JP2002058961A5 - - Google Patents

Download PDF

Info

Publication number
JP2002058961A5
JP2002058961A5 JP2000280932A JP2000280932A JP2002058961A5 JP 2002058961 A5 JP2002058961 A5 JP 2002058961A5 JP 2000280932 A JP2000280932 A JP 2000280932A JP 2000280932 A JP2000280932 A JP 2000280932A JP 2002058961 A5 JP2002058961 A5 JP 2002058961A5
Authority
JP
Japan
Prior art keywords
gas
pfc
cylinder
electromagnetic induction
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000280932A
Other languages
English (en)
Japanese (ja)
Other versions
JP3927359B2 (ja
JP2002058961A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000280932A priority Critical patent/JP3927359B2/ja
Priority claimed from JP2000280932A external-priority patent/JP3927359B2/ja
Priority to TW090122484A priority patent/TW505991B/zh
Publication of JP2002058961A publication Critical patent/JP2002058961A/ja
Publication of JP2002058961A5 publication Critical patent/JP2002058961A5/ja
Application granted granted Critical
Publication of JP3927359B2 publication Critical patent/JP3927359B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

JP2000280932A 2000-08-12 2000-08-12 排ガス処理装置 Expired - Lifetime JP3927359B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2000280932A JP3927359B2 (ja) 2000-08-12 2000-08-12 排ガス処理装置
TW090122484A TW505991B (en) 2000-08-12 2001-09-11 Exhaust gas treating equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000280932A JP3927359B2 (ja) 2000-08-12 2000-08-12 排ガス処理装置

Publications (3)

Publication Number Publication Date
JP2002058961A JP2002058961A (ja) 2002-02-26
JP2002058961A5 true JP2002058961A5 (zh) 2005-04-07
JP3927359B2 JP3927359B2 (ja) 2007-06-06

Family

ID=18765674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000280932A Expired - Lifetime JP3927359B2 (ja) 2000-08-12 2000-08-12 排ガス処理装置

Country Status (2)

Country Link
JP (1) JP3927359B2 (zh)
TW (1) TW505991B (zh)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3899404B2 (ja) * 2002-12-26 2007-03-28 国立大学法人東京海洋大学 排ガス中の微粒子除去装置
JP2006026614A (ja) * 2004-07-21 2006-02-02 Akiji Nishiwaki 排ガス処理方法および排ガス処理装置
KR100654922B1 (ko) 2006-01-26 2006-12-06 주식회사 코캣 반도체 제조공정으로부터 발생하는 배가스 처리장치 및방법
JP4926543B2 (ja) * 2006-05-24 2012-05-09 中国電力株式会社 歪測定装置
JP4550098B2 (ja) 2007-09-19 2010-09-22 国立大学法人東北大学 基板熱処理炉
KR101269415B1 (ko) 2010-10-26 2013-05-30 유니셈(주) 촉매를 이용한 ｌｅｄ 제조공정용 폐가스 처리장치
JP6209786B2 (ja) * 2013-09-06 2017-10-11 大陽日酸株式会社 排気ガス処理システム
CN109442436A (zh) * 2018-10-16 2019-03-08 常熟重型机械制造有限公司 一种低热值有机废液焚烧处理系统和方法
CN112915718B (zh) * 2021-01-25 2022-05-17 北京京仪自动化装备技术股份有限公司 半导体制程废气处理设备
CN114364073B (zh) * 2022-01-18 2023-08-08 襄阳市中正达机械有限公司 一种多行位感应加热头的数字高频加热设备
GB2620786A (en) * 2022-07-22 2024-01-24 Edwards Ltd Work coil for induction heated abatement apparatus

Similar Documents

Publication Publication Date Title
JP3280173B2 (ja) 排ガス処理装置
JP2022002845A (ja) オゾン破壊物質の蒸気プラズマアーク加水分解
JP2002058961A5 (zh)
JP3927359B2 (ja) 排ガス処理装置
CN105194978A (zh) 一种VOCs废气处理组合装置
WO2007102288A1 (ja) Ｈｃｄガスの除害方法とその装置
US7060235B2 (en) Method for processing perfluorocompounds exhaust
KR101903046B1 (ko) 폐가스로부터의 voc 제거 및 악취 개선 장치
TWI495829B (zh) Exhaust gas treatment device
TW201343240A (zh) 用於ＰＦＣｓ廢氣處理之渦流電漿反應器
TW592797B (en) Exhaust gas treatment process and treatment system
JP3217034B2 (ja) 過弗化物の処理方法及びその処理装置
CN113154416A (zh) 一种有机废气催化燃烧的测试装置及pid控制系统
JP2004160312A (ja) Ｐｆｃガス分解システム及びガス分解方法
JP2002153726A (ja) 排ガス処理装置
CN209415476U (zh) 过程气体分析系统废气净化装置
CN205055754U (zh) 一种VOCs废气处理组合装置
JPH01293120A (ja) 廃ガス処理方法
CN209876957U (zh) 小型集成化挥发性有机物催化氧化燃烧器
JP4491696B2 (ja) 排気ガス処理装置
JP2009034671A (ja) Ｐｆｃ処理装置及びｐｆｃ含有ガスの処理方法
JP2004278879A (ja) 排ガス燃焼処理装置
TW200412409A (en) Vortex-type reaction chamber toxic gas treatment device and method
JP6085203B2 (ja) 過弗化物の処理装置および過弗化物の処理方法
CN213272644U (zh) 一种综合废气处理设备