JP2002057196A - プローブ方法及びプローブ装置 - Google Patents

プローブ方法及びプローブ装置

Info

Publication number
JP2002057196A
JP2002057196A JP2000238654A JP2000238654A JP2002057196A JP 2002057196 A JP2002057196 A JP 2002057196A JP 2000238654 A JP2000238654 A JP 2000238654A JP 2000238654 A JP2000238654 A JP 2000238654A JP 2002057196 A JP2002057196 A JP 2002057196A
Authority
JP
Japan
Prior art keywords
stage
inspected
probing
chip
subject
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000238654A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002057196A5 (enExample
Inventor
Yoshinori Umetsu
良則 梅津
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PLUM FIVE CO Ltd
Original Assignee
PLUM FIVE CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PLUM FIVE CO Ltd filed Critical PLUM FIVE CO Ltd
Priority to JP2000238654A priority Critical patent/JP2002057196A/ja
Publication of JP2002057196A publication Critical patent/JP2002057196A/ja
Publication of JP2002057196A5 publication Critical patent/JP2002057196A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
JP2000238654A 2000-08-07 2000-08-07 プローブ方法及びプローブ装置 Pending JP2002057196A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000238654A JP2002057196A (ja) 2000-08-07 2000-08-07 プローブ方法及びプローブ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000238654A JP2002057196A (ja) 2000-08-07 2000-08-07 プローブ方法及びプローブ装置

Publications (2)

Publication Number Publication Date
JP2002057196A true JP2002057196A (ja) 2002-02-22
JP2002057196A5 JP2002057196A5 (enExample) 2007-09-20

Family

ID=18730324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000238654A Pending JP2002057196A (ja) 2000-08-07 2000-08-07 プローブ方法及びプローブ装置

Country Status (1)

Country Link
JP (1) JP2002057196A (enExample)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008522581A (ja) * 2004-12-01 2008-06-26 バイオ−ラッド ラボラトリーズ，インコーポレイティド リニアステッパモーターによる対象物の正確な位置決めのための方法と装置
JP2008311618A (ja) * 2007-05-15 2008-12-25 Tokyo Electron Ltd プローブ装置
JP2009147320A (ja) * 2007-11-21 2009-07-02 Horiba Ltd 検査装置
JP2010062237A (ja) * 2008-09-02 2010-03-18 Renesas Technology Corp 半導体集積回路装置の製造方法
KR101315563B1 (ko) 2009-03-31 2013-10-08 도쿄엘렉트론가부시키가이샤 콘택트 파라미터의 설정 방법 및 콘택트 파라미터의 설정용 프로그램을 기록한 컴퓨터 판독 가능한 기록 매체
CN113030691A (zh) * 2019-12-24 2021-06-25 芯恩（青岛）集成电路有限公司 芯片电性测试探针头对位方法、系统、存储介质及终端
CN113086238A (zh) * 2021-03-29 2021-07-09 中国航空制造技术研究院 一种基于基准孔孔位测量的自动制孔孔位在线修正方法
CN115090917A (zh) * 2022-08-25 2022-09-23 成都飞机工业（集团）有限责任公司 一种制孔方法、装置、存储介质及设备
CN115902327A (zh) * 2023-02-23 2023-04-04 长春光华微电子设备工程中心有限公司 一种探针台定位补偿的标定方法和探针台
WO2023134168A1 (zh) * 2022-01-14 2023-07-20 上海世禹精密机械有限公司 自动化焊球阵列封装植球检测系统
CN118644412A (zh) * 2024-07-02 2024-09-13 长春乙天科技有限公司 一种图像均衡的定标方法

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008522581A (ja) * 2004-12-01 2008-06-26 バイオ−ラッド ラボラトリーズ，インコーポレイティド リニアステッパモーターによる対象物の正確な位置決めのための方法と装置
JP2008311618A (ja) * 2007-05-15 2008-12-25 Tokyo Electron Ltd プローブ装置
JP2009147320A (ja) * 2007-11-21 2009-07-02 Horiba Ltd 検査装置
JP2010062237A (ja) * 2008-09-02 2010-03-18 Renesas Technology Corp 半導体集積回路装置の製造方法
KR101315563B1 (ko) 2009-03-31 2013-10-08 도쿄엘렉트론가부시키가이샤 콘택트 파라미터의 설정 방법 및 콘택트 파라미터의 설정용 프로그램을 기록한 컴퓨터 판독 가능한 기록 매체
CN113030691B (zh) * 2019-12-24 2022-07-19 芯恩（青岛）集成电路有限公司 芯片电性测试探针头对位方法、系统、存储介质及终端
CN113030691A (zh) * 2019-12-24 2021-06-25 芯恩（青岛）集成电路有限公司 芯片电性测试探针头对位方法、系统、存储介质及终端
CN113086238A (zh) * 2021-03-29 2021-07-09 中国航空制造技术研究院 一种基于基准孔孔位测量的自动制孔孔位在线修正方法
WO2023134168A1 (zh) * 2022-01-14 2023-07-20 上海世禹精密机械有限公司 自动化焊球阵列封装植球检测系统
CN115090917A (zh) * 2022-08-25 2022-09-23 成都飞机工业（集团）有限责任公司 一种制孔方法、装置、存储介质及设备
CN115090917B (zh) * 2022-08-25 2023-01-10 成都飞机工业（集团）有限责任公司 一种制孔方法、装置、存储介质及设备
CN115902327A (zh) * 2023-02-23 2023-04-04 长春光华微电子设备工程中心有限公司 一种探针台定位补偿的标定方法和探针台
CN118644412A (zh) * 2024-07-02 2024-09-13 长春乙天科技有限公司 一种图像均衡的定标方法
CN118644412B (zh) * 2024-07-02 2025-04-04 长春乙天科技有限公司 一种图像均衡的定标方法

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