封止ＩＣを構成する金属からなるアイラン
ドや樹脂基板の表面に金属配線が形成された基板を用い
ることができる。
【０００８】フレーム５に直接的には実装されていない
第２のＩＣチップ２の上面（第１のＩＣチップ１が接合
されていない側の面）には導電材７が設けられている。
導電材７は蒸着あるいははり付けにより形成することが
できる。導電材７の材質は、例えば銅やアルミや金であ
る。導電材７はワイヤ８によりグランド電位となるフレ
ーム５に接続されている。尚、図２に示すように、導電
材７をワイヤ９で第１のＩＣチップ１に接続することに
より、第１のＩＣチップ１を介して導電材７をフレーム
５に接続するようにしてもよい。尚、図２では、第１の
ＩＣチップ１と第２のＩＣチップ２とをバンプ３で直接
つなげた構造となっている。
【０００９】また、図３に断面図を示すように、一端が
導電材７に接触し、他端がフレーム５に導電性の材料で
接着または溶着されているとともに、矢印Ａで示す方向
に力が働く金属性のバネ１０により導電材７をフレーム
５に接続するようにしてもよい。また、図４に断面図を
示すように、チップ・オン・チップ構造のＩＣチップ１
及び２の全体を導電材１１で囲い込むとともに、導電材
１１をフレーム５と導通状態にし、さらに、自然長より
も短くなった状態（すなわち、伸びようとする状態）に
ある導電性のバネ１２により導電材７と導電材１１とを
接続することによって、バネ１２及び導電材１１を介し
て導電材７をフレーム５に接続するようにしてもよい。
これらの各構成によれば、接着及び溶着技術が簡素化さ
れる。また、図３、４の場合、導電材７を設けないで、
第２のＩＣチップ２の裏面と直接接触するようにしても
よい。
【００１０】本発明のさらに別の実施形態である集積回
路装置の断面図、上面図を図５の（ａ）、（ｂ）にそれ
ぞれ示す。尚、今までに説明した実施形態と同一部分に
は同一符号を付して説明を省略する。異方性導電フィル
ム４内に、すなわち、チップ・オン・チップ構造の２つ
のＩＣチップ１と２との間には、バンプ３と接触しない
ように、金属性の導電材１３が挟み込まれたり、差し込
まれたりしている。導電材１３には異方性導電フィルム
４からはみ出している部分があり、この部分からワイヤ
１４によりグランド電位となるフレーム５に接続されて
いる。尚、第１のＩＣチップ１を介して導電材１３をフ
レーム５に接続するようにしてもよいし、図３のような
バネ材を使用して接続するようにしてもよい。また、第
１のＩＣチップ１の表面には複数のパッドが形成されて
いるが、判りやすくするためにワイヤ接続は省略してい
る。
【００１１】以上の各実施形態では、チップ・オン・チ
ップ構造のＩＣチップに導電材を別途組み込むととも
に、この導電材をグランドに接続しており、これによ
り、シールド効果を得ることができるので、外部ノイズ
の混入や内部チップで発生するノイズの回り込みが抑制
され、ノイズに起因して生じる誤動作が低減する。
【００１２】尚、上記各実施形態では、導電材７、１３
をグランドに接続する構成となっているが、その他の定
電位点（例えば電源ラインなど）に接続するようにして
もよい。また、図６に示すように、図１の構成と図５の
構成とを組み合わせた構成、すなわち、導電材７と１３
との両方を設けた構成であってもよい。
【００１３】
【発明の効果】以上説明したように、本発明の集積回路
装置によれば、チップ・オン・チップ構造のＩＣチップ
に導電材を組み込むとともに、その導電材を定電位点に
接続することによりシールド効果を得ているので、外部
ノイズの混入や内部チップで発生するノイズの回り込み
が抑制され、ノイズに起因して生じる誤動作が低減す
る。
【図面の簡単な説明】
【図１】 本発明の実施形態である集積回路装置の断面
図である。
【図２】 本発明の別の実施形態である集積回路装置の
断面図である。
【図３】 本発明のさらに別の実施形態である集積回路
装置の断面図である。
【図４】 本発明のさらに別の実施形態である集積回路
装置の断面図である。
【図５】 本発明のさらに別の実施形態である集積回路
装置の断面図及び上面図である。
【図６】 本発明のさらに別の実施形態である集積回路
装置の断面図及び上面図である。
【図７】 チップ・オン・チップ構造の従来の集積回路
装置の断面図である。
【符号の説明】
１ 第１のＩＣチップ ２ 第２のＩＣチップ ３ バンプ ４ 異方性導電フィルム ５ フレーム ６ ワイヤ ７ 導電材 ８ ワイヤ ９ ワイヤ １０ 金属性のバネ １１ 導電材 １２ 導電性のバネ １３ 導電材 １４ ワイヤ

Claims (1)

    【特許請求の範囲】
  1. 【請求項１】 第１のＩＣチップと第２のＩＣチップと
    が接合されることにより互いに電気的に接続された上で
    基板に実装されて成る集積回路装置において、前記第１
    のＩＣチップと前記第２のＩＣチップのうちの前記基板
    に直接的には実装されていない方のＩＣチップの上面、
    または、前記第１のＩＣチップと前記第２のＩＣチップ
    との間に設けられた導電材を定電位点に接続したことを
    特徴とする集積回路装置。
JP2000326776A 2000-10-26 2000-10-26 集積回路装置 Pending JP2002134685A (ja)

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US09/983,396 US20020050635A1 (en) 2000-10-26 2001-10-24 Integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000326776A JP2002134685A (ja) 2000-10-26 2000-10-26 集積回路装置

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Country Status (2)

Country Link
US (1) US20020050635A1 (ja)
JP (1) JP2002134685A (ja)

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WO2007080922A1 (ja) * 2006-01-16 2007-07-19 Nissan Motor Co., Ltd. 半導体電力変換装置
JP2007251226A (ja) * 2007-07-09 2007-09-27 Nec Electronics Corp 半導体装置
US7667312B2 (en) 2002-09-18 2010-02-23 Nec Electronics Corporation Semiconductor device including a heat-transmitting and electromagnetic-noise-blocking substance and method of manufacturing the same
JPWO2013153742A1 (ja) * 2012-04-11 2015-12-17 パナソニックＩｐマネジメント株式会社 半導体装置

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US20040124538A1 (en) * 2002-12-31 2004-07-01 Rafael Reif Multi-layer integrated semiconductor structure
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JP2006186053A (ja) * 2004-12-27 2006-07-13 Shinko Electric Ind Co Ltd 積層型半導体装置
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US7786572B2 (en) * 2005-09-13 2010-08-31 Taiwan Semiconductor Manufacturing Company, Ltd. System in package (SIP) structure
KR100850072B1 (ko) * 2006-11-03 2008-08-04 동부일렉트로닉스 주식회사 웨이퍼 컷 앵글의 보상 기능을 가지는 이온주입장치 및이를 이용한 이온주입방법
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Cited By (5)

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US7667312B2 (en) 2002-09-18 2010-02-23 Nec Electronics Corporation Semiconductor device including a heat-transmitting and electromagnetic-noise-blocking substance and method of manufacturing the same
WO2007080922A1 (ja) * 2006-01-16 2007-07-19 Nissan Motor Co., Ltd. 半導体電力変換装置
JP2007251226A (ja) * 2007-07-09 2007-09-27 Nec Electronics Corp 半導体装置
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