JP2002080236A - Method of manufacturing glass disc and device therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method of manufacturing a glass disc enabling to manufacture a high precision glass disc at high rate, and to provide a manufacturing device for it. SOLUTION: This method comprises fixing a square-cut plate glass substrate G to a rotating table 22, pressing knives 24A and 24B to the surface of the glass substrate at a designated pressure, and rotating the rotating table 22 to form inner and/or outer circumference line(s).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for manufacturing a disk-shaped or donut-shaped glass substrate by cutting a glass material having a square-cut plate shape.
The present invention relates to a method and an apparatus for manufacturing a glass disk which is suitably used for cutting a donut-shaped glass substrate (glass disk) for a magnetic disk or an optical disk from the glass substrate.

[0002]

2. Description of the Related Art A glass disk for a magnetic disk or an optical disk, that is, a glass disk, is manufactured by cutting a square-cut glass substrate along the outer and inner circumferential lines of the disk with a cutter.

[0003] To explain further, for example, Japanese Patent Laid-Open No. 7-22 / 1995
As described in Japanese Patent No. 3828, a cutting line is formed on one surface side of the glass substrate with a cutter in a thickness direction of the glass substrate so as to draw a closed curve, and then the surface with the cutting line is heated to form a glass. The substrate is deformed, and this deformation causes the streak to instantaneously reach the side opposite to the heated surface of the glass substrate.

[0004] Thereafter, the inside of the area surrounded by the incision line is pushed by a push rod to cut out a circle. Then
A hole is formed in the center of the circularly cut glass substrate in the same manner to produce a donut-shaped glass substrate, that is, a glass disk.

FIG. 29 shows an example of a processing apparatus for forming an outer peripheral line and an inner peripheral line on a glass substrate.

In a conventional processing apparatus 100, a table 102 with a suction jig is installed on a gantry 101, and a table 1 is provided.
02, a frame 103 fixed to the gantry 101
Is arranged. An arm 104 is rotatably attached to the frame 103, and an arm rotating motor 105 is provided.
Is driven to rotate. The arm 104 is also movable in the vertical direction by an arm vertical cylinder 106.

The outer periphery of the diamond wheel holder 107 and the inner periphery of the diamond wheel holder 108 are attached to the arm 104. , A diamond wheel 109 is attached.

In such a configuration, the arm 104 is driven to rotate by the arm rotation motor 105 and is moved downward by the arm vertical cylinder 106, and the diamond wheel 109 is moved at a predetermined pressure to the table 102. It is pressed by the upper square plate glass G. Thus, the cut line is formed so as to draw a closed curve in the thickness direction of the glass substrate G.

[0009]

As will be understood from the above description, the conventional processing apparatus comprises an arm 104, a diamond wheel holder 107 for the outer circumference, and a diamond wheel holder 1 for the inner circumference.
A method is adopted in which an outer peripheral line and an inner peripheral line are simultaneously formed by rotating a head provided with a scribe mechanism composed of a 08 or the like.

[0010] However, when a head having a heavy scribing mechanism is rotated at high speed in a conventional processing apparatus, centrifugal force acts on the apparatus. Therefore, it is necessary to manufacture a high-speed and high-precision glass disk. There was a limit naturally.

The present inventors have conducted many research experiments to solve this problem. As a result, the square-cut glass material was vacuum-adsorbed and fixed on a rotary table, the rotary table was rotated, and the scribe mechanism was not rotated. As a result, it has been found that the above-described conventional problem can be solved.

When the start and end points of the cut line slightly differ from each other when forming the inner and outer cut lines, the cut line is not cut into a disk shape, and cracks are generated from the position. It is also very difficult to manufacture a highly accurate glass disk because it causes defective products.

As a result of the research experiments conducted by the present inventors, in order to manufacture a high-precision glass disk, it is necessary to make the starting point and the end point of the cut line as close to zero as possible to manufacture a high-speed glass disk. Turned out to be the most important.

In the case of the conventional method, the scribe mechanism must be instantaneously raised by a cam mechanism or a cylinder mechanism so that the start point position and the end point position of the cut line do not overlap. It is difficult to drive a heavy scribe mechanism at high speed, and it is very difficult to obtain high-precision positioning accuracy.

The inventors of the present invention have conducted various studies to solve such a problem. As a result, the present inventors have adopted a servomotor as a rotary drive means of the rotary table, controlled by NC control, and set the starting point of the cut line. We succeeded in high-precision positioning that brings the position and end point position as close to 0 as possible.

Accordingly, an object of the present invention is to provide a method and an apparatus for manufacturing a glass disk capable of manufacturing a glass disk with high speed and high accuracy.

Another object of the present invention is to perform high-precision positioning in which the start point position and end point position of the cut line can be made as close as possible to zero, thereby greatly improving the yield rate and improving the productivity. It is an object of the present invention to provide a manufacturing method and a manufacturing apparatus for a glass disk that can be performed.

Another object of the present invention is to control the stop position after the end of the scribing of the inner and outer peripheries and the reversal of the rotary table with a servomotor so that the glass disk can be stored in a cassette so that inspection can be performed. An object of the present invention is to provide a manufacturing method and a manufacturing apparatus for a glass disk, in which a start point position and an end point position are located above a cassette so that inspection can be easily performed.

[0019]

The above object is achieved by a method and apparatus for manufacturing a glass disk according to the present invention. In summary, according to the first aspect of the present invention, a square-cut glass substrate is fixed to a rotary table, a cutting tool is pressed against the surface of the glass substrate with a predetermined pressing force, and the rotary table is rotated to rotate the inner peripheral line. And / or a method for producing a glass disk, characterized by forming an outer peripheral line.

According to one embodiment of the present invention, a servomotor is employed as the rotary drive means of the rotary table, and drive control is performed by NC control.

According to another embodiment of the first invention,
The starting point and the ending point of the inner and / or outer lines are brought closer to zero as much as possible.

According to another embodiment of the first invention,
The servomotor first rotates the rotary table 360 degrees in one direction and stops, then moves the cutting tool away from the surface of the glass substrate, and then rotates the blade in the opposite direction to move the rotary table to the origin (start position). ).

According to another embodiment of the first invention,
The square-cut glass substrate is fixed to the rotary table by a vacuum suction method.

According to a second aspect of the present invention, there is provided a work transfer mechanism for holding and transferring a work serving as a glass substrate, wherein the work transfer mechanism comprises: (a) a work supply in which square-cut glass is supplied as a work; A station, (b) a scribing station for forming an inner peripheral line and an outer peripheral line on the work, comprising: a (b) inner and outer peripheral cut line forming device; (c) an inner peripheral line heating device and a disc glass removing device; Heating the outer peripheral portion of the work on which the outer peripheral line is formed, and an outer peripheral portion removing heating station for removing the disc-shaped glass,
(D) an outer peripheral cullet discharging station provided with an outer peripheral cullet discharging device for removing the outer peripheral portion after the disk-shaped glass has been drawn; (e) an inner peripheral portion removing heating device and a central glass removing device A heating station for heating the work to be the disc-shaped glass, removing the center glass, and forming a donut-shaped glass; and (f) discharging the work to be the donut-shaped glass. A glass disc manufacturing apparatus characterized in that the work discharge station is circulated and moved in the order of (a) to (f) by the indexing tactile motion.

According to a second aspect of the present invention, the work transport mechanism includes a rotary drive unit, and an index table that is moved by an indexing tact, and is supported movably up and down with respect to the index table. A work transfer arm mounting table indexed and moved with the index table, six work transfer arms mounted at equal intervals in a circumferential direction with respect to the work transfer arm mounting table, and the work transfer arm mounting table; And a vertical drive unit for driving the work transfer arm in the vertical direction.

According to another embodiment of the second aspect of the present invention, the wafer is conveyed to the supply station, the scribe station, the outer peripheral portion removing heating station, the inner peripheral portion removing heating station, and the work discharge station. A receiving table for supporting the received work is arranged, and the work transfer arm is formed with a hole through which the receiving table can pass when the work transfer arm is moved in the up-down direction.

According to another embodiment of the second aspect of the present invention, a plurality of inwardly projecting work receiving claws are arranged in the hole of the work transfer arm.

According to another embodiment of the second aspect of the present invention, the notch is formed in the receiving table so that the work receiving claw can be lowered when the work transfer arm is lowered.

According to another embodiment of the second invention, a discharge plate having an opening is swingably disposed at the hole of the work transfer arm.

According to another embodiment of the second aspect of the present invention, the inner and outer peripheral cut line forming apparatus provided in the scribe station includes: a rotary table as the receiving table, which sucks and fixes a work; Means for rotating and driving the table, a cutting tool which is in contact with the glass surface of the work suction-fixed to the rotary table with a predetermined pressing force,
And a pressing mechanism for applying a predetermined pressing force to the blade.

According to another embodiment of the second aspect of the present invention, the outer peripheral cullet discharging device provided at the outer peripheral cullet discharging station swings the discharge plate to transfer the outer peripheral cullet to the work transfer. Discharge from the arm.

[0032]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a method and an apparatus for manufacturing a glass disk according to the present invention will be described in more detail with reference to the drawings.

In the method for producing a glass disk according to the present invention, a square-cut glass substrate is fixed to a rotary table by, for example, a vacuum suction method, and a cutting tool is pressed against the surface of the glass substrate with a predetermined pressing force. By rotating the inner circumference and / or
Alternatively, an outer peripheral line is formed.

That is, according to the method for producing a glass disk of the present invention, since the glass substrate is very lightweight, the rotary table can be rotated at a high speed without any adverse effect due to centrifugal force or the like. . Further, as will be described later, according to the present invention, a servomotor is employed as a rotation driving means of the rotary table, and drive control is performed by NC control, so that the inner peripheral line and the outer peripheral line, that is, the cut line can be formed at high speed. It became possible to process.

Further, as described above, when the start and end points of the cut line slightly differ from each other when forming the inner and outer cut lines, the glass substrate is not cut into a disk shape. In addition, cracks occur from the position, which causes defective products, and it is very difficult to manufacture a highly accurate glass disk.

In the present invention, a servomotor is employed as a rotation driving means of the rotary table, and control is performed by NC control, thereby achieving high-precision positioning in which the start point position and the end point position of the cut line approach zero as much as possible.

Since the positioning accuracy is improved by the NC control, the rotation speed of the rotary table is increased, the non-defective product rate is greatly improved, and the cycle time is reduced by 75% as compared with the conventional case. I was able to.

FIG. 1 is a plan view schematically showing the entire structure of a glass disk manufacturing apparatus 1 according to the present invention.

The glass disk manufacturing apparatus 1 of the present invention employs an index system as shown in FIG. 1 to automatically supply a glass substrate having a square plate shape in order to minimize the time required for processing the glass disk. An integrated production system of processing, discharging, and alignment. According to the present invention, the processing capacity is increased about four times as compared with the conventional processing method and transfer method divided for each process, the product accuracy can be greatly improved, and the non-defective product rate is 95%. It is now possible to significantly improve the above.

Overall Configuration The apparatus for manufacturing a glass disk according to the present invention comprises, as shown in FIG.
(1) Work stocker 11 and supply automatic hand 12
Is provided adjacent to the work supply station 10,
(2) Scribe station 20 provided with inner / outer perimeter cut line forming device 21;
And an outer peripheral punching heating station 30 provided with a disk glass removing device 31A and (4) an outer peripheral cullet discharging device 41
Outer peripheral cullet discharge station 40 provided with (5)
Inner Peripheral Part Heating Device 51 and Central Part Glass Removing Device 51
And (6) a work discharge station 60 provided adjacently with a discharge automatic hand 61 and an alignment conveyor 62.

The schematic operation of the glass disc manufacturing apparatus 1 of the present invention is as shown in a flow chart of FIG. 2, in which a square-cut glass material (glass substrate) is supplied from a work stocker 11 to a supply station as a work by an automatic hand 12. 10 is supplied. The work at the supply station 10 is then transferred to the scribe station 20, where the inner and outer cut lines are formed.

The outer peripheral portion of the work on which the inner and outer peripheral cut lines are formed is heated at the outer peripheral removing heating station 30, and the outer peripheral cullet (the outer peripheral glass) is discharged at the cullet discharging station 40. Then, the work
The inner peripheral portion is heated at the inner peripheral portion removal heating station 50, and the inner peripheral cullet (central glass) is discharged.

The doughnut-shaped glass substrate, ie, the glass disk, obtained in the above process is loaded on the work discharge station 6.
0 and is discharged to an alignment conveyor 62 by a discharge automatic hand 61 and aligned.

[0044] the workpiece transfer mechanism shown in FIGS. 3 and 4 show an embodiment of a workpiece transport device 2 with the glass disc manufacturing apparatus 1 of the present invention. The work transport mechanism 2 determines the work supplied to the work supply station 10 and drives each of the stations 2 by the tact drive.
It is conveyed to 0, 30, 40, 50, 60.

According to the present embodiment, the work transfer mechanism 2
An index table 3 having a linear cylinder and a rack and pinion as a rotation driving means is provided. On the index table 3, a work transfer arm mounting table 5 supported by a slider 4 mounted on the index table 3 to be vertically movable is arranged. The work transfer arm mounting table 5 is provided with a table vertical cylinder 6 installed at the center of the rotating portion of the index table 3.
Can be moved up and down.

According to the present embodiment, the work transfer arm mounting table 5 is provided with work transfer arms 7 at six positions equally dividing the outer periphery into six parts. The work transfer arm 7 performs a tact motion for indexing the work transfer arm 7 into six equal parts by the three work transfer arm mounting table index bars 4 provided in.

In this embodiment, the vertical movement position of the work transfer arm mounting table 5 is determined by the confirmation slide bar 8 and the sensors 8A and 8B of the work transfer arm mounting table 5, that is, lowered by the sensor 8A when ascending. At the time, confirmation is made by the sensor 8B.

Each of the stations 20, 30, 50, and 60 except the outer peripheral cullet discharge station 40 is provided with a jig and a pedestal. Therefore, in order to perform the indexing tact movement of the work transfer arm 7, The work transfer arm mounting table 5 and the work transfer arm 7 are raised by the table up-and-down cylinder 6 as shown by a two-dot chain line in FIG. 4, and as shown in FIG. , 22 and the like, and the work transfer arm 7 is missed, an indexing tact motion for six equal parts is performed.

The jigs and cradles provided at each station will be described together with the description of each station.

When the indexing tact movement of the work transfer arm table 5 is completed, the work transfer arm mounting table 5 is lowered, and the work transferred by each work transfer arm 7 is set on a jig and a receiving table of each station. You.

When the process is completed in each station, the work transfer arm table 5 and the work transfer arm 7 move up and are transferred to the next station together with the work placed on the work transfer arm 7 to be transferred to each work. In response, predetermined processing is started.

At each station, when the work of processing one work is completed, the same work is repeated for the next work.

Therefore, according to the index system of the present invention, since the work is performed endlessly as compared with the transfer system, no waste of time occurs and the cycle time can be reduced.

Next, each working device attached to each station will be described.

1. Square-cut glass material stocker and transfer device As shown in FIG. 1, the supply station 10 is provided with a work stocker 11 and a transfer device 12 that store a square-cut glass material. 4 shows the supply station 10, and the right side of FIG.
Is shown.

In this embodiment, the stocker 11 has a capacity to store 300 pieces of the glass material which has been cut.
The sheets are conveyed one by one to the supply station 10 by the conveyance device, that is, the auto band 12 for conveyance. At this time, the work transfer arm mounting table 5 and the work transfer arm 7
Is in a lowered position, and is placed on an upper portion of a cradle 13 provided in the supply station 10. The work G is positioned by positioning pins provided on the work transfer arm 7, as shown in FIG.

Referring to FIGS. 5 and 6, the work stocker 11 and the transport device 12 will be described in more detail.

In this embodiment, a square-cut glass material, that is,
Two work stockers 11 storing the work G are installed in parallel. The work G stored in the work stockers 11A and 11B is one of the work stockers 11A.
Are lifted one by one by the work lifting device 111. The work G stops at the raised position.

On the other hand, the suction pad 113 is lowered by urging the upper and lower cylinders 112 provided on the transfer auto band which is the work transfer device 12, and the work stocker 1 is moved downward.
The uppermost work G in 1A is vacuum-sucked.

At this time, since the next work G may be sucked on the lower surface of the sucked work G, the air blow nozzle 11 arranged adjacent to the suction pad 113 may be used.
Air is blown out from the work 4, and if another work G is sucked on the lower surface of the work G sucked by the suction pad 113, the other work G is separated. In some cases, paper is sandwiched between the two works so that the adjacent works G do not attract each other. In this case, the air blow nozzle 114 also has the function of blowing off the paper.

The work G sucked by the suction pad 113 as described above is transferred onto the work transfer arm 7 by the work transfer left and right cylinders 115. When the pad vertical cylinder 112 is actuated when the predetermined position on the work transfer arm 7 is reached, the work G descends, is released from the suction pad 113 and is set on the work transfer arm 7.

The suction pad 113 having released the work G rises and is moved by the left and right work transfer cylinders 115 to a position above the work stocker 11A. Subsequently, the above operation is repeated. In the present embodiment, a rising end sensor 116A and a falling end sensor 116B are disposed adjacent to the work lifting device 111, and the work stocker 11 is detected by detecting the operating state of the work lifting device 111.
It is detected whether the work G in A is empty.

Therefore, when it is detected that the supply of all the work G in the stocker 11A has been completed, the other stocker 11B automatically moves to the work supply position where the work lifting device 111 is installed, and G supply is started. In the empty work stocker 11A, the work G is stored again by the operator.

FIG. 7 is a plan view of the work transfer arm 7 according to the present embodiment. As can be better understood with reference to FIG. 4 as well, the work transfer arm 7 is a substantially rectangular flat plate, and a pedestal provided at each station can penetrate, for example, a pedestal 13 of a supply station. Hole 7
A, the work transfer arm table 5 has a mounting portion 7
It is attached by bolting using a bolt hole 7C provided in B. In addition, positioning pins 7D are implanted at four locations protruding upward around the hole 7A.

As will be described in detail later, an outer peripheral cullet discharge plate 9 is attached to the work transfer arm 7 so as to be swingable. The outer cullet discharge plate 9 has a hole 7A (FIG. 7) slightly larger than the work to be processed. Fall down. Only the outer cullet from which the disc glass has fallen remains on the discharge plate 9 and the next station 4
Emitted at 0. Further, when manufacturing multiple models, multiple models can be manufactured by replacing only the outer peripheral cullet discharge plate 9. The hole 9A in FIG. 7 is a diagram illustrating a state in which a work smaller than the hole 7A is manufactured.

In this embodiment, as described above, two storage stockers 11 (11A and 11B) are installed in parallel, and when the transfer of one glass material is completed, another storage stocker 11 (11A, 11B) is provided. Moves to the supply position, and supplies the work G onto the work transfer arm 7.

2. Inner / Outer Peripheral Cut Line Forming Apparatus (Scribe Apparatus) The scribe station 20 is provided with an inner / outer perimeter cut line forming apparatus (scribe apparatus) 21 as shown in FIGS.

In this embodiment, the scribing device 21 has a glass suction table 22 as a work receiving table, and this glass suction table 22 is driven to rotate by an NC servo drive motor 23 as a driving means.

In FIG. 4, the work G on the receiving table 13 of the supply station 10 is supported by the work receiving claws 7E of the work transfer arm 7 by raising the work transfer arm 7, and then the work transfer arm mounting table is set. The workpiece is conveyed to the scribe station 20 by indexing and driving the index 5.

As shown in FIG. 8 (and FIG. 4), the glass plate material, ie, the work G, which has been conveyed to the scribe station 20 by the work transfer arm 7, is provided with the work transfer arm mounting table 5 and the work Transfer arm 7
Is lowered, is placed on the glass suction table 22, and is fixed to the glass suction table, that is, the rotary table 22, by a vacuum suction method. When the rotary table 22 is rotated by the NC servo drive motor 23, the work, that is, the square plate glass material G is also rotated.

The scribing device 21 includes a rotary table 22
Is provided above the cutting tool 24 (24A, 24B).
25B) by pressing against the work G in FIG.
As shown in (1), inner and outer cut lines S1, S2 are formed.

That is, according to the present invention, the turntable 22 can be rotated at a high speed because the glass substrate G as the work is very lightweight. As described above, the rotary table 22 can be driven by NC control by employing the servo motor 23 as a rotation driving unit.
The inner and outer cut lines S1 and S2 can be formed at high speed.

When the start and end points of the cut lines S1 and S2 slightly differ from the end points of the cut lines S1 and S2 when the inner and outer cut lines S1 and S2 are formed, they are cut into a disk shape. In addition, cracks are generated from that position, causing defective products, and it is very difficult to manufacture a highly accurate glass disk. According to the present invention, the start point position and the end point position of the cut lines S1 and S2 can be approached to 0 as much as possible, and a highly accurate glass disk can be manufactured at a high speed.

Next, an embodiment of the scribe device 21 will be described.

In this embodiment, the scribe device 21 has a gantry 26 installed adjacent to the glass suction table 22. An upper and lower table 27 is slidably provided on a vertical slide surface 26A of the gantry 26 on a side facing the glass suction table 22. The vertical table 27 is driven in the vertical direction by a table vertical cylinder 29 fixed to the upper support plate 28 of the gantry 26.

On the surface of the upper and lower table 27 on the side where the rotary table 22 is located, that is, on the front surface 27A, the outer and inner blade holding tables 32 slidable in the left-right direction.
A and 32B are slidably mounted. These outer and inner cutting tool holding tables 32A and 32B are normally fixedly held at predetermined positions determined by the dimensions of the work forming the cut lines S1 and S2. Further, the outer and inner cutting tool holding tables 32A, 3
On the front surface of 2B, a pressing shaft holder 33A for the outer circumference and a pressing shaft holder 33B for the inner circumference are provided with sliding portions 34A, 34B, respectively.
Attached through.

At the lower end of the outer peripheral pressure shaft holder 33A, an outer peripheral pressure shaft 35A is provided.
An inner peripheral pressure shaft 35B is attached to 3B. Outer circumference pressing shaft 3
5A is provided with an outer peripheral tool holder 36A, and an outer peripheral tool 24A is attached to a lower end thereof. An inner peripheral tool holder 36B is provided on the inner peripheral pressing shaft 35B, and the inner peripheral cutter 24B is attached to a lower end thereof. As the cutting tools 24A and 24B, a diamond cutter or a carbide cutter is usually used.

By driving the table up-and-down cylinder 29 in the above configuration, the height positions of the blades 24A and 24B with respect to the work G held on the glass suction table 22 are adjusted, and the blade tool as a pressing mechanism is adjusted. With the pressure cylinders 25A and 25B, the blade 2
4A and 24B are pressed against the work glass surface.

In order to manufacture high-precision products, as described above, the pressing mechanisms 25A and 25B that press the blades 24A and 24B against the glass surface to form cut lines are important.

That is, as shown in detail in FIGS. 11 and 12, the blade holders 36A, 36B and the blade tools 24A, 24A,
The sliding parts 34A, 34B of the pressure shaft holders 33A, 33B holding the 4B are cut lines S
1, a uniform pressing force is always required during one rotation forming S2. Therefore, the pressing shaft holder sliding portions 34A, 34B
It is desirable that the frictional resistance is small and the pressing pressure is evenly applied. Pressing shaft holder sliding part 34A, 34B
If the frictional resistance varies and the pressing pressure against the surface of the glass plate becomes non-uniform, the depth of the groove at the time of forming the cut line becomes non-uniform, which affects the product defect and accuracy.

FIGS. 14 to 18 show the pressing shaft holder 33A,
Another embodiment of the sliding member 33B and the sliding portions 34A and 34B is shown.

In the embodiment shown in FIGS. 14 and 15, the sliding portions 34A and 34B of the pressure shaft holders 33A and 33B adopt a linear ball slide system, and
A mechanism for reducing the frictional resistance of 4A and 34B was adopted.

FIGS. 16 to 18 show an embodiment adopting an air slide system by air pressure. In this embodiment, the frictional resistance of the sliding portions 34A and 34B becomes smaller, the depth of the groove during one rotation of the cut line becomes completely uniform, and high accuracy can be maintained even when a thermal stress is applied. ,
It is possible to achieve high-precision products and a reduction in the defective rate.

Next, referring to FIG. 19, the operation of the inner / outer peripheral cut line forming apparatus 21 according to the present invention will be described in more detail.

As understood from FIGS. 8 to 10, the work G held on the work transfer arm 7 is moved from the supply station 10 to the scribe station 20 by the indexing tact movement by the index table 3.
Transported to

When the work transfer mounting table 5 is lowered at the scribe station 20, the hole 7 A of the work transfer arm 7 is fitted to the rotary table 22 of the scribe station 20 and the work transfer arm 7 is lowered. The work G carried on the work transfer arm 7 is fixed to the rotary table 22 by suction.

Next, the table vertical cylinder 29 of the scribe device 21 is operated, and the vertical table 27 is lowered. The lowering position of the upper and lower tables 27 is determined by a dead stopper (not shown). Thereby, the cutting tool 2
4A and 24B abut on the work glass surface at a predetermined pressure.

Subsequently, the blade pressing cylinder 25A,
25B is operated to press the cutting tools 24A and 24B against the glass surface with a predetermined pressing force. In this embodiment, the amount of pressurization at this time is the blade pressurizing cylinder 25A, 25B
Is operated to set the pressing time for pressing the glass surface to a predetermined value. In the present embodiment, the pressing force is set to 0.
It was 6 kgf to 1 kgf.

When the blade tools 24A, 24B press the glass surface at a predetermined pressure by operating the blade pressing cylinders 25A, 25B, the NC servo drive motor 23 is urged to rotate the rotary table. 22 is rotated. As the servo motor used in the present example, a product name: “AC servo actuator” manufactured by Harmonic Drive Systems Co., Ltd. having a resolution of 75000 pulses / 360 ° was used. The servomotor 23 was first rotated 360 degrees in one direction and stopped. Thereby, cut lines S1 and S2 (FIG. 13) on the inner and outer circumferences are formed on the work glass surface. In this embodiment, the rotation speed of the work is 50 to 80.
rpm.

Thereafter, the table up / down cylinder 29 is operated to raise the up / down table 27, and the blade tools 24A,
After the 4B is separated from the work glass surface, the servomotor 23 is rotated in the reverse direction to return the turntable 22 to the origin (start position).

Then, the work transfer arm 7 is raised,
The workpiece on which the cut line is formed is received from the rotary table 22, indexed by the index table 3, and moved to the next station, that is, the outer peripheral heating station 30.

3. Outer periphery heating device and disk glass removal device Inner / outer periphery cut line S at scribe station 20
As described above and as shown in FIG. 8, by moving the work mounting table 5 upward, the outer periphery provided on the work transfer arm 7 is It is carried on the cullet discharge plate 9 and positioned by the positioning pins, conveyed, and conveyed to the heating station 30 for removing the outer peripheral portion.

As can be understood with reference to FIGS. 3 and 20 to 22, the cylindrical upper portion of the cylindrical work receiving table 42 provided in the outer peripheral punching and heating station 30 is evenly distributed in the circumferential direction. Notch 43 at a predetermined width in the vertical direction at the place
And a disk glass receiving claw 7E formed in the hole 7A of the work transfer arm 7 and protruding inward in the radial direction.
Can be inserted from above.

Therefore, the heating station 30 for removing the outer peripheral portion
When the work transfer arm mounting table 5 is lowered after the indexing tact motion, the work G carried and transferred by the work transfer arm 7 as shown in FIG.
Is set on the work receiving table 42 as shown in FIG.

On the other hand, the outer peripheral punching heating device 31 is disposed above the receiving table 42 of the outer peripheral punching heating station 30, and the work on which the inner and outer peripheral cut lines S1 and S2 are formed, that is, the square-cut plate glass When G is set on the upper end of the cradle 42 of the outer peripheral punching heating station 30, the outer peripheral punching heating device 31 comes into contact with the workpiece G from above and comes into contact with the work G, whereby the square plate glass G on which the cut line is formed is formed. Is heated. Thereby, the outer peripheral cut line S1 generates a cut line from the front surface portion of the glass to the opposite surface (back surface) (FIG. 21).

Next, the push rod 31A descends from the center of the outer peripheral portion heating device 31, and presses the center of the work, whereby the disc-shaped glass G1 is pressed as shown in FIG.
It falls to the position of the receiving claw 7E inside the receiving table 42. The remaining square glass (outer peripheral cullet) of the cut outer peripheral portion remains supported by the upper end of the receiving table 42 as it is (FIG. 23). FIG. 23 shows a square-cut outer peripheral cullet G2 and a disc-shaped glass G1.

4. Outer peripheral cullet discharging device Square-cut glass G at outer peripheral punching heating station 30
When the disk-shaped glass G1 is removed from the workpiece, the work transfer arm 7 moves up, the disk-shaped glass G1 is supported by the receiving claw 7E, the square outer cullet G2 is supported by the outer cullet discharge plate 9, and both of them are held. It is lifted upward from the cradle 42 of the outer peripheral heating station 30.

Next, the index transfer movement of the index table 3 causes the work transfer arm 7 carrying the square outer cullet G2 and the disc-shaped glass G1 to move to the next outer cullet discharge station 40.

As can be understood with reference to FIG.
Is mounted so as to swing upward. That is, the radially outer end (the left end in FIG. 24) of the outer peripheral cullet discharge plate 9 is slidably supported upward on the rotation support shaft 9A. The outer end is a support piece 9B extending below the rotation support shaft 9A.
Are provided integrally, and a roller 9C is attached to a lower end thereof.

As shown in FIG. 24, an outer peripheral cullet discharging device 41 is provided at the outer peripheral cullet discharging station 40.
Is arranged. Outer cullet discharge station 4
In No. 0, a cradle or the like provided in another station is not installed.

The outer peripheral cullet discharging device 41 has a discharging plate flip-up cylinder 45 as a driving means, and an operating piece 46 is provided on a rod 45A of the cylinder 45 so as to engage with the roller 9C.

Accordingly, by driving the discharge plate flip-up cylinder 45, the operating piece 46 is engaged with the roller 9C, and the discharge plate 9 is swung as shown by a two-dot chain line in FIG. As a result, the outer cullet G2 is flipped up by the outer cullet discharge plate 9 and discharged outside the machine.

Subsequently, the discharge plate flip-up cylinder 45 is driven to return the discharge plate 9 to the original position, and the disc-shaped glass G1 pulled out is lifted by the work transfer arm 7, and While being held by the disk receiving claw 7E, the indexing table performs an indexing tact movement and is conveyed to the inner peripheral portion removing heating station 50 in the next process.

5. Inner Peripheral Punching Heating Device and Inner Peripheral Punching Device The disc-shaped glass G1 carried by the disc-shaped glass receiving claw 7E of the work transfer arm 7 and conveyed to the heating station 50 is, as shown in FIG. Work transfer arm 7
Is lowered, so that the inner peripheral portion removing heating station 5
It is placed on the upper end of the cylindrical portion 52A of the receiving base 52 provided at the position 0. The outer diameter of the cylindrical portion 52A is smaller than the inner diameter formed by each disk-shaped glass receiving claw 7E that is smaller than the outer diameter of the disk-shaped glass.

On the other hand, above the receiving table 52 of the inner peripheral punching heating station 50, an inner peripheral punching heating device 51 is disposed, and as shown in FIG. 25, a disc-shaped inner peripheral cutting line S2 is formed. When the glass G1 is set on the pedestal 52, the inner-peripheral-portion heating device 51 approaches and comes into contact with the work from above, thereby heating the disc-shaped glass G1 on which the cut line S2 is formed. Thus, the cut line S2 generates a cut line from the surface of the glass to the opposite surface (back side).

Next, the push rod 51A descends from the central portion of the inner peripheral heating device 51 and presses the central portion of the work, whereby the central portion glass G3 falls off and the doughnut-shaped glass, that is, the glass disk G0 Is manufactured (FIG. 2).
6).

The dropped central glass G3 is dropped to the lower part of the machine and discharged to the outside. By raising the work transfer arm 7, the donut-shaped glass disk is carried by the disk glass receiving claw 7E and transferred to the work discharge station 60 in the next step.

6. Ejection and alignment device for glass disk The donut-shaped glass disk G0 conveyed to the work discharge station 60 by the disk glass receiving claw 7E of the work conveyance arm 7 by the indexing tact movement of the index table is moved by the work conveyance arm 7. By descending, it is placed on the work receiving table 63 of the discharge station 60.

At the discharge station 60, as shown in FIGS. 27 and 28, a disk glass discharging device 61 is disposed. When the glass disk G0 is placed on the work receiving base 63, at the same time, the discharge arm 64 of the disk glass discharging device 61 is lowered, and the vacuum finger 65 moves the glass disk G0 placed on the receiving base 63. Hold by suction.
The discharge arm 64 moves up to the position of the alignment cassette 66 on the alignment conveyor 62A, and is stored in the alignment cassette 66.

The alignment cassette 66 includes a glass disk G0.
Can hold 25 sheets, and when one sheet is stored, the conveyor 62A feeds it one pitch.
0 is full of 25 sheets, and is moved to the leading end by the conveyor 62A, and at the same time, an empty cassette is prepared, and the next glass disk G0 is automatically stored.

The removal of a full cassette and the preparation of an empty cassette are performed by an operator.

That is, as shown in FIG. 28, when the full cassette 66 is moved to the end of the conveyor 62A and stopped there, it is lifted by the automatic hand 68 and moved to the conveyor 62B by the left and right moving cylinder 69. You. Further, it is moved to the tip by the conveyor 62B, and is discharged by the operator when it stops.

Further, according to the present invention, the servo motor 67 determines the stop position after the scribing of the inner and outer circumferences is completed and the rotary table reversely rotates so that the state of the start point position and the end point position of the cut line can be inspected. When the control is performed and the glass disk is stored in the cassette, the start position and the end position P
Comes above the cassette 66 to facilitate inspection.

Instead of the cassette storage system described in the present embodiment, a continuous flow system using a conveyor may be used to incorporate continuous processes up to the next process such as cleaning.

[0115]

As described above, according to the method for manufacturing a glass disk of the present invention, the glass substrate having the square-cut plate is fixed to the rotating table, and the cutting tool is pressed against the surface of the glass substrate with a predetermined pressing force to rotate the glass substrate. By rotating the table, the inner circumference and / or
Alternatively, the glass disc manufacturing apparatus of the present invention, which is configured to form an outer peripheral line and is capable of suitably performing such a manufacturing method, includes a work transfer mechanism that holds and transfers a work that is a glass substrate. The work transfer mechanism comprises: (a) a work supply station to which the square-cut glass is supplied as a work; and (b) a scribing station for forming an inner and outer circumferential line on the work, the apparatus having an inner and outer cut line forming device. (C) an outer peripheral portion heating station for heating the outer peripheral portion of the work on which the inner peripheral line and the outer peripheral line are formed, and for removing the disk-shaped glass; A) an outer peripheral cullet discharging station provided with an outer peripheral cullet discharging device for removing the outer peripheral portion after the disk-shaped glass has been drawn off; A lathing machine, for heating the work to be the disc-shaped glass, removing the central glass, and forming a doughnut-shaped glass at an inner peripheral portion heating station; and (f) the donut-shaped glass. A work discharge station for discharging the work, the above (a)
(F) circulates by indexing tactile motion in the order of (f). (1) A high-speed and high-precision glass disk can be manufactured. (2) Set the start point and end point of the cut line to 0
, It is possible to perform high-precision positioning, and to achieve a significant improvement in the yield rate and an improvement in productivity. (3) According to the manufacturing apparatus of the present invention, in particular, the stop position after the rotation of the rotary table is reversed by the end of the scribing on the inner and outer circumferences is controlled by the servomotor so that the glass disk can be inspected. When stored in a cassette, the start point position and the end point position can be located above the cassette so that inspection can be easily performed.

[Brief description of the drawings]

FIG. 1 is a plan view showing a schematic configuration of a glass disk manufacturing apparatus according to the present invention.

FIG. 2 is a flowchart illustrating a schematic operation mode of the glass disc manufacturing apparatus according to the present invention.

FIG. 3 is a plan view showing an embodiment of a work transfer mechanism.

FIG. 4 is a cross-sectional view of the glass disk manufacturing apparatus according to the present invention,
2 shows a configuration of a supply station and a scribe station.

FIG. 5 is a side view showing a work stocker and a transport device.

FIG. 6 is a front view showing a work stocker and a transport device.

FIG. 7 is a plan view of a work transfer arm.

FIG. 8 is a sectional view of a glass disk manufacturing apparatus according to the present invention,
2 shows a configuration of a scribe station.

FIG. 9 is a front view of the inner and outer peripheral cut line forming apparatus.

FIG. 10 is a side view of the inner and outer peripheral cut line forming apparatus.

FIG. 11 is a front view of a pressing shaft holder sliding portion.

FIG. 12 is a side view of the pressing shaft holder sliding portion of FIG. 11;

FIG. 13 is a plan view of a work set on a rotary table for explaining a cut line forming method.

FIG. 14 is a front view showing another embodiment of the sliding portion of the pressing shaft holder.

FIG. 15 is a side view of the pressing shaft holder sliding portion of FIG.

FIG. 16 is a front view showing another embodiment of the sliding portion of the pressing shaft holder.

FIG. 17 is a side view of the pressing shaft holder sliding portion of FIG.

FIG. 18 is a sectional view taken along line AA of FIG. 16;

FIG. 19 is a flowchart for explaining a method of forming inner and outer peripheral cut lines on a glass substrate.

FIG. 20 is a cross-sectional view of the apparatus for manufacturing a glass disk according to the present invention, showing the configuration of an outer peripheral portion heating station.

FIG. 21 is a cross-sectional view of the apparatus for manufacturing a glass disk according to the present invention, illustrating a configuration and an operation mode of an outer peripheral portion heating station.

FIG. 22 is a cross-sectional view of the apparatus for manufacturing a glass disk according to the present invention, illustrating the configuration and operation mode of the outer peripheral portion heating station.

FIG. 23 is a plan view illustrating a method for manufacturing a disc-shaped glass.

FIG. 24 is a cross-sectional view of the apparatus for manufacturing a glass disk according to the present invention, illustrating the configuration and operation of the outer peripheral cullet discharging station.

FIG. 25 is a cross-sectional view of the apparatus for manufacturing a glass disk according to the present invention, illustrating the configuration and operation mode of an inner peripheral punching heating station.

FIG. 26 is a plan view illustrating a method for manufacturing a glass disk.

FIG. 27 is a cross-sectional view of the apparatus for manufacturing a glass disk according to the present invention, illustrating a configuration and an operation mode of a work discharge station.

FIG. 28 is a view similar to FIG. 27, illustrating the configuration and operation of the work discharge station.

FIG. 29 is a diagram showing a schematic configuration of a conventional scribe device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Glass disc manufacturing apparatus 2 Work transfer mechanism 3 Index table 5 Work transfer arm mounting table 7 Work transfer arm 10 Supply station 20 Scribe station 21 Inner / outer perimeter cut line forming device (scribe device) 22 Rotary table 23 Rotary drive means (NC servo) Drive motor) 24 Cutting tool 30 Outer peripheral punching heating station 31 Outer peripheral punching heating device 40 Outer peripheral cullet discharging station 41 Outer peripheral cullet discharging device 50 Inner peripheral punching heating station 51 Inner peripheral punching heating device 60 Work discharging station

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Toshimitsu Okada 452 Oshidate, Inagi-shi, Tokyo Inside Shibaura Kakoki Seisakusho Co., Ltd. Reference) 4G015 FA03 FA06 FA09 FB01 FC02 FC05 FC11 FC14

Claims (13)

[Claims] 1. A square-cut glass substrate is fixed to a rotary table, a cutting tool is pressed against the surface of the glass substrate with a predetermined pressing force, and the rotary table is rotated to rotate the inner peripheral line and / or the rotary table.
Alternatively, a method for producing a glass disk, wherein an outer peripheral line is formed. 2. The method of manufacturing a glass disk according to claim 1, wherein a servomotor is employed as a rotation drive unit of the rotary table, and drive control is performed by NC control. 3. The method for producing a glass disk according to claim 1, wherein the starting point position and the ending point position of the inner and / or outer peripheral lines are brought close to zero as much as possible. 4. The servo motor first rotates the rotary table 360 ° in one direction, stops, and then
4. The glass substrate processing method according to claim 1, wherein the cutting tool is separated from the surface of the glass substrate and then rotated in the opposite direction to return the rotary table to the origin (start position). 5. The glass substrate processing method according to claim 1, wherein the square-cut glass substrate is fixed to the rotary table by a vacuum suction method. 6. A work transfer mechanism for holding and transferring a work serving as a glass substrate, wherein the work transfer mechanism comprises:
(A) a work supply station for supplying square-cut plate-shaped glass as a work, (b) a scribe station provided with an inner / outer circumference cut line forming device, and an inner and outer circumference line formed on the work, (c) an outer circumference An outer peripheral portion heating station for heating the outer peripheral portion of the work having the inner peripheral line and the outer peripheral line formed therein, and for extracting the disk-shaped glass, comprising: An outer peripheral cullet discharge station provided with an outer peripheral cullet discharge device for removing the outer peripheral portion after being removed,
(E) an inner peripheral portion heating device and a central portion glass removing device, wherein the work to be the disc-shaped glass is heated, the central portion glass is removed, and the inner peripheral portion removing heating is performed to form a donut-shaped glass. A glass circle characterized by circulating and moving a station (f) a work discharge station for discharging the work to be the donut-shaped glass in the order of (a) to (f) by a tact movement. Plate manufacturing equipment. 7. The work transfer mechanism includes a rotary drive unit, and an index table that performs index tact movement, and a work transfer arm that is supported to be vertically movable with respect to the index table and that performs index tact movement together with the index table. A mounting table, six work transfer arms mounted at equal intervals in a circumferential direction with respect to the work transfer arm mounting table, and an up-down drive for vertically driving the work transfer arm mounting table and the work transfer arm. 7. The glass disk manufacturing apparatus according to claim 6, further comprising: a driving unit. 8. A cradle for supporting a conveyed work is arranged at each of the supply station, the scribe station, the outer peripheral portion heating station, the inner peripheral portion heating station, and the work discharge station. The work transfer arm includes:
8. The glass disk manufacturing apparatus according to claim 7, wherein a hole portion through which the receiving table can pass when the work transfer arm is moved in a vertical direction is formed. 9. The glass disk manufacturing apparatus according to claim 7, wherein a plurality of inwardly projecting work receiving claws are arranged in the hole of the work transfer arm. 10. The notch formed in the receiving base so that the work receiving claw can be lowered when the work transfer arm is lowered.
Glass disc production equipment. 11. The glass disk according to claim 8, wherein a discharge plate having an opening is swingably disposed at the hole of the work transfer arm. manufacturing device. 12. An inner / outer circumference cut line forming apparatus provided in the scribe station, wherein: a rotary table serving as the receiving table for sucking and fixing a work; a unit for rotating and driving the rotary table; 12. A cutting tool, which is in contact with a glass surface of a suction-fixed work with a predetermined pressing force, and a pressing mechanism for applying a predetermined pressing force to the cutting tool.
The glass disk manufacturing apparatus according to any one of the above items. 13. The outer peripheral cullet discharging device provided at the outer peripheral cullet discharging station swings the discharge plate to discharge the outer peripheral cullet from the work transfer arm. Or 1
2. Glass disc production equipment.