JP2002057163A5 - - Google Patents

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Publication number
JP2002057163A5
JP2002057163A5 JP2001144035A JP2001144035A JP2002057163A5 JP 2002057163 A5 JP2002057163 A5 JP 2002057163A5 JP 2001144035 A JP2001144035 A JP 2001144035A JP 2001144035 A JP2001144035 A JP 2001144035A JP 2002057163 A5 JP2002057163 A5 JP 2002057163A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2001144035A
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Japanese (ja)
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JP2002057163A (ja
JP5276758B2 (ja
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Priority to JP2001144035A priority Critical patent/JP5276758B2/ja
Priority claimed from JP2001144035A external-priority patent/JP5276758B2/ja
Publication of JP2002057163A publication Critical patent/JP2002057163A/ja
Publication of JP2002057163A5 publication Critical patent/JP2002057163A5/ja
Application granted granted Critical
Publication of JP5276758B2 publication Critical patent/JP5276758B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001144035A 2000-05-13 2001-05-14 液晶表示装置の作製方法 Expired - Fee Related JP5276758B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001144035A JP5276758B2 (ja) 2000-05-13 2001-05-14 液晶表示装置の作製方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2000180549 2000-05-13
JP2000-180549 2000-05-13
JP2000180549 2000-05-13
JP2001144035A JP5276758B2 (ja) 2000-05-13 2001-05-14 液晶表示装置の作製方法

Publications (3)

Publication Number Publication Date
JP2002057163A JP2002057163A (ja) 2002-02-22
JP2002057163A5 true JP2002057163A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2008-05-22
JP5276758B2 JP5276758B2 (ja) 2013-08-28

Family

ID=26594038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001144035A Expired - Fee Related JP5276758B2 (ja) 2000-05-13 2001-05-14 液晶表示装置の作製方法

Country Status (1)

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JP (1) JP5276758B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3009438B2 (ja) * 1989-08-14 2000-02-14 株式会社日立製作所 液晶表示装置
JP3168648B2 (ja) * 1991-11-27 2001-05-21 カシオ計算機株式会社 薄膜トランジスタパネルの製造方法
JPH05206086A (ja) * 1992-01-27 1993-08-13 Fujitsu Ltd 薄膜のエッチング方法
JPH06244155A (ja) * 1993-02-19 1994-09-02 Sumitomo Metal Ind Ltd 半導体装置のメタル配線パターン形成方法
JP2940781B2 (ja) * 1993-11-30 1999-08-25 三洋電機株式会社 薄膜トランジスタの製造方法
JP3238020B2 (ja) * 1994-09-16 2001-12-10 株式会社東芝 アクティブマトリクス表示装置の製造方法
JPH09197436A (ja) * 1996-01-23 1997-07-31 Toshiba Corp アクティブマトリクス基板
JPH09288347A (ja) * 1996-02-20 1997-11-04 Ricoh Co Ltd ダミーパターン付きレチクルおよびこのレチクルを用いて製造された半導体装置
JPH09274313A (ja) * 1996-04-03 1997-10-21 Toshiba Corp レジストパターンの形成方法
JP3574270B2 (ja) * 1996-04-17 2004-10-06 三菱電機株式会社 Ａｌテーパドライエッチング方法
JP3693199B2 (ja) * 1996-07-10 2005-09-07 Ｊｓｒ株式会社 感放射線性樹脂組成物
JPH1056179A (ja) * 1996-08-08 1998-02-24 Hoshiden Philips Display Kk 薄膜デバイスの製造方法
JP2000002892A (ja) * 1998-04-17 2000-01-07 Toshiba Corp 液晶表示装置、マトリクスアレイ基板およびその製造方法
JP3883706B2 (ja) * 1998-07-31 2007-02-21 シャープ株式会社 エッチング方法、及び薄膜トランジスタマトリックス基板の製造方法
JP2000089477A (ja) * 1998-09-11 2000-03-31 Nec Corp レジストパターンの形成方法
JP2001339072A (ja) * 2000-03-15 2001-12-07 Advanced Display Inc 液晶表示装置

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